Park et al., 2016 - Google Patents
Thickness-controlled multilayer hexagonal boron nitride film prepared by plasma-enhanced chemical vapor depositionPark et al., 2016
- Document ID
- 14935428603537381905
- Author
- Park J
- Choi S
- Zhao J
- Song S
- Yang W
- Kim S
- Kim K
- Lee Y
- Publication year
- Publication venue
- Current Applied Physics
External Links
Snippet
Abstract Two-dimensional (2D) hexagonal boron nitride (h-BN) is a thin insulating material that can be used to enhance the electrical and optical properties of other 2D materials when used as a substrate or a capping layer, owing to its absence of dangling bonds on the …
- 238000000623 plasma-assisted chemical vapour deposition 0 title abstract description 13
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- C01B31/00—Carbon; Compounds thereof
- C01B31/02—Preparation of carbon; Purification; After-treatment
- C01B31/04—Graphite, including modified graphite, e.g. graphitic oxides, intercalated graphite, expanded graphite or graphene
- C01B31/0438—Graphene
- C01B31/0446—Preparation
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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