Suzuki et al., 2012 - Google Patents
Fabrication of narrow comb-shaped electret by removing charge using excimer laser beam from charge-implanted CYTOP film for avoiding electrostatic repulsion …Suzuki et al., 2012
View PDF- Document ID
- 7690541637592277582
- Author
- Suzuki M
- Wada T
- Takahashi T
- Matsushita T
- Onishi J
- Nishida T
- Yoshikawa Y
- Aoyagi S
- Publication year
- Publication venue
- 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)
External Links
Snippet
A new fabrication method of narrow comb-shaped electret using excimer laser abrasion is proposed in this paper. In this method, charge is firstly implanted into the whole area of unpatterned electret film; then the charge in unwanted area is removed by thermal energy of …
- 238000004519 manufacturing process 0 title abstract description 7
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
- H02N1/008—Laterally driven motors, e.g. of the comb-drive type
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/06—Influence generators
- H02N1/08—Influence generators with conductive charge carrier, i.e. capacitor machines
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