Micromirrors have recently emerged as an essential component in optical scanning
technology, attracting considerable attention from researchers. Their compact size and …

Progress in MEMS technology continuously stimulates new developments in the mechanical
structure of micro systems, such as, for example, the concept of so-called CSFH (conjugate …

We present a nanoelectromechanical system piezoresistive pressure sensor with annular
grooves on the circular diaphragm where silicon nanowires (SiNWs) are embedded as …

By leveraging ultrashort pulse laser and micro-electromechanical systems (MEMS)
technologies, we are developing a miniaturized intraoral dental robotic device that clamps …

Flexible multifunctional electronic devices are of high interest for a wide range of
applications including thermal therapy and respiratory devices in medical treatment, safety …

Recent advances in assembling Carbon NanoTubes (CNTs) into macrostructures with
outstanding properties, such as high tensile strength, high conductivity and porosity, and …

This letter reports on the impact of compressive pressure on the electrical properties of
carbon nanotube (CNT) yarns fabricated by dry Web-spinning and heat-treatment …

A micro electromechanical system piezoresistive pressure sensor with annularly grooved
membrane combined with rood beam has been proposed for low pressure measurements …

Squeeze film damping is an important factor in the dynamic stability of the bi‐axial
microelectromechanic systems. The purpose of this article is to provide an analytical solution …

We report a highly stable electrical conductance of a compact and well-oriented carbon
nanotube yarn under tensile strain. The gauge factor of the yarn was found to be extremely …