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Cicek et al., 2013 - Google Patents

AlxGa1− xN-based solar-blind ultraviolet photodetector based on lateral epitaxial overgrowth of AlN on Si substrate

Cicek et al., 2013

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Document ID
7723481817158440032
Author
Cicek E
McClintock R
Cho C
Rahnema B
Razeghi M
Publication year
Publication venue
Applied Physics Letters

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We report on Al x Ga 1− x N-based solar-blind ultraviolet (UV) photodetector (PD) grown on Si (111) substrate. First, Si (111) substrate is patterned, and then metalorganic chemical vapor deposition is implemented for a fully-coalesced∼ 8.5 μm AlN template layer via a …
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