WO2021052143A1 - Substrate for soldering electronic component, manufacturing method therefor, and semiconductor device - Google Patents
Substrate for soldering electronic component, manufacturing method therefor, and semiconductor device Download PDFInfo
- Publication number
- WO2021052143A1 WO2021052143A1 PCT/CN2020/112199 CN2020112199W WO2021052143A1 WO 2021052143 A1 WO2021052143 A1 WO 2021052143A1 CN 2020112199 W CN2020112199 W CN 2020112199W WO 2021052143 A1 WO2021052143 A1 WO 2021052143A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substrate
- mounting surface
- limit
- solder resist
- resist material
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 137
- 239000004065 semiconductor Substances 0.000 title claims abstract description 16
- 238000005476 soldering Methods 0.000 title claims abstract description 16
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 229910000679 solder Inorganic materials 0.000 claims abstract description 92
- 239000000463 material Substances 0.000 claims abstract description 72
- 238000000034 method Methods 0.000 claims abstract description 36
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- 239000011241 protective layer Substances 0.000 claims description 26
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- 238000007639 printing Methods 0.000 claims description 4
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- 238000009434 installation Methods 0.000 abstract 6
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- 238000010586 diagram Methods 0.000 description 9
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Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
Definitions
- the present invention relates to the field of electronic technology, in particular to a substrate for welding electronic components, a preparation method thereof, and a semiconductor device.
- a reflow soldering process is generally used to realize the connection between the chip and the liner or substrate.
- the solder on the surface of the substrate is in a molten state at a high temperature.
- the molten solder is easy to flow on the surface of the substrate, and the abnormal flow of the solder often causes the soldering of the chip to shift to a predetermined position.
- the position of the chip is shifted, the subsequent wire bonding on the chip surface and the welding position of the semiconductor module will be affected, which seriously reduces the yield of the product.
- the purpose of this application is to provide a substrate for welding electronic components, used for welding and positioning the electronic components, and preventing the electronic components from shifting in position during the welding process.
- the base described in the present application includes a substrate and a limit frame made of solder resist material.
- the substrate includes a mounting surface, and the limit frame is fixed on the mounting surface and encloses a limit on the mounting surface.
- the limit area is used to position the electronic component on the mounting surface to assist the welding of the electronic component and the substrate, so that the electronic component is accurately welded in the limit area , No position shift will occur.
- the limit frame is provided with at least one notch, and the at least one notch communicates with the limit area to allow excess solder in the limit area to flow out.
- the limit frame includes a plurality of limit parts, and the plurality of limit parts are arranged on the mounting surface at intervals to enclose the limit area, so that excess solder in the limit area It flows out from between every two of the limit parts.
- the mounting surface of the base and the limit frame are connected by a connecting layer to increase the bonding force of the limit frame and the substrate.
- the mounting surface is provided with a first protective layer
- the first protective layer includes a first sub-protection layer located in the limit area, and the surface of the first sub-protection layer facing away from the mounting surface is used
- the first sub-protection layer is used to protect the substrate located in the limit area and prevent the substrate from being oxidized.
- the first protective layer further includes a second sub-protection layer located outside the limit area, and the second sub-protection layer is used to protect the substrate located outside the limit area and prevent the substrate from being oxidized. .
- solder resist material can withstand a temperature above 210° C. to prevent the limit frame from being deformed during the welding process.
- the thickness of the limit frame is greater than 0.005 mm to ensure the positioning effect of the limit frame on the electronic components.
- the present application also provides a semiconductor device, which includes an electronic component and any of the above-mentioned substrates, and the electronic component is positioned in the limit area and welded and fixed on the mounting surface of the substrate.
- the semiconductor device further includes a heat sink, and the heat sink is installed on the surface of the substrate away from the electronic components to realize rapid heat dissipation of the electronic components.
- This application also provides a method for preparing a substrate, which is used to prepare any of the above-mentioned substrates, and the method includes:
- the substrate includes a mounting surface
- a limit frame is formed on the mounting surface by the solder resist material, wherein the limit frame encloses a limit area on the mounting surface.
- forming a limit frame on the mounting surface by the solder resist material includes:
- High-temperature sintering is performed on the substrate on which the solder resist material is placed on the mounting surface, so that the part of the solder resist material close to the mounting surface reacts with the substrate to form a connection layer, and the other parts of the solder resist material Form a limit frame.
- forming a limit frame on the mounting surface by the solder resist material includes:
- the mask is provided with a plurality of openings arranged at intervals;
- forming a limit frame on the mounting surface by the solder resist material includes:
- a steel net is provided, wherein a plurality of openings arranged at intervals are opened on the steel net;
- the method includes: forming a first protective layer on the mounting surface.
- the method includes: forming a first protective layer on the mounting surface.
- the mounting surface of the substrate is provided with a limit frame made of solder resist material, and the limit frame encloses a limit area on the mounting surface, which is used for welding electronics.
- the electronic components are installed in the limit area and positioned by the limit frame.
- the limit frame effectively suppresses the solder reflow process Uncontrollable flow occurs during the process, so that the electronic components can be accurately positioned and welded in the limit area, avoiding positional deviation, and improving the product yield.
- the method for preparing the base of the present application uses solder resist material to form a limit frame on the mounting surface of the substrate, and the limit frame encloses a limit on the mounting surface that matches the shape of the electronic component to be installed
- the limit frame prevents the uncontrollable flow of solder on the mounting surface, so that the electronic components are accurately soldered in the limit area, The welding accuracy of the electronic components is improved.
- Fig. 1 is a schematic diagram of the structure of the first embodiment of the substrate of the present invention.
- Fig. 2 is a schematic structural diagram of a second embodiment of the substrate of the present invention.
- Fig. 3 is a schematic structural diagram of one implementation of a third embodiment of the substrate of the present invention.
- Fig. 4 is a schematic structural diagram of another implementation of the third embodiment of the substrate according to the present invention.
- Fig. 5 is a schematic structural view of a fourth embodiment of the substrate according to the present invention.
- FIG. 6 is a schematic cross-sectional structure diagram of a fifth embodiment of the substrate of the present invention.
- Fig. 7 is a schematic structural view of a sixth embodiment of the substrate according to the present invention.
- FIG. 8 is a schematic diagram of the structure along the A-A section of an embodiment of the substrate shown in FIG. 7.
- FIG. 9 is a schematic view of another embodiment of the substrate shown in FIG. 7 along the A-A section structure.
- Fig. 10 is a schematic flow chart of the method for preparing the substrate of the present invention.
- FIG. 11 is a schematic diagram of the mask structure in the method for preparing the substrate of the present invention.
- Fig. 12 is a schematic diagram of the steel mesh structure in the method for preparing the substrate according to the present invention.
- Fig. 13 is a synthetic route diagram of a polyimide glue prepolymer in the preparation method of the substrate of the present invention.
- the base 10 includes a substrate 11 and a limit frame 12 made of solder resist material.
- the substrate 11 includes a mounting surface 111, the limit frame 12 is fixed on the mounting surface 111, and a limit area 1111 is enclosed on the mounting surface 111, and the limit area 1111 is used for positioning the electronic components on the mounting surface 111 to assist The electronic components are welded to the substrate 11.
- the substrate 11 is a copper substrate made of metallic copper.
- the base 10 shown in this application is provided with a limit frame 12 on the mounting surface 111 of the substrate 11.
- the limit frame 12 encloses a limit area 1111 on the mounting surface 111.
- the electronic components Installed in the limit area 1111 and positioned by the limit frame 12 it can effectively suppress the uncontrollable flow of solder on the entire mounting surface 111 during the reflow process during soldering, and can ensure that the electronic components can be accurately Welded on the base, no position shift occurs.
- the limit frame 12 includes a limit surface 121 facing the limit area 1111, and the limit surface 121 abuts the electronic component to limit the electronic component in the limit area 1111.
- the limit frame 12 is made of solder resist material, and the limit frame 12 has a quadrilateral structure.
- the limiting frame 12 is rectangular, and the limiting frame 12 is tightly coupled to the mounting surface 111 in a “back” shape to ensure that the limiting frame 12 will not easily fall off the mounting surface 111.
- the solder mask material refers to a material that cannot be wetted by liquid solder (generally liquid solder), that is, the wetting angle of the liquid solder on the solder mask material is above 90 degrees.
- the solder resist materials are organic materials such as polytetrafluoroethylene, polyimide, and polyphenylene sulfide.
- the thickness of the limit frame 12 is greater than 0.005 mm to ensure that the limit surface 121 effectively resists the electronic components, and the electronic components are confined in the limit area 1111.
- the thickness of the limit frame 12 is between 0.01 mm and 0.1 mm.
- the mounting surface 111 further includes a non-limiting area 1112 on the side of the limiting frame 12 away from the limiting area 1111, and the limiting frame 12 completely isolates the limiting area 1111 and the non-limiting area 1112.
- the limit area 1111 is a closed area
- the size of the limit area 1111 is the same as the size of the electronic component, so that the electronic component is accurately positioned and welded in the limit area 1111, and no position occurs. Offset.
- the limit frame 12 is to realize the limit function of the electronic components, and the solder mask material must not only be resistant to the corrosion of the solder, but also prevent the solder from being inside.
- the solder mask material should be able to withstand a temperature higher than the peak temperature of the reflow soldering process, and can withstand a high temperature above 275°C, so as to ensure the limit effect of the limit frame 12 on the electronic components.
- the difference from the above-mentioned embodiment is that at least one notch 122 is provided on the limit frame 12, and at least one notch 122 and the limit area 1111 is connected to connect the restricted area 1111 and the non-restricted area 1112.
- a gap 122 is formed on the limit frame 12, and the gap 122 is opened on the frame of the "back"-shaped limit frame 12, so that the excess solder in the limit area 1111 flows to the non-limit area 1112. On the one hand, it prevents excess solder from contaminating the electronic components and affecting the performance of the electronic components.
- the notch 122 may also be opened at the corner position of the "back"-shaped limit frame 12, which is not specifically limited in this embodiment.
- the limit frame 12 includes a plurality of limit portions 123, and the plurality of limit portions 123 are spaced apart from each other. It is arranged on the mounting surface 111 to enclose a limit area 1111. Specifically, the limiting frame 12 includes four limiting portions 123. Similarly, it can be understood that the limit frame 12 is provided with four notches 122, and each notch 122 connects two limit parts 123.
- the four limiting portions 123 are all of an L-shaped structure, and the limiting portions 123 of the four L-shaped structures are respectively located on the four corners of the "back"-shaped structure, or it can be said that the four notches 122 are respectively It is opened on the four frames of the "back"-shaped limit frame 12 so that the excess solder in the limit area 1111 can flow out of the limit area 1111 from the four notches 122, so as to increase the amount of excess solder flowing out of the limit area 1111. effectiveness.
- the difference from the first implementation manner described above is that the four limiting portions 123 are all “one"-shaped structures, and four “ones”
- the limit parts 123 of the font structure are respectively located on the four frames of the " ⁇ " font structure.
- the four notches 122 are provided on the four corners of the “back”-shaped limit frame 12, which can also improve the efficiency of the excess solder flowing out of the limit area 1111.
- the specific shape, structure and position of the four limiting portions 123 are not specifically limited in this embodiment, that is, the specific positions of the four notches 122 on the limiting frame 12 are not specifically limited.
- the limit frame 12 includes eight limit portions 123, that is, the limit frame 12 is provided with There are eight gaps 122. Specifically, every two notches 122 are opened on a frame of the “back”-shaped limit frame 12 at intervals, which further accelerates the efficiency of the excess solder flowing out in the limit area 1111.
- the limit frame can also be a trapezoid or parallelogram, and the specific structure of the limit frame can be adapted according to actual needs. change.
- two gaps, three gaps, and other numbers of gaps can also be provided on the limit frame, as long as it can ensure that the solder in the limit area 1111 can flow out, which is not specifically limited in this application.
- the base 10 further includes a connection layer 13, which is connected to the substrate 11 and the limit frame Between 12.
- the connecting layer 13 is a bonding layer to reduce the interface energy between the limit frame 12 and the substrate 11 and increase the bonding force between the limit frame 12 and the substrate 11.
- the solder resist material is a material that can chemically bond with metal copper, such as metal materials such as iron and aluminum, or inorganic non-metal materials such as metal oxides, silicon, and carbon. It should be noted that there are also multiple implementations of the limiting frame 12 in this embodiment. Since the multiple implementations of the limiting frame 12 are the same as those in the foregoing embodiments, they will not be described here.
- a first protective layer 14 is provided on the mounting surface 111, and the first protective layer
- the layer 14 includes a first sub-protection layer located in the limiting area 1111, and the surface of the first sub-protection layer facing away from the mounting surface 111 is used for soldering the electronic components.
- the wetting angle of the solder on the first protective layer 14 is less than 90 degrees, so that the solder can spread on the surface of the first protective layer 14 to facilitate soldering of the electronic components.
- the first protection layer 14 further includes a second sub-protection layer located outside the confinement area, and the connection layer 13 is connected between the second sub-protection layer and the first sub-protection layer, and is connected to the second sub-protection layer.
- the second sub-protection layer and the first sub-protection layer together protect the mounting surface 111 and prevent the mounting surface 111 from being oxidized.
- the solder resist material is an organic material such as polytetrafluoroethylene, polyimide, polyphenylene sulfide, etc.
- the second sub-protection layer and the first sub-protection layer may completely cover the mounting surface 111 to protect the substrate 11 made of metal copper and prevent the mounting surface 111 from being oxidized, as shown in FIG. 9.
- the substrate 11 further includes a bottom surface 112 opposite to the mounting surface 111, and a second protective layer 15 is provided on the bottom surface 112.
- the second protective layer 15 completely covers the bottom surface 112 to prevent the bottom surface 112 from being oxidized.
- the second protective layer 15 and the first protective layer 14 are both electroplated layers made of nickel or nickel gold.
- the present application also provides a semiconductor device.
- the semiconductor device includes an electronic component and any one of the above-mentioned substrates 10, and the electronic component is positioned and welded in the limit area 1111.
- the substrate 10 is a copper substrate made of metallic copper.
- the metallic copper has good thermal conductivity and can quickly conduct heat generated by the electronic components to the outside, so as to realize rapid heat dissipation of the electronic components.
- the semiconductor device further includes a heat sink, and the heat sink is mounted on a side of the substrate 11 away from the electronic components.
- the heat sink is mounted on the bottom surface 112 of the substrate 10 facing away from the mounting surface 111, the substrate 11 transfers the heat generated by the electronic components to the heat sink, and the heat sink transfers the heat to the outside.
- the solder resist material is used to surround the mounting surface of the substrate to form a limit area, which prevents the uncontrollable flow of solder on the mounting surface, and solves the problem of electronic components during the soldering process.
- the technical problem of position shift caused by the uncontrolled flow of solder improves the product yield.
- this application also provides a method for preparing a substrate, including:
- the substrate 11 includes a mounting surface 111.
- the substrate 11 is a copper substrate made of metal copper
- the solder resist material is four aluminum oxide sheets, and the copper substrate and the four aluminum oxide sheets are cleaned for use.
- S201 Place the four aluminum oxide sheets on the mounting surface 111, wherein the four aluminum oxide sheets enclose an area of the same size of electronic components on the mounting surface 111.
- step S202 Perform high-temperature sintering of the substrate 11 on which the four alumina sheets are placed on the mounting surface 111, so that the part of the four alumina sheets close to the mounting surface 111 reacts with the substrate 11 to form a connection layer 13.
- the other parts of the four alumina sheets form the limit frame 12.
- step S202 includes:
- the substrate 11 with the four alumina sheets placed on the mounting surface 111 is placed in a tubular high-temperature furnace, and the inside of the tubular high-temperature furnace is evacuated, and then filled with an inert gas (such as helium or helium). Argon, etc.), repeat several times until the oxygen in the tube-type high-temperature furnace is exhausted.
- an inert gas such as helium or helium. Argon, etc.
- S2022 Fill the tube-type high-temperature furnace with pure oxygen, control the oxygen atom content to account for about 0.8% to 2.0% of the gas banknotes in the entire tube-type high-temperature furnace, perform high-temperature sintering at 1060°C ⁇ 1065°C, copper substrate and four pieces A connecting layer 13 is formed at the interface of the alumina sheet, the other parts of the four alumina sheets form a limit frame 12, and the connecting layer 13 connects the substrate 11 and the limit frame 12. It should be noted that in this step, in an atmosphere with a high temperature and a certain oxygen content, the surface of the copper substrate is oxidized to form a thin layer of Cu 2 O. Cu-Cu 2 O appears when the sintering temperature is higher than the eutectic point.
- Cu 2 O and Al 2 O 3 ceramics have a good chemical affinity, which reduces the interface energy.
- the eutectic liquid phase Cu-Cu 2 O can well infiltrate the copper substrate and the aluminum oxide sheet.
- Cu 2 O and Al 2 O 3 chemically react to form a connection layer 13 made of CuAlO 2 to tightly combine the aluminum oxide sheet with the copper substrate.
- the substrate 11 forming the limit frame 12 is physically or chemically polished to remove oxides or stains on the surface of the substrate 11, and the substrate 11 is electrolessly plated or electroplated with nickel or gold to form the first protective layer 14 and the second protective layer.
- Layer 15 the substrate 11 forming the limit frame 12 is physically or chemically polished to remove oxides or stains on the surface of the substrate 11, and the substrate 11 is electrolessly plated or electroplated with nickel or gold to form the first protective layer 14 and the second protective layer.
- this application also provides a second method for preparing a substrate, and the method includes:
- the substrate 11 includes a mounting surface 111.
- the substrate 11 is a copper substrate made of metallic copper
- the solder resist material is a polytetrafluoroethylene coating material.
- the pattern of the mask 20 has four openings 21, and the shape of the four openings 21 is L-shaped.
- the four openings 21 are surrounded by the mask 20 to form a preset limit area.
- the size depends on the size of the electronic components.
- this step includes: putting the substrate 11 sprayed with the solder resist material on the mounting surface 111 into an oven at 80°C, and after the moisture evaporates, it is sent to a high-temperature furnace for sintering at 380°C to 410°C, and sintering Time and temperature control depends on the situation.
- the method includes:
- Step S0 preparing a polytetrafluoroethylene coating material.
- the polymerization kettle is cleaned and added with a quantitative amount of non-ionized water, and dispersants (such as ammonium perfluorooctanoate, etc.), stabilizers (such as paraffin, silicone oil, etc.), and pH regulators (such as ammonium phosphate, disodium hydrogen phosphate, etc.) are added.
- dispersants such as ammonium perfluorooctanoate, etc.
- stabilizers such as paraffin, silicone oil, etc.
- pH regulators such as ammonium phosphate, disodium hydrogen phosphate, etc.
- the monomers are recovered and evacuated, the temperature is lowered, and the kettle cover is opened to discharge the materials, and the materials are sent to the post-processing for vacuum concentration or sedimentation concentration to prepare a polytetrafluoroethylene emulsion with a solid content of 60%.
- This application also provides a third method for preparing a substrate, the method includes:
- the substrate 11 includes a mounting surface 111.
- the substrate 11 is a copper substrate made of metallic copper, and the solder resist material is polyimide glue.
- a steel net 30 is provided, wherein a plurality of openings 31 arranged at intervals are opened on the steel net 30.
- the pattern of the steel mesh 30 has eight openings 31, of which the shape of the four openings 31 is L-shaped, the shape of the four openings 31 is a straight shape, and the L-shaped and straight-shaped openings 31 are alternately arranged at intervals ,
- the eight openings 31 are enclosed on the steel mesh 30 to form a preset limit area, and the size of the preset limit area is determined according to the size of the electronic component.
- this step includes: removing the steel mesh 30, pre-drying the substrate 11 with polyimide glue printed on the mounting surface 111 at 150°C, and then putting it in an oven for polymerization at a high temperature of 320°C to make the polyamide The imine glue forms the limit frame 12.
- a first protective layer 14 is formed on the mounting surface 111.
- the first protective layer 14 made of nickel or gold is formed on the mounting surface 111 by electroless plating or electroplating, and at the same time, the second protective layer 15 is formed on the bottom surface 12 of the substrate 11. It should be noted that in other implementations of this embodiment, the formation of the first protective layer 14 on the mounting surface 111 may be performed before step S2.
- the method for preparing the substrate in this embodiment further includes:
- Step S0 synthesize polyimide glue.
- the sulfone-containing dianhydride monomer 3,3,4,4-diphenylsulfone tetracarboxylic acid was synthesized by a high-temperature one-step method.
- DSDA acid dianhydride
- m-PDA m-phenylenediamine
- 6FAPB fluorine-containing diamine 1,4-bis(2-trifluoromethyl-4-aminophenoxy)benzene
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Abstract
The present application provides a substrate for soldering an electronic component. The substrate comprises a substrate board and a position-limiting frame made from a solder resist material. The substrate board comprises an installation surface, and the position-limiting frame is fixed to the installation surface and encloses and forms a position-limiting region on the installation surface. The position-limiting region is used to position the electronic component on the installation surface to assist with the soldering of the electronic component to the substrate board. The present application further provides a semiconductor device comprising an electronic component and the substrate, wherein the electronic component is positioned in the position-limiting region and is soldered and fixed to the installation surface of the substrate. The substrate of the present application uses the position-limiting frame provided on the installation surface to suppress an uncontrollable flow of a solder material during a soldering process, so as to accurately limit a position of an electronic component, and enable the electronic component to be soldered in the position-limiting region enclosed by the position-limiting frame, thereby effectively preventing position shifting of the electronic component, and improving the product yield. The present application further provides a substrate manufacturing method.
Description
本发明涉及电子技术领域,特别涉及一种用于焊接电子元器件的基底及其制备方法、半导体装置。The present invention relates to the field of electronic technology, in particular to a substrate for welding electronic components, a preparation method thereof, and a semiconductor device.
在目前的半导体模块封装工艺领域中,一般都采用回流焊接工艺来实现芯片与衬板或基板的连接。在回流焊工艺过程中,在基板表面的焊料在高温下呈熔融状态。熔融状态的焊料极易在基板的表面发生流动,焊料的异常流动往往会导致芯片的焊接偏移预定位置。芯片的位置发生偏移时,后续在芯片表面的导线绑定和半导体模块的焊接位置等等均会受到影响,严重降低了产品的良率。In the current field of semiconductor module packaging technology, a reflow soldering process is generally used to realize the connection between the chip and the liner or substrate. During the reflow soldering process, the solder on the surface of the substrate is in a molten state at a high temperature. The molten solder is easy to flow on the surface of the substrate, and the abnormal flow of the solder often causes the soldering of the chip to shift to a predetermined position. When the position of the chip is shifted, the subsequent wire bonding on the chip surface and the welding position of the semiconductor module will be affected, which seriously reduces the yield of the product.
发明内容Summary of the invention
本申请的目的在于提供一种用于焊接电子元器件的基底,用于焊接并定位所述电子元器件,防止所述电子元器件在焊接过程中发生位置偏移。The purpose of this application is to provide a substrate for welding electronic components, used for welding and positioning the electronic components, and preventing the electronic components from shifting in position during the welding process.
本申请所述基底包括基板和由阻焊材料制成的限位框,所述基板包括安装面,所述限位框固定于所述安装面上,并在所述安装面上围成限位区,所述限位区用于定位所述电子元器件于所述安装面上以辅助所述电子元器件与所述基板焊接,以使所述电子元器件准确焊接在所述限位区内,不会发生位置偏移。The base described in the present application includes a substrate and a limit frame made of solder resist material. The substrate includes a mounting surface, and the limit frame is fixed on the mounting surface and encloses a limit on the mounting surface. The limit area is used to position the electronic component on the mounting surface to assist the welding of the electronic component and the substrate, so that the electronic component is accurately welded in the limit area , No position shift will occur.
其中,所述限位框上开设有至少一个缺口,所述至少一个缺口与所述限位区连通,以使所述限位区内多余的焊料流出。Wherein, the limit frame is provided with at least one notch, and the at least one notch communicates with the limit area to allow excess solder in the limit area to flow out.
其中,所述限位框包括多个限位部,多个所述限位部间隔设置于所述安装面上以围设成所述限位区,以使所述限位区内多余的焊料从每两个所述限位部之间流出。Wherein, the limit frame includes a plurality of limit parts, and the plurality of limit parts are arranged on the mounting surface at intervals to enclose the limit area, so that excess solder in the limit area It flows out from between every two of the limit parts.
其中,所述基底的安装面与所述限位框之间通过连接层连接,以增加所述限位框与所述基板的结合力。Wherein, the mounting surface of the base and the limit frame are connected by a connecting layer to increase the bonding force of the limit frame and the substrate.
其中,所述安装面上设有第一保护层,所述第一保护层包括位于所述限位 区内的第一子保护层,所述第一子保护层背离所述安装面的表面用于焊接所述电子元器件,所述第一子保护层用以保护位于所述限位区内的基板,防止所述基底被氧化。Wherein, the mounting surface is provided with a first protective layer, the first protective layer includes a first sub-protection layer located in the limit area, and the surface of the first sub-protection layer facing away from the mounting surface is used When welding the electronic components, the first sub-protection layer is used to protect the substrate located in the limit area and prevent the substrate from being oxidized.
其中,所述第一保护层还包括位于所述限位区外的第二子保护层,所述第二子保护层用以保护位于所述限位区外的基板,防止所述基板被氧化。Wherein, the first protective layer further includes a second sub-protection layer located outside the limit area, and the second sub-protection layer is used to protect the substrate located outside the limit area and prevent the substrate from being oxidized. .
其中,所述阻焊材料能耐210℃以上的温度,以防止所述限位框在焊接工艺中变形。Wherein, the solder resist material can withstand a temperature above 210° C. to prevent the limit frame from being deformed during the welding process.
其中,所述限位框的厚度在0.005mm以上,以保证所述限位框对所述电子元器件的定位作用。Wherein, the thickness of the limit frame is greater than 0.005 mm to ensure the positioning effect of the limit frame on the electronic components.
本申请还提供一种半导体装置,包括电子元器件和上述任一种基底,所述电子元器件定位于所述限位区内并焊接固定于所述基底的安装面上。The present application also provides a semiconductor device, which includes an electronic component and any of the above-mentioned substrates, and the electronic component is positioned in the limit area and welded and fixed on the mounting surface of the substrate.
其中,所述半导体装置还包括散热器,所述散热器安装于所述基板背离所述电子元器件的表面,以实现对所述电子元器件的快速散热。Wherein, the semiconductor device further includes a heat sink, and the heat sink is installed on the surface of the substrate away from the electronic components to realize rapid heat dissipation of the electronic components.
本申请还提供一种基底的制备方法,用于制备上述任一种基底,所述方法包括:This application also provides a method for preparing a substrate, which is used to prepare any of the above-mentioned substrates, and the method includes:
提供基板和阻焊材料,其中,所述基板包括安装面;Provide a substrate and solder resist material, wherein the substrate includes a mounting surface;
通过所述阻焊材料在所述安装面上形成限位框,其中,所述限位框在所述安装面上围成限位区。A limit frame is formed on the mounting surface by the solder resist material, wherein the limit frame encloses a limit area on the mounting surface.
其中,所述通过所述阻焊材料在所述安装面上形成限位框,包括:Wherein, forming a limit frame on the mounting surface by the solder resist material includes:
将所述阻焊材料放置于所述安装面上;Placing the solder mask material on the mounting surface;
对所述安装面上放置有所述阻焊材料的基板进行高温烧结,以使所述阻焊材料靠近所述安装面的部分与所述基板反应形成连接层,所述阻焊材料的其它部分形成限位框。High-temperature sintering is performed on the substrate on which the solder resist material is placed on the mounting surface, so that the part of the solder resist material close to the mounting surface reacts with the substrate to form a connection layer, and the other parts of the solder resist material Form a limit frame.
其中,所述通过所述阻焊材料在所述安装面上形成限位框,包括:Wherein, forming a limit frame on the mounting surface by the solder resist material includes:
提供一掩膜,其中,所述掩膜上开设有多个间隔设置的开口;Providing a mask, wherein the mask is provided with a plurality of openings arranged at intervals;
通过所述掩膜向所述安装面上喷涂阻焊材料;Spraying solder resist material on the mounting surface through the mask;
对所述安装面上喷涂有所述阻焊材料的基板进行烘烤和烧结,以使在所述安装面上的所述阻焊材料形成限位框。Baking and sintering the substrate coated with the solder resist material on the mounting surface, so that the solder resist material on the mounting surface forms a limit frame.
其中,所述通过所述阻焊材料在所述安装面上形成限位框,包括:Wherein, forming a limit frame on the mounting surface by the solder resist material includes:
提供一钢网,其中,所述钢网上开设有多个间隔设置的开口;A steel net is provided, wherein a plurality of openings arranged at intervals are opened on the steel net;
通过所述钢网在所述安装面上印刷所述阻焊材料;Printing the solder mask material on the mounting surface through the steel mesh;
对所述安装面上印刷有所述阻焊材料的基板进行烘烤,以使在所述安装面上的所述阻焊材料形成限位框。Baking the substrate on which the solder resist material is printed on the mounting surface, so that the solder resist material on the mounting surface forms a limit frame.
其中,所述通过所述阻焊材料在所述安装面上形成限位框之后,所述方法包括:在所述安装面上形成第一保护层。Wherein, after the limit frame is formed on the mounting surface by the solder resist material, the method includes: forming a first protective layer on the mounting surface.
其中,所述通过所述阻焊材料在所述安装面上形成限位框之前,所述方法包括:在所述安装面上形成第一保护层。Wherein, before the limit frame is formed on the mounting surface by the solder resist material, the method includes: forming a first protective layer on the mounting surface.
本申请所述基底和半导体装置中,所述基板的安装面上设有由阻焊材料制成的限位框,所述限位框在所述安装面上围成限位区,在焊接电子元器件前,将所述电子元器件装于所述限位区内并通过所述限位框进行定位,在对所述电子元器件进行焊接时,所述限位框有效抑制焊料在回流过程中发生不可控的流动,使得所述电子元器件能被准确地定位焊接在所述限位区内,避免发生位置偏移,提升了产品良率。In the substrate and semiconductor device described in the present application, the mounting surface of the substrate is provided with a limit frame made of solder resist material, and the limit frame encloses a limit area on the mounting surface, which is used for welding electronics. Before the components, the electronic components are installed in the limit area and positioned by the limit frame. When the electronic components are soldered, the limit frame effectively suppresses the solder reflow process Uncontrollable flow occurs during the process, so that the electronic components can be accurately positioned and welded in the limit area, avoiding positional deviation, and improving the product yield.
本申请所述基底的制备方法利用阻焊材料在基板的安装面上形成限位框,所述限位框在所述安装面上围成与待安装的电子元器件形状相适配的限位区,在将电子元器件焊接于所述基底上时,所述限位框防止焊料在所述安装面上发生不可控的流动,使所述电子元器件准确焊接在所述限位区内,提高了所述电子元器件的焊接精准度。The method for preparing the base of the present application uses solder resist material to form a limit frame on the mounting surface of the substrate, and the limit frame encloses a limit on the mounting surface that matches the shape of the electronic component to be installed When soldering electronic components on the substrate, the limit frame prevents the uncontrollable flow of solder on the mounting surface, so that the electronic components are accurately soldered in the limit area, The welding accuracy of the electronic components is improved.
为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to explain the embodiments of the present invention or the technical solutions in the prior art more clearly, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only These are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative work.
图1是本发明所述基底第一种实施例的结构示意图。Fig. 1 is a schematic diagram of the structure of the first embodiment of the substrate of the present invention.
图2是本发明所述基底第二种实施例的结构示意图。Fig. 2 is a schematic structural diagram of a second embodiment of the substrate of the present invention.
图3是本发明所述基底第三种实施例一种实施方式的结构示意图。Fig. 3 is a schematic structural diagram of one implementation of a third embodiment of the substrate of the present invention.
图4是本发明所述基底第三种实施例另一种实施方式的结构示意图。Fig. 4 is a schematic structural diagram of another implementation of the third embodiment of the substrate according to the present invention.
图5是本发明所述基底第四种实施例的结构示意图。Fig. 5 is a schematic structural view of a fourth embodiment of the substrate according to the present invention.
图6是本发明所述基底第五种实施例的剖面结构示意图。FIG. 6 is a schematic cross-sectional structure diagram of a fifth embodiment of the substrate of the present invention.
图7是本发明所述基底第六种实施例的结构示意图。Fig. 7 is a schematic structural view of a sixth embodiment of the substrate according to the present invention.
图8是图7所示基底一种实施方式的沿A-A剖面结构示意图。FIG. 8 is a schematic diagram of the structure along the A-A section of an embodiment of the substrate shown in FIG. 7.
图9是图7所示基底另一种实施方式的沿A-A剖面结构示意图。FIG. 9 is a schematic view of another embodiment of the substrate shown in FIG. 7 along the A-A section structure.
图10是本发明所述基底的制备方法的流程示意图。Fig. 10 is a schematic flow chart of the method for preparing the substrate of the present invention.
图11是本发明所述基底的制备方法中的掩膜结构示意图。FIG. 11 is a schematic diagram of the mask structure in the method for preparing the substrate of the present invention.
图12是本发明所述基底的制备方法中的钢网结构示意图。Fig. 12 is a schematic diagram of the steel mesh structure in the method for preparing the substrate according to the present invention.
图13是本发明所述基底的制备方法中聚酰亚胺胶预聚物的合成路线图。Fig. 13 is a synthetic route diagram of a polyimide glue prepolymer in the preparation method of the substrate of the present invention.
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
本申请提供一种用于焊接电子元器件的基底,所述电子元器件包括且不限于发光芯片、半导体功率芯片或连接器件。请参阅图1,基底10包括基板11和由阻焊材料制成的限位框12。基板11包括安装面111,限位框12固定于安装面111上,并在安装面111上围成限位区1111,限位区1111用于定位所述电子元器件于安装面111上以辅助所述电子元器件与基板11焊接。其中,基板11为由金属铜制成的铜基板。This application provides a substrate for welding electronic components, the electronic components including but not limited to light-emitting chips, semiconductor power chips or connecting devices. Please refer to FIG. 1, the base 10 includes a substrate 11 and a limit frame 12 made of solder resist material. The substrate 11 includes a mounting surface 111, the limit frame 12 is fixed on the mounting surface 111, and a limit area 1111 is enclosed on the mounting surface 111, and the limit area 1111 is used for positioning the electronic components on the mounting surface 111 to assist The electronic components are welded to the substrate 11. Among them, the substrate 11 is a copper substrate made of metallic copper.
本申请所示基底10通过在基板11的安装面111上设置限位框12,限位框12在安装面111上围成限位区1111,在对电子元器件进行焊接前,将电子元器件装于限位区1111内并通过限位框12定位,在进行焊接时能够有效地抑制焊锡在回流过程中在整个安装面111上不可控的流动,可以保证所述电子元器件能被准确的焊接在基底上,不会发生位置偏移。The base 10 shown in this application is provided with a limit frame 12 on the mounting surface 111 of the substrate 11. The limit frame 12 encloses a limit area 1111 on the mounting surface 111. Before the electronic components are soldered, the electronic components Installed in the limit area 1111 and positioned by the limit frame 12, it can effectively suppress the uncontrollable flow of solder on the entire mounting surface 111 during the reflow process during soldering, and can ensure that the electronic components can be accurately Welded on the base, no position shift occurs.
本实施例中,限位框12包括朝向限位区1111的限位面121,限位面121抵持所述电子元器件上以将所述电子元器件限位于限位区1111内。其中,限位框12由阻焊材料制成,限位框12为四边形结构。具体的,限位框12为矩形,且限位框12呈“回”字形紧密结合于安装面111上,以保证限位框12不会轻易从安装面111上脱落。需要了解的是,阻焊材料是指液态焊料(一般是指液态焊锡)不能润湿的材料,即液态焊料在阻焊材料上的润湿角在90度以上。其中, 阻焊材料为聚四氟乙烯、聚酰亚胺、聚苯硫醚等有机材料。进一步的,限位框12的厚度在0.005mm以上,以保证限位面121对所述电子元器件的有效抵持,将所述电子元器件限位于所述限位区1111内。优选的,限位框12的厚度在0.01mm~0.1mm之间。In this embodiment, the limit frame 12 includes a limit surface 121 facing the limit area 1111, and the limit surface 121 abuts the electronic component to limit the electronic component in the limit area 1111. Wherein, the limit frame 12 is made of solder resist material, and the limit frame 12 has a quadrilateral structure. Specifically, the limiting frame 12 is rectangular, and the limiting frame 12 is tightly coupled to the mounting surface 111 in a “back” shape to ensure that the limiting frame 12 will not easily fall off the mounting surface 111. It should be understood that the solder mask material refers to a material that cannot be wetted by liquid solder (generally liquid solder), that is, the wetting angle of the liquid solder on the solder mask material is above 90 degrees. Among them, the solder resist materials are organic materials such as polytetrafluoroethylene, polyimide, and polyphenylene sulfide. Further, the thickness of the limit frame 12 is greater than 0.005 mm to ensure that the limit surface 121 effectively resists the electronic components, and the electronic components are confined in the limit area 1111. Preferably, the thickness of the limit frame 12 is between 0.01 mm and 0.1 mm.
复参图1,安装面111还包括位于限位框12背离限位区1111一侧的非限位区1112,限位框12完全隔离限位区1111与非限位区1112。具体的,限位区1111为封闭区域,且限位区1111的尺寸与所述电子元器件的尺寸相同,以使所述电子元器件被准确定位且焊接在限位区1111内,不发生位置偏移。需要说明的是,由于一般都是采用回流焊工艺对电子元器件进行焊接,限位框12要想实现对电子元器件的限位作用,阻焊材料不仅要耐焊料的腐蚀,防止被焊料里面的溶剂腐蚀,还必须要耐210℃以上的高温,以防止限位框12在回流焊工艺中被熔化而变形。优选的,阻焊材料要能耐受高于回流焊工艺的峰值温度,能耐受住275℃以上的高温,以确保限位框12对电子元器件的限位作用。1, the mounting surface 111 further includes a non-limiting area 1112 on the side of the limiting frame 12 away from the limiting area 1111, and the limiting frame 12 completely isolates the limiting area 1111 and the non-limiting area 1112. Specifically, the limit area 1111 is a closed area, and the size of the limit area 1111 is the same as the size of the electronic component, so that the electronic component is accurately positioned and welded in the limit area 1111, and no position occurs. Offset. It should be noted that since the reflow soldering process is generally used to solder electronic components, the limit frame 12 is to realize the limit function of the electronic components, and the solder mask material must not only be resistant to the corrosion of the solder, but also prevent the solder from being inside. It is also necessary to withstand high temperatures above 210°C to prevent the limit frame 12 from being melted and deformed during the reflow soldering process. Preferably, the solder mask material should be able to withstand a temperature higher than the peak temperature of the reflow soldering process, and can withstand a high temperature above 275°C, so as to ensure the limit effect of the limit frame 12 on the electronic components.
请参阅图2,在本申请所述基底10的第二种实施例中,与上述实施例的不同之处在于,限位框12上开设有至少一个缺口122,至少一个缺口122与限位区1111连通,以连通限位区1111与非限位区1112。本实施例中,限位框12上开设有一个缺口122,缺口122开设于“回”字型限位框12的边框上,以使限位区1111内多余的焊料流向非限位区1112,一方面防止多余的焊料沾染到所述电子元器件上影响所述电子元器件的性能,另一方面防止限位区1111内焊料分布不均,造成所述电子元器件安装在限位区1111时在不同位置存在高度落差,影响后续使用。需要说明的是,在本实施例的其他实施方式中,缺口122也可以开设在“回”字型限位框12的转角位置,本实施例对此不作具体限定。Referring to FIG. 2, in the second embodiment of the substrate 10 of the present application, the difference from the above-mentioned embodiment is that at least one notch 122 is provided on the limit frame 12, and at least one notch 122 and the limit area 1111 is connected to connect the restricted area 1111 and the non-restricted area 1112. In this embodiment, a gap 122 is formed on the limit frame 12, and the gap 122 is opened on the frame of the "back"-shaped limit frame 12, so that the excess solder in the limit area 1111 flows to the non-limit area 1112. On the one hand, it prevents excess solder from contaminating the electronic components and affecting the performance of the electronic components. On the other hand, it prevents the uneven distribution of solder in the limit area 1111, causing the electronic components to be installed in the limit area 1111. There is a height difference in different positions, which affects subsequent use. It should be noted that in other implementations of this embodiment, the notch 122 may also be opened at the corner position of the "back"-shaped limit frame 12, which is not specifically limited in this embodiment.
请参阅图3,在本申请所述基底10的第三种实施例中,与上述二种实施例不同之处在于,限位框12包括多个限位部123,多个限位部123间隔设置于安装面111上以围设成限位区1111。具体的,限位框12包括四个限位部123。同样的,可以理解为,限位框12上开设有四个缺口122,每一缺口122连接两个限位部123。本实施方式中,四个限位部123均为L型结构,四个L型结构的限位部123分别位于“回”字型结构的四个角上,或者可以说,四个缺口122分别开设于“回”字型限位框12的四条边框上,以使限位区1111内多余的焊料可以从四个缺口122中流出限位区1111,提高多余焊料从限位区1111中流出的 效率。Referring to FIG. 3, in the third embodiment of the substrate 10 of the present application, the difference from the above two embodiments is that the limit frame 12 includes a plurality of limit portions 123, and the plurality of limit portions 123 are spaced apart from each other. It is arranged on the mounting surface 111 to enclose a limit area 1111. Specifically, the limiting frame 12 includes four limiting portions 123. Similarly, it can be understood that the limit frame 12 is provided with four notches 122, and each notch 122 connects two limit parts 123. In this embodiment, the four limiting portions 123 are all of an L-shaped structure, and the limiting portions 123 of the four L-shaped structures are respectively located on the four corners of the "back"-shaped structure, or it can be said that the four notches 122 are respectively It is opened on the four frames of the "back"-shaped limit frame 12 so that the excess solder in the limit area 1111 can flow out of the limit area 1111 from the four notches 122, so as to increase the amount of excess solder flowing out of the limit area 1111. effectiveness.
如图4所示,在本实施例的第二种实施方式中,与上述第一种实施方式不同之处在于,四个限位部123均为“一”字型结构,四个“一”字型结构的限位部123分别位于“回”字型结构的四条边框上。同样的,可以理解成,四个缺口122设置在“回”字型限位框12的四个转角上,同样可以提高多余焊料从限位区1111中流出的效率。As shown in FIG. 4, in the second implementation manner of this embodiment, the difference from the first implementation manner described above is that the four limiting portions 123 are all "one"-shaped structures, and four "ones" The limit parts 123 of the font structure are respectively located on the four frames of the "回" font structure. Similarly, it can be understood that the four notches 122 are provided on the four corners of the “back”-shaped limit frame 12, which can also improve the efficiency of the excess solder flowing out of the limit area 1111.
需要说明的是,本实施例对四个限位部123的具体形状结构和位置不作具体限定,即四个缺口122在限位框12上具体位置的设置不作具体限定。It should be noted that the specific shape, structure and position of the four limiting portions 123 are not specifically limited in this embodiment, that is, the specific positions of the four notches 122 on the limiting frame 12 are not specifically limited.
请参阅图5,在本申请所述基底10的第四种实施例中,与上述三种实施例不同之处在于,限位框12包括八个限位部123,即限位框12上开设有八个缺口122。具体的,每两个缺口122间隔开设于“回”字型限位框12的一条边框上,进一步加快限位区1111中多余焊料流出的效率。Referring to FIG. 5, in the fourth embodiment of the substrate 10 of the present application, the difference from the above three embodiments is that the limit frame 12 includes eight limit portions 123, that is, the limit frame 12 is provided with There are eight gaps 122. Specifically, every two notches 122 are opened on a frame of the “back”-shaped limit frame 12 at intervals, which further accelerates the efficiency of the excess solder flowing out in the limit area 1111.
需要说明的是,在本申请所述基底的其他实施例中,所述限位框也可以为梯形或平行四边形等形状的结构,所述限位框的具体结构可以根据实际需求而进行相应地改变。当然,所述限位框上也可以开设两个缺口、三个缺口以及其他数量的缺口,只要能保证限位区1111中的焊料可以流出即可,本申请对此不作具体限定。It should be noted that in other embodiments of the substrate described in this application, the limit frame can also be a trapezoid or parallelogram, and the specific structure of the limit frame can be adapted according to actual needs. change. Of course, two gaps, three gaps, and other numbers of gaps can also be provided on the limit frame, as long as it can ensure that the solder in the limit area 1111 can flow out, which is not specifically limited in this application.
请参阅图6,在本申请所示基底10的第五种实施例中,与上述四种实施例不同之处在于,基底10还包括连接层13,连接层13连接于基板11和限位框12之间。具体的,连接层13为键合层,以降低限位框12和基板11之间的界面能,增加限位框12和基板11之间的结合力。其中,阻焊材料为能与金属铜发生化学键合的材料,如铁、铝等金属材料或金属氧化物、硅、碳等无机非金属材料。需要说明的是,本实施例中限位框12的实施方式也有多种,鉴于在限位框12的多种实施方式均与上述实施例中各实施方式相同,在此不作过多描述。Referring to FIG. 6, in the fifth embodiment of the base 10 shown in the present application, the difference from the above four embodiments is that the base 10 further includes a connection layer 13, which is connected to the substrate 11 and the limit frame Between 12. Specifically, the connecting layer 13 is a bonding layer to reduce the interface energy between the limit frame 12 and the substrate 11 and increase the bonding force between the limit frame 12 and the substrate 11. Among them, the solder resist material is a material that can chemically bond with metal copper, such as metal materials such as iron and aluminum, or inorganic non-metal materials such as metal oxides, silicon, and carbon. It should be noted that there are also multiple implementations of the limiting frame 12 in this embodiment. Since the multiple implementations of the limiting frame 12 are the same as those in the foregoing embodiments, they will not be described here.
请参阅图7和图8,在本申请所述基底10的第六种实施例中,与上述第五种实施例不同之处在于,安装面111上设有第一保护层14,第一保护层14包括位于限位区1111内的第一子保护层,第一子保护层背离所述安装面111的表面用于焊接所述电子元器件。具体的,焊料在第一保护层14上的润湿角小于90度,以使得焊料能在第一保护层14的表面延展开来,方便焊接所述电子元器件。本实施例中,第一保护层14还包括位于限位区外的第二子保护层,连接层13 连接于所述第二子保护层和所述第一子保护层之间,并与所述第二子保护层和所述第一子保护层一起保护安装面111,防止安装面111被氧化。可以理解的是,在其他实施例中,当所述阻焊材料为聚四氟乙烯、聚酰亚胺、聚苯硫醚等有机材料时,所述第二子保护层和所述第一子保护层可以完全覆盖安装面111,以保护由金属铜制成的基板11,防止安装面111被氧化,如图9所示。Referring to FIGS. 7 and 8, in the sixth embodiment of the substrate 10 according to the present application, the difference from the above-mentioned fifth embodiment is that a first protective layer 14 is provided on the mounting surface 111, and the first protective layer The layer 14 includes a first sub-protection layer located in the limiting area 1111, and the surface of the first sub-protection layer facing away from the mounting surface 111 is used for soldering the electronic components. Specifically, the wetting angle of the solder on the first protective layer 14 is less than 90 degrees, so that the solder can spread on the surface of the first protective layer 14 to facilitate soldering of the electronic components. In this embodiment, the first protection layer 14 further includes a second sub-protection layer located outside the confinement area, and the connection layer 13 is connected between the second sub-protection layer and the first sub-protection layer, and is connected to the second sub-protection layer. The second sub-protection layer and the first sub-protection layer together protect the mounting surface 111 and prevent the mounting surface 111 from being oxidized. It is understandable that, in other embodiments, when the solder resist material is an organic material such as polytetrafluoroethylene, polyimide, polyphenylene sulfide, etc., the second sub-protection layer and the first sub-protection layer The protective layer may completely cover the mounting surface 111 to protect the substrate 11 made of metal copper and prevent the mounting surface 111 from being oxidized, as shown in FIG. 9.
进一步的,基板11还包括与安装面111相对设置的底面112,底面112上设有第二保护层15,第二保护层15完全覆盖底面112,防止底面112被氧化。本实施例中,第二保护层15和第一保护层14均为由镍或镍金制成的电镀层。Further, the substrate 11 further includes a bottom surface 112 opposite to the mounting surface 111, and a second protective layer 15 is provided on the bottom surface 112. The second protective layer 15 completely covers the bottom surface 112 to prevent the bottom surface 112 from being oxidized. In this embodiment, the second protective layer 15 and the first protective layer 14 are both electroplated layers made of nickel or nickel gold.
需要说明的是,本实施例中限位框12的实施方式也有多种,鉴于在限位框12的多种实施方式均与与上述第一种实施例的各实施方式相同,在此不作过多描述。It should be noted that there are also multiple implementations of the limiting frame 12 in this embodiment. Since the multiple implementations of the limiting frame 12 are the same as those of the above-mentioned first embodiment, they will not be described here. Describe more.
本申请还提供一种半导体装置,所述半导体装置包括电子元器件和上述任一种基底10,所述电子元器件定位且焊接于限位区1111内。其中,基板10为由金属铜制成的铜基板,金属铜具有较好的导热性能,能将所述电子元器件产生的热量迅速传导至外界,实现对所述电子元器件的快速散热。The present application also provides a semiconductor device. The semiconductor device includes an electronic component and any one of the above-mentioned substrates 10, and the electronic component is positioned and welded in the limit area 1111. Wherein, the substrate 10 is a copper substrate made of metallic copper. The metallic copper has good thermal conductivity and can quickly conduct heat generated by the electronic components to the outside, so as to realize rapid heat dissipation of the electronic components.
进一步的,所述半导体装置还包括散热器,所述散热器安装于基板11背离所述电子元器件的一侧。具体的,所述散热器安装于基板10背离安装面111的底面112,基板11将所述电子元器件产生的热量传递至所述散热器,所述散热器再将热量传递至外界。Further, the semiconductor device further includes a heat sink, and the heat sink is mounted on a side of the substrate 11 away from the electronic components. Specifically, the heat sink is mounted on the bottom surface 112 of the substrate 10 facing away from the mounting surface 111, the substrate 11 transfers the heat generated by the electronic components to the heat sink, and the heat sink transfers the heat to the outside.
本申请所述基底和半导体装置中,采用阻焊材料在基板的安装面围设形成限位区,抑制焊料在所述安装面上发生不可控的流动,解决了电子元器件在焊接过程中由于焊料不可控流动造成的位置偏移的技术问题,提高了产品良率。In the substrate and the semiconductor device described in the present application, the solder resist material is used to surround the mounting surface of the substrate to form a limit area, which prevents the uncontrollable flow of solder on the mounting surface, and solves the problem of electronic components during the soldering process. The technical problem of position shift caused by the uncontrolled flow of solder improves the product yield.
请参阅图10,本申请还提供一种基底的制备方法,包括:Please refer to FIG. 10, this application also provides a method for preparing a substrate, including:
S1,提供基板11和阻焊材料,其中,基板11包括安装面111。具体的,基板11为由金属铜制成的铜基板,所述阻焊材料为四片氧化铝片材,所述铜基板和所述四片氧化铝片材均清洗干净备用。S1, a substrate 11 and solder resist materials are provided, wherein the substrate 11 includes a mounting surface 111. Specifically, the substrate 11 is a copper substrate made of metal copper, the solder resist material is four aluminum oxide sheets, and the copper substrate and the four aluminum oxide sheets are cleaned for use.
S2,通过所述阻焊材料在安装面111上形成限位框12。具体的,包括:S2, forming a limit frame 12 on the mounting surface 111 by using the solder resist material. Specifically, including:
S201,将所述四片氧化铝片材放置于安装面111上,其中,所述四片氧化铝片材在安装面111上围成一电子元器件的尺寸相同的区域。S201: Place the four aluminum oxide sheets on the mounting surface 111, wherein the four aluminum oxide sheets enclose an area of the same size of electronic components on the mounting surface 111.
S202,对安装面111上放置有所述四片氧化铝片材的基板11进行高温烧结, 以使所述四片氧化铝片材靠近安装面111的部分与基板11反应形成连接层13,所述四片氧化铝片材的其它部分形成限位框12。具体的,步骤S202包括:S202: Perform high-temperature sintering of the substrate 11 on which the four alumina sheets are placed on the mounting surface 111, so that the part of the four alumina sheets close to the mounting surface 111 reacts with the substrate 11 to form a connection layer 13. The other parts of the four alumina sheets form the limit frame 12. Specifically, step S202 includes:
S2021,将安装面111上放置有所述四片氧化铝片材的基板11放入管式高温炉中,并对管式高温炉的内部抽真空处理,然后充入惰性气体(如氦气或氩气等),反复几次,直至将管式高温炉内部的氧气除尽。In S2021, the substrate 11 with the four alumina sheets placed on the mounting surface 111 is placed in a tubular high-temperature furnace, and the inside of the tubular high-temperature furnace is evacuated, and then filled with an inert gas (such as helium or helium). Argon, etc.), repeat several times until the oxygen in the tube-type high-temperature furnace is exhausted.
S2022,向管式高温炉中充入纯氧,控制氧原子含量占整个管式高温炉内气体纸币约为0.8%~2.0%,在1060℃~1065℃下进行高温烧结,铜基板与四片氧化铝片材界面处形成连接层13,四片氧化铝片的其他部分形成限位框12,连接层13连接基板11和限位框12。需要说明的是,本步骤中,在高温且一定含氧量的氛围中,铜基板的表面氧化形成一层薄薄的Cu
2O,在烧结温度高于低共熔点时出现Cu-Cu
2O的共晶液相,Cu
2O与Al
2O
3陶瓷有着良好的化学亲和性,使界面能降低,共晶液相Cu-Cu
2O很好地浸润铜基板和氧化铝片材。同时,Cu
2O与Al
2O
3发生化学反应,形成由CuAlO
2制成的连接层13,以将氧化铝片材与铜基板紧密结合起来。
S2022: Fill the tube-type high-temperature furnace with pure oxygen, control the oxygen atom content to account for about 0.8% to 2.0% of the gas banknotes in the entire tube-type high-temperature furnace, perform high-temperature sintering at 1060℃~1065℃, copper substrate and four pieces A connecting layer 13 is formed at the interface of the alumina sheet, the other parts of the four alumina sheets form a limit frame 12, and the connecting layer 13 connects the substrate 11 and the limit frame 12. It should be noted that in this step, in an atmosphere with a high temperature and a certain oxygen content, the surface of the copper substrate is oxidized to form a thin layer of Cu 2 O. Cu-Cu 2 O appears when the sintering temperature is higher than the eutectic point. Cu 2 O and Al 2 O 3 ceramics have a good chemical affinity, which reduces the interface energy. The eutectic liquid phase Cu-Cu 2 O can well infiltrate the copper substrate and the aluminum oxide sheet. At the same time, Cu 2 O and Al 2 O 3 chemically react to form a connection layer 13 made of CuAlO 2 to tightly combine the aluminum oxide sheet with the copper substrate.
S2023,将形成有限位框12的基板11进行物理或化学研磨抛光除去基板11表面的氧化物或玷污,对基板11进行化学镀或电镀镍或金,以形成第一保护层14和第二保护层15。In S2023, the substrate 11 forming the limit frame 12 is physically or chemically polished to remove oxides or stains on the surface of the substrate 11, and the substrate 11 is electrolessly plated or electroplated with nickel or gold to form the first protective layer 14 and the second protective layer. Layer 15.
请参阅图10和图11,本申请还提供第二种基底的制备方法,所述方法包括:Please refer to FIG. 10 and FIG. 11, this application also provides a second method for preparing a substrate, and the method includes:
S1,提供基板11和阻焊材料,其中,基板11包括安装面111。具体的,基板11为由金属铜制成的铜基板,所述阻焊材料为聚四氟乙烯涂层材料。S1, a substrate 11 and solder resist materials are provided, wherein the substrate 11 includes a mounting surface 111. Specifically, the substrate 11 is a copper substrate made of metallic copper, and the solder resist material is a polytetrafluoroethylene coating material.
S2,通过所述阻焊材料在安装面111上形成限位框12,其中,限位框12在安装面111上围成限位区1111。具体的,包括:S2, forming a limit frame 12 on the mounting surface 111 by using the solder resist material, wherein the limit frame 12 encloses a limit area 1111 on the mounting surface 111. Specifically, including:
S201,提供一已经图案化的掩膜20。请参阅10,掩膜20的图案具有四个开口21,四个开口21的形状为L型,四个开口21在掩膜20上围设成一个预设限位区,预设限位区的尺寸依据电子元器件的尺寸而定。S201, providing a patterned mask 20. Please refer to 10, the pattern of the mask 20 has four openings 21, and the shape of the four openings 21 is L-shaped. The four openings 21 are surrounded by the mask 20 to form a preset limit area. The size depends on the size of the electronic components.
S202,通过掩膜20向安装面111上喷涂所述阻焊材料。具体的,利用掩膜20遮盖住安装面111,所述阻焊材料通过四个开口21在安装面111上沉积,其中,所述阻焊材料在安装面111上的沉积厚度在0.005~0.5mm之间。S202, spraying the solder resist material on the mounting surface 111 through the mask 20. Specifically, a mask 20 is used to cover the mounting surface 111, the solder resist material is deposited on the mounting surface 111 through the four openings 21, wherein the deposition thickness of the solder resist material on the mounting surface 111 is 0.005 to 0.5 mm between.
S203,对安装面111上喷涂有所述阻焊材料的基板11进行烘烤和烧结,以使在安装面11上的所述阻焊材料形成限位框12。具体的,本步骤包括:将安装 面111上喷涂有所述阻焊材料的基板11放入80℃烘箱烘烤,待水份蒸发干后,送至高温炉进行380℃~410℃烧结,烧结时间和温度控制根据情况来定。S203, baking and sintering the substrate 11 sprayed with the solder resist material on the mounting surface 111, so that the solder resist material on the mounting surface 11 forms a limit frame 12. Specifically, this step includes: putting the substrate 11 sprayed with the solder resist material on the mounting surface 111 into an oven at 80°C, and after the moisture evaporates, it is sent to a high-temperature furnace for sintering at 380°C to 410°C, and sintering Time and temperature control depends on the situation.
S204,对基板11进行化学镀或电镀镍或金,以形成第一保护层14和第二保护层15。S204, electroless plating or electroplating of nickel or gold is performed on the substrate 11 to form the first protective layer 14 and the second protective layer 15.
本实施例所述制备基底的方法中,在步骤S1之前,所述方法包括:In the method for preparing a substrate in this embodiment, before step S1, the method includes:
步骤S0,制备聚四氟乙烯涂层材料。具体的,聚合釜经清洗加入定量的无离子水,加入分散剂(如全氟辛酸铵等)、稳定剂(如石蜡、硅油等)、PH值调节剂(如磷酸铵、磷酸氢二钠等)。上好釜盖,启动搅拌进行抽空处理,氧含量合格后将釜内温升至一定温度,向釜内加入单体至釜内压力升至一定压力,从计量泵加入配方量的引发剂(如过硫酸铵、过硫酸钾等)溶液,加完后用一定量的无离子水清洗管道,保证引发剂溶液全部加入釜内。当釜内压力下降0.1MPa时视反应开始,同时补加单体使压力稳定在一定值。在反应过程中视反应情况启动自动降温系统。反应压力控制在一定范围内,反应温度控制在设定温度范围内。四氟乙烯单体反应量达到规定值后停止搅拌。回收单体并进行抽空处理,降温后开釜盖出料,送至后处理进行真空浓缩或沉降法浓缩,配制成固含量为60%的聚四氟乙烯乳液。Step S0, preparing a polytetrafluoroethylene coating material. Specifically, the polymerization kettle is cleaned and added with a quantitative amount of non-ionized water, and dispersants (such as ammonium perfluorooctanoate, etc.), stabilizers (such as paraffin, silicone oil, etc.), and pH regulators (such as ammonium phosphate, disodium hydrogen phosphate, etc.) are added. Put on the lid of the kettle, start stirring for evacuation treatment, raise the temperature in the kettle to a certain temperature after the oxygen content is qualified, add monomers to the kettle until the pressure in the kettle rises to a certain pressure, and add a formula amount of initiator from the metering pump (e.g. After adding ammonium persulfate, potassium persulfate, etc.), clean the pipeline with a certain amount of ion-free water to ensure that all the initiator solution is added to the kettle. When the pressure in the kettle drops by 0.1 MPa, the reaction starts, and monomers are added to stabilize the pressure at a certain value. During the reaction, the automatic cooling system is activated according to the reaction situation. The reaction pressure is controlled within a certain range, and the reaction temperature is controlled within the set temperature range. When the reaction volume of tetrafluoroethylene monomer reaches the specified value, the stirring is stopped. The monomers are recovered and evacuated, the temperature is lowered, and the kettle cover is opened to discharge the materials, and the materials are sent to the post-processing for vacuum concentration or sedimentation concentration to prepare a polytetrafluoroethylene emulsion with a solid content of 60%.
本申请还提供第三种基底的制备方法,所述方法包括:This application also provides a third method for preparing a substrate, the method includes:
S1,提供基板11和阻焊材料,其中,基板11包括安装面111。具体的,基板11为由金属铜制成的铜基板,所述阻焊材料为聚酰亚胺胶。S1, a substrate 11 and solder resist materials are provided, wherein the substrate 11 includes a mounting surface 111. Specifically, the substrate 11 is a copper substrate made of metallic copper, and the solder resist material is polyimide glue.
S2,通过所述阻焊材料在安装面111上形成限位框12,其中,限位框12在安装面111上围成限位区1111。具体的,包括:S2, forming a limit frame 12 on the mounting surface 111 by using the solder resist material, wherein the limit frame 12 encloses a limit area 1111 on the mounting surface 111. Specifically, including:
S201,请参阅图12,提供一钢网30,其中,钢网30上开设有多个间隔设置的开口31。请参阅12,钢网30的图案具有八个开口31,其中,四个开口31的形状为L型,四个开口31的形状为一字型,L型和一字型的开口31间隔交错设置,八个开口31在钢网30上围设成一个预设限位区,预设限位区的尺寸依据电子元器件的尺寸而定。S201, please refer to FIG. 12, a steel net 30 is provided, wherein a plurality of openings 31 arranged at intervals are opened on the steel net 30. Please refer to 12, the pattern of the steel mesh 30 has eight openings 31, of which the shape of the four openings 31 is L-shaped, the shape of the four openings 31 is a straight shape, and the L-shaped and straight-shaped openings 31 are alternately arranged at intervals , The eight openings 31 are enclosed on the steel mesh 30 to form a preset limit area, and the size of the preset limit area is determined according to the size of the electronic component.
S202,通过钢网30在安装面111上印刷所述阻焊材料。具体的,将聚酰亚胺胶通过钢网印刷的方式印刷到安装面111上。S202, printing the solder resist material on the mounting surface 111 through the steel mesh 30. Specifically, the polyimide glue is printed on the mounting surface 111 by means of stencil printing.
S203,对安装面111上印刷有所述阻焊材料的基板11进行烘烤,以使在安装面111上的所述阻焊材料形成限位框12。具体的,本步骤包括:拿掉钢网30, 将安装面111上印刷有聚酰亚胺胶的基板11在150℃预烘干溶剂后再放入烘箱内320℃高温聚合,以使聚酰亚胺胶形成限位框12。S203, baking the substrate 11 on which the solder resist material is printed on the mounting surface 111, so that the solder resist material on the mounting surface 111 forms a limit frame 12. Specifically, this step includes: removing the steel mesh 30, pre-drying the substrate 11 with polyimide glue printed on the mounting surface 111 at 150°C, and then putting it in an oven for polymerization at a high temperature of 320°C to make the polyamide The imine glue forms the limit frame 12.
本实施例所述基底的制备方法,还包括:The preparation method of the substrate in this embodiment further includes:
步骤S3,在安装面111上形成第一保护层14。具体的,采用化学镀或电镀的方式在安装面111上形成由镍或金制成的第一保护层14,同时,基板11的底面12上形成有第二保护层15。需要说明的是,在本实施例的其他实施方式中,在安装面111上形成第一保护层14可以在步骤S2之前。In step S3, a first protective layer 14 is formed on the mounting surface 111. Specifically, the first protective layer 14 made of nickel or gold is formed on the mounting surface 111 by electroless plating or electroplating, and at the same time, the second protective layer 15 is formed on the bottom surface 12 of the substrate 11. It should be noted that in other implementations of this embodiment, the formation of the first protective layer 14 on the mounting surface 111 may be performed before step S2.
本实施例所述基底的制备方法,在步骤S1之前,还包括:Before step S1, the method for preparing the substrate in this embodiment further includes:
步骤S0,合成聚酰亚胺胶。具体的,如图13所示,以4-苯乙炔基苯酐(PEPA)为封端剂,采用高温一步法合成了基于含砜二酐单体3,3,4,4-二苯砜四羧酸二酐(DSDA)、间苯二胺(m-PDA)及含氟二胺1,4-双(2-三氟甲基-4-氨基苯氧基)苯(6FAPB)的系列聚酰亚胺预聚物。通过改变混合二胺的配比以调控分子主链结构,预聚物的计算分子量为1500~5000。将预聚物溶解在DMF溶剂里制备成粘稠的胶水。Step S0, synthesize polyimide glue. Specifically, as shown in Figure 13, using 4-phenylethynyl phthalic anhydride (PEPA) as the end-capping agent, the sulfone-containing dianhydride monomer 3,3,4,4-diphenylsulfone tetracarboxylic acid was synthesized by a high-temperature one-step method. A series of polyimides of acid dianhydride (DSDA), m-phenylenediamine (m-PDA) and fluorine-containing diamine 1,4-bis(2-trifluoromethyl-4-aminophenoxy)benzene (6FAPB) Amine prepolymer. By changing the ratio of the mixed diamine to control the molecular backbone structure, the calculated molecular weight of the prepolymer is 1500-5000. Dissolve the prepolymer in DMF solvent to prepare a viscous glue.
以上所揭露的仅为本发明较佳实施例而已,当然不能以此来限定本发明之权利范围,本领域普通技术人员可以理解实现上述实施例的全部或部分流程,并依本发明权利要求所作的等同变化,仍属于发明所涵盖的范围。The above-disclosed are only the preferred embodiments of the present invention. Of course, the scope of rights of the present invention cannot be limited by this. Those of ordinary skill in the art can understand all or part of the procedures for implementing the above-mentioned embodiments and make them in accordance with the claims of the present invention. The equivalent change of is still within the scope of the invention.
Claims (13)
- 一种用于焊接电子元器件的基底,其特征在于,包括基板和由阻焊材料制成的限位框,所述基板包括安装面,所述限位框固定于所述安装面上,并在所述安装面上围成限位区,所述限位区用于定位所述电子元器件于所述安装面上以辅助所述电子元器件与所述基板焊接。A base for welding electronic components, which is characterized by comprising a substrate and a limit frame made of solder resist material, the substrate includes a mounting surface, the limit frame is fixed on the mounting surface, and A limit zone is enclosed on the mounting surface, and the limit zone is used for positioning the electronic component on the mounting surface to assist the soldering of the electronic component with the substrate.
- 如权利要求1所述的基底,其特征在于,所述限位框上开设有至少一个缺口,所述至少一个缺口与所述限位区连通。5. The substrate according to claim 1, wherein at least one gap is formed on the limit frame, and the at least one gap is connected with the limit area.
- 如权利要求1所述的基底,其特征在于,所述限位框包括多个限位部,多个所述限位部间隔设置于所述安装面上以围设成所述限位区。The substrate according to claim 1, wherein the limit frame includes a plurality of limit portions, and the plurality of limit portions are arranged on the mounting surface at intervals to enclose the limit area.
- 如权利要求1~3任一项所述的基底,其特征在于,所述限位框为四边形。5. The substrate according to any one of claims 1 to 3, wherein the limit frame is quadrilateral.
- 如权利要求1所述的基底,其特征在于,所述基底的安装面与所述限位框之间通过连接层连接。The substrate according to claim 1, wherein the mounting surface of the substrate and the limit frame are connected by a connecting layer.
- 如权利要求1任一项所述的基底,其特征在于,所述安装面上设有第一保护层,所述第一保护层包括位于所述限位区内的第一子保护层,所述第一子保护层背离所述安装面的表面用于焊接所述电子元器件。The substrate according to any one of claims 1, wherein a first protective layer is provided on the mounting surface, and the first protective layer includes a first sub-protective layer located in the limit area, so The surface of the first sub-protection layer facing away from the mounting surface is used for welding the electronic components.
- 如权利要求6所述的基底,其特征在于,所述第一保护层还包括位于所述限位区外的第二子保护层,所述第二子保护层用于保护位于所述限位区外的基板。7. The substrate according to claim 6, wherein the first protective layer further comprises a second sub-protection layer located outside the limit area, and the second sub-protection layer is used to protect Substrate outside the zone.
- 一种半导体装置,其特征在于,包括电子元器件和如权利要求1~7任一项所述的基底,所述电子元器件定位于所述限位区内并焊接固定于所述基底的安装面上。A semiconductor device, characterized by comprising electronic components and the substrate according to any one of claims 1 to 7, and the electronic components are positioned in the limit area and welded and fixed to the substrate. Surface.
- 如权利要求8所述的半导体装置,其特征在于,所述半导体装置还包括散热器,所述散热器安装于所述基板背离所述电子元器件的表面。8. The semiconductor device according to claim 8, wherein the semiconductor device further comprises a heat sink, and the heat sink is mounted on a surface of the substrate away from the electronic components.
- 一种用于焊接电子元器件的基底的制备方法,用于制备如权利要求1~7任一项所述的基底,其特征在于,所述方法包括:A method for preparing a substrate for welding electronic components, which is used for preparing the substrate according to any one of claims 1 to 7, wherein the method comprises:提供基板和阻焊材料,其中,所述基板包括安装面;Provide a substrate and solder resist material, wherein the substrate includes a mounting surface;通过所述阻焊材料在所述安装面上形成限位框,其中,所述限位框在所述安装面上围成限位区。A limit frame is formed on the mounting surface by the solder resist material, wherein the limit frame encloses a limit area on the mounting surface.
- 如权利要求10所述的基底的制备方法,其特征在于,所述通过所述阻焊材料在所述安装面上形成限位框,包括:9. The method for preparing a substrate according to claim 10, wherein said forming a limit frame on said mounting surface by said solder resist material comprises:将所述阻焊材料放置于所述安装面上;Placing the solder mask material on the mounting surface;对所述安装面上放置有所述阻焊材料的基板进行高温烧结,以使所述阻焊材料与所述安装面接触的部分与所述基板反应形成连接层,所述阻焊材料的其它部分形成限位框。The substrate on which the solder resist material is placed on the mounting surface is sintered at a high temperature, so that the part of the solder resist material in contact with the mounting surface reacts with the substrate to form a connection layer. Part of the limit frame is formed.
- 如权利要求10所述的基底的制备方法,其特征在于,所述通过所述阻焊材料在所述安装面上形成限位框,包括:9. The method for preparing a substrate according to claim 10, wherein said forming a limit frame on said mounting surface by said solder resist material comprises:提供一掩膜,其中,所述掩膜上开设有多个间隔设置的开口;Providing a mask, wherein the mask is provided with a plurality of openings arranged at intervals;通过所述掩膜向所述安装面上喷涂所述阻焊材料;Spraying the solder resist material on the mounting surface through the mask;对所述安装面上喷涂有所述阻焊材料的基板进行烘烤和烧结,以使在所述安装面上的所述阻焊材料形成限位框。Baking and sintering the substrate coated with the solder resist material on the mounting surface, so that the solder resist material on the mounting surface forms a limit frame.
- 如权利要求如权利要求10所述的基底的制备方法,其特征在于,所述通过所述阻焊材料在所述安装面上形成限位框,包括:10. The method for preparing a substrate according to claim 10, wherein said forming a limit frame on said mounting surface by said solder resist material comprises:提供一钢网,其中,所述钢网上开设有多个间隔设置的开口;A steel net is provided, wherein a plurality of openings arranged at intervals are opened on the steel net;通过所述钢网在所述安装面上印刷所述阻焊材料;Printing the solder mask material on the mounting surface through the steel mesh;对所述安装面上印刷有所述阻焊材料的基板进行烘烤,以使在所述安装面上的所述阻焊材料形成限位框。Baking the substrate on which the solder resist material is printed on the mounting surface, so that the solder resist material on the mounting surface forms a limit frame.
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