Nothing Special   »   [go: up one dir, main page]

Beeby et al., 2001 - Google Patents

Silicon micromechanical resonator with thick-film printed vibration excitation and detection mechanisms

Beeby et al., 2001

Document ID
16351642506095219417
Author
Beeby S
White N
Publication year
Publication venue
Sensors and Actuators A: Physical

External Links

Snippet

This paper presents details of the design, fabrication and testing of a micromechanical silicon beam resonator in which the vibrations are driven and detected by thick-film printed piezoelectric elements. This work has been carried out to demonstrate the potential for …
Continue reading at www.sciencedirect.com (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties, e.g. capacitance or reluctance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material

Similar Documents

Publication Publication Date Title
Olsson et al. Post-CMOS-compatible aluminum nitride resonant MEMS accelerometers
Wang et al. A MEMS piezoelectric in-plane resonant accelerometer based on aluminum nitride with two-stage microleverage mechanism
Wang et al. Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers
JP5543085B2 (en) Piezoresistive sensing resonant element manufactured using surface technology
Lei et al. MEMS-based thick film PZT vibrational energy harvester
Defay et al. PZT thin films integration for the realisation of a high sensitivity pressure microsensor based on a vibrating membrane
Yu et al. Lead zirconate titanate MEMS accelerometer using interdigitated electrodes
Zurn et al. Fabrication and structural characterization of a resonant frequency PZT microcantilever
CN107063839A (en) The mechanics parameter measuring method and device of multi-layer compound film structure
Wang et al. Microelectromechanical systems (MEMS) accelerometers using lead zirconate titanate thick films
Torah et al. Thick-film piezoceramics and devices
Shi et al. High sensitivity MEMS accelerometer using PZT-based four L-shaped beam structure
Riesch et al. A suspended plate viscosity sensor featuring in-plane vibration and piezoresistive readout
Hu et al. A novel trapezoidal ScAlN/AlN-based MEMS piezoelectric accelerometer
Piot et al. Optimization of resonant PZT MEMS mirrors by inverse design and electrode segmentation
Beeby et al. Silicon micromechanical resonator with thick-film printed vibration excitation and detection mechanisms
CN106932263A (en) Two-end fixed beam mechanics parameter measuring method and device based on resonant frequency
Duval et al. Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor
Hindrichsen et al. Triaxial MEMS accelerometer with screen printed PZT thick film
Beeby et al. Microprocessor implemented self-validation of thick-film PZT/silicon accelerometer
Gao et al. Micromachined microsensors for manufacturing
Campanella et al. High-frequency sensor technologies for inertial force detection based on thin-film bulk acoustic wave resonators (FBAR)
Zhang et al. Fabrication and evaluation of aluminum nitride based MEMS piezoelectric vibration sensors for large-amplitude vibration applications
Yenuganti et al. Piezoelectric microresonant pressure sensor using aluminum nitride
Beeby et al. Thick-film PZT-silicon micromechanical resonator