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WO2024047873A1 - Dispositif de commande, système d'oscillateur laser à gaz et procédé de commande - Google Patents

Dispositif de commande, système d'oscillateur laser à gaz et procédé de commande Download PDF

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Publication number
WO2024047873A1
WO2024047873A1 PCT/JP2022/033152 JP2022033152W WO2024047873A1 WO 2024047873 A1 WO2024047873 A1 WO 2024047873A1 JP 2022033152 W JP2022033152 W JP 2022033152W WO 2024047873 A1 WO2024047873 A1 WO 2024047873A1
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WO
WIPO (PCT)
Prior art keywords
discharge
gas
aging
control device
discharge current
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PCT/JP2022/033152
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English (en)
Japanese (ja)
Inventor
泰純 柴
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ファナック株式会社
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Priority to PCT/JP2022/033152 priority Critical patent/WO2024047873A1/fr
Publication of WO2024047873A1 publication Critical patent/WO2024047873A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/032—Constructional details of gas laser discharge tubes for confinement of the discharge, e.g. by special features of the discharge constricting tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube

Definitions

  • the present disclosure relates to a control device, a gas laser oscillator system, and a control method.
  • a gas laser oscillator generates laser light by exciting and discharging a laser gas sealed inside a gas container. For example, if a gas laser oscillator has not been used for a long period of time, foreign matter such as moisture may adhere to the inner wall of the gas container. If discharge occurs in the gas laser oscillator under such conditions, the discharge phenomenon will not be stable. As a result, the output of the laser light from the gas laser oscillator may become unstable.
  • aging discharge is performed at startup to remove foreign matter inside the gas container (for example, Patent Document 1).
  • aging discharge is an operation in which foreign matter is removed by performing discharge before using the gas laser oscillator to increase the temperature inside the gas container and vaporizing the foreign matter.
  • the aging discharge is performed using a large amount of power when the purity of the laser gas is low due to the presence of foreign matter in the gas container, there is a risk that an overcurrent will occur. In this case, the power supply for the gas laser oscillator may fail.
  • the control device of the present disclosure adjusts the discharge current when aging discharge is performed in the gas laser oscillator based on the time required to vacuum the circulatory system of the gas laser oscillator and the power of the blower that circulates the laser gas in the circulatory system.
  • a determining unit that determines the gas pressure inside the circulatory system; and a determining unit that adjusts the internal pressure of the circulatory system to the gas pressure determined by the determining unit and executes aging discharge at the discharge current determined by the determining unit.
  • a command unit that outputs an execution command.
  • the gas laser oscillator system of the present disclosure has a circulation system in which laser gas is circulated by a blower, a discharge current when aging discharge is performed, and a change in the circulation system based on the time required to vacuum the circulation system and the power of the blower.
  • a determining unit that determines the internal gas pressure; and an execution command for adjusting the internal pressure of the circulatory system to the gas pressure determined by the determining unit and executing aging discharge at the discharge current determined by the determining unit.
  • a control device having a command unit that outputs an output.
  • the control method of the present disclosure is based on the time required to vacuum the circulatory system of the gas laser oscillator and the power of the blower that circulates the laser gas in the circulatory system, and the discharge current when aging discharge is executed in the gas laser oscillator. and adjusting the pressure inside the circulation system to the determined gas pressure and performing aging discharge at the determined discharge current.
  • FIG. 2 is a block diagram showing an example of a hardware configuration of a control device.
  • FIG. 2 is a schematic diagram for explaining the configuration of a gas laser oscillator. It is a block diagram showing an example of the function of a control device.
  • FIG. 3 is a diagram showing an example of data stored in a storage unit. 3 is a flowchart illustrating an example of the flow of processing executed by the control device. It is a schematic diagram showing the flow of operation of a gas laser oscillator. It is a schematic diagram showing the flow of operation of a gas laser oscillator. It is a schematic diagram showing the flow of operation of a gas laser oscillator. It is a schematic diagram showing the flow of operation of a gas laser oscillator. It is a schematic diagram showing the flow of operation of a gas laser oscillator. It is a schematic diagram showing the flow of operation of a gas laser oscillator. It is a schematic diagram showing the flow of operation of a gas laser oscillator.
  • FIG. 3 is a
  • XX is an arbitrary element (for example, arbitrary information).
  • the gas laser oscillator system includes a control device and a gas laser oscillator.
  • the control device is a device that controls the gas laser oscillator.
  • the control device is, for example, a numerical control device.
  • the control device may be implemented in, for example, a PC (Personal Computer) or a server. An example in which the control device is implemented in a numerical control device will be described below.
  • FIG. 1 is a block diagram showing an example of the hardware configuration of the control device.
  • the control device 1 is connected to the gas laser oscillator 2.
  • the control device 1 includes a hardware processor 11 , a bus 12 , a ROM (Read Only Memory) 13 , a RAM (Random Access Memory) 14 , a nonvolatile memory 15 , and an interface 16 .
  • the hardware processor 11 is a processor that controls the entire control device 1 according to a system program.
  • the hardware processor 11 reads out a system program stored in the ROM 13 via the bus 12, and performs various processes based on the system program.
  • the hardware processor 11 is, for example, a CPU (Central Processing Unit) or an electronic circuit.
  • the bus 12 is a communication path that connects each piece of hardware within the control device 1 to each other. Each piece of hardware within the control device 1 exchanges data via a bus 12.
  • the ROM 13 is a storage device that stores system programs and the like for controlling the entire control device 1.
  • ROM 13 is a computer-readable storage medium.
  • the RAM 14 is a storage device that temporarily stores various data.
  • the RAM 14 functions as a work area for the hardware processor 11 to process various data.
  • the nonvolatile memory 15 is a storage device that retains data even when the control device 1 is powered off and power is not supplied to the control device 1.
  • Non-volatile memory 15 is a computer readable storage medium.
  • the nonvolatile memory 15 includes, for example, battery-backed memory or an SSD (Solid State Drive).
  • the interface 16 is a communication path that connects the bus 12 and the gas laser oscillator 2.
  • the hardware processor 11 sends various signals to the gas laser oscillator 2 via the interface 16.
  • the gas laser oscillator 2 sends various signals to the hardware processor 11 via the interface 16.
  • FIG. 2 is a schematic diagram for explaining the configuration of the gas laser oscillator 2.
  • the gas laser oscillator 2 includes a circulation system 21, a laser power source 22, an exhaust valve 23, and an intake valve 24.
  • the circulation system 21 is a system that circulates laser gas.
  • the circulation system 21 is also called a vacuum system or a gas container.
  • the laser gas circulating in the circulation system 21 is, for example, CO 2 gas (carbon dioxide gas).
  • the circulation system 21 includes a discharge tube 211, a gas pipe 212, a first heat exchanger 213, a blower 214, a second heat exchanger 215, and a pressure sensor 216.
  • the discharge tube 211 is an electron tube that excites the laser gas by performing discharge from a pair of electrodes (not shown) toward the laser gas sealed inside. By exciting the laser gas, the discharge tube 211 emits laser light.
  • the gas pipe 212 is a passage through which laser gas is circulated in the circulation system 21.
  • the gas pipe 212 is a pipe that connects a part of the discharge tube 211 and the first heat exchanger 213, a pipe that connects the first heat exchanger 213 and the blower 214, and a pipe that connects the blower 214 and the second heat exchanger. 215 , and a tube that connects the second heat exchanger 215 and another part of the discharge tube 211 .
  • the first heat exchanger 213 is a device that cools the laser gas sealed in the circulation system.
  • the first heat exchanger 213 cools the laser gas taken in from the tube connecting the discharge tube 211 and the first heat exchanger 213.
  • the laser gas cooled by the first heat exchanger 213 is sent to a tube connecting the first heat exchanger 213 and the blower 214.
  • the blower 214 is a device that increases the pressure of laser gas and sends it out.
  • Blower 214 is, for example, a turbo blower.
  • the blower 214 gives energy to the laser gas sucked from the pipe connecting the heat exchanger and the blower 214 to increase the pressure, increases the speed of the laser gas, and sends out the laser gas.
  • Laser gas is sent to gas pipe 212 that connects blower 214 and second heat exchanger 215.
  • the second heat exchanger 215 is a device that cools the laser gas.
  • the second heat exchanger 215 cools the laser gas taken in from the tube connecting the blower 214 and the second heat exchanger 215.
  • the laser gas cooled by the second heat exchanger 215 is sent into a tube connecting the second heat exchanger 215 and the discharge tube 211.
  • the pressure sensor 216 is a sensor that measures the gas pressure inside the circulation system 21.
  • the pressure sensor 216 is attached to a tube connecting the discharge tube 211 and the first heat exchanger 213, for example.
  • the laser power source 22 is a power source that supplies power to the discharge tube 211.
  • the laser power source 22 is connected to the control device 1 and supplies power to the discharge tube 211 based on a command received from the control device 1.
  • the exhaust valve 23 is an on-off valve arranged between the gas pipe 212 and the exhaust pump 3.
  • the exhaust valve 23 is opened when the exhaust pump 3 evacuates the circulation system 21 .
  • the exhaust valve 23 is closed when the exhaust pump 3 does not perform evacuation.
  • the intake valve 24 is an on-off valve disposed between the gas pipe 212 and the laser gas supply source 4.
  • the intake valve 24 is opened when laser gas is supplied from the laser gas supply source 4 to the circulation system 21 .
  • the intake valve 24 is closed when laser gas is not supplied from the laser gas supply source 4 to the circulation system 21 .
  • the laser gas supply source 4 is, for example, a gas cylinder containing laser gas.
  • FIG. 3 is a block diagram showing an example of the functions of the control device 1.
  • the control device 1 includes a data acquisition section 101, a determination section 102, a storage section 103, a command section 104, and a determination section 105.
  • the data acquisition unit 101, the determination unit 102, the command unit 104, and the determination unit 105 are configured such that the hardware processor 11 uses a system program stored in the ROM 13 and various data stored in the nonvolatile memory 15. This is realized by performing arithmetic processing using The storage unit 103 is realized, for example, by storing data input from an external device in at least one of the RAM 14 and the nonvolatile memory 15.
  • the data acquisition unit 101 acquires data indicating the time required to vacuum the circulatory system 21 of the gas laser oscillator 2.
  • the time required for evacuation is the time from when evacuation of the circulation system 21 is started by the exhaust pump 3 until the evacuation ends. Evacuation ends when the pressure inside the circulation system 21 reaches a predetermined pressure. Note that whether or not the internal pressure of the circulation system 21 has reached a predetermined pressure may be determined based on the pressure measured by the pressure sensor 216.
  • the time required for vacuuming is measured by, for example, a timer (not shown).
  • the data acquisition unit 101 acquires data indicating the time required for vacuuming based on time data acquired from the timer.
  • the data acquisition unit 101 acquires data indicating the power of the blower 214 that circulates the laser gas in the circulation system 21.
  • the data acquisition unit 101 acquires data indicating power consumed by the blower 214 when the blower 214 circulates the laser gas.
  • the data acquisition unit 101 may acquire data indicating the power of the blower 214 from a wattmeter (not shown) that measures the power consumed by the blower 214.
  • blower 214 starts circulating the gas inside the circulation system 21 based on a command from the command unit 104 between the start of evacuation and the end of evacuation.
  • the command unit 104 starts driving the blower 214 from the start of evacuation until the end of evacuation.
  • the blower 214 may start circulating the gas inside the circulation system 21 based on a command from the command unit 104 after the circulation system 21 has been evacuated. That is, the command unit 104 may start driving the blower 214 after evacuation is completed.
  • the determining unit 102 determines the aging discharge from the electrodes of the discharge tube 211 based on the time required to vacuum the circulation system 21 and the power of the blower 214 that circulates the laser gas in the circulation system 21, which are acquired by the data acquisition unit 101. Determine the discharge current and the gas pressure inside the circulatory system 21 when this is performed.
  • the time required for evacuation becomes relatively long.
  • the purity of the laser gas sealed inside the circulation system 21 and the time required for evacuation are correlated. Note that when the purity of the laser gas is relatively low, the evacuation time becomes longer due to vaporization of moisture adhering to the inner wall of the discharge tube 211, etc., or due to the influence of outgas. This is because the volume of gas increases.
  • the purity of the laser gas sealed inside the circulation system 21 is relatively low, a relatively high load is applied to the blower 214. Therefore, when the purity of the laser gas sealed inside the circulation system 21 is relatively low, the power consumed by the blower 214 increases. In other words, the purity of the laser gas sealed inside the circulation system 21 and the power consumed by the blower 214 are correlated.
  • the determining unit 102 determines the discharge current and gas pressure according to the purity of the laser gas sealed in the circulation system 21. Note that the determining unit 102 may or may not actually calculate the purity of the laser gas sealed in the circulation system 21 based on the time required for evacuation and the power of the blower 214. When the determination unit 102 calculates the purity, it may use a formula for calculating the purity of the laser gas determined in advance through experiments or the like.
  • the determining unit 102 determines, for example, the relationship between the time required to vacuum the circulatory system 21 and the power of the blower 214, and the optimal discharge current and optimal gas pressure inside the circulatory system 21 when aging discharge is performed. Based on the data shown, the discharge current and gas pressure are determined. Data indicating such a relationship may be created based on the experience of a skilled engineer, for example. Alternatively, data indicating the relationship may be created based on experiments conducted in advance.
  • the storage unit 103 stores the relationship between the time required to vacuum the circulation system 21 and the power of the blower 214, and the optimum discharge current and the optimum gas pressure inside the circulation system 21 when the aging discharge is executed, as described above. Store the data shown.
  • FIG. 4 is a diagram showing an example of data stored in the storage unit 103.
  • the storage unit 103 stores a plurality of data sets in which one data set includes the time required for evacuation, the electric power of the blower 214, the discharge current, and the gas pressure.
  • the storage unit 103 stores a plurality of data sets, and each data set includes data indicating discharge current and data indicating gas pressure.
  • the determining unit 102 selects one data set from the plurality of data sets and determines the discharge current and gas pressure based on the time required to vacuum the circulatory system 21 and the power of the blower 214. Note that the determining unit 102 selects one data set based on the time required for evacuation and the power of the blower 214 that are respectively approximate to the time required for evacuation and the power of the blower 214 acquired by the data acquisition unit 101. Bye.
  • the command unit 104 issues an execution command to the exhaust valve 23 to adjust the internal pressure of the circulation system 21 to the gas pressure determined by the determination unit 102 and execute aging discharge with the discharge current determined by the determination unit 102. Alternatively, it is output to the intake valve 24. Before executing the aging discharge, the command unit 104 controls the exhaust valve 23 or the intake valve 24 to bring the internal pressure of the circulation system 21 to the gas pressure determined by the determining unit 102.
  • the command unit 104 closes both the exhaust valve 23 and the intake valve 24. Thereafter, the command unit 104 controls the laser power source 22 to perform aging discharge with the discharge current determined by the determination unit 102.
  • the data acquisition unit 101 acquires data indicating the discharge current, gas pressure, and discharge voltage when aging discharge is performed.
  • the data indicating the discharge current and gas pressure acquired by the data acquisition unit 101 may be the data indicating the discharge current and gas pressure determined by the determination unit 102. That is, the data indicating the discharge current and gas pressure acquired by the data acquisition unit 101 are the values of the execution command when the command unit 104 commands adjustment of the internal pressure of the circulatory system 21 and the execution command for aging discharge. It may be a current value of an execution command to be executed.
  • the data indicating the discharge current and gas pressure acquired by the data acquisition unit 101 may be data detected by an ammeter (not shown) and the pressure sensor 216 during aging discharge.
  • the discharge voltage when the aging discharge is performed is data measured by a voltmeter (not shown). Note that the discharge voltage is the voltage applied between the electrodes of the discharge tube 211 during aging discharge.
  • the determining unit 105 determines whether to perform another aging discharge following the aging discharge, based on the discharge current, gas pressure, and discharge voltage acquired by the data acquisition unit 101 during the aging discharge. That is, the determination unit 105 determines whether or not to perform the second aging discharge following the first aging discharge performed.
  • the voltage measured when the aging discharge is performed under the gas pressure determined by the determining unit 102 and the discharge current determined by the determining unit 102 is determined by the purity of the laser gas inside the circulatory system 21 after the aging discharge. There is a correlation. For example, if the purity of the laser gas inside the circulation system 21 is relatively low, the voltage measured when the aging discharge is performed will be relatively high. On the other hand, if the purity of the laser gas inside the circulation system 21 is relatively high, the voltage measured when the aging discharge is performed will be relatively low.
  • the determination unit 105 determines not to perform another aging discharge.
  • the determination unit 105 determines to perform another aging discharge.
  • the determining unit 102 determines that another aging discharge is to be performed based on the discharge current, gas pressure, and discharge voltage when the aging discharge was performed. Determine the discharge current and gas pressure at the time.
  • the determining unit 102 indicates the relationship between the discharge current, gas pressure, and discharge voltage when an aging discharge is performed and the optimal discharge current and optimal gas pressure when another aging discharge is performed. Based on the data, the discharge current and gas pressure when performing another aging discharge may be determined.
  • Data showing such a relationship may be created based on the experience of a skilled engineer, for example. Alternatively, data indicating the relationship may be created based on experiments conducted in advance. Furthermore, the storage unit 103 indicates the relationship between the discharge current, gas pressure, and discharge voltage when the aging discharge is executed, and the optimal discharge current and optimal gas pressure when other aging discharges are executed. Data may also be stored.
  • the command unit 104 outputs an execution command for adjusting the internal pressure of the circulation system 21 to the gas pressure determined by the determining unit 102 and executing another aging discharge with the discharge current determined by the determining unit 102. . Furthermore, the determination unit 105 determines whether or not to perform another aging discharge following the other aging discharge, based on the discharge current, gas pressure, and discharge voltage when the other aging discharge is performed. do. In other words, the determination unit 105 determines whether or not to perform the third aging discharge.
  • the control device 1 executes such processing, and if the determining unit 105 further determines that aging discharge is not to be performed, the aging discharge at startup ends.
  • FIG. 5 is a flowchart showing an example of the flow of processing executed by the control device 1.
  • 6A to 6E are schematic diagrams showing the operation of the gas laser oscillator 2 and the flow of signals.
  • step S1 the circulation system 21 is evacuated (step S1) (see FIG. 6A). That is, the command unit 104 outputs a command for evacuation to the exhaust valve 23. The exhaust valve 23 is opened based on a command from the command unit 104. As a result, the circulation system 21 is evacuated by the exhaust pump 3.
  • step S2 driving of the blower 214 is started (step S2) (see FIG. 6B). That is, the command unit 104 outputs a drive command to the blower 214 while vacuuming is being performed. As a result, the blower 214 starts to be driven.
  • the command unit 104 When the pressure sensor 216 detects that the internal pressure of the circulation system 21 has reached a predetermined gas pressure, the command unit 104 outputs a closing command to the exhaust valve 23. As a result, the exhaust valve 23 becomes closed. This completes the evacuation.
  • step S3 data is acquired.
  • the data acquisition unit 101 acquires data indicating the time required for evacuation and data indicating the power of the blower 214 being driven.
  • the data acquisition unit 101 may acquire data indicating the power of the blower 214 from the time when the blower 214 starts being driven.
  • the determining unit 102 determines the discharge current and gas pressure inside the circulation system 21 when the aging discharge is executed based on the time required for evacuation and the power of the blower 214.
  • step S5 the gas pressure is adjusted (step S5) (see FIG. 6C).
  • the command unit 104 outputs an opening command to the intake valve 24, for example. Furthermore, when the internal pressure of the circulation system 21 reaches a predetermined gas pressure, the command unit 104 outputs a closing command to the intake valve 24. Thereby, the internal pressure of the circulation system 21 is adjusted to the gas pressure determined by the determination unit 102.
  • step S6 aging discharge is performed (step S6) (see FIG. 6D).
  • the command unit 104 outputs an execution command to the laser power supply 22 to cause the aging discharge to be performed with the discharge current determined by the determination unit 102.
  • the laser power supply 22 Based on the execution command received from the command unit 104, the laser power supply 22 causes a current of a value indicated by the execution command to flow through the electrodes of the discharge tube 211. As a result, aging discharge is performed.
  • step S7 it is determined whether to perform another aging discharge.
  • the other aging discharge is the second aging discharge.
  • the determination unit 105 determines whether to perform another aging discharge based on the discharge current, gas pressure, and discharge voltage when the first aging discharge was performed.
  • the determination unit 105 determines not to perform another aging discharge (No in step S7), the purity of the laser gas sealed in the circulation system 21 is suitable for use in the gas laser oscillator 2. Therefore, the processing related to aging discharge at the time of startup ends.
  • step S7 determines the determining unit 102 determines the aging discharge based on the discharge current, gas pressure, and discharge voltage when the aging discharge was performed. Then, the discharge current and gas pressure when another aging discharge is executed are determined (step S4). Then, the gas pressure is adjusted again (step S5) (see FIG. 6E), and another aging discharge is performed (step S6).
  • step S4 determines that aging discharge is not to be performed.
  • the gas laser oscillator 2 includes a vacuum container 5
  • FIG. 7 is a schematic diagram of a gas laser oscillator 2 in another embodiment.
  • the gas laser oscillator 2 includes a vacuum container 5 and a switching valve 25.
  • the capacity of the vacuum container 5 is smaller than the capacity inside the circulation system 21.
  • the switching valve 25 switches the connection destination of the exhaust pump 3 that performs evacuation between the circulation system 21 and the vacuum container 5.
  • the exhaust pump 3 can evacuate the circulation system 21.
  • the exhaust pump 3 can evacuate the vacuum container 5.
  • the determining unit 102 compares the time required to evacuate the circulation system 21 and the time required to evacuate the vacuum container 5. For example, if the capacity of the vacuum container 5 is 1/10 of the internal capacity of the circulation system 21 and there is no abnormality in the exhaust pump 3, the time required to evacuate the vacuum container 5 is equal to the time required to evacuate the circulation system 21. It should be 1/10 of the time it takes.
  • the determining unit 102 can notify the user that an abnormality has occurred in the exhaust pump 3 using, for example, a display device (not shown).
  • control device 1 controls the aging discharge in the gas laser oscillator 2 based on the time required to vacuum the circulation system 21 of the gas laser oscillator 2 and the electric power of the blower 214 that circulates the laser gas in the circulation system 21.
  • a determining unit 102 determines the discharge current and the gas pressure inside the circulatory system 21 when the is executed, and the determining unit 102 adjusts the internal pressure of the circulatory system 21 to the pressure determined by the determining unit 102. It includes a command unit 104 that outputs an execution command for performing aging discharge with the determined discharge current.
  • control device 1 can perform aging discharge with a discharge current and gas pressure depending on the purity of the laser gas inside the circulation system 21. As a result, the gas laser oscillator 2 can be activated in a short time.
  • the control device 1 also includes a determination unit 105 that determines whether to perform another aging discharge subsequent to the aging discharge based on the discharge current, gas pressure, and discharge voltage when the aging discharge is performed. Furthermore, it is equipped with the following. Therefore, the control device 1 can perform aging discharge as necessary. Therefore, the number of aging discharges performed when the gas laser oscillator 2 is started can be reduced.
  • the determining unit 102 determines the discharge current when the other aging discharge is performed based on the discharge current, gas pressure, and discharge voltage when the aging discharge is performed. and the gas pressure inside the circulation system 21. Therefore, the control device 1 can set the discharge current and gas pressure to optimal values when another aging discharge is executed.
  • the device further includes a storage unit 103 that stores a plurality of data sets, each data set including data indicating discharge current and data indicating gas pressure, and determining unit 102 selects one data from among the plurality of data sets. Select the set and determine the discharge current and gas pressure. In this case, when aging discharge is executed, the processing load on the control device 1 can be reduced compared to calculating the discharge current and gas pressure each time based on a calculation formula or the like.
  • the command unit 104 starts driving the blower 214 from the start of evacuation until the end of evacuation. In this case, part of the gas inside the circulation system 21 is compressed during evacuation, and the temperature of the gas changes. Further, by driving the blower 214, the temperature inside the circulation system 21 increases, and foreign substances such as moisture inside the circulation system 21 are vaporized.
  • the control device 1 starts driving the blower 214 during evacuation, and determines the discharge current and gas pressure when the aging discharge is performed based on the time required for evacuation, thereby adjusting these values. can be set to the optimal value.
  • the gas laser oscillator 2 also includes a vacuum container 5 whose capacity is smaller than the internal capacity of the circulation system 21, and a switching valve 25 that switches the connection destination of the exhaust pump 3 that performs evacuation between the circulation system 21 and the vacuum container 5.
  • the determining unit 102 compares the time required to evacuate the circulation system 21 and the time required to evacuate the vacuum container 5. Thereby, the control device 1 can easily detect an abnormality in the exhaust pump 3.
  • Additional notes related to embodiments of the present disclosure are shown below. Additional note [1] Based on the time required to vacuum the circulatory system of the gas laser oscillator and the power of the blower that circulates the laser gas in the circulatory system, the discharge current and the inside of the circulatory system when aging discharge is executed in the gas laser oscillator are determined. a determining unit that determines the gas pressure of the circulatory system; and adjusting the internal pressure of the circulatory system to the gas pressure determined by the determining unit and performing the aging discharge with the discharge current determined by the determining unit.
  • a control device comprising: a command unit that outputs an execution command to perform the operations; Additional note [2]
  • the method further includes a determination unit that determines whether to perform another aging discharge subsequent to the aging discharge based on the discharge current, the gas pressure, and the discharge voltage when the aging discharge is performed.
  • the control device according to supplementary note [1].
  • Additional note [3] When the other aging discharge is executed, the determining unit executes the other aging discharge based on the discharge current, the gas pressure, and the discharge voltage when the aging discharge is executed.
  • the control device according to supplementary note [2], which determines the discharge current and the gas pressure inside the circulation system.
  • the determination unit further includes a storage unit that stores a plurality of data sets, each data set including data indicating the discharge current and data indicating the gas pressure, and the determining unit selects one data set from the plurality of data sets.
  • the control device according to any one of appendices [1] to [3], which selects the discharge current and the gas pressure to determine the discharge current and the gas pressure.
  • Additional note [5] The control device according to any one of appendices [1] to [4], wherein the command unit starts driving the blower between the start of the evacuation and the end of the evacuation.
  • the gas laser oscillator includes a vacuum container having a smaller capacity than the internal capacity of the circulation system, and a switching valve that switches the connection destination of the exhaust pump that performs evacuation between the circulation system and the vacuum container.
  • the control device according to any one of appendices [1] to [5], wherein the determining unit compares the time required to evacuate the circulation system and the time required to evacuate the vacuum container.
  • a discharge current and a gas pressure inside the circulation system when aging discharge is executed based on a circulation system in which the laser gas is circulated by a blower, the time required to vacuum the circulation system, and the electric power of the blower.
  • a determining unit for determining the internal pressure of the circulatory system to the gas pressure determined by the determining unit and executing the aging discharge at the discharge current determined by the determining unit.
  • a gas laser oscillator system comprising: a command unit that outputs commands; and a control device. Additional note [8] Based on the time required to vacuum the circulatory system of the gas laser oscillator and the power of the blower that circulates the laser gas in the circulatory system, the discharge current and the inside of the circulatory system when aging discharge is executed in the gas laser oscillator are determined. and adjusting the internal pressure of the circulation system to the determined gas pressure and performing the aging discharge at the determined discharge current.
  • Gas laser oscillator system 1 Control device 11 Hardware processor 12 Bus 13 ROM 14 RAM 15 Non-volatile memory 16 Interface 101 Data acquisition section 102 Determination section 103 Storage section 104 Command section 105 Judgment section 2 Gas laser oscillator 21 Circulation system 211 Discharge tube 212 Gas pipe 213 First heat exchanger 214 Blower 215 Second heat exchanger 216 Pressure sensor 22 Laser power supply 23 Exhaust valve 24 Intake valve 25 Switching valve 3 Exhaust pump 4 Laser gas supply source 5 Vacuum container

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

Selon l'invention, un dispositif de commande comprend : une unité de détermination qui, sur la base du temps requis pour mettre sous vide un système de circulation d'un oscillateur laser à gaz et de la puissance électrique d'une soufflante qui fait circuler un laser à l'état gazeux dans le système de circulation, détermine le courant de décharge et la pression de gaz à l'intérieur du système de circulation lorsqu'une décharge de vieillissement est mise en œuvre dans l'oscillateur laser à gaz ; et une unité de commande qui délivre une commande d'exécution pour ajuster la pression à l'intérieur du système de circulation à la pression de gaz déterminée par l'unité de détermination et mettre en œuvre une décharge de vieillissement au courant de décharge déterminé par l'unité de détermination.
PCT/JP2022/033152 2022-09-02 2022-09-02 Dispositif de commande, système d'oscillateur laser à gaz et procédé de commande WO2024047873A1 (fr)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003083806A (ja) * 2001-09-12 2003-03-19 Gigaphoton Inc レーザ装置用エネルギー測定装置及びそれに用いられる光拡散板のエージング方法
JP2013110381A (ja) * 2011-10-25 2013-06-06 Gigaphoton Inc エキシマレーザ装置及びエキシマレーザシステム
DE102012000071A1 (de) * 2012-01-04 2013-07-04 Georg Gerlich Verfahren zum Reinigen von Vakuumsystemen von Strahlungserzeugungsquellen
WO2013171951A1 (fr) * 2012-05-18 2013-11-21 パナソニック株式会社 Dispositif à effet laser
JP2014518456A (ja) * 2011-06-30 2014-07-28 サイマー リミテッド ライアビリティ カンパニー ２チャンバガス放電レーザシステムの自動ガス最適化のためのシステム及び方法
JP2014170885A (ja) * 2013-03-05 2014-09-18 Fanuc Ltd レーザガス容器の密閉性を推定可能なレーザ装置
JP2016139767A (ja) * 2015-01-29 2016-08-04 ファナック株式会社 レーザガスの組成比を判定するガスレーザ装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003083806A (ja) * 2001-09-12 2003-03-19 Gigaphoton Inc レーザ装置用エネルギー測定装置及びそれに用いられる光拡散板のエージング方法
JP2014518456A (ja) * 2011-06-30 2014-07-28 サイマー リミテッド ライアビリティ カンパニー ２チャンバガス放電レーザシステムの自動ガス最適化のためのシステム及び方法
JP2013110381A (ja) * 2011-10-25 2013-06-06 Gigaphoton Inc エキシマレーザ装置及びエキシマレーザシステム
DE102012000071A1 (de) * 2012-01-04 2013-07-04 Georg Gerlich Verfahren zum Reinigen von Vakuumsystemen von Strahlungserzeugungsquellen
WO2013171951A1 (fr) * 2012-05-18 2013-11-21 パナソニック株式会社 Dispositif à effet laser
JP2014170885A (ja) * 2013-03-05 2014-09-18 Fanuc Ltd レーザガス容器の密閉性を推定可能なレーザ装置
JP2016139767A (ja) * 2015-01-29 2016-08-04 ファナック株式会社 レーザガスの組成比を判定するガスレーザ装置

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