WO2018146382A1

WO2018146382A1 - Apparatus and method for processing gas or aerosol

Info

Publication number: WO2018146382A1
Application number: PCT/FI2018/050086
Authority: WO
Inventors: Simo Tammela
Original assignee: Beneq Oy
Priority date: 2017-02-08
Filing date: 2018-02-06
Publication date: 2018-08-16

Abstract

The invention relates to a method and apparatus (1) for processing gas or aerosol. The apparatus comprises an ejector (16) having a converging-diverging nozzle (18, 20, 22) and an atomizer (6) for atomizing liquid material into droplet jet to the converging-diverging nozzle (18, 20, 22) of the ejector (16) as a main flow (8). The apparatus further comprises a side flow inlet (12) for providing a side flow (14) of inlet gas or inlet aerosol to the converging-diverging nozzle (18, 20, 22) of the ejector (16) by suction caused by the main flow (8) and the ejector (16) and a droplet eliminator (30, 33) for removing liquid droplets from ejector flow (24) discharging from the ejector (16).

Description

APPARATUS AND METHOD FOR PROCESSING GAS OR AEROSOL

FIELD OF THE INVENTION

The present invention relates to an apparatus for processing gas or aerosol according to the preamble of claim 1. The present invention further relates to a method for processing gas aerosol according to the preamble of claim 13.

BACKGROUND OF THE INVENTION

In the prior art it is known different kinds of apparatus and methods for processing gas. These relate to different kinds of scrubbers and apparatuses in which gases are processed by subjecting gases to liquids. These conventional apparatuses comprise process chamber into which liquid and the gases to be processed are supplied. Liquid is pumped into the process chamber with a pump and a spray head may be used for spraying the liquid into the process space inside the process chamber. Gas to be processed is on the other hand supplied into the process chamber with a fan or like blower for generating a gas flow into the process space inside the process chamber. The supplied liquid and the gas flow are mixed in the process chamber and the droplets capture particulate matter of the gas and/or dissolve or absorb gases such a resultant process liquid of formed. The resultant process liquid is then discharged from the apparatus using one or more pumps.

One of the disadvantages of the prior art apparatus and methods for processing or scrubbing gases is that they require complicated installations and are difficult to connect to existing other systems. The prior art apparatus require several power consuming pieces of equipment which all have to work in order the whole apparatus to work properly. This requires also considerable maintenance work. Accordingly the prior art apparatuses are susceptible to operation stays due to interruptions in power supply or due to maintenance work. Furthermore, the gases to be processed are often hazardous or corrosive subjecting the pumps and fans which move the liquid and gases to extensive strain. Therefore, the pumps, fans and similar pieces of equipment of the system should be made of acid resistant materials which are expensive and still cannot provide long lasting solution.

BRIEF DESCRIPTION OF THE INVENTION

An object of the present invention is to provide an apparatus and method for processing gas or aerosol such that the disadvantages of the prior art are solved at least alleviated. The objects of the invention are achieved with an apparatus according to claim 1. The objects of the present invention are further achieved with a method according to claim 13.

The preferred embodiments of the invention are disclosed in the dependent claims.

The present invention is based on the idea of providing an apparatus comprising an ejector having a converging-diverging nozzle and an atomizer for atomizing liquid material into droplet jet, the atomizer being directed to the converging-diverging nozzle of the ejector as a main flow. When the main flow, meaning the drop jet, flows through the converging-diverging nozzle of the ejector the flow rate is increased and a suction is formed upstream of the ejector. The apparatus further comprises a side flow inlet for providing a side flow of inlet gas or inlet aerosol to the converging-diverging nozzle of the ejector by suction caused by the main flow and the ejector. In the converging-diverging nozzle of the ejector the main flow and the side flow are mixed and gas or aerosol of the side flow is processed with the liquid of the main flow and an ejector flow is discharged from the ejector. The apparatus further comprises a droplet eliminator arranged downstream of the ejector and arranged to remove liquid droplets from ejector flow discharging from the ejector. The ejector flow is formed by the main flow and the side flow in the converging-diverging nozzle of the ejector and comprises a gas phase and liquid droplets. Accordingly, after the ejector the ejector flow is divided into liquid phase and gas phase in the droplet eliminator.

In one embodiment of the present invention the apparatus may further comprise a flow guide for guiding the ejector flow and removing droplets from the ejector. The flow guide maybe for example comprise one or more guide vanes arranged to provide a curved, threaded, spiral or helical flow path for the ejector flow. The flow guide enhances the elimination of droplets from the ejector flow after the ejector.

One embodiment of the present invention comprises collector chamber which is provided in fluid connection with the droplet eliminator. Liquid of the droplets and the gas phase of the ejector flow into the collector chamber from the droplet eliminator. The collector chamber may comprise a gas outlet for providing a discharge flow of the gas phase of the ejector flow.

The droplet eliminator is arranged between the ejector and the collector chamber.

The droplet eliminator may be arranged directly downstream of the ejector such that the ejector flow enters the droplet eliminator from the ejector.

Alternatively or additionally the droplet eliminator in line with the converging-diverging nozzle of the ejector or the throat of the ejector and downstream of the ejector.

In one embodiment of the present invention the apparatus further comprises a primary process chamber. The primary process chamber is connected to the side flow inlet for providing the side flow of inlet gas inlet or aerosol from a primary process space of the primary process chamber to the converging- diverging nozzle of the ejector by suction caused by the main flow and the ejector. In one embodiment the primary process chamber may be connected to the gas outlet for providing the discharge flow of the gas phase of the ejector flow into the primary process space of the primary process chamber. Thus material may be circulated from the primary process chamber via the ejector and collector chamber back to the primary process chamber.

The present invention also relates to a method for processing gas or aerosol. The method comprises forming a drop jet by atomizing liquid material and directing the droplet jet as a main flow into a converging-diverging of an ejector for forming a suction with the main flow and the converging-diverging nozzle of the ejector. In the method an inlet gas or inlet aerosol flow via a side flow inlet is formed as a side flow to the converging-diverging nozzle of the ejector by suction caused by the main flow in the converging-diverging nozzle of an ejector. The main flow and the side flow are mixed in the converging-diverging nozzle of the ejector for processing the inlet gas or inlet aerosol with the droplets. Then droplets are removed from the ejector flow discharging the converging-diverging nozzle of the ejector for dividing the ejector flow into liquid phase and gas phase.

In one embodiment of the present invention the liquid material is atomized into droplet jet with pressure using pressure atomizer. In an alternative embodiment the liquid material may be atomized into droplet jet with atomizing gas using a two-fluid atomizer.

The method may also comprise guiding the ejector flow with a flow guide upstream of the impactor such that threaded, helical, curved, turbulent or spiral flow of the ejector flow is formed.

The liquid phase and the gas phase of the ejector flow may be collected into a collector chamber after removing the droplets from ejector flow. The gas phase of the ejector flow may also be discharged as discharge flow from the collector chamber. In one embodiment the method is carried out in connection with a primary process chamber such that the side flow is formed from a primary process space of the primary process chamber by the suction provided with the main flow and the converging-diverging nozzle of the ejector. The gas phase of the ejector flow may be further discharged from the collector chamber to the primary process space of the primary process chamber.

An advantage of the invention is that the apparatus and method may be operated by only providing the droplet jet as main flow into the ejector. Therefore, there is no need for pumping or forming a gas or aerosol flow with any equipment to the apparatus. The gas or aerosol to be processed in the apparatus is sucked or drawn into the apparatus with the suction caused by the main flow and the ejector. The main flow also comprises the liquid which is used for processing the gas or aerosol of the side flow and thus no further liquid supply is needed. Accordingly, there is no need for expensive pieces of equipment and the maintenance work of the apparatus may be minimized.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention is described in detail by means of specific embodiments with reference to the enclosed drawings, in which

Figure 1 shows one embodiment of the apparatus according to the present invention;

Figure 2 shows another embodiment of the apparatus according to the present invention;

Figure 3 shows an embodiment of the apparatus according to the present invention connected to a process chamber; and

Figure 4 shows another embodiment of the apparatus according to the present invention connected to a process chamber; and

DETAILED DESCRIPTION OF THE INVENTION

Figure 1 shows one embodiment of an apparatus 1 for processing gas or aerosol according to the present invention. The apparatus comprises liquid source 2 which is connected to an atomizer 6 with a liquid conduit 4. The atomizer 6 is pressure atomizers and atomizes the liquid material into a droplet jet using pressure. The liquid source may be a liquid container, possibly pressurized liquid container or alternatively it may be connection another liquid source. In one embodiment the liquid is water and the liquid container may be connection to water supply network.

The apparatus 1 also comprises an ejector 16 having a converging- diverging nozzle 18, 20, 22. The converging-diverging nozzle 18, 20, 22 of the ejector 16 comprises a converging nozzle part 18, a diverging nozzle part 22 and a throat 20 between the converging nozzle part 18 and the diverging nozzle part 22. Accordingly, the diameter of the ejector is first decreased in the converging nozzle part 18 and the increased again in the diverging part 22. The throat 20 may comprise longitudinal section having constant diameter, as shown in figure 1. Alternative the throat 20 may be defined only as the narrowest point of the ejector 16.

The atomizer 6 for atomizing liquid material into droplet jet is directed into the converging-diverging nozzle 18, 20, 22 of the ejector 16 such that it forms a main flow 8 of the ejector 16. In one embodiment the atomizer 6 is directed directly into the converging-diverging nozzle 18, 20, 22 of the ejector 16. Therefore, the atomizer 6 and the converging-diverging nozzle 18, 20, 22 of the ejector 16 may be arranged coaxially in relation to each other such that the droplet jet formed by the atomizer 6 is directed directly into the converging-diverging nozzle 18, 20, 22 of the ejector 16.

The apparatus of figure 1 further comprises a side flow inlet 12 for providing a side flow 14 of inlet gas or inlet aerosol in to the apparatus and into the converging-diverging nozzle 18, 20, 22 of the ejector 16. The inlet gas or the inlet aerosol is processed with the liquid and droplet jet inside the apparatus. The side flow 14 is drawn into the apparatus by suction caused by the main flow 8 and the ejector 16. When the main flow 8, or droplet jet, is supplied into the converging- diverging nozzle 18, 20, 22 of the ejector 16 the flow rate of the main flow is increased which causes a suction or vacuum upstream of the ejector 16. This suction is utilized for forming the side flow 14 into the apparatus 1. The increased flow rate in the converging-diverging nozzle 18, 20, 22 of the ejector 16 is further very effective in producing turbulence in the flows and thus the ejector 16 is also very efficient in mixing the main flow 8 and the side flow 14 which is advantageous for processing the inlet gas or inlet aerosol in the apparatus 1 with the liquid.

The side flow inlet 12 is provided or arranged upstream of the ejector 16 in the direction main flow 8 of the atomizer 6. Preferably the side flow inlet 12 is provided or arranged between the atomizer 6 and the ejector 16. However it may also by arranged upstream or behind the atomizer 6 in the direction main flow 8 of the atomizer 6 It should be noted that the apparatus may also comprise two or more side flow inlets 12.

The apparatus 1 may also comprise an inlet chamber 10 via which the main flow 8 and the side flow 14 flow into the converging-diverging nozzle 18, 20, 22 of the ejector 16. Thus the mixing of the main flow 8 and the side flow 14 may start already in the inlet chamber 10. However, structure and configuration of the atomizer, side flow inlet 12 and the ejector may be also different.

After mixing of the main flow 8 and the side flow 14 in the ejector 16, an ejector flow 24 is discharged from the ejector 16, as shown in figure 1. The ejector flow 24 is formed by the main flow 8 and the side flow 14 in the converging- diverging nozzle 18, 20, 22 of the ejector 16 and comprises a gas phase and liquid phase having droplets.

The apparatus also comprises a droplet eliminator 30 for removing liquid droplets from ejector flow 24 discharging from the ejector 16. The droplet eliminator may comprise an impactor 30 for removing droplets from the ejector flow 24 and thus dividing the ejector flow 24 into liquid phase and gas phase. In the embodiment of figure 1 the impactor comprises an impaction plate 30 against which droplets of the ejector flow 24 collide for removing droplets from the ejector flow 24 and dividing the ejector flow 24 into liquid phase and gas phase. The impactor or impaction plate 30 may be any kind of known impactor or impaction plate. The droplet eliminator may also comprise an elimination chamber 26 having ejector flow space 28 upstream of the impaction plate 30.

The ejector flow space 28 and the elimination chamber 26 may extend from the ejector 16, or the diverging nozzle part 22 of the ejector.

The apparatus may comprise a collector chamber 34 provided in fluid connection with the droplet eliminator 30. The liquid of the droplets and the gas phase of the ejector flow 24 flow from the droplet eliminator 30 into which collector chamber 34 via flow opening 32. The collector chamber 34 may comprise a liquid reservoir into which the liquid 46 is collected from the droplet eliminator 30 and a gas space 36 into which the gas phase of the ejector flow 24 flows.

The droplet eliminator 30 is arranged upstream of the collector chamber 34.

The collector chamber 34 is provided with a gas outlet 38 for providing a discharge flow 40 from the collector chamber 34. The discharge flow 40 comprising of the gas phase of the ejector flow 24. The gas outlet 38 is arranged to the gas space of the collector chamber 34. The discharge flow 40 is generated by the ejector flow such that the gas phase of the ejector flow 24 entering the collector chamber 34 generates the discharge flow 40 and pushes gas put of the collector chamber 34 via the gas outlet 38.

The collector chamber 34 is also provided with a liquid outlet 42 for providing a liquid discharge flow 44 from the collector chamber 34. The liquid outlet 42 may be provided in connection with the liquid reservoir and as a drain opening such that the liquid 46 may flow freely via the liquid outlet as the level of liquid 46 in the liquid reservoir raises.

In the embodiment of figure 1, the droplet eliminator 30, and also the elimination chamber 28, is arranged inside the collector chamber 34. However, it should be noted that the droplet eliminator 30 may also be arranged outside the collector chamber 34 or upstream of the collector chamber 34, between the ejector 16 and the collection chamber 34.

Figure 2 shows an alternative embodiment in which the apparatus 1 comprises a flow guide 31 for guiding the ejector flow 24 and removing droplets from the ejector flow 24. The flow guide 31 is provided to the ejector flow space 28 of the elimination chamber 26 downstream of the ejector 16. The flow guide 31 may comprise at least one guide vane 31 arranged to provide a curved flow path or helical flow path or threaded flow path for the ejector flow 24. In the embodiment of figure 2 the guide vane 31 is a threaded guide vane 31 arranged into the ejector flow space 28 to form a threaded, helical or spiral flow path for the ejector flow 24 downstream of the ejector 16.

The flow guide 31 may be arranged upstream of the droplet eliminator 30 or it may be part of the drop eliminator 30.

The flow guide 31 may be arranged between the ejector 16 and the droplet eliminator 30, or between the ejector flow space 28 and the droplet eliminator 30.

The flow guide 31 enhances elimination of droplets from the ejector flow 24 as it induces turbulence and impaction of droplets to the walls of the elimination chamber 26 and the guide vanes 31.

The flow guide 31 may be arranged downstream of the converging- diverging nozzle 18, 20, 22 of the ejector 16, as shown in figure 2. Therefore, the flow guide 31 may be arranged between the converging-diverging nozzle 18, 20, 22 of the ejector 16 and the droplet eliminator 30. In another embodiment the flow guide 31 may be arrange to extend from the inside of the diverging part 22 of the converging-diverging nozzle 18, 20, 22 of the ejector 16 towards the droplet eliminator 30, in order to take advantage of the turbulent flow in the ejector 16. The droplet eliminator 30 and the flow guide 31 may arranged inside the collector chamber 34, as in the embodiment of figure 2. Alternatively, droplet eliminator 30, the flow guide 31 and the ejector 16 may be arranged inside the collector chamber 34. In a yet alternative embodiment the flow guide 31 is provided outside the collector chamber 34.

As shown in the figures, the ejector 16 and the droplet eliminator 30 may be provided in common tubular structure from which the droplets and gas may flow to the collector chamber 34, and possibly also the flow guide 31. The tubular structure may also extend into the collector chamber 34. Thus at least the droplet eliminator 30 or the droplet eliminator 30 and the flow guide 31 may be inside the collector chamber 34.

The apparatus as described above may be used for adjusting material concentration, for example solvent or precursor concentration, in process gas. In this embodiment water is atomized with the atomizer and the main flow 8 is a water droplet jet. The side flow 14 is then the solvent or precursor containing gas. The water containing main flow 8 and the solvent or precursor containing side flow are mixed in the ejector 16 the resulting discharge flow 40 has a solvent or precursor concentration different than the side flow due to the reactions in the ejector 16 and droplet removal in the droplet eliminator 30. Thus the solvent or precursor concentration of the solvent or precursor containing side flow is adjusted depending on the amount of main flow 8 or water in the main flow 8.

Figure 3 shows an alternative embodiment in which the apparatus 1 comprises a primary process chamber 50. The primary process chamber 50 is connected to the side flow inlet 12 for providing the side flow 14 of inlet gas inlet or aerosol from a primary process space 52 of the primary process chamber 50 to the converging-diverging nozzle 18, 20, 22 of the ejector 16 by suction caused by the main flow 8 and the ejector 16. Accordingly gas or aerosol is sucked from the primary process chamber via the side flow inlet 12.

The primary process chamber 50 may be for example of substrate processing chamber in which a substrate 60 is coated, dried or otherwise processed. In the embodiment in which the primary process chamber 50 is a coating chamber it may comprise one or more liquid precursor atomizer (not shown) for forming an aerosol inside the primary process chamber 50 and depositing the aerosol on the surface of the substrate 60 for providing a coating. The primary process chamber 50 may for example comprise at least one liquid precursor atomizer pair in which two liquid precursor atomizers are directed directly towards each other, preferably coaxially, such that the precursor droplet jets collide directly to each other for providing precursor aerosol into the primary process space. The side flow inlet 12 may then be the discharge opening of the primary reaction chamber 50 such that the excess precursor aerosol is scrubbed after it is discharged from the primary process chamber 50.

The side flow inlet 12 may be provided with a side flow valve 54 for controlling the side flow 14 from the primary process chamber 50. Thus atomized liquid may be used for example for treating hazardous process gases of the primary process chamber 50.

In the embodiment of figure 3 the atomizer 6 is a two-fluid atomizer 6 in which atomizing gas is used for atomizing the liquid material into droplet jet. The atomizing gas is supplied to the atomizer from an atomizing gas source 5 via atomizing gas conduit 3. The atomizing gas atomizes the liquid at the atomizing head 11 of the atomizer 6 into the droplet jet.

The droplet eliminator 30 comprises an impactor having two or more successive impaction plates 33 against which droplets of the ejector flow 24 collide for removing droplets from the ejector flow 24 and dividing the ejector flow 24 into liquid phase and gas phase. The successive impaction plates 33 form a labyrinthlike curved flow path for the ejector flow 24.

Figure 4 shows an embodiment in which the primary process chamber

50 is connected to the gas outlet 38 for providing the discharge flow 40 of the gas phase of the ejector flow 24 into the primary process space 52 of the primary process chamber 50. This embodiment enables material circulation of the primary process chamber 50. The gas outlet 38 may be provided with a gas outlet valve for controlling the discharge flow 40 to the primary process chamber. This embodiment may be used for controlling the humidity inside the primary process chamber 50.

The present invention provides a method for processing gas or aerosol. The method comprises forming a drop jet by atomizing liquid material and directing the droplet jet as a main flow 8 into the converging-diverging nozzle 18, 20, 22 of the ejector 16 for forming a suction with the main flow 8 and the converging-diverging nozzle 18, 20, 22 of the ejector 16. The method further comprises forming an inlet gas or inlet aerosol flow via a side flow inlet 12 as a side flow 14 to the converging-diverging nozzle 18, 20, 22 of the ejector 16 by suction caused by the main flow 8 in the converging-diverging nozzle 18, 20, 22 of an ejector 16. The main flow 8 and the side flow 14 in the converging-diverging nozzle 18, 20, 22 of the ejector 16 for processing the inlet gas or inlet aerosol with the droplets. After the ejector droplets from the ejector flow 24 discharging the converging-diverging nozzle 18, 20, 22 of the ejector 16 are removed for dividing the ejector flow 24 into liquid phase and gas phase.

The liquid material may be atomized with pressure using pressure atomizer 6 with atomizing gas using a two-fluid atomizer 6, 7, 9.

The droplets are removed droplets from the ejector flow 24 with an impactor 30 and the ejector flow 24 is dived into liquid phase and gas phase. Prior to the removing of the droplets the ejector flow 24 may be guided with a flow guide 31 upstream of the impactor 30 such that threaded, helical, curved, turbulent or spiral flow of the ejector flow 24 is formed for enhancing the droplet removal.

The liquid phase and the gas phase of the ejector flow 24 are collected into a collector chamber 34 after removing the droplets from ejector flow 24 and the gas phase of the ejector flow 24 is discharged as discharge flow 40 from the collector chamber 34.

In one embodiment of the present invention the method comprises forming the side flow 14 from a primary process space 52 of the primary process chamber 50 by the suction provided with the main flow 8 and the converging- diverging nozzle 18, 20, 22 of the ejector 16 and discharging the gas phase of the ejector flow 24 from the collector chamber 24 to the primary process space 52 of the primary process chamber 50.

The invention has been described above with reference to the examples shown in the figures. However, the invention is in no way restricted to the above examples but may vary within the scope of the claims.

Claims

1. An apparatus (1) for processing gas or aerosol, the apparatus comprises:

- an ejector (16) having a converging-diverging nozzle (18, 20, 22); - an atomizer (6) for atomizing liquid material into droplet jet, the atomizer (6) being directed to the converging-diverging nozzle (18, 20, 22) of the ejector (16) as a main flow (8); and

- a side flow inlet (12) for providing a side flow (14) of inlet gas or inlet aerosol to the converging-diverging nozzle (18, 20, 22) of the ejector (16) by suction caused by the main flow (8) and the ejector (16),

characterized in that the apparatus further comprises:

- a droplet eliminator (30, 33) arranged downstream of the ejector (16) and arranged to remove liquid droplets from ejector flow (24) discharging from the ejector (16), the ejector flow (24) being formed by the main flow (8) and the side flow (14) in the converging-diverging nozzle (18, 20, 22) of the ejector (16) and comprising a gas phase and liquid droplets.

2. An apparatus (1) according to claim 1, characterized in that the atomizer (6) is:

- a pressure atomizer (6) in which pressure is used for atomizing the liquid material into droplet jet; or

- a two-fluid atomizer (6, 7, 9) in which atomizing gas is used for atomizing the liquid material into droplet jet.

3. An apparatus (1) according to claim 1 or 2, characterized in that the side flow inlet (12) is:

- provided upstream of the ejector (16) in the direction main flow (8) of the atomizer (6); or

- provided between the atomizer (6) and the ejector (16).

4. An apparatus (1) according to anyone of claims 1 to 3, characterized in that the converging-diverging nozzle (18, 20, 22) of the ejector (16) comprises a converging nozzle part (18), a diverging nozzle part (22) and a throat (20) between the converging nozzle part (18) and the diverging nozzle part (22).

5. An apparatus (1) according to anyone of claims 1 to 4, characterized in that the droplet eliminator (30, 33) comprises:

- an impactor (30) for removing droplets from the ejector flow (24) and dividing the ejector flow (24) into liquid phase and gas phase; or

- an impactor having an impaction plate (30) against which droplets of the ejector flow (24) collide for removing droplets from the ejector flow (24) and dividing the ejector flow (24) into liquid phase and gas phase; or

- an impactor having two or more successive impaction plates (33) against which droplets of the ejector flow (24) collide for removing droplets from the ejector flow (24) and dividing the ejector flow (24) into liquid phase and gas phase.

6. An apparatus (1) according to anyone of claims 1 to 5, characterized in that the apparatus (1) comprises:

- a flow guide (31) for guiding the ejector flow (24) and removing droplets from the ejector flow (24);

- flow guide (31) comprising at least one guide vane (31) arranged to provide a curved flow path or helical flow path or threaded flow path for the ejector flow (24); or

- threaded guide vane (31) arranged to form a threaded, helical or spiral flow path for the ejector flow (24).

7. An apparatus (1) according to claim 6, characterized in that the flow guide (31) is arranged:

- downstream of the converging-diverging nozzle (18, 20, 22) of the ejector (16); or

- between the converging-diverging nozzle (18, 20, 22) of the ejector (16) and the droplet eliminator (30, 33); or

- to extend from the inside of the diverging part (22) of the converging- diverging nozzle (18, 20, 22) of the ejector (16) towards the droplet eliminator (30,

33).

8. An apparatus (1) according to anyone of claims 1 to 7, characterized in that the apparatus (1) comprises:

- collector chamber (34) provided in fluid connection with the droplet eliminator (30, 33), into which collector chamber (34) liquid of the droplets and the gas phase of the ejector flow (24) flows from the droplet eliminator (30, 33):

9. An apparatus (1) according to claim 8, characterized in that:

- droplet eliminator (30, 33) is arranged inside the collector chamber

(34); or

- droplet eliminator (30, 33) and the flow guide (31) are arranged inside the collector chamber (34); or - droplet eliminator (30, 33), the flow guide (31) and the ejector (16) are arranged inside the collector chamber (34); or

- droplet eliminator (30, 33) is arranged upstream of the collector chamber (34).

10. An apparatus (1) according to claim 8 or 9, characterized in that the collector chamber (34) comprises a gas outlet (38) for providing a discharge flow (40) of the gas phase of the ejector flow (24).

11. An apparatus (1) according to claim 10, characterized in that the apparatus (1) comprises a primary process chamber (50), the primary process chamber (50) being connected to the side flow inlet (12) for providing the side flow (14) of inlet gas inlet or aerosol from a primary process space (52) of the primary process chamber (50) to the converging-diverging nozzle (18, 20, 22) of the ejector (16) by suction caused by the main flow (8) and the ejector (16).

12. An apparatus (1) according to claim 11, characterized in that the primary process chamber (50) being connected to the gas outlet (38) for providing the discharge flow (40) of the gas phase of the ejector flow (24) into the primary process space (52) of the primary process chamber (50).

13. A method for processing gas or aerosol, the method comprises:

- forming a drop jet by atomizing liquid material;

- directing the droplet jet as a main flow (8) into a converging-diverging nozzle (18, 20, 22) of an ejector (16) for forming a suction with the main flow (8) and the converging-diverging nozzle (18, 20, 22) of the ejector (16);

- forming an inlet gas or inlet aerosol flow via a side flow inlet (12) as a side flow (14) to the converging-diverging nozzle (18, 20, 22) of the ejector (16) by suction caused by the main flow (8) in the converging-diverging nozzle (18, 20, 22) of an ejector (16); and

- mixing the main flow (8) and the side flow (14) in the converging- diverging nozzle (18, 20, 22) of the ejector (16) for processing the inlet gas or inlet aerosol with the droplets,

characterized in that the method further comprises:

- removing droplets from the ejector flow (24) discharging the converging-diverging nozzle (18, 20, 22) of the ejector (16) for dividing the ejector flow (24) into liquid phase and gas phase.

14. A method according to claim 13, characterized in that the atomizing the liquid material comprise:

- atomizing the liquid material into droplet jet with pressure using pressure atomizer (6); or

- atomizing the liquid material into droplet jet with atomizing gas using a two-fluid atomizer (6, 7, 9).

15. A method according to claim 13 or 14, c h a r a c t e r i z e d in that the method comprises:

- removing droplets from the ejector flow (24) with an impactor (30) and dividing the ejector flow (24) into liquid phase and gas phase.

16. A method according to claim 15, characterized in that the method comprises:

- guiding the ejector flow (24) with a flow guide (31) upstream of the impactor (30) such that threaded, helical, curved, turbulent or spiral flow of the ejector flow (24) is formed.

17. A method according to anyone of claims 13 to 16, characterized in that the method comprises:

- collecting the liquid phase and the gas phase of the ejector flow (24) into a collector chamber (34) after removing the droplets from ejector flow (24); and

- discharging the gas phase of the ejector flow (24) as discharge flow (40) from the collector chamber (34).

18. A method according to claim 17, characterized in that the method comprises:

- forming the side flow (14) from a primary process space (52) of a primary process chamber (50) by the suction provided with the main flow (8) and the converging-diverging nozzle (18, 20, 22) of the ejector (16); and

- discharging the gas phase of the ejector flow (24) from the collector chamber (24) to the primary process space (52) of the primary process chamber (50).