Alneamy et al., 2019 - Google Patents
Dimpled electrostatic MEMS actuatorsAlneamy et al., 2019
View PDF- Document ID
- 6435241482270954601
- Author
- Alneamy A
- Al-Ghamdi M
- Park S
- Khater M
- Abdel-Rahman E
- Heppler G
- Publication year
- Publication venue
- Journal of Applied Physics
External Links
Snippet
We present electrostatic Micro-Electromechanical System actuators equipped with dimples and contact pads. The introduction of dimples and contact pads is shown to prevent stiction between the actuator and bottom electrodes and minimize dielectric charging and to …
- 230000005284 excitation 0 abstract description 26
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/006—Electrostatic motors of the gap-closing type
- H02N1/008—Laterally driven motors, e.g. of the comb-drive type
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