Huff, 2022 - Google Patents
Residual stresses in deposited thin-film material layers for micro-and nano-systems manufacturingHuff, 2022
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- 17476599624019076935
- Author
- Huff M
- Publication year
- Publication venue
- Micromachines
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This review paper covers a topic of significant importance in micro-and nano-systems development and manufacturing, specifically the residual stresses in deposited thin-film material layers and methods to control or mitigate their impact on device behavior. A …
- 230000035882 stress 0 title abstract description 561
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