Modeling and real-time scheduling of semiconductor manufacturing line based on simulation
Abstract
Due to the difficulties of establishing a model of semiconductor manufacturing line, a real-time scheduling system of semiconductor manufacturing line is established with discrete event simulation technique. By employing the object-oriented modeling method, this system is implemented by simulation. An actual system with 40 machines and 60 processing steps is employed to demonstrate the validity of this system. Experiments indicate that the modeling and real-time scheduling system is accurate and reliable.
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- CASS: The Chinese Association for System Simulation
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Springer-Verlag
Berlin, Heidelberg
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Published: 14 September 2007
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