WO2012100379A1

WO2012100379A1 - Magnetic-variation type electrical permanent-magnetic chuck

Info

Publication number: WO2012100379A1
Application number: PCT/CN2011/000161
Authority: WO
Inventors: 丁弘
Original assignee: 布里斯克磁业(上海)有限公司
Priority date: 2011-01-30
Filing date: 2011-01-30
Publication date: 2012-08-02

Abstract

A magnetic-variation type electrical permanent-magnetic chuck is disclosed, and it includes: a soft magnetic base with an adsorption plane; multiple magnetic adsorption devices for adsorbing the workpiece onto the adsorption plane, the multiple magnetic adsorption devices being provided in the base intervally; and multiple degaussing devices for degaussing the residual magnetism left in the workpiece, wherein each of the multiple degaussing devices is arranged in the base adjacent to one of the multiple magnetic adsorption devices in turn along the arrangement direction of the magnetic adsorption device.

Description

Magnetic difference type permanent magnet suction cup

The invention relates to a magnetic differential type permanent magnetic chuck, in particular to a magnetic difference type permanent magnetic chuck with a degaussing function. Background technique

In existing lathes, milling machines, etc., magnetic differential electric permanent magnet chucks are often used to attract magnetically conductive soft magnetic workpieces for fixing workpieces and processing workpieces.

A schematic illustration of a prior art magnetic differential electric permanent magnet chuck is shown in Figures 1-4. 1 is a schematic plan view of a rectangular-shaped magnetic difference type permanent magnetic chuck 10, FIG. 2 is a schematic plan view of a disk-shaped magnetic difference type permanent magnetic chuck 20, and FIG. 3 is a pair of rectangles. A schematic side cross-sectional view of a magnetic differential type permanent magnetic chuck 10 in a magnetic state on a magnetic differential type permanent magnetic chuck 10 of the body shape, and FIG. 4 is a magnetic differential type permanent magnetic chuck 10 in the shape of a rectangular body. A schematic side cross-sectional view of a magnetically differential electric permanent magnet chuck 10 in a demagnetized state. Fig. 5 is a schematic cross-sectional view, taken along line II of Fig. 2, of the magnetic differential type electric permanent magnet chuck 20 in a state in which the disk-shaped magnetic differential type permanent magnet chuck 20 is magnetically placed, and Fig. 6 is a view A schematic cross-sectional view of the magnetic differential type permanent magnetic chuck 20 in a state in which the disk-shaped magnetic differential type permanent magnet chuck 20 is demagnetized is taken along line II of FIG.

As shown in Figs. 1, 3 and 4, the rectangular-shaped magnetic differential type permanent magnet chuck 10 includes a soft magnetic integral base 101 and a plurality of magnetic attraction means 103. The susceptor 101 is made of a soft magnetic metal such as iron or an iron-based soft magnetic alloy, and the susceptor 101 has an adsorption plane 1011 and a plurality of grooves 102. The adsorption plane 1011 has a rectangular shape. A plurality of grooves 102 are recessed from the adsorption plane 1011 toward the inside of the susceptor 101, and a plurality of grooves 102 are formed in the susceptor 101 spaced apart from each other along the long sides of the rectangular-shaped adsorption plane 1011. A plurality of magnetic adsorption devices 103 are used to magnetically adsorb the workpiece 5 to the adsorption plane 1011. Each of the plurality of magnetic attraction means 103 is each accommodated in each of the plurality of grooves 102, so that the plurality of magnetic attraction means 103 are disposed in the base 101 at intervals from each other.

Each of the plurality of magnetic attraction means 103 includes a reversible magnet 1031 (indicated by a broken line in Fig. 1), a magnetic attraction coil 1032 (indicated by a thick dotted line in Fig. 1), a soft magnetic core 1033, and a plurality of permanent magnets. Magnetic steel 1034. The reversible magnetic steel 1031 is made of a high remanence soft magnetic magnet such as an AlNiCo alloy, and its magnetization direction can be obtained by a magnetic adsorption coil 1032. change. The permanent magnet is made of a permanent magnet such as NdFeB (NdFeB) (a material having a high remanence and a coercive force greater than AlNiO). The reversible magnetic steel is fixedly disposed at the bottom of the groove, and the bottom surface of the reversible magnetic steel is in contact with the bottom of the concave groove. The magnetic adsorption coil is disposed around the circumferential side of the reversible magnetic steel such that the magnetic attraction coil can change the direction of magnetization of the magnetically absorbing coil to change the magnetization direction of the reversible magnetic steel toward the adsorption plane or away from the adsorption plane. The soft magnetic core is made of a soft magnetic metal such as iron or an iron-based soft magnetic alloy. The soft magnetic core and the reversible magnetic steel are fixedly disposed in the groove, the bottom surface of the soft magnetic core is in contact with the top surface of the reversible magnetic steel, and the top surface of the soft magnetic core is coplanar with the adsorption plane. A plurality of permanent magnets are housed in a permanent magnet receiving groove formed between the circumferential side of the soft magnetic core and the inner side of the groove, and the same magnetic poles of the plurality of permanent magnets face the circumferential side of the soft magnetic core. Further, when viewed from the side of the adsorption plane, the permanent magnet housing groove has a rectangular ring shape; the portion of the permanent magnet housing groove corresponding to the two long sides of the rectangular ring shape is two long groove portions. A plurality of permanent magnets are housed in the two long groove portions. The two long groove portions extend in a direction parallel to the short side of the rectangular adsorption surface.

As shown in the figure and the figure, the disc-shaped magnetic differential type permanent magnet chuck comprises a soft magnetic integral base and a plurality of magnetic adsorption means. The susceptor is made of a soft magnetic metal such as iron or an iron-based soft magnetic alloy, and the susceptor has an adsorption plane and a plurality of grooves. Among them, the adsorption plane is circular. A plurality of grooves are recessed from the adsorption plane toward the inside of the base, and a plurality of grooves are formed in the base in a circumferential direction of the circular adsorption surfaces. a plurality of magnetic attraction means for magnetically adsorbing the workpiece to the adsorption plane, each of the plurality of magnetic adsorption means being each accommodated in each of the plurality of grooves, such that the plurality of magnetic adsorption means are arranged at intervals in the base In the seat.

Each of the plurality of magnetic adsorption devices includes a reversible magnet (indicated by a broken line in the drawing), a magnetic attraction coil (indicated by a thick dotted line in the drawing), a soft magnetic core, and a plurality of permanent magnets. The reversible magnetic steel is fixedly disposed at the bottom of the groove, and the bottom surface of the reversible magnetic steel is in contact with the bottom of the groove. The magnetic adsorption coil is disposed around the circumferential side of the reversible magnetic steel, so that the magnetic adsorption coil can change the direction of the current of the magnetic adsorption coil to change the magnetization direction of the reversible magnetic steel to the adsorption plane or away from the adsorption plane. The soft magnetic core is made of soft magnetic metal. , such as iron or iron-based soft magnetic alloys. The soft magnetic core and the reversible magnetic steel are fixedly disposed in the groove, and the bottom surface of the soft magnetic core is in contact with the top surface of the reversible magnetic steel, and the top surface of the soft magnetic core is coplanar with the adsorption plane. A plurality of permanent magnets are housed in a permanent magnet accommodating groove formed between a circumferential side surface of the soft magnetic core and an inner side surface of the groove, and the same magnetic poles of the plurality of permanent magnets face the circumferential side of the soft magnetic core. Further, each of the permanent magnet accommodating grooves includes two radial groove portions extending in the radial direction of the susceptor in the shape of a disk. Multiple permanent magnets are housed in two radial slots Part of it.

Next, the operation of the magnetic differential type permanent magnet chuck 10 for adsorbing and desorbing the workpiece 5, that is, the process of magnetizing and demagnetizing the magnetic differential type permanent magnet chuck 10 will be described with reference to Figs. The closed line with arrows in Figures 3 and 4 schematically represents the distribution of the magnetic field. As shown in Figures 3 and 4, the N poles of the plurality of permanent magnets 1034 face the soft magnetic 1033. As shown in FIG. 3, when the magnetic differential type permanent magnet chuck 10 is magnetized, the magnetic attraction coil 1032 is supplied with a forward current, for example, a forward current of more than 1 second, so that the reversible magnet 1031 is magnetized to N. The pole faces the adsorption surface 1011 (here, preferably, the reversible magnet 1031 is saturated and magnetized), and then the magnetic attraction coil 1032 is deenergized. Since the N pole of the reversible magnet 1031 having the remanence after magnetization and the N pole of the permanent magnet 1034 are both directed toward the soft magnetic core 1033, the magnetic field is exposed from the adsorption plane 1011 through the soft magnetic core 1033, and the magnetic differential type permanent magnetic chuck 10 exhibits magnetism to the outside, thereby adsorbing the soft magnetic workpiece 5 to the adsorption plane 1011. As shown in FIG. 4, when the magnetic differential type permanent magnet chuck 10 is demagnetized, the magnetic attraction coil 1032 is supplied with a reverse current, for example, a reverse current of 1 second or more, so that the reversible magnet 1031 is magnetized to the N pole. Deviating from the adsorption surface 1011 (here, preferably, the reversible magnetic steel 1031 is saturated and magnetized), and then the magnetic attraction coil 1032 is deenergized. At this time, the magnetic field generated by the permanent magnet 1034 and the magnetic field generated by the reversible magnet 1031 having the remanence after magnetization are coupled to each other in the susceptor 101 and the soft magnetic core 1033 to form a magnetic short circuit. At this time, the reversible magnet 1031 is generated. The total magnetic flux of the magnetic field (i.e., the magnetic flux passing through the end face of the N pole of the reversible magnet 1031) and the total magnetic flux of the magnetic field generated by the permanent magnet 1034 (i.e., the magnetic flux passing through the end face of the N pole of each permanent magnet 1034) The sum of the sums is equal, so that the superimposed magnetic fields of the two are not exposed from the susceptor 101, and the magnetic differential type electric permanent magnet chuck 10 does not exhibit magnetism to the outside. Thus, the workpiece 5 is no longer adsorbed by the differential magnetic permanent magnet chuck 10.

The disk-shaped magnetic differential type permanent magnetic chuck 20 shown in Fig. 2 has an operation of adsorbing and desorbing the workpiece 5 similarly to that of the rectangular-shaped magnetic differential type permanent magnet chuck 10. Next, the operation of adsorbing and desorbing the workpiece 5 by the disc-shaped magnetic difference type permanent magnet chuck 20 will be described with reference to Figs. 5 and 6, i.e., the magnetic and magnetic demagnetization of the disc-shaped magnetic differential type permanent magnet chuck 20 is performed. process. The closed line with arrows in Figures 5 and 6 schematically represents the distribution of the magnetic field. As shown in FIGS. 5 and 6, the N poles of the plurality of permanent magnets 2034 face the soft magnetic 2033. As shown in FIG. 5, when the magnetic differential type permanent magnet chuck 20 is magnetized, the magnetic attraction coil 2032 is supplied with a forward current, for example, a forward current of 1 second or more, so that the reversible magnetic steel 2031 is magnetized to N. The pole faces the adsorption surface 2011 (here, preferably, the reversible magnet 2031 is saturated and magnetized), and then the magnetic attraction coil 2032 is deenergized. Since the N pole of the reversible magnetic steel 2031 having the remanence after magnetization and the N pole of the permanent magnet 2034 are both directed toward the soft magnetic core 2033, the magnetic field is exposed from the adsorption plane 2011 through the soft magnetic core 2033, and the magnetic differential type permanent magnetic chuck 20 exhibits magnetism to the outside, thereby adsorbing the soft magnetic workpiece 5 to the adsorption plane 2011. As shown in FIG. 6, when the magnetic differential type permanent magnet chuck 20 is demagnetized, the magnetic attraction coil 2032 is supplied with a reverse current, for example, a reverse current of 1 second or more, so that the reversible magnetic steel 2031 is magnetized to the N pole. Deviating from the adsorption surface 2011 (here, preferably reversible The magnetic steel 2031 is magnetized by saturation, and then the magnetic attraction coil 2032 is de-energized. At this time, the magnetic field generated by the permanent magnet 2034 and the magnetic field generated by the reversible magnetic steel 2031 having the remanence after magnetization are coupled to each other in the susceptor 201 and the soft magnetic core 2033 to form a magnetic short circuit. At this time, the reversible magnetic steel 2031 is generated. The total magnetic flux of the magnetic field (i.e., the magnetic flux passing through the end face of the N pole of the reversible magnetic steel 2031) and the total magnetic flux of the magnetic field generated by the permanent magnet 2034 (i.e., the magnetic flux passing through the end face of each permanent magnet 2034) The sum is equal, so that the superimposed magnetic fields of the two are not exposed from the susceptor 201, and the magnetic differential type permanent magnet chuck 20 does not exhibit magnetism to the outside. Thereby the workpiece 5 is no longer adsorbed by the magnetic differential type permanent magnetic chuck 20.

However, if the workpiece is made of a high remanence material such as high carbon steel, it is magnetized when the workpiece is attracted to the magnetic differential type permanent magnet chuck by magnetizing the magnetic differential type permanent magnet chuck. After demagnetization of the magnetic differential type permanent magnet chuck, the workpiece will still adsorb to the adsorption plane due to its own remanence, which makes it difficult to remove the workpiece from the adsorption plane. Summary of the invention

In view of the above problems, the present invention has been made. An object of the present invention is to provide a magnetic differential type electric permanent magnet chuck having a function of demagnetizing a workpiece so that residual magnetism in a workpiece made of a high remanence material can be Eliminated, making it easy to remove the workpiece from the adsorption plane.

According to an aspect of the invention, a magnetic differential type permanent magnet chuck is provided, comprising: a soft magnetic base, the base has an adsorption plane; and a plurality of magnetic adsorption devices for magnetically adsorbing the workpiece on the adsorption plane, the plurality of The magnetic adsorption devices are arranged in a pedestal arrangement with each other; and a plurality of degaussing devices for eliminating residual magnetism in the workpiece, each of the plurality of degaussing devices being arranged along the direction of the magnetic adsorption device Each of the plurality of magnetic adsorption devices is sequentially disposed adjacent to each other in the susceptor.

Preferably, the base has a plurality of grooves, the plurality of grooves are recessed from the adsorption plane toward the inside of the base, and the plurality of grooves are formed in the base at intervals; each of the plurality of magnetic adsorption devices Accommodated in each of the plurality of grooves, the plurality of magnetic attraction means are disposed in the susceptor spaced apart from each other.

Preferably, each of the plurality of magnetic adsorption devices comprises: a reversible magnetic steel, the reversible magnetic steel is fixedly disposed at the bottom of the groove, and the bottom surface of the reversible magnetic steel is in contact with the bottom of the groove; the magnetic adsorption coil, the magnetic adsorption coil surrounds The circumferential side of the reversible magnetic steel is arranged such that the magnetic attraction coil changes the direction of the current of the magnetic adsorption coil to change the magnetization direction of the reversible magnetic steel to the adsorption plane or away from the adsorption plane; the soft magnetic core, the soft magnetic core and the reversible magnetic steel stack Fixedly disposed in the groove, the bottom surface of the soft magnetic core is in contact with the top surface of the reversible magnetic steel, and the top surface of the soft magnetic core is coplanar with the adsorption plane, and a plurality of permanent magnets, a plurality of permanent magnets are accommodated in the soft In the permanent magnet accommodating groove formed between the circumferential side surface of the magnetic core and the inner side surface of the groove, the same magnetic pole of the plurality of permanent magnets faces the circumferential side surface of the soft magnetic core. Preferably, each of the plurality of degaussing means includes a degaussing coil housed in a degaussing coil receiving groove provided at a space of the base between two adjacent ones of the plurality of grooves.

Preferably, the pedestal has a rectangular shape, and the adsorption plane has a rectangular shape; the plurality of grooves are formed in the pedestal along the longitudinal direction of the rectangular adsorption surface; when viewed from the side of the adsorption plane, permanent The magnetic steel receiving groove has a rectangular ring shape; the permanent magnet steel receiving groove corresponding to the two long sides of the rectangular ring has two long groove portions; the two long groove portions are along a short side parallel to the rectangular adsorption surface a direction extending; at intervals of the pedestals between two adjacent grooves among the plurality of grooves, respectively provided with adjacent two long groove portions respectively communicating adjacent two permanent magnet accommodating grooves The two communicating grooves at the opposite ends make the two communicating grooves and the adjacent two long groove portions of the adjacent two permanent magnet receiving grooves constitute the degaussing coil receiving groove.

Preferably, the base is in the shape of a disk, and the adsorption plane is circular; each permanent magnet receiving groove comprises two radial groove portions extending radially along the base of the disk shape; The circumferential direction of the circular adsorption surface is formed in the pedestal in a spaced relationship with each other; at the interval of the pedestal between the two adjacent grooves among the plurality of grooves, two permanent adjacent to each other are provided Two communication grooves at opposite ends of the adjacent two radial groove portions of the magnetic steel accommodating groove, such that the two communication grooves and the adjacent two permanent magnetic steel accommodating grooves are adjacent to the two radial grooves Part of the degaussing coil receiving groove is formed.

Preferably, in the degaussing process of the workpiece, the two adjacent degaussing devices of the plurality of degaussing devices have opposite polarities on the side of the adsorption plane.

Preferably, the soft magnetic core is an iron core.

Preferably, the permanent magnet accommodating groove and the degaussing coil accommodating groove are filled with epoxy resin to be flush with the adsorption plane. DRAWINGS

Fig. 1 is a schematic plan view showing a magnetic differential type permanent magnetic chuck 10 having a rectangular body shape.

2 is a schematic plan view of a disk-shaped magnetic differential type permanent magnetic chuck 20 .

Fig. 3 is a schematic side cross-sectional view showing the magnetic differential type permanent magnetic chuck 10 in a state in which the magnetic differential type permanent magnetic chuck 10 of a rectangular shape is magnetized.

Fig. 4 is a schematic side cross-sectional view showing the magnetic difference type electric permanent magnet chuck 10 in a state in which the rectangular magnetic differential type permanent magnetic chuck 10 is demagnetized.

Fig. 5 is a schematic cross-sectional view, taken along line I-I of Fig. 2, of the magnetic differential type permanent magnetic chuck 20 in a state in which the disk-shaped magnetic differential type permanent magnet chuck 20 is magnetic.

Figure 6 is a view showing the edge of the magnetic difference type permanent magnetic chuck 20 in a state in which the disk-shaped magnetic difference type permanent magnetic chuck 20 is demagnetized. A schematic cross-sectional view taken along line II of Fig. 2.

Fig. 7 is a schematic plan view showing a rectangular-shaped magnetic differential type permanent magnet chuck 1 according to a first embodiment of the present invention.

Fig. 8 is a schematic side cross-sectional view showing a rectangular-shaped magnetic differential type permanent magnet chuck 1 according to a first embodiment of the present invention.

Fig. 9 is a schematic plan view of a disk-shaped magnetic differential type permanent magnetic chuck 2 according to a second embodiment of the present invention.

Fig. 10 is a schematic cross-sectional view, taken along line II - II of Fig. 7, of the disk-shaped magnetic differential type permanent magnetic chuck 2 according to the second embodiment of the present invention. detailed description

The invention provides a magnetic difference type electric permanent magnet chuck, comprising: a soft magnetic base, the base has an adsorption plane; a plurality of magnetic adsorption devices for magnetically adsorbing the workpiece on the adsorption plane, and the plurality of magnetic adsorption devices are spaced apart from each other Arranged in the susceptor; and a plurality of degaussing devices for eliminating residual magnetism in the workpiece, each of the plurality of degaussing devices being respectively associated with the plurality of magnetic absorbing devices in a direction in which the magnetic absorbing devices are arranged Each of them is sequentially disposed adjacent to each other in the susceptor.

Preferred embodiments of the present invention are described below with reference to Figures 5-8.

(First Embodiment)

7 and 8 show a magnetic differential type permanent magnetic chuck 1 according to a first embodiment of the present invention. Fig. 7 is a schematic plan view showing a rectangular-shaped magnetic differential type permanent magnet chuck 1 according to a first embodiment of the present invention. Fig. 8 is a schematic side sectional view showing a magnetic differential type permanent magnetic chuck 1 according to a first embodiment of the present invention.

As shown in Figs. 7 and 8, the rectangular-shaped magnetic differential type permanent magnet chuck 1 comprises a soft magnetic integral base 11 and a plurality of magnetic attraction means 13. The susceptor 11 is made of a soft magnetic metal such as iron or an iron-based soft magnetic alloy, and the susceptor 11 has an absorbing plane 111 and a plurality of grooves 12. The adsorption plane 111 has a rectangular shape. A plurality of grooves 12 are recessed from the adsorption plane 111 toward the inside of the susceptor 11, and a plurality of grooves 12 are formed in the susceptor 11 so as to be spaced apart from each other along the long sides of the rectangular-shaped adsorption plane 111. A plurality of magnetic adsorption devices 13 are used to magnetically adsorb the workpiece 5 to the adsorption plane 111. Each of the plurality of magnetic attraction means 13 is accommodated in each of the plurality of grooves 12, so that the plurality of magnetic attraction means 13 are disposed in the base 11 at intervals.

Each of the plurality of magnetic attraction means 13 includes a reversible magnet 131 (indicated by a broken line in Fig. 7), a magnetic attraction coil 132 (indicated by a thick dotted line in Fig. 7), a soft magnetic core 133, and a plurality of permanent magnets. Magnetic steel 134. Reversible magnetic steel 131 example As made of an AlNiCo alloy, the magnetization direction thereof can be changed by the magnetic attraction coil 132. The permanent magnet 134 is made of a permanent magnet such as NdFeB. The reversible magnet 131 is fixedly disposed at the bottom of the recess 12, and the bottom surface of the reversible magnet 131 is in contact with the bottom of the recess 12. The magnetic attraction coil 132 is disposed around the circumferential side of the reversible magnet 131 such that the magnetic attraction coil 132 can change the direction of magnetization of the reversible magnet 131 to or toward the adsorption plane 111 by changing the direction of the current of the magnetic attraction coil 132. The soft magnetic core 133 is made of a soft magnetic metal such as iron or an iron-based soft magnetic alloy. The soft magnetic core 133 and the reversible magnetic steel 131 are fixedly disposed in the groove 12, and the bottom surface of the soft magnetic core 133 is in contact with the top surface of the reversible magnetic steel 131, and the top surface of the soft magnetic core 133 is coplanar with the adsorption plane 111. A plurality of permanent magnets 134 are housed in the permanent magnet receiving groove 121 formed between the circumferential side surface of the soft magnetic core 133 and the inner side surface of the groove 12, and the N poles of the plurality of permanent magnets 134 face the soft magnetic core 133. The side of the week. Further, when viewed from the side where the adsorption plane 111 is located, the permanent magnet housing groove 121 has a rectangular ring shape; the portion of the permanent magnet housing groove 121 corresponding to the two long sides of the rectangular ring shape is two long groove portions. A plurality of permanent magnets 134 are housed in the two long groove portions. The two long groove portions extend in a direction parallel to the short side of the rectangular adsorption surface 111.

As shown in Figs. 7 and 8, the magnetic differential type permanent magnet chuck 1 according to the first embodiment of the present invention further includes a plurality of degaussing means 14 (indicated by thick broken lines in Fig. 7), and a plurality of degaussing means 14 are used for eliminating Residual magnetism in the workpiece 5, each of the plurality of degaussing devices 14 is disposed in the susceptor 11 in a row adjacent to each of the plurality of magnetic attraction devices 13 in the direction in which the magnetic attraction devices 13 are arranged.

Further, each of the plurality of degaussing devices 14 includes a degaussing coil 141 that is accommodated at a space of the susceptor 11 disposed between two adjacent ones of the plurality of grooves 12 The degaussing coil is accommodated in the groove 15.

Further, at intervals of the susceptor 11 between the adjacent two grooves 12 of the plurality of grooves 12, adjacent two of the adjacent two permanent magnet accommodating grooves 121 are respectively provided. The two communication grooves 151 at the opposite ends of the long groove portion are such that the two communication grooves 151 and the adjacent two long groove portions of the adjacent two permanent magnet steel accommodating grooves 121 constitute the degaussing coil accommodating groove 15. The degaussing coil 141 housed in the degaussing coil accommodating groove 15 and the portion 142 of the susceptor 11 surrounded by it constitute an electromagnet that demagnetizes the workpiece 5.

Further, the permanent magnet housing groove 121 and the degaussing coil receiving groove 15 are filled with epoxy resin to be flush with the adsorption flat surface 11.

The operation of the magnetic difference type permanent magnetic chuck 1 of the present embodiment for adsorbing and desorbing the workpiece 5 is the same as that of the conventional magnetic differential type permanent magnet chuck 10, and will not be described here.

It should be noted that, in the state in which the magnetic differential type electric permanent magnet chuck 1 of the present embodiment is detached from the workpiece 5, that is, the magnetic difference type electric permanent magnet chuck 1 is in a demagnetized state (the magnetic field of the permanent magnet 134 and the magnetization have remaining When the magnetic field generated by the magnetic reversible magnet 131 is coupled to each other in the susceptor 11 and the soft magnetic core 133, and the superimposed magnetic field of the two is not exposed from the susceptor 11,) The portion 142 of the susceptor 11 surrounded by the degaussing coil 141 is not saturated with magnetization. That is, before the demagnetization process of the workpiece 5, the portion 142 of the susceptor 11 surrounded by the degaussing coil 141 is not saturably magnetized in the demagnetized state of the magnetic differential type permanent magnet chuck 1.

Next, an operation of demagnetizing the workpiece 5 by the magnetic difference type permanent magnetic chuck 1 of the first embodiment of the present invention will be described. When the workpiece 5 is made of a high remanence material such as high carbon steel, after the demagnetization process is performed on the differential electric permanent magnet chuck 1 according to the first embodiment of the present invention, the workpiece 5 is demagnetized. Specifically, the degaussing coil 141 is applied with an oscillating current whose amplitude is gradually attenuated, thereby generating a gradually attenuating oscillating magnetic field, and demagnetizing the workpiece 5. Further, in the demagnetization process of the workpiece 5, the two adjacent degaussing devices 14 of the plurality of degaussing devices 14 have opposite polarities on the side of the adsorption plane 11. As a result, since the polarities of the two adjacent degaussing devices 14 of the plurality of degaussing devices 14 on the side of the adsorption plane 11 are opposite, the magnetic flux generated by the magnetic fields generated by the adjacent two degaussing devices 14 of the plurality of degaussing devices 14 on the side of the adsorption plane 11 The absolute values are substantially equal, so that the degaussing magnetic field generated by one of the two adjacent degaussing devices 14 can be demagnetized from the side of the adsorption plane 11 thereof via the workpiece 5 and the other of the two adjacent degaussing devices 14. The magnetic field is coupled such that the workpiece 5 is magnetized by such a demagnetizing field. Moreover, since the polarities of the two adjacent degaussing devices 14 of the plurality of degaussing devices 14 on the side of the adsorption plane 11 are opposite, the magnetic flux generated by the two degaussing devices 14 of the plurality of degaussing devices 14 on the side of the adsorption plane 11 The absolute values are substantially equal, so that the magnetic fields generated by the two adjacent degaussing devices 14 of the plurality of degaussing devices 14 can be coupled to each other without substantially passing through the magnetic adsorption device 13, and thus substantially not passing through the reversible magnet 131. The magnetization state of the reversible magnet 131 is not substantially affected. When the oscillating current whose amplitude of the degaussing coil 141 is gradually attenuated is reduced to zero, the workpiece 5 is subjected to an oscillating demagnetizing magnetic field whose amplitude is gradually attenuated, whereby the workpiece 5 is demagnetized. Thereby the workpiece 5 can be easily taken away from the adsorption plane 111.

(Second embodiment)

9 and 10 show a magnetic differential type permanent magnetic chuck 2 according to a second embodiment of the present invention. Fig. 9 is a schematic plan view showing a disk-shaped magnetic differential type permanent magnetic chuck 2 according to a second embodiment of the present invention. Fig. 10 is a schematic cross-sectional view, taken along line Π - II of Fig. 9, of the disc-shaped magnetic differential type electric permanent magnet chuck 2 according to the second embodiment of the present invention.

As shown in faces 9 and 10, the disk-shaped magnetic differential type permanent magnet chuck 2 according to the second embodiment of the present invention includes a soft magnetic integral base 21 and a plurality of magnetic attraction means 23. The susceptor 21 is made of a soft magnetic metal such as iron or an iron-based soft magnetic alloy, and the susceptor 21 has an adsorption plane 211 and a plurality of grooves 22. The adsorption plane 211 is circular. A plurality of grooves 22 are recessed from the adsorption plane 211 toward the inside of the susceptor 21, and circumferential directions of the circular adsorption surfaces 211 of the plurality of grooves 22 are formed in the susceptor 21 at intervals in the arrangement. A plurality of magnetic adsorption devices 23 are used to magnetically adsorb the workpiece 5 to the adsorption plane 211. Each of the plurality of magnetic attraction devices 23 is each housed in each of the plurality of grooves 22, from The plurality of magnetic attraction means 23 are disposed in the base 21 at intervals in the arrangement.

Each of the plurality of magnetic attraction means 23 includes a reversible magnet 231 (indicated by a broken line in Fig. 9), a magnetic attraction coil 232 (indicated by a thick dotted line in Fig. 9), a soft magnetic core 233, and a plurality of permanent magnets. Magnetic steel 234. The reversible magnet 231 is fixedly disposed at the bottom of the recess 22, and the bottom surface of the reversible magnet 231 is in contact with the bottom of the recess 22. The magnetic attraction coil 232 is disposed around the circumferential side of the reversible magnetic steel 231 so that the magnetic attraction coil 232 can change the magnetization direction of the reversible magnet 231 to or toward the adsorption plane 211 by changing the direction of the current of the magnetic attraction coil 232. The soft magnetic core 233 is made of a soft magnetic metal such as iron or an iron-based soft magnetic alloy. The soft magnetic core 233 and the reversible magnetic steel 231 are fixedly disposed in the groove 22, the bottom surface of the soft magnetic core 233 is in contact with the top surface of the reversible magnetic steel 231, and the top surface of the soft magnetic core 233 is coplanar with the adsorption plane 211. A plurality of permanent magnets 234 are housed in the permanent magnet accommodating grooves 221 formed between the circumferential side faces of the soft magnetic core 233 and the inner side faces of the grooves 22, and the N poles of the plurality of permanent magnets 234 face the soft magnetic core 233. The side of the week. Further, each of the permanent magnet accommodating grooves 221 includes two radial groove portions extending in the radial direction of the susceptor 21 in the shape of a disk. A plurality of permanent magnets 234 are housed in the two radial groove portions.

As shown in FIGS. 9 and 10, the magnetic differential type permanent magnet chuck 2 according to the second embodiment of the present invention further includes a plurality of degaussing means 24 for eliminating residual magnetism in the workpiece 5, a plurality of Each of the degaussing devices 24 is disposed in the susceptor 21 sequentially adjacent to each of the plurality of magnetic absorbing devices 23 in the direction in which the magnetic absorbing devices 23 are arranged.

Further, each of the plurality of degaussing devices 24 includes a degaussing coil 241 that is accommodated at a space of the susceptor 21 disposed between two adjacent recesses 22 of the plurality of recesses 22 The degaussing coil is accommodated in the groove 25.

Further, at an interval between the pedestals 21 between the adjacent two grooves 22 of the plurality of grooves 22, two adjacent two adjacent permanent magnet accommodating grooves 221 are respectively provided. The two communicating grooves at the opposite ends of the radial groove portion are such that the two communicating grooves and the adjacent two radial groove portions of the adjacent two permanent magnet receiving grooves constitute the degaussing coil receiving groove 25. The degaussing coil 241 housed in the degaussing coil accommodating groove 25 and the portion 242 of the susceptor 21 surrounded by it constitute an electromagnet that demagnetizes the workpiece 5.

Further, the permanent magnet accommodating groove 221 and the degaussing coil accommodating groove 25 are filled with epoxy resin to be flush with the adsorption flat surface 211.

The operation of the magnetic difference type electric permanent magnet chuck 2 of the present embodiment for adsorbing and desorbing the workpiece 5 is the same as that of the conventional magnetic difference type permanent magnet chuck 20, and will not be described here.

It should be noted that, in the state in which the magnetic differential type permanent magnetic chuck 2 of the present embodiment is detached from the workpiece 5, that is, the magnetic difference type electric permanent magnet chuck 2 is in a demagnetized state (the magnetic field of the permanent magnet 234 and the magnetization have remaining When the magnetic field generated by the magnetic reversible magnet 231 is coupled to each other in the susceptor 21 and the soft magnetic core 233, and the superimposed magnetic field of the two is not exposed from the susceptor 21, The portion 242 of the susceptor 21 surrounded by the degaussing coil 241 is not saturated with magnetization. That is, before the demagnetization process of the workpiece 5, the portion 242 of the susceptor 21 surrounded by the degaussing coil 241 is not saturably magnetized in the demagnetized state of the magnetic differential type permanent magnet chuck 2.

9 and 10 shows the magnetic degaussing treatment of the workpiece 5 by the disc-shaped magnetic differential electric permanent magnet chuck 2 according to the second embodiment of the present invention and the magnetic difference of the rectangular body shape according to the first embodiment of the present invention. The operation of the degaussing treatment of the electric permanent magnet chuck 1 is similar. Specifically, when the workpiece 5 is made of a high remanence material such as high carbon steel, after the demagnetization process is performed on the magnetic difference type permanent permanent magnet chuck 2 according to the second embodiment of the present invention, the workpiece 5 is Degaussing is performed. Specifically, the degaussing coil 241 is applied with an oscillating current whose amplitude is gradually attenuated, thereby generating a gradually attenuating oscillating magnetic field, and demagnetizing the workpiece 5. Further, in the degaussing process of the workpiece 5, the two adjacent degaussing devices 24 of the plurality of degaussing devices 24 have opposite polarities on the side of the adsorption plane 21. As a result, since the polarities of the two adjacent degaussing devices 24 of the plurality of degaussing devices 24 on the side of the adsorption plane 21 are opposite, the magnetic flux generated by the two adjacent degaussing devices 24 of the plurality of degaussing devices 24 on the side of the adsorption plane 21 The absolute values are substantially equal, and the demagnetizing field generated by one of the two adjacent degaussing devices 24 of the plurality of degaussing devices 24 is generated from the side of the adsorption plane 21 thereof via the workpiece 5 and the other of the two adjacent degaussing devices 24. The degaussing magnetic field is coupled such that the workpiece 5 is magnetized by such a degaussing magnetic field. Moreover, since the polarities of the two adjacent degaussing devices 24 of the plurality of degaussing devices 24 on the side of the adsorption plane 21 are opposite, the magnetic flux generated by the magnetic fields generated by the two adjacent degaussing devices 24 of the plurality of degaussing devices 24 on the side of the adsorption plane 21 The absolute values are substantially equal, so that the magnetic fields generated by the two adjacent degaussing devices 24 of the plurality of degaussing devices 24 can be coupled to each other without substantially passing through the magnetic adsorbing device 23, thereby substantially not passing through the reversible magnet 231. The magnetization state of the reversible magnet 231 is not substantially affected. When the oscillating current whose amplitude of the degaussing coil 241 is gradually attenuated is reduced to zero, the workpiece 5 is subjected to an oscillating demagnetizing magnetic field whose amplitude is gradually attenuated, whereby the workpiece 5 is demagnetized. Thereby the workpiece 5 can be easily taken away from the adsorption plane 211.

Specific embodiments of the invention have been described above with reference to the drawings. The magnetic differential type permanent magnet chuck of the present invention is not limited to the above embodiment. For example, in the above background art and specific embodiments, the base of the magnetic differential type permanent magnet chuck is an integral base, and the present invention is not limited thereto, and the base of the magnetic differential type permanent magnet chuck of the present invention may also be A non-unitary base consisting of multiple components. The above uses AlNiCo as the soft magnetic material of the reversible magnetic steel, NdFeB as the permanent magnet material of the permanent magnet, and the soft magnetic material of the iron as the susceptor to the magnetic differential type permanent magnet chuck of the present invention and the existing magnetic difference type electric permanent The magnetic chuck has been described. However, it can be understood that the present invention is not limited to the specific materials described above, and those skilled in the art can select appropriate soft magnetic materials and permanent for the reversible magnetic steel, the permanent magnetic steel and the base according to the design requirements. Magnetic material. In other instances, many other variations and modifications can be made by those skilled in the art without departing from the scope of the appended claims.

Claims

Claim

A magnetic differential type permanent magnetic chuck, characterized in that

a soft magnetic base, the base having an adsorption plane;

a plurality of magnetic adsorption means for magnetically adsorbing the workpiece to the adsorption plane, the plurality of magnetic adsorption means being disposed in spaced relation to each other in the base; and

a plurality of degaussing devices, wherein the plurality of degaussing devices are used to eliminate residual magnetism in the workpiece, and each of the plurality of degaussing devices is respectively associated with the plurality of magnetic adsorption devices along a direction in which the magnetic adsorption devices are arranged Each of them is sequentially disposed adjacent to each other in the susceptor.

2. The magnetic differential type permanent magnetic chuck according to claim 1, wherein the base has a plurality of grooves, and the plurality of grooves are recessed from the adsorption plane toward the inside of the base. And the plurality of grooves are formed in the pedestal in a spaced relationship with each other;

Each of the plurality of magnetic attraction means is each housed in each of the plurality of grooves such that the plurality of magnetic attraction means are disposed in spaced relation to each other in the base.

3. The magnetic differential type permanent magnetic chuck according to claim 2, wherein each of said plurality of magnetic adsorption means comprises:

a reversible magnetic steel, the reversible magnetic steel is fixedly disposed at a bottom of the groove, and a bottom surface of the reversible magnetic steel is in contact with a bottom of the groove;

a magnetically absorbing coil, the magnetic absorbing coil is disposed around a circumferential side of the reversible magnetic steel, such that the magnetic absorbing coil changes a magnetization direction of the reversible magnet by changing a direction of a current of the magnetic absorbing coil to point to the magnetic attraction coil Adsorbing the plane or facing away from the adsorption plane;

a soft magnetic core, the soft magnetic core and the reversible magnetic steel are fixedly disposed in the groove, a bottom surface of the soft magnetic core is in contact with a top surface of the reversible magnetic steel, and the soft magnetic core The top surface is coplanar with the adsorption plane, and

a plurality of permanent magnets, the plurality of permanent magnets being housed in a permanent magnet accommodating groove formed between a circumferential side surface of the soft magnetic core and an inner side surface of the groove, the plurality of permanent magnets The same magnetic pole faces the peripheral side of the soft magnetic core.

The magnetic differential type permanent magnetic chuck according to any one of claims 1 to 3, wherein each of the plurality of degaussing devices includes a degaussing coil, and the degaussing coil is housed in Adjacent two of the plurality of grooves A degaussing coil is received in the groove at the space between the grooves. .

5. The magnetic differential type permanent magnetic chuck according to claim 4, wherein

The pedestal has a rectangular shape, and the adsorption plane has a rectangular shape;

The plurality of grooves are formed in the base in a spaced relationship along a longitudinal direction of the rectangular adsorption surface;

The permanent magnet steel receiving groove has a rectangular ring shape when viewed from the side of the adsorption plane; the portion of the permanent magnet steel receiving groove corresponding to the two long sides of the rectangular ring shape is two long groove portions; The long groove portions extend in a direction parallel to a short side of the rectangular adsorption surface;

Between the two pedestals between the adjacent ones of the plurality of grooves, two adjacent long grooves respectively communicating with two adjacent permanent magnet accommodating grooves are provided The two communicating grooves at the opposite ends of the portion are such that the two communicating grooves and the adjacent two long groove portions of the adjacent two permanent magnet receiving grooves constitute the degaussing coil receiving groove.

6. The magnetic differential type permanent magnetic chuck according to claim 4, wherein

The pedestal is in the shape of a disk; the adsorption plane is circular;

The plurality of grooves are formed in the susceptor spaced apart from each other along a circumferential direction of the circular adsorption surface; each of the permanent magnet accommodating grooves includes a susceptor along the shape of the disk Two radial groove portions extending radially;

Between the two pedestals between the adjacent ones of the plurality of grooves, two adjacent radial directions respectively connecting the adjacent two permanent magnet accommodating grooves are provided Two communicating grooves at opposite ends of the groove portion, such that the two flail grooves and the adjacent two radial groove portions of the adjacent two permanent magnet receiving grooves constitute the degaussing coil accommodation groove.

7. The magnetic differential type permanent magnetic chuck according to claim 1, wherein

In the degaussing process of the workpiece, two of the plurality of degaussing devices adjacent to each other have opposite polarities on the side of the adsorption plane.

The magnetic differential type permanent magnetic chuck according to claim 3, wherein the soft magnetic core is an iron core.

9. The magnetic differential type permanent magnetic chuck according to claim 4, wherein

The permanent magnet holding groove and the degaussing coil receiving groove are filled with epoxy resin to be flush with the adsorption plane.