WO2022082737A1 - 显示基板及其制作方法、显示装置 - Google Patents
显示基板及其制作方法、显示装置 Download PDFInfo
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- WO2022082737A1 WO2022082737A1 PCT/CN2020/123266 CN2020123266W WO2022082737A1 WO 2022082737 A1 WO2022082737 A1 WO 2022082737A1 CN 2020123266 W CN2020123266 W CN 2020123266W WO 2022082737 A1 WO2022082737 A1 WO 2022082737A1
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- conductive layer
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- connection pads
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Definitions
- the invention belongs to the field of display, and in particular relates to a display substrate, a manufacturing method of the display substrate, and a display device.
- the full-screen display substrate includes a display area and a bonding area, the display area has a plurality of gate lines, and the bonding area has a plurality of connection pads for connecting external signals.
- the metal layer of the grid lines faces the display side of the display panel. Therefore, if external light is irradiated on the grid lines, it will be reflected by the grid lines, thereby causing reflection to affect the display quality of the display device formed by the display substrate.
- the present invention aims to solve at least one of the technical problems existing in the prior art, and provides a display substrate, which can prevent grid lines from reflecting light, and can avoid abnormal identification of connection pads.
- an embodiment of the present disclosure provides a display substrate having a display area and a bonding area located on at least one side of the display area; wherein the display substrate includes:
- the first conductive layer includes a plurality of grid lines
- a light shielding layer disposed on the side of the first conductive layer close to the substrate, and the orthographic projection of the light shielding layer on the substrate at least covers the orthographic projection of the plurality of grid lines on the substrate;
- connection pads are arranged on the substrate at intervals and located in the bonding area; wherein at least part of the connection pads and the orthographic projection of the light shielding layer on the substrate do not overlap.
- the grid lines can be effectively prevented from reflecting light; and, since there is no light shielding layer provided under at least part of the connection pads, the light shielding layer is away from the substrate during the detection process.
- the connection pads can be accurately identified.
- the orthographic projections of the plurality of connection pads on the substrate do not overlap with the orthographic projections of the light shielding layer on the substrate.
- the plurality of connection pads are disposed in the first conductive layer and are of the same material as the plurality of gate lines.
- the plurality of connection pads include functional connection pads and redundant connection pads; wherein,
- the orthographic projection of the redundant connection pad on the substrate does not overlap with the orthographic projection of the light shielding layer on the substrate;
- the orthographic projection of the functional connection pad on the substrate at least partially overlaps the orthographic projection of the light shielding layer on the substrate.
- the display substrate further includes: an auxiliary electrode and a common electrode disposed on a side of the first conductive layer away from the substrate, and the two are disposed in sequence along a direction away from the substrate and are electrically connected; the Orthographic projections of the auxiliary electrode and the common electrode on the substrate at least partially overlap;
- the redundant connection pad includes a first conductive part and a second conductive part which are arranged on the side of the first conductive layer away from the substrate and are electrically connected, and the first conductive part and the common electrode are in the same layer
- the second conductive part and the auxiliary electrode are arranged in the same layer and have the same material.
- the functional connection pad and the plurality of gate lines are disposed in the same layer and have the same material.
- the display substrate further has a frame sealing area disposed around the display area, and the bonding area is disposed on at least one side of the frame sealing area away from the display area; the display substrate further includes : a plurality of first marks disposed on the substrate and in the bonding area; wherein,
- the first mark has no overlap with the orthographic projection of the light shielding layer on the substrate.
- the plurality of first marks and the plurality of gate lines are disposed in the same layer and of the same material.
- the display substrate further includes: an auxiliary electrode and a common electrode arranged on a side of the first conductive layer away from the substrate, and the two are arranged in sequence along a direction away from the substrate and are electrically connected; Orthographic projections of the auxiliary electrode and the common electrode on the substrate at least partially overlap;
- the first mark includes a third conductive part and a fourth conductive part which are provided on the side of the first conductive layer away from the substrate and are electrically connected, the third conductive part is provided on the same layer as the common electrode and The materials are the same; the fourth conductive part and the auxiliary electrode are arranged in the same layer and have the same material.
- the display substrate further includes a plurality of fan-out traces arranged on the substrate at intervals, and one of the fan-out traces is connected to one of the connection pads correspondingly, and the fan-out traces are connected by the bonding pads.
- the fixed area extends to the display area; wherein, the orthographic projection of the light shielding layer on the substrate covers the orthographic projection of the plurality of fan-out traces on the substrate.
- an embodiment of the present disclosure further provides a method for fabricating a display substrate, which has a display area and a bonding area located on at least one side of the display area, wherein the method includes the following steps:
- the first conductive layer is patterned, a plurality of gate lines are formed on the portion of the first conductive layer located in the display area, and the first conductive layer is located in the bonding Parts of the area form a plurality of connection pads, including:
- the first conductive layer and the portion of the first conductive layer disposed in the display area close to the first conductive layer is exposed and developed to form the plurality of gate lines and the plurality of connection pads.
- embodiments of the present disclosure further provide a method for fabricating a display substrate, which has a display area and a bonding area located on at least one side of the display area; wherein the plurality of connection pads include functional connection pads and redundant connection pads.
- the remaining connection pads; the manufacturing method includes the following steps:
- a plurality of the redundant connection pads are formed on the side of the first conductive layer facing away from the substrate.
- the redundant connection pad includes a first conductive portion and a second conductive portion that are disposed on a side of the first conductive layer away from the substrate and are electrically connected; the first conductive portion and the second conductive portion are electrically connected.
- a plurality of the redundant connection pads are fabricated on the side of the layer away from the substrate, which specifically includes:
- a second conductive layer is formed on the side of the first conductive layer facing away from the substrate;
- a third conductive layer is formed on the side of the second conductive layer away from the substrate;
- an embodiment of the present disclosure further provides a display device, which includes the above-mentioned display substrate.
- FIG. 1 is a schematic plan view of a structure of an embodiment of a display substrate provided by an embodiment of the present disclosure.
- FIG. 2 is one of cross-sectional views of an embodiment of a display substrate provided by an embodiment of the present disclosure.
- FIG. 3 is a cross-sectional view taken along the direction A-B in FIG. 1 .
- FIG. 4 is a cross-sectional view taken along the C-D direction in FIG. 1 .
- FIG. 5 is a cross-sectional view taken along the direction E-F in FIG. 1 .
- FIG. 6 is a cross-sectional view taken along the G-H direction in FIG. 1 .
- FIG. 7 is a schematic plan view of an embodiment of an auxiliary electrode of a display substrate according to an embodiment of the present disclosure.
- FIG. 8 is a schematic plan structure diagram of an embodiment of a common electrode of a display substrate according to an embodiment of the present disclosure.
- FIG. 9 is a schematic diagram of the distribution of some connection pads in another embodiment of the display substrate provided by the embodiment of the present disclosure.
- FIG. 10 is a cross-sectional view taken along the K-L direction in FIG. 9 .
- FIG. 11 is a second cross-sectional view of an embodiment of a display substrate provided by an embodiment of the present disclosure.
- FIG. 12 is a flowchart of an embodiment of a method for fabricating a display substrate provided by an embodiment of the present disclosure.
- FIG. 13 is a schematic diagram (side view) of a manufacturing process of an embodiment of a manufacturing method of a display substrate provided by an embodiment of the present disclosure.
- FIG. 14 is a schematic diagram (plan view) of a manufacturing process of an embodiment of a method for manufacturing a display substrate provided by an embodiment of the present disclosure.
- FIG. 15 is a flowchart of another embodiment of a method for fabricating a display substrate provided by an embodiment of the present disclosure.
- FIG. 16 is a schematic diagram (side view) of a manufacturing process of another embodiment of the manufacturing method of the display substrate provided by the embodiment of the present disclosure.
- Embodiments of the present disclosure are not limited to the embodiments shown in the drawings, but include modifications of configurations formed based on manufacturing processes.
- the regions illustrated in the figures have schematic properties and the shapes of regions illustrated in the figures are illustrative of the specific shapes of regions of elements and are not intended to be limiting.
- FIG. 1 shows a top view of an example of a display substrate provided by an embodiment of the present disclosure.
- the display substrate has a display area Q1 and a bonding area Q2 on at least one side of the display area Q1 .
- the display area Q1 has a plurality of sub-pixels 100 arranged in an array, and the bonding area Q2 has a plurality of connection pads 3.
- the connection pads 3 are used to receive the signals transmitted by the external driving integrated circuit and transmit them to the display area.
- Subpixel 100 The display substrate further includes a plurality of gate lines 2 extending along the first direction, and a plurality of data lines 5 extending along the second direction, and the intersection of the gate lines 2 and the data lines 5 defines regions of the sub-pixels 100 .
- the first direction and the second direction can be any direction, as long as the first direction and the second direction are not parallel.
- the first direction is used as the row direction of the sub-pixels 100 arranged in the array.
- the second direction is the column direction of the sub-pixels 100 arranged in the array as an example for description.
- the display substrate may further include a frame sealing area Q3, the frame sealing area Q3 is arranged around the display area Q1, the bonding area Q2 is arranged on at least one side of the frame sealing area Q3 away from the display area Q1, and the frame sealing area is used for setting
- the frame sealant is used to seal the display substrate and the color filter substrate when they are assembled.
- a driver integrated circuit such as a gate driver integrated array (Gate on Array, GOA)
- GOA gate driver integrated array
- the GOA can be arranged along the extending direction of the gate line 2, and is arranged at both ends of the gate line 2.
- the gate line 2 is connected to the GOA at both ends and receives the scanning signal transmitted by the GOA.
- the display substrate may adopt GOAs arranged on one side, that is, GOAs are arranged only at one end of the gate lines 2, or GOAs may be arranged on both sides, that is, GOAs are arranged at both ends of the gate lines 2, which is not limited here.
- the display substrate adopts the GOA arranged on both sides as an example for description.
- the position of the bonding area Q2 of the display substrate is also different according to the different setting positions of the driving integrated circuits.
- S-IC When the data lines 5 are driven, two sides of the display substrate opposite to both ends of the gate lines 2 and one side of the display substrate opposite to either end of the data lines 5 can be set as bonding regions Q2.
- the display substrate adopts GOA to drive the gate line 2 only one side of the display substrate opposite to either end of the data line 5 is used as the bonding area Q2 .
- the following description is given by taking the display substrate having one bonding area Q2 and the bonding area Q2 being disposed on the upper side of the display substrate as an example, but the embodiment of the present disclosure is not limited.
- FIG. 2 is an example of a cross-sectional view of a display substrate provided in this embodiment.
- the display substrate provided by an embodiment of the present disclosure includes a substrate 1 and a first conductive layer on the substrate 1 , The first conductive layer is located in the display area Q1, and the first conductive layer includes a plurality of gate lines 2, and the plurality of gate lines 2 are connected to the GOAs on both sides.
- the display substrate also includes a light-shielding layer 4, which is arranged on the side of the first conductive layer close to the substrate 1.
- the plurality of grid lines 2 will reflect the external light, thereby causing the display device composed of the display substrate. Therefore, setting the light shielding layer 4 on the side of the grid line 2 close to the substrate 1 can avoid the reflection phenomenon caused by the grid line 2, that is to say, the orthographic projection of the light shielding layer 4 on the substrate 1 covers at least a plurality of grid lines 2. Orthographic projection on substrate 1.
- the display substrate further includes a plurality of connection pads 3, the plurality of connection pads 3 are arranged on the substrate 1 at intervals, and the plurality of connection pads 3 are located in the bonding area Q2, and the bonding
- the area Q2 includes a plurality of sub-areas Q21 arranged side by side, and each sub-area Q21 corresponds to a connector, that is to say, the plurality of connection pads 3 are divided into multiple groups, and each sub-area Q21 is provided with a group of connection pads 3, connecting the Pad 3
- the connection pad 3 is an exposed electrode. One end of a set of connection pads 3 is connected to each pin package in a connector, and the other end is connected to each data line 5 or GOA in the display area Q1.
- An integrated driver circuit (eg, a source driver circuit) is connected to each pin of the connector, and transmits signals to the connection pads 3 through the connector.
- the connector can be various types of connectors, such as a chip on film (Chip On Flex, COF) connector, or a chip on glass (Chip On Glass, COG) connector, etc., each set of connection pads 3.
- ACF glue anisotropic conductive glue
- connection pads 3 are usually arranged in the same layer and of the same material as the plurality of gate lines 2, that is to say, the connection pads 3 are arranged in the first conductive layer and are arranged in the same layer as the plurality of gate lines 2. 2 It is made of the same film layer, so usually a light-shielding layer 4 is formed on the substrate 1, and then a first conductive layer is formed on the side of the light-shielding layer 4 away from the substrate 1, and then the first conductive layer is patterned to form a plurality of grids Line 2 and a plurality of connection pads 3, so that there is also a light shielding layer 4 below the connection pads 3.
- the camera detects the image of the connecting pads 3 through the side of the substrate 1 away from the connecting pads 3, so as to observe the pressure of the ACF glue.
- the light shielding layer 4 is provided between the connection pad 3 and the substrate 1, the connection pad 3 cannot be observed.
- the orthographic projection of at least part of the connection pads 3 on the substrate 1 does not overlap with the orthographic projection of the light shielding layer 4 on the substrate 1 .
- the camera can observe the pressing quality of each connection pad 3 of the plurality of connection pads 3 from the side of the substrate 1 away from the connection pad 3; 4
- the orthographic projection on the substrate 1 does not overlap, that is, there is no light shielding layer 4 under the part of the connection pad 3, then the camera can observe the part of the connection pad 3 without the light shielding layer 4 from the side of the substrate 1 away from the connection pad 3. Since a plurality of connection pads 3 are pressed in the same process, the difference in the quality of each connection pad 3 is small. Therefore, all connections can be judged by the quality of some connection pads 3. Bonding quality of pad 3.
- the following takes the embodiment of observing the pressing quality of all the connection pads 3 as an example, referring to FIG. 1 to FIG. 6 , the orthographic projections of all the connection pads 3 on the substrate 1 are the same as the light-shielding layer 4 on the substrate 1 .
- the orthographic projections on are non-overlapping.
- the plurality of connection pads 3 are arranged in the first conductive layer, that is, the plurality of connection pads 3 and the plurality of gate lines 2 are arranged in the same layer and of the same material.
- the difference is that the connection between the plurality of gate lines 2 and the substrate 1 is There is also a light shielding layer 4 in between, and the connection pads 3 are directly formed on the substrate 1 . Referring to FIG. 3 , FIG.
- FIG. 3 is a cross-sectional view of FIG. 1 taken along the A-B direction at the gate line 2 in the display area Q1 .
- a light shielding layer 4 is provided between the gate line 2 and the substrate 1 to prevent the gate line 2 from reflecting light.
- FIG. 4 is a cross-sectional view taken along the C-D direction at the connection pad 3 in the bonding area Q2, the light shielding layer 4 is not provided between the connection pad 3 and the substrate 1, and the connection pad 3 is connected to the gate line. 2 is formed directly on the substrate 1 using the same material. As a result, the quality of pressing of each connection pad 3 can be directly observed from the side of the substrate 1 facing away from the connection pads 3 .
- the display substrate further includes a gate insulating layer 01 disposed on the side of the first conductive layer (the layer where the connection pad 3 and the gate line 2 are located) away from the substrate 1; the gate insulating layer 01
- An active layer 04 is provided on the side away from the substrate 1; the active layer 04 has a source electrode 05 and a drain electrode 06 on the side away from the substrate 1, the source electrode 05 and the drain electrode 06 are arranged in the same layer and have the same material, and the gate and the gate are insulated.
- Layer 01, active layer 04, source electrode 05, and drain electrode 06 form a thin film transistor. Each film layer of the thin film transistor is only arranged in the display area Q1.
- each sub-pixel 100 has a thin film transistor, and a gate line 2 is connected in the same row.
- the thin film transistor of the sub-pixel 100, a data line 5 is connected to the thin film transistor of the sub-pixel 100 in the same column;
- the source electrode 05 and the drain electrode 06 have a flat layer 03 on the side away from the substrate 1, and the flat layer 03 can be made of an organic film (ORG film), the flat layer 03 flattens the top layer of the thin film transistor to form a subsequent film layer;
- the flat layer 03 is provided with a pixel electrode 07 on the side away from the substrate 1, and the pixel electrode 07 is connected to the drain through the via hole in the flat layer 03 06;
- the side of the pixel electrode 07 away from the substrate 1 is provided with a protective layer 02 for protecting each film layer of the thin film transistor.
- the protective layer 02 of the display substrate faces away from the substrate 1 , and is located in the display area Q1 with a common electrode 002 , the common electrode 002 is disposed opposite the pixel electrode 07 , and the common electrode 002 is on the substrate 1
- the orthographic projection of the pixel electrode 07 and the orthographic projection of the pixel electrode 07 on the substrate 1 have an overlapping area, the common electrode 002 receives the common voltage, and the pixel electrode 07 receives the data voltage provided by the data line 5, so that an electric field is generated between the common electrode 002 and the data line 5,
- the display substrate and the color filter substrate are assembled to form a display device, and the liquid crystal is poured between the display substrate and the color filter substrate, the electric field between the common electrode 002 and the data line 5 can change the deflection angle of the liquid crystal molecules in the liquid crystal, thereby enabling The transmittance of light is changed. Therefore, by controlling the voltage between the common electrode 002 and the pixel electrode 07,
- FIG. 8 is a top view of the part where the common electrode 002 covers the sub-pixels in the 3 ⁇ 3 array.
- the electrode, the common electrode 002 has a plurality of slits 021, and the electric field of the pixel electrode 07 can pass through the slits 021 to form an electric field with the common electrode 002.
- a pixel opening P can be provided on the common electrode 002 corresponding to the area of the sub-pixel 100, so that the thin film transistor of the sub-pixel 100 is exposed.
- the orthographic projection on the substrate 1 coincides with the orthographic projection of the thin film transistor (especially the gate electrode) on the substrate 1 .
- Both the common electrode 002 and the pixel electrode 07 can be made of indium tin oxide (ITO), which increases the light transmittance of the sub-pixel 100, but the resistivity of ITO is relatively large, which will cause the common electrode 002 at each sub-pixel 100 on the display substrate to be formed.
- ITO indium tin oxide
- an auxiliary electrode 001 can be provided on the side of the common electrode 002 close to the substrate 1, and the auxiliary electrode 001 and the common electrode 002 are stacked.
- auxiliary electrode 001 covers the 3 ⁇ 3 array of sub-pixels
- the auxiliary electrode 001 is arranged around the pixel opening P on the corresponding common electrode 002
- the auxiliary electrode 001 covers a plurality of gate lines 2 and a plurality of data lines 5, in order to reduce the resistance of the gate line 2 and the data line 5 and reduce the signal loss.
- the auxiliary electrode 001 is only provided under a partial area of the common electrode 002 , and the common electrode 002 covers the auxiliary electrode 001 , that is, the common electrode 002 covers the top surface and the two sides of the auxiliary electrode 001 . Therefore, in the process of preparing the display substrate, a film of the auxiliary electrode 001 is formed on the side of the flat layer 02 away from the substrate 1, the auxiliary electrode 001 is patterned, and then the film of the common electrode 002 is formed, and then exposed to The common electrode 002 is patterned by developing and etching processes.
- the common electrode 002 can cover the auxiliary electrode 001 .
- the display panel provided by this public embodiment further includes a plurality of first marks 6 arranged in the frame area Q3, and the plurality of first marks 6 are arranged in the frame area Q3, for example , can be arranged at the four corners of the sealing frame area Q3, so that when the display substrate and the color filter substrate are assembled, the first marks 6 can be used for alignment.
- the first mark 6 is usually arranged in the same layer and of the same material as the plurality of gate lines 2, that is to say, the first mark 6 is arranged in the first conductive layer, which is different from the plurality of gate lines 2.
- the grid line 2 is made of the same film layer, so usually a light-shielding layer 4 is formed on the substrate 1, and then a first conductive layer is formed on the side of the light-shielding layer 4 away from the substrate 1, and then the first conductive layer is patterned to form A plurality of gate lines 2 , a plurality of first marks 6 , and a plurality of connection pads 3 , so that there is also a light shielding layer 4 under the first marks 6 .
- the first mark 6 needs to be identified from the side of the substrate 1 away from the first mark 6, but since the light shielding layer 4 is provided between the first mark 6 and the substrate 1, the first mark 6 cannot be identified. .
- the orthographic projection of the first mark 6 on the substrate 1 does not overlap with the orthographic projection of the light shielding layer 4 on the substrate 1 (as shown in FIG. 2 ), so that the camera
- Each of the first marks 6 of the plurality of first marks 6 can be recognized from the side of the substrate 1 facing away from the first marks 6 .
- the orthographic projection of the first mark 6 on the substrate 1 does not overlap with the orthographic projection of the light shielding layer 4 on the substrate 1 .
- the plurality of first marks 6 are arranged in the first conductive layer, that is, the plurality of first marks 6 and the plurality of gate lines 2 are arranged in the same layer and of the same material. The difference is that the plurality of gate lines 2 and the substrate 1 are connected There is also a light shielding layer 4 in between, and the first marks 6 are directly formed on the substrate 1 , so that each first mark 6 can be accurately identified directly from the side of the substrate 1 away from the first mark 6 .
- the display substrate provided in this embodiment further includes a plurality of second marks 7 , each sub-region Q21 includes a group of connection pads 3 , and a group of connection pads 3 is connected to a connector, Each group of connection pads 3 is connected with two second marks 7 .
- the second marks 7 are respectively connected to the outer sides of the two outermost connection pads in each group of connection pads 3 , and are used to determine the connection between the connector and the connection. After bonding pad 3, the crimping state of the conductive gold ball in the ACF glue.
- the structure of the second mark 7 is the same as that of the first mark 6 , and the orthographic projection of the second mark 6 on the substrate 1 does not overlap with the orthographic projection of the light shielding layer 4 on the substrate 1 , so that the second mark 7 can be directly away from the substrate 1
- Each second marking 7 is precisely identified on one side.
- the plurality of second marks 7 are arranged in the first conductive layer, that is, the plurality of second marks 7 are arranged in the same layer and of the same material as the plurality of grid lines 2 , the difference is that the plurality of grid lines 2 and the substrate 1 are connected There is also a light shielding layer 4 in between, and the second mark 7 is directly formed on the substrate 1 .
- the display substrate provided in this embodiment further includes a plurality of fan-out (Fanout) traces 8 , the plurality of fan-out traces 8 are arranged on the substrate at intervals, and one fan-out trace 8 Correspondingly connected to a connection pad 3, one end of the fan-out trace 8 is connected to a connection pad 3 (as shown in Figure 2), and the other end extends from the bonding area Q2 to the display area Q1, and the GOA or data in the display area Q1. Line 5 is connected.
- Fanout Fan-out
- the film layer structure of the fan-out traces 8 is the same as that of the gate traces 2 , that is, the orthographic projection of the light shielding layer 4 on the substrate 1 covers the orthographic projections of the multiple fan-out traces 8 on the substrate 1 .
- the fan-out wiring 8 and the gate line 2 are provided in the same layer and made of the same material, and a light shielding layer 4 is also provided between the fan-out wiring 8 and the substrate 1 .
- the film layer structures of the first marks 6, the second marks 7, etc. are the same as the connection pads 3, and the first marks 6 and the second marks 7 are on the substrate
- the orthographic projection on 1 and the orthographic projection of the light-shielding layer 4 on the substrate 1 do not overlap;
- the film structure of the fan-out trace 8 is the same as that of the grid line 2, and the orthographic projection of the fan-out trace 8 on the substrate 1 is the same as that of the light-shielding layer 4.
- the orthographic projections on substrate 1 overlap.
- the first mark 6 may include any mark set in the sealing area Q3, for example, the first mark 6 may be at least one of a cutting mark, a grinding mark, a process mark, an overlap mark, and a total pitch mark.
- the shapes of the marks such as the first mark 6 or the second mark 7 may include various shapes, such as a cross, a T-shape, a rectangle, a circle, a triangle and the like.
- the first mark 6 is cross-shaped and the second mark 7 is T-shaped as an example, but the present invention is not limited.
- the light-shielding layer 4 can be made of various materials.
- the light-shielding layer 4 is made of molybdenum oxide, which is black and can effectively absorb and illuminate the gate lines 2 . light on.
- the light shielding layer 4 can also be made of other types of materials, which are not limited here.
- FIG. 9 is an exemplary distribution diagram of the connection pads connected by a connector
- FIG. 10 It is a sectional view taken along the K-L direction of FIG. 9 .
- the plurality of connection pads 3 in the bonding area Q2 include functional connection pads 31 and redundant connection pads 32, and the functional connection pads 31 and the redundant connection pads 32.
- the pads 32 are all arranged on the substrate 1, and usually external signals are only input to the functional connection pads 31, that is to say, the pins of the connector are only connected to the functional connection pads 31, and the functional connection pads 31 are also connected to the display area Q1.
- the data line 5 or the GOA is connected, or is connected through the fan-out trace 8, and the redundant connection pad 32 is an empty electrode, which is not connected to the pin of the connector and does not receive any electrical signal. Since the signals received by the plurality of functional connection pads 31 include positive signals and negative signals (eg, positive data voltage and negative data voltage input to the data line 5 ), in order to ensure that the functional connection pads 31 receiving positive and negative signals Therefore, at least one vacant redundant connection pad 32 is set between the functional connection pad 31 receiving the positive signal and the functional connection pad 31 receiving the negative signal to separate the function receiving the positive signal.
- the redundant connection pad 32 is an empty electrode, which is not connected to the pin of the connector and does not receive any electrical signal. Since the signals received by the plurality of functional connection pads 31 include positive signals and negative signals (eg, positive data voltage and negative data voltage input to the data line 5 ), in order to ensure that the functional connection pads 31 receiving positive and negative signals Therefore, at least one vacant redundant connection pad 32 is set between the functional connection pad 31 receiving the positive signal and the functional connection pad
- the orthographic projection of the redundant connection pads 32 on the substrate 1 does not overlap with the orthographic projection of the light shielding layer 4 on the substrate 1
- the orthographic projection of the functional connection pads 31 on the substrate 1 does not overlap the light shielding layer 4
- the orthographic projections on the substrate 1 are at least partially overlapped, that is, the light shielding layer 4 is only provided under the functional connection pads 31 in the bonding region Q2 , and no light shielding layer is provided under the redundant connection pads 32 .
- the light-shielding layer 4 is disposed on the side of the functional connection pad 31 close to the substrate 1 , and the pattern of the light-shielding layer 4 can be consistent with the pattern of the functional connection pad 32 , that is, the positive direction of the functional connection pad 31 on the substrate 1
- the projection and the orthographic projection of the light shielding layer 4 on the substrate 1 may completely overlap. Therefore, the pressing quality of each redundant connecting pad 32 can be observed on the side of the substrate 1 away from the connecting pad 3 . By observing the pressing quality of the redundant connecting pads 32 , the overall functional connecting pad can be judged. 31 and the bonding quality of the redundant connection pads 32.
- FIG. 11 is a cross-sectional view of the display substrate corresponding to the embodiment of FIG. 9 .
- the display substrate includes a base 1, a light shielding layer 4 disposed on the base 1, and a first conductive layer on the side of the light shielding layer 4 away from the base.
- the part of the layer located in the bonding area Q1 includes a plurality of functional connection pads 31, and the orthographic projection of the light shielding layer 4 on the substrate 1 covers the orthographic projection of the plurality of gate lines 2 and the plurality of functional connection pads 31 on the substrate 1,
- the light shielding layer 4 is arranged on the side of the gate line 2 close to the substrate 1 , which can prevent the gate 2 from reflecting light.
- the display substrate also includes a gate insulating layer 01 disposed on the side of the first conductive layer (the layer where the functional connection pad 31 and the gate line 2 are located) away from the substrate 1; the gate insulating layer 01 is provided with an active layer 04 on the side away from the substrate 1 ;
- the active layer 04 has a source electrode 05 and a drain electrode 06 on the side away from the substrate 1, the source electrode 05 and the drain electrode 06 are arranged in the same layer and have the same material, the gate electrode, the gate insulating layer 01, the active layer 04, the source electrode 05
- the drain electrode 06 forms a thin film transistor, and each film layer of the thin film transistor is only arranged in the display area Q1.
- the gate of the thin film transistor and the gate line 2 are formed in the same film layer, and the gate line 2 is connected to the gate.
- the reference number 2 in FIG. 2 can be regarded as the position of the gate; in the display substrate, each sub-pixel 100 has a thin film transistor, a gate line 2 is connected to the thin film transistor of the sub-pixels 100 in the same row, and a data line 5.
- Connect the thin film transistors of the sub-pixels 100 in the same column; the source 05 and the drain 06 have a flat layer 03 on the side away from the substrate 1.
- the flat layer 03 can be an organic film (ORG film), and the flat layer 03 connects the top layer of the thin film transistor.
- a pixel electrode 07 is provided on the side of the flat layer 03 facing away from the substrate 1, and the pixel electrode 07 is connected to the drain 06 through the via hole in the flat layer 03; the pixel electrode 07 is on the side facing away from the substrate 1
- a protective layer 02 is provided for protecting each film layer of the thin film transistor.
- the protective layer 02 of the display substrate faces away from the substrate 1 , and is located in the display area Q1 with a common electrode 002 , the common electrode 002 is disposed opposite the pixel electrode 07 , and the common electrode 002 is on the substrate 1
- the orthographic projection of the pixel electrode 07 and the orthographic projection of the pixel electrode 07 on the substrate 1 have an overlapping area, the common electrode 002 receives the common voltage, and the pixel electrode 07 receives the data voltage provided by the data line 5, so that an electric field is generated between the common electrode 002 and the data line 5,
- the display substrate and the color filter substrate are assembled to form a display device, and the liquid crystal is poured between the display substrate and the color filter substrate, the electric field between the common electrode 002 and the data line 5 can change the deflection angle of the liquid crystal molecules in the liquid crystal, thereby enabling The transmittance of light is changed. Therefore, by controlling the voltage between the common electrode 002 and the pixel electrode 07,
- FIG. 8 is a top view of the part where the common electrode 002 covers the sub-pixels in the 3 ⁇ 3 array.
- the electrode, the common electrode 002 has a plurality of slits 021, and the electric field of the pixel electrode 07 can pass through the slits 021 to form an electric field with the common electrode 002.
- a pixel opening P can be provided on the common electrode 002 corresponding to the area of the sub-pixel 100, so that the thin film transistor of the sub-pixel 100 is exposed.
- the orthographic projection on the substrate 1 coincides with the orthographic projection of the thin film transistor (especially the gate electrode) on the substrate 1 .
- Both the common electrode 002 and the pixel electrode 07 can be made of indium tin oxide (ITO), which increases the light transmittance of the sub-pixel 100, but the resistivity of ITO is relatively large, which will cause the common electrode 002 at each sub-pixel 100 on the display substrate to be formed.
- ITO indium tin oxide
- an auxiliary electrode 001 can be set on the side of the common electrode 002 close to the substrate 1, and the auxiliary electrode 001 and the common electrode 002 are set on the first conductive layer away from the substrate 1.
- FIG. 7 is a top view of the part where the auxiliary electrode 001 covers the 3 ⁇ 3 array of sub-pixels, the auxiliary electrode 001 is arranged around the pixel opening P on the corresponding common electrode 002, and the auxiliary electrode 001 covers a plurality of gate lines 2 and a plurality of data lines 5, in order to reduce the resistance of the gate line 2 and the data line 5 and reduce the signal loss.
- the auxiliary electrode 001 is only provided under a partial area of the common electrode 002 , and the common electrode 002 covers the auxiliary electrode 001 , that is, the common electrode 002 covers the top surface and the two sides of the auxiliary electrode 001 . Therefore, in the process of preparing the display substrate, a film of the auxiliary electrode 001 is formed on the side of the flat layer 02 away from the substrate 1, the auxiliary electrode 001 is patterned, and then the film of the common electrode 002 is formed, and then exposed to , developing and etching processes to pattern the common electrode 002.
- the common electrode 002 can cover the auxiliary electrode 001 .
- the redundant connection pads 32 may be prepared by using an electrode layer on the same layer as the auxiliary electrode 001 and an electrode layer on the same layer as the common electrode 002 . It should be noted that, in FIG. 11 , in order to facilitate the illustration of the positional relationship of the film layers where the functional connection pads 31 and the redundant connection pads 32 are located, the functional connection pads 31 and the redundant connection pads 32 are simultaneously shown in the same cross-sectional view. There are redundant connection pads 32, but if it is cut from a functional connection pad 31, there is no redundant connection pad 32 above the functional connection pad 31.
- each redundant connection pad 32 includes a first conductive portion 321 and a second conductive portion 322 disposed on the side of the first conductive layer away from the substrate 1 , and the first conductive portion 321 and the second conductive portion 322 are electrically
- the first conductive part 321 located in the bonding area Q2 and the common electrode 002 located in the display area Q1 are arranged in the same layer and of the same material, that is, the first conductive part 321 and the common electrode 002 are prepared by the same film layer process;
- the second conductive part 322 located in the bonding area Q2 and the auxiliary electrode 001 located in the display area Q1 are arranged in the same layer and made of the same material, that is, the second conductive part 322 and the auxiliary electrode 001 are prepared by the same film layer process, and are redundantly
- the pressing quality of the redundant connecting pads 32 is determined, so as to judge the pressing quality of the entire connecting pads 3 (including the functional connecting pads 31 and the redundant connecting pads 32 ).
- the redundant connection pads 32 can also be prepared by using other conductive film layers, which are not limited herein.
- the functional connection pads 31 can be arranged in the first conductive layer, that is, the functional connection pads 31 and the plurality of gate lines 2 (also with the gates) are arranged in the same layer and made of material. The same, and there is a light shielding layer 4 under the functional connection pad 31 .
- the functional connection pads 31 can also be prepared by using other conductive film layers, which are not limited herein.
- the display substrate of the embodiment of the present disclosure further includes a plurality of first marks 6 arranged in the sealing area Q3 . 1, resulting in the problem that the first mark 6 cannot be recognized from the side of the substrate 1 away from the first mark 6.
- the orthographic projections on the substrate 1 do not overlap (as shown in FIG. 2).
- the first mark 6 can also be prepared by using other conductive film layers.
- the first mark 6 includes a third conductive portion 62 and a fourth conductive portion 61 disposed on the side of the first conductive layer away from the substrate 1 , and the third conductive portion 62 and the fourth conductive portion 61 are electrically connected, and the third conductive portion 62 and the fourth conductive portion 61 are electrically connected.
- the conductive portion 62 and the common electrode 002 are provided on the same layer and made of the same material, that is to say, the third conductive portion 62 and the common electrode 002 are prepared by the same film layer process, and the fourth conductive portion 61 and the auxiliary electrode 001 are provided on the same layer and made of the same material.
- the fourth conductive portion 61 and the auxiliary electrode 001 are prepared by the same film layer process.
- the light shielding layer 4 is not disposed under the third conductive portion 62 and the fourth conductive portion 61 of the first mark 6 , so that each first mark 6 can be accurately identified directly from the side of the substrate 1 away from the first mark 6 .
- the display substrate provided in this embodiment further includes a plurality of second marks 7 , each sub-region Q21 includes a group of connection pads 3 , and a group of connection pads 3 is connected to a connector, Each group of connection pads 3 is connected to two second marks 7, specifically, the second marks 7 are respectively connected to the outermost two connection pads 3 (functional connection pads 31 or redundant connection pads 3) in each group of connection pads 3.
- the outer side of the connection pad 32) is used to judge the crimping state of the conductive gold ball in the ACF glue after the connector and the connection pad 3 are bonded.
- the structure of the second mark 7 is the same as that of the first mark 6 , and the orthographic projection of the second mark 6 on the substrate 1 does not overlap with the orthographic projection of the light shielding layer 4 on the substrate 1 , so that the second mark 7 can be directly away from the substrate 1
- Each second marking 7 is precisely identified on one side.
- the plurality of second marks 7 include a fifth conductive part and a sixth conductive part arranged in layers, and the fifth conductive part and the common electrode 002 are provided in the same layer and made of the same material, that is, the fifth conductive part and the common electrode 002 is prepared by the same film layer process, the sixth conductive part and the auxiliary electrode 001 are arranged in the same layer and made of the same material, that is to say, the sixth conductive part and the auxiliary electrode 001 are prepared by the same film layer process.
- the display substrate provided in this embodiment further includes a plurality of fanout lines 8 , the plurality of fanout lines 8 are arranged on the substrate 1 at intervals, and one fanout line 8 8 is connected to a functional connection pad 31 correspondingly, one end of the fan-out trace 8 is connected to a functional connection pad 31 (as shown in FIG. 11 ), and the other end extends from the bonding area Q2 to the display area Q1, and is connected to the display area Q1.
- GOA or data line 5 connection is shown in FIG. 11 .
- the film layer structure of the fan-out traces 8 is the same as that of the gate traces 2 , that is, the orthographic projection of the light shielding layer 4 on the substrate 1 covers the orthographic projections of the multiple fan-out traces 8 on the substrate 1 .
- the fan-out wiring 8 and the gate line 2 are provided in the same layer and made of the same material, and a light shielding layer 4 is also provided between the fan-out wiring 8 and the substrate 1 .
- the film layer structures of the first marks 6 and the second marks 7 are the same as the redundant connection pads 32 , and the first marks 6 and the second marks 7
- the orthographic projection on the substrate 1 does not overlap with the orthographic projection of the light-shielding layer 4 on the substrate 1;
- the film layer structure of the fan-out trace 8 is the same as that of the gate wire 2 and the functional connection pad 31, and the fan-out trace 8 is on the substrate 1.
- the orthographic projection on the substrate 1 overlaps with the orthographic projection of the light shielding layer 4 on the substrate 1 .
- the first mark 6 may include any mark set in the sealing area Q3, for example, the first mark 6 may be at least one of a cutting mark, a grinding mark, a process mark, an overlap mark, and a total pitch mark.
- the light-shielding layer 4 can be made of various materials.
- the light-shielding layer 4 is made of molybdenum oxide, which is black and can effectively absorb and illuminate the gate lines 2 . light on.
- the light shielding layer 4 can also be made of other types of materials, which are not limited here.
- the material of the gate line 2 in the first conductive layer may be copper, molybdenum niobium, tin, aluminum and other materials. Taking copper as an example for the gate line 2 for illustration, the gate line 2 (also the first conductive layer)
- the thickness of the film layer can be 1000-2000 Angstroms, and the film thickness of the light shielding layer 4 can be 400-500A.
- the thin film transistor in this embodiment may be a top-gate thin film transistor or a bottom-gate thin film transistor, and the film layer where the gate of the thin film transistor is located (that is, the first conductive layer where the gate line 2 is located)
- the structure of the same layer (for example, the functional connection pad 31 ) may be changed with the position of the gate.
- the above descriptions are made by taking the thin film transistor as a bottom-gate thin film transistor as an example, but the present application is not limited.
- an embodiment of the present disclosure further provides a method for manufacturing a display substrate.
- the method for manufacturing a display substrate in this embodiment can be used to form the above-mentioned display substrate to form the display substrate shown in FIG. 2 .
- the film layer structure of the display substrate shown in FIG. 2 has been described above, and will not be repeated here.
- the structure of the display substrate formed by the manufacturing method of this embodiment is not limited to the display substrate shown in FIG. 2 .
- the display substrate has a display area Q1, a bonding area Q2 located on at least one side of the display area Q1, and may also have a frame sealing area Q3 arranged around the display area Q1, and the bonding area Q2 is arranged on the sealing frame area Q3 away from the display area Q1. at least one side.
- Figure 13 is a side view of the flow chart of each production step
- Figure 14 is a plan view of the flow chart corresponding to each production step of Figure 13, the production method includes the following steps:
- the light-shielding layer 4 adopts molybdenum oxide as an example for illustration.
- molybdenum oxide is sputtered on the substrate 1 by a sputtering process to form a layer covering the substrate. 1 of the light-shielding layer 4.
- the light shielding layer 4 is preliminarily patterned through a mask, specifically, exposure, development, and etching may be performed. The process removes the part of the light-shielding layer 4 covering the bonding area Q2 to form the light-shielding layer 4 of the display substrate as shown in FIG. identification of the connection pads 3.
- the position of the substrate 1 corresponding to the frame sealing area Q3 may also have a plurality of first marks 6 to pattern the light shielding layer 4, including removing the light shielding layer 4 at the position where the first marks 6 are to be set in the frame sealing area Q3, i.e.
- a plurality of hollow parts 63 are made, and each hollow part 63 is the position where the first mark 6 is subsequently formed, so as to ensure that there is no light-shielding layer 4 between the first mark 6 and the substrate 1,
- the first marking 6 can thus be recognized from the side of the substrate 1 facing away from the first marking 6 . It should be noted that, since the encapsulation area Q3 has a part of the area where the fan-out traces 8 pass, the portion of the light shielding layer 4 located in the encapsulation area Q3 cannot be completely removed.
- a layer of material of the first conductive layer D1 is sputtered by a sputtering process,
- conductive materials such as copper, silver, molybdenum and niobium
- the first conductive layer D1 covers the display area Q2
- the connection pads 3 and the first marks 6 are also formed on the first conductive layer D1
- the first conductive layer D1 also covers The sealing area Q3 and the bonding area Q2.
- the first conductive layer D1 is disposed on the light shielding layer 4 without affecting the film formation quality of the first conductive layer D1 .
- S14 may include:
- the first conductive layer D1 is placed on the side of the first conductive layer D1 close to the substrate 1 through a mask made according to the pattern of the plurality of gate lines 2 and the plurality of connection pads 3, and only on the side of the first conductive layer D1.
- the light shielding layer 4 in the display area Q1 is exposed, developed and etched to form a plurality of gate lines 2 located in the display area Q1 and a plurality of connection pads 3 located in the bonding area Q2, and a plurality of connection pads 3 connected to the connection pads 3 are formed.
- the material of the first conductive layer D1 includes copper or molybdenum niobium
- the material of the light shielding layer 4 includes The etching solution of molybdenum oxide, copper or molybdenum niobium can also act on molybdenum oxide, so the first conductive layer D1 and the light shielding layer 4 can be etched in the display area Q1 at the same time to form a plurality of patterns of grid lines 2 (as shown in Figure 14 ( d2) pattern), and can use the same mask to etch a plurality of connection pads 3 (as shown in Figure 14(d2)) and the connection pads connected to the part of the first conductive layer D1 in the bonding area Q2.
- a plurality of first marks 6 are etched on the portion of the first conductive layer D1 located in the sealing frame region Q3 (as shown in FIG. 14(d2)).
- a mask used only for etching the light shielding layer 4 can be omitted, and, compared to etching the light shielding layer 4 first, the first conductive layer is then etched.
- the manufacturing method of D1 the manufacturing method provided by the embodiment of the present disclosure will not suffer from the problem of pattern dislocation caused by the drilling phenomenon when etching the light shielding layer 4 first, and the gate in the first conductive layer D1
- the lines 2 can overlap the pattern of the light shielding layer 4 on the side of the grid lines 2 close to the substrate 1 as much as possible, thereby improving the fabrication accuracy.
- the display substrate provided in this embodiment further includes a plurality of fan-out traces 8 and GOA circuits disposed in the sealing frame area Q2 at the edge of the display area Q1, and both the fan-out traces 8 and the GOA circuit have a light-shielding layer 4 under them, Therefore, in S14, patterning the first conductive layer D1 also includes using the above-mentioned mask to simultaneously perform the first conductive layer D1 and the light shielding layer 4 in the sealing area Q2 in the same process of etching the gate line 2. Etching to form a plurality of fan-out traces 8 and patterns of the GOA circuit.
- the etching solution of copper or molybdenum-niobium can also act on the molybdenum oxide. At least one of components such as ammonium oxalate, hydrogen peroxide, and surfactant may be included. Of course, the copper etching solution may also include other components, which are not limited here.
- the method for fabricating a display substrate further includes:
- a gate insulating layer 01 is formed on the side of the first conductive layer D1 (the layer where the connection pad 3 and the gate line 2 are located) away from the substrate 1;
- the film layer where the active layer 04 is located is formed on the side of the substrate 1, and the film layer is patterned to form the active layer 04; the film layer where the source electrode 05 and the drain electrode 06 are formed on the side of the active layer 04 away from the substrate 1,
- the film layer is patterned to form a source electrode 05, a drain electrode 06 and a plurality of data lines 5.
- the source electrode 05 and the drain electrode 06 are arranged in the same layer and have the same material;
- Film flattening layer 03, the flattening layer 03 can use an organic film (ORG film), the flattening layer 03 flattens the top layer of the thin film transistor, so as to form the subsequent film layer; the flattening layer 03 is formed on the side away from the substrate 1.
- ORG film organic film
- the pixel electrode 07 is formed, The pixel electrode 07 is connected to the drain electrode 06 through the via hole in the flat layer 03; a protective layer 02 is formed on the side of the pixel electrode 07 away from the substrate 1 to protect each film layer of the thin film transistor; the protective layer 02 is away from the substrate 1 A film layer where the auxiliary electrode 001 is located is formed on one side, and the film layer is patterned to form an auxiliary electrode 001.
- the auxiliary electrode 001 has a pixel opening P, and the auxiliary electrode 001 covers a plurality of gate lines 2 and data lines 5; The side of the electrode 001 facing away from the substrate 1 forms a film layer where the common electrode 002 is located, and the film layer is patterned to form the common electrode 002.
- the common electrode 002 has a plurality of slits 021 and pixel openings P, and the slits 021 face the pixel electrode. 06.
- the structure of the display substrate is not limited to this. For the convenience of description, the above description only takes the manufacturing process of the display substrate shown in FIG. 2 as an example.
- an embodiment of the present disclosure further provides a method for manufacturing a display substrate.
- the method for manufacturing a display substrate in this embodiment can be used to form the above-mentioned display substrate to form the display substrate shown in FIG. 11 .
- the film layer structure of the display substrate shown in FIG. 11 has been described above, and will not be repeated here.
- the structure of the display substrate formed by the manufacturing method of this embodiment is not limited to the display substrate shown in FIG. 11 .
- the display substrate has a display area Q1, a bonding area Q2 located on at least one side of the display area Q1, and may also have a frame sealing area Q3 arranged around the display area Q1, and the bonding area Q2 is arranged on the sealing frame area Q3 away from the display area Q1. at least one side.
- the bonding area has a plurality of connection pads 3, and the plurality of connection pads 3 include functional connection pads 31 and redundant connection pads 32. Usually, only external signals are input.
- Functional connection pad that is to say, usually the pins of the connector are only connected to the functional connection pad 31, and the functional connection pad 31 is also connected to the data line 5 or GOA in the display area Q1, or through the fan-out trace 8 connection, while the redundant connection pad 32 is a vacant electrode that is not connected to the pins of the connector and does not receive any electrical signals.
- Figure 16 is a side view of a flow chart of each fabrication step, the fabrication method comprising the following steps:
- the light shielding layer 4 is made of molybdenum oxide as an example for illustration.
- molybdenum oxide is sputtered on the substrate 1 through a sputtering process to form a light shielding layer 4 covering the substrate 1 .
- the first conductive layer D1 as copper as an example, copper is sputtered on the side of the light shielding layer 4 away from the substrate 1 to form the first conductive layer D1 covering the substrate 1 .
- the first conductive layer D1 and the light shielding layer 4 are patterned together through a mask made according to the pattern of the gate lines 2 and the functional connection pads 31 , after exposure, development, In the etching process, a plurality of gate lines are formed at the position of the display area Q1, and a plurality of functional connection pads 31 are formed at the position of the bonding area Q2.
- the display substrate further includes a plurality of fan-out traces 8, GOA circuits, etc., which are arranged in the encapsulation area Q3.
- the first conductive layer D1 and the light shielding layer 4 are patterned together, they are also formed in the encapsulation area Q3.
- a number of fan-out traces 8 and GOA circuit graphics are created. That is to say, after S23, the orthographic projection of the light shielding layer 4 on the substrate 1 only covers the plurality of gate lines, the plurality of functional connection pads 31, the plurality of fan-out traces 8 and the GOA circuit pattern.
- the manufacturing method of the layer D1 is not subject to the problem of pattern dislocation caused by the drilling phenomenon when the first conductive layer D1 is etched first, and the first conductive layer D1 is etched.
- the gate line 2 , the multiple functional connection pads 31 , the multiple fan-out traces 8 and the GOA circuit pattern can overlap with the pattern of the light shielding layer 4 as much as possible, thereby improving the fabrication accuracy.
- the method for fabricating the display substrate provided by the embodiment of the present disclosure further includes:
- the gate insulating layer 01 is formed on the side of the first conductive layer D1 (the layer where the functional connection pad 31 and the gate line 2 are located) away from the substrate 1; the active layer 04 is formed on the side of the gate insulating layer 01 away from the substrate 1.
- the film layer is patterned to form the active layer 04; the film layer where the source electrode 05 and the drain electrode 06 are formed on the side of the active layer 04 away from the substrate 1, and the film layer is patterned to form the source electrode 05 , the drain electrode 06 and a plurality of data lines 5, the source electrode 05 and the drain electrode 06 are arranged in the same layer and made of the same material; a flat layer 03 is formed on the side of the source electrode 05 and the drain electrode 06 away from the substrate 1, and the flat layer 03 can be made of organic film (ORG film), the flat layer 03 flattens the top layer of the thin film transistor to form subsequent film layers; the pixel electrode 07 is formed on the side of the flat layer 03 away from the substrate 1, and the pixel electrode 07 passes through the via hole in the flat layer 03 It is connected to the drain electrode 06; a protective layer 02 is formed on the side of the pixel electrode 07 away from the substrate 1 to protect each film layer of the thin film transistor.
- the display substrate further includes: an auxiliary electrode 001 and a common electrode 002 arranged on the side of the first conductive layer D1 away from the substrate 1 , the auxiliary electrode 001 and the common electrode 002 are arranged in sequence along the direction away from the substrate 1 , and the auxiliary electrode 001 It is electrically connected to the common electrode 002 .
- the auxiliary electrode 001 and the common electrode 002 are arranged on the side of the protective layer 02 away from the substrate 1
- the auxiliary electrode 001 is arranged on the side of the common electrode 002 close to the substrate 1 .
- the redundant connection pad 32 includes a first conductive portion 321 and a second conductive portion 322 disposed on the side of the first conductive layer D1 away from the substrate 1, and the first conductive portion 321 and the second conductive portion 322 are electrically connected.
- a conductive portion 321 and the common electrode 002 are provided in the same layer and made of the same material, and the second conductive portion 322 and the auxiliary electrode 001 are provided in the same layer and are of the same material.
- S24 may include, specifically:
- a second conductive layer is formed on the side of the first conductive layer D1 away from the substrate 1, specifically, on the protective layer 02 (located on the side of the first conductive layer D1 away from the substrate 1) side)
- the second conductive layer where the auxiliary electrode 001 is located is formed on the side away from the substrate 1 .
- the display substrate further includes a plurality of first marks 6 arranged in the sealing area Q3, and a plurality of first marks 6 arranged in the bonding area Q2, connected to the functional connection pads 31 or redundantly connected
- a plurality of second marks 7 (not shown in the figure) connected to the pads 32, wherein the first mark 6 includes a third conductive part 62 and a fourth conductive part 61, and the second mark 7 includes a fifth conductive part and a sixth conductive part Conductive part.
- the second conductive layer is patterned according to the pattern of the auxiliary electrode 001, the pattern of the redundant connection pad 32, the pattern of the first mark 6, and the pattern of the second mark 7.
- a pattern of the auxiliary electrode 001 is formed in the display area Q1 (as shown in FIG. 7 ), the auxiliary electrode 001 has a pixel opening P, and the auxiliary electrode 001 covers a plurality of gate lines 2 and data lines 5; redundant connections are formed in the bonding area Q2
- the pattern of the second conductive portion 322 of the pad 32 and the pattern of the sixth conductive portion of the second mark 7; the pattern of the fourth conductive portion 61 of the first mark 6 is formed in the sealing area Q3.
- a third conductive layer is formed on the side of the second conductive layer (the film layer where the auxiliary electrode 001 and the second conductive portion 322 are located) away from the substrate 1, and the third conductive layer is The film layer where the common electrode 001 is located.
- the pattern of the common electrode 002 is patterned, and through exposure, development, and etching processes, a pattern of the common electrode 002 is formed in the display area Q1 (as shown in FIG.
- the common electrode 002 has a pixel opening P and a plurality of slits 021, a plurality of slits 021 are facing the pixel electrode 06; the pattern of the first conductive part 321 of the redundant connection pad 32 and the pattern of the fifth conductive part of the second mark 7 are formed in the bonding area Q2; in the sealing area Q3 The pattern of the third conductive portion 62 of the first mark 6 is formed.
- the auxiliary electrode 001 is only arranged under a partial area of the common electrode 002, and the common electrode 002 covers the auxiliary electrode 001, that is to say, the common electrode 002 covers the top surface and both sides of the auxiliary electrode 001, so that the In the process of preparing the display substrate, a film layer of the auxiliary electrode 001 is formed on the side of the flat layer 02 away from the substrate 1, the auxiliary electrode 001 is patterned, and then the film layer of the common electrode 002 is formed.
- the common electrode 002 is patterned by the etching process.
- the common electrode 002 Since the developer of the common electrode 002 is also corrosive to the auxiliary electrode 001, in order to prevent the developer from affecting the auxiliary electrode 001 when the common electrode 002 is developed, the common electrode 002 can be The auxiliary electrode 001 is covered.
- the structure of the display substrate is not limited to this. For the convenience of description, the above description only takes the manufacturing process of the display substrate shown in FIG. 11 as an example.
- an embodiment of the present disclosure further provides a display device including the above-mentioned display substrate.
- the display device provided in this embodiment may be any product or component with a display function, such as a mobile phone, a tablet computer, a television, a monitor, a notebook computer, a digital photo frame, and a navigator.
- Other essential components of the display device should be understood by those of ordinary skill in the art, and will not be repeated here, nor should it be regarded as a limitation of the present invention.
- the display device further includes a color filter substrate, the color filter substrate and the display substrate are arranged in a cell-to-cell arrangement, and liquid crystal is poured between the color filter substrate and the display substrate to form a liquid crystal display device.
- the color filter substrate includes color filters, and the color filters may include various types of color filters, such as quantum dot color filters.
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Abstract
Description
Claims (15)
- 一种显示基板,具有显示区,和位于所述显示区至少一侧的邦定区;其中,所述显示基板包括:基底;第一导电层,设置在所述基底上、且位于所述显示区;所述第一导电层包括多条栅线;遮光层,设置在所述第一导电层靠近所述基底的一侧,且所述遮光层在所述基底上的正投影至少覆盖所述多条栅线在所述基底上的正投影;多个连接焊盘,间隔设置在所述基底上、且位于所述邦定区;其中,至少部分所述连接焊盘与所述遮光层在所述基底上的正投影无重叠。
- 根据权利要求1所述的显示基板,其中,所述多个连接焊盘在所述基底上的正投影均与所述遮光层在所述基底上的正投影无重叠。
- 根据权利要求2所述的显示基板,其中,所述多个连接焊盘设置在所述第一导电层中,且与所述多条栅线材料相同。
- 根据权利要求1所述的显示基板,其中,所述多个连接焊盘包括功能连接焊盘和冗余连接焊盘;其中,所述冗余连接焊盘在所述基底上的正投影与所述遮光层在所述基底上的正投影无重叠;所述功能连接焊盘在所述基底上的正投影与所述遮光层在所述基底上的正投影至少部分重叠。
- 根据权利要求4所述的显示基板,其中,所述显示基板还包括:设置在所述第一导电层背离所述基底一侧的辅助电极和公共电极,二者沿背离所 述基底方向依次设置、且电连接;所述辅助电极和所述公共电极在所述基底上的正投影至少部分重叠;所述冗余连接焊盘包括设置在所述第一导电层背离所述基底一侧、且电连接的第一导电部和第二导电部,所述第一导电部与所述公共电极同层设置且材料相同,所述第二导电部与所述辅助电极同层设置且材料相同。
- 根据权利要求5所述的显示基板,其中,所述功能连接焊盘与所述多条栅线同层设置且材料相同。
- 根据权利要求1所述的显示基板,其中,所述显示基板还具有围绕所述显示区设置的封框区,所述邦定区设置在所述封框区背离所述显示区的至少一侧;所述显示基板还包括:多个第一标记,设置在所述基底上且设置在所述邦定区中;其中,所述第一标记与所述遮光层在所述基底上的正投影无重叠。
- 根据权利要求7所述的显示基板,其中,所述多个第一标记与所述多条栅线同层设置且材料相同。
- 根据权利要求7所述的显示基板,其中,所述显示基板还包括:设置在所述第一导电层背离所述基底一侧的辅助电极和公共电极,且二者沿背离所述基底方向依次设置、且电连接;所述辅助电极和所述公共电极在所述基底上的正投影至少部分重叠;所述第一标记包括设置在所述第一导电层背离所述基底一侧、且电连接的第三导电部和第四导电部,所述第三导电部与所述公共电极同层设置且材料相同;所述第四导电部与所述辅助电极同层设置且材料相同。
- 根据权利要求1-9任一项所述的显示基板,其中,所述显示基板还包 括多条扇出走线,间隔设置在所述基底上,且一条所述扇出走线对应连接一个所述连接焊盘,所述扇出走线由所述邦定区延伸至所述显示区;其中,所述遮光层在所述基底上的正投影,覆盖多条所述扇出走线在所述基底上的正投影。
- 一种显示基板的制作方法,具有显示区,和位于所述显示区至少一侧的邦定区;其中,包括以下步骤:在基底上制作遮光层;去除所述遮光层位于所述邦定区的部分;在所述遮光层背离所述基底一侧,制作第一导电层;对所述第一导电层进行图案化,在所述第一导电层位于所述显示区的部分形成多条栅线,在所述第一导电层位于所述邦定区的部分形成多个连接焊盘。
- 根据权利要求11所述的制作方法,其中,所述对所述第一导电层进行图案化,在所述第一导电层位于所述显示区的部分形成多条栅线,在所述第一导电层位于所述邦定区的部分形成多个连接焊盘,具体包括:通过按照所述多条栅线和所述多个连接焊盘的图形制作的掩膜版,对所述第一导电层,和设置在所述第一导电层位于所述显示区的部分靠近所述基底一侧的遮光层进行曝光、显影,形成所述多条栅线和所述多个连接焊盘。
- 一种显示基板的制作方法,具有显示区,和位于所述显示区至少一侧的邦定区;其中,多个连接焊盘包括功能连接焊盘和冗余连接焊盘;该制作方法包括以下步骤:在基底上制作遮光层;在所述遮光层上形成第一导电层;对所述第一导电层和所述遮光层进行图案化,在所述第一导电层位于所 述显示区的部分形成多条栅线,在所述第一导电层位于所述邦定区的部分形成多个功能连接焊盘;在所述第一导电层背离所述基底一侧制作多个所述冗余连接焊盘。
- 根据权利要求13所述的制作方法,其中,所述冗余连接焊盘包括设置在所述第一导电层背离所述基底一侧、且电连接的第一导电部和第二导电部;所述在所述第一导电层背离所述基底一侧制作多个所述冗余连接焊盘,具体包括:在所述第一导电层背离所述基底一侧成膜第二导电层;对所述第二导电层图案化,在所述第二导电层位于所述显示区的部分形成辅助电极,在所述第二导电层位于所述邦定区的部分形成所述冗余连接焊盘的第二导电部;在所述第二导电层背离所述基底一侧成膜第三导电层;对所述第三导电层图案化,在所述第三导电层位于所述显示区的部分形成公共电极,在所述第三导电层位于所述邦定区的部分形成所述冗余连接焊盘的第一导电部。
- 一种显示装置,其中,包括权利要求1-10任一项所述的显示基板。
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CN202080002433.4A CN114667481B (zh) | 2020-10-23 | 2020-10-23 | 显示基板及其制作方法、显示装置 |
US17/310,374 US20220317508A1 (en) | 2020-10-23 | 2020-10-23 | Display substrate and method for manufacturing the same, display device |
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CN117055750A (zh) * | 2022-05-11 | 2023-11-14 | 群创光电股份有限公司 | 触控电子装置 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6559913B1 (en) * | 1999-08-30 | 2003-05-06 | Nec Corporation | Liquid crystal display device having light-shielding film and data line of equal width and manufacturing method thereof |
JP2010250005A (ja) * | 2009-04-14 | 2010-11-04 | Seiko Epson Corp | 電気光学装置及び電子機器 |
CN102279483A (zh) * | 2010-06-10 | 2011-12-14 | 索尼公司 | 显示设备 |
CN107407846A (zh) * | 2015-05-08 | 2017-11-28 | 株式会社Lg化学 | 薄膜晶体管基底和包括其的显示装置 |
CN108122946A (zh) * | 2016-11-30 | 2018-06-05 | 乐金显示有限公司 | 有机发光显示器 |
CN111081582A (zh) * | 2019-12-06 | 2020-04-28 | 武汉华星光电半导体显示技术有限公司 | 显示装置、及驱动芯片与阵列基板的绑定方法 |
CN210626821U (zh) * | 2019-06-27 | 2020-05-26 | 北海惠科光电技术有限公司 | 一种显示面板及显示装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100612990B1 (ko) * | 1999-06-30 | 2006-08-14 | 삼성전자주식회사 | 액정 표시 장치용 박막 트랜지스터 기판 및 그 제조 방법 |
US7612860B2 (en) * | 2003-12-01 | 2009-11-03 | Lg Display Co., Ltd. | Color filter on thin film transistor type liquid crystal display device and method of fabricating the same with an alignment key formed with the orientation layer |
KR101108782B1 (ko) * | 2004-07-30 | 2012-02-24 | 엘지디스플레이 주식회사 | 액정 표시 장치 및 그 제조 방법 |
KR101189145B1 (ko) * | 2005-06-10 | 2012-10-10 | 엘지디스플레이 주식회사 | 액정표시장치 및 그 제조방법 |
KR20080098242A (ko) * | 2007-05-04 | 2008-11-07 | 삼성전자주식회사 | 표시 기판 및 이를 구비한 표시 장치 |
KR101455312B1 (ko) * | 2012-06-21 | 2014-10-27 | 엘지디스플레이 주식회사 | 패턴드 리타더 방식의 입체영상 표시장치 및 그 제조 방법 |
KR102227875B1 (ko) * | 2014-05-30 | 2021-03-15 | 엘지디스플레이 주식회사 | 유기 발광 디스플레이 장치 |
CN105572998A (zh) * | 2016-03-04 | 2016-05-11 | 京东方科技集团股份有限公司 | 一种阵列基板及其制造方法、显示装置 |
CN108873520B (zh) * | 2018-06-28 | 2021-07-13 | 武汉华星光电技术有限公司 | 一种液晶显示面板 |
CN109300970B (zh) * | 2018-11-30 | 2020-09-25 | 上海天马微电子有限公司 | 显示面板和显示装置 |
CN110349976B (zh) * | 2019-07-12 | 2022-02-22 | 京东方科技集团股份有限公司 | 阵列基板及其制备方法、显示面板和显示装置 |
CN110416274B (zh) * | 2019-08-02 | 2023-04-07 | 京东方科技集团股份有限公司 | 一种基板及其制备方法和oled显示面板 |
CN114255658B (zh) * | 2021-12-16 | 2023-03-17 | 武汉华星光电技术有限公司 | 显示面板及显示装置 |
-
2020
- 2020-10-23 CN CN202080002433.4A patent/CN114667481B/zh active Active
- 2020-10-23 WO PCT/CN2020/123266 patent/WO2022082737A1/zh active Application Filing
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Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6559913B1 (en) * | 1999-08-30 | 2003-05-06 | Nec Corporation | Liquid crystal display device having light-shielding film and data line of equal width and manufacturing method thereof |
JP2010250005A (ja) * | 2009-04-14 | 2010-11-04 | Seiko Epson Corp | 電気光学装置及び電子機器 |
CN102279483A (zh) * | 2010-06-10 | 2011-12-14 | 索尼公司 | 显示设备 |
CN107407846A (zh) * | 2015-05-08 | 2017-11-28 | 株式会社Lg化学 | 薄膜晶体管基底和包括其的显示装置 |
CN108122946A (zh) * | 2016-11-30 | 2018-06-05 | 乐金显示有限公司 | 有机发光显示器 |
CN210626821U (zh) * | 2019-06-27 | 2020-05-26 | 北海惠科光电技术有限公司 | 一种显示面板及显示装置 |
CN111081582A (zh) * | 2019-12-06 | 2020-04-28 | 武汉华星光电半导体显示技术有限公司 | 显示装置、及驱动芯片与阵列基板的绑定方法 |
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