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Fu et al., 2014 - Google Patents

MEMS vibration electret energy harvester with combined electrodes

Fu et al., 2014

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Document ID
3593421945914357913
Author
Fu Q
Suzuki Y
Publication year
Publication venue
2014 IEEE 27th international conference on micro electro mechanical systems (MEMS)

External Links

Snippet

A novel in-plane MEMS electret energy harvester with combined electrodes of overlapping- area-change and gap-closing converters is proposed for large output power both at low and high vibration accelerations. An early prototype has been successfully micro-fabricated with …
Continue reading at engineering.purdue.edu (PDF) (other versions)

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/06—Influence generators
    • H02N1/08—Influence generators with conductive charge carrier, i.e. capacitor machines
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
    • H02N2/18—Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
    • H02N2/186—Vibration harvesters
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners; Linear motors
    • H02N2/021—Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/08—Piezo-electric or electrostrictive devices
    • H01L41/113—Piezo-electric or electrostrictive devices with mechanical input and electrical output, e.g. generators, sensors
    • H01L41/1134—Beam type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/04—Friction generators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezo-electric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezo-electric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L41/02—Details
    • H01L41/04—Details of piezo-electric or electrostrictive devices
    • H01L41/047—Electrodes or electrical connection arrangements

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