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WO2022258781A1 - Pressure sensor - Google Patents

Pressure sensor Download PDF

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Publication number
WO2022258781A1
WO2022258781A1 PCT/EP2022/065758 EP2022065758W WO2022258781A1 WO 2022258781 A1 WO2022258781 A1 WO 2022258781A1 EP 2022065758 W EP2022065758 W EP 2022065758W WO 2022258781 A1 WO2022258781 A1 WO 2022258781A1
Authority
WO
WIPO (PCT)
Prior art keywords
pressure sensor
sensor
support
printed circuit
circuit substrate
Prior art date
Application number
PCT/EP2022/065758
Other languages
French (fr)
Inventor
Gabriel KOPP
Albin LE SERGENT
Pascal Castro
Sylvain Gautier
Original Assignee
Valeo Systemes De Controle Moteur
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Valeo Systemes De Controle Moteur filed Critical Valeo Systemes De Controle Moteur
Publication of WO2022258781A1 publication Critical patent/WO2022258781A1/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0618—Overload protection

Definitions

  • the present invention relates to a differential or absolute pressure sensor.
  • This type of pressure sensor is intended for example to be mounted on an intake air distributor of a heat engine of a motor vehicle, on a particulate filter, or on any other device intended to measure the pressure of a fluid It comprises a sensitive element for measuring the pressure of a fluid flowing in the intake manifold. It can also be used in an EGR (Exhaust Gas Recirculation) loop, in a gearbox, in an air conditioning system, heat pump, cooler, exhaust line, fuel tank, injection line for example.
  • EGR exhaust Gas Recirculation
  • the pressure-sensitive element is placed on a ceramic substrate, itself placed on a printed circuit substrate (PCB for Printed Circuit Board according to the English terminology) to solidify the assembly and allow the conditioning of the electrical signal. All of this is housed in a protective case.
  • the sensor also comprises seals making it possible to seal the assembly against the measured fluid and the external environment.
  • the disadvantage of such a sensor is that it requires times of the force generated by the compression of the seal and seals large enough to overcome the variations in tolerances. This complicates the sensor, weakens it and increases its cost.
  • the object of the present invention is therefore to overcome one or more of the drawbacks of the sensors of the prior art by proposing a simplified and robust sensor.
  • the present invention proposes a pressure sensor comprising: a ceramic support having a first surface and an opposite second surface, a sensitive element placed on the ceramic support at the level of the first surface,
  • the support element 20 crosses the printed circuit substrate 2 limits the tolerances to be compensated. Indeed, the printed circuit substrate 2 is crossed, it is therefore no longer taken into account in the chain of dimensions or in the tolerances.
  • the support element is formed from the internal body of the sensor.
  • the senor comprises at least three support elements.
  • the printed circuit substrate comprises at least one opening through which a support element passes.
  • the printed circuit substrate comprises as many openings as there are support elements.
  • the senor comprises a sealing element arranged on the side of the first surface of the ceramic support, between the sensitive element and an internal face of a casing of the sensor, the size of the joint being determined according to the tolerances due to the ceramic support.
  • the sealing element is arranged around the inlet of the fluid.
  • the sensor being an absolute pressure sensor.
  • the senor being a differential pressure sensor.
  • the invention also relates to the use of the pressure sensor according to the invention, in a motor vehicle.
  • FIG. 1 is a schematic sectional representation of a sensor according to one embodiment of the invention.
  • FIG. 2 is a schematic sectional representation according to another elevational view of a sensor according to one embodiment of the invention.
  • the [Figs. 1] and [Fig. 2] schematically represent a differential and/or absolute pressure sensor 1 for measuring fluid pressure.
  • the measured pressure is for example that of an exhaust gas system of a heat engine, according to a possible embodiment of the invention.
  • This pressure sensor 1 comprises a ceramic support 3.
  • the ceramic support 3 has a first surface 5 and a second surface 6 opposite the first surface 5.
  • the ceramic support 3 is connected to a connector by electrical connections.
  • the pressure sensor 1 comprises a sensitive element 7.
  • the sensitive element 7 is arranged on the ceramic support 3 at the level of the first surface 5.
  • the ceramic support 3 is arranged on a printed circuit substrate 2, (PCB for Printed Circuit Board according to the English terminology) or on a flexible circuit 2, comprising the passive components of the sensor and the circuits printed.
  • PCB printed Circuit Board according to the English terminology
  • the protective casing 4 includes an inlet duct 42 through which the fluid whose pressure is to be measured arrives.
  • the surrounding air can circulate through an orifice located between the ceramic support 3 and the sensitive element 7.
  • This orifice can also be located directly in the ceramic support 3 and/or in the sensitive element 7.
  • the sensitive element 7 and ceramic support 3 assembly is arranged so that the first surface 5 is oriented towards the inlet duct. More specifically, the sensitive element 7 and ceramic support 3 assembly is arranged so that the face of the sensitive element on the first surface 5 is in contact with the arrival of the fluid.
  • the ceramic support rests inside the protective casing 4, on an element making it possible to seal 8.
  • the sealing element 8 is located inside the protective casing 4, between the protective casing 4 and the sensitive element 7.
  • the sensitive element 7 is thus arranged at the level of the arrival of the fluid in the conduit 42 of inlet.
  • the volume created by the conduit 42 and the sealing element 8 thus surrounds the surface of the element 7 so as to form a first pressure inlet channel 10 opening out at the level of the sensitive element 7.
  • the sealing element 8 is arranged around the inlet 10 of the fluid.
  • the sealing element 8 is a seal 8.
  • At least one support element 20 is arranged so as to pass through the printed circuit substrate 2 and so that the second face 6 of the ceramic support B is supported on this element 20.
  • the support element 20 is ring-shaped. That is to say, it forms a circle of matter open in the center.
  • the senor comprises at least three support elements 20 arranged equidistantly and uniformly around the center of the ceramic support 3 and passing through the printed circuit substrate 2, thus forming a discontinuous ring.
  • this support element 20 is formed from the internal body 43 of the housing 4.
  • the printed circuit substrate 2 comprises at least one opening 21 through which a support element 20 passes.
  • the opening is ring-shaped.
  • the printed circuit substrate 2 comprises as many openings 21 as there are support elements 20 .
  • the printed circuit substrate 2 is solid, that is to say without opening at the level of its part located under the sensitive element 7, as illustrated in figure [1].
  • the tolerance compensation includes at least the printed circuit substrate and the ceramic support, whereas in the present invention, the printed circuit substrate 2 is crossed, it is therefore no longer taken taken into account in the side chain nor in the tolerances.
  • Such a sensor makes it possible to retain the flexibility of the printed circuit substrate support 2 and to ensure the connectivity of the components.
  • Such a sensor is more robust and allows the use of a smaller joint, which is therefore less expensive, and less bulky.
  • the support element 20 is configured to withstand at least 100 bars.
  • the inlet duct 42 is preferably made of metallic material and has a cylindrical shape.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

The present invention relates to a pressure sensor (1) comprising: - a ceramic support (3) having a first surface (5) and an opposite second surface (6); - a sensor element (7) arranged on the ceramic support (3) on the first surface (5); - a printed circuit substrate (2) on which the ceramic support (3) is arranged, a support element (20) being arranged so as to pass through the printed circuit substrate (2) and so that the second face (6) of the ceramic support (3) rests on this element (20).

Description

Titre de l'invention : CAPTEUR DE PRESSION Title of the invention: PRESSURE SENSOR
La présente invention concerne un capteur de pression différentielle ou absolue. The present invention relates to a differential or absolute pressure sensor.
Ce type de capteur de pression est destiné par exemple à être monté sur un répartiteur d'air d'admission d'un moteur thermique d'un véhicule automobile, sur un filtre à particule, ou sur tout autre organe destiné à mesurer la pression d'un fluide Il comprend un élément sensible pour mesurer une pression d'un fluide circulant dans le répartiteur d'admission. Il peut être utilisé également dans une boucle EGR («Exhaust Gaz Recirculation»), dans une boite de vitesse, dans un système d'air conditionné, pompe à chaleur, refroidisseur, ligne d'échappement, réservoir de carburant, ligne d'injection par exemple. This type of pressure sensor is intended for example to be mounted on an intake air distributor of a heat engine of a motor vehicle, on a particulate filter, or on any other device intended to measure the pressure of a fluid It comprises a sensitive element for measuring the pressure of a fluid flowing in the intake manifold. It can also be used in an EGR (Exhaust Gas Recirculation) loop, in a gearbox, in an air conditioning system, heat pump, cooler, exhaust line, fuel tank, injection line for example.
Classiquement l'élément sensible à la pression est disposé sur un substrat en céramique, lui-même disposé sur un substrat circuit imprimé (PCB pour Printed Circuit Board selon la terminologie anglaise) pour solidifier l'ensemble et permettre le conditionnement du signal électrique. Le tout étant logé dans un boîtier de protection. Le capteur comporte également des joints permettant d'étanchéifier l'ensemble, au fluide mesuré et à l'environnement extérieur. L'inconvénient d'un tel capteur est qu'il nécessite des reprises de l'effort engendré par la compression du joint et des joints assez grands pour pallier les variations de tolérances. Cela complexifie de capteur, le fragilise et augmente son coût. La présente invention a donc pour objet de pallier un ou plusieurs des inconvénients des capteurs de l'art antérieur en proposant un capteur simplifié et robuste. Conventionally, the pressure-sensitive element is placed on a ceramic substrate, itself placed on a printed circuit substrate (PCB for Printed Circuit Board according to the English terminology) to solidify the assembly and allow the conditioning of the electrical signal. All of this is housed in a protective case. The sensor also comprises seals making it possible to seal the assembly against the measured fluid and the external environment. The disadvantage of such a sensor is that it requires times of the force generated by the compression of the seal and seals large enough to overcome the variations in tolerances. This complicates the sensor, weakens it and increases its cost. The object of the present invention is therefore to overcome one or more of the drawbacks of the sensors of the prior art by proposing a simplified and robust sensor.
Pour cela la présente invention propose un capteur de pression comprenant : un support en céramique présentant une première surface et une deuxième surface opposée, un élément sensible disposé sur le support céramique au niveau de la première surface, For this, the present invention proposes a pressure sensor comprising: a ceramic support having a first surface and an opposite second surface, a sensitive element placed on the ceramic support at the level of the first surface,
- un substrat circuit imprimé sur lequel est disposé le support céramique Un élément de support étant disposé de façon à traverser le substrat circuit imprimé et de façon à ce que la deuxième face du support céramique soit en appuie sur cet élément. Le fait que l'élément 20 support traverse le substrat circuit imprimé 2 limite les tolérances à compenser. En effet, le substrat circuit imprimé 2 est traversé, il n'est donc plus pris en compte dans la chaîne de côte ni dans les tolérances. Selon un mode de réalisation de l'invention, l'élément de support est formé à partir du corps interne du capteur. - A printed circuit substrate on which the ceramic support is arranged. A support element being arranged so as to pass through the printed circuit substrate and so that the second face of the ceramic support rests on this element. The fact that the support element 20 crosses the printed circuit substrate 2 limits the tolerances to be compensated. Indeed, the printed circuit substrate 2 is crossed, it is therefore no longer taken into account in the chain of dimensions or in the tolerances. According to one embodiment of the invention, the support element is formed from the internal body of the sensor.
Selon un mode de réalisation de l'invention, le capteur comporte au moins trois éléments support. According to one embodiment of the invention, the sensor comprises at least three support elements.
Selon un mode de réalisation de l'invention, le substrat circuit imprimé comporte au moins une ouverture à travers laquelle passe un élément support. According to one embodiment of the invention, the printed circuit substrate comprises at least one opening through which a support element passes.
Selon un mode de réalisation de l'invention, le substrat circuit imprimé comporte autant d'ouvertures que d'éléments support. According to one embodiment of the invention, the printed circuit substrate comprises as many openings as there are support elements.
Selon un mode de réalisation de l'invention, le capteur comporte un élément d'étanchéité disposé du côté de la première surface du support céramique, entre l'élément sensible et une face interne d'un boîtier du capteur, la taille du joint étant déterminée en fonction des tolérances dues au support céramique. According to one embodiment of the invention, the sensor comprises a sealing element arranged on the side of the first surface of the ceramic support, between the sensitive element and an internal face of a casing of the sensor, the size of the joint being determined according to the tolerances due to the ceramic support.
Le fait de s'affranchir du substrat circuit imprimé dans le calcul de la chaîne de côte et des tolérances permet d'utiliser un élément d'étanchéité dont la taille est inférieure à celle d'un joint utiliser dans l'art antérieur. The fact of dispensing with the printed circuit substrate in the calculation of the side chain and the tolerances makes it possible to use a sealing element whose size is smaller than that of a joint used in the prior art.
Selon un mode de réalisation de l'invention, l'élément d'étanchéité est disposé autour de l'arrivée du fluide. According to one embodiment of the invention, the sealing element is arranged around the inlet of the fluid.
Selon un mode de réalisation de l'invention, le capteur étant un capteur de pression absolue. According to one embodiment of the invention, the sensor being an absolute pressure sensor.
Selon un mode de réalisation de l'invention, le capteur étant un capteur de pression différentielle. According to one embodiment of the invention, the sensor being a differential pressure sensor.
L'invention concerne également l'utilisation du capteur de pression selon l'invention, dans un véhicule automobile. The invention also relates to the use of the pressure sensor according to the invention, in a motor vehicle.
D'autres buts, caractéristiques et avantages de l'invention seront mieux compris et apparaîtront plus clairement à la lecture de la description faite, ci-après, en se référant aux figures annexées, données à titre d'exemple et dans lesquelles: Other aims, characteristics and advantages of the invention will be better understood and will appear more clearly on reading the description given below, with reference to the appended figures, given by way of example and in which:
- la [Fig. 1] est une représentation schématique en coupe d'un capteur selon un mode de réalisation de l'invention, - the [Fig. 1] is a schematic sectional representation of a sensor according to one embodiment of the invention,
- la [Fig. 2] est une représentation schématique en coupe selon une autre vue en élévation d'un capteur selon un mode de réalisation de l'invention. - the [Fig. 2] is a schematic sectional representation according to another elevational view of a sensor according to one embodiment of the invention.
Les [Fig. 1] et [Fig. 2] représentent schématiquement un capteur 1 de pression différentielle et/ou absolue pour mesurer une pression de fluide. La pression mesurée est par exemple celle d'un système de gaz d'échappement d'un moteur thermique, selon un mode de réalisation possible de l'invention. The [Figs. 1] and [Fig. 2] schematically represent a differential and/or absolute pressure sensor 1 for measuring fluid pressure. The measured pressure is for example that of an exhaust gas system of a heat engine, according to a possible embodiment of the invention.
Ce capteur 1 de pression comprend un support en céramique 3. Le support céramique 3 présente une première surface 5 et une deuxième surface 6 opposée à la première surface 5. This pressure sensor 1 comprises a ceramic support 3. The ceramic support 3 has a first surface 5 and a second surface 6 opposite the first surface 5.
Le support céramique 3 est relié à un connecteur par des liaisons électriques. The ceramic support 3 is connected to a connector by electrical connections.
Le capteur de pression 1 comprend un élément sensible 7. The pressure sensor 1 comprises a sensitive element 7.
Selon un mode de réalisation de l'invention, l'élément sensible 7 est disposé sur le support céramique 3 au niveau de la première surface 5. According to one embodiment of the invention, the sensitive element 7 is arranged on the ceramic support 3 at the level of the first surface 5.
Selon un mode de réalisation de l'invention, le support céramique 3 est disposé sur un substrat circuit imprimé 2, (PCB pour Printed Circuit Board selon la terminologie anglaise) ou sur un circuit flexible 2, comportant les composants passifs du capteur et les circuits imprimés. According to one embodiment of the invention, the ceramic support 3 is arranged on a printed circuit substrate 2, (PCB for Printed Circuit Board according to the English terminology) or on a flexible circuit 2, comprising the passive components of the sensor and the circuits printed.
Il y a donc ainsi un empilement formé par l'élément 7 sensible puis le substrat céramique 3 puis le substrat circuit imprimé 2. There is therefore thus a stack formed by the sensitive element 7 then the ceramic substrate 3 then the printed circuit substrate 2.
L'ensemble des éléments est disposé dans un boîtier 4 de protection. All the elements are placed in a protective casing 4 .
Le boîtier 4 de protection comporte un conduit 42 d'entrée par lequel le fluide dont la pression est à mesurer arrive. The protective casing 4 includes an inlet duct 42 through which the fluid whose pressure is to be measured arrives.
Selon un mode de réalisation de l'invention, lorsque le capteur est un capteur de pression différentielle, l'air environnant peut circuler par un orifice situé entre le support céramique 3 et l'élément sensible 7. Cet orifice peut également être situé directement dans le support céramique 3 et/ou dans l'élément sensible 7. According to one embodiment of the invention, when the sensor is a differential pressure sensor, the surrounding air can circulate through an orifice located between the ceramic support 3 and the sensitive element 7. This orifice can also be located directly in the ceramic support 3 and/or in the sensitive element 7.
L'ensemble élément sensible 7 et support en céramique 3 est disposé de façon à ce que la première surface 5 soit orientée vers le conduit d'entrée. Plus précisément, l'ensemble élément sensible 7 et support en céramique 3 est disposé de façon à ce que la face de l'élément sensible sur la première surface 5, soit en contact avec l'arrivée du fluide.The sensitive element 7 and ceramic support 3 assembly is arranged so that the first surface 5 is oriented towards the inlet duct. More specifically, the sensitive element 7 and ceramic support 3 assembly is arranged so that the face of the sensitive element on the first surface 5 is in contact with the arrival of the fluid.
Le support céramique prend appui à l'intérieur du boîtier 4 de protection, sur un élément permettant d'étanchéifier 8. L'élément permettant d'étanchéifier 8 est situé à l'intérieur du boîtier de protection 4, entre le boîtier de protection 4 et l'élément sensible 7. L'élément sensible 7 est ainsi disposé au niveau de l'arrivée du fluide dans le conduit 42 d'entrée. Le volume créé par le conduit 42 et l'élément d'étanchéité 8 entoure ainsi la surface de l'élément 7 de façon à former un premier canal d'entrée de pressionlO débouchant au niveau de l'élément sensible 7. The ceramic support rests inside the protective casing 4, on an element making it possible to seal 8. The sealing element 8 is located inside the protective casing 4, between the protective casing 4 and the sensitive element 7. The sensitive element 7 is thus arranged at the level of the arrival of the fluid in the conduit 42 of inlet. The volume created by the conduit 42 and the sealing element 8 thus surrounds the surface of the element 7 so as to form a first pressure inlet channel 10 opening out at the level of the sensitive element 7.
L'élément d'étanchéité 8 est disposé autour de l'arrivée 10 du fluide. The sealing element 8 is arranged around the inlet 10 of the fluid.
Selon un mode de réalisation de l'invention, l'élément d'étanchéité 8 est un joint 8. According to one embodiment of the invention, the sealing element 8 is a seal 8.
Dans le cadre de l'invention, pour compenser les efforts de l'élément d'étanchéité 8 et limiter sa taille, au moins un élément 20 de support est disposé de façon à traverser le substrat circuit imprimé 2 et de façon à ce que la deuxième face 6 du support céramique B soit en appuie sur cet élément 20. In the context of the invention, to compensate for the forces of the sealing element 8 and to limit its size, at least one support element 20 is arranged so as to pass through the printed circuit substrate 2 and so that the second face 6 of the ceramic support B is supported on this element 20.
Selon un mode de réalisation de l'invention, l'élément 20 support est en forme d'anneau. C'est-à-dire qu'il forme un cercle de matière ouvert au centre. According to one embodiment of the invention, the support element 20 is ring-shaped. That is to say, it forms a circle of matter open in the center.
Selon un mode de réalisation de l'invention, le capteur comporte au moins trois éléments 20 support disposées de façon équidistante et uniformément autour du centre du support céramique 3 et traversant le substrat circuit imprimé 2, formant ainsi un anneau discontinu According to one embodiment of the invention, the sensor comprises at least three support elements 20 arranged equidistantly and uniformly around the center of the ceramic support 3 and passing through the printed circuit substrate 2, thus forming a discontinuous ring.
Selon un mode de réalisation de l'invention, cet élément 20 support est formé à partir du corps interne 43 du boîtier 4. According to one embodiment of the invention, this support element 20 is formed from the internal body 43 of the housing 4.
Dans le cadre de l'invention, le substrat circuit imprimé 2 comporte au moins une ouverture 21 à travers laquelle passe un élément 20 support. In the context of the invention, the printed circuit substrate 2 comprises at least one opening 21 through which a support element 20 passes.
Selon un mode de réalisation de l'invention, l'ouverture est en forme d'anneau. According to one embodiment of the invention, the opening is ring-shaped.
Selon un mode de réalisation de l'invention, le substrat circuit imprimé 2 comporte autant d'ouvertures 21 que d'éléments 20 support. According to one embodiment of the invention, the printed circuit substrate 2 comprises as many openings 21 as there are support elements 20 .
Selon un mode de réalisation de l'invention, le substrat circuit imprimé 2 est plein, c'est- à-dire sans ouverture au niveau de sa partie située sous l'élément 7 sensible, comme illustré figure [1] According to one embodiment of the invention, the printed circuit substrate 2 is solid, that is to say without opening at the level of its part located under the sensitive element 7, as illustrated in figure [1].
Le fait que l'élément 20 support traverse le substrat circuit imprimé 2 limite les tolérances à compenser. En effet, dans un capteur de l'art antérieur, la compensation des tolérances inclus au moins le substrat circuit imprimé et le support céramique, alors que dans la présente invention, le substrat circuit imprimé 2 est traversé, il n'est donc plus pris en compte dans la chaîne de côte ni dans les tolérances. The fact that the support element 20 crosses the printed circuit substrate 2 limits the tolerances to be compensated. Indeed, in a sensor of the prior art, the tolerance compensation includes at least the printed circuit substrate and the ceramic support, whereas in the present invention, the printed circuit substrate 2 is crossed, it is therefore no longer taken taken into account in the side chain nor in the tolerances.
La fait de s'affranchir du substrat circuit imprimé 2 dans le calcul de la chaîne de côte et des tolérances permet d'utiliser un joint 8 dont la taille est inférieure à celle d'un joint utiliser dans l'art antérieur. La taille du joint est ainsi déterminée en fonction des tolérances dues au support céramique. The fact of dispensing with the printed circuit substrate 2 in the calculation of the side chain and the tolerances makes it possible to use a joint 8 whose size is smaller than that of a joint use in the prior art. The size of the joint is thus determined according to the tolerances due to the ceramic support.
Un tel capteur permet de conserver la flexibilité du support substrat circuit imprimé 2 et d'assurer la connectivité des composants. Un tel capteur est plus robuste et permet l'utilisation d'un joint plus petit donc moins coûteux, et moins encombrant. Such a sensor makes it possible to retain the flexibility of the printed circuit substrate support 2 and to ensure the connectivity of the components. Such a sensor is more robust and allows the use of a smaller joint, which is therefore less expensive, and less bulky.
L'élément 20 de support est configuré pour résister à au moins 100 bars. The support element 20 is configured to withstand at least 100 bars.
Selon un mode de réalisation de l'invention, le conduit 42 d'entrée est de préférence en matériau métallique et présente une forme cylindrique. According to one embodiment of the invention, the inlet duct 42 is preferably made of metallic material and has a cylindrical shape.
La portée de la présente invention ne se limite pas aux détails donnés ci-dessus et permet des modes de réalisation sous de nombreuses autres formes spécifiques sans s'éloigner du domaine d'application de l'invention. Par conséquent, les présents modes de réalisation doivent être considérés à titre d'illustration, et peuvent être modifiés sans toutefois sortir de la portée définie par les revendications. The scope of the present invention is not limited to the details given above and allows embodiments in many other specific forms without departing from the scope of the invention. Therefore, the present embodiments should be considered by way of illustration, and can be modified without departing from the scope defined by the claims.

Claims

REVENDICATIONS
1. Capteur (1) de pression comprenant : un support en céramique (3) présentant une première surface (5) et une deuxième surface (6) opposée, un élément sensible (7) disposé sur le support céramique (3) au niveau de la première surface (5), 1. Pressure sensor (1) comprising: a ceramic support (3) having a first surface (5) and an opposite second surface (6), a sensitive element (7) disposed on the ceramic support (3) at the first surface (5),
- un substrat circuit imprimé (2) sur lequel est disposé le support céramique (3) caractérisé en ce qu'un élément (20) de support est disposé de façon à traverser le substrat circuit imprimé (2) et de façon à ce que la deuxième face (6) du support céramique (3) soit en appuie sur cet élément (20). - a printed circuit substrate (2) on which the ceramic support (3) is arranged, characterized in that a support element (20) is arranged so as to pass through the printed circuit substrate (2) and so that the second face (6) of the ceramic support (3) is supported on this element (20).
2. Capteur (1) de pression selon la revendication 1, dans lequel l'élément (20) de support est formé à partir du corps (43) interne du capteur (1). 2. Pressure sensor (1) according to claim 1, in which the support element (20) is formed from the internal body (43) of the sensor (1).
3. Capteur (1) de pression selon une des revendications 1 ou 2, comportant au moins trois éléments (20) support. 3. Sensor (1) pressure according to one of claims 1 or 2, comprising at least three elements (20) support.
4. Capteur (1) de pression selon une des revendications 1 à 3, dans lequel le substrat circuit imprimé (2) comporte au moins une ouverture (21) à travers laquelle passe un élément (20) support. 4. Pressure sensor (1) according to one of claims 1 to 3, wherein the printed circuit substrate (2) has at least one opening (21) through which passes a support element (20).
5. Capteur (1) de pression selon une des revendications 1 à 4, dans lequel le substrat circuit imprimé (2) comporte autant d'ouvertures (21) que d'éléments (20) support.5. Pressure sensor (1) according to one of claims 1 to 4, wherein the printed circuit substrate (2) has as many openings (21) as support elements (20).
6. Capteur (1) de pression selon une des revendications 1 à 5, comportant un élément d'étanchéité (8) disposé du côté de la première surface (5) du support céramique (3), entre l'élément sensible (7) et une face interne (41) d'un boîtier (4) du capteur (1).6. Pressure sensor (1) according to one of claims 1 to 5, comprising a sealing element (8) disposed on the side of the first surface (5) of the ceramic support (3), between the sensitive element (7) and an internal face (41) of a casing (4) of the sensor (1).
7. Capteur (1) de pression selon la revendication 6, dans lequel l'élément d'étanchéité (8) est disposé autour de l'arrivée (10) du fluide. 7. Pressure sensor (1) according to claim 6, in which the sealing element (8) is arranged around the inlet (10) of the fluid.
8. Capteur (1) de pression selon une des revendications 1 à 7, le capteur étant un capteur de pression absolue. 8. Pressure sensor (1) according to one of claims 1 to 7, the sensor being an absolute pressure sensor.
9. Capteur (1) de pression selon une des revendications 1 à 7, le capteur étant un capteur de pression différentielle. 9. Pressure sensor (1) according to one of claims 1 to 7, the sensor being a differential pressure sensor.
10. Utilisation du capteur (1) de pression selon une des revendications 1 à 7, dans un véhicule automobile. 10. Use of the pressure sensor (1) according to one of claims 1 to 7, in a motor vehicle.
PCT/EP2022/065758 2021-06-11 2022-06-09 Pressure sensor WO2022258781A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2106201A FR3123983B1 (en) 2021-06-11 2021-06-11 PRESSURE SENSOR
FRFR2106201 2021-06-11

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WO2022258781A1 true WO2022258781A1 (en) 2022-12-15

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3059773A1 (en) * 2016-12-02 2018-06-08 Sc2N COMPACT PRESSURE SENSOR
FR3074579A1 (en) * 2017-12-05 2019-06-07 Sc2N PROCESS FOR SIMPLIFIED MANUFACTURING OF A DIFFERENTIAL PRESSURE SENSOR
FR3083309A1 (en) * 2018-06-29 2020-01-03 Sc2N PRESSURE SENSOR

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3059773A1 (en) * 2016-12-02 2018-06-08 Sc2N COMPACT PRESSURE SENSOR
FR3074579A1 (en) * 2017-12-05 2019-06-07 Sc2N PROCESS FOR SIMPLIFIED MANUFACTURING OF A DIFFERENTIAL PRESSURE SENSOR
FR3083309A1 (en) * 2018-06-29 2020-01-03 Sc2N PRESSURE SENSOR

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FR3123983B1 (en) 2023-12-22
FR3123983A1 (en) 2022-12-16

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