Chiou et al., 2005 - Google Patents
A novel large displacement electrostatic actuator: pre-stress comb-drive actuatorChiou et al., 2005
View PDF- Document ID
- 4503689470786752387
- Author
- Chiou J
- Lin Y
- Publication year
- Publication venue
- Journal of Micromechanics and Microengineering
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Snippet
This investigation proposes a novel large vertical displacement electrostatic actuator, called the pre-stress comb-drive actuator (PCA), which exhibits no pull-in and no hysteresis characteristics. The proposed PCA consists of a set of comb fingers fabricated along the …
- 238000006073 displacement reaction 0 title abstract description 19
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