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WO2017126673A1 - Functional structural body - Google Patents

Functional structural body Download PDF

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Publication number
WO2017126673A1
WO2017126673A1 PCT/JP2017/001966 JP2017001966W WO2017126673A1 WO 2017126673 A1 WO2017126673 A1 WO 2017126673A1 JP 2017001966 W JP2017001966 W JP 2017001966W WO 2017126673 A1 WO2017126673 A1 WO 2017126673A1
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Prior art keywords
functional structure
rib
functional
force
structure according
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PCT/JP2017/001966
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French (fr)
Japanese (ja)
Inventor
谷口豊
縄田晃史
田中覚
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Scivax株式会社
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Publication of WO2017126673A1 publication Critical patent/WO2017126673A1/en

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/118Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures

Definitions

  • the present invention relates to a functional structure in which damage to the functional structure is suppressed.
  • an object of the present invention is to provide a functional structure that prevents or suppresses breakage of a functional structure having a predetermined function.
  • the functional structure of the present invention has a functional structure having a predetermined function including a concave portion and a convex portion formed in a base portion, and prevents a force from the surface side from being applied to the functional structure. Or a rib to suppress.
  • the height of the rib is formed to be greater than the height of the convex portion.
  • the rib is formed so that the strength of the rib is greater than the strength of the convex portion.
  • the rib may be formed larger than the width of the convex portion at the same height position.
  • the rib is arranged so that a contact object such as a human finger does not touch the functional structure with a force greater than a force that damages the functional structure.
  • the functional structure may be composed of line and space, and the rib may be formed in parallel to the line and space.
  • the direction of the line and space may be different on both sides of the rib.
  • the rib may exhibit the same type of function as the functional structure.
  • the functional structure is a moth-eye structure.
  • the functional structure of the present invention is provided with ribs that prevent or suppress the force applied to the functional structure when touched by a hand or the like, the functional structure can be prevented from being damaged.
  • FIG. 2 is a schematic cross-sectional view of the functional structure of the present invention as viewed from the direction of arrows II in FIG. It is a schematic sectional drawing which shows another functional structure of this invention. It is a schematic plan view which shows a line-and-space-like functional structure. It is a schematic plan view which shows another line and space-like functional structure. It is a schematic plan view which shows the functional structure which has a diagonal rib. It is a schematic plan view which shows the functional structure which has a columnar rib. It is a photograph which shows the functional structure of this invention. It is a schematic sectional drawing which shows the functional structure of the Example of this invention.
  • the functional structure of the present invention is mainly composed of a functional structure 1 having a predetermined function and a rib 2 for preventing or suppressing breakage of the functional structure 1 as shown in FIG.
  • the functional structure 1 includes a concave portion 11 and a convex portion 12 formed in the base portion 10, and exhibits various functions depending on the shape and material of the concave portion 11 and the convex portion 12. is there.
  • the functional structure 1 a moth-eye structure that exhibits the function of reducing the reflection of light, a polarizing structure that extracts light with regular electric field and ground vibration directions, a photonic crystal structure that can control how light propagates, A structure for plasmons that causes surface plasmon resonance, a superhydrophobic structure that increases the contact angle with water, a superhydrophilic structure that decreases the contact angle with water, and a spheroid that is a cell aggregate in which cells are aggregated and aggregated There are cell culture structures and the like.
  • the functional structure 1 may be any structure as long as it exhibits a certain function.
  • the moth-eye structure will be described as an example of the functional structure.
  • the moth-eye structure exhibits a function of reducing light reflection. Light is likely to be reflected at portions where the refractive index changes greatly.
  • the irregularities of the moth-eye structure are formed with a period smaller than the wavelength of the visible light region, the light averages the refractive index of the medium at any position in the height direction of the irregularities and the refractive index of the material used for the moth-eye structure. It is known that the average refractive index behaves as if it were the refractive index at that position.
  • Concave and convex structures include a cone shape such as a cone, a frustum shape that is a three-dimensional figure obtained by removing a cone that has been reduced to a similar size and sharing a vertex with the cone, or the side surfaces of which are expanded outward.
  • a shell shape is used.
  • the shape is not limited to these as long as the average refractive index changes gently.
  • any conventionally known method may be used, and a technique such as nanoimprint, injection molding, or photolithography may be used.
  • the rib 2 is formed on the base 10 to prevent or suppress the force from the surface side from being applied to the functional structure 1. It is preferable that the height of the rib 2 is formed to be equal to or higher than the height of the convex portion 12. Further, the rib 2 is formed such that the strength of the rib 2 is greater than the strength of the convex portion 12 in at least one linear direction parallel to the surface having the functional structure 1. For example, in at least one or more linear directions parallel to the surface having the functional structure 1, the rib 2 may be formed larger than the width of the convex portion 12 at the same height position. In the functional structure of FIG. 1, the width D of the rib 2 is formed to be larger than the width d of the convex portion 12 at the same height position in the II line direction, as shown in FIG.
  • a strength that does not cause damage due to contact with the contact object in the case of the surface of spectacles, a human finger
  • the rib 2 is arranged so that the contact object does not touch it with a force greater than the force that damages the functional structure 1.
  • the ribs 2 may be disposed so as to sandwich or surround the functional structure 1 at a predetermined interval in at least one direction so as to prevent or suppress contact with the functional structure 1.
  • the rib 2 can be formed so as to exhibit the same type of function as the functional structure 1.
  • the rib 2 can also have a shape that functions as a moth-eye. Thereby, the function of the functional structure can be improved.
  • the tip may be formed in a curved or trapezoidal shape. Thereby, damage to the tip of rib 2 etc. can be prevented.
  • the rib 2 is preferably formed in a direction parallel to the line and space. It is preferable to form more ribs 2 parallel to the line and space than ribs 2 in other directions. Further, in order to prevent damage due to contact with the contact object from being concentrated on a part, the direction of the line and space may be different on both sides of the rib 2 as shown in FIG.
  • the functional structure 1 may be surrounded by a rib 2 in which a square rib 21 and a diagonal rib 22 thereof are combined.
  • a functional structure can be made into a structure strong against rotation contact with a contact thing.
  • the shape of the rib 2 does not need to be a line shape, and may be any other shape as long as the functional structure 1 can be protected.
  • various shapes such as a triangular lattice shape and a hexagonal lattice shape can be used.
  • the functional structure 1 is an optical structure such as a moth-eye structure, it is better to have an arrangement that can prevent or suppress the generation of interference light.
  • the cylindrical ribs 2 may be arranged randomly.
  • FIG. 8 shows a photograph of the functional structure of the present invention.
  • FIG. 8A shows a line-and-space moth-eye structure (functional structure 1)
  • FIG. 8B shows a functional structure having grid-like ribs 2 surrounding the moth-eye structure shown in FIG. 8A.
  • FIG. 8C shows a mold for transferring the functional structure shown in FIG.
  • strength of the functional structure of this invention is shown as an Example below.
  • a moth-eye structure having a line-and-space structure with an isosceles triangle cross section, a height of 240 nm, and a pitch of 200 nm (base is 200 nm) is used as the functional structure 1.
  • the rib 2 was prepared with four types of functional structures having a trapezoidal cross section, a height of 300 nm, and a width of the lower side (base side) shown below. .
  • the functional structures (b) to (e) are less likely to break the functional structure 1 than the functional structure (a). Further, the larger the width of the bottom side of the rib 2, the less the functional structure 1 was damaged.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Surface Treatment Of Optical Elements (AREA)

Abstract

Provided is a functional structural body in which damage to a functional structure having a prescribed function is prevented or suppressed. The present invention comprises: a functional structure 1 that has a prescribed function and comprises recessed sections 11 and protruding sections 12 formed on a base part 10; and ribs 2 for preventing or suppressing the application of force from a surface side to the functional structure 1. The ribs 2 may be formed, for example, to a height equal to or greater than the height of the protruding sections 11. Also, the strength of the ribs may be greater than the strength of the protruding parts in at least one rectilinear direction that is parallel to the surface having the functional structure 1.

Description

機能構造体Functional structure
 本発明は、機能構造の破損を抑制した機能構造体に関するものである。 The present invention relates to a functional structure in which damage to the functional structure is suppressed.
 近年、微細加工技術の発展により、基板やシートの表面に微細な凹凸構造を設けて種々の機能を付与することが行われている。
 例えば、光を透過させるレンズやディスプレイ等の透過型の光学部材では、空気と接触する界面で太陽や照明などの光が反射し視認性を低下させることがある。そこで、光の反射を抑制又は防止するために、表面にモスアイ構造を設けることがあった(例えば、特許文献1参照)。
2. Description of the Related Art In recent years, with the development of microfabrication technology, various functions have been provided by providing a fine uneven structure on the surface of a substrate or sheet.
For example, in a transmissive optical member such as a lens or a display that transmits light, light such as the sun or illumination may be reflected at an interface that comes into contact with air, thereby reducing visibility. Therefore, in order to suppress or prevent light reflection, a moth-eye structure is sometimes provided on the surface (see, for example, Patent Document 1).
特開2014-51601JP2014-51601
 しかしながら、例えばスマートフォン等の画面やメガネの表面等にモスアイ構造を設ける場合、当該表面に手などが触れると、モスアイ構造が破損し反射防止機能の低下が生じる等の問題があった。 However, for example, when a moth-eye structure is provided on the screen of a smartphone or the like or the surface of glasses, when the hand touches the surface, the moth-eye structure is broken and the antireflection function is lowered.
 そこで本発明は、所定の機能を有する機能構造の破損を防止又は抑制した機能構造体を提供することを目的とする。 Therefore, an object of the present invention is to provide a functional structure that prevents or suppresses breakage of a functional structure having a predetermined function.
 上記目的を達成するために、本発明の機能構造体は、基部に形成された凹部及び凸部からなり所定の機能を有する機能構造と、表面側からの力が前記機能構造に加わるのを防止又は抑制するリブと、を具備することを特徴とする。 In order to achieve the above object, the functional structure of the present invention has a functional structure having a predetermined function including a concave portion and a convex portion formed in a base portion, and prevents a force from the surface side from being applied to the functional structure. Or a rib to suppress.
 この場合、前記リブの高さは、前記凸部の高さ以上に形成される方が好ましい。また、前記機能構造を有する面に平行な少なくとも1以上の直線方向において、前記リブの強度は前記凸部の強度より大きくなるように形成される。例えば、前記機能構造を有する面に平行な少なくとも1以上の直線方向において、前記リブは、同じ高さ位置における前記凸部の幅より大きく形成すれば良い。 In this case, it is preferable that the height of the rib is formed to be greater than the height of the convex portion. In addition, in at least one or more linear directions parallel to the surface having the functional structure, the rib is formed so that the strength of the rib is greater than the strength of the convex portion. For example, in at least one or more linear directions parallel to the surface having the functional structure, the rib may be formed larger than the width of the convex portion at the same height position.
 また、前記リブは、人の指等の接触物が前記機能構造を破損する力以上の力で当該機能構造に触れないように配置される。 Further, the rib is arranged so that a contact object such as a human finger does not touch the functional structure with a force greater than a force that damages the functional structure.
 また、前記機能構造はラインアンドスペースからなり、前記リブは、前記ラインアンドスペースと平行に形成されるようにしても良い。また、前記リブの両側で前記ラインアンドスペースの方向が異なるようにしても良い。 The functional structure may be composed of line and space, and the rib may be formed in parallel to the line and space. The direction of the line and space may be different on both sides of the rib.
 また、前記リブは前記機能構造と同種の機能を発揮するものであっても良い。 Further, the rib may exhibit the same type of function as the functional structure.
 また、例えば、前記機能構造はモスアイ構造である。 For example, the functional structure is a moth-eye structure.
 本発明の機能構造体は、手などが触れることにより機能構造に力が加わるのを防止又は抑制するリブを設けるので、機能構造の破損を防止又は抑制することができる。 Since the functional structure of the present invention is provided with ribs that prevent or suppress the force applied to the functional structure when touched by a hand or the like, the functional structure can be prevented from being damaged.
本発明の機能構造体の構造を示す概略平面図である。It is a schematic plan view which shows the structure of the functional structure of this invention. 本発明の機能構造体を図1のI-I線矢印方向から見た概略断面図である。FIG. 2 is a schematic cross-sectional view of the functional structure of the present invention as viewed from the direction of arrows II in FIG. 本発明の別の機能構造体を示す概略断面図である。It is a schematic sectional drawing which shows another functional structure of this invention. ラインアンドスペース状の機能構造体を示す概略平面図である。It is a schematic plan view which shows a line-and-space-like functional structure. 別のラインアンドスペース状の機能構造体を示す概略平面図である。It is a schematic plan view which shows another line and space-like functional structure. 対角線リブを有する機能構造体を示す概略平面図である。It is a schematic plan view which shows the functional structure which has a diagonal rib. 柱状リブを有する機能構造体を示す概略平面図である。It is a schematic plan view which shows the functional structure which has a columnar rib. 本発明の機能構造体を示す写真である。It is a photograph which shows the functional structure of this invention. 本発明の実施例の機能構造体を示す概略断面図である。It is a schematic sectional drawing which shows the functional structure of the Example of this invention.
 本発明の機能構造体は、図1に示す通り、所定の機能を有する機能構造1と、機能構造1の破損を防止又は抑制するためのリブ2と、で主に構成される。 The functional structure of the present invention is mainly composed of a functional structure 1 having a predetermined function and a rib 2 for preventing or suppressing breakage of the functional structure 1 as shown in FIG.
 機能構造1は、図2に示すように、基部10に形成された凹部11及び凸部12からなるもので、当該凹部11及び凸部12の形状や材質等により種々の機能を発揮するものである。機能構造1としては、光の反射を減少させる機能を発揮するモスアイ構造や、電場および地場の震動方向が規則的な光を取り出す偏光用構造、光の伝搬の仕方を制御できるフォトニック結晶構造、表面プラズモン共鳴を起こすプラズモン用構造、水との接触角を大きくする超撥水構造、水との接触角を小さくする超親水構造、細胞同士が集合・凝集化した細胞集合体であるスフェロイドを培養するための細胞培養用構造等がある。もちろん、機能構造1としては、何らかの機能を発揮する構造であればどのようなものでも良い。 As shown in FIG. 2, the functional structure 1 includes a concave portion 11 and a convex portion 12 formed in the base portion 10, and exhibits various functions depending on the shape and material of the concave portion 11 and the convex portion 12. is there. As the functional structure 1, a moth-eye structure that exhibits the function of reducing the reflection of light, a polarizing structure that extracts light with regular electric field and ground vibration directions, a photonic crystal structure that can control how light propagates, A structure for plasmons that causes surface plasmon resonance, a superhydrophobic structure that increases the contact angle with water, a superhydrophilic structure that decreases the contact angle with water, and a spheroid that is a cell aggregate in which cells are aggregated and aggregated There are cell culture structures and the like. Of course, the functional structure 1 may be any structure as long as it exhibits a certain function.
 機能構造の一例として、モスアイ構造について説明する。モスアイ構造は、光の反射を減少させる機能を発揮するものである。光は屈折率の変化が大きい部分で反射し易い。一方、モスアイ構造の凹凸を可視光領域の波長より小さい周期で形成すれば、光は、凹凸の高さ方向の任意の位置における媒質の屈折率とモスアイ構造に用いられる材料の屈折率を平均した平均屈折率がその位置における屈折率であるかのように振る舞うことが知られている。したがって、モスアイ構造の凹凸を、平均屈折率が緩やかに変化するように形成すれば、急激な屈折率変化を無くすことができ、入射した光の反射を抑制することができる。凹凸構造としては、円錐等の錐体形状や、錐体から当該錐体と頂点を共有する相似に縮小した錐体を取り除いた立体図形である錐台形状、あるいはこれらの側面を外側に膨らましたような砲弾形状等が用いられる。もちろん、平均屈折率が緩やかに変化するような形状であればこれらに限定されるものではない。 The moth-eye structure will be described as an example of the functional structure. The moth-eye structure exhibits a function of reducing light reflection. Light is likely to be reflected at portions where the refractive index changes greatly. On the other hand, if the irregularities of the moth-eye structure are formed with a period smaller than the wavelength of the visible light region, the light averages the refractive index of the medium at any position in the height direction of the irregularities and the refractive index of the material used for the moth-eye structure. It is known that the average refractive index behaves as if it were the refractive index at that position. Therefore, if the irregularities of the moth-eye structure are formed so that the average refractive index changes gently, a sudden change in refractive index can be eliminated and reflection of incident light can be suppressed. Concave and convex structures include a cone shape such as a cone, a frustum shape that is a three-dimensional figure obtained by removing a cone that has been reduced to a similar size and sharing a vertex with the cone, or the side surfaces of which are expanded outward. Such a shell shape is used. Of course, the shape is not limited to these as long as the average refractive index changes gently.
 機能構造の作製方法は、従来から知られている任意の方法を用いればよく、ナノインプリントや射出成型、フォトリソグラフィー等の技術を用いれば良い。 As a method for producing the functional structure, any conventionally known method may be used, and a technique such as nanoimprint, injection molding, or photolithography may be used.
 リブ2は、基部10に形成され、表面側からの力が機能構造1に加わるのを防止又は抑制するものである。リブ2の高さは、凸部12の高さ以上に形成される方が好ましい。また、機能構造1を有する面に平行な少なくとも1以上の直線方向において、リブ2の強度は凸部12の強度より大きくなるように形成される。例えば、機能構造1を有する面に平行な少なくとも1以上の直線方向において、リブ2は、同じ高さ位置における凸部12の幅より大きく形成すれば良い。図1の機能構造体は、I-I線方向において、図2に示すように、リブ2の幅Dは、同じ高さ位置における凸部12の幅dよりも大きく形成されている。 The rib 2 is formed on the base 10 to prevent or suppress the force from the surface side from being applied to the functional structure 1. It is preferable that the height of the rib 2 is formed to be equal to or higher than the height of the convex portion 12. Further, the rib 2 is formed such that the strength of the rib 2 is greater than the strength of the convex portion 12 in at least one linear direction parallel to the surface having the functional structure 1. For example, in at least one or more linear directions parallel to the surface having the functional structure 1, the rib 2 may be formed larger than the width of the convex portion 12 at the same height position. In the functional structure of FIG. 1, the width D of the rib 2 is formed to be larger than the width d of the convex portion 12 at the same height position in the II line direction, as shown in FIG.
 また、本発明の機能構造体に接触する物が想定できる場合には、当該接触物との接触によって破損しない強度を有する方が好ましい。なお、接触物としては、例えば、メガネの表面の場合には、人の指等が想定される。また、スマートフォンやタブレット等の画面の場合には、人の指やタッチペン等が想定される。 In addition, when an object that comes into contact with the functional structure of the present invention can be assumed, it is preferable to have a strength that does not cause damage due to contact with the contact object. In addition, as a contact object, in the case of the surface of spectacles, a human finger | toe etc. are assumed, for example. In the case of a screen such as a smartphone or a tablet, a human finger or a touch pen is assumed.
 また、リブ2は、接触物が機能構造1を破損する力以上の力で触れないように配置される。例えば、少なくとも1以上の方向において、所定間隔でリブ2が機能構造1を挟むように、あるいは囲むように配置し、機能構造1に接触物が触れるのを防止又は抑制するようにすれば良い。 Also, the rib 2 is arranged so that the contact object does not touch it with a force greater than the force that damages the functional structure 1. For example, the ribs 2 may be disposed so as to sandwich or surround the functional structure 1 at a predetermined interval in at least one direction so as to prevent or suppress contact with the functional structure 1.
 なお、機能構造1の保護の観点からはリブ2が多い方が良いが、機能構造体に占めるリブ2の割合を大きくしすぎると、機能構造1の割合が減少し、機能構造体の機能が低下する。したがって、機能構造体の表面に占めるリブ2の面積の割合は、接触物が機能構造1を破損する力で触れない範囲で、最小にする方が良い。 From the viewpoint of protecting the functional structure 1, it is better to have more ribs 2. However, if the ratio of the ribs 2 occupying the functional structure is too large, the ratio of the functional structure 1 is reduced, and the function of the functional structure is reduced. descend. Therefore, it is better to minimize the ratio of the area of the rib 2 to the surface of the functional structure as long as the contact object is not touched by the force that damages the functional structure 1.
 また、リブ2は、機能構造1と同種の機能を発揮するように形成することも可能である。例えば機能構造1がモスアイ構造である場合には、図3に示すように、リブ2もモスアイとして機能する形状にすることができる。これにより、機能構造体の機能の向上を図ることができる。 Also, the rib 2 can be formed so as to exhibit the same type of function as the functional structure 1. For example, when the functional structure 1 is a moth-eye structure, as shown in FIG. 3, the rib 2 can also have a shape that functions as a moth-eye. Thereby, the function of the functional structure can be improved.
 また、図3に示すように、先端部は曲面状又は台形状に形成しても良い。これにより、リブ2の先端部の破損等を防止することができる。 Also, as shown in FIG. 3, the tip may be formed in a curved or trapezoidal shape. Thereby, damage to the tip of rib 2 etc. can be prevented.
 また、図4に示すように、機能構造1の凹凸がラインアンドスペース状の場合には、当該機能構造1はライン方向の力には強く、ラインと直交する方向の力には弱い。したがって、リブ2は、ラインアンドスペースと平行な方向に形成する方が好ましい。また、ラインアンドスペースと平行なリブ2を他の方向のリブ2より多く形成する方が好ましい。また、接触物との接触による破損が一部に集中するのを防止するため、図5に示すように、リブ2の両側でラインアンドスペースの方向が異なるようにしても良い。 In addition, as shown in FIG. 4, when the unevenness of the functional structure 1 is a line-and-space shape, the functional structure 1 is strong against the force in the line direction and weak against the force in the direction perpendicular to the line. Therefore, the rib 2 is preferably formed in a direction parallel to the line and space. It is preferable to form more ribs 2 parallel to the line and space than ribs 2 in other directions. Further, in order to prevent damage due to contact with the contact object from being concentrated on a part, the direction of the line and space may be different on both sides of the rib 2 as shown in FIG.
 また、図6に示すように、方形状リブ21とその対角線リブ22を組み合わせたリブ2で機能構造1を囲むようにしても良い。この場合、方形状リブ21と対角線リブ22で囲まれている機能構造のラインアンドスペースは、当該方形状リブ21と平行に形成する方が好ましい。これにより、機能構造体は、接触物との回転接触に強い構造とすることができる。 Further, as shown in FIG. 6, the functional structure 1 may be surrounded by a rib 2 in which a square rib 21 and a diagonal rib 22 thereof are combined. In this case, it is preferable to form the line and space of the functional structure surrounded by the square rib 21 and the diagonal rib 22 in parallel with the square rib 21. Thereby, a functional structure can be made into a structure strong against rotation contact with a contact thing.
 なお、リブ2の形状はライン状である必要はなく、機能構造1を保護できるものであれば、その他のどのような形状であっても良い。例えば図7に示すように、柱状のものであっても良い。そのほか、三角格子状、六角格子状等種々の形状を用いることができる。また、機能構造1がモスアイ構造等の光学用の構造である場合には、干渉光の発生を防止又は抑制できる配置にする方が良い。例えば図7に示すように、円柱状のリブ2をランダムに配置すれば良い。 In addition, the shape of the rib 2 does not need to be a line shape, and may be any other shape as long as the functional structure 1 can be protected. For example, as shown in FIG. In addition, various shapes such as a triangular lattice shape and a hexagonal lattice shape can be used. In addition, when the functional structure 1 is an optical structure such as a moth-eye structure, it is better to have an arrangement that can prevent or suppress the generation of interference light. For example, as shown in FIG. 7, the cylindrical ribs 2 may be arranged randomly.
 図8に本発明の機能構造体の写真を示す。図8(a)は、ラインアンドスペース状のモスアイ構造(機能構造1)、図8(b)は、図8(a)に示すモスアイ構造を囲む格子状のリブ2を有する機能構造体である。また、図8(c)は、図8(b)に示す機能構造体を転写するための型である。 FIG. 8 shows a photograph of the functional structure of the present invention. FIG. 8A shows a line-and-space moth-eye structure (functional structure 1), and FIG. 8B shows a functional structure having grid-like ribs 2 surrounding the moth-eye structure shown in FIG. 8A. . FIG. 8C shows a mold for transferring the functional structure shown in FIG.
 また、以下に、実施例として、本願発明の機能構造体の強度について測定した結果を示す。当該測定では、図9に示すように、機能構造1として、断面が2等辺三角形で高さが240nm、ピッチが200nm(底辺が200nm)のラインアンドスペースであるモスアイ構造を用いた。また、図9(b)~(e)に示す通り、リブ2は、断面が台形で高さが300nmで下辺(基部側の辺)の幅が下記に示す4種類の機能構造体を用意した。
機能構造1体(b):0.4μm
機能構造1体(c):0.8μm
機能構造1体(d):1.6μm
機能構造1体(e):3.2μm
なお、台形の上辺と下辺を除く両辺の傾きは、モスアイ構造の二等辺三角形の両辺と同じ角度とした。また、リブ2のピッチは10μmとした。また、比較例として、図9(a)に示すように、リブ2のない機能構造体(a)を用意した。
Moreover, the result measured about the intensity | strength of the functional structure of this invention is shown as an Example below. In this measurement, as shown in FIG. 9, a moth-eye structure having a line-and-space structure with an isosceles triangle cross section, a height of 240 nm, and a pitch of 200 nm (base is 200 nm) is used as the functional structure 1. Further, as shown in FIGS. 9B to 9E, the rib 2 was prepared with four types of functional structures having a trapezoidal cross section, a height of 300 nm, and a width of the lower side (base side) shown below. .
1 functional structure (b): 0.4 μm
1 functional structure (c): 0.8 μm
1 functional structure (d): 1.6 μm
1 functional structure (e): 3.2 μm
The inclination of both sides excluding the upper side and the lower side of the trapezoid was the same angle as both sides of the isosceles triangle of the moth-eye structure. The pitch of the ribs 2 was 10 μm. As a comparative example, a functional structure (a) without ribs 2 was prepared as shown in FIG. 9 (a).
 強度について測定したところ、機能構造体(b)~(e)は機能構造体(a)よりも機能構造1が破損し難い。また、リブ2の底辺の幅が大きいほど機能構造1の破損が少なかった。 Measured with respect to strength, the functional structures (b) to (e) are less likely to break the functional structure 1 than the functional structure (a). Further, the larger the width of the bottom side of the rib 2, the less the functional structure 1 was damaged.
 1 機能構造
 2 リブ
 10 基部
 11 凹部
 12 凸部
 21 方形状リブ
 22 対角線リブ
1 Functional Structure 2 Rib 10 Base 11 Concave 12 Convex 21 Square Rib 22 Diagonal Rib

Claims (10)

  1.  基部に形成された凹部及び凸部からなり所定の機能を有する機能構造と、
     表面側からの力が前記機能構造に加わるのを防止又は抑制するリブと、
    を具備することを特徴とする機能構造体。
    A functional structure comprising a concave portion and a convex portion formed in the base portion and having a predetermined function;
    A rib for preventing or suppressing the force from the surface side from being applied to the functional structure;
    A functional structure comprising:
  2.  前記リブの高さは、前記凸部の高さ以上に形成されることを特徴とする請求項1記載の機能構造体。 2. The functional structure according to claim 1, wherein a height of the rib is greater than a height of the convex portion.
  3.  前記機能構造を有する面に平行な少なくとも1以上の直線方向において、前記リブの強度は前記凸部の強度より大きくなるように形成されることを特徴とする請求項1又は2記載の機能構造体。 3. The functional structure according to claim 1, wherein the rib has a strength greater than that of the convex portion in at least one linear direction parallel to the surface having the functional structure. .
  4.  前記機能構造を有する面に平行な少なくとも1以上の直線方向において、前記リブは、同じ高さ位置における前記凸部の幅より大きく形成されることを特徴とする請求項1又は2記載の機能構造体。 3. The functional structure according to claim 1, wherein in at least one or more linear directions parallel to the surface having the functional structure, the rib is formed larger than a width of the convex portion at the same height position. body.
  5.  前記リブは、接触物が前記機能構造を破損する力以上の力で当該機能構造に触れないように配置されることを特徴とする請求項1ないし4のいずれかに記載の機能構造。 The functional structure according to any one of claims 1 to 4, wherein the rib is arranged so that a contact object does not touch the functional structure with a force greater than a force that damages the functional structure.
  6.  前記リブは、人の指が前記機能構造を破損する力以上の力で当該機能構造に触れないように配置されることを特徴とする請求項1ないし4のいずれかに記載の機能構造。 The functional structure according to any one of claims 1 to 4, wherein the rib is arranged so that a human finger does not touch the functional structure with a force greater than a force that damages the functional structure.
  7.  前記機能構造はラインアンドスペースからなり、
     前記リブは、前記ラインアンドスペースと平行に形成されるものであることを特徴とする請求項1ないし6のいずれかに記載の機能構造体。
    The functional structure consists of line and space,
    The functional structure according to claim 1, wherein the rib is formed in parallel with the line and space.
  8.  前記リブの両側で前記ラインアンドスペースの方向が異なることを特徴とする請求項7記載の機能構造体。 The functional structure according to claim 7, wherein the line and space directions are different on both sides of the rib.
  9.  前記リブは前記機能構造と同種の機能を発揮するものであることを特徴とする請求項1ないし8のいずれかに記載の機能構造体。 The functional structure according to any one of claims 1 to 8, wherein the rib exhibits a function similar to that of the functional structure.
  10.  前記機能構造はモスアイ構造であることを特徴とする請求項1ないし9のいずれかに記載の機能構造体。 10. The functional structure according to claim 1, wherein the functional structure is a moth-eye structure.
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