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WO2021052463A1 - 检测系统及检测方法 - Google Patents

检测系统及检测方法 Download PDF

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Publication number
WO2021052463A1
WO2021052463A1 PCT/CN2020/116188 CN2020116188W WO2021052463A1 WO 2021052463 A1 WO2021052463 A1 WO 2021052463A1 CN 2020116188 W CN2020116188 W CN 2020116188W WO 2021052463 A1 WO2021052463 A1 WO 2021052463A1
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WIPO (PCT)
Prior art keywords
light
detection
unit
signal
signal light
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PCT/CN2020/116188
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English (en)
French (fr)
Inventor
陈鲁
崔高增
黄有为
王天民
马凯
庞芝亮
Original Assignee
深圳中科飞测科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority claimed from CN201910892194.3A external-priority patent/CN112540082A/zh
Priority claimed from CN201910892691.3A external-priority patent/CN112540083B/zh
Application filed by 深圳中科飞测科技股份有限公司 filed Critical 深圳中科飞测科技股份有限公司
Publication of WO2021052463A1 publication Critical patent/WO2021052463A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Definitions

  • the invention relates to the field of high-precision defect detection, in particular to a detection system and a detection method.
  • transparent film-like structures are increasingly applied to the semiconductor field, such as coating on silicon wafers, glass wafers, and glass protective films.
  • Transparent chips are also one of the important directions for the development of the semiconductor industry in the future. Similar to non-transparent materials such as silicon, defects in transparent film materials will also affect its functions. Therefore, inspection of transparent film materials is an important technical means to discover defects in time, improve semiconductor yield, and reduce costs.
  • scattered light detection is the main method for high-precision defect detection in the existing semiconductor industry.
  • this method is usually designed for non-transparent materials.
  • When detecting transparent materials there may be defects on the two opposite surfaces of the transparent material. Therefore, it is difficult to determine the specific location where the scattered signal originates from the transparent material to be measured with traditional methods.
  • the optical imaging method is also a common method for semiconductor defect detection.
  • the optical imaging method can only detect defects of about a few hundred nanometers in size, and it is slow to achieve high-resolution detection, which is difficult to meet. The need for high throughput in industrial applications.
  • the present invention proposes a detection system and a detection method.
  • One aspect of the present invention provides a detection system, which includes:
  • the detection light generating unit is configured to emit second detection light to the object to be measured, wherein the object to be measured includes a first surface and a second surface that are opposed to each other, and the second detection light is transmitted through the first surface. Passing through the object to be measured and scattered by the second surface to form a second signal light;
  • a signal detection unit configured to collect the second signal light in an imaging manner, and generate second detection information according to the second signal light
  • the processing unit is configured to obtain defect information of the second surface based on the second detection information.
  • Another aspect of the present invention also provides a detection method, which includes:
  • the second detection light is emitted to the object to be measured, wherein the object to be measured includes a first surface and a second surface that are opposed to each other, and the second detection light passes through the object to be measured from the first surface and passes through The second surface scatters to form a second signal light;
  • the defect information of the second surface is acquired based on the second detection information.
  • the detection system and detection method disclosed above can perform scanning detection on the object to be tested, and determine the presence, location and size of the defect by receiving scattered light formed by defects (for example, pollutants) on the surface of the object to be tested.
  • defects for example, pollutants
  • the present invention ensures that the signal detection unit can only receive the scattered light formed at the position to be measured on the designated surface, thereby realizing defect detection on multiple surfaces of the transparent film-like structure.
  • Another aspect of the present invention provides a detection system, which includes:
  • the detection light generating unit is configured to emit a first detection light and a second detection light to an object to be measured, wherein the object to be measured includes a first surface and a second surface which are arranged oppositely, and the first detection light passes through the The first surface is scattered to form first signal light, and the second detection light passes through the object to be measured from the first surface and is scattered by the second surface to form second signal light;
  • the first signal detection unit is configured to collect the first signal light and generate first detection information according to the first signal light
  • the second signal detection unit is configured to collect the second signal light and generate second detection information according to the second signal light.
  • Another aspect of the present invention provides a detection method based on a detection system, which includes:
  • the first detection light and the second detection light are emitted to the test object through the detection light generating unit, wherein the test object includes a first surface and a second surface that are arranged oppositely, and the first detection light passes through the The first surface is scattered to form a first signal light, and the second detection light passes through the object to be measured from the first surface and is scattered by the second surface to form a second signal light;
  • the second signal light is collected by the second signal detection unit, and second detection information is generated according to the second signal light.
  • the detection system and detection method disclosed above can perform scanning detection on the object to be tested, and determine the presence, location, and size of the defect by receiving scattered light formed by defects (for example, pollutants) on the surface of the object to be tested.
  • defects for example, pollutants
  • the present invention ensures that the first signal detection unit and the second signal detection unit can only receive the scattered light formed at the position to be measured on the corresponding designated surface, thereby Realize simultaneous defect detection on multiple surfaces of the transparent film-like structure.
  • Figure 1 shows a schematic diagram of the structure of the detection system according to the present invention
  • Figure 2 shows a schematic diagram of the prior art related to the detection system disclosed in the present invention
  • 3A-3B show a first exemplary structural schematic diagram of the detection system according to the present invention
  • FIGS. 4A-4B show a second exemplary structural schematic diagram of the detection system according to the present invention.
  • 4C shows a schematic structural diagram of an exemplary optical displacement unit of the detection system according to the present invention.
  • Figure 5 shows a flow chart of the detection method according to the present invention
  • FIG. 6 is a schematic diagram of a third exemplary structure of the detection system according to the present invention.
  • Fig. 7 is a schematic diagram of a third exemplary detection system disclosed according to the present invention in practical applications.
  • Fig. 8A is a fourth exemplary structural diagram of the detection system according to the present invention.
  • FIG. 8B is a schematic structural diagram of the optical displacement unit of the detection system according to the present invention.
  • Fig. 9 is a flowchart of a detection method based on a detection system according to the present invention.
  • each block in the flowchart or block diagram may represent a module, program segment, or part of code, and the module, program segment, or part of code may include one or more for implementing various embodiments.
  • Executable instructions for the specified logic function may also occur in a different order from the order marked in the drawings. For example, two blocks shown in succession may actually be executed substantially in parallel, or they may sometimes be executed in the reverse order, depending on the functions involved.
  • each block in the flowchart and/or block diagram, as well as the combination of the blocks in the flowchart and/or block diagram, can be implemented by a dedicated hardware-based device that performs the specified function or operation Or it can be implemented using a combination of dedicated hardware and computer instructions.
  • the embodiments of the present disclosure mainly focus on the following technical problems: the imaging detection methods used in the prior art generally require the use of area array detectors for photoelectric detection, and the sampling rate of the area array detectors is low, which limits the increase in detection speed; In addition, the detection accuracy of the imaging detection method is also limited by the optical diffraction limit, so that the method can only clearly image objects with a feature size greater than half of the detection wavelength. For commonly used visible light band light sources, the accuracy is only on the order of a few hundred nanometers. In addition, the scattered light collection method is also used in the prior art to detect defects in the semiconductor.
  • the existing scattered light collection method cannot distinguish that the scattered signal comes from the specific location of the transparent film-like structure, that is, the existing scattered light collection method cannot obtain accurate detection results.
  • the detection system disclosed in the present disclosure at least includes: a detection light generating unit, a signal detection unit, and a processing unit.
  • the photodetector included in the signal detection unit may adopt a line detection with a higher sampling rate. Compared with the existing imaging detection method, it greatly improves the detection speed.
  • the present invention judges the existence and size of defects based on the light intensity of the received signal light, and can detect defects in the order of tens of nanometers through noise control, which significantly improves the detection accuracy.
  • selective reception of scattered light formed by two opposite surface defects of the transparent film-like structure is realized.
  • the detection system disclosed herein includes: a carrier 100, a detection light generating unit (not shown in the drawings), a signal detection unit 200, and a processing unit (with drawings) Not shown in).
  • the carrier 100 is configured to carry the test object 300;
  • the detection light generating unit is configured to emit the first detection light and the second detection light to the test object 300 (the first detection light and the second detection light are also shown in FIG. 1 In the incident light),
  • the test object 300 includes a first surface 310 and a second surface 320 opposed to each other. The first detection light is scattered by the first surface 310 to form the first signal light, and the second detection light is from the first surface.
  • the signal detection unit 200 is configured to collect the first signal light or the second signal light in an imaging manner, and according to the first signal light Generate first inspection information or generate second inspection information according to the second signal light;
  • the processing unit is configured to acquire defect information of the first surface 310 based on the first inspection information, and acquire defects of the second surface 320 based on the second inspection information information.
  • the detection system further includes a control unit configured to control the relative movement between the carrier 100 and the signal detection unit 200.
  • the incident direction of the detection light and the normal direction of the object 300 are at a first angle ⁇
  • the normal direction of the signal detection unit 200 is between the normal direction of the object 300 and the normal direction of the object 300.
  • the second angle ⁇ In the present invention, the absolute value of the second angle ⁇ is different from the absolute value of the first angle ⁇ , that is, the signal detection unit 200 only receives the scattered light formed by the position to be measured of the object 300, It does not receive the reflected light formed by the position to be measured of the object 300 to be measured.
  • the signal detection unit 200 includes: a signal light collector 210 and a photodetector 220.
  • the signal light collector 210 is configured to collect the first signal light and the second signal light respectively;
  • the photodetector 220 is configured to receive the first signal light or the second signal light transmitted by the signal light collector 210, And generate corresponding detection information.
  • the detection system may include a plurality of signal detection units 200, and the plurality of signal detection units are used to detect the first signal light and the second signal light with different azimuth angles.
  • the normal direction of the signal light collector 210 and the normal direction of the test object 300 form the second angle ⁇ .
  • the detection light generating unit may be a point light spot generator or a line light spot generator, and in the case where the detection light generating unit is a point light spot generator, the photodetector 220 is an optical power meter, so as to adopt a point scanning
  • the photodetector 220 is a line detector, so that the surface of the object to be tested is detected by a line scanning detection method.
  • the working principle of the system disclosed in this embodiment is specifically as follows: the first detection light and the second detection light (for example, the incident light in FIG. 1) are incident on two opposite sides of the object 300 respectively.
  • the first detection light and the second detection light for example, the incident light in FIG. 1
  • the position to be measured on the surface when there is no defect in the irradiated position to be measured, all the inspection light will be transmitted from the object to be measured 300, and the transmitted light will be transmitted to the carrier 100 at the bottom and then reflected to the to-be-measured at the same angle.
  • the measured object 300 for example, the reflected light in FIG. 1
  • the signal light collector 210 can only detect very weak noise.
  • the defect When there is a defect in the illuminated position to be measured, the defect causes the detection light to scatter, and the scattered light is transmitted toward all directions of the measured object 300, within a certain angular range of the measured object 300 avoiding the reflected light (for example, The second angle ⁇ ) is provided with a signal detection unit 200, which collects scattered light in a specific spatial angle, and detects and processes the scattered light.
  • the photodetector 220 can only receive the scattered light formed by the first surface 310 (for example, the scattered light shown by the solid line in FIG. 2) or can only receive the scattered light formed by the second surface 310.
  • the scattered light formed by the surface 320 for example, the scattered light shown by the dotted line in FIG. 2).
  • the system disclosed in this embodiment may further adopt a carrying table 100 and a control unit capable of moving the object to be tested.
  • a carrying table 100 and a control unit capable of moving the object to be tested The following will be combined with FIGS. 3A-3B And FIG. 5 describes the specific steps of the system disclosed in this embodiment for detecting the surface of the transparent film-like structure.
  • Step 510 The detection light generating unit emits the first detection light and the second detection light to the test object 300, wherein the first detection light forms the first signal light through the first surface 310, and the second detection light transmits through the first surface 310
  • the second signal light is formed by passing through the object 300 and being scattered by the second surface 320.
  • Step 520 The signal detection unit 200 collects the first signal light in an imaging manner, and forms first detection information according to the first signal light.
  • the specific operations of this step are as follows:
  • the carrying table 100 is configured to move the object 300 to a first relative position, wherein, at the first relative position, the photosensitive surface position 221 of the photodetector 220 and the second relative position
  • the first to-be-measured positions 311 of a surface 310 are conjugate with each other.
  • control unit controls the movement of the carrying platform 100 relative to the signal detection unit 200 so that the object under test 300 and the signal detection unit 200 have a first relative position.
  • the first surface 310 is the object plane
  • the photodetector 220 is in the corresponding image plane.
  • the photodetector 220 can receive the first signal light transmitted by the signal light collector 210, and form first detection information according to the first signal light.
  • Step 530 The signal detection unit 200 collects the second signal light in an imaging manner, and forms second detection information according to the second signal light.
  • the specific operations of this step are as follows:
  • the carrying table 100 is further configured to move the object 300 to a second relative position, wherein, at the second relative position, the photosensitive surface position 221 of the photodetector 220 and The second to-be-measured positions 321 of the second surface 320 are conjugate with each other.
  • control unit controls the movement of the carrying platform 100 relative to the signal detection unit 200 so that the object under test 300 and the signal detection unit 200 have a second relative position.
  • the second surface 320 is the object plane
  • the photodetector 220 is in the corresponding image plane
  • the photodetector 220 is further configured to receive the signal light collector 210
  • the second signal light is transmitted, and second detection information is generated according to the second signal light.
  • the first detection information corresponding to the first signal light and the second detection information corresponding to the second signal light are respectively associated with the received light intensity of the first signal light and the second signal light.
  • Step 540 Obtain defect information of the first surface 310 based on the first detection information, and obtain defect information of the second surface 320 based on the second detection information.
  • the surface defect information of the test object 300 includes one or more of the following information: whether there is a surface defect in the test object 300, the location of the surface defect if there is a surface defect, and the surface defect the size of.
  • the position of the signal detection unit 200 relative to the detection light generating unit (not shown in the figure) is fixed, that is, the signal detection unit 200 in this embodiment can only collect signals from a fixed height and a fixed position. Of scattered light.
  • the position of the test object 300 is changed via the carrier table 100, so that the first surface 310 and the second surface 320 of the test object 300 are located on the signal detection unit 200 to collect scattered light in the two detections. In this way, the interference of the other surface of the object 300 to the surface being tested is eliminated.
  • the position of the signal detection unit is adjustable, and the position of the signal detection unit can be adjusted so that the signal detection unit and the object to be measured have a first relative position or a second relative position.
  • the detection system disclosed in this embodiment is similar to the detection system disclosed in Embodiment 1. Therefore, similar or identical components in the system disclosed in this embodiment will not be repeated here. .
  • the detection system disclosed in this embodiment further includes an optical displacement unit 400 configured to enable the signal detection unit 200 to collect the first signal light and the second signal light when the optical displacement unit 400 enters and exits the optical path. Or, the amount of change in the imaging position of the position to be measured on the first surface 310 and/or the second surface 320 can be adjusted. As shown in FIG. 2, if there are defects at the corresponding positions of the first surface 310 and the second surface 320 of the test object 300, the scattered light generated by the two defects will be collected by the signal light collector 210.
  • the photodetector 220 can only receive the scattered light formed by the first surface 310 (for example, the scattered light shown by the solid line in FIG. 2) or can only receive the scattered light formed by the second surface 310.
  • the scattered light formed by the surface 320 for example, the scattered light shown by the dotted line in FIG. 2).
  • the system disclosed in this embodiment can use the optical displacement unit 400 to detect the two opposite surfaces of the object to be measured 300 respectively.
  • the specific steps of the system disclosed in this embodiment for detecting the surface of the transparent film-like structure are described in conjunction with FIGS. 4A-4C and FIG. 5.
  • Step 510 The detection light generating unit emits the first detection light and the second detection light to the test object 300, wherein the first detection light forms the first signal light through the first surface 310, and the second detection light transmits through the first surface 310
  • the second signal light is formed by passing through the object 300 and being scattered by the second surface 320.
  • Step 520 The signal detection unit 200 collects the first signal light in an imaging manner, and forms first detection information according to the first signal light.
  • the specific operations of this step are as follows:
  • the carrying table 100 moves the object 300 to be measured to a first relative position, wherein, at the first relative position, the position 221 of the photosensitive surface of the photodetector 220 and the first surface 310 to be measured are The positions 311 are conjugated to each other. This enables the signal light collector 210 to collect the first signal light formed by the first detection light by the first surface 310 at the first position to be measured 311 (as shown by the solid line in FIG. 4A).
  • the photodetector 220 is configured to receive the first signal light transmitted by the signal light collector 210 (for example, as shown by the solid line in FIG. 4A), and generate and The first detection information corresponding to the first signal light.
  • the detection method further includes: allowing the optical displacement unit 400 to enter the optical path, so that the position 221 of the photosensitive surface of the photodetector 220 and the first position to be measured 311 of the first surface 310 are conjugate with each other, so as to facilitate the step 520 implementation.
  • Step 530 The signal detection unit 200 collects the second signal light in an imaging manner, and forms second detection information according to the second signal light.
  • the specific operations of this step are as follows:
  • the signal light collector 210 can simultaneously imagewise collect the second signal light formed by the second detection light passing through the test object 300 and being scattered by the second surface 320 (as shown by the dashed line in FIG. 4A ).
  • the optical displacement unit 400 when the distance between the image positions of the first surface and the second surface of the test object 300 is too small, the optical displacement unit 400 enters the optical path, and the photodetector 220 collects the first surface when the optical displacement unit 400 enters the optical path. Two signal light.
  • the optical displacement unit 400 is preferably arranged between the signal light collector 210 and the photodetector 220, so that the photosensitive surface of the photodetector 220
  • the position 221 and the second position to be measured 321 of the second surface 320 are conjugated with each other, so that the photodetector 220 can receive the second signal light transmitted by the signal light collector 210 based on the changed receiving path (for example, in FIG. 4B (Shown by the dashed line), and generate second detection information corresponding to the second signal light.
  • the optical displacement unit 400 is a single prism or a double wedge prism made of a transparent film material.
  • the double wedge prism includes a first wedge prism and a second wedge prism whose hypotenuses are arranged in parallel.
  • the relative distance between a wedge prism and the second wedge prism is adjustable.
  • the angle between the optical displacement unit 400 and the signal light collector 210 and the photodetector 220 depends at least on the thickness of the optical displacement sheet itself, the refractive index of the material, and the thickness of the object 300 to be measured.
  • the detection method disclosed in this embodiment further includes: separately adjusting the optical displacement unit 400 before collecting the first signal light and the second signal light, so that the signal detection unit 200 can collect the first signal light and the second signal respectively Light.
  • the distance between the first wedge prism and the second wedge prism is adjusted.
  • the detection system can also include an aperture to ensure that only the scattered light emitted by a specific surface is received, thereby eliminating the influence of non-test surface contamination or defect scattered light;
  • the detection system may also include a slit to ensure that only the scattered light emitted by a specific surface is received, thereby eliminating the influence of non-measured surface contamination or defect scattered light.
  • the optical displacement unit 400 may also be an optical displacement sheet carrying unit, which may include one or more optical displacement positions (for example, optical displacement positions 410-450) to facilitate carrying one or more optical displacement positions. A light displacement film of the same or different properties. In actual use, the optical displacement unit 400 may always be arranged in the signal detection unit 200.
  • the light displacement sheet carrying unit further has a light-passing hole, and the light displacement sheet carrying unit is also used to allow the light-passing hole to enter the light path.
  • the light displacement film bearing unit further has a rotation axis, so that the light displacement film bearing unit can drive a plurality of light displacement films and light holes to rotate around the rotation axis; wherein, a plurality of light displacement films And light holes are distributed around the axis of rotation.
  • the plurality of light displacement films and the light-passing holes are arranged along a translational line, and the light displacement sheet carrying unit is used to drive the plurality of light-displacement sheets and the light-passing holes to translate along the translational line.
  • the optical displacement unit 400 can be rotated so that the photodetector 220 passes through the first optical displacement position 410
  • the first signal light is received; at this time, the first light displacement position 410 is the position where the light-passing hole is located, so that the photodetector 220 receives the first signal light without the help of the light displacement sheet.
  • the light displacement unit 400 can be rotated so that the photodetector 220 receives the second signal light via, for example, the third light displacement position 430; A certain light displacement film is arranged in the third light displacement position 430, so that the photodetector 220 can change the receiving path with the help of the light displacement film to receive the second signal light.
  • the optical displacement unit 400 can be rotated to select the second optical displacement position 420 in the optical displacement unit 400 or the optical displacement sheet in other optical displacement positions to receive Detect the signal light on the first surface or the second surface of the test object.
  • the optical displacement sheet disclosed in Embodiments 1 and 2 is optionally a parallel flat plate, and the optical displacement sheet may be made of glass.
  • Step 540 Obtain defect information of the first surface 310 based on the first inspection information, and acquire defect information of the second surface 320 based on the second inspection information.
  • the first detection information corresponding to the first signal light and the second detection information corresponding to the second signal light respectively include the received light intensity of the first signal light and the light intensity of the second signal light.
  • the surface defect information of the test object 300 includes one or more of the following information: whether the test object 300 has a surface defect, the location of the surface defect in the presence of the surface defect, and the The size of the surface defect.
  • the wavelengths of the first detection light and the second detection light disclosed in Embodiments 1 and 2 may be the same or different.
  • the transmittance of the test object to the first detection light is less than the transmittance of the second detection light; the reflectivity of the test object to the first detection light is greater than the reflectivity of the second detection light.
  • the transparent film-like structure detected by the detection system and method disclosed herein can either exist independently or closely adhere to a certain non-transparent material (such as a transparent thick film plated on a silicon wafer).
  • Examples 1 and 2 in this article are all transparent film-like structures as an example.
  • the signal light received by the technical solution disclosed in the present invention is scattered light, and the receiving channel does not include the angle range of the reflected light, the realization principle and effect of the detection of the transparent film-like structure on the non-transparent smooth material and the full transparency
  • the film-like structure is the same, so it will not be described separately here.
  • the embodiments 1 and 2 disclosed herein can use the light scattering method to sequentially perform defect detection on the two opposite surfaces of the transparent film-like structure.
  • the detection light generating unit and the signal detection unit of the system are relatively fixed, and the object to be tested is placed on the carrying platform.
  • the carrying platform drives the object to be measured to move at a specified speed according to the specified track, so that the photodetector continuously collects signals and finally completes the test. Measurement of various positions of objects.
  • the imaging detection method used in the prior art generally requires the use of area array detectors for photoelectric detection, and the sampling rate of the area array detector is low, which limits the increase in detection speed;
  • the detection accuracy of the imaging detection method is also limited by the optical diffraction limit, so that the method can only clearly image objects with a feature size greater than half of the detection wavelength.
  • the accuracy is only on the order of a few hundred nanometers.
  • the scattered light collection method is also used in the prior art to detect defects in the semiconductor.
  • the traditional solution is to use the reflective cup collection method.
  • the detection system disclosed in the present disclosure includes: a bearing platform, a detection light generation unit, a first signal detection unit, a second signal detection unit, and an optional optical displacement unit, wherein the first signal detection unit,
  • the photodetectors included in the second signal detection unit can be line detectors or optical power meters with a higher sampling rate, and can be matched with a bearing platform that can make the object to be measured move at a specified speed according to a specified track. Compared with imaging detection methods, the detection speed is greatly improved.
  • the present invention judges the existence and size of defects based on the light intensity of the received signal light, and can detect defects in the order of tens of nanometers through noise control, which significantly improves the detection accuracy.
  • the design of the first signal detection unit and the second signal detection unit of the present invention can ensure that the positions to be measured on the two opposite surfaces of the object to be measured are respectively consistent with the photosensitive surfaces of the first signal detection unit and the second signal detection unit.
  • the position has a one-to-one correspondence, so that the simultaneous detection of two opposite surfaces of the object to be measured can be realized.
  • selective reception of scattered light formed by two opposite surface defects of the transparent film-like structure is realized.
  • the detection system disclosed herein includes: a carrier 100, a detection light generating unit (not shown in the drawings), a first signal detection unit 700, and a second signal detection unit 800.
  • the carrying platform 100 is configured to carry the object 600 to be tested, and the carrying platform 100 includes a carrying surface for placing the object 600 to be tested.
  • the detection light generating unit is configured to emit the first detection light and the second detection light (that is, the incident light in FIGS. 6 and 7) to the object to be measured 600, wherein the object to be measured 600 includes a first surface disposed opposite to each other.
  • the first signal detection unit 700 is configured to collect the first signal light and generate first detection information according to the first signal light; the second signal detection unit 800 is configured to collect the second signal light and generate the first detection information according to the second signal light 2. Detection information.
  • the incident direction of the first detection light and the second detection light form a first angle ⁇ between the normal direction of the object 600, and the normal direction of the first signal detection unit 700 is relative to the normal direction of the object 600.
  • the normal direction of the object 600 forms a second angle ⁇
  • the normal direction of the second signal detection unit 800 and the normal direction of the object 600 form a third angle ⁇ .
  • the absolute value of the second angle ⁇ and the absolute value of the third angle ⁇ are different from the absolute value of the first angle ⁇ , that is, the first signal detection unit 700, the second signal
  • the detection unit 800 only receives the scattered light formed by the position to be measured of the object 600 to be measured, and does not receive the reflected light formed by the position to be measured of the object 600 to be measured.
  • the absolute value of the second angle ⁇ is the same as the absolute value of the third angle ⁇ .
  • the absolute value of the second angle ⁇ and the absolute value of the third angle ⁇ may also be different.
  • the first signal detection unit 700 includes: a first signal light collector 710 and a first photodetector 720.
  • the first signal light collector 710 is configured to collect the first signal light
  • the first photodetector 720 is configured to receive the first signal light transmitted by the first signal light collector 710, and generate according to the first signal light The first detection information.
  • the position 721 of the photosensitive surface of the first photodetector 720 and the position to be measured 611 of the first surface 610 are conjugated with each other, that is, the first surface 610 is the object plane, and the first photodetector 720 is at The corresponding image plane. Further, the normal direction of the first signal light collector 710 and the normal direction of the object 600 are at a second angle ⁇ .
  • the second signal detection unit 800 includes: a second signal light collector 810 and a second photodetector 820.
  • the second signal light collector 810 is configured to collect the second signal light
  • the second photodetector 820 is configured to receive the second signal light transmitted by the second signal light collector, and according to the second signal light The signal light generates second detection information.
  • the position 821 of the photosensitive surface of the second photodetector 820 and the position to be measured 621 of the second surface 620 are conjugate with each other, that is, the second surface 620 is the object plane, and the second photodetector 820 is in the object plane.
  • the normal direction of the second signal light collector 810 and the normal direction of the object 600 are at a third angle ⁇ .
  • the detection system may include more signal detection units, and more signal detection units are used to detect the first signal light and the second signal light of different azimuth angles.
  • the detection light generating unit is a point light spot generator or a line light spot generator.
  • the first photodetector 720 and the second photodetector 820 are optical power meters, so as to detect the surface of the object to be measured by means of spot scanning;
  • the detection light generating unit is a line spot generator, the first photodetector 720 and the second photodetector 820 are line detectors, so as to detect the surface of the object to be measured in a line scan detection manner.
  • the working principle of the system disclosed in this embodiment is specifically as follows: when the first detection light and the second detection light (for example, the incident light in FIG. 6 and FIG. 7) respectively enter the object 600
  • the thickness of is small, so the incident light of its two opposite surfaces (that is, the first surface 610 and the second surface 620) has a better convergence.
  • all the inspection light will be transmitted from the object to be measured 600, and the transmitted light will be transmitted to the carrying table 100 at the bottom and then reflected to the object to be measured 600 at the same angle (for example, Figure 6, Figure 6). 7), while the first signal light collector 710 and the second signal light collector 810 can only detect very weak noise.
  • the defect causes the detection light to be scattered, and the scattered light is transmitted toward all directions of the measured object 600, within a certain angular range of the measured object 600 avoiding the reflected light (for example,
  • the second angle ⁇ , the third angle ⁇ ) are respectively provided with the first signal detection unit 700 and the second signal detection unit 800, so that the first signal detection unit 700 and the second signal detection unit 800 respectively collect scattered light in a specific spatial angle, And detect and process the scattered light.
  • the scattered light generated by the two defects is respectively transferred to the first signal light collector 710 and the second signal light collector 810. collect.
  • the position of the photosensitive surface of the first photodetector 720 and the position to be measured on the first surface 610 are conjugate with each other, so the first photodetector 720 can only receive the scattered light formed by the first surface 610 ( For example, the scattered light shown in FIG. 7); the position of the photosensitive surface of the second photodetector 820 and the position to be measured on the second surface 620 are conjugate with each other, then the second photodetector 820 can only receive the second detection light.
  • the scattered light (for example, the scattered light shown in FIG. 7) formed by the object 600 through the second surface 620 is passed.
  • Step 1010 the detection light generating unit simultaneously emits the first detection light and the second detection light to the object 600 to be measured, wherein the first detection light is scattered by the first surface 610 to form first signal light, and the second detection light The first surface 610 passes through the object 600 and is scattered by the second surface 620 to form a second signal light.
  • the detection system further includes a mobile device for moving at least two of the first signal detection unit 700, the second signal detection unit 800, and the carrier 100, where the first signal detection The unit 700 moves in the first direction, the second signal detection unit 800 moves in the second direction, and the carrier 100 moves in the third direction, so that the first signal detection unit 700 and the second signal detection unit 800 can be treated separately.
  • a mobile device for moving at least two of the first signal detection unit 700, the second signal detection unit 800, and the carrier 100, where the first signal detection The unit 700 moves in the first direction, the second signal detection unit 800 moves in the second direction, and the carrier 100 moves in the third direction, so that the first signal detection unit 700 and the second signal detection unit 800 can be treated separately.
  • Accurate detection of the first surface 610 and the second surface 620 of the object 600 wherein, the included angle between the first direction, the second direction, and the third direction and the bearing surface of the bearing platform 100 is greater than zero.
  • Step 1020 The first signal detection unit 700 collects the first signal light, and generates the first detection information according to the first signal light; the specific operations of this step are as follows:
  • the first signal light collector 710 collects the first signal light from the first position to be measured 611 on the first surface 610;
  • the first photodetector 720 receives the first signal light based on the first receiving path formed by the relative position of the first photodetector 720 and the first signal light collector 710, and generates the first detection information. Specifically, the position 721 of the photosensitive surface of the first photodetector 720 and the first position 611 of the object to be measured 600 are conjugated with each other, so as to receive the first signal light and generate the first detection information.
  • Step 1030 The second signal detection unit 600 collects the second signal light, and generates second detection information according to the second signal light; the specific operation of this step is as follows:
  • the second signal light collector 810 collects the second signal light from the second position to be measured 621 on the second surface 620;
  • the second photodetector 820 receives the second signal light based on the second receiving path formed by the relative position of the second photodetector 820 and the second signal light collector 810, and generates the second detection information.
  • the position 821 of the photosensitive surface of the second photodetector 820 and the second position 621 of the object to be measured 600 are conjugated with each other, so as to receive the second signal light and generate the second detection information.
  • steps 1020 and 1030 can be performed simultaneously or in other order.
  • the first detection information includes the light intensity of the first signal light
  • the second detection information includes the light intensity of the second signal light
  • the surface defect information of the test object 600 includes one or more of the following information Item: Whether there is a surface defect in the test object 600, the location of the surface defect, and the size of the surface defect if there is a surface defect.
  • the positions of the first signal detection unit 700 and the second signal detection unit 800 relative to the detection light generating unit are fixed, that is, the first signal detection unit in this embodiment
  • the unit 700 and the second signal detection unit 800 can only collect scattered light emitted from a fixed height and a fixed position.
  • the first photodetector 720 in the first signal detection unit 700 can only receive and detect scattered light from the first surface 610 of the object 600; the second photodetector 720 in the second signal detection unit 800
  • the photodetector 820 can only receive and detect the scattered light of the second surface 620 of the object 600, thereby eliminating the detection interference between different surfaces of the object 600, and can also realize the detection of the two surfaces of the object 600. Simultaneous detection.
  • the detection system disclosed in this embodiment is similar to the system disclosed in Embodiment 3. Therefore, similar or identical components in the system disclosed in this embodiment will not be repeated here.
  • the detection system disclosed in this embodiment further includes an optical displacement unit 850 configured to change the imaging position of the position to be measured on the first surface or the second surface of the object to be measured.
  • the disclosed detection system may also include two light displacement units, for example, a first light displacement unit and a second light displacement unit, so that the first light displacement unit is used to change the target surface of the first surface of the object to be measured.
  • the imaging position of the measuring position is such that the second optical displacement unit is used to change the imaging position of the measuring position of the second surface of the object to be measured.
  • the first signal light collector 710 is used to collect the first signal light, and the first signal light is converged to the first photodetector 720 through the first light displacement unit; the second signal light collector 810 is used to collect The second signal light is converged to the second photodetector 820 through the second light displacement unit.
  • the first optical displacement unit is configured to adjust the amount of change in the imaging position of the position to be measured on the first surface of the object to be measured
  • the second optical displacement unit is configured to make the second The amount of change in the imaging position of the position to be measured on the surface is adjustable.
  • the thickness and/or material of the second test object 900 to be detected is different from the thickness and/or material of the test object 600, when the first surface 910 of the second test object 900 is When there are defects in the corresponding positions of the second surface 920, when the positions of the first signal detection unit 700 and the second signal detection unit 800 are fixed, the two cannot separately perform the detection of the second test unit based on the original design. Detection of the first surface 910 and the second surface 920 of the object 900.
  • the system disclosed in this embodiment further includes an optical displacement unit 850, which is configured to enable the first photodetector 720 collects the first signal light when the optical displacement unit 850 enters and exits the optical path, or enables the second photodetector 820 to collect the second signal light when the optical displacement unit 850 enters and exits the optical path, so that the second test object 900 can be
  • the first surface 910 and the second surface 920 are detected separately.
  • Step 1010 The detection light generating unit simultaneously emits the first detection light and the second detection light to the second test object 900, where the second test object 900 includes a first surface 910 and a second surface 920 that are opposed to each other.
  • the detection light is scattered by the first surface 910 to form the first signal light
  • the second detection light is scattered from the first surface 910 through the second test object 900 and scattered by the second surface 920 to form the second signal light.
  • this embodiment further includes adopting an optical displacement unit to change the receiving path of the first signal light or the second signal light based on the thickness and/or material of the second object to be measured 900; the specific operation is as follows :
  • Make the first optical displacement unit change the imaging position of the position to be measured 911 of the first surface 910 of the second object to be measured 900, or make the second optical displacement unit change the position to be measured of the second surface 920 of the second object to be measured 900 921 imaging position.
  • the optical displacement unit 850 is arranged in the second signal detection unit 800 (as shown in FIG. 8A). As shown, in this embodiment, preferably, the optical displacement unit 850 is disposed between the second signal light collector 810 and the second photodetector 820), so that the second test position of the second test object 900 is 921 is conjugated to the position 921 of the second photosensitive surface of the second photodetector 920, thereby realizing the change of the signal light collection position.
  • the optical displacement unit 850 is arranged in the first signal detection unit 700, so that the position to be measured 911 of the first surface 910 of the second object to be measured 900 and the first photodetector 720 are The position 721 of the photosensitive surface is conjugated to realize the change of the collection position of the signal light.
  • the light displacement unit 850 may also be a light displacement sheet carrying unit, which may include one or more light displacement positions (for example, light displacement positions 851-855). , In order to carry one or more identical or different optical displacement films. In actual use, the optical displacement unit 850 may always be arranged in the second signal detection unit 800 and/or the first signal detection unit 700.
  • the light displacement film carrying unit further has a light-passing hole, and the light-displacement film carrying unit is also used to make the light-displacement sheet carrying unit enter the light path.
  • the light displacement film bearing unit further has a rotation axis, so that the light displacement film bearing unit can drive a plurality of light displacement films and light holes to rotate around the rotation axis; wherein, a plurality of light displacement films And light holes are distributed around the axis of rotation.
  • the plurality of light displacement films and the light-passing holes are arranged along a translational line, and the light displacement sheet carrying unit is used to drive the plurality of light-displacement sheets and the light-passing holes to translate along the translational line.
  • the second light displacement sheet carrying unit provided in the second signal detection unit 800 can be rotated, so that the second photodetector 820 receives the light via the first light displacement position 851, for example.
  • the second signal light; at this time, the first light displacement position 851 is the position of the light through hole, so that the second photodetector 820 can receive the second signal light without the help of the light displacement sheet; at the same time, it can be rotated and set in the first light
  • a first light displacement sheet carrying unit in the signal detection unit 700 enables the first photodetector 720 to receive the first signal light via, for example, the third light displacement position 853; at this time, a certain light displacement is provided in the third light displacement position 853
  • This kind of light displacement film realizes that the first photodetector 720 receives the first signal light with the help of the light displacement film.
  • the second light displacement sheet carrying unit provided in the second signal detection unit 800 can be rotated, so that the second photodetector 820 passes through, for example, the fourth light displacement position. 854 receives the second signal light; at this time, some kind of light displacement film is arranged in the fourth light displacement position 854, so that the second photodetector 820 receives the second signal light with the help of the light displacement film; at the same time, it can rotate
  • the first light displacement sheet carrying unit 850 arranged in the first signal detection unit 700 enables the first photodetector 720 to receive the first signal light via the fifth light displacement position 855; at this time, in the fifth light displacement position 855 No light displacement sheet is provided, so that the first photodetector 720 receives the first signal light without the help of the light displacement sheet.
  • the optical displacement units can be provided in the first signal detection unit 700 and the second signal detection unit 800 respectively.
  • the first light displacement unit and the second light displacement unit so that the first photodetector 720 and the second photodetector 820 receive the first signal light and the second signal light via the corresponding light displacement unit, respectively.
  • optical displacement unit 850 can further improve the flexibility of use of the disclosed device.
  • the detection system can also include an aperture to ensure that only the scattered light emitted by a specific surface is received, thereby eliminating the influence of non-test surface contamination or defect scattered light;
  • the detection system may also include a slit to ensure that only the scattered light emitted by a specific surface is received, thereby eliminating the influence of non-measured surface contamination or defect scattered light.
  • the optical displacement unit 850 is an optical displacement sheet made of a transparent film material.
  • the angle between the optical displacement sheet and the first signal light collector 710 and the first photodetector 720 or the second signal light collector 810, The angle between the second photodetectors 820 depends at least on the thickness of the light displacement sheet itself, the refractive index of the material, and the thickness of the second object 900 under test.
  • the optical displacement unit 850 may be a single prism or a double wedge prism.
  • the double wedge prism includes a first wedge prism and a second wedge prism with the hypotenuse parallel to each other.
  • the first wedge prism and the second wedge prism The relative distance of the two wedge prisms is adjustable.
  • the optical displacement sheet disclosed in Embodiments 3 and 4 is optionally a parallel flat plate, and the optical displacement sheet may be made of glass.
  • the respective adjustments to the optical displacement unit are specifically as follows: adjusting the distance between the first wedge-shaped prism and the second wedge-shaped prism.
  • Step 1020 The first signal detection unit 700 collects the first signal light, and generates first detection information according to the first signal light; the specific operations of this step are as follows:
  • the first signal light collector 710 collects the first signal light
  • the first photodetector 720 receives the first signal light based on the first receiving path formed by the first photodetector 720 and the set position of the first signal light collector 710 (as shown by the solid line in FIG. 8A). Light), and generate the first detection information.
  • the first photodetector 720 receives the first signal light via the optical displacement unit 850 and generates The first detection information.
  • Step 1030 The second signal detection unit 800 collects the second signal light, and generates second detection information according to the second signal light; the specific operations of this step are as follows:
  • the second signal light collector 810 collects the second signal light
  • the second photodetector 820 receives the second signal light (scattered light as shown by the dotted line in FIG. 8A) based on the second receiving path formed by the second photodetector 820 and the second signal light collector 810 at the set position. ), and generate the second detection information.
  • the second photodetector 820 receives the second signal light via the optical displacement unit 850 and generates the The second detection information.
  • the first detection information is associated with the received light intensity of the first signal light
  • the second detection information is associated with the light intensity of the second signal light
  • the surface defect information of the second test object 900 includes one or more of the following information: whether the second test object 900 has a surface defect, the location of the surface defect and the location of the surface defect if there is a surface defect size.
  • step 1020 and step 1030 are performed at the same time, so as to realize the simultaneous detection of two opposite surfaces of the second test object 900.
  • the optical displacement unit 850 is added between the first signal light collector 710 and the first photodetector 720 or the optical displacement is added between the second signal light collector 810 and the second photodetector 820.
  • the unit 850 changes the transmission direction and phase of the signal light transmitted to the first photodetector 720 or the second photodetector 820, thereby realizing the change of the imaging position, and further realizing the detection of multiple surfaces of transparent film-like structures of different materials. Simultaneous detection.
  • the wavelengths of the first detection light and the second detection light disclosed in Embodiments 3 and 4 may be the same or different.
  • the transmittance of the test object to the first detection light is less than the transmittance of the second detection light; the reflectivity of the test object to the first detection light is greater than the reflectance of the second detection light.
  • the transparent film-like structure detected by the detection system and method disclosed herein can either exist independently or closely adhere to a certain non-transparent material (such as a transparent thick film plated on a silicon wafer).
  • Examples 3 and 4 in this article are all transparent film-like structures as an example.
  • For the transparent film-like structure closely attached to a non-transparent smooth material most of the detection light is incident on the object to be measured. The material is not reflected by the carrying platform. Since the signal light received by the technical solution disclosed in the present invention is scattered light, and the receiving angle does not include the range of the reflected light angle, the realization principle and effect of the detection of the transparent film-like structure on the non-transparent smooth material is consistent with the full transparency.
  • the film-like structure is the same, so it will not be described separately here.
  • the embodiments 3 and 4 disclosed herein can use the light scattering method to simultaneously perform defect detection on the two opposite surfaces of the transparent film-like structure.
  • the detection light generating unit of the system is relatively fixed with the first signal detection unit and the second signal detection unit.
  • the object to be tested is placed on the carrying platform.
  • the carrying platform drives the object to be measured to move at a specified speed according to a specified trajectory, so that the first The photodetector and the second photodetector continuously collect signals and finally complete the measurement of each position of the object to be measured.

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Abstract

本发明公开了检测系统及方法，所述检测系统包括：检测光生成单元、信号探测单元以及处理单元；检测光生成单元被配置向待测物发射第二检测光，其中，所述待测物包括相对设置的第一表面和第二表面，所述第二检测光自所述第一表面透过所述待测物并经所述第二表面散射形成第二信号光；信号探测单元被配置为成像式收集所述第二信号光，并根据所述第二信号光生成第二检测信息；处理单元被配置为基于所述第二检测信息来获取所述第二表面的缺陷信息。与现有技术相比，本发明在检测透明膜状结构的表面的过程中具有检测速度快、检测结果精度高等优点。

Description

检测系统及检测方法 技术领域
本发明涉及高精度缺陷检测领域，尤其涉及一种检测系统及检测方法。
背景技术
随着现代工业的发展，透明膜状结构越来越多应用到半导体领域，例如硅晶圆上镀膜、玻璃晶圆、玻璃保护膜等。透明芯片也是未来半导体行业发展的重要方向之一。与硅等非透明材料相似的是，透明膜材料上存在的缺陷也将影响其功能，因此，对透明膜材料进行检测是及时发现缺陷、提高半导体良品率、降低成本的重要技术手段。
目前，散射光检测是现有半导体行业进行高精度缺陷检测的主要方法，然而这种方法通常主要针对非透明材料设计，当检测透明材料时，由于透明材料中相对的两个表面均可能存在缺陷，传统方法难以确定散射信号源于该待测透明材料的具体位置。
此外，光学成像法也是半导体缺陷检测的一种常用方法，然而受光学衍射极限的限制，光学成像法仅能检测大约几百纳米尺寸的缺陷，且实现高分辨率检测时速度较慢，难以满足工业应用中高吞吐量的需求。
发明内容
针对上述问题，本发明提出了检测系统及检测方法。
本发明一方面提出了一种检测系统，其包括：
检测光生成单元，被配置为向待测物发射第二检测光，其中，所述待测物包括相对设置的第一表面和第二表面，所述第二检测光自所述第一表面透过所述待测物并经所述第二表面散射形成第二信号光；
信号探测单元，被配置为成像式收集所述第二信号光，并根据所述第二信号光生成第二检测信息；以及
处理单元，被配置为基于所述第二检测信息来获取所述第二表面的缺陷信息。
本发明另一方面还提出了一种检测方法，其包括：
向待测物发射第二检测光，其中，所述待测物包括相对设置的第一表面和第二表面，所述第二检测光自所述第一表面透过所述待测物并经所述第二表面散射形成第二信号光；
成像式收集所述第二信号光，并根据所述第二信号光生成第二检测信息；以及
基于所述第二检测信息来获取所述第二表面的缺陷信息。
上文所公开的检测系统及检测方法能够对待测物进行扫描式检测，并通过接收待测物的表面的缺陷(例如，污染物)形成的散射光判断该缺陷的有无、位置及尺寸。本发明通过对信号探测单元等部件的设计，确保信号探测单元仅能接收到位于指定表面的待测位置形成的散射光，从而实现对透明膜状结构的多个表面进行缺陷检测。
本发明又一方面提出了一种检测系统，其包括：
检测光生成单元，被配置为向待测物发射第一检测光和第二检测光，其中，所述待测物包括相对设置的第一表面和第二表面，所述第一检测光经所述第一表面散射形成第一信号光，所述第二检测光自所述第一表面透过所述待测物并经所述第二表面散射形成第二信号光；
第一信号探测单元，被配置为收集所述第一信号光，并根据所述第一信号光生成第一检测信息；以及
第二信号探测单元，被配置为收集所述第二信号光，并根据所述第二信号光生成第二检测信息。
本发明再一方面提出了一种基于检测系统的检测方法，其包括：
通过所述检测光生成单元向待测物发射第一检测光和第二检测光，其中，所述待测物包括相对设置的第一表面和第二表面，所述第一检测光经所述第一表面散射形成第一信号光，所述第二检测光自所述第一表面透过所述待测物并经所述第二表面散射形成第二信号光；
通过所述第一信号探测单元收集所述第一信号光，并根据所述第一信号光生成第一检测信息；以及
通过所述第二信号探测单元收集所述第二信号光，并根据所述第二信号光生成第二检测信息。
以上所公开的检测系统及检测方法能够对待测物进行扫描式检测，并 通过接收待测物的表面的缺陷(例如，污染物)形成的散射光判断该缺陷的有无、位置及尺寸。本发明通过对第一信号探测单元、第二信号探测单元等部件的设计，确保第一信号探测单元、第二信号探测单元仅能接收到位于相应指定表面的待测位置形成的散射光，从而实现同时对透明膜状结构的多个表面进行缺陷检测。
附图说明
参考附图示出并阐明实施例。这些附图用于阐明基本原理，从而仅仅示出了对于理解基本原理必要的方面。这些附图不是按比例的。在附图中，相同的附图标记表示相似的特征。
图1示出了根据本发明的检测系统的结构示意图；
图2示出了与本发明所公开的检测系统的相关的现有技术示意图；
图3A-3B示出了根据本发明的检测系统的第一示例性结构示意图；
图4A-4B示出了根据本发明的检测系统的第二示例性结构示意图；
图4C示出了根据本发明的检测系统的示例性光位移单元的结构示意图；
图5示出了根据本发明的检测方法的流程图；
图6为根据本发明的检测系统的第三示例性结构示意图；
图7为在实际应用中根据本发明所公开的第三示例性检测系统的原理图；
图8A为根据本发明的检测系统的第四示例性结构示意图；
图8B为根据本发明的检测系统的光位移单元的结构示意图；以及
图9为根据本发明的基于检测系统的检测方法的流程图。
具体实施方式
以下参考附图详细描述本公开的各个示例性实施例。附图中的流程图和框图示出了根据本公开的各种实施例的方法和设备的可能实现的体系架构、功能和操作。应当注意，流程图或框图中的每个方框可以代表一个模块、程序段、或代码的一部分，所述模块、程序段、或代码的一部分可以包括一个或多个用于实现各个实施例中所规定的逻辑功能的可执行指令。 也应当注意，在有些作为备选的实现中，方框中所标注的功能也可以按照不同于附图中所标注的顺序发生。例如，两个接连地表示的方框实际上可以基本并行地执行，或者它们有时也可以按照相反的顺序执行，这取决于所涉及的功能。同样应当注意的是，流程图和/或框图中的每个方框、以及流程图和/或框图中的方框的组合，可以使用执行规定的功能或操作的专用的基于硬件的设备来实现，或者可以使用专用硬件与计算机指令的组合来实现。
对于相关领域普通技术人员已知的技术、方法和设备可能不作详细讨论，但在适当情况下，所述技术、方法和设备应当被视为说明书的一部分。对于附图中的各单元之间的连线，仅仅是为了便于说明，其表示至少连线两端的单元是相互通信的，并非旨在限制未连线的单元之间无法通信。
本公开内容的实施例主要关注以下技术问题：现有技术中使用的成像检测方法一般需要采用面阵探测器进行光电检测，而面阵探测器的采样率较低，限制了检测速度的提高；此外，成像检测方法的检测精度还受到光学衍射极限的限制，使得该方法仅能够对特征尺寸大于检测波长一半的物体清楚成像，对于常用的可见光波段光源，精度仅处于几百纳米量级。另外，在现有技术中还采用散射光收集法实现对半导体中的缺陷进行检测，但是针对待测物是透明膜状结构的情况下，当待测物的相对的两个表面均存在缺陷时，将同时形成散射光，则现有的散射光收集法无法辨别散射信号来自于该透明膜状结构的具体位置，也即，现有的散射光收集法不能得到准确的检测结果。
为了解决上述问题，本公开内容所公开的检测系统至少包括：检测光生成单元、信号探测单元、处理单元，其中，信号探测单元所包括的光电探测器可以采用具有较高的采样率的线探测器或光功率计，并且配合能够移动待测物的承载台，与现有的成像检测方法相比，大大提高了检测速度。此外，本发明基于接收的信号光的光强来判断缺陷的存在及尺寸，通过噪声控制能够检测到几十纳米量级的缺陷，显著提高了检测精度。另外，基于信号探测单元与承载台或光位移单元的配合，实现了对透明膜状结构的相对的两个表面缺陷形成的散射光的选择性接收。
实施例1
如图1、图3A以及图3B所示，本文所公开检测系统，所述系统包括：承载台100、检测光生成单元(附图中未示出)、信号探测单元200以及处理单元(附图中未示出)。其中，承载台100被配置为承载待测物300；检测光生成单元被配置为向待测物300发射第一检测光和第二检测光(第一检测光和第二检测光也即图1中的入射光)，其中，待测物300包括相对设置的第一表面310和第二表面320，第一检测光经第一表面310散射形成第一信号光，第二检测光自第一表面310透过待测物300并经第二表面320散射形成第二信号光；信号探测单元200被配置为分别成像式地收集第一信号光或第二信号光，并根据所述第一信号光生成第一检测信息或根据第二信号光生成第二检测信息；处理单元被配置为基于第一检测信息来获取第一表面310的缺陷信息，基于第二检测信息来获取第二表面320的缺陷信息。
在本实施例中，在沿第一方向上承载台100的承载面与信号探测单元200之间的距离可调，并且该第一方向与信号探测单元200的光轴不垂直。此外，在本实施例中，检测系统还包括控制单元，该控制单元被配置为控制承载台100与信号探测单元200之间的相对运动。
如图1所示，所述检测光的入射方向与待测物300的法线方向之间呈第一角度α，信号探测单元200的法线方向与待测物300的法线方向之间呈第二角度β。在本发明中，所述第二角度β的绝对值与所述第一角度α的绝对值不同，也即，信号探测单元200仅接收由待测物300的待测位置所形成的散射光，而不接收由待测物300的待测位置所形成的反射光。
如图1、图3A以及图3B所示，信号探测单元200包括：信号光收集器210和光电探测器220。其中，信号光收集器210被配置为分别收集第一信号光和第二信号光；光电探测器220被配置为接收由所述信号光收集器210传送的第一信号光或第二信号光，并生成相应的检测信息。
在本实施例中，检测系统可以包括多个信号探测单元200，多个信号探测单元用于探测不同方位角的第一信号光和第二信号光。
在本实施例中，如图1所示，信号光收集器210的法线方向与待测物300的法线方向之间呈所述第二角度β。
在本实施例中，检测光生成单元可以是点光斑生成器或线光斑生成器， 并且在检测光生成单元是点光斑生成器的情况下，光电探测器220是光功率计，以便采用点扫描的检测方式对待测物表面进行检测；在检测光生成单元是线光斑生成器的情况下，光电探测器220是线探测器，以便采用线扫描的检测方式对待测物表面进行检测。
如图1所示，本实施例所公开的系统的工作原理具体如下：在第一检测光和第二检测光(例如，图1中的入射光)分别入射至待测物300的相对的两个表面的待测位置的情况下，当所照射的待测位置不存在缺陷时，所有检测光将从待测物300透射出去，透射光传输至底部的承载台100后以相同的角度反射至待测物300(例如，图1中的反射光)，同时信号光收集器210仅能够检测到非常微弱的噪声。当所照射的待测位置存在缺陷时，该缺陷使得检测光发生散射，并且散射光朝向待测物300的各个方向传输，在该待测物300的某个避开反射光角度范围内(例如，第二角度β)设置信号探测单元200，该信号探测单元200收集特定空间角度内的散射光，并对该散射光进行探测和处理。
如图2所示，如果待测物300的第一表面310和第二表面320的对应位置处均存在的缺陷，则两处的缺陷产生的散射光均会被信号光收集器210收集。但是当光电探测器220被设计处于某个位置时，光电探测器220仅能够接收由第一表面310形成的散射光(例如，图2中实线所示散射光线)或仅能够接收由第二表面320形成的散射光(例如，图2中虚线所示散射光线)。
为了实现对待测物300的第一表面310和第二表面320的单独检测，本实施例所公开的系统可以进一步采用能够移动待测物的承载台100和控制单元，以下将结合图3A-3B以及图5来描述本实施例所公开的系统检测透明膜状结构的表面的具体步骤。
步骤510：检测光生成单元向待测物300发射第一检测光和第二检测光，其中，第一检测光经第一表面310形成第一信号光，第二检测光自第一表面310透过待测物300并经第二表面320散射形成第二信号光。
步骤520：信号探测单元200成像式地收集第一信号光，并根据第一信号光形成第一检测信息。本步骤具体操作如下：
如图3A所示，首先，承载台100被配置为将所述待测物300移动至第 一相对位置，其中，在所述第一相对位置处，光电探测器220的感光面位置221与第一表面310的第一待测位置311相互共轭。
具体地，控制单元控制承载台100相对于信号探测单元200的运动，使得待测物300与信号探测单元200具有第一相对位置。
在待测物300处于所述第一相对位置的情况下，使得第一表面310为物平面，光电探测器220处于相应的像平面。光电探测器220能够接收由信号光收集器210传送的第一信号光，并根据第一信号光形成第一检测信息。
步骤530：信号探测单元200成像式地收集第二信号光，并根据第二信号光形成第二检测信息。本步骤具体操作如下：
如图3B所示，承载台100进一步被配置为将所述待测物300移动至第二相对位置，其中，在所述第二相对位置处，所述光电探测器220的感光面位置221与第二表面320的第二待测位置321相互共轭。
具体地，控制单元控制承载台100相对于信号探测单元200的运动，使得待测物300与信号探测单元200具有第二相对位置。
在待测物300处于所述第二相对位置的情况下，使得第二表面320为物平面，光电探测器220处于相应的像平面，光电探测器220进一步被配置为接收由信号光收集器210传送的第二信号光，并根据第二信号光生成第二检测信息。
在本实施例中，与第一信号光相对应的第一检测信息以及与第二信号光相对应的第二检测信息分别与所接收的第一信号光、第二信号光的光强相关联。
步骤540：基于第一检测信息来获取第一表面310的缺陷信息，并且基于第二检测信息来获取第二表面320的缺陷信息。
在本实施例中，待测物300的表面缺陷信息包括以下信息中的一项或多项：待测物300是否存在表面缺陷，在存在表面缺陷的情况下该表面缺陷的位置、该表面缺陷的大小。
在实施例1中，信号探测单元200相对于检测光生成单元(图中未示出)的位置是固定的，也即，本实施例中的信号探测单元200仅能够收集固定高度、固定位置发出的散射光。同时，在本实施例中，经由承载台100 来改变待测物300的位置，使得在两次检测中待测物300的第一表面310、第二表面320分别位于信号探测单元200收集散射光的位置，从而排除了待测物300的另一个表面对于正在检测的表面的干扰。在其他实施例中，所述信号探测单元的位置可调，可以通过调节信号探测单元的位置，使信号探测单元与待测物具有第一相对位置或第二相对位置。
实施例2
如图2、图4A-4C所示，本实施例所公开的检测系统类似于实施例1所公开的检测系统，因此，本实施例所公开的系统中相似或相同的部件在此不再赘述。此外，本实施例所公开的检测系统还包括光位移单元400，该光位移单元400被配置为使信号探测单元200在光位移单元400进出光路时分别收集第一信号光和第二信号光，或者使第一表面310和/或第二表面320的待测位置的成像位置的改变量可调。如图2所示，如果待测物300的第一表面310和第二表面320的对应位置处均存在的缺陷，则两处的缺陷产生的散射光均会被信号光收集器210收集。但是当光电探测器220被设计处于某个位置时，光电探测器220仅能够接收由第一表面310形成的散射光(例如，图2中实线所示散射光线)或仅能够接收由第二表面320形成的散射光(例如，图2中虚线所示散射光线)。
为了实现对待测物300的第一表面310和第二表面320的单独检测，本实施例所公开的系统可以采用光位移单元400实现对待测物300的相对的两个表面分别进行检测，以下将结合图4A-4C以及图5来描述本实施例所公开的系统检测透明膜状结构的表面的具体步骤。
步骤510：检测光生成单元向待测物300发射第一检测光和第二检测光，其中，第一检测光经第一表面310形成第一信号光，第二检测光自第一表面310透过待测物300并经第二表面320散射形成第二信号光。
步骤520：信号探测单元200成像式地收集第一信号光，并根据第一信号光形成第一检测信息。本步骤具体操作如下：
如图4A所示，承载台100将待测物300移动至第一相对位置，其中，在该第一相对位置处，光电探测器220的感光面位置221与第一表面310的第一待测位置311相互共轭。使得信号光收集器210能够在该第一待测位置311处收集第一检测光被第一表面310形成的第一信号光(如图4A的 实线所示)。
在待测物300处于第一相对位置的情况下，光电探测器220被配置为接收由信号光收集器210传送的第一信号光(例如，图4A中的实线所示)，并生成与该第一信号光相对应的第一检测信息。
或者，在步骤520之前，检测方法进一步包括：使光位移单元400进入光路，以使光电探测器220的感光面位置221与第一表面310的第一待测位置311相互共轭，以便于步骤520的执行。
步骤530：信号探测单元200成像式地收集第二信号光，并根据第二信号光形成第二检测信息。本步骤具体操作如下：
如图4A所示，信号光收集器210同时能够成像式地收集第二检测光透过待测物300经第二表面320散射形成的第二信号光(如图4A的虚线所示)。
在本发明中，当待测物300第一表面和第二表面的像位置之间的距离过小时，使得光位移单元400进入光路，使光电探测器220在光位移单元400进入光路时收集第二信号光。
如图4B所示，在待测物300处于第一相对位置的情况下，将光位移单元400优选地设置在信号光收集器210与光电探测器220之间，使得光电探测器220的感光面位置221与第二表面320的第二待测位置321相互共轭，以便光电探测器220能够基于所改变的接收路径接收由信号光收集器210传送的第二信号光(例如，图4B中的虚线所示)，并生成与第二信号光相对应的第二检测信息。
在本实施例中，光位移单元400是一种由透明薄膜材料制成单个棱镜或双楔棱镜，所述双楔棱镜包括斜边平行设置的第一楔形棱镜和第二楔形棱镜，所述第一楔形棱镜和所述第二楔形棱镜的相对距离可调。并且该光位移单元400与信号光收集器210、光电探测器220之间的角度至少取决于该光位移片本身的厚度、材料的折射率以及待测物300的厚度。
可选择地，本实施例所公开的检测方法还包括：收集第一信号光和第二信号光之前分别调节光位移单元400，以便于信号探测单元200能够分别收集第一信号光和第二信号光。
具体地，调节第一楔形棱镜和第二楔形棱镜之间的距离。
在具体使用中，当检测光生成单元是点光斑生成器时，检测系统还可以包括光阑，以保证仅接收特定表面发射的散射光，从而排除非待测表面污染或缺陷散射光的影响；当检测光生成单元是线光斑生成器时，检测系统还可以包括狭缝，以保证仅接收特定表面发射的散射光，从而排除非待测表面污染或缺陷散射光的影响。此外，如图4C所示，光位移单元400还可以是一种光位移片承载单元，其上可以包括一个或多个光位移位置(例如，光位移位置410-450)以便于承载一个或多个相同或不同性质的光位移片。在实际使用中，光位移单元400可以一直设置在信号探测单元200内。
在本实施例中，光位移片承载单元还具有通光孔，该光位移片承载单元还用于使该通光孔进入光路。
具体地，在本实施例中，光位移片承载单元还具有旋转轴，使得该光位移片承载单元能够带动多个光位移片和通光孔围绕该旋转轴旋转；其中，多个光位移片和通光孔围绕该旋转轴分布。在其他实施例中，所述多个光位移片和通光孔沿平移直线排列，所述光位移片承载单元用于带动多个光位移片和通光孔沿所述平移直线平移。
具体地，在本实施例中，当信号探测单元200处于第一高度并检测待测物300的第一表面310时，可以旋转光位移单元400，使得光电探测器220经由第一光位移位置410接收第一信号光；此时，第一光位移位置410是通光孔所在位置，以便实现光电探测器220在没有光位移片的帮助下接收第一信号光。当信号探测单元200处于第一高度并检测待测物300的第二表面320时，可以旋转光位移单元400，使得光电探测器220经由例如第三光位移位置430接收第二信号光；此时，在第三光位移位置430中设置有某种光位移片，以便实现光电探测器220在该光位移片的帮助下改变接收路径来接收第二信号光。以此类推，当待测物的材料和/或折射率发生改变时，可以旋转光位移单元400来选择光位移单元400中第二光位移位置420或其他光位移位置中的光位移片来接收检测该待测物的第一表面或第二表面的信号光。从而提高本文所公开的装置的使用灵活度。
实施例1、2所公开的光位移片可选地是一种平行平板，所述光位移片可以由玻璃制成。
步骤540：基于第一检测信息来获取第一表面310的缺陷信息，并且 基于第二检测信息来获取第二表面320的缺陷信息。
在本实施例中，与第一信号光相对应的第一检测信息以及与第二信号光相对应的第二检测信息分别包括所接收的第一信号光的光强、第二信号光的光强。此外，待测物300的表面缺陷信息包括以下信息中的一项或多项：所述待测物300是否存在表面缺陷，在存在所述表面缺陷的情况下所述表面缺陷的位置、所述表面缺陷的大小。
实施例1、2所公开的第一检测光和第二检测光的波长可以是相同的或不同的。待测物对第一检测光的透过率小于对第二检测光的透过率；待测物对第一检测光的反射率大于对第二检测光的反射率。
本文所公开的检测系统及方法所检测的透明膜状结构，既可以是独立存在的，也可以是紧贴在某非透明材料上(如硅晶圆上镀的透明厚膜)的。本文的实施例1、2均以全透明膜状结构为例进行说明，而针对紧贴在某非透明光滑材料上的透明膜状结构而言，大部分检测光入射至待测物所附着的材料而非由承载台反射出去。由于本发明所公开的技术方案所接收的信号光为散射光，接收通道并不包含反射光角度范围，因此，针对非透明光滑材料上的透明膜状结构的检测的实现原理及效果与全透明膜状结构一致，在此不再进行单独阐述。
本文所公开的实施例1、2均能够采用光散射法依次进行透明膜状结构相对的两个表面的缺陷检测。该系统的检测光生成单元与信号探测单元相对固定，待测物放置于承载台，检测中该承载台带动待测物按照指定轨迹以指定速度运动，使得光电探测器持续采集信号最终完成对待测物的各个位置的测量。
本公开内容的实施例还关注以下技术问题：现有技术中使用的成像检测方法一般需要采用面阵探测器进行光电检测，而面阵探测器的采样率较低，限制了检测速度的提高；此外，成像检测方法的检测精度还受到光学衍射极限的限制，使得该方法仅能够对特征尺寸大于检测波长一半的物体清楚成像，对于常用的可见光波段光源，精度仅处于几百纳米量级。另外，在现有技术中还采用散射光收集法实现对半导体中的缺陷进行检测，但是针对待测物是透明膜状结构的情况下，传统的方案是采用反光杯收集方法，但是当待测物的相对的两个表面均存在缺陷时，将同时形成散射光，则现 有的反光杯收集方法无法辨别散射信号来自于该透明膜状结构的具体位置，也即，现有的反光杯收集方法不能得到准确的检测结果。
为了解决上述问题，本公开内容所公开的检测系统包括：承载台、检测光生成单元、第一信号探测单元、第二信号探测单元以及可选的光位移单元，其中，第一信号探测单元、第二信号探测单元分别包括的光电探测器可以采用具有较高的采样率的线探测器或光功率计，并且配合能够使待测物按照指定轨迹以指定速度运动的承载台，与现有的成像检测方法相比，大大提高了检测速度。此外，本发明基于接收的信号光的光强来判断缺陷的存在及尺寸，通过噪声控制能够检测到几十纳米量级的缺陷，显著提高了检测精度。另外，本发明对第一信号探测单元、第二信号探测单元的设计，能够保证待测物的相对的两个表面的待测位置分别与第一信号探测单元、第二信号探测单元的感光面位置具有一一对应的关系，从而可以实现对待测物的相对的两个表面的同时检测。进一步，基于第一信号探测单元、第二信号探测单元与承载台或光位移单元的配合，实现了对透明膜状结构的相对的两个表面缺陷形成的散射光的选择性接收。
实施例3
如图6和图7所示，本文所公开的检测系统，所述系统包括：承载台100、检测光生成单元(附图中未示出)、第一信号探测单元700以及第二信号探测单元800。其中，承载台100被配置为承载待测物600，该承载台100包括用于放置待测物600的承载面。检测光生成单元被配置为向待测物600发射第一检测光和第二检测光(也即，图6、图7中的入射光)，其中，待测物600包括相对设置的第一表面610和第二表面620，第一检测光经第一表面610散射形成第一信号光，第二检测光自第一表面610透过待测物600并经第二表面620散射形成第二信号光。第一信号探测单元700被配置为收集第一信号光，并根据第一信号光生成第一检测信息；第二信号探测单元800被配置为收集第二信号光，并根据第二信号光生成第二检测信息。
如图6所示，所述第一检测光、第二检测光的入射方向与待测物600的法线方向之间呈第一角度α，第一信号探测单元700的法线方向与待测物600的法线方向之间呈第二角度β，第二信号探测单元800的法线方向与待测物600的法线方向之间呈第三角度θ。在本发明中，所述第二角度β 的绝对值、所述第三角度θ的绝对值均与所述第一角度α的绝对值不同，也即，第一信号探测单元700、第二信号探测单元800仅接收由待测物600的待测位置所形成的散射光，而不接收由待测物600的待测位置所形成的反射光。
在本实施例中，优选地第二角度β的绝对值与第三角度θ的绝对值相同。在实际应用中，第二角度β的绝对值与第三角度θ的绝对值也可以是不同的。
如图6、图7所示，第一信号探测单元700包括：第一信号光收集器710和第一光电探测器720。其中，第一信号光收集器710被配置为收集第一信号光；第一光电探测器720被配置为接收由第一信号光收集器710传送的第一信号光，并根据第一信号光生成第一检测信息。
在本实施例中，第一光电探测器720的感光面位置721与第一表面610的待测位置611相互共轭，也即，使得第一表面610为物平面，第一光电探测器720处于相应的像平面。进一步，第一信号光收集器710的法线方向与待测物600的法线方向之间呈第二角度β。
另外，如图6、图7所示，第二信号探测单元800包括：第二信号光收集器810和第二光电探测器820。其中，第二信号光收集器810被配置为收集所述第二信号光；第二光电探测器820被配置为接收由所述第二信号光收集器传送的第二信号光，并根据第二信号光生成第二检测信息。
在本实施例中，第二光电探测器820的感光面位置821与第二表面620的待测位置621相互共轭，也即，使得第二表面620为物平面，第二光电探测器820处于相应的像平面。进一步，第二信号光收集器810的法线方向与待测物600的法线方向之间呈第三角度θ。
在本实施例中，检测系统可以包括更多个信号探测单元，更多个信号探测单元用于探测不同方位角的第一信号光和第二信号光。
在本实施例中，所述检测光生成单元是点光斑生成器或线光斑生成器。在所述检测光生成单元是点光斑生成器的情况下，第一光电探测器720和第二光电探测器820是光功率计，以便采用点扫描的检测方式对待测物表面进行检测；在所述检测光生成单元是线光斑生成器的情况下，第一光电探测器720和第二光电探测器820是线探测器，以便采用线扫描的检测方 式对待测物表面进行检测。
本实施例所公开的系统的工作原理具体如下：在第一检测光和第二检测光(例如，图6、图7中的入射光)分别入射至待测物600时，由于待测物600的厚度较小，因此其相对的两个表面(也即，第一表面610和第二表面620)的入射光会聚度较好。当所照射的待测位置不存在缺陷时，所有检测光将从待测物600透射出去，透射光传输至底部的承载台100后以相同的角度反射至待测物600(例如，图6、图7中的反射光)，同时第一信号光收集器710、第二信号光收集器810仅能够检测到非常微弱的噪声。当所照射的待测位置存在缺陷时，该缺陷使得检测光发生散射，并且散射光朝向待测物600的各个方向传输，在该待测物600的某个避开反射光角度范围内(例如，第二角度β、第三角度θ)分别设置第一信号探测单元700、第二信号探测单元800，使得第一信号探测单元700、第二信号探测单元800分别收集特定空间角度内的散射光，并对该散射光进行探测和处理。
如果待测物600的第一表面610和第二表面620的对应位置处均存在的缺陷，则两处的缺陷产生的散射光分别被第一信号光收集器710、第二信号光收集器810收集。在本实施例中，第一光电探测器720的感光面位置与第一表面610的待测位置相互共轭，则该第一光电探测器720仅能够接收由第一表面610形成的散射光(例如，图7中所示散射光)；第二光电探测器820的感光面位置与第二表面620的待测位置相互共轭，则该第二光电探测器820仅能够接收第二检测光透过待测物600经第二表面620形成的散射光(例如，图7中所示散射光)。
为了实现对待测物600的第一表面610和第二表面620的同时检测，将结合图6、图7以及图9来描述本实施例所公开的系统检测透明膜状结构的表面的具体步骤。
步骤1010：检测光生成单元同时向待测物600发射第一检测光和第二检测光，其中，所述第一检测光经第一表面610散射形成第一信号光，所述第二检测光自第一表面610透过待测物600并经第二表面620散射形成第二信号光。
在本实施例中，检测系统还包括移动装置，该移动装置用于使第一信号探测单元700、第二信号探测单元800以及承载台100中的至少两个移动， 其中，使第一信号探测单元700沿第一方向移动，使第二信号探测单元800沿第二方向移动，使承载台100沿第三方向移动，以便于第一信号探测单元700和第二信号探测单元800能够分别实现对待测物600的第一表面610和第二表面620的精确检测。其中，所述第一方向、所述第二方向以及所述第三方向均与承载台100的承载面之间的夹角大于零。
步骤1020：第一信号探测单元700收集第一信号光，并根据第一信号光生成第一检测信息；本步骤具体操作如下：
首先，第一信号光收集器710收集来自第一表面610的第一待测位置611的第一信号光；
其次，第一光电探测器720基于第一光电探测器720与第一信号光收集器710的相对位置形成的第一接收路径来接收第一信号光，并生成所述第一检测信息。具体地，第一光电探测器720的感光面位置721与待测物600的第一待测位置611相互共轭，以实现接收第一信号光，并生成所述第一检测信息。
步骤1030：第二信号探测单元600收集所述第二信号光，并根据所述第二信号光生成第二检测信息；本步骤具体操作如下：
首先，第二信号光收集器810收集来自第二表面620的第二待测位置621的第二信号光；
其次，第二光电探测器820基于第二光电探测器820与第二信号光收集器810的相对位置形成的第二接收路径来接收第二信号光，并生成所述第二检测信息。具体地，第二光电探测器820的感光面位置821与待测物600的第二待测位置621相互共轭，以实现接收第二信号光，并生成所述第二检测信息。
在本实施例中，步骤1020、1030可以同时执行或者以其他顺序执行。
在本实施例中，第一检测信息包括第一信号光的光强，并且第二检测信息包括第二信号光的光强；待测物600的表面缺陷信息包括以下信息中的一项或多项：待测物600是否存在表面缺陷，在存在表面缺陷的情况下该表面缺陷的位置、该表面缺陷的大小。在实施例3中，第一信号探测单元700、第二信号探测单元800相对于检测光生成单元(图中未示出)的位置是固定的，也即，本实施例中的第一信号探测单元700、第二信号探测单 元800仅能够收集固定高度、固定位置发出的散射光。同时，在本实施例中，第一信号探测单元700中的第一光电探测器720仅能够接收并检测待测物600的第一表面610的散射光；第二信号探测单元800中的第二光电探测器820仅能够接收并检测待测物600的第二表面620的散射光，从而排除了待测物600的不同表面之间的检测干扰，还能够实现对待测物600的两个表面的同时检测。
实施例4
如图8A所示，本实施例所公开的检测系统类似于实施例3所公开的系统，因此，本实施例所公开的系统中相似或相同的部件在此不再赘述。此外，本实施例所公开的检测系统还包括光位移单元850，该光位移单元850被配置为改变待测物的第一表面或第二表面的待测位置的成像位置。
此外，在所公开的检测系统中还可以包括两个光位移单元，例如，第一光位移单元和第二光位移单元，使得第一光位移单元用于改变待测物的第一表面的待测位置的成像位置，使得第二光位移单元用于改变待测物的第二表面的待测位置的成像位置。则第一信号光收集器710用于收集所述第一信号光，并使该第一信号光经第一光位移单元汇聚至第一光电探测器720；第二信号光收集器810用于收集第二信号光，并使该第二信号光经第二光位移单元汇聚至第二光电探测器820。进一步，所述第一光位移单元被配置为使待测物的第一表面的待测位置的成像位置的改变量可调，所述第二光位移单元被配置为使待测物的第二表面的待测位置的成像位置的改变量可调。
如图8A所示，如果要检测的第二待测物900的厚度和/或材料与所述待测物600的厚度和/或材料不同，当第二待测物900的第一表面910和第二表面920的对应位置处均存在的缺陷时，在第一信号探测单元700和第二信号探测单元800的位置固定的情况下，二者不能够基于原来的设计实现分别对第二待测物900的第一表面910和第二表面920的检测。
为了实现对第二待测物900的第一表面910和第二表面920的同时检测，本实施例所公开的系统还包括光位移单元850，光位移单元850被配置为使第一光电探测器720在光位移单元850进出光路时收集第一信号光，或者使第二光电探测器820在光位移单元850进出光路时收集第二信号光， 由此可以实现对第二待测物900的第一表面910和第二表面920分别进行检测，以下将结合图8A、图8B以及图9来描述本实施例所公开的系统检测透明膜状结构的表面的具体步骤。
步骤1010：检测光生成单元同时向第二待测物900发射第一检测光和第二检测光，其中，第二待测物900包括相对设置的第一表面910和第二表面920，第一检测光经第一表面910散射形成第一信号光，第二检测光自第一表面910通过第二待测物900并经第二表面920散射形成第二信号光。
在步骤1020之前，本实施例还包括基于第二待测物900的厚度和/或材料，采用光位移单元来改变所述第一信号光或所述第二信号光的接收路径；具体操作如下：
使第一光位移单元改变第二待测物900的第一表面910的待测位置911的成像位置，或者使第二光位移单元改变第二待测物900的第二表面920的待测位置921的成像位置。
在本发明中，在要改变第二待测物900的第二表面920的待测位置921的成像位置的情况下，光位移单元850被设置在第二信号探测单元800内(如图8A所示，在本实施例中，优选地，将光位移单元850设置在第二信号光收集器810与第二光电探测器820之间)，以使得第二待测物900的第二待测位置921与第二光电探测器920的第二感光面位置921共轭，进而实现了信号光收集位置的改变。
在实际使用中，也可能存在要改变第二待测物900的第一表面910的待测位置911的成像位置的情况下。那么在这种情况下，光位移单元850被设置在第一信号探测单元700内，以使得第二待测物900的第一表面910的待测位置911与第一光电探测器720的第一感光面位置721共轭，来实现信号光收集位置的改变。
此外，在本实施例中，如图8B所示，光位移单元850还可以是一种光位移片承载单元，其上可以包括一个或多个光位移位置(例如，光位移位置851-855)，以便于承载一个或多个相同或不同的光位移片。在实际使用中，光位移单元850可以始终设置在第二信号探测单元800和/或第一信号探测单元700内。
在本实施例中，所述光位移片承载单元还具有通光孔，该光位移片承 载单元还用于使该通光孔进入光路。
具体地，在本实施例中，光位移片承载单元还具有旋转轴，使得该光位移片承载单元能够带动多个光位移片和通光孔围绕该旋转轴旋转；其中，多个光位移片和通光孔围绕该旋转轴分布。在其他实施例中，所述多个光位移片和通光孔沿平移直线排列，所述光位移片承载单元用于带动多个光位移片和通光孔沿所述平移直线平移。
例如，当要改变第一信号光的接收路径时，可以旋转设置在第二信号探测单元800内的第二光位移片承载单元，使得第二光电探测器820经由例如第一光位移位置851接收第二信号光；此时，在第一光位移位置851是通光孔所在位置，以便实现第二光电探测器820在没有光位移片的帮助下接收第二信号光；同时可以旋转设置在第一信号探测单元700内的第一光位移片承载单元，使得第一光电探测器720经由例如第三光位移位置853接收第一信号光；此时，在第三光位移位置853中设置有某种光位移片，以便实现第一光电探测器720在该光位移片的帮助下接收第一信号光。
以此类推，当要改变第二信号光的接收路径时，可以旋转设置在第二信号探测单元800内的第二光位移片承载单元，使得第二光电探测器820经由例如第四光位移位置854接收第二信号光；此时，在第四光位移位置854中设置有某种光位移片，以便实现第二光电探测器820在光位移片的帮助下接收第二信号光；同时可以旋转设置在第一信号探测单元700内的第一光位移片承载单元850，使得第一光电探测器720经由第五光位移位置855接收第一信号光；此时，在第五光位移位置855中未设置任何光位移片，以便实现第一光电探测器720在没有光位移片的帮助下接收第一信号光。
此外，当第二待测物的第一表面和第二表面的待测位置的成像位置均要改变时，可以分别设置在第一信号探测单元700、第二信号探测单元800内的光位移单元(例如，第一光位移单元和第二光位移单元)，以使第一光电探测器720和第二光电探测器820分别经由相应的光位移单元来接收第一信号光和第二信号光。
由此可知，本文所公开的光位移单元850能够进一步提高所公开的装置的使用灵活度。
在具体使用中，当检测光生成单元是点光斑生成器时，检测系统还可 以包括光阑，以保证仅接收特定表面发射的散射光，从而排除非待测表面污染或缺陷散射光的影响；当检测光生成单元是线光斑生成器时，检测系统还可以包括狭缝，以保证仅接收特定表面发射的散射光，从而排除非待测表面污染或缺陷散射光的影响。
光位移单元850是一种由透明薄膜材料制成光位移片，该光位移片与第一信号光收集器710、第一光电探测器720之间的角度或与第二信号光收集器810、第二光电探测器820之间的角度至少取决于该光位移片本身的厚度、材料的折射率以及第二待测物900的厚度。在本实施例中，光位移单元850可以是单个棱镜或双楔棱镜，所述双楔棱镜包括斜边平行设置的第一楔形棱镜和第二楔形棱镜，所述第一楔形棱镜和所述第二楔形棱镜的相对距离可调。
实施例3、4所公开的光位移片可选地是一种平行平板，所述光位移片可以由玻璃制成。
因此，收集第一信号光和第二信号光之前分别对光位移单元进行调节具体如下：调节第一楔形棱镜和第二楔形棱镜之间的距离。
步骤1020：第一信号探测单元700收集第一信号光，并根据所述第一信号光生成第一检测信息；本步骤具体操作如下：
首先，第一信号光收集器710收集所述第一信号光；
其次，第一光电探测器720基于第一光电探测器720与第一信号光收集器710的设定位置形成的第一接收路径来接收第一信号光(如图8A中实线所示的散射光)，并生成所述第一检测信息。
此外，在本实施例中，如果采用光位移单元850来改变第一表面910的待测位置911的成像位置，则第一光电探测器720经由光位移单元850接收第一信号光，并生成所述第一检测信息。
步骤1030：第二信号探测单元800收集第二信号光，并根据所述第二信号光生成第二检测信息；本步骤具体操作如下：
首先，第二信号光收集器810收集所述第二信号光；
其次，第二光电探测器820基于第二光电探测器820与第二信号光收集器810的设定位置形成的第二接收路径来接收第二信号光(如图8A中虚线所示的散射光)，并生成所述第二检测信息。
此外，在本实施例中，如果采用光位移单元850来改变第二表面920的待测位置921的成像位置，则第二光电探测器820经由光位移单元850接收第二信号光，并生成所述第二检测信息。
在本实施例中，所述第一检测信息与所接收的第一信号光的光强相关联，所述第二检测信息与第二信号光的光强相关联。并且第二待测物900的表面缺陷信息包括以下信息中的一项或多项：第二待测物900是否存在表面缺陷，在存在表面缺陷的情况下该表面缺陷的位置、该表面缺陷的大小。
在本实施例中，步骤1020、步骤1030同时进行，以实现对第二待测物900的相对的两个表面的同时检测。
在实施例4中，通过在第一信号光收集器710与第一光电探测器720之间添加光位移单元850或在第二信号光收集器810与第二光电探测器820之间添加光位移单元850来改变信号光传送到第一光电探测器720或第二光电探测器820的传输方向和相位，实现了成像位置的改变，进而实现了对于不同材料的透明膜状结构的多个表面的同时检测。
实施例3、4所公开的第一检测光和第二检测光的波长可以是相同的或不同的。所述待测物对第一检测光的透过率小于对第二检测光的透过率；所述待测物对第一检测光的反射率大于对第二检测光的反射率。
本文所公开的检测系统及方法所检测的透明膜状结构，既可以是独立存在的，也可以是紧贴在某非透明材料(如硅晶圆上镀的透明厚膜)上的。本文的实施例3、4均以全透明膜状结构为例进行说明，而针对紧贴在某非透明光滑材料上的透明膜状结构而言，大部分检测光入射至待测物所附着的材料而非由承载台反射出去。由于本发明所公开的技术方案所接收的信号光为散射光，接收角度并不包含反射光角度范围，因此，针对非透明光滑材料上的透明膜状结构的检测的实现原理及效果与全透明膜状结构一致，在此不再进行单独阐述。
本文所公开的实施例3、4均能够采用光散射法同时进行透明膜状结构是相对的两个表面的缺陷检测。该系统的检测光生成单元与第一信号探测单元、第二信号探测单元相对固定，待测物放置于承载台，检测中该承载台带动待测物按照指定轨迹以指定速度运动，使得第一光电探测器、第二 光电探测器持续采集信号最终完成对待测物的各个位置的测量。
以上所述仅为本公开的实施例可选实施例，并不用于限制本公开的实施例，对于本领域的技术人员来说，本公开的实施例可以有各种更改和变化。凡在本公开的实施例的精神和原则之内，所作的任何修改、等效替换、改进等，均应包含在本公开的实施例的保护范围之内。
虽然已经参考若干具体实施例描述了本公开的实施例，但是应该理解，本公开的实施例并不限于所公开的具体实施例。本公开的实施例旨在涵盖在所附权利要求的精神和范围内所包括的各种修改和等同布置。所附权利要求的范围符合最宽泛的解释，从而包含所有这样的修改及等同结构和功能。

Claims (38)

  1. 一种检测系统，其特征在于，所述系统包括：
    检测光生成单元，被配置为向待测物发射第二检测光，其中，所述待测物包括相对设置的第一表面和第二表面，所述第二检测光自所述第一表面透过所述待测物并经所述第二表面散射形成第二信号光；
    信号探测单元，被配置为成像式收集所述第二信号光，并根据所述第二信号光生成第二检测信息；以及
    处理单元，被配置为基于所述第二检测信息来获取所述第二表面的缺陷信息。
  2. 根据权利要求1所述的检测系统，其特征在于，
    所述检测光生成单元还被配置为向所述待测物发射第一检测光，所述第一检测光经所述第一表面散射形成第一信号光；
    所述信号探测单元还被配置为成像式收集所述第一信号光，并根据所述第一信号光形成第一检测信息；
    所述处理单元还被配置为基于所述第一检测信息获取所述第一表面的缺陷信息。
  3. 根据权利要求1所述的检测系统，其特征在于，还包括承载台，所述承载台被配置为承载所述待测物；在沿第一方向上所述承载台的承载面与所述信号探测单元之间的距离可调，所述第一方向与所述信号探测单元的光轴不垂直。
  4. 根据权利要求3所述的检测系统，其特征在于，还包括控制单元，所述控制单元被配置为控制所述承载台与所述信号探测单元之间的相对运动；
    所述控制单元进一步被配置为使所述待测物与所述信号探测单元具有第一相对位置，其中，在所述第一相对位置处，所述信号探测单元的感光面位置与所述第一表面的待测位置相互共轭；和/或
    所述控制单元进一步被配置为使所述待测物与所述信号探测单元具有第二相对位置，其中，在所述第二相对位置处，所述信号探测单元的感光面位置与所述第二表面的待测位置相互共轭。
  5. 根据权利要求2所述的检测系统，其特征在于，所述系统进一步包括：
    光位移单元，被配置为改变所述第一表面和/或所述第二表面的待测位置的成像位置。
  6. 根据权利要求5所述的检测系统，其特征在于，所述信号探测单元包括：信号光收集器和光电探测器，所述信号光收集器被配置为分别收集所述第一信号光和所述第二信号光，并使所述第一信号光或所述第二信号光经由所述光位移单元汇聚至所述光电探测器。
  7. 根据权利要求5所述的检测系统，其特征在于，
    所述光位移单元进一步被配置为使所述信号探测单元在所述光位移单元进出光路时分别收集所述第一信号光和所述第二信号光；或者
    所述光位移单元进一步被配置为使所述第一表面和/或所述第二表面的待测位置的成像位置的改变量可调。
  8. 根据权利要求5所述的检测系统，其特征在于，所述光位移单元包括单个棱镜或双楔棱镜，所述双楔棱镜包括斜边平行设置的第一楔形棱镜和第二楔形棱镜。
  9. 根据权利要求8所述的检测系统，其特征在于，所述第一楔形棱镜和所述第二楔形棱镜的相对距离可调。
  10. 根据权利要求5所述的检测系统，其特征在于，所述光位移单元包括光位移片承载单元和位于所述光位移片承载单元的多个光位移片，所述多个光位移片对所述第一信号光或所述第二信号光传播方向的改变量不 同，所述光位移片承载单元被配置使不同的光位移片进入光路。
  11. 根据权利要求10所述的检测系统，其特征在于，所述光位移片承载单元还具有通光孔，所述光位移片承载单元还用于使所述通光孔进入光路。
  12. 根据权利要求2所述的检测系统，其特征在于，所述第一检测光和所述第二检测光的波长相同或不同。
  13. 根据权利要求6所述的检测系统，其特征在于，所述检测光生成单元是点光斑生成器或线光斑生成器，并且在所述检测光生成单元是点光斑生成器的情况下，所述光电探测器是光功率计；在所述检测光生成单元是线光斑生成器的情况下，所述光电探测器是线探测器。
  14. 根据权利要求1所述的检测系统，其特征在于，所述第二检测信息包括所述第二信号光的光强；
    所述待测物的表面缺陷信息包括以下信息中的一项或多项：所述待测物是否存在表面缺陷，在存在所述表面缺陷的情况下所述表面缺陷的大小。
  15. 一种检测方法，其特征在于，所述方法包括：
    向待测物发射第二检测光，其中，所述待测物包括相对设置的第一表面和第二表面，所述第二检测光自所述第一表面透过所述待测物并经所述第二表面散射形成第二信号光；
    成像式收集所述第二信号光，并根据所述第二信号光生成第二检测信息；以及
    基于所述第二检测信息来获取所述第二表面的缺陷信息。
  16. 根据权利要求15所述的检测方法，其特征在于，所述方法进一步包括：
    向所述待测物发射第一检测光，所述第一检测光经所述第一表面散射 形成第一信号光；
    成像式收集所述第一信号光，并根据所述第一信号光形成第一检测信息；以及
    基于所述第一检测信息来获取所述第一表面的缺陷信息。
  17. 根据权利要求16所述的检测方法，其特征在于，在向待测物发射第一检测光之前，所述方法进一步包括：
    使所述待测物与所述信号探测单元处于第一相对位置，其中，在所述第一相对位置处，所述信号探测单元的感光面位置与所述第一表面的待测位置相互共轭。
  18. 根据权利要求15所述的检测方法，其特征在于，在向待测物发射第二检测光之前，所述方法进一步包括：
    使所述待测物与所述信号探测单元处于第二相对位置，其中，在所述第二相对位置处，所述信号探测单元的感光面位置与所述第二表面的待测位置相互共轭。
  19. 根据权利要求16所述的检测方法，其特征在于，
    成像式收集所述第一信号光之前，所述方法包括：使光位移单元进入光路，并且成像式收集所述第二信号光之前，所述方法包括：使所述光位移单元移出光路；或者
    成像式收集所述第二信号光之前，所述方法包括：使所述光位移单元进入光路；
    所述检测方法进一步包括：收集所述第一信号光和所述第二信号光之前分别对所述光位移单元进行调节，使所述信号探测单元分别收集所述第一信号光和所述第二信号光。
  20. 根据权利要求19所述的检测方法，其特征在于，所述光位移单元为双楔棱镜，所述双楔棱镜包括斜边平行设置的第一楔形棱镜和第二楔形棱镜，其中，所述第一楔形棱镜和所述第二楔形棱镜的相对距离可调；
    收集所述第一信号光和第二信号光之前分别对所述光位移单元进行调节的步骤包括：
    调节所述第一楔形棱镜和所述第二楔形棱镜之间的距离。
  21. 一种检测系统，其特征在于，所述系统包括：
    检测光生成单元，被配置为向待测物发射第一检测光和第二检测光，其中，所述待测物包括相对设置的第一表面和第二表面，所述第一检测光经所述第一表面散射形成第一信号光，所述第二检测光自所述第一表面透过所述待测物并经所述第二表面散射形成第二信号光；
    第一信号探测单元，被配置为收集所述第一信号光，并根据所述第一信号光生成第一检测信息；以及
    第二信号探测单元，被配置为收集所述第二信号光，并根据所述第二信号光生成第二检测信息。
  22. 根据权利要求21所述的检测系统，其特征在于，所述第一信号探测单元的感光面位置与所述第一表面的待测位置相互共轭；和/或
    所述第二信号探测单元的感光面位置与所述第二表面的待测位置相互共轭。
  23. 根据权利要求21所述的检测系统，其特征在于，所述系统进一步包括：第一光位移单元和第二光位移单元中的一者或两者组合；
    所述第一光位移单元被配置为改变所述第一表面的待测位置的成像位置；
    所述第二光位移单元被配置为改变所述第二表面的待测位置的成像位置。
  24. 根据权利要求23所述的检测系统，其特征在于，所述第一信号探测单元包括第一信号光收集器和第一光电探测器，所述第一信号光收集器被配置为收集所述第一信号光，并使所述第一信号光经所述第一光位移单元汇聚至所述第一光电探测器；和/或
    所述第二信号探测单元包括第二信号光收集器和第二光电探测器，所述第二信号光收集器被配置为收集所述第二信号光，并使所述第二信号光经所述第二光位移单元汇聚至所述第二光电探测器。
  25. 根据权利要求24所述的检测系统，其特征在于，所述检测光生成单元是点光斑生成器或线光斑生成器；并且在所述检测光生成单元是点光斑生成器的情况下，所述第一光电探测器和所述第二光电探测器是光功率计；在所述检测光生成单元是线光斑生成器的情况下，所述第一光电探测器和所述第二光电探测器是线探测器。
  26. 根据权利要求23所述的检测系统，其特征在于，
    所述第一光位移单元被配置为使所述第一表面的待测位置的成像位置的改变量可调；和/或
    所述第二光位移单元被配置为使所述第二表面的待测位置的成像位置的改变量可调。
  27. 根据权利要求23所述的检测系统，其特征在于，所述第一光位移单元被配置为增加所述第一表面与所述第二表面之间的相对距离；和/或所述第二光位移单元被配置为增加所述第一表面与所述第二表面之间的相对距离。
  28. 根据权利要求23所述的检测系统，其特征在于，所述第一光位移单元和/或所述第二光位移单元包括单个棱镜或双楔棱镜，所述双楔棱镜包括斜边平行设置的第一楔形棱镜和第二楔形棱镜。
  29. 根据权利要求28所述的检测系统，其特征在于，所述第一楔形棱镜和所述第二楔形棱镜的相对距离可调。
  30. 根据权利要求21所述的检测系统，其特征在于，所述第一检测光和所述第二检测光的波长相同或不同。
  31. 根据权利要求23所述的检测系统，其特征在于，所述第一光位移单元包括第一光位移片承载单元和位于所述第一光位移片承载单元内的多个光位移片，所述多个光位移片对所述第一信号光传播方向的改变量不同，所述光位移片承载单元被配置使不同的光位移片进入光路；
    所述第二光位移单元包括第二光位移片承载单元和位于所述第二光位移片承载单元内的多个光位移片，所述多个光位移片对所述第二信号光传播方向的改变量不同，所述光位移片承载单元被配置使不同的光位移片进入光路。
  32. 根据权利要求31所述的检测系统，其特征在于，所述第一光位移片承载单元还具有第一通光孔，所述第一光位移单元用于使所述第一通光孔进入光路；
    所述第二光位移片承载单元还具有第二通光孔，所述第二光位移单元用于使所述第二通光孔进入光路。
  33. 根据权利要求21所述的检测系统，其特征在于，所述第一检测信息包括所述第一信号光的光强，并且所述第二检测信息包括所述第二信号光的光强；
    所述待测物的表面缺陷信息包括以下信息中的一项或多项：所述待测物是否存在表面缺陷，在存在所述表面缺陷的情况下所述表面缺陷的位置、所述表面缺陷的大小。
  34. 根据权利要求21所述的检测系统，其特征在于，还包括：
    承载台，用于承载所述待测物，其包括用于放置所述待测物的承载面；
    移动装置，用于使所述第一信号探测单元、所述第二信号探测单元以及所述承载台中的至少两个移动，其中，使所述第一信号探测单元沿第一方向移动，使所述第二信号探测单元沿第二方向移动，使所述承载台沿第三方向移动，所述第一方向、所述第二方向以及所述第三方向均与所述承载面之间的夹角大于零。
  35. 一种基于权利要求21-34所述的检测系统的检测方法，其特征在于，所述方法包括：
    通过所述检测光生成单元向待测物发射第一检测光和第二检测光，其中，所述待测物包括相对设置的第一表面和第二表面，所述第一检测光经所述第一表面散射形成第一信号光，所述第二检测光自所述第一表面透过所述待测物并经所述第二表面散射形成第二信号光；
    通过所述第一信号探测单元收集所述第一信号光，并根据所述第一信号光生成第一检测信息；以及
    通过所述第二信号探测单元收集所述第二信号光，并根据所述第二信号光生成第二检测信息。
  36. 根据权利要求35所述的检测方法，其特征在于，所述方法进一步包括：
    收集所述第一信号光之前，所述方法包括：使所述第一光位移单元改变所述第一表面的待测位置的成像位置；和/或
    收集所述第二信号光之前，所述方法包括：使所述第二光位移单元改变所述第二表面的待测位置的成像位置。
  37. 根据权利要求36所述的检测方法，其特征在于，所述第一光位移单元和/或所述第二光位移单元为双楔棱镜，所述双楔棱镜包括斜边平行设置的第一楔形棱镜和第二楔形棱镜，其中，所述第一楔形棱镜和所述第二楔形棱镜的相对距离可调。
  38. 根据权利要求35所述的检测方法，其特征在于，
    通过所述检测光生成单元同时向所述待测物发射所述第一检测光和所述第二检测光；
    同时通过所述第一信号探测单元和所述第二信号探测单元相应地收集所述第一信号光和所述第二信号光。
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