WO2014010154A1

WO2014010154A1 - Scribing method and scribing device

Info

Publication number: WO2014010154A1
Application number: PCT/JP2013/002571
Authority: WO
Inventors: 船城　明
Original assignee: 坂東機工株式会社
Priority date: 2012-07-12
Filing date: 2013-04-16
Publication date: 2014-01-16
Also published as: KR20150020217A; JPWO2014010154A1; CN104428263A

Abstract

A scribing device (1) is provided with: a worktable (6) on which a glass substrate (5) as a brittle material substrate on which alignment marks (M1, M2, M3...) are made on the upper surface thereof, is mounted, aligned, and secured by suction; a scribing head (2) that moves in a XY plane coordinate system and parallel to the upper surface of the glass substrate (5) above the worktable (6); a CCD camera (10) disposed beside the scribing head (2) and integratedly formed with the scribing head (2); a common X axis moving means (3) and Y axis moving means (4) that moves the scribing head (2) and CCD camera (10) as a unit in the XY plane coordinate system; an image processing device that implements imaging instructions by means of the CCD camera (10), image processing of images taken, and calculation processing; and an NC device that carries out numerical control of movement of the X axis moving means (3) and the Y axis moving means (4).

Description

Scribing method and scribing apparatus

The present invention relates to a scribing method and a scribing apparatus suitable for forming a scribe line on a brittle material substrate such as a glass substrate, a semiconductor substrate, and a solar cell substrate.

In particular, the present invention relates to a scribing method and a scribing apparatus for forming a scribe line on a brittle material substrate such as a glass substrate, a semiconductor substrate, and a solar cell substrate on which an alignment mark is written in accordance with the alignment mark.

The present invention also provides a scribing method in which an alignment mark of a positioned brittle material substrate is imaged by a CCD camera, image processing is performed, the position of the alignment mark is measured, and after a necessary processing is performed, a scribing operation is performed. It relates to a scribe device.

Patent Document 1 describes a scribing device that forms a scribe line on a glass substrate on which an alignment mark is written in accordance with the alignment mark.

The scribing device described in Patent Document 1 positions and fixes the glass substrate on which the alignment mark is marked on the table, and then uses two CCD cameras installed and fixed above the table. Image of the two alignment marks on the left and right on the glass substrate, image processing on the imaged alignment mark, and calculation processing for the result after image processing, and the angle shift amount of the glass substrate Next, for the angle deviation amount, the correction of the rotational position of the table, and for the position deviation amount, the movement correction of the Y-axis position of the table and the X-axis position of the scribe head are measured. After the correction work is completed, a scribing operation is performed, and the correction work and the scribing operation are performed for each new glass substrate. That.

JP 2011-251900 A

By the way, the conventional scribing apparatus described in Patent Document 1 images an alignment mark written on a glass substrate with a fixed CCD camera, and performs image processing and arithmetic processing based on the image of the alignment mark captured by the CCD camera. The angle deviation amount and the positional deviation amount of the glass substrate are measured, and the correction command value corrected from the measured value of the deviation amount is sent to the table rotating means, the table moving means and the scribe head moving means. The table rotation position correction, the table position correction, and the scribing head position correction are performed. However, since the table rotating means, the table moving means, and the scribe head moving means have thermal expansion and mechanical error, in such a conventional scribe device, the actual rotation amount of the table with respect to the correction command value from the NC device, The actual amount of movement of the table and the scribe head may not match.Therefore, it takes many repetitions of correction work to adjust to the accurate positioning state, which takes time and labor, and is extremely inefficient. is there.

Further, in the conventional scribing apparatus, even in the scribing operation after the position correction work on the glass substrate, thermal expansion of the table, the table rotating means, the table moving means and the scribe head moving means, the influence of mechanical errors, and the heat of the glass substrate Due to the difference between the expansion and the thermal expansion of these tables and moving means, the formation of the scribe line in alignment with the alignment mark requires a program correction and requires labor such as a test scribe.

The present invention can form a scribe line that is aligned with the alignment mark even in a state where the positional deviation and the angular deviation occur in the brittle material substrate positioned on the table, with the positional deviation and the angular deviation maintained. It is another object of the present invention to provide a scribing method and a scribing apparatus capable of forming a scribing line corresponding to an alignment mark even if there is a difference in thermal expansion or mechanical error in the table, the table moving means and the scribe head moving means.

Furthermore, the present invention is to provide a scribing method and a scribing apparatus capable of forming a scribe line matched to an alignment mark regardless of the thermal expansion difference between the brittle material substrate and the moving means of the scribe head.

In the scribing method of the present invention, a brittle material substrate with alignment marks is positioned on the table according to the work coordinate system set in the NC apparatus, and the scribe head and the CCD camera are integrated as a common unit. The moving means is moved in the work coordinate system, and set coordinate values M1 (X = X1) in the work coordinate system of at least three alignment marks M1, M2, and M3 written on the brittle material substrate and in an orthogonal arrangement relationship. , Y = Y1), M2 (X = X2, Y = Y1) and M3 (X = X1, Y = Y2) are aligned with the camera center of the CCD camera, and the respective alignment marks M1, M2, and M3 are imaged. Then, image processing is performed on the imaged alignment marks M1, M2, and M3, and the result of the image processing Based on this, the coordinate values of the actual positions of the mark centers M1C, M2C and M3C of the alignment marks M1, M2 and M3 in the work coordinate system are measured, and the measured measurement values of the mark centers M1C, M2C and M3C are measured. Based on the coordinate values and set coordinate values M1 (X = X1, Y = Y1), M2 (X = X2, Y = Y1) and M3 (X = X1, Y = Y2) of the alignment marks M1, M2, and M3. The coordinate value of the actual position of the mark center M1C of the alignment mark M1 is changed to the commanded coordinate value (X = 0, Y = 0), and the actual value of the mark center M2C of the alignment mark M2 is calculated. The coordinate value at the position of the position is set to the commanded coordinate value (X = X2-X1, Y = 0), and the alignment mark M3 The coordinate value of the actual position of the center M3C is changed to a work coordinate system in which the commanded coordinate values (X = 0, Y = Y2-Y1) are obtained. A scribe head is moved on a brittle material substrate based on a set program to form a scribe line that matches the alignment mark.

The scribing device of the present invention has an X direction stopper aligned with the X axis of the workpiece coordinate system set in the NC device at the tip side and a Y axis of the workpiece coordinate system set in the NC device at the tip side. Above the brittle material substrate positioned in the workpiece coordinate system in alignment with the tip side of the X-direction stopper and the tip side of the Y-direction stopper of the work table 16 each having a Y-direction stopper on the upper surface, A scribe head that is moved in the work coordinate system to form a scribe line on the brittle material substrate, and a CCD camera that is arranged in parallel with the scribe head on the common bracket and is moved in the work coordinate system together with the scribe head; Move the above scribe head and CCD camera together in the work coordinate system. Common X-axis moving means and Y-axis moving means, an imaging instruction by the CCD camera, an image processing apparatus that performs image processing and arithmetic processing of the captured image, an imaging instruction to the CCD camera by the image processing apparatus, and an image A processing instruction and an arithmetic processing instruction, formation of a scribe line on a brittle material substrate by the scribe head, and an NC apparatus for controlling the operation of the common X-axis moving means and the Y-axis moving means. The scribe head and the CCD camera are integrated into a work piece in a state where the brittle material substrate on which the alignment mark is marked is positioned in the work coordinate system in accordance with the tip side of the X direction stopper and the Y side stopper of the work table. Moved in the coordinate system, written on the brittle material substrate, and at least three alignment marks M1 in an orthogonal arrangement The set coordinate values M1 (X = X1, Y = Y1), M2 (X = X2, Y = Y1), and M3 (X = X1, Y = Y2) of the CCD camera are set to M2 and M3 in the work coordinate system. The camera centers are aligned, the respective alignment marks M1, M2 and M3 are imaged by the CCD camera, and the image processing and arithmetic processing are performed on the captured images by the image processing device. The alignment marks M1, M2 and M3 are respectively The coordinate values of the actual positions of the mark centers M1C, M2C, and M3C in the workpiece coordinate system are measured, and the measured coordinate values of the mark centers M1C, M2C, and M3C from the image processing apparatus and the alignment marks M1, M2 are measured. And M3 set coordinate values M1 (X = X1, Y = Y1), M2 (X = X2, Y = Y1) and M3 (X = X 1, Y = Y2), and the coordinate value of the actual position of the mark center M1C of the alignment mark M1 is changed to the commanded coordinate value (X = 0, Y = 0). The coordinate value of the actual position of the mark center M2C of the alignment mark M2 is set to the coordinate value of the actual position of the mark center M3C of the alignment mark M3 to the commanded coordinate value (X = X2-X1, Y = 0). The value is changed to a work coordinate system in which the commanded coordinate values (X = 0, Y = Y2-Y1) are set, and the program set in the brittle material substrate in the above-mentioned positioning state in the changed work coordinate system. In order to move the scribe head and form a scribe line aligned with the alignment mark with the scribe head, And it performs a control operation of the moving means and the Y-axis moving means.

In the present invention, since the scribe head and the CCD camera are moved together by a common moving means, the moving amount of the scribe head and the moving amount of the CCD camera are always matched regardless of the thermal expansion and mechanical error of the moving means. Therefore, the CCD camera moves as a unit with the scribe head, and the command value for moving the scribe head and the movement value of the scribe head always match with the command value based on the measurement value measured by the CCD camera. Become.

In the present invention, the scribe head and the CCD camera are integrally moved by a common moving means in a work coordinate system in which the brittle material substrate is positioned, and at least three points written on the brittle material substrate and orthogonally arranged. The camera center of the CCD camera is set to coordinate values M1 (X = X1, Y = Y1), M2 (X = X2, Y = Y1) and M3 (X = X1, Y = Y2) of the alignment marks M1, M2, and M3. Images are taken together, the coordinate values of the actual positions in the work coordinate system of the mark centers M1C, M2C and M3C of the alignment marks M1, M2 and M3 are measured, and based on the measured coordinate values of the mark centers M1C, M2C and M3C The actual coordinate value measured at the mark center M1C of the alignment mark M1 is The commanded coordinate values (X = 0, Y = 0) and the actual coordinate values measured at the mark center M2C of the alignment mark M2 are set to the commanded coordinate values (X = X2-X1, Y = 0). The actual coordinate values measured at the mark center M3C of the alignment mark M3 are changed to the respective coordinate systems of the commanded coordinate values (X = 0, Y = Y2-Y1).

In the changed work coordinate system, the actual position of the mark center M1C of the alignment mark M1 of the positioned brittle material substrate is the origin (X = 0, Y = 0), and the actual position of the mark center M2C of the alignment mark M2 is on the X axis. The actual position of the mark center M3C of the alignment mark M3 is set to the coordinate value (X = 0, Y = Y2-Y1) on the Y axis to the coordinate value (X = X2-X1, Y = 0). The workpiece coordinate system.

That is, the changed work coordinate system is a work coordinate system set based on the actual positions of the mark centers M1C, M2C, and M3C, based on the measurement values obtained by the CCD camera.

Therefore, by scribing the brittle material substrate in this modified work coordinate system, a scribe line that matches the alignment mark at the actual position can be formed on the brittle material substrate.

Also, coupled with the above-described effects, an accurate scribe line that matches the planned command position can be formed.

Furthermore, the scribing operation is performed by adjusting the scribe coordinate value on the production drawing as it is to the actual position of the alignment mark.

Furthermore, even when there is a positional deviation or an angular deviation in the positioning of the brittle material substrate, a scribe line that matches the alignment mark at the actual position can be formed regardless of the positional deviation or the angular deviation.

Furthermore, a scribe line that matches the alignment mark of the brittle material substrate can be formed regardless of the difference in thermal expansion between the brittle material substrate and the moving means that moves the scribe head.

For example, according to the scribing method of the present invention, when the center-to-center dimension between the alignment mark M1 and the alignment mark M2 is 300 mm in the drawing dimension, the actual center-to-center distance is 300.5 mm. When a scribe line of a straight line of X = 0 passing through and a straight line of X = 300 passing through M2 is formed, the interval between the two scribe lines is 300.5 mm.

In the present invention, the scribe head is preferably moved in the X-axis direction and the Y-axis direction. In the present invention, the brittle material substrate may be a glass substrate, a semiconductor substrate, a solar cell substrate, or the like. However, it is preferably a glass substrate.

According to the present invention, even when the brittle material substrate positioned on the table has a positional deviation and an angular deviation, the scribe line corresponding to the alignment mark is formed while the positional deviation and the angular deviation remain. Further, it is possible to provide a scribing method and a scribing apparatus capable of forming a scribing line according to an alignment mark even if there is a difference in thermal expansion or mechanical error in the table, the table moving means, and the scribe head moving means. it can.

Further, according to the present invention, it is possible to form a scribe line that matches the alignment mark regardless of the difference in thermal expansion between the brittle material substrate such as a glass substrate, a semiconductor substrate, and a solar cell substrate and the moving means of the scribe head. A scribing method and a scribing apparatus can be provided.

FIG. 1 is a plan view of a scribing apparatus showing an embodiment of the present invention. FIG. 2 is a side view of the scribing apparatus shown in FIG. FIG. 3 is an explanatory diagram in which the work coordinate system is corrected and converted with reference to the center coordinates of three orthogonal alignment marks on the glass substrate. FIG. 4 is a flowchart of the scribing method of the present invention.

Next, the present invention will be described in more detail on the basis of examples of preferred embodiments shown in the drawings. The present invention is not limited to these examples.

The scribing apparatus 1 of this example shown in FIG. 1 and FIG. 2 mounts a glass substrate 5 as a brittle material substrate having alignment marks M1, M2, M3. The work table 6, a scribe head 2 that moves in the XY plane coordinate system parallel to the upper surface of the glass substrate 5 above the work table 6, and the scribe head 2 are juxtaposed and integrated with the scribe head 2. CCD camera 10, scribe head 2 and CCD camera 10 as a unitary X-axis moving means 3 and Y-axis moving means 4 for moving the XY plane coordinate system, and an imaging instruction by CCD camera 10 and an image of the captured image An image processing apparatus (not shown) that performs processing and arithmetic processing, and an NC apparatus that numerically controls the movement of the X-axis moving means 3 and the Y-axis moving means 4 ( Has a Shimese not) and.

On the upper surface of the work table 6, an X-direction stopper 7 and a Y-direction stopper 8 are arranged so as to be orthogonal to the work coordinate system Z 'set in the NC device. The tip side 7A of the X direction stopper 7 indicates the X axis 7B aligned with the X axis of the workpiece coordinate system Z ′, and the tip side 8A of the Y direction stopper 8 indicates the Y axis 8B aligned with the Y axis of the workpiece coordinate system Z ′. Show. The X axis 7B and the Y axis 8B are orthogonal to each other, and the intersection of the X axis 7B and the Y axis 8B is the origin of the workpiece coordinate system Z '.

The scribe head 2 and the CCD camera 10 are juxtaposed on the front surface of the head plate 9 as a common bracket.

The scribing head 2 and the CCD camera 10 arranged in parallel on the head plate 9 are moved in an XY coordinate system by a common moving means 30, and the common moving means 30 is a common X-axis moving means. 3 and Y axis moving means 4.

The X-axis moving means 3 is composed of an X1-axis moving means 3-1 and an X2-axis moving means 3-2 provided along the X-axis at each of both side positions with the work table 6 interposed therebetween.

Each of the X1 axis moving means 3-1 and the X2 axis moving means 3-2 includes a guide rail 12 attached to the base 11 along the X axis 7B, and is movable to the guide rail 12 along the X axis 7B. The held slide block 13A, the movable body 13 attached to the slide block 13A and fixed with the nut portion 15A, and the servo electric motor 14 attached to the upper surface of the base 11 together with the work table 6 and the guide rail 12 And a ball screw 15 disposed along the guide rail 12 and connected to the rotation output shaft of the servo electric motor 14 at one end. The ball screw 15 is connected to the ball screw 15 via a nut portion 15A. The movable body 13 is connected.

Each of the X1-axis moving means 3-1 and the X2-axis moving means 3-2 moves the moving body 13 in the X direction through rotation of the ball screw 15 by the operation of the servo electric motor 14, and X1 The servo electric motors 14 of the axis moving means 3-1 and the X2 axis moving means 3-2 are operated synchronously, and the X1 axis moving means 3-1 and the X2 axis moving means 3-2 Each moving body 13 is configured to move in the X-axis synchronously by the respective synchronous operation of the servo electric motor 14.

The Y-axis moving means 4 is disposed perpendicular to the X-axis and has a brittle body 16 installed on the moving body 13 of the X1-axis moving means 3-1 and the moving body 13 of the X2-axis moving means 3-2. , A pair of guide rails 17 provided along the Y-axis on the brich body 16, a slide block 17A held movably along the Y-axis on the guide rail 17, and a nut portion attached to the slide block 17A An L-shaped Y-axis carriage 18 to which 20A is fixed, a Y-axis servo motor 19 attached to one end of the blitch body 16, and one end connected to the output rotation shaft of the Y-axis servo motor 19 and to the guide rail 17 And the ball screw 20 is connected to the Y-axis carriage 18 via a nut portion 20A into which the ball screw 20 is screwed. .

The Y-axis moving means 4 moves the Y-axis carriage 18 in the Y-axis through the rotation of the ball screw 20 by the operation of the Y-axis servo electric motor 19.

A pair of guide rails 21 are disposed on the side surface portion 18B of the Y-axis carriage 18 so as to be perpendicular to the upper surface of the work table 6 and along the vertical direction. The guide rails 21 are movable in the vertical direction. A head plate 9 is attached to the held slide block 21A, and a nut portion 9B is fixed to the head plate 9. A ball screw 9C is screwed to the nut portion 9B, and the ball screw 9C is vertically moved at the upper end. The upper and lower servo motors 22 are connected to the output shaft of the servo motor 22 and are fixed to the upper end portion 18 </ b> A of the Y-axis carriage 18.

By the operation of the vertical servo motor 22, the head plate 9, and thus the scribe head 2 and the CCD camera 10 are integrally moved in the vertical direction H under numerical control.

That is, the scribe head 2 and the CCD camera 10 are positioned at a required height position with respect to the glass substrate 5 positioned on the upper surface of the work table 6 and further on the upper surface by the vertical servo motor 22. Yes. As a result, the focus of the CCD camera 10 is adjusted when the CCD camera 10 images the alignment marks M1, M2, and M3, and the scribe line is formed on the glass substrate 5 when the scribe head 2 forms a scribe line. The head 2 is set to an appropriate height position.

The vertical movement means of this example for moving the scribe head 2 attached to the head plate 9 and the CCD camera 10 up and down by numerical control is, as described above, the guide rail 21 attached to the Y-axis carriage 18 having an L-shaped cross section, A slide block 21A held on the guide rail 21 so as to move up and down, a head plate 9 attached to the slide block 21A, a nut portion 9B fixed to the head plate 9, a ball screw 9C and a ball screw 9C screwed to the nut portion 9B Although the vertical servo motor 22 for rotation is provided, the vertical movement means for moving the scribe head 2 and the CCD camera 10 up and down by numerical control may be provided with a linear motor.

The scribe head 2 raises and lowers the scribe wheel 2a, the scribe wheel 2a, lowers the scribe wheel 2a when forming the scribe line, and presses the scribe wheel 2a with air elasticity against the glass substrate 5, and the scribe wheel. 2a is provided with an angle control motor 25 that changes the direction according to the scribe line direction. The air cylinder 24 and the angle control motor 25 are attached to the head plate 9, and the scribe wheel 2a is fixed to the piston rod 26. It is attached to the connected connector 28 and is lowered by the air cylinder 24 only when a scribe line is formed. The rotation of the output rotation shaft of the angle control motor 25 is provided on the output rotation shaft. Pinion 25a, The pinion 27 is attached to the piston rod 26 of the air cylinder 24, and is connected to the piston rod 26 and supports the scribe wheel 2a. Is transmitted to the scribe wheel 2a, whereby the scribe wheel 2a can be turned in accordance with the scribe line direction, and the scribe wheel 2a is lowered, raised and angle-controlled by the air cylinder 24. The orientation of the scribe wheel 2a in the direction of the scribe line by 24 is performed independently of the vertical movement of the scribe head 2 and the CCD camera 10 when the scribe line is formed.

In addition to the above configuration, the scribing apparatus 1 performs numerical control of the X-axis moving unit 3, the Y-axis moving unit 4, the vertical servo motor 22 and the angle control motor 25, and performs arithmetic processing such as workpiece coordinate system conversion. An image processing apparatus that performs imaging by the CCD camera 10 based on instructions of the apparatus (CNC) and the NC apparatus (CNC), image processing of the captured image, and calculation processing of the image processing result is provided.

A scribing method using the scribing apparatus 1 will be described with reference to FIGS.

The glass substrate 5 on which the alignment marks M1, M2, M3,... Are marked on the upper surface of the work table 6 on the tip side 7A of the X direction stopper 7 and the tip side 8A of the Y direction stopper 8, respectively. Make contact. By this operation, the glass substrate 5 is positioned in accordance with the workpiece coordinate system Z ′ set in advance in the NC apparatus, and the orthogonal sides of the glass substrate 5 are set to the X axis and Y of the workpiece coordinate system Z ′. Fit to each of the axes. (Step I)

Next, the scribe head 2 and the CCD camera 10 are integrally moved by the common moving means 30 in the work coordinate system Z ′ and written on the glass substrate 5 in a positioning state on the work table 6 and arranged in an orthogonal arrangement. The set coordinate values M1 (X = X1, Y = Y1), M2 (X = X2, Y = Y1), and M3 (X = X1, X) of the at least three alignment marks M1, M2, and M3 in the work coordinate system Z ′ The camera center 31 of the CCD camera 10 is aligned with each of Y = Y2), the alignment mark is imaged, image processing is performed in the image processing device, and arithmetic processing is performed based on the result of the image processing, and each of the alignment marks M1, M2, and M3 The coordinate values of the actual positions in the workpiece coordinate system Z ′ of the mark centers M1C, M2C and M3C are measured. (Step II)

The measured coordinate values of the mark centers M1C, M2C, and M3C are sent to the NC device, and the NC device measures the coordinate values of the mark centers M1C, M2C, and M3C and the set coordinate values of the alignment marks M1, M2, and M3. Based on M1 (X = X1, Y = Y1), M2 (X = X2, Y = Y1) and M3 (X = X1, Y = Y2), arithmetic processing such as coordinate rotation squareness correction and movement amount correction The measured coordinate value of the actual position of the mark center M1C of the alignment mark M1 is changed to the commanded coordinate value (X = 0, Y = 0) of the actual position of the mark center M2C of the alignment mark M2. The measured coordinate value is measured to the commanded coordinate value (X = X2-X1, Y = 0) at the actual position of the mark center M3C of the alignment mark M3. Coordinate values, to change the workpiece coordinate system Z becomes commanded coordinate values (X = 0, Y = Y2-Y1). (Step III)

In the changed work coordinate system Z, the scribe head 2 is moved and operated on the glass substrate 5 positioned on the work table 6 based on a preset NC program to form a scribe line that matches the alignment mark. To do. (Step IV)

As described above, in the scribing method using the scribing apparatus 1 of this example, the glass substrate 5 on which the alignment marks are written is positioned on the upper surface of the work table 6 according to the work coordinate system Z ′ set in the NC apparatus. In this state, the scribe head 2 and the CCD camera 10 are integrally moved in the work coordinate system Z ′ by the common moving means 30 and are written on the glass substrate 5 and at least three alignment marks M1 that are orthogonally arranged. , M2 and M3 in the coordinate system M ′ (X = X1, Y = Y1), M2 (X = X2, Y = Y1) and M3 (X = X1, Y = Y2) to the CCD camera 10 The camera center 31 is aligned, the respective alignment marks M1, M2, and M3 are imaged, image processing, and arithmetic processing are performed, and alignment is performed. The coordinate values of actual positions in the work coordinate system Z ′ of the mark centers M1C, M2C and M3C of the marks M1, M2 and M3 are measured, and the measured coordinate values of the mark centers M1C, M2C and M3C are NC devices. In the NC device, the measured coordinate values of the mark centers M1C, M2C, and M3C and the set coordinate values M1 (X = X1, Y = Y1), M2 (X = X2) of the alignment marks M1, M2, and M3 , Y = Y1) and M3 (X = X1, Y = Y2), and the coordinate value of the actual position of the mark center M1C of the alignment mark M1 is the commanded coordinate value (X = 0). , Y = 0), the coordinate value of the actual position of the mark center M2C of the alignment mark M2 is the commanded coordinate value (X = X2-X1, Y = 0). In addition, the coordinate value of the actual position of the mark center M3C of the alignment mark M3 is changed to the workpiece coordinate system Z that becomes the commanded coordinate value (X = 0, Y = Y2-Y1), and this changed workpiece coordinate system At Z, the scribe head 2 is moved to the glass substrate 5 positioned on the work table 6 based on a preset NC program to form a scribe line that matches the alignment mark.

Then, the scribing device 1 has an X-direction stopper 7 aligned with the X axis 7B of the work coordinate system Z ′ set in the NC device at the front end side 7A, and the Y axis 8B of the work coordinate system Z ′ at the front end side 8A. Positioning in the workpiece coordinate system Z ′ in accordance with the work table 6 having the Y-direction stopper 8 combined on the upper surface, the tip side 7A of the X-direction stopper 7 on the upper surface of the work table 6 and the tip side 8A of the Y-direction stopper 8. Above the glass substrate 5, the scribe head 2 that forms the scribe lines 32 and 33 on the glass substrate 5, the CCD camera 10 that is arranged in parallel with the scribe head 2 and moves together with the scribe head 2, and the scribe head 2 And the CCD camera 10 are moved together in the work coordinate system Z ′ and the XY coordinate system of Z. Means 3 and Y axis moving means 4, image processing by CCD camera 10, image processing, arithmetic processing, image processing device for outputting data to NC device, imaging instruction by CCD camera 10, image processing by image processing device And an NC device that controls the movement of the image processing result, the formation of the scribe lines 32 and 33 by the scribe head 2, and the movement of the common X-axis moving means 3 and Y-axis moving means 4. In a state where the glass substrate 5 on which M1, M2, M3... Are positioned in the workpiece coordinate system Z ′ in accordance with the tip side 7A of the X direction stopper 7 and the tip side 8A of the Y direction stopper 8 of the work table 6, The scribing head 2 and the CCD camera 10 are moved together in the work coordinate system Z ′, and written on the glass substrate 5 and arranged orthogonally in the work coordinate system Z ′. Coordinate values M1 (X = X1, Y = Y1), M2 (X = X2, Y = Y1), and M3 (X = X1) of the at least three alignment marks M1, M2, and M3 in the work coordinate system Z ′. , Y = Y2), the camera center 31 of the CCD camera 10 is aligned, the respective alignment marks M1, M2, and M3 are imaged by the CCD camera 10, image processing is performed by the image processing device, and the image processing results are obtained. Calculation processing is performed to measure the coordinate values of the actual positions in the workpiece coordinate system Z ′ of the mark centers M1C, M2C and M3C of the alignment marks M1, M2 and M3, and the measured mark centers M1C, M2C and M3C respectively. Coordinate values and set coordinate values M1 (X = X1, Y = Y1), M2 (X = X2) of the alignment marks M1, M2, and M3 , Y = Y1) and M3 (X = X1, Y = Y2), and the coordinate value of the actual position of the mark center M1C of the alignment mark M1 is the commanded coordinate value (X = 0). , Y = 0), the coordinate value of the actual position of the mark center M2C of the alignment mark M2 is the actual coordinate center M3C of the alignment mark M3 to the commanded coordinate value (X = X2-X1, Y = 0). Is changed to a work coordinate system Z in which the coordinate value of the position becomes the commanded coordinate value (X = 0, Y = Y2-Y1). In the changed work coordinate system Z, the glass substrate 5 in the positioning state is changed. Based on the NC control program, the scribe head 2 is moved by the X-axis moving means 3 and the Y-axis moving means 4, and the X-direction scan passing through the mark center M3C, for example, aligned with the alignment mark. And performs the formation of each of the Y-direction of the scribe line 33 through the live line 32 and the mark center M2C.

DESCRIPTION OF SYMBOLS 1 Scribing device 2 Scribing head 3 X-axis moving means 4 Y-axis moving means 5 Glass substrate 6 Work table 7 X direction stopper 8 Y direction stopper 9 Head plate 10 CCD camera 11

Base

12, 17, 21 Guide rail 13

Moving body

13A , 17A, 21A Slide block 14 Servo

electric motor

9C, 15, 20

Ball screw

9B, 15A, 20A Nut 16 Bitch body 18 Y-axis carriage 19 Y-axis servo motor 22 Vertical servo motor 24 Air cylinder 25 Angle control motor 26 Piston rod 27 Pinion 28 connector

Claims

In a state where the brittle material substrate with the alignment mark is positioned on the table upper surface in accordance with the work coordinate system set in the NC apparatus, the scribe head and the CCD camera are integrated with the above-mentioned work coordinates by a common moving means. Set coordinate values M1 (X = X1, Y = Y1), M2 in the work coordinate system of at least three alignment marks M1, M2 and M3 which are moved in the system and are written on the brittle material substrate and have an orthogonal arrangement relationship The camera center of the CCD camera is aligned with (X = X2, Y = Y1) and M3 (X = X1, Y = Y2), and the respective alignment marks M1, M2, and M3 are imaged. Image processing is performed on the images M2 and M3, and the above alignment is performed based on the result of the image processing. The coordinate values of the actual positions of the mark centers M1C, M2C and M3C of the marks M1, M2 and M3 in the workpiece coordinate system are measured, and the measured coordinate values of the mark centers M1C, M2C and M3C and the alignment are measured. Calculation processing is performed based on the set coordinate values M1 (X = X1, Y = Y1), M2 (X = X2, Y = Y1) and M3 (X = X1, Y = Y2) of the marks M1, M2, and M3. The coordinate value of the actual position of the mark center M1C of the alignment mark M1 is set to the coordinate value of the actual position of the mark center M2C of the alignment mark M2 to the commanded coordinate value (X = 0, Y = 0). The value is set to the commanded coordinate value (X = X2-X1, Y = 0), and the actual value of the mark center M3C of the alignment mark M3. The coordinate value of the device is changed to a work coordinate system where the commanded coordinate value (X = 0, Y = Y2-Y1) is set, and the scribe head is moved based on the program in the changed work coordinate system. A scribing method for forming a scribe line in alignment with the alignment mark on the brittle material substrate in the above-mentioned positioning state.
The scribing method according to claim 1, wherein the scribe head is moved in the X-axis direction and the Y-axis direction.
3. The scribing method according to claim 1, wherein the brittle material substrate is a glass substrate.
An X-direction stopper aligned with the X-axis of the workpiece coordinate system set in the NC device on the tip side and a Y-direction stopper aligned with the Y-axis of the workpiece coordinate system set on the NC device on the top side, respectively. The workpiece table is moved in the workpiece coordinate system above the brittle material substrate positioned in the workpiece coordinate system in accordance with the tip side of the X-direction stopper and the tip side of the Y-direction stopper of the work table, A scribing head for forming a scribing line on the brittle material substrate, a CCD camera which is arranged in parallel with the scribing head on a common bracket and is moved together with the scribing head in a work coordinate system, and the scribing head and the CCD camera. Common X-axis moving means and Y-axis shift Means, an image processing apparatus for performing an imaging instruction by the CCD camera, image processing and arithmetic processing of the captured image, an imaging instruction to the CCD camera, an image processing instruction and an arithmetic processing instruction in the image processing apparatus, and the scribe head And a NC device for controlling the operation of the common X-axis moving means and the Y-axis moving means, and the NC apparatus uses the brittle material substrate with the alignment marks as described above. The scribe head and the CCD camera are moved together in the work coordinate system while being positioned in the work coordinate system in accordance with the tip side of the X-direction stopper and the tip side of the Y-direction stopper of the work table. The work coordinates of at least three alignment marks M1, M2 and M3 written in an orthogonal arrangement Align the camera center of the CCD camera with the set coordinate values M1 (X = X1, Y = Y1), M2 (X = X2, Y = Y1) and M3 (X = X1, Y = Y2) at The marks M1, M2 and M3 are imaged by a CCD camera, and image processing and arithmetic processing are performed on the captured images by an image processing apparatus, and the mark centers M1C, M2C and M3C of the alignment marks M1, M2 and M3, respectively. The coordinate values of the actual positions in the workpiece coordinate system are measured, and the measured coordinate values of the mark centers M1C, M2C, and M3C from the image processing apparatus and the set coordinate values M1 of the alignment marks M1, M2, and M3 ( X = X1, Y = Y1), M2 (X = X2, Y = Y1) and M3 (X = X1, Y = Y2) The coordinate value of the actual position of the mark center M1C of the alignment mark M1 is set to the commanded coordinate value (X = 0, Y = 0), and the actual position of the mark center M2C of the alignment mark M2 The coordinate value of the actual position of the mark center M3C of the alignment mark M3 is changed to the commanded coordinate value (X = X2-X1, Y = 0). The workpiece coordinate system is changed to 0, Y = Y2-Y1). In the changed workpiece coordinate system, the scribe head is moved based on the program, and the brittle material substrate in the above-described positioning state is aligned with the alignment mark. In order to form a scribe line with a scribe head, control the operation of the CCD camera imaging instruction and the common X-axis moving means and Y-axis moving means. And it is scribing device that became a Migihitsuji.
The scribing apparatus according to claim 4, wherein the scribing head is moved in the X-axis direction and the Y-axis direction.
6. The scribing apparatus according to claim 4, wherein the brittle material substrate is a glass substrate.