Tung et al., 2013 - Google Patents
A micromirror with CNTs hinge fabricated by the integration of CNTs film into a MEMS actuatorTung et al., 2013
View PDF- Document ID
- 1607467625799888034
- Author
- Tung B
- Dinh T
- Dao D
- Yamada T
- Hata K
- Sugiyama S
- et al.
- Publication year
- Publication venue
- Journal of Micromechanics and Microengineering
External Links
Snippet
This paper reports a robust fabrication process to integrate carbon nanotubes (CNTs) film into a micro electromechanical systems actuator by the design and fabrication of a silicon micromirror supported by CNTs hinges. Vertically aligned single wall carbon nanotubes …
- 239000002041 carbon nanotube 0 title abstract description 48
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANO-TECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE OR TREATMENT OF NANO-STRUCTURES
- B82Y30/00—Nano-technology for materials or surface science, e.g. nano-composites
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANO-TECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE OR TREATMENT OF NANO-STRUCTURES
- B82Y10/00—Nano-technology for information processing, storage or transmission, e.g. quantum computing or single electron logic
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