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    Mosis Wafer Acceptance Tests

    Uploaded by

    Praveen Vs
    This document contains test results for a fabrication lot including transistor parameters such as minimum Vth, Ids, and mobility, as well as process parameters like sheet resistance and contact resistance. It also includes capacitor parameters like area and fringe capacitance for different device components. Circuit parameters like inverter gain and ring oscillator frequency and power are reported.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PDF, TXT or read online from Scribd

    Mosis Wafer Acceptance Tests

    Uploaded by

    Praveen Vs
    118 views2 pages
    This document contains test results for a fabrication lot including transistor parameters such as minimum Vth, Ids, and mobility, as well as process parameters like sheet resistance and contact resistance. It also includes capacitor parameters like area and fringe capacitance for different device components. Circuit parameters like inverter gain and ring oscillator frequency and power are reported.

    Original Description:

    MOSIS WAFER ACCEPTANCE TESTS

    Copyright

    © Attribution Non-Commercial (BY-NC)

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    This document contains test results for a fabrication lot including transistor parameters such as minimum Vth, Ids, and mobility, as well as process parameters like sheet resistance and contact resistance. It also includes capacitor parameters like area and fringe capacitance for different device components. Circuit parameters like inverter gain and ring oscillator frequency and power are reported.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    118 views2 pages

    Mosis Wafer Acceptance Tests

    Uploaded by

    Praveen Vs
    This document contains test results for a fabrication lot including transistor parameters such as minimum Vth, Ids, and mobility, as well as process parameters like sheet resistance and contact resistance. It also includes capacitor parameters like area and fringe capacitance for different device components. Circuit parameters like inverter gain and ring oscillator frequency and power are reported.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
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    01/08/2013

    https://moodle.iitb.ac.in/pluginfile.php/74866/mod_resource/content/1/t64h_lo_epi-params.txt

    M O S I SW A F E RA C C E P T A N C ET E S T S R U N :T 6 4 H( L O _ E P I ) T E C H N O L O G Y :S C N 0 1 8 R u nt y p e :S K D V E N D O R :T S M C F E A T U R ES I Z E :0 . 1 8m i c r o n s

    I N T R O D U C T I O N :T h i sr e p o r tc o n t a i n st h el o ta v e r a g er e s u l t so b t a i n e db yM O S I S f r o mm e a s u r e m e n t so fM O S I St e s ts t r u c t u r e so ne a c hw a f e ro f t h i sf a b r i c a t i o nl o t .S P I C Ep a r a m e t e r so b t a i n e df r o ms i m i l a r m e a s u r e m e n t so nas e l e c t e dw a f e ra r ea l s oa t t a c h e d . C O M M E N T S :D S C N 6 M 0 1 8 _ T S M C

    T R A N S I S T O RP A R A M E T E R S M I N I M U M V t h S H O R T I d s s V t h V p t W I D E I d s 0 L A R G E V t h V j b k d I j l k K '( U o * C o x / 2 ) L o w f i e l dM o b i l i t y

    W / L 0 . 2 7 / 0 . 1 8

    N C H A N N E LP C H A N N E L U N I T S

    0 . 5 3 2 0 . 0 / 0 . 1 8 5 5 4 4 . 7 2 0 . 0 / 0 . 1 8 1 2 . 7 5 0 / 5 0 0 . 4 4 3 . 2 & l t ; 5 0 . 0 1 6 7 . 1 3 9 6 . 8 1

    0 . 5 3 v o l t s

    2 7 5 u A / u m 0 . 5 2 v o l t s 5 . 5 v o l t s

    1 0 . 7

    p A / u m

    0 . 4 2 v o l t s 4 . 1 v o l t s & l t ; 5 0 . 0 p A 3 5 . 8 u A / V ^ 2 8 5 . 0 1 c m ^ 2 / V * s

    C O M M E N T S :P o l yb i a sv a r i e sw i t hd e s i g nt e c h n o l o g y .T oa c c o u n tf o rm a s k b i a su s et h ea p p r o p r i a t ev a l u ef o rt h ep a r a m e t e r sX La n dX W i ny o u rS P I C Em o d e lc a r d . D e s i g nT e c h n o l o g y X L( u m ) X W( u m ) - S C N 6 M _ D E E P( l a m b d a = 0 . 0 9 ) 0 . 0 0 0 . 0 1 t h i c ko x i d e 0 . 0 0 0 . 0 1 S C N 6 M _ S U B M( l a m b d a = 0 . 1 0 ) 0 . 0 2 0 . 0 0 t h i c ko x i d e 0 . 0 2 0 . 0 0

    F O XT R A N S I S T O R S V t h

    G A T E P o l y

    N + A C T I V E P + A C T I V E U N I T S & g t ; 6 . 6 & l t ; 6 . 6 v o l t s

    P R O C E S SP A R A M E T E R S N + P + P O L Y N + B L K P L Y + B L K S h e e tR e s i s t a n c e 6 . 7 7 . 8 7 . 9 6 1 . 1 3 0 1 . 7 C o n t a c tR e s i s t a n c e 1 0 . 7 1 1 . 2 9 . 9 G a t eO x i d eT h i c k n e s s 4 1
    https://moodle.iitb.ac.in/pluginfile.php/74866/mod_resource/content/1/t64h_lo_epi-params.txt

    M 1 0 . 0 8

    M 2 U N I T S 0 . 0 8 o h m s / s q 4 . 5 0 o h m s a n g s t r o m
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    01/08/2013

    https://moodle.iitb.ac.in/pluginfile.php/74866/mod_resource/content/1/t64h_lo_epi-params.txt

    P R O C E S SP A R A M E T E R S S h e e tR e s i s t a n c e C o n t a c tR e s i s t a n c e

    M 3 P O L Y _ H R I 0 . 0 8 8 . 7 8

    M 4 0 . 0 7 1 2 . 4 0

    M 5 0 . 0 7 1 6 . 2 9

    M 6 0 . 0 3 1 8 . 0 9

    N _ W 9 4 1

    U N I T S o h m s / s q o h m s

    C O M M E N T S :B L Ki ss i l i c i d eb l o c k .

    C A P A C I T A N C EP A R A M E T E R S N + P + P O L YM 1M 2M 3M 4 A r e a( s u b s t r a t e ) 9 7 31 1 6 1 1 0 4 3 91 91 3 8 A r e a( N + a c t i v e ) 8 3 5 5 5 52 01 41 1 A r e a( P + a c t i v e ) 8 1 8 7 A r e a( p o l y ) 6 51 71 0 7 A r e a( m e t a l 1 ) 3 71 4 9 A r e a( m e t a l 2 ) 3 81 4 A r e a( m e t a l 3 ) 3 9 A r e a( m e t a l 4 ) A r e a( m e t a l 5 ) A r e a( rw e l l ) 9 9 6 A r e a( n ow e l l ) 1 4 3 F r i n g e( s u b s t r a t e ) 2 6 5 2 2 1 5 85 34 1 F r i n g e( p o l y ) 6 73 92 92 4 F r i n g e( m e t a l 1 ) 5 63 6 F r i n g e( m e t a l 2 ) 4 83 6 F r i n g e( m e t a l 3 ) 5 4 F r i n g e( m e t a l 4 ) F r i n g e( m e t a l 5 ) O v e r l a p( N + a c t i v e ) 7 0 8 O v e r l a p( P + a c t i v e ) 6 3 2

    M 5 M 6 D _ N _ W N _ W U N I T S 8 3 1 2 4 a F / u m ^ 2 9 8 a F / u m ^ 2 a F / u m ^ 2 6 5 a F / u m ^ 2 7 5 a F / u m ^ 2 9 7 a F / u m ^ 2 1 5 9 a F / u m ^ 2 3 9 1 5 a F / u m ^ 2 3 9 a F / u m ^ 2 a F / u m ^ 2 a F / u m ^ 2 2 3 a F / u m 2 0 1 7 a F / u m 2 2 1 9 a F / u m 2 7 2 3 a F / u m 3 5 2 8 a F / u m 5 4 3 3 a F / u m 4 4 a F / u m a F / u m a F / u m

    C I R C U I TP A R A M E T E R S I n v e r t e r s V i n v V i n v V o l( 1 0 0u A ) V o h( 1 0 0u A ) V i n v G a i n R i n gO s c i l l a t o rF r e q . D 1 0 2 4 _ T H K( 3 1 s t g , 3 . 3 V ) D I V 1 0 2 4( 3 1 s t g , 1 . 8 V ) R i n gO s c i l l a t o rP o w e r D 1 0 2 4 _ T H K( 3 1 s t g , 3 . 3 V ) D I V 1 0 2 4( 3 1 s t g , 1 . 8 V )

    U N I T S K 1 . 0 1 . 5 2 . 0 2 . 0 2 . 0 2 . 0 0 . 7 5 0 . 8 0 0 . 0 8 1 . 6 4 0 . 8 3 2 2 . 8 7 v o l t s v o l t s v o l t s v o l t s v o l t s

    3 1 6 . 2 1 M H z 3 9 3 . 2 0 M H z 0 . 0 7 u W / M H z / g a t e 0 . 0 2 u W / M H z / g a t e

    https://moodle.iitb.ac.in/pluginfile.php/74866/mod_resource/content/1/t64h_lo_epi-params.txt

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