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WO2017084186A1 - System and method for automatic monitoring and intelligent analysis of flexible circuit board manufacturing process - Google Patents

System and method for automatic monitoring and intelligent analysis of flexible circuit board manufacturing process Download PDF

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Publication number
WO2017084186A1
WO2017084186A1 PCT/CN2015/100210 CN2015100210W WO2017084186A1 WO 2017084186 A1 WO2017084186 A1 WO 2017084186A1 CN 2015100210 W CN2015100210 W CN 2015100210W WO 2017084186 A1 WO2017084186 A1 WO 2017084186A1
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WIPO (PCT)
Prior art keywords
data
circuit board
flexible circuit
module
microscope
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PCT/CN2015/100210
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French (fr)
Chinese (zh)
Inventor
罗家祥
李致富
吕斯俊
王加朋
李康婧
胡跃明
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华南理工大学
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Publication of WO2017084186A1 publication Critical patent/WO2017084186A1/en

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    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/418Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00Measuring or testing not otherwise provided for
    • G01D21/02Measuring two or more variables by means not covered by a single other subclass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/281Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
    • G01R31/2812Checking for open circuits or shorts, e.g. solder bridges; Testing conductivity, resistivity or impedance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302Contactless testing
    • G01R31/308Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/309Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of printed or hybrid circuits or circuit substrates
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Definitions

  • the invention relates to the field of automatic monitoring and intelligent analysis technology of a flexible printed circuit board (Flexible Printed Circuit Board) manufacturing process, and particularly relates to an automatic monitoring and intelligent analysis system and method for a flexible circuit board manufacturing process.
  • Flexible printed circuit board Flexible Printed Circuit Board
  • Flexible circuit boards are widely used in electronic products with requirements for miniaturization, light weight, and mobility, including display driver chips, camera modules, RF function modules, MEMS modules, fingerprint recognition modules, and finance.
  • IC cards, etc. involving computers, mobile communications, displays, instrumentation, medical devices, smart cards, etc., as well as aerospace, defense, military and other fields, in the development trend of electronic products are getting smaller and thinner, flexible circuits
  • the board will further replace the hard circuit board and usher in more room for development.
  • Flexible circuit board manufacturing process is more complicated, in the general manufacturing process, it needs to be laminated copper foil, paste dry film, laser direct writing exposure, development, etching, stripping, laser drilling, copper plating, Solder mask ink, continuity test and molding process.
  • the key processes mainly include: etching, laser drilling, copper thinning and so on.
  • the main physical parameters and defects of the key processes of the flexible circuit board can be automatically monitored during the manufacturing process of the flexible circuit board, so as to take timely action in the event of critical process abnormalities. Emergency measures to reduce the risk of line failures. This kind of automatic monitoring system will help reduce the cost of the enterprise and is therefore receiving more and more attention from the enterprise.
  • the main physical parameters of the key processes of flexible circuit boards are line width, line spacing and aperture size; and the product defects involved mainly include open circuit, short circuit, line gap, bump, residual copper and so on. Automatic detection and monitoring of key physical parameters of these flexible circuit boards can detect abnormal conditions of key processes in a timely manner, and can perform statistics and analysis on data in a certain period of time to improve and optimize the flexible circuit board manufacturing process.
  • the object of the present invention is to provide an intelligent monitoring and intelligent analysis system and device for automatically monitoring, defect identification and defect cause analysis of a production process of a flexible circuit board manufacturing key process. And methods.
  • the present invention provides the following technical solutions:
  • the data acquisition module includes a microscope automatic data acquisition device, a copper thickness test device and other data acquisition devices, which are mainly used for collecting key physical parameters of the flexible circuit board manufacturing process and flexible circuit board quality data;
  • the basic data module includes process information.
  • quality inspection specifications mainly used as standard information materials for evaluation and inspection of various process quality and defect inspection of flexible circuit boards;
  • intelligent data analysis module includes: T 2 control method using multivariate statistical process for single process anomalies It is predicted that the fusion neural network and support vector machine method are used to predict the abnormality of the whole manufacturing line of flexible circuit board.
  • the neural network based on genetic algorithm optimization is used to identify the abnormal source of the flexible circuit board manufacturing process.
  • the main realization is the flexible circuit.
  • Intelligent quality control of the production process, automatic abnormal state identification and abnormal positioning of the production process, provide reference for the maintenance personnel to eliminate abnormal faults;
  • the comprehensive database module is mainly used to store the data collected by the data acquisition module, process information data and quality inspection specification information. And wisdom And data analysis reports generated by the analysis module.
  • the process information of the basic data module mainly includes: 1) a list of process personnel, a record process worker and a responsible process thereof; 2) device information, including basic information such as a device name, a category, and a model; a basic data module
  • the quality inspection specifications include: IPC-6013B "Quality and Performance Specifications for Flexible Printed Boards", and quality inspection procedures developed within the company.
  • the microscope automatic data acquisition device comprises: a host computer system and a microscope detection platform.
  • the upper computer system includes a motion control module and a microscope vision control processing module.
  • the microscope inspection platform includes an electric precision stage, a shifting rod, a motor control box, a microscope mounting bracket, a microscope, a light source, and a digital camera.
  • the microscope is mounted on a microscope mount, the digital camera is mounted above the microscope, the light source is mounted directly behind the microscope, and the motorized precision stage is mounted directly below the microscope and connected to the motor control box.
  • the microscope vision control processing module is connected to the digital camera, and the motion control module is connected to the motor control box.
  • a servo driver and a power supply are installed in the motor control box, and the servo driver is connected to the host computer through a control card.
  • the host computer system collects images through the motion control module and the microscope vision control processing module, and identifies key physical parameters and defect data of the flexible circuit board corresponding to each key process.
  • the key processes of the flexible circuit board corresponding to the microscope automatic data acquisition device are an etching process and a laser drilling process; key physical parameters include line width, line spacing, aperture size, etc.; defect data mainly includes open circuit, short circuit, and line Notches, bumps, residual copper, etc.
  • the host computer system includes a motion control module that is responsible for moving the electric precision stage on which the flexible circuit board is placed.
  • the servo driver in the motor control box drives the servo motor to control the X and Y axis motion guides to move the electric precision stage respectively, and collect images with the digital camera and the light source.
  • the host computer system includes a microscope vision control processing module, which is responsible for controlling a digital camera to obtain a partial image of the flexible circuit board, image stitching and image processing after being enlarged by the microscope, and according to standard data of the production process of the flexible circuit board process, A comparison of the data is achieved, ultimately showing a flexible circuit board image with defective areas and specific defect details.
  • a microscope vision control processing module responsible for controlling a digital camera to obtain a partial image of the flexible circuit board, image stitching and image processing after being enlarged by the microscope, and according to standard data of the production process of the flexible circuit board process, A comparison of the data is achieved, ultimately showing a flexible circuit board image with defective areas and specific defect details.
  • the copper thickness testing device comprises a copper thickness measuring instrument and a data communication software
  • the copper thickness measuring instrument is mainly used for measuring the thickness of the copper foil
  • the data communication software is mainly used for collecting and transmitting the copper thickness data of the data.
  • the comprehensive database is mainly used for storing basic information of key processes, initial data collected, and statistical information of the data and final results of intelligent analysis, including statistical information of each physical parameter, The diagnosis result of the abnormality of the sequence or the production line and the abnormal source information when there is an abnormality; all the data information is finally stored in the database in the form of a report for the engineers and managers to query in real time.
  • the method for monitoring and analyzing the automatic monitoring and intelligent analysis system of the flexible circuit board manufacturing process includes monitoring the key processes such as copper thinning, etching, drilling, etc. in the manufacturing process of the flexible circuit board, and specifically includes the following steps:
  • the algorithm will query and read the corresponding parameter data set from the database module.
  • step 2 judge whether to perform preprocessing according to the data type included in the data set. If it is a measurement value type, all the data in the parameter data set is standardized and preprocessed, and if it is a count type, the parameter is The data is scaled.
  • step 2 based on the parameter variable category and the standardized data, a multivariate statistical T 2 model is established to visually monitor the abnormal situation of the selected process. If the T 2 control map detects that production abnormal fluctuations are out of control, an alarm is issued and uploaded to the monitoring display and data reporting module, otherwise no response is made.
  • An intelligent analysis method is designed for the abnormal recognition of the whole process of the flexible circuit board manufacturing process, including the following steps:
  • step 1 the neural network method extracts features.
  • step 2 After the completion of step 2, if the user selects the training model, the support vector machine model is trained with the normal and abnormal feature data, and the Gaussian kernel function is used and the grid parameters are used to determine the relevant parameters, thereby completing the establishment of the support vector machine model. . Otherwise, follow step 4 for intelligent analysis of the data.
  • step 2 the batch data of the processing process is monitored using the support vector machine model. If check If it is detected that the abnormal fluctuation of production is out of control, an alarm is issued and uploaded to the monitoring display and data report module, otherwise no response is made.
  • the abnormal source identification (abnormal positioning) algorithm for monitoring a flexible circuit board production process includes the following steps:
  • step 2 After the completion of step 1, if the user selects the training model, the fusion genetic algorithm and the abnormal source recognition model of the deep learning neural network are established on the pre-processed feature data set.
  • the genetic algorithm adopts binary coding technology, and uses the total error square function as the fitness function. Through the selection, crossover, mutation and other evolutionary operators, the structure and weight of the optimized deep learning neural network are selected. Otherwise, follow step 3 for intelligent analysis of the data.
  • step 2 use the abnormal source identification model established by 2 to monitor the whole process of the flexible circuit board manufacturing process. If abnormal fluctuation occurs, the output of the abnormal source identification model can be located to locate the process of the out-of-control abnormality. Send the results to the monitor display and data report module, otherwise no response will be made.
  • the operator logs into the host computer system, turns on the light source, and switches to the digital camera drawing mode through the shift lever after manual focusing.
  • step 1 the servo motor drives the guide rail to move the electric precision stage to return the system to the detection origin.
  • step 2 the operator inputs or downloads the standard file of the flexible circuit board to be tested, such as Gerber file, CAD file, etc., in the database, and then parses the flexible circuit board standard file to obtain the standard. Standard data required for graphs and quality evaluation.
  • step 3 the digital camera captures the image, and the servo motor moves the X and Y axis motion guides to make the system recognize and align the reference point.
  • the motion control module controls the servo driver in the motor control box to drive the servo motor, and moves the electric precision stage by moving the X and Y axis motion guides.
  • the digital camera is enlarged by a microscope, and then the flexible circuit board to be tested is partially taken.
  • the microscopic vision control processing module is to be tested for a partial view of the flexible circuit board. Perform pre-processing, then use the splicing method based on feature template matching feature points to splicing the image, and complete the smoothing of the image, so repeat the drawing and splicing until the flexible circuit board is scanned, and finally obtain the flexible circuit board to be tested.
  • Global map is mapped
  • step 5 the image is binarized and the connected domain is searched, and the connected domain is compared with the connected domain in the circuit diagram template by using the connected domain statistical centroid and area as the matching criterion to determine the mismatched area (defect area);
  • the thinning method detects the line width and the line spacing; uses the Hough transform to identify the position of the hole, and obtains the aperture size based on the area information. Compared with the line width, line spacing and aperture size in the standard figure and standard data, the quality evaluation information is obtained; the contrast method is used to identify the defects such as open circuit, short circuit and residual copper.
  • step 6 the upper computer system displays the full image of the defect area and the specific defect details, and provides an alarm according to the pre-recorded threshold information, so that the operator can timely handle the abnormal process.
  • the host computer system stores the detection result in the local computer, and uploads related images, quality evaluation information, defect information, and defect data to the comprehensive database module for subsequent statistical processing.
  • the invention realizes the whole intelligence of automatic monitoring, defect identification and defect cause analysis on the production process of the key processes of the flexible circuit board manufacturing process by collecting, monitoring and intelligently analyzing the key physical parameters of the flexible circuit board corresponding to the key processes. Monitoring and intelligent analysis.
  • the microscope and precision electric platform are introduced into the monitoring of the key processes of the flexible circuit board.
  • the accuracy of the system monitoring object is effectively improved, and on the other hand, the detection process is simplified and the efficiency of the system detection is improved.
  • Figure 1 is a block diagram showing the automatic monitoring and intelligent analysis system of the flexible circuit board manufacturing process
  • FIG. 2 is a perspective view of a microscope automatic data acquisition device
  • FIG. 3 is a structural block diagram of a microscope automatic data acquisition device
  • Figure 4 is a detailed implementation diagram of the automatic monitoring and intelligent analysis system for the manufacturing process of the flexible circuit board.
  • the automatic monitoring and intelligent analysis system of the flexible circuit board manufacturing process includes a basic data module, a data acquisition module, a comprehensive database module, an intelligent data analysis module, and a monitoring display and data report module.
  • the data acquisition module includes a microscope automatic data acquisition device, a copper thickness test device and other data acquisition devices, which are mainly used for collecting key physical parameters of the flexible circuit board manufacturing process and flexible circuit board quality data;
  • the basic data module includes process information.
  • intelligent data analysis module includes statistical process control algorithm to identify abnormal state, fusion neural network and support vector machine algorithm automatically Identifying anomalies, genetic algorithm-based neural network deep learning methods for the identification of abnormal source of flexible circuit board production process (abnormal positioning), mainly to achieve scratch Intelligent quality control of the production process of the circuit board, automatic abnormal state identification and abnormal positioning of the production process, provide reference for the maintenance personnel to eliminate abnormal faults;
  • the comprehensive database module is mainly used to store the data collected by the data acquisition module, process information data and quality inspection. Specification information and analysis results and data reports generated by the intelligent analysis module.
  • the process information mainly includes information such as personnel and equipment of the process.
  • the quality inspection specifications mainly include: IPC-6013B "Qualification and Performance Specifications of Flexible Printed Board", and quality inspection procedures formulated by the company.
  • the microscope automatic data acquisition device includes a host computer system and a microscope inspection platform.
  • the upper computer system includes a motion control module and a microscope vision control processing module.
  • the microscope inspection platform includes a motorized precision stage 1, a shifting rod 3, a motor control box 11, a microscope fixing bracket 6, a microscope 5, a light source 2, and a digital camera 4.
  • the electric precision stage 1 includes an X-axis servo motor 10, a Y-axis servo motor 13, an X-axis motion guide 7, and a Y-axis motion guide 12.
  • the microscope 5 is mounted on the microscope fixing bracket 6, the digital camera 4 is mounted above the microscope 5, the light source 2 is mounted directly behind the microscope 5, and the electric precision stage 1 is mounted directly below the microscope 5, and is connected to the motor control box 11. .
  • the microscope vision control processing module is connected to the digital camera, and the motion control module is connected to the motor control box.
  • a servo driver and a power supply are installed in the motor control box, and the servo driver is connected to the host computer through a control card.
  • the microscope inspection platform described in this example uses a digital camera from Basler's piA2400 model, using a model MJ51 microscope and a halogen light source with a blue filter.
  • the electric precision stage uses Panasonic's servo motor and servo drive, and is connected to the host computer using GTS-400-PV motion control card from Gutech (Shenzhen) Co., Ltd.
  • the flexible circuit board manufacturing process automatic monitoring and intelligent analysis system uses a distributed structure to construct the system.
  • the automatic data acquisition and collection of the microscope is mainly responsible for data acquisition of key parameters and defects of the etching process and the drilling process;
  • the copper thickness test device is mainly used for data collection of key parameters of the copper thinning process.
  • the etching process monitoring station, the copper thinning process monitoring station and the drilling process monitoring station respectively implement the etching process, the copper thinning process and the drilling
  • the database server is mainly used to store system user data and historical data of monitoring and intelligent analysis.
  • the work tasks of the quality department monitoring room mainly realize the data analysis, monitoring and intelligent analysis and fault diagnosis of the process comprehensive data.
  • the general manager's office monitoring room mainly realizes the data review, monitoring and process comprehensive data analysis and fault diagnosis results of each process.
  • the key processes of the flexible circuit board corresponding to the microscope automatic data acquisition device of the present example are an etching process and a laser drilling process; key physical parameters include line width, line spacing, aperture size, etc.; defect data mainly includes open circuit, short circuit, and line Notches, bumps, residual copper, etc.
  • the upper computer system of the microscope automatic data acquisition device includes a motion control module, which is responsible for moving the electric precision stage on which the flexible circuit board is placed.
  • the servo driver in the motor control box drives the servo motor to control the X and Y axis motion guides to move the electric precision stage respectively, and collect images with the digital camera and the light source.
  • the upper computer system of the microscope automatic data acquisition device further comprises a microscope vision control processing module, which is responsible for controlling the digital camera to obtain a partial image of the flexible circuit board, image stitching and image processing after being enlarged by the microscope, and according to the production process of the flexible circuit board.
  • Standard data which compares the data and ultimately displays a flexible board image with defective areas and specific defect details.
  • the method for evaluating the quality of a flexible circuit board of a microscope automatic data acquisition device includes the following steps:
  • the operator logs into the host computer system, turns on the light source, and switches to the digital camera drawing mode through the shift lever after manual focusing.
  • step 1 the servo motor drives the guide rail to move the electric precision stage to return the system to the detection origin.
  • step 2 the operator inputs or downloads the standard file of the flexible circuit board to be tested, such as Gerber file, CAD file, etc. in the database, and then parses the flexible circuit board standard file to obtain the standard figure and quality. Evaluate the required standard data.
  • the standard file of the flexible circuit board to be tested such as Gerber file, CAD file, etc.
  • step 3 the digital camera captures the image, and the servo motor moves the X and Y axis motion guides to make the system Identify and align the reference points.
  • the motion control module controls the servo driver in the motor control box to drive the servo motor, and moves the electric precision stage by moving the X and Y axis motion guides.
  • the digital camera is enlarged by a microscope, and then the flexible circuit board to be tested is partially taken.
  • the microscopic vision control processing module is to be tested for a partial view of the flexible circuit board. Perform pre-processing, then use the splicing method based on feature template matching feature points to splicing the image, and complete the smoothing of the image, so repeat the drawing and splicing until the flexible circuit board is scanned, and finally obtain the flexible circuit board to be tested.
  • Global map is mapped
  • step 5 the image is binarized and the connected domain is searched, and the connected domain is compared with the connected domain in the circuit diagram template by using the connected domain statistical centroid and area as the matching criterion to determine the mismatched area (defect area);
  • the thinning method detects the line width and the line spacing; uses the Hough transform to identify the position of the hole, and obtains the aperture size based on the area information. Compared with the line width, line spacing and aperture size in the standard map and standard data, the quality evaluation information is obtained; and the defects such as open circuit, short circuit and residual copper are identified by the comparison method.
  • step 6 the upper computer system displays the full image of the defect area and the specific defect details, and provides an alarm according to the pre-recorded threshold information, so that the operator can timely handle the abnormal process.
  • the host computer system stores the detection result in the local computer, and uploads related images, quality evaluation information, defect information, and defect data to the comprehensive database module for subsequent statistical processing.
  • the copper thickness test device of the present example includes a copper thickness measuring instrument and a data communication software.
  • the copper thickness measuring instrument is mainly used for measuring the thickness of the copper foil
  • the data communication software is mainly used for collecting and transmitting the copper thickness data of the data.
  • the comprehensive database of this example is mainly used to store the basic information of key processes, the initial data collected, and various intermediate information obtained in the process of automatic monitoring and intelligent analysis and reasoning, and output result information after solving the problem.
  • the results of the intelligent analysis are finally stored in the database in the form of reports for engineers and managers to query in real time.
  • This example designs a multivariate statistical process monitoring method for key processes such as copper thinning, etching, and drilling in the manufacturing process of flexible circuit boards, including the following steps:
  • the algorithm will query and read the corresponding parameter number from the database module. According to the collection.
  • step 2 determine whether to perform pre-processing according to the data type included in the data set, if it is a type of measurement value, such as the line width and line spacing of the etching process, the roundness, position and copper plating of the drilling process
  • the copper thickness of the process, etc. is standardized for all data in the parameter data set.
  • the parameter data is scaled, that is, the number of boards with a certain defect is divided by the production. The total number of boards.
  • a multivariate statistical ⁇ 2 model is established to visually monitor the abnormal conditions of the selected process.
  • the key physical parameters are the aperture size and the roundness of the hole.
  • This example designs an intelligent analysis method for the abnormal recognition of the whole process of the flexible circuit board manufacturing process. Including the following steps:
  • the training data or the data to be monitored for the abnormal process identification of the flexible circuit board manufacturing According to the data type included in the data set, whether to perform preprocessing, if it is a measurement value type, all the data in the parameter data set is standardized and preprocessed, and if it is a counting type, the parameter data is proportionalized.
  • the neural network method (such as a 3-layer BP network) is used to extract features, that is, input key parameters of all processes in the manufacturing process of the flexible circuit board, and output main characteristic data that affects the quality of the flexible circuit board.
  • step 3 After the completion of step 2, if the user selects the training model, the support vector machine model is trained with the normal and abnormal feature data, and the Gaussian kernel function is used and the penalty parameter C and the Gaussian kernel parameter ⁇ in the model are determined using the grid method. , thus completing the establishment of the support vector machine model. Otherwise, follow step 4 for intelligent analysis of the data.
  • step 2 the batch data of the processing process is monitored using the support vector machine model. If it is detected that the abnormal production fluctuation is out of control, an alarm is issued and uploaded to the monitoring display and data reporting module, otherwise no response is made.
  • This example designs an anomaly source identification (abnormal positioning) algorithm for monitoring the production process of flexible circuit boards, including the following steps:
  • step 2 After the completion of step 1, if the user selects the training model, a neural network anomaly source recognition model of the fusion genetic algorithm is established for the pre-processed feature data set.
  • the genetic algorithm adopts binary coding technology, and uses the total error square function as the fitness function. Through the selection, crossover, mutation and other evolutionary operators, the structure and weight of the optimized neural network are selected. Otherwise, follow step 3 for intelligent analysis of the data.
  • step 2 use the abnormal source identification model established by 2 to monitor the whole process of the flexible circuit board manufacturing process. If abnormal fluctuation occurs, the output of the abnormal source identification model can be located to locate the process of the out-of-control abnormality. Send the results to the monitor display and data report module, otherwise no response will be made.
  • the present invention can be preferably implemented.

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Abstract

A system and method for automatic monitoring and intelligent analysis of a flexible circuit board manufacturing process. The system comprises a basic information module, a parameter acquisition module, a comprehensive database module, an intelligent data analysis module and a monitoring display and data report module. The parameter acquisition module comprises a microscope automatic data acquisition device and a copper thickness testing device; the microscope automatic data acquisition device acquires the line width and line distance of an etching procedure and the aperture of a drilling procedure; and the copper thickness testing device is adopted to measure the copper thickness, and the statistics of procedure defect data is carried out. A multivariate statistical process control method, a neural network and a support vector machine are adopted as basic analysis methods, so as to perform intelligent analysis on acquired data, predict procedure and production line abnormalities, and identify generated abnormality sources. Automatic monitoring on the manufacturing process and the quality of a flexible circuit board can be realized, and the stability of procedures and the yield of products can be improved.

Description

挠性电路板制造过程自动监测和智能分析系统及方法Flexible circuit board manufacturing process automatic monitoring and intelligent analysis system and method 技术领域Technical field
本发明涉及挠性印制电路板(Flexible Printed Circuit Board,简称挠性电路板)制造过程的自动监测和智能分析技术领域,具体涉及挠性电路板制造过程自动监测和智能分析系统及方法。The invention relates to the field of automatic monitoring and intelligent analysis technology of a flexible printed circuit board (Flexible Printed Circuit Board) manufacturing process, and particularly relates to an automatic monitoring and intelligent analysis system and method for a flexible circuit board manufacturing process.
背景技术Background technique
挠性电路板被广泛应用于具有小型化、轻量化、可移动等要求的电子产品中,包括显示驱动芯片、摄像头模组、射频功能模组、微机电系统模组、指纹识别模组、金融IC卡等,涉及计算机、移动通讯、显示器、仪器仪表、医疗器械、智能卡等以及航空航天、国防军工等各个领域,在电子产品越来越小、越来越薄的发展趋势下,挠性电路板将进一步取代硬质电路板,迎来更大的发展空间。Flexible circuit boards are widely used in electronic products with requirements for miniaturization, light weight, and mobility, including display driver chips, camera modules, RF function modules, MEMS modules, fingerprint recognition modules, and finance. IC cards, etc., involving computers, mobile communications, displays, instrumentation, medical devices, smart cards, etc., as well as aerospace, defense, military and other fields, in the development trend of electronic products are getting smaller and thinner, flexible circuits The board will further replace the hard circuit board and usher in more room for development.
挠性电路板制造加工工艺较为复杂,就一般的制造流程而言,需经过层压铜箔、贴感光干膜、激光直写曝光、显影、刻蚀、剥膜、激光钻孔、电镀铜、阻焊油墨、通断测试和成型等工序。其中,关键工序主要包括:刻蚀、激光钻孔、铜减薄等。Flexible circuit board manufacturing process is more complicated, in the general manufacturing process, it needs to be laminated copper foil, paste dry film, laser direct writing exposure, development, etching, stripping, laser drilling, copper plating, Solder mask ink, continuity test and molding process. Among them, the key processes mainly include: etching, laser drilling, copper thinning and so on.
为了提高挠性电路板制造的稳定性和良率,在挠性电路板的制造过程中,可对挠性电路板关键工序的主要物理参数和缺陷进行自动监控,从而在出现关键工序异常时及时采取应急措施,降低产线故障的风险。这种自动监控系统将有助于降低企业成本,因而越来越受到企业的重视。挠性电路板关键工序的主要物理参数为线宽、线距和孔径大小;而涉及到的产品缺陷主要包括断路、短路、线路缺口、凸起、残铜等。对这些挠性电路板关键物理参数进行自动检测和监控,可及时发现关键工序的异常情况,并可对一定时间周期内的数据进行统计和分析,以改进和优化挠性电路板制造流程。In order to improve the stability and yield of flexible circuit board manufacturing, the main physical parameters and defects of the key processes of the flexible circuit board can be automatically monitored during the manufacturing process of the flexible circuit board, so as to take timely action in the event of critical process abnormalities. Emergency measures to reduce the risk of line failures. This kind of automatic monitoring system will help reduce the cost of the enterprise and is therefore receiving more and more attention from the enterprise. The main physical parameters of the key processes of flexible circuit boards are line width, line spacing and aperture size; and the product defects involved mainly include open circuit, short circuit, line gap, bump, residual copper and so on. Automatic detection and monitoring of key physical parameters of these flexible circuit boards can detect abnormal conditions of key processes in a timely manner, and can perform statistics and analysis on data in a certain period of time to improve and optimize the flexible circuit board manufacturing process.
在现阶段的挠性电路板制造行业中,传统人工检测仍为检测的主要方法。但随着线宽线距越来越小,图像密度越来越高,传统人工检测因检测时间长、误报率高而无 法满足产业需求。针对挠性电路板的关键工序,通过模式识别技术进行图像拼接和处理,将挠性电路板关键物理参数与存储在计算机内的标准参数进行对比,判断出关键工艺的状态异常,从而对异常工序进行处理,实现关键工序的自动化检测和监控。In the current flexible circuit board manufacturing industry, traditional manual inspection is still the main method of detection. However, as the line width and line spacing become smaller and smaller, the image density becomes higher and higher, and the traditional manual detection has a long detection time and a high false positive rate. The law meets the needs of the industry. For the key processes of flexible circuit boards, image patterning and processing are performed by pattern recognition technology, and the key physical parameters of the flexible circuit board are compared with the standard parameters stored in the computer to judge the abnormal state of the key process, thus the abnormal process Processed to automate the detection and monitoring of critical processes.
发明内容Summary of the invention
针对现有技术中存在的技术问题,本发明的目的是:提供一种对挠性电路板制造关键工序的生产过程进行自动监控、缺陷识别、缺陷原因分析的智能化监测与智能分析系统、装置及方法。In view of the technical problems existing in the prior art, the object of the present invention is to provide an intelligent monitoring and intelligent analysis system and device for automatically monitoring, defect identification and defect cause analysis of a production process of a flexible circuit board manufacturing key process. And methods.
为实现上述目的,本发明所提供如下技术方案:To achieve the above object, the present invention provides the following technical solutions:
挠性电路板制造过程自动监测和智能分析系统,包括基本资料模块、数据采集模块、综合数据库模块、智能数据分析模块以及监测显示与数据报表模块。数据采集模块包括显微镜自动数据采集装置、铜厚测试装置和其他数据采集装置,主要用于采集挠性电路板制造过程各工序的关键物理参数以及挠性电路板质量数据;基本资料模块包括工序信息和质量检验规范,主要用于挠性电路板各工序质量和缺陷检验时作为评判和检验的标准信息资料;智能数据分析模块包括:采用多元统计过程的T2控制方法对单工序的异常情况进行预测,采用融合神经网络和支持向量机的方法预测挠性电路板制造整线的异常,采用基于遗传算法优化的神经网络对挠性电路板制造过程的异常源进行识别;主要实现对挠性电路板生产过程智能质量控制、生产过程的自动异常状态识别和异常定位,为维护人员排除异常故障提供参考;综合数据库模块主要用于存储数据采集模块所采集的数据、工序信息资料和质量检验规范信息以及智能分析模块所产生的分析结果和数据报表。Automatic monitoring and intelligent analysis system for flexible circuit board manufacturing process, including basic data module, data acquisition module, comprehensive database module, intelligent data analysis module, and monitoring display and data reporting module. The data acquisition module includes a microscope automatic data acquisition device, a copper thickness test device and other data acquisition devices, which are mainly used for collecting key physical parameters of the flexible circuit board manufacturing process and flexible circuit board quality data; the basic data module includes process information. And quality inspection specifications, mainly used as standard information materials for evaluation and inspection of various process quality and defect inspection of flexible circuit boards; intelligent data analysis module includes: T 2 control method using multivariate statistical process for single process anomalies It is predicted that the fusion neural network and support vector machine method are used to predict the abnormality of the whole manufacturing line of flexible circuit board. The neural network based on genetic algorithm optimization is used to identify the abnormal source of the flexible circuit board manufacturing process. The main realization is the flexible circuit. Intelligent quality control of the production process, automatic abnormal state identification and abnormal positioning of the production process, provide reference for the maintenance personnel to eliminate abnormal faults; the comprehensive database module is mainly used to store the data collected by the data acquisition module, process information data and quality inspection specification information. And wisdom And data analysis reports generated by the analysis module.
进一步地,所述的基本资料模块的工序信息主要包括:1)工序人员名单,记录工序工作人员及其负责工序;2)设备信息,包括设备的名称、类别和型号等基本信息;基本资料模块的质量检验规范包括:IPC-6013B《挠性印制板的鉴定及性能规范》、企业内部制定的质量检验规程等。 Further, the process information of the basic data module mainly includes: 1) a list of process personnel, a record process worker and a responsible process thereof; 2) device information, including basic information such as a device name, a category, and a model; a basic data module The quality inspection specifications include: IPC-6013B "Quality and Performance Specifications for Flexible Printed Boards", and quality inspection procedures developed within the company.
进一步地,所述的显微镜自动数据采集装置包括:上位机系统和显微镜检测平台。上位机系统包括运动控制模块和显微镜视觉控制处理模块。显微镜检测平台包括电动精密载物台、变换杆、电机控制箱、显微镜固定支架、显微镜、光源和数字摄像头。显微镜安装在显微镜固定支架上,数字摄像头安装在显微镜上方,光源安装在显微镜正后方,电动精密载物台安装在显微镜的正下方,且与电机控制箱连接。显微镜视觉控制处理模块与数字摄像头相连接,运动控制模块与电机控制箱相连接。电机控制箱内安装有伺服驱动器、电源,伺服驱动器通过控制卡与上位机连接。Further, the microscope automatic data acquisition device comprises: a host computer system and a microscope detection platform. The upper computer system includes a motion control module and a microscope vision control processing module. The microscope inspection platform includes an electric precision stage, a shifting rod, a motor control box, a microscope mounting bracket, a microscope, a light source, and a digital camera. The microscope is mounted on a microscope mount, the digital camera is mounted above the microscope, the light source is mounted directly behind the microscope, and the motorized precision stage is mounted directly below the microscope and connected to the motor control box. The microscope vision control processing module is connected to the digital camera, and the motion control module is connected to the motor control box. A servo driver and a power supply are installed in the motor control box, and the servo driver is connected to the host computer through a control card.
进一步地,所述上位机系统通过运动控制模块和显微镜视觉控制处理模块采集图像,并识别出各关键工序对应的挠性电路板关键物理参数和缺陷数据。其中,所述显微镜自动数据采集装置对应的挠性电路板关键工序为刻蚀工序和激光钻孔工序;关键物理参数包括线宽、线距、孔径大小等;缺陷数据主要包括断路、短路、线路缺口、凸起、残铜等。Further, the host computer system collects images through the motion control module and the microscope vision control processing module, and identifies key physical parameters and defect data of the flexible circuit board corresponding to each key process. The key processes of the flexible circuit board corresponding to the microscope automatic data acquisition device are an etching process and a laser drilling process; key physical parameters include line width, line spacing, aperture size, etc.; defect data mainly includes open circuit, short circuit, and line Notches, bumps, residual copper, etc.
进一步地,所述上位机系统包含运动控制模块,负责移动放置挠性电路板的电动精密载物台。上位机通过运动控制模块发出采集图像命令后,电机控制箱内伺服驱动器驱动伺服电机,分别控制X、Y轴运动导轨移动电动精密载物台,配合数字摄像头、光源采集图像。Further, the host computer system includes a motion control module that is responsible for moving the electric precision stage on which the flexible circuit board is placed. After the upper computer sends the image acquisition command through the motion control module, the servo driver in the motor control box drives the servo motor to control the X and Y axis motion guides to move the electric precision stage respectively, and collect images with the digital camera and the light source.
进一步地,所述上位机系统包含显微镜视觉控制处理模块,负责控制数字摄像头通过显微镜放大后获取挠性电路板局部图像、图像拼接和图像处理,并根据挠性电路板工序的生产过程标准数据,实现对数据的比较,最终显示带有缺陷区域及具体缺陷细节的挠性电路板图像。Further, the host computer system includes a microscope vision control processing module, which is responsible for controlling a digital camera to obtain a partial image of the flexible circuit board, image stitching and image processing after being enlarged by the microscope, and according to standard data of the production process of the flexible circuit board process, A comparison of the data is achieved, ultimately showing a flexible circuit board image with defective areas and specific defect details.
进一步地,所述的铜厚测试装置包括铜厚测量仪器和数据通信软件,铜厚测量仪主要用于测量铜箔的厚度,数据通信软件主要用于数据的铜厚数据的采集和传输。Further, the copper thickness testing device comprises a copper thickness measuring instrument and a data communication software, the copper thickness measuring instrument is mainly used for measuring the thickness of the copper foil, and the data communication software is mainly used for collecting and transmitting the copper thickness data of the data.
进一步地,所述的综合数据库主要用于存放关键工序的基本信息、采集的初始数据以及数据的统计信息和进行智能分析的最终结果,包括各物理参数的统计信息、工 序或者产线是否异常的诊断结果和存在异常时的异常源信息;所有数据信息,最终以报表的形式存放在数据库中,供工程师和管理人员实时查询。Further, the comprehensive database is mainly used for storing basic information of key processes, initial data collected, and statistical information of the data and final results of intelligent analysis, including statistical information of each physical parameter, The diagnosis result of the abnormality of the sequence or the production line and the abnormal source information when there is an abnormality; all the data information is finally stored in the database in the form of a report for the engineers and managers to query in real time.
所述的挠性电路板制造过程自动监测和智能分析系统的监测和分析方法,包括对挠性电路板制造过程的铜减薄、蚀刻、钻孔等关键工序的监控,具体包括以下步骤:The method for monitoring and analyzing the automatic monitoring and intelligent analysis system of the flexible circuit board manufacturing process includes monitoring the key processes such as copper thinning, etching, drilling, etc. in the manufacturing process of the flexible circuit board, and specifically includes the following steps:
1、根据用户选择查看的工序,该算法将从数据库模块查询并读取相应的参数数据集。1. According to the process selected by the user, the algorithm will query and read the corresponding parameter data set from the database module.
2、待步骤1完成后,根据该数据集所包含的数据类型判断是否进行预处理,如果是计量值类型,则将参数数据集中的所有数据进行标准化预处理,如果是计数类型,则将参数数据进行比例化处理。2. After the completion of step 1, judge whether to perform preprocessing according to the data type included in the data set. If it is a measurement value type, all the data in the parameter data set is standardized and preprocessed, and if it is a count type, the parameter is The data is scaled.
3、待步骤2完成后,根据参数变量类别和标准化后的数据,建立多变量统计T2模型,对所选择工序的异常情况进行可视化监控。如果T2控制图检测到生产异常波动是失控状态,则发出警报并且上传到监控显示与数据报表模块,否则不作出反应。3. After the completion of step 2, based on the parameter variable category and the standardized data, a multivariate statistical T 2 model is established to visually monitor the abnormal situation of the selected process. If the T 2 control map detects that production abnormal fluctuations are out of control, an alarm is issued and uploaded to the monitoring display and data reporting module, otherwise no response is made.
对挠性电路板制造过程的全工序的异常识别设计一种智能分析方法,包括以下步骤:An intelligent analysis method is designed for the abnormal recognition of the whole process of the flexible circuit board manufacturing process, including the following steps:
1、根据用户选择,读取挠性电路板制造全工序异常识别的训练数据或者待监控数据。根据数据集所包含的数据类型判断是否进行预处理,如果是计量值类型(包括线宽、线距、孔径和孔圆度),则将参数数据集中的所有数据进行标准化预处理,如果是计数类型(包括各种缺陷在统计时间内的发生的个数),则将参数数据进行比例化处理。1. According to the user's choice, read the training data or the data to be monitored for the abnormal process identification of the flexible circuit board manufacturing. Determine whether to perform preprocessing according to the data type included in the data set. If it is a measurement value type (including line width, line spacing, aperture, and hole roundness), all data in the parameter data set is standardized and preprocessed, if it is a count The type (including the number of occurrences of various defects in the statistical time), the parameter data is scaled.
2、待步骤1完成后,神经网络方法提取特征。2. After the completion of step 1, the neural network method extracts features.
3、待步骤2完成后,如果用户选择训练模型,则用正常和异常的特征数据,训练支持向量机模型,采用高斯核函数并且使用网格法确定相关参数,从而完成支持向量机模型的建立。否则,按照步骤4进行数据的智能分析。3. After the completion of step 2, if the user selects the training model, the support vector machine model is trained with the normal and abnormal feature data, and the Gaussian kernel function is used and the grid parameters are used to determine the relevant parameters, thereby completing the establishment of the support vector machine model. . Otherwise, follow step 4 for intelligent analysis of the data.
4、待步骤2完成后,使用支持向量机模型对加工工序的批数据进行监控。如果检 测到生产异常波动是失控状态,则发出警报并且上传到监控显示与数据报表模块,否则不作出反应。4. After the completion of step 2, the batch data of the processing process is monitored using the support vector machine model. If check If it is detected that the abnormal fluctuation of production is out of control, an alarm is issued and uploaded to the monitoring display and data report module, otherwise no response is made.
所述一种对挠性电路板生产工序监控的异常源识别(异常定位)算法,包括以下步骤:The abnormal source identification (abnormal positioning) algorithm for monitoring a flexible circuit board production process includes the following steps:
1、根据用户选择,读取挠性电路板制造全工序异常定位的训练数据或者待监控数据。从数据库模块查询并读取所涉及的挠性电路板制造过程关键参数数据,组成批数据。判断该批数据是否进行预处理,如果是计量值类型需要预处理,则将参数数据集中的所有数据进行标准化预处理,如果是计数类型则不处理。1. According to the user's choice, read the training data or the data to be monitored for the abnormal positioning of the whole process of the flexible circuit board manufacturing. The key parameters of the flexible circuit board manufacturing process involved are queried and read from the database module to form batch data. It is judged whether the batch data is preprocessed. If the metering value type requires preprocessing, all the data in the parameter data set is subjected to standardization preprocessing, and if it is a counting type, it is not processed.
2、待步骤1完成后,如果用户选择训练模型,则对预处理后的特征数据集建立融合遗传算法和深度学习神经网络的异常源识别模型。遗传算法采用二进制编码技术,以总误差平方函数作为适应度函数,通过选择、交叉、变异等进化算子,选择优化的深度学习神经网络的结构和权值。否则,按照步骤3进行数据的智能分析。2. After the completion of step 1, if the user selects the training model, the fusion genetic algorithm and the abnormal source recognition model of the deep learning neural network are established on the pre-processed feature data set. The genetic algorithm adopts binary coding technology, and uses the total error square function as the fitness function. Through the selection, crossover, mutation and other evolutionary operators, the structure and weight of the optimized deep learning neural network are selected. Otherwise, follow step 3 for intelligent analysis of the data.
3、待步骤2完成后,使用2建立的异常源识别模型对挠性电路板制造过程全工序进行监控,如果出现异常波动,则根据异常源识别模型输出结果可以定位到失控异常发生的工序并将结果发送到监控显示与数据报表模块,否则不作出反应。3. After the completion of step 2, use the abnormal source identification model established by 2 to monitor the whole process of the flexible circuit board manufacturing process. If abnormal fluctuation occurs, the output of the abnormal source identification model can be located to locate the process of the out-of-control abnormality. Send the results to the monitor display and data report module, otherwise no response will be made.
所述显微镜自动数据采集装置的挠性电路板质量评价方法,其特征在于,包括以下步骤:The flexible circuit board quality evaluation method of the microscope automatic data acquisition device is characterized in that it comprises the following steps:
1、将挠性电路板放置在电动精密载物台,并用固定装置固定后,操作人员登录上位机系统,打开光源,并在手动对焦后通过变换杆切换到数字摄像头采图模式。1. After placing the flexible circuit board on the electric precision stage and fixing it with the fixing device, the operator logs into the host computer system, turns on the light source, and switches to the digital camera drawing mode through the shift lever after manual focusing.
2、待步骤1完成后,伺服电机驱动导轨移动电动精密载物台,使系统回到检测原点。2. After the completion of step 1, the servo motor drives the guide rail to move the electric precision stage to return the system to the detection origin.
3、待步骤2完成后,由操作人员输入或在数据库中下载待检测的挠性电路板的标准文件,如Gerber文件、CAD文件等,然后解析挠性电路板标准文件,得到标准 图和质量评价所需的标准数据。3. After the completion of step 2, the operator inputs or downloads the standard file of the flexible circuit board to be tested, such as Gerber file, CAD file, etc., in the database, and then parses the flexible circuit board standard file to obtain the standard. Standard data required for graphs and quality evaluation.
4、待步骤3完成后,数字摄像头采集图像,伺服电机移动X、Y轴运动导轨,使系统识别并对准基准点。4. After the completion of step 3, the digital camera captures the image, and the servo motor moves the X and Y axis motion guides to make the system recognize and align the reference point.
5、待步骤4完成后,运动控制模块控制电机控制箱内的伺服驱动器驱动伺服电机,通过移动X、Y轴运动导轨移动电动精密载物台。按照从左到右,从上而下的顺序,由数字摄像头通过显微镜放大后,对待测挠性电路板进行局部采图,与此同时,显微镜视觉控制处理模块待测挠性电路板的局部图进行预处理,随后使用基于特征模板匹配特征点的拼接方法进行图像拼接,并完成图像的平滑处理,如此重复采图、拼接,直到把挠性电路板扫描完毕,最终得到待测挠性电路板的全局图。5. After the completion of step 4, the motion control module controls the servo driver in the motor control box to drive the servo motor, and moves the electric precision stage by moving the X and Y axis motion guides. According to the order from left to right and from top to bottom, the digital camera is enlarged by a microscope, and then the flexible circuit board to be tested is partially taken. At the same time, the microscopic vision control processing module is to be tested for a partial view of the flexible circuit board. Perform pre-processing, then use the splicing method based on feature template matching feature points to splicing the image, and complete the smoothing of the image, so repeat the drawing and splicing until the flexible circuit board is scanned, and finally obtain the flexible circuit board to be tested. Global map.
6、待步骤5完成后,对图像进行二值化和连通域的查找,并以连通域统计质心及面积为匹配标准与电路图模板中的连通域进行对比判定不匹配区域(缺陷区域);使用细化方法检测线宽和线距;使用霍夫变换识别圆孔位置,并根据面积信息获取孔径大小。与标准图和标准数据中的线宽、线距、孔径大小对比,获取质量评价信息;采用对比法对断路、短路、残铜等缺陷进行识别。6. After the completion of step 5, the image is binarized and the connected domain is searched, and the connected domain is compared with the connected domain in the circuit diagram template by using the connected domain statistical centroid and area as the matching criterion to determine the mismatched area (defect area); The thinning method detects the line width and the line spacing; uses the Hough transform to identify the position of the hole, and obtains the aperture size based on the area information. Compared with the line width, line spacing and aperture size in the standard figure and standard data, the quality evaluation information is obtained; the contrast method is used to identify the defects such as open circuit, short circuit and residual copper.
7、待步骤6完成后,上位机系统显示缺陷区域及具体缺陷细节的全图图像,并根据预录阈值信息,提出告警,以便操作人员及时对异常工序进行处理。7. After the completion of step 6, the upper computer system displays the full image of the defect area and the specific defect details, and provides an alarm according to the pre-recorded threshold information, so that the operator can timely handle the abnormal process.
8、待步骤7完成后,上位机系统将检测结果存储在本地计算机中,并将相关图像、质量评价信息、缺陷信息、缺陷数据上传至综合数据库模块中,以待后续统计处理。8. After the completion of step 7, the host computer system stores the detection result in the local computer, and uploads related images, quality evaluation information, defect information, and defect data to the comprehensive database module for subsequent statistical processing.
本发明是通过对关键工序对应的挠性电路板关键物理参数的采集、监测和智能分析,实现对挠性电路板制造过程关键工序的生产过程进行自动监控、缺陷识别、缺陷原因分析的全智能化监测与智能分析。The invention realizes the whole intelligence of automatic monitoring, defect identification and defect cause analysis on the production process of the key processes of the flexible circuit board manufacturing process by collecting, monitoring and intelligently analyzing the key physical parameters of the flexible circuit board corresponding to the key processes. Monitoring and intelligent analysis.
本发明相对现有技术具有如下的积极优点和效果:The present invention has the following positive advantages and effects over the prior art:
1、使用自动化的装置及系统对挠性电路板的制造过程进行自动化监测与分析, 相较于传统的人工检测,不仅降低了检测的误报率、增加了检测的类别,而且还可以大大提高挠性电路板生产效率和自动化水平。1. Automated monitoring and analysis of the manufacturing process of flexible circuit boards using automated devices and systems. Compared with the traditional manual detection, it not only reduces the false alarm rate of detection, increases the type of detection, but also greatly improves the production efficiency and automation level of flexible circuit boards.
2、将显微镜和精密电动平台引入到挠性电路板关键工序的监测中,一方面有效的提高了系统监测对象的精度,另一方面简化了检测工艺,提高了系统检测的效率。2. The microscope and precision electric platform are introduced into the monitoring of the key processes of the flexible circuit board. On one hand, the accuracy of the system monitoring object is effectively improved, and on the other hand, the detection process is simplified and the efficiency of the system detection is improved.
3、使用统计过程控制、神经网络等方法实现了智能化的质量监控和故障诊断,从而更为有效的保证挠性电路板生产的质量,提高生产过程故障诊断的能力。3. Using statistical process control, neural network and other methods to achieve intelligent quality monitoring and fault diagnosis, thereby more effectively ensuring the quality of flexible circuit board production and improving the ability of production process fault diagnosis.
附图说明DRAWINGS
图1是挠性电路板制造过程自动监测和智能分析系统原理框图;Figure 1 is a block diagram showing the automatic monitoring and intelligent analysis system of the flexible circuit board manufacturing process;
图2为显微镜自动数据采集装置立体示意图;2 is a perspective view of a microscope automatic data acquisition device;
图3为显微镜自动数据采集装置的结构框图;3 is a structural block diagram of a microscope automatic data acquisition device;
图4为挠性电路板制造过程自动监测和智能分析系统的具体实现图。Figure 4 is a detailed implementation diagram of the automatic monitoring and intelligent analysis system for the manufacturing process of the flexible circuit board.
具体实施方式detailed description
下面结合实施例及附图对本发明作进一步详细说明,但本发明的实施方法不限于此,需指出的是,以下若有未特别详细说明之过程,均是本领域技术人员可以根据惯常做法实现的。The present invention will be further described in detail below with reference to the embodiments and the accompanying drawings. However, the embodiments of the present invention are not limited thereto, and it should be noted that the following procedures, which are not specifically described in detail, can be implemented by those skilled in the art according to the conventional practice. of.
实施例Example
如图1所示,本挠性电路板制造过程自动监测和智能分析系统包括基本资料模块、数据采集模块、综合数据库模块、智能数据分析模块以及监测显示与数据报表模块。数据采集模块包括显微镜自动数据采集装置、铜厚测试装置和其他数据采集装置,主要用于采集挠性电路板制造过程各工序的关键物理参数以及挠性电路板质量数据;基本资料模块包括工序信息和质量检验规范,主要用于挠性电路板各工序质量和缺陷检验时作为评判和检验的标准信息资料;智能数据分析模块包括统计过程控制算法识别异常状态、融合神经网络和支持向量机算法自动识别异常、基于遗传算法优化的神经网络深度学习方法对挠性电路板生产工序异常源识别(异常定位),主要实现对挠 性电路板生产过程智能质量控制、生产过程的自动异常状态识别和异常定位,为维护人员排除异常故障提供参考;综合数据库模块主要用于存储数据采集模块所采集的数据、工序信息资料和质量检验规范信息以及智能分析模块所产生的分析结果和数据报表。As shown in FIG. 1, the automatic monitoring and intelligent analysis system of the flexible circuit board manufacturing process includes a basic data module, a data acquisition module, a comprehensive database module, an intelligent data analysis module, and a monitoring display and data report module. The data acquisition module includes a microscope automatic data acquisition device, a copper thickness test device and other data acquisition devices, which are mainly used for collecting key physical parameters of the flexible circuit board manufacturing process and flexible circuit board quality data; the basic data module includes process information. And quality inspection specifications, mainly used as standard information materials for evaluation and inspection of various process quality and defect inspection of flexible circuit boards; intelligent data analysis module includes statistical process control algorithm to identify abnormal state, fusion neural network and support vector machine algorithm automatically Identifying anomalies, genetic algorithm-based neural network deep learning methods for the identification of abnormal source of flexible circuit board production process (abnormal positioning), mainly to achieve scratch Intelligent quality control of the production process of the circuit board, automatic abnormal state identification and abnormal positioning of the production process, provide reference for the maintenance personnel to eliminate abnormal faults; the comprehensive database module is mainly used to store the data collected by the data acquisition module, process information data and quality inspection. Specification information and analysis results and data reports generated by the intelligent analysis module.
工序信息主要包括工序的人员、设备等信息。所述的质量检验规范主要包括:IPC-6013B《挠性印制板的鉴定及性能规范》、企业内部制定的质量检验规程等。The process information mainly includes information such as personnel and equipment of the process. The quality inspection specifications mainly include: IPC-6013B "Qualification and Performance Specifications of Flexible Printed Board", and quality inspection procedures formulated by the company.
如图2所示,显微镜自动数据采集装置包括上位机系统和显微镜检测平台。上位机系统包括运动控制模块和显微镜视觉控制处理模块。显微镜检测平台包括电动精密载物台1、变换杆3、电机控制箱11、显微镜固定支架6、显微镜5、光源2和数字摄像头4。其中,电动精密载物台1包括X轴伺服电机10、Y轴伺服电机13、X轴运动导轨7、Y轴运动导轨12。显微镜5安装在显微镜固定支架6上,数字摄像头4安装在显微镜5的上方,光源2安装在显微镜5正后方,电动精密载物台1安装在显微镜5的正下方,且与电机控制箱11连接。As shown in FIG. 2, the microscope automatic data acquisition device includes a host computer system and a microscope inspection platform. The upper computer system includes a motion control module and a microscope vision control processing module. The microscope inspection platform includes a motorized precision stage 1, a shifting rod 3, a motor control box 11, a microscope fixing bracket 6, a microscope 5, a light source 2, and a digital camera 4. The electric precision stage 1 includes an X-axis servo motor 10, a Y-axis servo motor 13, an X-axis motion guide 7, and a Y-axis motion guide 12. The microscope 5 is mounted on the microscope fixing bracket 6, the digital camera 4 is mounted above the microscope 5, the light source 2 is mounted directly behind the microscope 5, and the electric precision stage 1 is mounted directly below the microscope 5, and is connected to the motor control box 11. .
如图3显微镜视觉控制处理模块与数字摄像头相连接,运动控制模块与电机控制箱相连接。电机控制箱内安装有伺服驱动器、电源,伺服驱动器通过控制卡与上位机连接。As shown in Fig. 3, the microscope vision control processing module is connected to the digital camera, and the motion control module is connected to the motor control box. A servo driver and a power supply are installed in the motor control box, and the servo driver is connected to the host computer through a control card.
本实例所述显微镜检测平台使用Basler公司的piA2400型的数字摄像头、使用型号为MJ51显微镜和带蓝色滤光片的卤素灯光源。电动精密载物台使用松下的伺服电机和伺服驱动器,并且使用固高科技(深圳)有限公司的GTS-400-PV型运动控制卡与上位机连接。The microscope inspection platform described in this example uses a digital camera from Basler's piA2400 model, using a model MJ51 microscope and a halogen light source with a blue filter. The electric precision stage uses Panasonic's servo motor and servo drive, and is connected to the host computer using GTS-400-PV motion control card from Gutech (Shenzhen) Co., Ltd.
如图4所示,本挠性电路板制造过程自动监测和智能分析系统采用分布式结构来构建系统。显微镜自动数据采集采集主要负责对蚀刻工序和钻孔工序关键参数和缺陷的数据采集;铜厚测试装置主要用于铜减薄工序关键参数的数据采集。蚀刻工序监控站、铜减薄工序监控站和钻孔工序监控站则分别实现对蚀刻工序、铜减薄工序和钻孔 工序各关键参数和缺陷数据的现场的自动监控和智能分析。数据库服务器主要用于存放系统用户数据以及监控与智能分析的历史数据等。品质部监控室的工作任务则主要实现各工序的数据查看、监控以及工序综合数据的智能分析和故障诊断。总经理办公监控室则主要实现对各工序的数据查看、监控以及工序综合数据分析和故障诊断结果的查看。As shown in FIG. 4, the flexible circuit board manufacturing process automatic monitoring and intelligent analysis system uses a distributed structure to construct the system. The automatic data acquisition and collection of the microscope is mainly responsible for data acquisition of key parameters and defects of the etching process and the drilling process; the copper thickness test device is mainly used for data collection of key parameters of the copper thinning process. The etching process monitoring station, the copper thinning process monitoring station and the drilling process monitoring station respectively implement the etching process, the copper thinning process and the drilling On-site automatic monitoring and intelligent analysis of key parameters and defect data of the process. The database server is mainly used to store system user data and historical data of monitoring and intelligent analysis. The work tasks of the quality department monitoring room mainly realize the data analysis, monitoring and intelligent analysis and fault diagnosis of the process comprehensive data. The general manager's office monitoring room mainly realizes the data review, monitoring and process comprehensive data analysis and fault diagnosis results of each process.
本实例所述显微镜自动数据采集装置对应的挠性电路板关键工序为刻蚀工序和激光钻孔工序;关键物理参数包括线宽、线距、孔径大小等;缺陷数据主要包括断路、短路、线路缺口、凸起、残铜等。The key processes of the flexible circuit board corresponding to the microscope automatic data acquisition device of the present example are an etching process and a laser drilling process; key physical parameters include line width, line spacing, aperture size, etc.; defect data mainly includes open circuit, short circuit, and line Notches, bumps, residual copper, etc.
显微镜自动数据采集装置的上位机系统包含运动控制模块,负责移动放置挠性电路板的电动精密载物台。上位机通过运动控制模块发出采集图像命令后,电机控制箱内伺服驱动器驱动伺服电机,分别控制X、Y轴运动导轨移动电动精密载物台,配合数字摄像头、光源采集图像。The upper computer system of the microscope automatic data acquisition device includes a motion control module, which is responsible for moving the electric precision stage on which the flexible circuit board is placed. After the upper computer sends the image acquisition command through the motion control module, the servo driver in the motor control box drives the servo motor to control the X and Y axis motion guides to move the electric precision stage respectively, and collect images with the digital camera and the light source.
显微镜自动数据采集装置的上位机系统还包含显微镜视觉控制处理模块,负责控制数字摄像头通过显微镜放大后获取挠性电路板局部图像、图像拼接和图像处理,并根据挠性电路板个工序的生产过程标准数据,实现对数据的比较,最终显示带有缺陷区域及具体缺陷细节的挠性电路板图像。The upper computer system of the microscope automatic data acquisition device further comprises a microscope vision control processing module, which is responsible for controlling the digital camera to obtain a partial image of the flexible circuit board, image stitching and image processing after being enlarged by the microscope, and according to the production process of the flexible circuit board. Standard data, which compares the data and ultimately displays a flexible board image with defective areas and specific defect details.
显微镜自动数据采集装置的挠性电路板质量评价方法,包括以下步骤:The method for evaluating the quality of a flexible circuit board of a microscope automatic data acquisition device includes the following steps:
1、将挠性电路板放置在电动精密载物台,并用固定装置固定后,操作人员登录上位机系统,打开光源,并在手动对焦后通过变换杆切换到数字摄像头采图模式。1. After placing the flexible circuit board on the electric precision stage and fixing it with the fixing device, the operator logs into the host computer system, turns on the light source, and switches to the digital camera drawing mode through the shift lever after manual focusing.
2、待步骤1完成后,伺服电机驱动导轨移动电动精密载物台,使系统回到检测原点。2. After the completion of step 1, the servo motor drives the guide rail to move the electric precision stage to return the system to the detection origin.
3、待步骤2完成后,由操作人员输入或在数据库中下载待检测的挠性电路板的标准文件,如Gerber文件、CAD文件等,然后解析挠性电路板标准文件,得到标准图和质量评价所需的标准数据。3. After the completion of step 2, the operator inputs or downloads the standard file of the flexible circuit board to be tested, such as Gerber file, CAD file, etc. in the database, and then parses the flexible circuit board standard file to obtain the standard figure and quality. Evaluate the required standard data.
4、待步骤3完成后,数字摄像头采集图像,伺服电机移动X、Y轴运动导轨,使系 统识别并对准基准点。4. After the completion of step 3, the digital camera captures the image, and the servo motor moves the X and Y axis motion guides to make the system Identify and align the reference points.
5、待步骤4完成后,运动控制模块控制电机控制箱内的伺服驱动器驱动伺服电机,通过移动X、Y轴运动导轨移动电动精密载物台。按照从左到右,从上而下的顺序,由数字摄像头通过显微镜放大后,对待测挠性电路板进行局部采图,与此同时,显微镜视觉控制处理模块待测挠性电路板的局部图进行预处理,随后使用基于特征模板匹配特征点的拼接方法进行图像拼接,并完成图像的平滑处理,如此重复采图、拼接,直到把挠性电路板扫描完毕,最终得到待测挠性电路板的全局图。5. After the completion of step 4, the motion control module controls the servo driver in the motor control box to drive the servo motor, and moves the electric precision stage by moving the X and Y axis motion guides. According to the order from left to right and from top to bottom, the digital camera is enlarged by a microscope, and then the flexible circuit board to be tested is partially taken. At the same time, the microscopic vision control processing module is to be tested for a partial view of the flexible circuit board. Perform pre-processing, then use the splicing method based on feature template matching feature points to splicing the image, and complete the smoothing of the image, so repeat the drawing and splicing until the flexible circuit board is scanned, and finally obtain the flexible circuit board to be tested. Global map.
6、待步骤5完成后,对图像进行二值化和连通域的查找,并以连通域统计质心及面积为匹配标准与电路图模板中的连通域进行对比判定不匹配区域(缺陷区域);使用细化方法检测线宽和线距;使用霍夫变换识别圆孔位置,并根据面积信息获取孔径大小。与标准图和标准数据中的的线宽、线距、孔径大小对比,获取质量评价信息;采用对比法对断路、短路、残铜等缺陷进行识别。6. After the completion of step 5, the image is binarized and the connected domain is searched, and the connected domain is compared with the connected domain in the circuit diagram template by using the connected domain statistical centroid and area as the matching criterion to determine the mismatched area (defect area); The thinning method detects the line width and the line spacing; uses the Hough transform to identify the position of the hole, and obtains the aperture size based on the area information. Compared with the line width, line spacing and aperture size in the standard map and standard data, the quality evaluation information is obtained; and the defects such as open circuit, short circuit and residual copper are identified by the comparison method.
7、待步骤6完成后,上位机系统显示缺陷区域及具体缺陷细节的全图图像,并根据预录阈值信息,提出告警,以便操作人员及时对异常工序进行处理。7. After the completion of step 6, the upper computer system displays the full image of the defect area and the specific defect details, and provides an alarm according to the pre-recorded threshold information, so that the operator can timely handle the abnormal process.
8、待步骤7完成后,上位机系统将检测结果存储在本地计算机中,并将相关图像、质量评价信息、缺陷信息、缺陷数据上传至综合数据库模块中,以待后续统计处理。8. After the completion of step 7, the host computer system stores the detection result in the local computer, and uploads related images, quality evaluation information, defect information, and defect data to the comprehensive database module for subsequent statistical processing.
本实例的铜厚测试装置包括铜厚测量仪器和数据通信软件,铜厚测量仪主要用于测量铜箔的厚度,数据通信软件主要用于数据的铜厚数据的采集和传输。The copper thickness test device of the present example includes a copper thickness measuring instrument and a data communication software. The copper thickness measuring instrument is mainly used for measuring the thickness of the copper foil, and the data communication software is mainly used for collecting and transmitting the copper thickness data of the data.
本实例的综合数据库主要用于存放关键工序的基本信息、采集的初始数据以及自动监测和智能分析推理过程中得到的各种中间信息和解决问题后输出结果信息。智能分析的结果,最终以报表的形式存放在数据库中,供工程师和管理人员实时查询。The comprehensive database of this example is mainly used to store the basic information of key processes, the initial data collected, and various intermediate information obtained in the process of automatic monitoring and intelligent analysis and reasoning, and output result information after solving the problem. The results of the intelligent analysis are finally stored in the database in the form of reports for engineers and managers to query in real time.
本实例对挠性电路板制造过程的铜减薄、蚀刻、钻孔等关键工序设计一种多元统计过程监控方法,包括以下步骤:This example designs a multivariate statistical process monitoring method for key processes such as copper thinning, etching, and drilling in the manufacturing process of flexible circuit boards, including the following steps:
1、根据用户选择查看的工序,该算法将从数据库模块查询并读取相应的参数数 据集。1. According to the operation selected by the user, the algorithm will query and read the corresponding parameter number from the database module. According to the collection.
2、待步骤1完成后,根据该数据集所包含的数据类型判断是否进行预处理,如果是计量值类型,如蚀刻工序的线宽、线距,钻孔工序的圆度、位置和镀铜工序的铜厚等,则将参数数据集中的所有数据进行标准化预处理。设参数i采集n个数据,表示为{xi1,…,xin},计算其平均值
Figure PCTCN2015100210-appb-000001
和标准差si,则标准化处理后的数据x′ij为:
2. After the completion of step 1, determine whether to perform pre-processing according to the data type included in the data set, if it is a type of measurement value, such as the line width and line spacing of the etching process, the roundness, position and copper plating of the drilling process The copper thickness of the process, etc., is standardized for all data in the parameter data set. Let parameter i collect n data, denoted as {x i1 ,...,x in }, calculate the average value
Figure PCTCN2015100210-appb-000001
And the standard deviation s i , then the normalized processed data x' ij is:
Figure PCTCN2015100210-appb-000002
Figure PCTCN2015100210-appb-000002
如果是计数值类型,如发生断路、短路、线路缺口、凸起、残铜缺陷的电路板个数,则将参数数据进行比例化处理,即用发生某个缺陷的电路板个数除以生产的总电路板个数。If it is a count value type, such as the number of boards with open circuit, short circuit, line gap, bump, and copper residual defect, the parameter data is scaled, that is, the number of boards with a certain defect is divided by the production. The total number of boards.
3、待步骤2完成后,根据参数变量类别和标准化后的数据,建立多变量统计χ2模型,对所选择工序的异常情况进行可视化监控。以钻孔工序为例,关键物理参数为孔径大小和孔的圆度两个参数,计算采集的n组孔径大小和圆度数据(即属性个数p=2),表示为xi=(xi1,xi2)(i=1,2,…,n),计算两种数据均值
Figure PCTCN2015100210-appb-000003
然后计算属性j和h之间的协方差sjh(j,h=1,2)和对应的协方差矩阵S为
3. After the completion of step 2, based on the parameter variable category and the standardized data, a multivariate statistical χ 2 model is established to visually monitor the abnormal conditions of the selected process. Taking the drilling process as an example, the key physical parameters are the aperture size and the roundness of the hole. The acquired n sets of aperture size and roundness data (ie, the number of attributes p=2) are expressed as x i =(x). I1 , x i2 ) (i = 1, 2, ..., n), calculate the two data mean
Figure PCTCN2015100210-appb-000003
Then calculate the covariance s jh (j, h = 1, 2) between the attributes j and h and the corresponding covariance matrix S is
Figure PCTCN2015100210-appb-000004
Figure PCTCN2015100210-appb-000004
Figure PCTCN2015100210-appb-000005
Figure PCTCN2015100210-appb-000005
和第i个T2统计量,
Figure PCTCN2015100210-appb-000006
Figure PCTCN2015100210-appb-000007
与上下限比较:
And the ith T 2 statistic,
Figure PCTCN2015100210-appb-000006
will
Figure PCTCN2015100210-appb-000007
Compared with the upper and lower limits:
Figure PCTCN2015100210-appb-000008
(其中,B(·)为参数为
Figure PCTCN2015100210-appb-000009
的β分布,1-α为置信水平)。最后,以n为横轴,纵轴绘制T2控制图,根据
Figure PCTCN2015100210-appb-000010
是否超过控制限判断产品质量是否失控。如果数据超过上下控制界限,则检测到生产异常波动是失控状态,则发出警报并且上传到监控显示与数据报表模块,否则不作出反应。
Figure PCTCN2015100210-appb-000008
(where B(·) is the parameter
Figure PCTCN2015100210-appb-000009
The beta distribution, 1-alpha is the confidence level). Finally, taking n as the horizontal axis and the vertical axis to draw the T 2 control map, according to
Figure PCTCN2015100210-appb-000010
Whether the control limit is exceeded or not is judged whether the quality of the product is out of control. If the data exceeds the upper and lower control limits, it is detected that the abnormal production fluctuation is out of control, and an alarm is issued and uploaded to the monitoring display and data report module, otherwise no response is made.
本实例对挠性电路板制造过程的全工序的异常识别设计一种智能分析方法,包 括以下步骤:This example designs an intelligent analysis method for the abnormal recognition of the whole process of the flexible circuit board manufacturing process. Including the following steps:
1、根据用户选择,读取挠性电路板制造全工序异常识别的训练数据或者待监控数据。根据数据集所包含的数据类型判断是否进行预处理,如果是计量值类型,则将参数数据集中的所有数据进行标准化预处理,如果是计数型,则将参数数据进行比例化处理。1. According to the user's choice, read the training data or the data to be monitored for the abnormal process identification of the flexible circuit board manufacturing. According to the data type included in the data set, whether to perform preprocessing, if it is a measurement value type, all the data in the parameter data set is standardized and preprocessed, and if it is a counting type, the parameter data is proportionalized.
2、待步骤1完成后,采用神经网络方法(如3层结构的BP网络)提取特征,即输入挠性电路板制造过程所有工序的关键参数,输出影响挠性电路板质量的主要特征数据。2. After the completion of step 1, the neural network method (such as a 3-layer BP network) is used to extract features, that is, input key parameters of all processes in the manufacturing process of the flexible circuit board, and output main characteristic data that affects the quality of the flexible circuit board.
3、待步骤2完成后,如果用户选择训练模型,则用正常和异常的特征数据,训练支持向量机模型,采用高斯核函数并且使用网格法确定模型中的惩罚参数C和高斯核参数γ,从而完成支持向量机模型的建立。否则,按照步骤4进行数据的智能分析。3. After the completion of step 2, if the user selects the training model, the support vector machine model is trained with the normal and abnormal feature data, and the Gaussian kernel function is used and the penalty parameter C and the Gaussian kernel parameter γ in the model are determined using the grid method. , thus completing the establishment of the support vector machine model. Otherwise, follow step 4 for intelligent analysis of the data.
4、待步骤2完成后,使用支持向量机模型对加工工序的批数据进行监控。如果检测到生产异常波动是失控状态,则发出警报并且上传到监控显示与数据报表模块,否则不作出反应。4. After the completion of step 2, the batch data of the processing process is monitored using the support vector machine model. If it is detected that the abnormal production fluctuation is out of control, an alarm is issued and uploaded to the monitoring display and data reporting module, otherwise no response is made.
本实例设计一种对挠性电路板生产工序监控的异常源识别(异常定位)算法,包括以下步骤:This example designs an anomaly source identification (abnormal positioning) algorithm for monitoring the production process of flexible circuit boards, including the following steps:
1、根据用户选择,读取挠性电路板制造全工序异常定位的训练数据或者待监控数据。从数据库模块查询并读取所涉及的挠性电路板制造过程关键参数数据,组成批数据。判断该批数据是否进行预处理,如果是计量值类型需要预处理,则将参数数据集中的所有数据进行标准化预处理,如果是计数类型则不处理。1. According to the user's choice, read the training data or the data to be monitored for the abnormal positioning of the whole process of the flexible circuit board manufacturing. The key parameters of the flexible circuit board manufacturing process involved are queried and read from the database module to form batch data. It is judged whether the batch data is preprocessed. If the metering value type requires preprocessing, all the data in the parameter data set is subjected to standardization preprocessing, and if it is a counting type, it is not processed.
2、待步骤1完成后,如果用户选择训练模型,则对预处理后的特征数据集建立融合遗传算法的神经网络异常源识别模型。遗传算法采用二进制编码技术,以总误差平方函数作为适应度函数,通过选择、交叉、变异等进化算子,选择优化的神经网络的结构和权值。否则,按照步骤3进行数据的智能分析。 2. After the completion of step 1, if the user selects the training model, a neural network anomaly source recognition model of the fusion genetic algorithm is established for the pre-processed feature data set. The genetic algorithm adopts binary coding technology, and uses the total error square function as the fitness function. Through the selection, crossover, mutation and other evolutionary operators, the structure and weight of the optimized neural network are selected. Otherwise, follow step 3 for intelligent analysis of the data.
3、待步骤2完成后,使用2建立的异常源识别模型对挠性电路板制造过程全工序进行监控,如果出现异常波动,则根据异常源识别模型输出结果可以定位到失控异常发生的工序并将结果发送到监控显示与数据报表模块,否则不作出反应。3. After the completion of step 2, use the abnormal source identification model established by 2 to monitor the whole process of the flexible circuit board manufacturing process. If abnormal fluctuation occurs, the output of the abnormal source identification model can be located to locate the process of the out-of-control abnormality. Send the results to the monitor display and data report module, otherwise no response will be made.
如上所述,便可较好地实现本发明。 As described above, the present invention can be preferably implemented.

Claims (10)

  1. 挠性电路板制造过程自动监测和智能分析系统,包括基本资料模块、参数采集模块、综合数据库模块、智能数据分析模块以及监测显示与数据报表模块,其特征在于:参数采集模块包括显微镜自动数据采集装置和铜厚测试装置,主要用于采集挠性电路板制造过程关键工序的关键物理参数以及挠性电路板质量数据;基本资料模块包括工序信息和质量检验规范,主要用于挠性电路板各工序质量和缺陷检验时作为评判和检验的标准信息资料;智能数据分析模块包括:采用多元统计过程的T2控制方法对单工序的异常情况进行预测,采用融合神经网络和支持向量机的方法预测挠性电路板制造整线的异常,采用基于遗传算法优化的神经网络对挠性电路板制造过程的异常源进行识别,主要实现对挠性电路板生产过程智能质量控制、生产过程的自动异常状态识别和异常定位,为维护人员排除异常故障提供参考;综合数据库模块主要用于存储数据采集模块所采集的数据、工序信息资料和质量检验规范信息以及智能分析模块所产生的分析结果和数据报表。Automatic monitoring and intelligent analysis system for flexible circuit board manufacturing process, including basic data module, parameter acquisition module, comprehensive database module, intelligent data analysis module, and monitoring display and data report module, characterized in that the parameter acquisition module includes microscope automatic data acquisition The device and copper thickness test device are mainly used to collect the key physical parameters of the flexible circuit board manufacturing process and the flexible circuit board quality data; the basic data module includes process information and quality inspection specifications, mainly used for flexible circuit boards. As the standard information data for evaluation and inspection during process quality and defect inspection; intelligent data analysis module includes: T 2 control method using multivariate statistical process to predict the anomaly of single process, using fusion neural network and support vector machine to predict The abnormality of the whole circuit of flexible circuit board manufacturing, the neural network based on genetic algorithm optimization is used to identify the abnormal source of the flexible circuit board manufacturing process, which mainly realizes the intelligent quality control of the flexible circuit board production process and the automatic abnormal state of the production process. Identification and It was located, to provide a reference for the maintenance personnel to remove the unusual fault; integrated database module is mainly used for analysis of the data storage and data reporting the collected data acquisition module, process information and quality inspection data intelligent analysis and specification information generated by the module.
  2. 根据权利要求1所述的一种挠性电路板制造过程自动监测和智能分析系统,其特征在于:基本资料模块的工序信息主要包括:1)工序人员名单,记录工序工作人员及其负责工序;2)设备信息,包括设备的名称、类别和型号等基本信息;基本资料模块的质量检验规范包括:质量检验规范IPC-6013B《挠性印制板的鉴定及性能规范》、企业内部制定的质量检验规程。The automatic monitoring and intelligent analysis system for manufacturing a flexible circuit board according to claim 1, wherein the process information of the basic data module mainly comprises: 1) a list of process personnel, a record process worker and a responsible process thereof; 2) Equipment information, including basic information such as the name, category and model of the equipment; the quality inspection specifications of the basic data module include: quality inspection specification IPC-6013B "Quality and performance specifications of flexible printed boards", quality established within the enterprise Inspection procedures.
  3. 根据权利要求1所述的一种挠性电路板制造过程自动监测和智能分析系统,其特征在于:显微镜自动数据采集装置包括:上位机系统和显微镜检测平台;上位机系统包括运动控制模块和显微镜视觉控制处理模块;显微镜检测平台包括电动精密载物台、变换杆、电机控制箱、显微镜固定支架、显微镜、光源和数字摄像头;显微镜安装在显微镜固定支架上,数字摄像头安装在显微镜上方,光源安装在显微镜正后方,电动精密载物台安装在显微镜的正下方,且与电机控制箱连接;显微镜视觉控制处理模块与数字摄像头相连接,运动控制模块与电机控制箱相连接;电机控制箱内安装有伺服驱动器、电源,伺服驱动器通过控制卡与上位机连接。 The automatic monitoring and intelligent analysis system for manufacturing a flexible circuit board according to claim 1, wherein the microscope automatic data acquisition device comprises: a host computer system and a microscope detection platform; the host computer system comprises a motion control module and a microscope. Vision control processing module; microscope detection platform includes electric precision stage, conversion rod, motor control box, microscope fixed bracket, microscope, light source and digital camera; microscope is mounted on microscope fixed bracket, digital camera is installed above microscope, light source is installed Immediately behind the microscope, the electric precision stage is mounted directly under the microscope and connected to the motor control box; the microscope vision control processing module is connected to the digital camera, the motion control module is connected to the motor control box; the motor control box is installed There are servo drive, power supply, and servo drive connected to the host computer through the control card.
  4. 根据权利要求3所述的一种挠性电路板制造过程自动监测和智能分析系统,其特征在于显微镜自动数据采集装置的所述上位机系统通过运动控制模块和显微镜视觉控制处理模块采集图像,并识别出各关键工序对应的挠性电路板关键物理参数和缺陷数据;其中,所述显微镜自动数据采集装置对应的挠性电路板关键工序为刻蚀工序和激光钻孔工序;关键物理参数包括线宽、线距、孔径大小;缺陷数据主要包括断路、短路、线路缺口、凸起和残铜。A flexible circuit board manufacturing process automatic monitoring and intelligent analysis system according to claim 3, wherein said upper computer system of the microscope automatic data acquisition device collects images through a motion control module and a microscope vision control processing module, and Identifying key physical parameters and defect data of the flexible circuit board corresponding to each key process; wherein the key processes of the flexible circuit board corresponding to the microscope automatic data acquisition device are an etching process and a laser drilling process; key physical parameters include a line Width, line spacing, aperture size; defect data mainly includes open circuit, short circuit, line gap, bump and residual copper.
  5. 根据权利要求3所述的一种挠性电路板制造过程自动监测和智能分析系统,其特征在于所述上位机系统包含运动控制模块,负责移动放置挠性电路板的电动精密载物台;上位机通过运动控制模块发出采集图像命令后,电机控制箱内伺服驱动器驱动伺服电机,分别控制X、Y轴运动导轨移动电动精密载物台,配合数字摄像头、光源采集图像;3 . The automatic monitoring and intelligent analysis system for manufacturing a flexible circuit board according to claim 3 , wherein the upper computer system comprises a motion control module, and is responsible for moving an electric precision stage on which the flexible circuit board is placed; After the machine sends a command to acquire images through the motion control module, the servo drive in the motor control box drives the servo motor to control the X and Y axis motion guides to move the electric precision stage, and collect images with the digital camera and light source;
    所述上位机系统还包含显微镜视觉控制处理模块,负责控制数字摄像头通过显微镜放大后获取挠性电路板局部图像、图像拼接和图像处理,并根据挠性电路板工序的生产过程标准数据,实现对数据的比较,最终显示带有缺陷区域及具体缺陷细节的挠性电路板图像。The upper computer system further comprises a microscope vision control processing module, which is responsible for controlling the digital camera to obtain partial image, image mosaic and image processing of the flexible circuit board after being enlarged by the microscope, and realizing the standard data according to the production process of the flexible circuit board process. The comparison of the data ultimately shows a flexible circuit board image with defective areas and specific defect details.
  6. 根据权利要求1所述的一种挠性电路板制造过程自动监测和智能分析系统,其特征在于:铜厚测试装置包括铜厚测量仪器和数据通信软件,铜厚测量仪主要用于测量铜箔的厚度,数据通信软件主要用于数据的铜厚数据的采集和传输。The automatic monitoring and intelligent analysis system for manufacturing a flexible circuit board according to claim 1, wherein the copper thickness measuring device comprises a copper thickness measuring instrument and a data communication software, and the copper thickness measuring instrument is mainly used for measuring copper foil. The thickness of the data communication software is mainly used for the collection and transmission of copper thick data of data.
  7. 根据权利要求1所述的一种挠性电路板制造过程自动监测和智能分析系统,其特征在于:所述综合数据库模块主要用于存放关键工序的基本信息、采集的初始数据以及对数据的统计信息和进行智能分析的最终结果,包括各物理参数的统计信息、工序或者生产线是否异常的诊断结果和存在异常时的异常源信息;所有数据信息,最终以报表的形式存放在数据库中,供工程师和管理人员实时查询。The automatic monitoring and intelligent analysis system for manufacturing a flexible circuit board according to claim 1, wherein the integrated database module is mainly used for storing basic information of key processes, initial data collected, and statistics of the data. The final result of the information and intelligent analysis, including the statistical information of each physical parameter, the diagnosis result of whether the process or the production line is abnormal, and the abnormal source information when there is an abnormality; all the data information is finally stored in the database in the form of a report for the engineer. And managers in real time.
  8. 利用权利要求1所述的挠性电路板制造过程自动监测和智能分析系统的监测 和分析方法,其特征在于:对挠性电路板制造过程的铜减薄、蚀刻、钻孔等关键工序的监控,包括以下步骤:Automatic monitoring and intelligent analysis system monitoring using the flexible circuit board manufacturing process of claim 1. And analysis method, characterized in that: monitoring the key processes of copper thinning, etching, drilling, etc. in the manufacturing process of the flexible circuit board, including the following steps:
    8.1根据用户选择查看的工序,从数据库模块查询并读取相应的参数数据集;8.1 Query and read the corresponding parameter data set from the database module according to the operation selected by the user;
    8.2待步骤8.1完成后,根据该数据集所包含的数据类型判断是否进行预处理,如果是计量值类型,则将参数数据集中的所有数据进行标准化预处理,如果是计数类型,则将参数数据进行比例化处理;8.2 After the completion of step 8.1, it is judged whether preprocessing is performed according to the data type included in the data set, and if it is a measurement value type, all data in the parameter data set is standardized and preprocessed, and if it is a counting type, the parameter data is used. Proportional processing;
    8.3待步骤8.2完成后,根据参数变量类别和标准化后的数据,建立多变量统计的T2控制图模型,对所选择工序的异常情况进行可视化监控;如果T2控制图检测到生产异常波动是失控状态,则发出警报并且上传到监控显示与数据报表模块,否则不作出反应;8.3 After the completion of step 8.2, based on the parameter variable category and the standardized data, establish a T 2 control chart model of multivariate statistics to visually monitor the abnormal conditions of the selected process; if the T 2 control chart detects abnormal production fluctuations If it is out of control, an alarm is issued and uploaded to the monitoring display and data reporting module, otherwise no response is made;
    对挠性电路板制造过程的全工序的异常识别进行智能分析,包括以下步骤:Intelligent analysis of the anomaly identification of the entire process of the flexible circuit board manufacturing process, including the following steps:
    8.4根据用户选择,读取挠性电路板制造全工序异常识别的训练数据或者待监控数据;根据数据集所包含的数据类型判断是否进行预处理,如果是计量值类型,则将参数数据集中的所有数据进行标准化预处理,如果是计数类型,则将参数数据进行比例化处理;8.4 According to the user's choice, read the training data or the data to be monitored for the abnormal process of the whole process of manufacturing the flexible circuit board; determine whether to perform preprocessing according to the data type included in the data set, and if it is the type of the measurement value, concentrate the parameter data All data is standardized and preprocessed, and if it is a count type, the parameter data is scaled;
    8.5待步骤8.4完成后,神经网络方法提取数据特征;8.5 After the completion of step 8.4, the neural network method extracts data features;
    8.6待步骤8.5完成后,如果用户选择训练模型,则用正常和异常的特征数据训练支持向量机模型,采用高斯核函数并且使用网格法确定相关参数,从而完成支持向量机模型的建立,否则,按照步骤8.7进行数据的智能分析;8.6 After step 8.5 is completed, if the user selects the training model, the support vector machine model is trained with the normal and abnormal feature data, and the Gaussian kernel function is used and the relevant parameters are determined by the grid method, thereby completing the establishment of the support vector machine model; otherwise, , according to step 8.7 for intelligent analysis of data;
    8.7待步骤8.5完成后,使用支持向量机模型对加工工序的批数据进行监控;如果检测到生产异常波动是失控状态,则发出警报并且上传到监控显示与数据报表模块,否则不作出反应。8.7 After the completion of step 8.5, use the support vector machine model to monitor the batch data of the machining process; if it detects that the abnormal production fluctuation is out of control, an alarm is issued and uploaded to the monitoring display and data report module, otherwise no response is made.
  9. 根据权利要求8所述的方法,其特征在于:还包括对挠性电路板制造工序监控的异常源识别即异常定位,实现全工序中异常工序和异常变量的定位,具体包括以 下步骤:The method according to claim 8, further comprising: identifying an abnormal source that is monitored by the flexible circuit board manufacturing process, that is, an abnormal positioning, and realizing the positioning of the abnormal process and the abnormal variable in the whole process, specifically including Next steps:
    9.1根据用户选择,读取挠性电路板制造全工序异常定位的训练数据或者待监控数据;从数据库模块查询并读取所涉及的挠性电路板制造过程关键参数数据,组成批数据;判断该批数据是否进行预处理,如果是计量值类型需要预处理,则将参数数据集中的所有数据进行标准化预处理,如果是计数类型则不处理;9.1 According to the user's choice, read the training data or the data to be monitored for the abnormal positioning of the flexible circuit board manufacturing process; query and read the key parameter data of the flexible circuit board manufacturing process from the database module to form the batch data; Whether the batch data is preprocessed. If the metering value type requires preprocessing, all the data in the parameter data set is standardized and preprocessed, and if it is a counting type, it is not processed;
    9.2待步骤9.1完成后,如果用户选择训练模型,则对预处理后的特征数据集建立融合遗传算法和深度学习神经网络的异常源识别模型;遗传算法采用二进制编码技术,以总误差平方函数作为适应度函数,通过选择、交叉、变异进化算子,选择优化的深度学习神经网络的结构和权值;否则,按照步骤9.3进行数据的智能分析;9.2 After the completion of step 9.1, if the user selects the training model, the fusion genetic algorithm and the abnormal source recognition model of the deep learning neural network are established for the pre-processed feature data set; the genetic algorithm adopts the binary coding technique and takes the total error square function as The fitness function selects the structure and weight of the optimized deep learning neural network by selecting, crossing, and mutating the evolutionary operator; otherwise, intelligent analysis of the data is performed according to step 9.3;
    9.3待步骤9.2完成后,使用9.2建立的异常源识别模型对挠性电路板制造过程全工序进行监控,如果出现异常波动,则根据异常源识别模型输出结果可以定位到失控异常发生的工序并将结果发送到监控显示与数据报表模块,否则不作出反应。9.3 After the completion of step 9.2, use the abnormal source identification model established in 9.2 to monitor the whole process of the flexible circuit board manufacturing process. If abnormal fluctuation occurs, the output of the abnormal source identification model can be located to locate the operation of the runaway abnormality and The result is sent to the monitor display and data report module, otherwise no response is made.
  10. 根据权利要求8所述的方法,其特征在于:还包括使用所述显微镜自动数据采集装置的挠性电路板质量评价的过程,具体包括以下步骤:The method of claim 8 further comprising the step of evaluating the quality of the flexible circuit board using said microscope automatic data acquisition device, specifically comprising the steps of:
    10.1将挠性电路板放置在电动精密载物台,并用固定装置固定后,操作人员登录上位机系统,打开光源,并在手动对焦后通过变换杆切换到数字摄像头采图模式;10.1 After placing the flexible circuit board on the electric precision stage and fixing it with the fixing device, the operator logs into the host computer system, turns on the light source, and switches to the digital camera drawing mode through the shift lever after manual focusing;
    10.2待步骤10.1完成后,伺服电机驱动导轨移动电动精密载物台,使系统回到检测原点;10.2 After the completion of step 10.1, the servo motor drives the guide rail to move the electric precision stage to return the system to the detection origin;
    10.3待步骤10.2完成后,由操作人员输入或在数据库中下载待检测的挠性电路板的标准文件,标准文件包括Gerber文件、CAD文件,然后解析挠性电路板标准文件,得到标准图和质量评价所需的标准数据;10.3 After the completion of step 10.2, the standard file of the flexible circuit board to be tested is input by the operator or downloaded in the database. The standard file includes the Gerber file, the CAD file, and then the flexible circuit board standard file is parsed to obtain the standard figure and quality. Evaluate the required standard data;
    10.4待步骤10.3完成后,数字摄像头采集图像,伺服电机移动X、Y轴运动导轨, 使系统识别并对准基准点;10.4 After the completion of step 10.3, the digital camera captures the image, and the servo motor moves the X and Y axis motion guides. Make the system recognize and align the reference point;
    10.5待步骤10.4完成后,运动控制模块控制电机控制箱内的伺服驱动器驱动伺服电机,通过移动X、Y轴运动导轨移动电动精密载物台,按照从左到右,从上而下的顺序,由数字摄像头通过显微镜放大后,对待测挠性电路板进行局部采图,与此同时,显微镜视觉控制处理模块待测挠性电路板的局部图进行预处理,随后使用基于特征模板匹配特征点的拼接方法进行图像拼接,并完成图像的平滑处理,如此重复采图、拼接,直到把挠性电路板扫描完毕,最终得到待测挠性电路板的全局图;10.5 After the completion of step 10.4, the motion control module controls the servo drive in the motor control box to drive the servo motor, and moves the electric precision stage by moving the X and Y axis motion guides, in order from left to right, from top to bottom. After the digital camera is enlarged by the microscope, the flexible circuit board to be tested is locally taken, and at the same time, the partial view of the flexible circuit board to be tested by the microscope vision control processing module is preprocessed, and then the feature points are matched based on the feature template. The splicing method performs image splicing, and completes the smoothing processing of the image, so that the drawing and splicing are repeated until the flexible circuit board is scanned, and finally the global map of the flexible circuit board to be tested is obtained;
    10.6待步骤10.5完成后,对图像进行二值化和连通域的查找,并以连通域统计质心及面积为匹配标准与电路图模板中的连通域进行对比判定不匹配区域即缺陷区域;使用细化方法检测线宽和线距;使用霍夫变换识别圆孔位置,并根据面积信息获取孔径大小;与标准图和标准数据中的线宽、线距、孔径大小对比,获取质量评价信息;采用对比法对断路、短路、残铜缺陷进行识别;10.6 After the completion of step 10.5, the image is binarized and the connected domain is searched, and the connected domain statistical centroid and area are used as the matching criterion to compare with the connected domain in the circuit diagram template to determine the mismatched area, that is, the defect area; The method detects line width and line spacing; uses Hough transform to identify the position of the hole, and obtains the aperture size according to the area information; compares with the line width, line spacing and aperture size in the standard figure and standard data to obtain quality evaluation information; The method identifies the open circuit, short circuit, and residual copper defects;
    10.7待步骤10.6完成后,上位机系统显示缺陷区域及具体缺陷细节的全图图像,并根据预录阈值信息,提出告警,以便操作人员及时对异常工序进行处理;10.7 After the completion of step 10.6, the host computer system displays the full image of the defect area and the specific defect details, and provides an alarm according to the pre-recorded threshold information, so that the operator can timely handle the abnormal process;
    10.8待步骤10.7完成后,上位机系统将检测结果存储在本地计算机中,并将相关图像、质量评价信息、缺陷信息、缺陷数据上传至综合数据库模块中,以待后续统计处理。 10.8 After the completion of step 10.7, the host computer system stores the detection result in the local computer, and uploads related images, quality evaluation information, defect information, and defect data to the comprehensive database module for subsequent statistical processing.
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CN118131718A (en) * 2024-05-08 2024-06-04 江苏浦丹光电技术有限公司 Automatic control system for chip manufacturing production line
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