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Liu et al., 2022 - Google Patents

A wide spectral response single photon avalanche diode for backside-illumination in 55-nm CMOS process

Liu et al., 2022

Document ID
7998569301715305654
Author
Liu Y
Liu M
Ma R
Hu J
Li D
Wang X
Zhu Z
Publication year
Publication venue
IEEE Transactions on Electron Devices

External Links

Snippet

This article presents a wide-spectral response single photon avalanche diode (SPAD) designed and fabricated in advanced 55-nm CMOS image sensor technology. SPADs with different active areas and doping profiles are simulated by Sentaurus-TCAD to optimize their …
Continue reading at ieeexplore.ieee.org (other versions)

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