Dezest et al., 2015 - Google Patents
Wafer-scale fabrication of self-actuated piezoelectric nanoelectromechanical resonators based on lead zirconate titanate (PZT)Dezest et al., 2015
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- 12673912925764078864
- Author
- Dezest D
- Thomas O
- Mathieu F
- Mazenq L
- Soyer C
- Costecalde J
- Remiens D
- Deü J
- Nicu L
- Publication year
- Publication venue
- Journal of Micromechanics and Microengineering
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Snippet
In this paper we report an unprecedented level of integration of self-actuated nanoelectromechanical system (NEMS) resonators based on a 150 nm thick lead zirconate titanate (PZT) thin film at the wafer-scale. A top-down approach combining ultraviolet (UV) …
- 229910052451 lead zirconate titanate 0 title abstract description 31
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