Nothing Special   »   [go: up one dir, main page]

Dong et al., 2007 - Google Patents

Design, fabrication and testing of a silicon-on-insulator (SOI) MEMS parallel kinematics XY stage

Dong et al., 2007

Document ID
8152899594756945775
Author
Dong J
Mukhopadhyay D
Ferreira P
Publication year
Publication venue
Journal of micromechanics and microengineering

External Links

Snippet

This paper presents the design, kinematics, fabrication and characterization of a monolithic micro positioning two degree-of-freedom translational (XY) stage. The design of the proposed MEMS (micro-electro-mechanical system) stage is based on a parallel kinematics …
Continue reading at iopscience.iop.org (other versions)

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/08—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/08—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type

Similar Documents

Publication Publication Date Title
Dong et al. Design, fabrication and testing of a silicon-on-insulator (SOI) MEMS parallel kinematics XY stage
US8310128B2 (en) High precision silicon-on-insulator MEMS parallel kinematic stages
Mukhopadhyay et al. A SOI-MEMS-based 3-DOF planar parallel-kinematics nanopositioning stage
Polit et al. Development of a high-bandwidth XY nanopositioning stage for high-rate micro-/nanomanufacturing
Liu et al. A MEMS stage for 3-axis nanopositioning
Yeh et al. Surface-micromachined components for articulated microrobots
Brouwer et al. Design and modeling of a six DOFs MEMS-based precision manipulator
Zesch et al. Inertial drives for micro-and nanorobots: two novel mechanisms
Li et al. Microactuators: Design and technology
Maroufi et al. MEMS for nanopositioning: Design and applications
Fowler et al. A 2-DOF electrostatically actuated MEMS nanopositioner for on-chip AFM
Olfatnia et al. Large range dual-axis micro-stage driven by electrostatic comb-drive actuators
Dong et al. Electrostatically Actuated Cantilever With SOI-MEMS Parallel Kinematic $ XY $ Stage
Harness et al. Characteristic modes of electrostatic comb-drive XY microactuators
Xu Mechanism design and analysis of a novel 2-DOF compliant modular microgripper
Nabavi et al. A SOI out-of-plane electrostatic MEMS actuator based on in-plane motion
Chiou et al. A novel large displacement electrostatic actuator: pre-stress comb-drive actuator
Omidbeike et al. A five-axis monolithic nanopositioning stage constructed from a bimorph piezoelectric sheet
Freudenreich et al. Simulation and realization of a novel micromechanical bi-stable switch
Breguet et al. Piezoactuators for motion control from centimeter to nanometer
Stranczl et al. High-angular-range electrostatic rotary stepper micromotors fabricated with SOI technology
Correa et al. Parallel-kinematics XYZ MEMS part 1: Kinematics and design for fabrication
Sabri et al. Modeling and experimental validation of the performance of a silicon XY-microstage driven by PZT actuators
Suthisomboon et al. Design and Simulation of XZ MEMS Micropositioning with 3D-Complex Structure
Chiou et al. A micromirror with large static rotation and vertical actuation