Voicu et al., 2014 - Google Patents
Design and FEM analysis of a new micromachined electro-thermally actuated micromanipulatorVoicu et al., 2014
- Document ID
- 1425012368157584801
- Author
- Voicu R
- Műller R
- Publication year
- Publication venue
- Analog Integrated Circuits and Signal Processing
External Links
Snippet
This paper presents the designs for a new configuration of an electro-thermally actuated SU- 8 polymeric micromanipulator for biological and MEMS components manipulations. Two models are proposed with the following dimensions of the arms: 400 and respectively 800 …
- 238000004458 analytical method 0 title description 5
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