Du et al., 2018 - Google Patents
Recent Progress on Piezotronic and Piezo‐Phototronic Effects in III‐Group Nitride Devices and ApplicationsDu et al., 2018
- Document ID
- 8917931603825029453
- Author
- Du C
- Hu W
- Wang Z
- Publication year
- Publication venue
- Advanced Engineering Materials
External Links
Snippet
Wurtzite‐structured III‐group nitrides, like GaN, InN, AlN, and their alloys, present both piezoelectric and semiconducting properties under straining owing to the polarization of ions in a crystal with non‐central symmetry. The piezoelectric polarization charges are created at …
- 230000000694 effects 0 title abstract description 97
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- H01L29/02—Semiconductor bodies; Multistep manufacturing processes therefor
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- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
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