Nothing Special   »   [go: up one dir, main page]

Daeichin et al., 2019 - Google Patents

Dynamic response of a tunable MEMS accelerometer based on repulsive force

Daeichin et al., 2019

View PDF
Document ID
4257752235146308948
Author
Daeichin M
Ozdogan M
Towfighian S
Miles R
Publication year
Publication venue
Sensors and Actuators A: Physical

External Links

Snippet

This paper describes a tunable MEMS electrostatic accelerometer that uses a repulsive electrode configuration so that the design is not hampered by capacitive pull-in instability. The repulsive force configuration enables the increase of DC bias voltage without suffering …
Continue reading at www.sciencedirect.com (PDF) (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements

Similar Documents

Publication Publication Date Title
Daeichin et al. Dynamic response of a tunable MEMS accelerometer based on repulsive force
Iannacci Reliability of MEMS: A perspective on failure mechanisms, improvement solutions and best practices at development level
Alkharabsheh et al. Dynamics of MEMS arches of flexible supports
Lin et al. Structural dynamics of microsystems—current state of research and future directions
Lee et al. Laterally driven electrostatic repulsive-force microactuators using asymmetric field distribution
Keshavarzi et al. Design and optimization of fully differential capacitive MEMS accelerometer based on surface micromachining
Ramini et al. A low-g electrostatically actuated resonant switch
Dennis et al. Modelling and Simulation of the Effect of Air Damping on the Frequency and Quality factor of a CMOS-MEMS Resonator
Sun et al. On the sensitivity improvement of CMOS capacitive accelerometer
Heinz et al. Experimental investigation into stiction forces and dynamic mechanical anti-stiction solutions in ultra-clean encapsulated MEMS devices
Brenes et al. Nondestructive gap dimension estimation of electrostatic MEMS resonators from electrical measurements
Yang et al. Dynamic simulation of a contact-enhanced MEMS inertial switch in Simulink®
Tariq Jan et al. Reliability and fatigue analysis in cantilever‐based mems devices operating in harsh environments
Mousavi et al. Electrostatic levitation: an elegant method to control MEMS switching operation
US12091313B2 (en) Electrodynamically levitated actuator
Dienel et al. On the influence of vacuum on the design and characterization of MEMS
Daeichin et al. Experimental characterization of the electrostatic levitation force in MEMS transducers
Vahdat et al. Improving response of a MEMS capacitive microphone filtering shock noise
Ouakad Simple and accurate analytical solution to the post-buckling response of an electrostatically actuated MEMS curled cantilever
Yan et al. The squeeze film damping effect of perforated microscanners: modeling and characterization
Godthi et al. A study of pressure-dependent squeeze film stiffness as a resonance modulator using static and dynamic measurements
Dowlati et al. An accurate study on capacitive microphone with circular diaphragm using a higher order elasticity theory
Xiao et al. Analytical behavior of rectangular electrostatic torsion actuators with nonlinear spring bending
Shih et al. Asymmetric seesaw structure of microelectromechanical systems accelerometer for sensing out-off-plane acceleration
Alkharabsheh et al. The dynamics of MEMS arches of non-ideal boundary conditions