Alkharabsheh et al., 2012 - Google Patents
Dynamics of MEMS arches of flexible supportsAlkharabsheh et al., 2012
- Document ID
- 11910634071973450586
- Author
- Alkharabsheh S
- Younis M
- Publication year
- Publication venue
- Journal of Microelectromechanical Systems
External Links
Snippet
We present an investigation into the dynamics of microelectromechanical systems (MEMS) arches when actuated electrically including the effect of their flexible supports. Using a shallow-arch model with rotational and transversal springs at its boundaries, a reduced …
- 230000004044 response 0 abstract description 29
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