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WO2018195831A1 - Control method, control apparatus and optic inspection device - Google Patents

Control method, control apparatus and optic inspection device Download PDF

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Publication number
WO2018195831A1
WO2018195831A1 PCT/CN2017/082066 CN2017082066W WO2018195831A1 WO 2018195831 A1 WO2018195831 A1 WO 2018195831A1 CN 2017082066 W CN2017082066 W CN 2017082066W WO 2018195831 A1 WO2018195831 A1 WO 2018195831A1
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WO
WIPO (PCT)
Prior art keywords
camera module
module
pixel array
image sensor
photosensitive pixel
Prior art date
Application number
PCT/CN2017/082066
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French (fr)
Chinese (zh)
Inventor
赵小虎
Original Assignee
深圳市柔宇科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 深圳市柔宇科技有限公司 filed Critical 深圳市柔宇科技有限公司
Priority to CN201780004662.8A priority Critical patent/CN108521825B/en
Priority to PCT/CN2017/082066 priority patent/WO2018195831A1/en
Publication of WO2018195831A1 publication Critical patent/WO2018195831A1/en

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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/0002Inspection of images, e.g. flaw detection
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/50Depth or shape recovery
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith

Definitions

  • the present invention relates to the field of optical detection technologies, and in particular, to a control method, a control device, and an optical detection device.
  • the existing AOI (Automatic Optic Inspection) device has only one focal plane. If you want to obtain 3D image data, you need a Z-axis motor to drive the AOI device to move, so that the focal plane moves up and down, and multiple scans are required.
  • the algorithm superimposes image data of different focal planes to obtain 3D image data. On the one hand, this method is limited by the Z-axis accuracy and the accuracy of the motor, and cannot accurately control the movement of the AOI device; on the other hand, it is necessary to scan back and forth multiple times, and cannot scan at high speed.
  • the present invention aims to at least solve one of the technical problems existing in the related art. To this end, embodiments of the present invention are required to provide a control method, a control device, and an optical detecting device.
  • the control method of the embodiment of the present invention is used for an optical detecting device, the optical detecting device includes an imaging device, and the imaging device includes a camera module with an adjustable tilt angle, and the camera module includes an image sensor and a lens module.
  • the image sensor is disposed on an image side of the lens module, and the control method includes the following steps:
  • the image data is processed to form a depth image.
  • the control method of the embodiment of the present invention can obtain image data of different Z-axis heights by performing one scan by tilting the camera module at a certain angle with respect to the object to be detected, and finally the superposition process can form a 3D image.
  • the photosensitive pixel array includes a multi-level pixel
  • the step of tilting the image sensor by a certain angle specifically includes:
  • the camera module is tilted at an angle such that a difference between a height difference of the multi-level pixels and a height of the object to be detected is within a set range.
  • the photosensitive pixel array includes a multi-level pixel
  • the step of partitioning the photosensitive pixel array of the image sensor into a plurality of scanning units specifically includes:
  • the photosensitive pixel array is partitioned such that adjacent predetermined order pixels form one of the scanning units.
  • a control device is used for an optical detecting device, the optical detecting device comprising an imaging device and a driving device, the imaging device comprising a camera module with an adjustable tilt angle, the camera module comprising an image sensor and a lens a module, the image sensor is disposed on an image side of the lens module, and the control device includes:
  • control module is configured to control the driving device to drive the camera module to tilt at a certain angle with respect to the object to be detected;
  • a partitioning module configured to partition the photosensitive pixel array of the image sensor into a plurality of scanning units
  • a scanning module configured to scan data output by the plurality of scanning units to obtain image data having different depth information
  • a processing module for processing the image data to form a depth image.
  • the control device of the embodiment of the present invention can obtain image data of different Z-axis heights by performing one scan by tilting the camera module at a certain angle with respect to the object to be detected, and finally the superimposition process can form a 3D image.
  • the photosensitive pixel array includes multi-level pixels
  • the control module includes:
  • An estimating unit configured to estimate a height of the object to be detected
  • control unit configured to control the driving device to drive the camera module to be inclined by a certain angle such that a difference between a height difference of the multi-level pixel and a height of the object to be detected is set Within the range.
  • the photosensitive pixel array includes multi-level pixels
  • the partitioning module includes:
  • a partitioning unit for partitioning the photosensitive pixel array such that adjacent predetermined order pixels form one of the scanning units.
  • An imaging device and a driving device comprising a camera module with an adjustable tilt angle, the camera module comprising an image sensor and a lens module, the image sensor being disposed on an image side of the lens module,
  • the image sensor includes an array of photosensitive pixels, the photosensitive pixel array being partitioned to form a plurality of scanning units;
  • control device is configured to control the driving device to drive the camera module to tilt at a certain angle with respect to the object to be detected, and scan data output by the plurality of scanning units to obtain image data having different depth information, And for processing the image data to form a depth image.
  • the optical detecting device of the embodiment of the present invention tilts the camera module by a certain angle with respect to the object to be detected
  • the degree is such that image data of different Z-axis heights can be obtained by performing one scan, and finally the superimposition process can form a 3D image.
  • the photosensitive pixel array includes multi-level pixels, and the camera module is tilted at an angle such that a difference between a height difference of the multi-level pixels and a height of the object to be detected Within the setting range.
  • the photosensitive pixel array includes multi-level pixels, and adjacent predetermined-order pixels form one of the scanning units.
  • An imaging device and a driving device includes a camera module with an adjustable tilt angle, the camera module includes an image sensor and a lens module, and the image sensor is disposed on an image side of the lens module;
  • a memory for storing instructions
  • a processor for executing the instructions to:
  • the image data is processed to form a depth image.
  • the optical detecting device of the embodiment of the present invention can obtain image data of different Z-axis heights by performing one scan by tilting the camera module at a certain angle with respect to the object to be detected, and finally the superimposing process can form a 3D image.
  • the photosensitive pixel array includes multi-level pixels, and the processor is further configured to:
  • the photosensitive pixel array includes multi-level pixels, and the processor is further configured to:
  • the photosensitive pixel array is partitioned such that adjacent predetermined order pixels form one of the scanning units.
  • FIG. 1 is a schematic flow chart of a control method according to an embodiment of the present invention.
  • FIG. 2 is a schematic diagram of functional blocks of a control device according to an embodiment of the present invention.
  • FIG. 3 is a schematic diagram of functional modules of an optical detecting device according to an embodiment of the present invention.
  • FIG. 4 is a schematic diagram of a scene of an optical detecting device according to an embodiment of the present invention.
  • FIG. 5 is a schematic structural view of a photosensitive pixel array according to an embodiment of the present invention.
  • FIG. 6 is a flow chart showing a control method according to another embodiment of the present invention.
  • FIG. 7 is a schematic flow chart of a control method according to still another embodiment of the present invention.
  • FIG. 8 is a schematic diagram of functional blocks of an optical detecting apparatus according to another embodiment of the present invention.
  • Control device 10 control module 11, estimation unit 112, control unit 114, partition module 12, partition unit 122, scanning module 13, processing module 14, imaging device 20, camera module 20a, image sensor 21, photosensitive pixel array 212, The scanning unit 212a, the pixel 2122, the lens module 22, the lens 221, the lens 222, the memory 30, the processor 40, the driving device 50, the optical detecting device 100, the object to be detected 200, and the stage 300.
  • first and second are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated.
  • features defining “first” or “second” may include one or more of the described features either explicitly or implicitly.
  • the meaning of "a plurality" is two or more unless specifically defined otherwise.
  • the terms “installation”, “connected”, and “connected” should be understood broadly, and may be a fixed connection, for example, or They are detachable or integrally connected; they can be mechanically connected, they can be electrically connected or can communicate with each other; they can be connected directly or indirectly through an intermediate medium, which can be internal or two components of two components. Interaction relationship.
  • an intermediate medium which can be internal or two components of two components. Interaction relationship.
  • the optical detecting device includes an imaging device.
  • the imaging device includes a camera module with an adjustable tilt angle.
  • the camera module includes an image sensor and a lens module.
  • the image sensor is disposed on the image side of the lens module.
  • the control method includes the following steps:
  • S13 Scan data output by the plurality of scanning units to obtain image data having different depth information
  • the control device 10 of the embodiment of the present invention is used in the optical detecting apparatus 100 of the embodiment of the present invention.
  • the optical detecting apparatus 100 includes an imaging device 20 and a driving device 50.
  • the imaging device 20 includes a camera module 20a whose tilt angle is adjustable.
  • the camera module 20a includes an image sensor 21 and a lens module 22.
  • the image sensor 21 is disposed on the image side of the lens module 22.
  • the control device 10 includes a control module 11, a partitioning module 12, a scanning module 13, and a processing module 14.
  • the control method of the embodiment of the present invention can be realized by the control device 10 of the embodiment of the present invention.
  • S11 can be implemented by control module 11
  • S12 can be implemented by partition module 12
  • S13 can be implemented by scan module 13
  • S14 can be implemented by processing module 14.
  • control module 11 can be used to control the driving device 50 to drive the camera module 20a to be inclined at an angle relative to the object to be detected 200.
  • the partition module 12 can be used to partition the photosensitive pixel array 212 of the image sensor 21 into a plurality of scanning units 212a.
  • the scanning module 13 can be used to scan data output by the plurality of scanning units 212a to obtain image data having different depth information.
  • Processing module 14 can be used to process image data to form a depth image.
  • the control method and the control device 10 of the embodiment of the present invention can obtain image data of different Z-axis heights by performing one scan by tilting the camera module 20a at a certain angle with respect to the object to be detected 200, and finally superimposing processing can form 3D. image.
  • the optical inspection device 100 is an AOI (Automatic Optic Inspection) device.
  • the optical detecting apparatus 100 includes an optical portion and an image processing portion.
  • the optical detecting apparatus 100 obtains an image to be detected through an optical portion; analyzes, processes, and judges through the image processing portion.
  • the image processing section can be calculated and judged by software using various calculation methods.
  • the image sensor 21 may be a CCD (Charge Coupled Device) or a CMOS (Complementary Metal-Oxide Semiconductor).
  • CCD Charge Coupled Device
  • CMOS Complementary Metal-Oxide Semiconductor
  • the image sensor 21 of the embodiment of the present invention illustrates the working principle by taking a 12K*256 TDI CCD currently on the market as an example.
  • the object to be tested 200 is a foreign matter in the encapsulation film in a TFE (thin film encapsulation) process.
  • the optical detecting device 100 is for detecting the foreign matter and finally forming a 3D image.
  • the image sensor 21 is disposed on the image side of the lens module 22.
  • the lens module 22 includes a lens 221 and a lens 222 disposed between the lens 221 and the object to be detected 200.
  • Lens 222 is used to concentrate light onto image sensor 21, which is used to convert an optical signal into a digital electrical signal.
  • the driving device 50 is coupled to the image sensor 21 and the lens module 22.
  • the control module 11 is configured to control the driving device 50 to drive the image sensor 21 and the lens module 22 to be tilted at an angle relative to the object to be detected 200 to complete S11.
  • the drive device 50 can be a motor.
  • S11 can also be an artificial operation, that is, artificially tilting the camera module 20a at an angle relative to the object to be detected 200.
  • the photosensitive pixel array 212 is then structured to form a plurality of scanning units 212a. As such, different Z-axis heights of the object to be detected 200 will be focused on the same scanning unit 212a on the image sensor 21. Image data of different Z-axis heights can be obtained by one scan, and finally image data of the plurality of scanning units 212a is combined to form a depth image.
  • S12 can be partitioned by the manufacturer when manufacturing the image sensor 21, and it is not necessary to perform this step each time the optical detecting device 100 is used to detect the object to be detected 200.
  • control method, the control device 10, and the optical detecting device 100 of the embodiments of the present invention are not limited to the above-mentioned fields, and can also be used in the fields of industrial biological quality detection, fingerprint comparison, multimedia technology, and the like.
  • the photosensitive pixel array includes multi-level pixels.
  • S11 specifically includes:
  • the camera module is tilted at an angle such that a difference between a height difference of the multi-level pixels and a height of the object to be detected is within a set range.
  • the photosensitive pixel array 212 includes multi-level pixels 2122.
  • the control module 11 includes an estimation unit 112 and a control unit 114. S112 may be implemented by estimation unit 112, which may be implemented by control unit 114.
  • the estimating unit 112 can be used to estimate the height of the object to be detected 200.
  • the control unit 114 can be used to control the driving device 50 to drive the camera module 20a to be inclined at an angle such that the difference between the height difference of the multi-level pixel 2122 and the height of the object to be detected 200 is within a set range.
  • the depth image of the object to be detected 200 is more intuitive and accurate.
  • the height difference of the multi-level pixels 2122 is equal to or approximately equal to the height of the object to be detected 200.
  • the optical axis of the lens module 22 is perpendicular to the image sensor 21. That is to say, the tilt angle of the lens module 22 coincides with the tilt angle of the image sensor 21, and the tilt angle of the image sensor 21 is the tilt angle of the camera module 20a.
  • the height of the analyte 200 is generally in the range of 1-10 mg.
  • the height h1 of the object to be detected 200 may be 8 megameters.
  • the angle ⁇ of the inclination of the camera module 20a or the angle ⁇ of the inclination of the image sensor 21 should be such that the height difference h2 of the multi-level pixels 2122 is 8 or 8 The difference is within the set range.
  • the image sensor 21 of the embodiment of the present invention is a photosensitive pixel array 212 of 12K*256, that is, the number of columns of the pixel 2122 is 12K, and the order or the number of rows is 256.
  • the length L of the image sensor 21 is 6.2 cm.
  • the object to be detected 200 of the embodiment of the present invention is placed on the stage 300 to maintain the balance and stability of the object to be detected 200, and the image sensor 21 is allowed to collect image data to form a stable and clear image.
  • the height of the object to be detected 200 is the distance between the tip of the object to be detected 200 to the bottom surface of the object to be detected 200 or the surface of the stage 300 carrying the object to be detected 200.
  • the photosensitive pixel array includes multi-level pixels.
  • S12 specifically includes:
  • S122 The photosensitive pixel array is partitioned such that adjacent predetermined order pixels form one scanning unit.
  • the photosensitive pixel array 212 includes multi-level pixels 2122.
  • the partition module 12 includes a partition unit 122. S122 can be implemented by partition unit 122.
  • the partition unit 122 can be used to partition the photosensitive pixel array 212 such that adjacent predetermined order pixels 2122 form one scanning unit 212a.
  • the general image sensor includes 128-order, 256-order or 512-order or higher-order pixels 2122.
  • the order S of the predetermined order is a multiple of 4
  • the multi-order pixel 2122 can be divided into an integer number of scanning units 212a.
  • the scanned image data can form a clear image, the imaging quality is high, and the scanning speed can be improved.
  • the optical detecting apparatus 100 of the embodiment of the present invention includes an imaging device 20, a driving device 50, and a control device 10.
  • the imaging device 20 includes a camera module 20a whose tilt angle is adjustable.
  • the camera module 20a includes an image sensor 21 and a lens module 22.
  • the image sensor 21 is disposed on the image side of the lens module 22.
  • Image sensor 21 includes a photosensitive pixel array 212.
  • the photosensitive pixel array 212 is partitioned to form a plurality of scanning units 212a.
  • Control The device 10 is configured to control the driving device 50 to drive the camera module 20a to tilt at a certain angle with respect to the object to be detected 200, scan the data output by the plurality of scanning units 212a to obtain image data having different depth information, and process the image data to form Depth image.
  • the optical detecting apparatus 100 of the embodiment of the present invention can obtain image data of different Z-axis heights by performing one scan by tilting the camera module 20a at a certain angle with respect to the object to be detected 200. Finally, the superimposing process can form a 3D image.
  • control method and control device 10 is also applicable to the optical detecting device 100 of the embodiment of the present invention, and will not be developed in detail herein.
  • the photosensitive pixel array 212 includes multi-level pixels 2122.
  • the camera module 20a is inclined at an angle such that the difference between the height difference of the multi-level pixel 2122 and the height of the object to be detected 200 is within a set range.
  • control method and control device 10 is also applicable to the optical detecting device 100 of the embodiment of the present invention, and will not be developed in detail herein.
  • the photosensitive pixel array 212 includes multi-level pixels 2122. Adjacent predetermined order pixels 2122 form a scanning unit 212a.
  • control method and control device 10 is also applicable to the optical detecting device 100 of the embodiment of the present invention, and will not be developed in detail herein.
  • control method and control device 10 is also applicable to the optical detecting device 100 of the embodiment of the present invention, and will not be developed in detail herein.
  • an optical detecting apparatus 100 includes an imaging device 20, a driving device 50, a memory 30, and a processor 40.
  • the imaging device 20 includes a camera module 20a whose tilt angle is adjustable.
  • the camera module 20a includes an image sensor 21 and a lens module 22.
  • the image sensor 21 is disposed on the image side of the lens module 22.
  • the memory 30 is used to store instructions.
  • the processor 40 is configured to execute instructions to: control the driving device 50 to drive the camera module 20a to be tilted at an angle relative to the object to be detected 200; partition the photosensitive pixel array 212 of the image sensor 21 into a plurality of scanning units 212a; scan multiple The data output by the scanning unit 212a is used to obtain image data having different depth information; and the image data is processed to form a depth image.
  • the optical detecting apparatus 100 of the embodiment of the present invention can obtain image data of different Z-axis heights by performing one scan by tilting the camera module 20a at a certain angle with respect to the object to be detected 200. Finally, the superimposing process can form a 3D image.
  • the memory 30 is used to store instructions and data.
  • the processor 40 is configured to process instructions, perform operations, Control time and process data, etc.
  • the processor 40 can generate corresponding operational control signals according to the function of the instructions, and send them to the corresponding components, thereby controlling the components to operate according to the requirements of the instructions.
  • control method and control device 10 is also applicable to the optical detecting device 100 of the embodiment of the present invention, and will not be developed in detail herein.
  • the photosensitive pixel array 212 includes multi-level pixels 2122.
  • the processor 40 is further configured to:
  • the control driving device 50 drives the camera module 20a to be inclined at an angle such that the difference between the height difference of the multi-level pixel 2122 and the height of the object to be detected 200 is within a set range.
  • control method and control device 10 is also applicable to the optical detecting device 100 of the embodiment of the present invention, and will not be developed in detail herein.
  • the photosensitive pixel array 212 includes multi-level pixels 2122.
  • the processor 40 is further configured to partition the photosensitive pixel array 212 such that adjacent predetermined order pixels 2122 form one scanning unit 212a.
  • control method and control device 10 is also applicable to the optical detecting device 100 of the embodiment of the present invention, and will not be developed in detail herein.
  • control method and control device 10 is also applicable to the optical detecting device 100 of the embodiment of the present invention, and will not be developed in detail herein.
  • a "computer-readable medium” can be any apparatus that can contain, store, communicate, propagate, or transport a program for use in an instruction execution system, apparatus, or device, or in conjunction with the instruction execution system, apparatus, or device.
  • computer readable media include the following: electrical connections (electronic devices) having one or more wires, portable computer disk cartridges (magnetic devices), random access memory (RAM), Read only memory (ROM), erasable editable read only memory (EPROM or flash memory), fiber optic devices, and portable compact disk read only memory (CDROM).
  • the computer readable medium may even be a paper or other suitable medium on which the program can be printed, as it may be optically scanned, for example by paper or other medium, followed by editing, interpretation or, if appropriate, other suitable The method is processed to obtain the program electronically and then stored in computer memory.
  • portions of the embodiments of the invention may be implemented in hardware, software, firmware or a combination thereof.
  • multiple steps or methods may be implemented in software or firmware stored in a memory and executed by a suitable instruction execution system.
  • a suitable instruction execution system For example, if implemented in hardware, as in another embodiment, it can be implemented by any one or combination of the following techniques well known in the art: having logic gates for implementing logic functions on data signals. Discrete logic circuits, application specific integrated circuits with suitable combinational logic gates, programmable gate arrays (PGAs), field programmable gate arrays (FPGAs), etc.
  • each functional unit in each embodiment of the present invention may be integrated into one processing module, or each unit may exist physically separately, or two or more units may be integrated into one module.
  • the above integrated modules can be implemented in the form of hardware or in the form of software functional modules.
  • the integrated modules, if implemented in the form of software functional modules and sold or used as stand-alone products, may also be stored in a computer readable storage medium.
  • the above mentioned storage medium may be a read only memory, a magnetic disk or an optical disk or the like.

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Abstract

A control method, a control apparatus (10) and an optic inspection device (100). The optic inspection device (100) comprises an imaging apparatus (20), wherein the imaging apparatus (20) comprises a camera module (20a) having an adjustable tilting angle; the camera module (20a) comprises an image sensor (21) and a lens module (22); and the image sensor (21) is arranged on an image side of the lens module (22). The control method is used for the optic inspection device (100), and comprises the following steps: tilting a camera module (20a) at a certain angle relative to an object to be inspected (S11); partitioning a photosensitive pixel array of an image sensor (21) into a plurality of scanning units (S12); scanning data output by the plurality of scanning units to obtain image data having different depth information (S13); and processing the image data to form a depth image (S14).

Description

控制方法、控制装置和光学检测设备Control method, control device and optical detection device 技术领域Technical field
本发明涉及光学检测技术领域,特别涉及一种控制方法、控制装置和光学检测设备。The present invention relates to the field of optical detection technologies, and in particular, to a control method, a control device, and an optical detection device.
背景技术Background technique
现有的AOI(Automatic Optic Inspection,自动光学检测)设备只有一个焦平面,若想获得3D图像数据,需要Z轴马达带动AOI设备移动,从而使得焦平面上下移动,而且需要进行多次扫描,通过算法叠加不同的焦平面的图像数据来获得3D图像数据。这种方式一方面,受限于Z轴精度和马达的精度,无法精确地控制AOI设备的移动;另一方面,需要来回多次扫描,无法高速扫描。The existing AOI (Automatic Optic Inspection) device has only one focal plane. If you want to obtain 3D image data, you need a Z-axis motor to drive the AOI device to move, so that the focal plane moves up and down, and multiple scans are required. The algorithm superimposes image data of different focal planes to obtain 3D image data. On the one hand, this method is limited by the Z-axis accuracy and the accuracy of the motor, and cannot accurately control the movement of the AOI device; on the other hand, it is necessary to scan back and forth multiple times, and cannot scan at high speed.
发明内容Summary of the invention
本发明旨在至少解决相关技术中存在的技术问题之一。为此,本发明实施方式需要提供一种控制方法、控制装置和光学检测设备。The present invention aims to at least solve one of the technical problems existing in the related art. To this end, embodiments of the present invention are required to provide a control method, a control device, and an optical detecting device.
本发明实施方式的控制方法,用于光学检测设备,所述光学检测设备包括成像装置,所述成像装置包括倾斜角度可调的相机模组,所述相机模组包括图像传感器和镜头模组,所述图像传感器设置在所述镜头模组的像侧,所述控制方法包括以下步骤:The control method of the embodiment of the present invention is used for an optical detecting device, the optical detecting device includes an imaging device, and the imaging device includes a camera module with an adjustable tilt angle, and the camera module includes an image sensor and a lens module. The image sensor is disposed on an image side of the lens module, and the control method includes the following steps:
将所述相机模组相对于待检测物倾斜一定的角度;Tilting the camera module at an angle relative to the object to be detected;
将所述图像传感器的感光像素阵列分区形成多个扫描单元;Forming the photosensitive pixel array of the image sensor into a plurality of scanning units;
扫描所述多个扫描单元输出的数据以得到具有不同深度信息的图像数据;和Scanning data output by the plurality of scanning units to obtain image data having different depth information; and
处理所述图像数据以形成深度图像。The image data is processed to form a depth image.
本发明实施方式的控制方法,通过将相机模组相对于待检测物倾斜一定的角度,使得进行一次扫描即可获得不同Z轴高度的图像数据,最后叠加处理可形成3D图像。The control method of the embodiment of the present invention can obtain image data of different Z-axis heights by performing one scan by tilting the camera module at a certain angle with respect to the object to be detected, and finally the superposition process can form a 3D image.
在某些实施方式中,所述感光像素阵列包括多阶像素,所述将图像传感器倾斜一定的角度的步骤具体包括:In some embodiments, the photosensitive pixel array includes a multi-level pixel, and the step of tilting the image sensor by a certain angle specifically includes:
预估所述待检测物的高度;和Estimating the height of the object to be tested; and
将所述相机模组倾斜一定的角度以使所述多阶像素的高度差与所述待检测物的高度之间的差值在设定范围内。The camera module is tilted at an angle such that a difference between a height difference of the multi-level pixels and a height of the object to be detected is within a set range.
在某些实施方式中,所述感光像素阵列包括多阶像素,所述将所述图像传感器的感光像素阵列分区形成多个扫描单元的步骤具体包括: In some embodiments, the photosensitive pixel array includes a multi-level pixel, and the step of partitioning the photosensitive pixel array of the image sensor into a plurality of scanning units specifically includes:
将所述感光像素阵列分区以使相邻的预定阶像素形成一个所述扫描单元。The photosensitive pixel array is partitioned such that adjacent predetermined order pixels form one of the scanning units.
在某些实施方式中,所述预定阶满足条件:S=4K,其中,S表示所述预定阶的阶数,K≥1,K为整数。In some embodiments, the predetermined order satisfies the condition: S = 4K, where S represents the order of the predetermined order, K ≥ 1, and K is an integer.
本发明实施方式的控制装置,用于光学检测设备,所述光学检测设备包括成像装置和驱动装置,所述成像装置包括倾斜角度可调的相机模组,所述相机模组包括图像传感器和镜头模组,所述图像传感器设置在所述镜头模组的像侧,所述控制装置包括:A control device according to an embodiment of the present invention is used for an optical detecting device, the optical detecting device comprising an imaging device and a driving device, the imaging device comprising a camera module with an adjustable tilt angle, the camera module comprising an image sensor and a lens a module, the image sensor is disposed on an image side of the lens module, and the control device includes:
控制模块,所述控制模块用于控制所述驱动装置驱动所述相机模组相对于待检测物倾斜一定的角度;a control module, the control module is configured to control the driving device to drive the camera module to tilt at a certain angle with respect to the object to be detected;
分区模块,所述分区模块用于将所述图像传感器的感光像素阵列分区形成多个扫描单元;a partitioning module, configured to partition the photosensitive pixel array of the image sensor into a plurality of scanning units;
扫描模块,所述扫描模块用于扫描所述多个扫描单元输出的数据以得到具有不同深度信息的图像数据;和a scanning module, configured to scan data output by the plurality of scanning units to obtain image data having different depth information; and
处理模块,所述处理模块用于处理所述图像数据以形成深度图像。A processing module for processing the image data to form a depth image.
本发明实施方式的控制装置,通过将相机模组相对于待检测物倾斜一定的角度,使得进行一次扫描即可获得不同Z轴高度的图像数据,最后叠加处理可形成3D图像。The control device of the embodiment of the present invention can obtain image data of different Z-axis heights by performing one scan by tilting the camera module at a certain angle with respect to the object to be detected, and finally the superimposition process can form a 3D image.
在某些实施方式中,所述感光像素阵列包括多阶像素,所述控制模块包括:In some embodiments, the photosensitive pixel array includes multi-level pixels, and the control module includes:
估算单元,所述估算单元用于预估所述待检测物的高度;和An estimating unit, configured to estimate a height of the object to be detected; and
控制单元,所述控制单元用于控制所述驱动装置驱动所述相机模组倾斜一定的角度以使所述多阶像素的高度差与所述待检测物的高度的之间的差值在设定范围内。a control unit, configured to control the driving device to drive the camera module to be inclined by a certain angle such that a difference between a height difference of the multi-level pixel and a height of the object to be detected is set Within the range.
在某些实施方式中,所述感光像素阵列包括多阶像素,所述分区模块包括:In some embodiments, the photosensitive pixel array includes multi-level pixels, and the partitioning module includes:
分区单元,所述分区单元用于将所述感光像素阵列分区以使相邻的预定阶像素形成一个所述扫描单元。a partitioning unit for partitioning the photosensitive pixel array such that adjacent predetermined order pixels form one of the scanning units.
在某些实施方式中,所述预定阶满足条件:S=4K,其中,S表示所述预定阶的阶数,K≥1,K为整数。In some embodiments, the predetermined order satisfies the condition: S = 4K, where S represents the order of the predetermined order, K ≥ 1, and K is an integer.
本发明实施方式的光学检测设备,包括:An optical detecting device according to an embodiment of the present invention includes:
成像装置和驱动装置,所述成像装置包括倾斜角度可调的相机模组,所述相机模组包括图像传感器和镜头模组,所述图像传感器设置在所述镜头模组的像侧,所述图像传感器包括感光像素阵列,所述感光像素阵列分区形成多个扫描单元;和An imaging device and a driving device, the imaging device comprising a camera module with an adjustable tilt angle, the camera module comprising an image sensor and a lens module, the image sensor being disposed on an image side of the lens module, The image sensor includes an array of photosensitive pixels, the photosensitive pixel array being partitioned to form a plurality of scanning units; and
控制装置,所述控制装置用于控制所述驱动装置驱动所述相机模组相对于待检测物倾斜一定的角度,扫描所述多个扫描单元输出的数据以得到具有不同深度信息的图像数据,并用于处理所述图像数据以形成深度图像。a control device, the control device is configured to control the driving device to drive the camera module to tilt at a certain angle with respect to the object to be detected, and scan data output by the plurality of scanning units to obtain image data having different depth information, And for processing the image data to form a depth image.
本发明实施方式的光学检测设备,通过将相机模组相对于待检测物倾斜一定的角 度,使得进行一次扫描即可获得不同Z轴高度的图像数据,最后叠加处理可形成3D图像。The optical detecting device of the embodiment of the present invention tilts the camera module by a certain angle with respect to the object to be detected The degree is such that image data of different Z-axis heights can be obtained by performing one scan, and finally the superimposition process can form a 3D image.
在某些实施方式中,所述感光像素阵列包括多阶像素,所述相机模组倾斜一定的角度以使所述多阶像素的高度差与所述待检测物的高度的之间的差值在设定范围内。In some embodiments, the photosensitive pixel array includes multi-level pixels, and the camera module is tilted at an angle such that a difference between a height difference of the multi-level pixels and a height of the object to be detected Within the setting range.
在某些实施方式中,所述感光像素阵列包括多阶像素,相邻的预定阶像素形成一个所述扫描单元。In some embodiments, the photosensitive pixel array includes multi-level pixels, and adjacent predetermined-order pixels form one of the scanning units.
在某些实施方式中,所述预定阶满足条件:S=4K,其中,S表示所述预定阶的阶数,K≥1,K为整数。In some embodiments, the predetermined order satisfies the condition: S = 4K, where S represents the order of the predetermined order, K ≥ 1, and K is an integer.
本发明实施方式的光学检测设备,包括:An optical detecting device according to an embodiment of the present invention includes:
成像装置和驱动装置,所述成像装置包括倾斜角度可调的相机模组,所述相机模组包括图像传感器和镜头模组,所述图像传感器设置在所述镜头模组的像侧;An imaging device and a driving device, the imaging device includes a camera module with an adjustable tilt angle, the camera module includes an image sensor and a lens module, and the image sensor is disposed on an image side of the lens module;
存储器,所述存储器用于存储指令;和a memory for storing instructions; and
处理器,所述处理器用于执行所述指令以实现:a processor for executing the instructions to:
控制所述驱动装置驱动所述相机模组相对于待检测物倾斜一定的角度;Controlling the driving device to drive the camera module to tilt at a certain angle with respect to the object to be detected;
将所述图像传感器的感光像素阵列分区形成多个扫描单元;Forming the photosensitive pixel array of the image sensor into a plurality of scanning units;
扫描所述多个扫描单元输出的数据以得到具有不同深度信息的图像数据;和Scanning data output by the plurality of scanning units to obtain image data having different depth information; and
处理所述图像数据以形成深度图像。The image data is processed to form a depth image.
本发明实施方式的光学检测设备,通过将相机模组相对于待检测物倾斜一定的角度,使得进行一次扫描即可获得不同Z轴高度的图像数据,最后叠加处理可形成3D图像。The optical detecting device of the embodiment of the present invention can obtain image data of different Z-axis heights by performing one scan by tilting the camera module at a certain angle with respect to the object to be detected, and finally the superimposing process can form a 3D image.
在某些实施方式中,所述感光像素阵列包括多阶像素,所述处理器进一步用于:In some embodiments, the photosensitive pixel array includes multi-level pixels, and the processor is further configured to:
预估所述待检测物的高度;和Estimating the height of the object to be tested; and
控制所述驱动装置驱动所述相机模组倾斜一定的角度以使所述多阶像素的高度差与所述待检测物的高度之间的差值在设定范围内。Controlling the driving device to drive the camera module to be inclined at an angle such that a difference between a height difference of the multi-level pixels and a height of the object to be detected is within a set range.
在某些实施方式中,所述感光像素阵列包括多阶像素,所述处理器进一步用于:In some embodiments, the photosensitive pixel array includes multi-level pixels, and the processor is further configured to:
将所述感光像素阵列分区以使相邻的预定阶像素形成一个所述扫描单元。The photosensitive pixel array is partitioned such that adjacent predetermined order pixels form one of the scanning units.
在某些实施方式中,所述预定阶满足条件:S=4K,其中,S表示所述预定阶的阶数,K≥1,K为整数。In some embodiments, the predetermined order satisfies the condition: S = 4K, where S represents the order of the predetermined order, K ≥ 1, and K is an integer.
本发明实施方式的附加方面和优点将在下面的描述中部分给出,部分将从下面的描述中变得明显,或通过本发明的实践了解到。Additional aspects and advantages of the embodiments of the invention will be set forth in part in the description.
附图说明 DRAWINGS
本发明的上述和/或附加的方面和优点可以从结合下面附图对实施方式的描述中将变得明显和容易理解,其中:The above and/or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the appended claims
图1是本发明实施方式的控制方法的流程示意图。FIG. 1 is a schematic flow chart of a control method according to an embodiment of the present invention.
图2是本发明实施方式的控制装置的功能模块示意图。2 is a schematic diagram of functional blocks of a control device according to an embodiment of the present invention.
图3是本发明实施方式的光学检测设备的功能模块示意图。3 is a schematic diagram of functional modules of an optical detecting device according to an embodiment of the present invention.
图4是本发明实施方式的光学检测设备的场景示意图。4 is a schematic diagram of a scene of an optical detecting device according to an embodiment of the present invention.
图5是本发明实施方式的感光像素阵列的结构示意图。FIG. 5 is a schematic structural view of a photosensitive pixel array according to an embodiment of the present invention.
图6是本发明另一个实施方式的控制方法的流程示意图。6 is a flow chart showing a control method according to another embodiment of the present invention.
图7是本发明又一个实施方式的控制方法的流程示意图。FIG. 7 is a schematic flow chart of a control method according to still another embodiment of the present invention.
图8是本发明另一个实施方式的光学检测设备的功能模块示意图。FIG. 8 is a schematic diagram of functional blocks of an optical detecting apparatus according to another embodiment of the present invention.
主要元件及符号说明:Description of main components and symbols:
控制装置10、控制模块11、估算单元112、控制单元114、分区模块12、分区单元122、扫描模块13、处理模块14、成像装置20、相机模组20a、图像传感器21、感光像素阵列212、扫描单元212a、像素2122、镜头模组22、镜头221、镜片222、存储器30、处理器40、驱动装置50、光学检测设备100、待检测物200、载台300。 Control device 10, control module 11, estimation unit 112, control unit 114, partition module 12, partition unit 122, scanning module 13, processing module 14, imaging device 20, camera module 20a, image sensor 21, photosensitive pixel array 212, The scanning unit 212a, the pixel 2122, the lens module 22, the lens 221, the lens 222, the memory 30, the processor 40, the driving device 50, the optical detecting device 100, the object to be detected 200, and the stage 300.
具体实施方式detailed description
下面详细描述本发明的实施方式,所述实施方式的示例在附图中示出,其中,相同或类似的标号自始至终表示相同或类似的元件或具有相同或类似功能的元件。下面通过参考附图描述的实施方式是示例性的,仅用于解释本发明的实施方式,而不能理解为对本发明的实施方式的限制。The embodiments of the present invention are described in detail below, and the examples of the embodiments are illustrated in the drawings, wherein the same or similar reference numerals indicate the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the drawings are intended to be illustrative of the embodiments of the invention and are not to be construed as limiting.
此外,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个所述特征。在本发明的实施方式的描述中,“多个”的含义是两个或两个以上,除非另有明确具体的限定。Moreover, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, features defining "first" or "second" may include one or more of the described features either explicitly or implicitly. In the description of the embodiments of the present invention, the meaning of "a plurality" is two or more unless specifically defined otherwise.
在本发明的实施方式的描述中,需要说明的是,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接或可以相互通讯;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通或两个元件的相互作用关系。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本发明的实施方式中的具体含义。In the description of the embodiments of the present invention, it should be noted that the terms "installation", "connected", and "connected" should be understood broadly, and may be a fixed connection, for example, or They are detachable or integrally connected; they can be mechanically connected, they can be electrically connected or can communicate with each other; they can be connected directly or indirectly through an intermediate medium, which can be internal or two components of two components. Interaction relationship. For those skilled in the art, the specific meanings of the above terms in the embodiments of the present invention can be understood on a case-by-case basis.
下文的公开提供了许多不同的实施方式或例子用来实现本发明的实施方式的不同 结构。为了简化本发明的实施方式的公开,下文中对特定例子的部件和设置进行描述。当然,它们仅仅为示例,并且目的不在于限制本发明。此外,本发明的实施方式可以在不同例子中重复参考数字和/或参考字母,这种重复是为了简化和清楚的目的,其本身不指示所讨论各种实施方式和/或设置之间的关系。此外,本发明的实施方式提供了的各种特定的工艺和材料的例子,但是本领域普通技术人员可以意识到其他工艺的应用和/或其他材料的使用。The following disclosure provides many different embodiments or examples for implementing different embodiments of the present invention. structure. In order to simplify the disclosure of embodiments of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit the invention. In addition, the embodiments of the present invention may repeat reference numerals and/or reference letters in different examples, which are for the purpose of simplicity and clarity, and do not in themselves indicate the relationship between the various embodiments and/or arrangements discussed. . Moreover, embodiments of the present invention provide examples of various specific processes and materials, but one of ordinary skill in the art will recognize the use of other processes and/or the use of other materials.
请参阅图1,本发明实施方式的控制方法用于光学检测设备。光学检测设备包括成像装置。成像装置包括倾斜角度可调的相机模组。相机模组包括图像传感器和镜头模组。图像传感器设置在镜头模组的像侧。控制方法包括以下步骤:Referring to FIG. 1, a control method according to an embodiment of the present invention is used for an optical detecting apparatus. The optical detecting device includes an imaging device. The imaging device includes a camera module with an adjustable tilt angle. The camera module includes an image sensor and a lens module. The image sensor is disposed on the image side of the lens module. The control method includes the following steps:
S11:将相机模组相对于待检测物倾斜一定的角度;S11: tilting the camera module at a certain angle with respect to the object to be detected;
S12:将图像传感器的感光像素阵列分区形成多个扫描单元;S12: partitioning the photosensitive pixel array of the image sensor into a plurality of scanning units;
S13:扫描多个扫描单元输出的数据以得到具有不同深度信息的图像数据;和S13: Scan data output by the plurality of scanning units to obtain image data having different depth information; and
S14:处理图像数据以形成深度图像。S14: Processing the image data to form a depth image.
请参阅图2-图5,本发明实施方式的控制装置10用于本发明实施方式的光学检测设备100。光学检测设备100包括成像装置20和驱动装置50。成像装置20包括倾斜角度可调的相机模组20a。相机模组20a包括图像传感器21和镜头模组22。图像传感器21设置在镜头模组22的像侧。控制装置10包括控制模块11、分区模块12、扫描模块13和处理模块14。本发明实施方式的控制方法可由本发明实施方式的控制装置10实现。例如,S11可由控制模块11实现,S12可由分区模块12实现,S13可由扫描模块13实现,S14可由处理模块14实现。Referring to FIGS. 2-5, the control device 10 of the embodiment of the present invention is used in the optical detecting apparatus 100 of the embodiment of the present invention. The optical detecting apparatus 100 includes an imaging device 20 and a driving device 50. The imaging device 20 includes a camera module 20a whose tilt angle is adjustable. The camera module 20a includes an image sensor 21 and a lens module 22. The image sensor 21 is disposed on the image side of the lens module 22. The control device 10 includes a control module 11, a partitioning module 12, a scanning module 13, and a processing module 14. The control method of the embodiment of the present invention can be realized by the control device 10 of the embodiment of the present invention. For example, S11 can be implemented by control module 11, S12 can be implemented by partition module 12, S13 can be implemented by scan module 13, and S14 can be implemented by processing module 14.
也即是说,控制模块11可以用于控制驱动装置50驱动相机模组20a相对于待检测物200倾斜一定的角度。分区模块12可以用于将图像传感器21的感光像素阵列212分区形成多个扫描单元212a。扫描模块13可以用于扫描多个扫描单元212a输出的数据以得到具有不同深度信息的图像数据。处理模块14可以用于处理图像数据以形成深度图像。That is to say, the control module 11 can be used to control the driving device 50 to drive the camera module 20a to be inclined at an angle relative to the object to be detected 200. The partition module 12 can be used to partition the photosensitive pixel array 212 of the image sensor 21 into a plurality of scanning units 212a. The scanning module 13 can be used to scan data output by the plurality of scanning units 212a to obtain image data having different depth information. Processing module 14 can be used to process image data to form a depth image.
本发明实施方式的控制方法和控制装置10,通过将相机模组20a相对于待检测物200倾斜一定的角度,使得进行一次扫描即可获得不同Z轴高度的图像数据,最后叠加处理可形成3D图像。The control method and the control device 10 of the embodiment of the present invention can obtain image data of different Z-axis heights by performing one scan by tilting the camera module 20a at a certain angle with respect to the object to be detected 200, and finally superimposing processing can form 3D. image.
在一个例子中,光学检测设备100为AOI(Automatic Optic Inspection,自动光学检测)设备。光学检测设备100包括光学部分和图像处理部分。光学检测设备100通过光学部分获得需要检测的图像;通过图像处理部分来分析、处理和判断。图像处理部分可以通过软件采用各种的计算方法进行计算和判断。 In one example, the optical inspection device 100 is an AOI (Automatic Optic Inspection) device. The optical detecting apparatus 100 includes an optical portion and an image processing portion. The optical detecting apparatus 100 obtains an image to be detected through an optical portion; analyzes, processes, and judges through the image processing portion. The image processing section can be calculated and judged by software using various calculation methods.
在一个例子中,图像传感器21可为CCD(Charge Coupled Device,电荷耦合元件)或CMOS(Complementary Metal-Oxide Semiconductor,金属氧化物半导体元件)。In one example, the image sensor 21 may be a CCD (Charge Coupled Device) or a CMOS (Complementary Metal-Oxide Semiconductor).
本发明实施方式的图像传感器21以目前市面上的12K*256TDI CCD为例示意工作原理。待检测物200为在TFE(thin film encapsulation,薄膜封装)制程中,封装膜内的一些异物。光学检测设备100用于检测该异物并最终形成3D图像。The image sensor 21 of the embodiment of the present invention illustrates the working principle by taking a 12K*256 TDI CCD currently on the market as an example. The object to be tested 200 is a foreign matter in the encapsulation film in a TFE (thin film encapsulation) process. The optical detecting device 100 is for detecting the foreign matter and finally forming a 3D image.
图像传感器21设置在镜头模组22的像侧。镜头模组22包括镜头221和设置在镜头221和待检测物200之间的镜片222。镜片222用于汇聚光线至图像传感器21,图像传感器21用于将光学信号转化为数字电信号。The image sensor 21 is disposed on the image side of the lens module 22. The lens module 22 includes a lens 221 and a lens 222 disposed between the lens 221 and the object to be detected 200. Lens 222 is used to concentrate light onto image sensor 21, which is used to convert an optical signal into a digital electrical signal.
可以理解,在某些实施方式中,驱动装置50与图像传感器21及镜头模组22连接。控制模块11用于控制驱动装置50驱动图像传感器21及镜头模组22相对于待检测物200倾斜一定的角度,以完成S11。具体地,驱动装置50可为马达。当然,在某些实施方式中,S11也可为人为操作,即人为地将相机模组20a相对于待检测物200倾斜一定的角度。然后在结构上实现对感光像素阵列212分区形成多个扫描单元212a。如此,待检测物200的不同Z轴高度会在图像传感器21上的同一扫描单元212a聚焦。通过一次扫描可以获得不同Z轴高度的图像数据,最后将多个扫描单元212a的图像数据进行合并处理形成深度图像。It can be understood that in some embodiments, the driving device 50 is coupled to the image sensor 21 and the lens module 22. The control module 11 is configured to control the driving device 50 to drive the image sensor 21 and the lens module 22 to be tilted at an angle relative to the object to be detected 200 to complete S11. Specifically, the drive device 50 can be a motor. Of course, in some embodiments, S11 can also be an artificial operation, that is, artificially tilting the camera module 20a at an angle relative to the object to be detected 200. The photosensitive pixel array 212 is then structured to form a plurality of scanning units 212a. As such, different Z-axis heights of the object to be detected 200 will be focused on the same scanning unit 212a on the image sensor 21. Image data of different Z-axis heights can be obtained by one scan, and finally image data of the plurality of scanning units 212a is combined to form a depth image.
需要指出的是,S12可由厂家在制造图像传感器21时实现分区,无需在每次使用光学检测设备100检测待检测物200时执行该步骤。It should be noted that S12 can be partitioned by the manufacturer when manufacturing the image sensor 21, and it is not necessary to perform this step each time the optical detecting device 100 is used to detect the object to be detected 200.
当然,本发明实施方式的控制方法、控制装置10和光学检测设备100不限于用于上述领域,还可以用于工业生物品质检测、指纹比对、多媒体技术等领域。Of course, the control method, the control device 10, and the optical detecting device 100 of the embodiments of the present invention are not limited to the above-mentioned fields, and can also be used in the fields of industrial biological quality detection, fingerprint comparison, multimedia technology, and the like.
请参阅图6,在某些实施方式中,感光像素阵列包括多阶像素。S11具体包括:Referring to FIG. 6, in some embodiments, the photosensitive pixel array includes multi-level pixels. S11 specifically includes:
S112:预估待检测物的高度;和S112: estimating the height of the object to be detected; and
S114:将相机模组倾斜一定的角度以使多阶像素的高度差与待检测物的高度之间的差值在设定范围内。S114: The camera module is tilted at an angle such that a difference between a height difference of the multi-level pixels and a height of the object to be detected is within a set range.
请再次参阅图2、图4及图5,在某些实施方式中,感光像素阵列212包括多阶像素2122。控制模块11包括估算单元112和控制单元114。S112可由估算单元112实现,S114可由控制单元114实现。Referring again to FIGS. 2, 4, and 5, in some embodiments, the photosensitive pixel array 212 includes multi-level pixels 2122. The control module 11 includes an estimation unit 112 and a control unit 114. S112 may be implemented by estimation unit 112, which may be implemented by control unit 114.
也即是说,估算单元112可以用于预估待检测物200的高度。控制单元114可以用于控制驱动装置50驱动相机模组20a倾斜一定的角度以使多阶像素2122的高度差与待检测物200的高度的之间的差值在设定范围内。That is to say, the estimating unit 112 can be used to estimate the height of the object to be detected 200. The control unit 114 can be used to control the driving device 50 to drive the camera module 20a to be inclined at an angle such that the difference between the height difference of the multi-level pixel 2122 and the height of the object to be detected 200 is within a set range.
如此,待检测物200的深度图像更加直观和准确。As such, the depth image of the object to be detected 200 is more intuitive and accurate.
较佳地,多阶像素2122的高度差与待检测物200的高度相等或近似相等。 Preferably, the height difference of the multi-level pixels 2122 is equal to or approximately equal to the height of the object to be detected 200.
具体地,在本发明实施方式的示例中,镜头模组22的光轴垂直于图像传感器21。也即是说,镜头模组22的倾斜角度与图像传感器21的倾斜角度一致,图像传感器21的倾斜角度即为相机模组20a的倾斜角度。待检测物200的高度范围一般为1-10麦。例如,待检测物200的高度h1可以为8麦,如此,相机模组20a倾斜的角度α或者说图像传感器21倾斜的角度α应当使得多阶像素2122的高度差h2在8麦或与8麦的差值在设定的范围内。本发明实施方式的图像传感器21为12K*256的感光像素阵列212,即像素2122的列数为12K,阶数或行数为256,与之对应的,图像传感器21的长度L为6.2cm,宽度W为1.3mm。也即是说,图像传感器21倾斜的角度α应当使得第1阶至第256阶像素2122之间的高度差h2为8麦或与8麦的差值在设定的范围内,Sinα=h2/W。如此,可以确定相机模组20a倾斜的角度α或者说图像传感器21倾斜的角度α。Specifically, in the example of the embodiment of the present invention, the optical axis of the lens module 22 is perpendicular to the image sensor 21. That is to say, the tilt angle of the lens module 22 coincides with the tilt angle of the image sensor 21, and the tilt angle of the image sensor 21 is the tilt angle of the camera module 20a. The height of the analyte 200 is generally in the range of 1-10 mg. For example, the height h1 of the object to be detected 200 may be 8 megameters. Thus, the angle α of the inclination of the camera module 20a or the angle α of the inclination of the image sensor 21 should be such that the height difference h2 of the multi-level pixels 2122 is 8 or 8 The difference is within the set range. The image sensor 21 of the embodiment of the present invention is a photosensitive pixel array 212 of 12K*256, that is, the number of columns of the pixel 2122 is 12K, and the order or the number of rows is 256. Correspondingly, the length L of the image sensor 21 is 6.2 cm. The width W is 1.3 mm. That is to say, the angle α of the inclination of the image sensor 21 should be such that the height difference h2 between the first order and the 256th order pixels 2122 is 8 m or the difference with 8 m is within the set range, Sin α = h 2 / W. In this way, the angle α at which the camera module 20a is tilted or the angle α at which the image sensor 21 is tilted can be determined.
可以理解,本发明实施方式的待检测物200放在载台300上,以保持待检测物200的平衡和稳定,便于图像传感器21采集图像数据,形成稳定清晰的图像。待检测物200的高度即为待检测物200的顶端至待检测物200的底面或者说载台300承载待检测物200的表面之间的距离。It can be understood that the object to be detected 200 of the embodiment of the present invention is placed on the stage 300 to maintain the balance and stability of the object to be detected 200, and the image sensor 21 is allowed to collect image data to form a stable and clear image. The height of the object to be detected 200 is the distance between the tip of the object to be detected 200 to the bottom surface of the object to be detected 200 or the surface of the stage 300 carrying the object to be detected 200.
请参阅图7,在某些实施方式中,感光像素阵列包括多阶像素。S12具体包括:Referring to FIG. 7, in some embodiments, the photosensitive pixel array includes multi-level pixels. S12 specifically includes:
S122:将感光像素阵列分区以使相邻的预定阶像素形成一个扫描单元。S122: The photosensitive pixel array is partitioned such that adjacent predetermined order pixels form one scanning unit.
请再次参阅图2及图5,在某些实施方式中,感光像素阵列212包括多阶像素2122。分区模块12包括分区单元122。S122可由分区单元122实现。Referring again to FIGS. 2 and 5, in some embodiments, the photosensitive pixel array 212 includes multi-level pixels 2122. The partition module 12 includes a partition unit 122. S122 can be implemented by partition unit 122.
也即是说,分区单元122可以用于将感光像素阵列212分区以使相邻的预定阶像素2122形成一个扫描单元212a。That is, the partition unit 122 can be used to partition the photosensitive pixel array 212 such that adjacent predetermined order pixels 2122 form one scanning unit 212a.
如此,扫描速度更快。In this way, the scanning speed is faster.
在某些实施方式中,预定阶满足条件:S=4K,其中,S表示预定阶的阶数,K≥1,K为整数。In some embodiments, the predetermined order satisfies the condition: S = 4K, where S represents the order of the predetermined order, K ≥ 1, and K is an integer.
具体地,一般图像传感器包括128阶、256阶或512阶或更高阶像素2122。当预定阶的阶数S为4的倍数可以使得多阶像素2122被分为整数个扫描单元212a。而且,当至少4阶像素2122形成一个扫描单元212a时,扫描得到的图像数据能够形成清晰的图像,成像质量较高,且可以提高扫描速度。Specifically, the general image sensor includes 128-order, 256-order or 512-order or higher-order pixels 2122. When the order S of the predetermined order is a multiple of 4, the multi-order pixel 2122 can be divided into an integer number of scanning units 212a. Moreover, when at least the 4th order pixel 2122 forms one scanning unit 212a, the scanned image data can form a clear image, the imaging quality is high, and the scanning speed can be improved.
请再次参阅图3-5,本发明实施方式的光学检测设备100包括成像装置20、驱动装置50和控制装置10。成像装置20包括倾斜角度可调的相机模组20a。相机模组20a包括图像传感器21和镜头模组22。图像传感器21设置在镜头模组22的像侧。图像传感器21包括感光像素阵列212。感光像素阵列212分区形成多个扫描单元212a。控制 装置10用于控制驱动装置50驱动相机模组20a相对于待检测物200倾斜一定的角度,扫描多个扫描单元212a输出的数据以得到具有不同深度信息的图像数据,并用于处理图像数据以形成深度图像。Referring again to FIGS. 3-5, the optical detecting apparatus 100 of the embodiment of the present invention includes an imaging device 20, a driving device 50, and a control device 10. The imaging device 20 includes a camera module 20a whose tilt angle is adjustable. The camera module 20a includes an image sensor 21 and a lens module 22. The image sensor 21 is disposed on the image side of the lens module 22. Image sensor 21 includes a photosensitive pixel array 212. The photosensitive pixel array 212 is partitioned to form a plurality of scanning units 212a. Control The device 10 is configured to control the driving device 50 to drive the camera module 20a to tilt at a certain angle with respect to the object to be detected 200, scan the data output by the plurality of scanning units 212a to obtain image data having different depth information, and process the image data to form Depth image.
本发明实施方式的光学检测设备100,通过将相机模组20a相对于待检测物200倾斜一定的角度,使得进行一次扫描即可获得不同Z轴高度的图像数据,最后叠加处理可形成3D图像。The optical detecting apparatus 100 of the embodiment of the present invention can obtain image data of different Z-axis heights by performing one scan by tilting the camera module 20a at a certain angle with respect to the object to be detected 200. Finally, the superimposing process can form a 3D image.
需要指出的是,上述对控制方法和控制装置10的实施方式的解释说明也适用于本发明实施方式的光学检测设备100,在此不再详细展开。It should be noted that the above explanation of the embodiment of the control method and control device 10 is also applicable to the optical detecting device 100 of the embodiment of the present invention, and will not be developed in detail herein.
在某些实施方式中,感光像素阵列212包括多阶像素2122。相机模组20a倾斜一定的角度以使多阶像素2122的高度差与待检测物200的高度的之间的差值在设定范围内。In some embodiments, the photosensitive pixel array 212 includes multi-level pixels 2122. The camera module 20a is inclined at an angle such that the difference between the height difference of the multi-level pixel 2122 and the height of the object to be detected 200 is within a set range.
需要指出的是,上述对控制方法和控制装置10的实施方式的解释说明也适用于本发明实施方式的光学检测设备100,在此不再详细展开。It should be noted that the above explanation of the embodiment of the control method and control device 10 is also applicable to the optical detecting device 100 of the embodiment of the present invention, and will not be developed in detail herein.
在某些实施方式中,感光像素阵列212包括多阶像素2122。相邻的预定阶像素2122形成一个扫描单元212a。In some embodiments, the photosensitive pixel array 212 includes multi-level pixels 2122. Adjacent predetermined order pixels 2122 form a scanning unit 212a.
需要指出的是,上述对控制方法和控制装置10的实施方式的解释说明也适用于本发明实施方式的光学检测设备100,在此不再详细展开。It should be noted that the above explanation of the embodiment of the control method and control device 10 is also applicable to the optical detecting device 100 of the embodiment of the present invention, and will not be developed in detail herein.
在某些实施方式中,预定阶满足条件:S=4K,其中,S表示预定阶的阶数,K≥1,K为整数。In some embodiments, the predetermined order satisfies the condition: S = 4K, where S represents the order of the predetermined order, K ≥ 1, and K is an integer.
需要指出的是,上述对控制方法和控制装置10的实施方式的解释说明也适用于本发明实施方式的光学检测设备100,在此不再详细展开。It should be noted that the above explanation of the embodiment of the control method and control device 10 is also applicable to the optical detecting device 100 of the embodiment of the present invention, and will not be developed in detail herein.
请参阅图4、图5及图8,本发明实施方式的光学检测设备100包括成像装置20、驱动装置50、存储器30和处理器40。成像装置20包括倾斜角度可调的相机模组20a。相机模组20a包括图像传感器21和镜头模组22。图像传感器21设置在镜头模组22的像侧。存储器30用于存储指令。处理器40用于执行指令以实现:控制驱动装置50驱动相机模组20a相对于待检测物200倾斜一定的角度;将图像传感器21的感光像素阵列212分区形成多个扫描单元212a;扫描多个扫描单元212a输出的数据以得到具有不同深度信息的图像数据;和处理图像数据以形成深度图像。Referring to FIG. 4, FIG. 5 and FIG. 8, an optical detecting apparatus 100 according to an embodiment of the present invention includes an imaging device 20, a driving device 50, a memory 30, and a processor 40. The imaging device 20 includes a camera module 20a whose tilt angle is adjustable. The camera module 20a includes an image sensor 21 and a lens module 22. The image sensor 21 is disposed on the image side of the lens module 22. The memory 30 is used to store instructions. The processor 40 is configured to execute instructions to: control the driving device 50 to drive the camera module 20a to be tilted at an angle relative to the object to be detected 200; partition the photosensitive pixel array 212 of the image sensor 21 into a plurality of scanning units 212a; scan multiple The data output by the scanning unit 212a is used to obtain image data having different depth information; and the image data is processed to form a depth image.
本发明实施方式的光学检测设备100,通过将相机模组20a相对于待检测物200倾斜一定的角度,使得进行一次扫描即可获得不同Z轴高度的图像数据,最后叠加处理可形成3D图像。The optical detecting apparatus 100 of the embodiment of the present invention can obtain image data of different Z-axis heights by performing one scan by tilting the camera module 20a at a certain angle with respect to the object to be detected 200. Finally, the superimposing process can form a 3D image.
可以理解,存储器30用于存放指令和数据。处理器40用于处理指令、执行操作、 控制时间和处理数据等。例如,处理器40可以根据指令的功能,产生相应的操作控制信号,发给相应的部件,从而控制这些部件按指令的要求进行动作。It will be appreciated that the memory 30 is used to store instructions and data. The processor 40 is configured to process instructions, perform operations, Control time and process data, etc. For example, the processor 40 can generate corresponding operational control signals according to the function of the instructions, and send them to the corresponding components, thereby controlling the components to operate according to the requirements of the instructions.
需要指出的是,上述对控制方法和控制装置10的实施方式的解释说明也适用于本发明实施方式的光学检测设备100,在此不再详细展开。It should be noted that the above explanation of the embodiment of the control method and control device 10 is also applicable to the optical detecting device 100 of the embodiment of the present invention, and will not be developed in detail herein.
在某些实施方式中,感光像素阵列212包括多阶像素2122。处理器40进一步用于:In some embodiments, the photosensitive pixel array 212 includes multi-level pixels 2122. The processor 40 is further configured to:
预估待检测物200的高度;和Estimating the height of the object to be tested 200; and
控制驱动装置50驱动相机模组20a倾斜一定的角度以使多阶像素2122的高度差与待检测物200的高度之间的差值在设定范围内。The control driving device 50 drives the camera module 20a to be inclined at an angle such that the difference between the height difference of the multi-level pixel 2122 and the height of the object to be detected 200 is within a set range.
需要指出的是,上述对控制方法和控制装置10的实施方式的解释说明也适用于本发明实施方式的光学检测设备100,在此不再详细展开。It should be noted that the above explanation of the embodiment of the control method and control device 10 is also applicable to the optical detecting device 100 of the embodiment of the present invention, and will not be developed in detail herein.
在某些实施方式中,感光像素阵列212包括多阶像素2122。处理器40进一步用于将感光像素阵列212分区以使相邻的预定阶像素2122形成一个扫描单元212a。In some embodiments, the photosensitive pixel array 212 includes multi-level pixels 2122. The processor 40 is further configured to partition the photosensitive pixel array 212 such that adjacent predetermined order pixels 2122 form one scanning unit 212a.
需要指出的是,上述对控制方法和控制装置10的实施方式的解释说明也适用于本发明实施方式的光学检测设备100,在此不再详细展开。It should be noted that the above explanation of the embodiment of the control method and control device 10 is also applicable to the optical detecting device 100 of the embodiment of the present invention, and will not be developed in detail herein.
在某些实施方式中,预定阶满足条件:S=4K,其中,S表示预定阶的阶数,K≥1,K为整数。In some embodiments, the predetermined order satisfies the condition: S = 4K, where S represents the order of the predetermined order, K ≥ 1, and K is an integer.
需要指出的是,上述对控制方法和控制装置10的实施方式的解释说明也适用于本发明实施方式的光学检测设备100,在此不再详细展开。It should be noted that the above explanation of the embodiment of the control method and control device 10 is also applicable to the optical detecting device 100 of the embodiment of the present invention, and will not be developed in detail herein.
在本说明书的描述中,参考术语“一个实施方式”、“某些实施方式”、“示意性实施方式”、“示例”、“具体示例”或“一些示例”等的描述意指结合所述实施方式或示例描述的具体特征、结构、材料或者特点包含于本发明的至少一个实施方式或示例中。在本说明书中,对上述术语的示意性表述不一定指的是相同的实施方式或示例。而且,描述的具体特征、结构、材料或者特点可以在任何的一个或多个实施方式或示例中以合适的方式结合。In the description of the present specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiment", "example", "specific example" or "some examples", etc. Particular features, structures, materials or features described in the embodiments or examples are included in at least one embodiment or example of the invention. In the present specification, the schematic representation of the above terms does not necessarily mean the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in a suitable manner in any one or more embodiments or examples.
流程图中或在此以其他方式描述的任何过程或方法描述可以被理解为,表示包括一个或更多个用于实现特定逻辑功能或过程的步骤的可执行指令的代码的模块、片段或部分,并且本发明的优选实施方式的范围包括另外的实现,其中可以不按所示出或讨论的顺序,包括根据所涉及的功能按基本同时的方式或按相反的顺序,来执行功能,这应被本发明的实施例所属技术领域的技术人员所理解。Any process or method description in the flowcharts or otherwise described herein may be understood to represent a module, segment or portion of code that includes one or more executable instructions for implementing the steps of a particular logical function or process. And the scope of the preferred embodiments of the invention includes additional implementations, in which the functions may be performed in a substantially simultaneous manner or in an opposite order depending on the functions involved, in the order shown or discussed. It will be understood by those skilled in the art to which the embodiments of the present invention pertain.
在流程图中表示或在此以其他方式描述的逻辑和/或步骤,例如,可以被认为是用于实现逻辑功能的可执行指令的定序列表,可以具体实现在任何计算机可读介质中,以供指令执行系统、装置或设备(如基于计算机的系统、包括处理模块的系统或其他可 以从指令执行系统、装置或设备取指令并执行指令的系统)使用,或结合这些指令执行系统、装置或设备而使用。就本说明书而言,"计算机可读介质"可以是任何可以包含、存储、通信、传播或传输程序以供指令执行系统、装置或设备或结合这些指令执行系统、装置或设备而使用的装置。计算机可读介质的更具体的示例(非穷尽性列表)包括以下:具有一个或多个布线的电连接部(电子装置),便携式计算机盘盒(磁装置),随机存取存储器(RAM),只读存储器(ROM),可擦除可编辑只读存储器(EPROM或闪速存储器),光纤装置,以及便携式光盘只读存储器(CDROM)。另外,计算机可读介质甚至可以是可在其上打印所述程序的纸或其他合适的介质,因为可以例如通过对纸或其他介质进行光学扫描,接着进行编辑、解译或必要时以其他合适方式进行处理来以电子方式获得所述程序,然后将其存储在计算机存储器中。The logic and/or steps represented in the flowchart or otherwise described herein, for example, may be considered as an ordered list of executable instructions for implementing logical functions, and may be embodied in any computer readable medium, For the execution of systems, devices or devices (such as computer-based systems, systems including processing modules, or the like) Used in conjunction with, or in conjunction with, an instruction execution system, apparatus, or device in conjunction with an instruction execution system, apparatus, or device. For the purposes of this specification, a "computer-readable medium" can be any apparatus that can contain, store, communicate, propagate, or transport a program for use in an instruction execution system, apparatus, or device, or in conjunction with the instruction execution system, apparatus, or device. More specific examples (non-exhaustive list) of computer readable media include the following: electrical connections (electronic devices) having one or more wires, portable computer disk cartridges (magnetic devices), random access memory (RAM), Read only memory (ROM), erasable editable read only memory (EPROM or flash memory), fiber optic devices, and portable compact disk read only memory (CDROM). In addition, the computer readable medium may even be a paper or other suitable medium on which the program can be printed, as it may be optically scanned, for example by paper or other medium, followed by editing, interpretation or, if appropriate, other suitable The method is processed to obtain the program electronically and then stored in computer memory.
应当理解,本发明的实施方式的各部分可以用硬件、软件、固件或它们的组合来实现。在上述实施方式中,多个步骤或方法可以用存储在存储器中且由合适的指令执行系统执行的软件或固件来实现。例如,如果用硬件来实现,和在另一实施方式中一样,可用本领域公知的下列技术中的任一项或他们的组合来实现:具有用于对数据信号实现逻辑功能的逻辑门电路的离散逻辑电路,具有合适的组合逻辑门电路的专用集成电路,可编程门阵列(PGA),现场可编程门阵列(FPGA)等。It should be understood that portions of the embodiments of the invention may be implemented in hardware, software, firmware or a combination thereof. In the above-described embodiments, multiple steps or methods may be implemented in software or firmware stored in a memory and executed by a suitable instruction execution system. For example, if implemented in hardware, as in another embodiment, it can be implemented by any one or combination of the following techniques well known in the art: having logic gates for implementing logic functions on data signals. Discrete logic circuits, application specific integrated circuits with suitable combinational logic gates, programmable gate arrays (PGAs), field programmable gate arrays (FPGAs), etc.
本技术领域的普通技术人员可以理解实现上述实施例方法携带的全部或部分步骤是可以通过程序来指令相关的硬件完成,所述的程序可以存储于一种计算机可读存储介质中,该程序在执行时,包括方法实施例的步骤之一或其组合。One of ordinary skill in the art can understand that all or part of the steps carried by the method of implementing the above embodiments can be completed by a program to instruct related hardware, and the program can be stored in a computer readable storage medium. When executed, one or a combination of the steps of the method embodiments is included.
此外,在本发明的各个实施例中的各功能单元可以集成在一个处理模块中,也可以是各个单元单独物理存在,也可以两个或两个以上单元集成在一个模块中。上述集成的模块既可以采用硬件的形式实现,也可以采用软件功能模块的形式实现。所述集成的模块如果以软件功能模块的形式实现并作为独立的产品销售或使用时,也可以存储在一个计算机可读取存储介质中。In addition, each functional unit in each embodiment of the present invention may be integrated into one processing module, or each unit may exist physically separately, or two or more units may be integrated into one module. The above integrated modules can be implemented in the form of hardware or in the form of software functional modules. The integrated modules, if implemented in the form of software functional modules and sold or used as stand-alone products, may also be stored in a computer readable storage medium.
上述提到的存储介质可以是只读存储器,磁盘或光盘等。The above mentioned storage medium may be a read only memory, a magnetic disk or an optical disk or the like.
尽管上面已经示出和描述了本发明的实施例,可以理解的是,上述实施例是示例性的,不能理解为对本发明的限制,本领域的普通技术人员在本发明的范围内可以对上述实施例进行变化、修改、替换和变型。 Although the embodiments of the present invention have been shown and described, it is understood that the above-described embodiments are illustrative and are not to be construed as limiting the scope of the invention. The embodiments are subject to variations, modifications, substitutions and variations.

Claims (16)

  1. 一种控制方法,用于光学检测设备,其特征在于,所述光学检测设备包括成像装置,所述成像装置包括倾斜角度可调的相机模组,所述相机模组包括图像传感器和镜头模组,所述图像传感器设置在所述镜头模组的像侧,所述控制方法包括以下步骤:A control method for an optical detecting device, wherein the optical detecting device comprises an imaging device, the imaging device comprising a camera module with an adjustable tilt angle, the camera module comprising an image sensor and a lens module The image sensor is disposed on an image side of the lens module, and the control method includes the following steps:
    将所述相机模组相对于待检测物倾斜一定的角度;Tilting the camera module at an angle relative to the object to be detected;
    将所述图像传感器的感光像素阵列分区形成多个扫描单元;Forming the photosensitive pixel array of the image sensor into a plurality of scanning units;
    扫描所述多个扫描单元输出的数据以得到具有不同深度信息的图像数据;和Scanning data output by the plurality of scanning units to obtain image data having different depth information; and
    处理所述图像数据以形成深度图像。The image data is processed to form a depth image.
  2. 如权利要求1所述的控制方法,其特征在于,所述感光像素阵列包括多阶像素,所述将图像传感器倾斜一定的角度的步骤具体包括:The control method according to claim 1, wherein the photosensitive pixel array comprises a plurality of pixels, and the step of tilting the image sensor by a certain angle comprises:
    预估所述待检测物的高度;和Estimating the height of the object to be tested; and
    将所述相机模组倾斜一定的角度以使所述多阶像素的高度差与所述待检测物的高度之间的差值在设定范围内。The camera module is tilted at an angle such that a difference between a height difference of the multi-level pixels and a height of the object to be detected is within a set range.
  3. 如权利要求1所述的控制方法,其特征在于,所述感光像素阵列包括多阶像素,所述将所述图像传感器的感光像素阵列分区形成多个扫描单元的步骤具体包括:The control method according to claim 1, wherein the photosensitive pixel array comprises a plurality of pixels, and the step of partitioning the photosensitive pixel array of the image sensor into a plurality of scanning units comprises:
    将所述感光像素阵列分区以使相邻的预定阶像素形成一个所述扫描单元。The photosensitive pixel array is partitioned such that adjacent predetermined order pixels form one of the scanning units.
  4. 如权利要求3所述的控制方法,其特征在于,所述预定阶满足条件:S=4K,其中,S表示所述预定阶的阶数,K≥1,K为整数。The control method according to claim 3, wherein said predetermined order satisfies a condition: S = 4K, wherein S represents an order of said predetermined order, K ≥ 1, and K is an integer.
  5. 一种控制装置,用于光学检测设备,其特征在于,所述光学检测设备包括成像装置和驱动装置,所述成像装置包括倾斜角度可调的相机模组,所述相机模组包括图像传感器和镜头模组,所述图像传感器设置在所述镜头模组的像侧,所述控制装置包括:A control device for an optical detecting device, wherein the optical detecting device comprises an imaging device and a driving device, the imaging device comprising a camera module with an adjustable tilt angle, the camera module comprising an image sensor and a lens module, the image sensor is disposed on an image side of the lens module, and the control device includes:
    控制模块,所述控制模块用于控制所述驱动装置驱动所述相机模组相对于待检测物倾斜一定的角度;a control module, the control module is configured to control the driving device to drive the camera module to tilt at a certain angle with respect to the object to be detected;
    分区模块,所述分区模块用于将所述图像传感器的感光像素阵列分区形成多个扫描单元;a partitioning module, configured to partition the photosensitive pixel array of the image sensor into a plurality of scanning units;
    扫描模块,所述扫描模块用于扫描所述多个扫描单元输出的数据以得到具有不同 深度信息的图像数据;和a scanning module, configured to scan data output by the plurality of scanning units to obtain different Image data of depth information; and
    处理模块,所述处理模块用于处理所述图像数据以形成深度图像。A processing module for processing the image data to form a depth image.
  6. 如权利要求5所述的控制装置,其特征在于,所述感光像素阵列包括多阶像素,所述控制模块包括:The control device according to claim 5, wherein the photosensitive pixel array comprises a multi-level pixel, and the control module comprises:
    估算单元,所述估算单元用于预估所述待检测物的高度;和An estimating unit, configured to estimate a height of the object to be detected; and
    控制单元,所述控制单元用于控制所述驱动装置驱动所述相机模组倾斜一定的角度以使所述多阶像素的高度差与所述待检测物的高度的之间的差值在设定范围内。a control unit, configured to control the driving device to drive the camera module to be inclined by a certain angle such that a difference between a height difference of the multi-level pixel and a height of the object to be detected is set Within the range.
  7. 如权利要求5所述的控制装置,其特征在于,所述感光像素阵列包括多阶像素,所述分区模块包括:The control device according to claim 5, wherein the photosensitive pixel array comprises a multi-level pixel, and the partitioning module comprises:
    分区单元,所述分区单元用于将所述感光像素阵列分区以使相邻的预定阶像素形成一个所述扫描单元。a partitioning unit for partitioning the photosensitive pixel array such that adjacent predetermined order pixels form one of the scanning units.
  8. 如权利要求7所述的控制装置,其特征在于,所述预定阶满足条件:S=4K,其中,S表示所述预定阶的阶数,K≥1,K为整数。The control apparatus according to claim 7, wherein said predetermined order satisfies a condition: S = 4K, wherein S represents an order of said predetermined order, K ≥ 1, and K is an integer.
  9. 一种光学检测设备,其特征在于,包括:An optical detecting device, comprising:
    成像装置和驱动装置,所述成像装置包括倾斜角度可调的相机模组,所述相机模组包括图像传感器和镜头模组,所述图像传感器设置在所述镜头模组的像侧,所述图像传感器包括感光像素阵列,所述感光像素阵列分区形成多个扫描单元;和An imaging device and a driving device, the imaging device comprising a camera module with an adjustable tilt angle, the camera module comprising an image sensor and a lens module, the image sensor being disposed on an image side of the lens module, The image sensor includes an array of photosensitive pixels, the photosensitive pixel array being partitioned to form a plurality of scanning units; and
    控制装置,所述控制装置用于控制所述驱动装置驱动所述相机模组相对于待检测物倾斜一定的角度扫描所述多个扫描单元输出的数据以得到具有不同深度信息的图像数据,并用于处理所述图像数据以形成深度图像。a control device, the control device is configured to control the driving device to scan the camera module to scan the data output by the plurality of scanning units at an angle relative to the object to be detected to obtain image data having different depth information, and use the same The image data is processed to form a depth image.
  10. 如权利要求9所述的光学检测设备,其特征在于,所述感光像素阵列包括多阶像素,所述相机模组倾斜一定的角度以使所述多阶像素的高度差与所述待检测物的高度的之间的差值在设定范围内。The optical detecting device according to claim 9, wherein the photosensitive pixel array comprises a multi-level pixel, and the camera module is inclined at an angle such that a height difference of the multi-level pixel and the object to be detected The difference between the heights is within the set range.
  11. 如权利要求9所述的光学检测设备,其特征在于,所述感光像素阵列包括多阶像素,相邻的预定阶像素形成一个所述扫描单元。 The optical detecting apparatus according to claim 9, wherein said photosensitive pixel array comprises multi-level pixels, and adjacent predetermined order pixels form one of said scanning units.
  12. 如权利要求11所述的光学检测设备,其特征在于,所述预定阶满足条件:S=4K,其中,S表示所述预定阶的阶数,K≥1,K为整数。The optical detecting apparatus according to claim 11, wherein said predetermined order satisfies a condition: S = 4K, wherein S represents an order of said predetermined order, K ≥ 1, and K is an integer.
  13. 一种光学检测设备,其特征在于,包括:An optical detecting device, comprising:
    成像装置和驱动装置,所述成像装置包括倾斜角度可调的相机模组,所述相机模组包括图像传感器和镜头模组,所述图像传感器设置在所述镜头模组的像侧;An imaging device and a driving device, the imaging device includes a camera module with an adjustable tilt angle, the camera module includes an image sensor and a lens module, and the image sensor is disposed on an image side of the lens module;
    存储器,所述存储器用于存储指令;和a memory for storing instructions; and
    处理器,所述处理器用于执行所述指令以实现:a processor for executing the instructions to:
    控制所述驱动装置驱动所述相机模组相对于待检测物倾斜一定的角度;Controlling the driving device to drive the camera module to tilt at a certain angle with respect to the object to be detected;
    将所述图像传感器的感光像素阵列分区形成多个扫描单元;Forming the photosensitive pixel array of the image sensor into a plurality of scanning units;
    扫描所述多个扫描单元输出的数据以得到具有不同深度信息的图像数据;和Scanning data output by the plurality of scanning units to obtain image data having different depth information; and
    处理所述图像数据以形成深度图像。The image data is processed to form a depth image.
  14. 如权利要求13所述的光学检测设备,其特征在于,所述感光像素阵列包括多阶像素,所述处理器进一步用于:The optical detecting apparatus according to claim 13, wherein said photosensitive pixel array comprises multi-level pixels, and said processor is further configured to:
    预估所述待检测物的高度;和Estimating the height of the object to be tested; and
    控制所述驱动装置驱动所述相机模组倾斜一定的角度以使所述多阶像素的高度差与所述待检测物的高度之间的差值在设定范围内。Controlling the driving device to drive the camera module to be inclined at an angle such that a difference between a height difference of the multi-level pixels and a height of the object to be detected is within a set range.
  15. 如权利要求13所述的光学检测设备,其特征在于,所述感光像素阵列包括多阶像素,所述处理器进一步用于:The optical detecting apparatus according to claim 13, wherein said photosensitive pixel array comprises multi-level pixels, and said processor is further configured to:
    将所述感光像素阵列分区以使相邻的预定阶像素形成一个所述扫描单元。The photosensitive pixel array is partitioned such that adjacent predetermined order pixels form one of the scanning units.
  16. 如权利要求15所述的光学检测设备,其特征在于,所述预定阶满足条件:S=4K,其中,S表示所述预定阶的阶数,K≥1,K为整数。 The optical detecting apparatus according to claim 15, wherein said predetermined order satisfies a condition: S = 4K, wherein S represents an order of said predetermined order, K ≥ 1, and K is an integer.
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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001024948A (en) * 1999-07-08 2001-01-26 Canon Inc Solid-state image pickup device and image pickup system using the same
CN102687056A (en) * 2009-12-30 2012-09-19 皇家飞利浦电子股份有限公司 Sensor for microscopy
CN105814883A (en) * 2013-12-16 2016-07-27 皇家飞利浦有限公司 Scanning imaging system having a novel imaging sensor with gaps for electronic circuitry
CN106104355A (en) * 2014-12-22 2016-11-09 皇家飞利浦有限公司 Method for simultaneously capturing image data of a sample at multiple depths
CN106161921A (en) * 2015-04-22 2016-11-23 北京智谷睿拓技术服务有限公司 Image acquisition control method and device
CN106375650A (en) * 2015-11-17 2017-02-01 北京智谷睿拓技术服务有限公司 Focusing method and device, and image acquisition equipment

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6639684B1 (en) * 2000-09-13 2003-10-28 Nextengine, Inc. Digitizer using intensity gradient to image features of three-dimensional objects
US7127098B2 (en) * 2001-09-13 2006-10-24 Hitachi, Ltd. Image detection method and its apparatus and defect detection method and its apparatus
JP2007114071A (en) * 2005-10-20 2007-05-10 Omron Corp Three-dimensional shape measuring apparatus, program, computer-readable storage medium, and three-dimensional shape measuring method
JP2008296488A (en) * 2007-06-01 2008-12-11 Big Apple:Kk Three-dimensional expression ornamental body
JP5987270B2 (en) * 2011-05-30 2016-09-07 リコーイメージング株式会社 Camera that can display stereoscopic images
US8783874B1 (en) * 2012-01-18 2014-07-22 Nusensors, Inc. Compressive optical display and imager
TWI533256B (en) * 2013-01-07 2016-05-11 義明科技股份有限公司 Gesture sensing device and method of sensing three-dimensional gestures
CN106030237A (en) * 2013-12-06 2016-10-12 沃思测量技术股份有限公司 Device and method for measuring workpieces
CN106375651B (en) * 2015-11-30 2019-04-23 北京智谷睿拓技术服务有限公司 Focusing method and device, image capture device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001024948A (en) * 1999-07-08 2001-01-26 Canon Inc Solid-state image pickup device and image pickup system using the same
CN102687056A (en) * 2009-12-30 2012-09-19 皇家飞利浦电子股份有限公司 Sensor for microscopy
CN105814883A (en) * 2013-12-16 2016-07-27 皇家飞利浦有限公司 Scanning imaging system having a novel imaging sensor with gaps for electronic circuitry
CN106104355A (en) * 2014-12-22 2016-11-09 皇家飞利浦有限公司 Method for simultaneously capturing image data of a sample at multiple depths
CN106161921A (en) * 2015-04-22 2016-11-23 北京智谷睿拓技术服务有限公司 Image acquisition control method and device
CN106375650A (en) * 2015-11-17 2017-02-01 北京智谷睿拓技术服务有限公司 Focusing method and device, and image acquisition equipment

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