WO2011126080A1

WO2011126080A1 - Method for manufacturing optical storage media and apparatus for manufacturing same

Info

Publication number: WO2011126080A1
Application number: PCT/JP2011/058830
Authority: WO
Inventors: 誠喜野尻
Original assignee: 三菱化学メディア株式会社
Priority date: 2010-04-09
Filing date: 2011-04-07
Publication date: 2011-10-13
Also published as: TW201205573A; JP2011222087A; CN102812516A

Abstract

Provided are a method for manufacturing optical storage media which exhibits improved manufacturing efficiency and an apparatus for manufacturing the optical storage media. In the provided method for manufacturing an optical storage medium, which has a plurality of recording layers on a substrate and an indented intermediate layer between the plurality of recording layers, the intermediate layer formation step includes at least: a first step in which a radiation-curable resin material is applied between a radiation-transparent stamper and a substrate having a recording layer, then superimposing the radiation-transparent stamper on the substrate having the recording layer; a second step in which the radiation-transparent stamper and the substrate having the recording layer are twisted while being pressed towards each other, stretching the radiation-curable resin material; a third step in which only the vicinity of a central hole in the substrate is irradiated with radiation, curing the radiation-curable resin material; and a fourth step in which the substrate having the recording layer and the radiation-transparent stamper are rotated and the radiation-curable resin material is simultaneously cured, bonding the radiation-transparent stamper and the substrate having the recording layer to each other.

Description

Method for manufacturing optical recording medium and apparatus for manufacturing the same

The present invention relates to an optical recording medium manufacturing method and an apparatus for manufacturing the optical recording medium, and more particularly to an optical recording medium manufacturing method having a plurality of recording layers and an apparatus for manufacturing the optical recording medium.

In recent years, in order to record / reproduce large-capacity data such as long-time and high-quality moving images, it has been desired to develop an optical recording medium capable of further increasing the density of information as compared with the past. There is a Blu-ray disc as such an optical recording medium capable of increasing the density of information, for example, a BD-R having a laminated structure in which two recording layers (dual layer) are provided on one medium. By using a multilayer technique in which two or more recording layers are provided, it is possible to increase the capacity without changing the recording density per layer.

The intermediate layer of such a multilayer multilayer optical recording medium is usually manufactured by a manufacturing method called a photopolymerization method (hereinafter referred to as “2P method”). According to the 2P method, for example, a first reflective layer, a first recording layer, an intermediate layer in which concave and convex portions for recording tracks are formed, and a second reflective layer on a transparent first substrate on which concave and convex portions for recording tracks are formed. Then, the second recording layer is formed in this order, and finally the cover layer is formed, whereby an optical recording medium having a two-layer structure is manufactured.

In the case of the 2P method, the intermediate layer is usually manufactured as follows. First, after applying a radiation curable resin raw material or the like on a substrate on which a recording layer or the like is formed, a radiation transmissive stamper having irregularities is placed thereon. Next, after the radiation curable resin raw material is cured, the stamper is peeled off. In this way, the unevenness is transferred to the surface of the radiation curable resin raw material to form the intermediate layer. Thereafter, a recording layer or the like is further formed on the intermediate layer, whereby an optical recording medium having a plurality of recording layers is manufactured. The intermediate layer forms part of the optical path of the recording / reproducing light to at least one recording layer regardless of whether the recording / reproducing light is incident from the substrate side or the cover layer side. The uniform uniformity greatly affects the recording / reproducing characteristics.

Therefore, the intermediate layer formed by the 2P method is required to have a certain degree of film thickness uniformity over the entire surface of the substrate, and also optical characteristics uniformity. Usually, a radiation curable resin material is applied onto a substrate by spin coating, and after placing a radiation transmissive stamper on it, the resin material is cured by irradiating with radiation such as ultraviolet rays to form an intermediate layer. The method to do is common (refer patent document 1).
However, in the conventional techniques as described above, defects such as non-uniform thickness distribution of the intermediate layer on the entire surface of the substrate and occurrence of bubbles in the intermediate layer are frequently generated, which is optically good. It was difficult to stably and efficiently form an intermediate layer having uniform uniformity.

JP 2004-288259 A

The present invention has been made to solve the technical problem that has been highlighted in the production of a multilayer multilayer optical recording medium by the 2P method.
That is, an object of the present invention is to provide a method for manufacturing a multilayer multilayer optical recording medium with improved manufacturing efficiency and a manufacturing apparatus therefor.

In order to solve this problem, the gist of the present invention is as follows.
(1) Production of an optical recording medium having a plurality of recording layers on a disc-shaped substrate having a central hole, and an intermediate layer having a concavo-convex shape made of a radiation curable resin material between the plurality of recording layers. In the method of forming the intermediate layer, the radiation curable resin material is applied between a radiation transmissive stamper and a substrate having the recording layer, and the radiation transmissive stamper and the recording layer are provided. A first step of superimposing the substrate, and a step of stretching the radiation curable resin raw material by twisting the radiation transmissive stamper and the substrate having the recording layer in a state of being pressed in directions approaching each other. A second step, a third step of irradiating only the vicinity of the center hole of the substrate to cure the radiation curable resin material, and extending the radiation curable resin material over the entire substrate having the recording layer For this purpose, the substrate having the recording layer and the radiation transmissive stamper are rotated, and at the same time, the radiation curable resin raw material stretched over the entire substrate is cured, and the radiation transmissive stamper and the recording layer are A method for producing an optical recording medium, comprising a fourth step of adhering the substrate having at least this order.

(2) The substrate and the radiation transmissive stamper are characterized in that an annular small protrusion is formed closer to the center hole than the clamp region on the surface to be overlapped in the first step (1). 2. A method for producing an optical recording medium according to 1.
(3) In the second step, there is a twist rotation step by relatively rotating the radiation transmissive stamper and the substrate having the recording layer, and the number of rotations of twist in the twist rotation step is 0. The method for producing an optical recording medium according to (1) or (2), wherein the pressing width during twisting is 10 μm to 100 μm and the rotation angle of twisting is in the range of 180 ° to 360 °. .
(4) The optical recording medium according to any one of (1) to (3), wherein, in the third step, a range irradiated with radiation is set within a radius of 15 mm from the center of the substrate. Production method.
(5) The method includes a step of applying pressure by applying a load of 50 g to 100 g between the radiation transmissive stamper and the substrate between the second step and the third step. 1) The method for producing an optical recording medium according to any one of (4).

(6) Between the second step and the third step, there is a step of sucking the radiation curable resin raw material under reduced pressure from a central axis for fixing the central hole of the radiation transmissive stamper and the substrate. The method for producing an optical recording medium according to any one of (1) to (5), wherein:
(7) The method for producing an optical recording medium according to any one of (1) to (6), wherein the radiation curable resin material has a viscosity of 50 cP to 1000 cP.
(8) The sum of the heights of the small protrusions of the radiation transmissive stamper and the small protrusions of the substrate is within a target film thickness of ± 15 μm of the intermediate layer, and the small protrusions of the radiation transmissive stamper The method of manufacturing an optical recording medium according to any one of (2) to (7), wherein a positional deviation in a radial direction with respect to the small protrusions of the substrate is within 0.5 mm.
(9) The suction pressure in the step of sucking the radiation curable resin raw material from the central axis under reduced pressure is in the range of −1 kPa to −20 kPa, according to any one of (6) to (8) Manufacturing method of optical recording medium.

(10) Production of an optical recording medium having a plurality of recording layers on a disc-shaped substrate having a center hole, and an intermediate layer having a concavo-convex shape made of a radiation curable resin material between the plurality of recording layers. An apparatus for use in the step of forming the intermediate layer, wherein the radiation curable resin material is applied between the radiation transmissive stamper and a substrate having the recording layer, and the radiation transmissive stamper and the recording A first means for superimposing a substrate having a layer, and twisting the radiation transmissive stamper and the substrate having the recording layer in a state in which they are pressed in directions approaching each other, whereby the radiation curable resin raw material is A second means for stretching; a third means for irradiating only the vicinity of the center hole of the substrate to cure the radiation curable resin material; and the radiation curable resin over the entire substrate having the recording layer. In order to stretch the material, the substrate having the recording layer and the radiation transmissive stamper are rotated, and at the same time, the radiation curable resin raw material stretched over the entire substrate is cured, and the radiation transmissive stamper and the An apparatus for manufacturing an optical recording medium, comprising at least a fourth means for bonding a substrate having a recording layer.

According to the present invention, an optical recording medium including an intermediate layer having optically uniform characteristics over the entire surface can be manufactured. Furthermore, it is possible to improve the production efficiency of the multilayer multilayer optical recording medium by the 2P method.

It is a figure for demonstrating the manufacturing method of the optical recording medium of this invention. It is a figure for demonstrating the gap dispensing method. It is a figure for demonstrating the installation position of the weight used for the manufacturing method of the optical recording medium of this invention, and a light shielding mask. It is sectional drawing for demonstrating the small protrusion of the board | substrate used for this invention. It is a figure for demonstrating the manufacturing apparatus of the optical recording medium of this invention.

Hereinafter, modes for carrying out the present invention (hereinafter also referred to as embodiments of the invention) will be described in detail. However, the present invention is not limited to the embodiments of the invention described below, and it goes without saying that various modifications can be made within the scope of the gist of the invention.

A. Preferred Embodiment of Manufacturing Method of Optical Recording Medium of the Present Invention FIG. 1 is a diagram for explaining a preferred example of a manufacturing method of an optical recording medium of the present invention. FIG. 1 shows, as an example of a method for producing a multilayer multilayer optical recording medium, a dual-layer type single-sided incident type optical recording medium (single-sided dual-layer DVD-R or single-sided dual-layer) having two recording layers containing an organic dye. A method for manufacturing a DVD recordable disc) is shown. In FIG. 1, for convenience, only a partial cross section of the recording area of the optical recording medium is enlarged.

A single-sided dual-layer optical recording medium 100 represented by a single-sided dual-layer DVD-R shown in FIG. 1 (f) includes a disc-shaped optically transparent first substrate 101 having a central hole, a dye A first recording layer 102 containing, a translucent first reflective layer 103, a light transmissive intermediate layer 104 made of a radiation curable resin material, a second recording layer 105 containing a dye, and a second reflective layer 106. In addition, the adhesive layer 107 and the second substrate 108 that forms the outermost layer are stacked in order. Concavities and convexities are formed on the first substrate 101 and the intermediate layer 104, respectively, and constitute recording tracks. Recording / reproducing of optical information of the optical recording medium 100 which is a single-sided dual-layer DVD-R is performed by a laser beam 109 irradiated from the first substrate 101 side to the first recording layer 102 and the second recording layer 105.

In the embodiment of the present invention, “light transmissive (or transparent)” means light irradiated to record / reproduce optical information on the first recording layer 102 and the second recording layer 105 containing a dye. It shall mean optical transparency to the wavelength of (laser beam 109). Specifically, the light wavelength for recording / reproduction is usually 30% or more, preferably 50% or more, more preferably 60% or more. On the other hand, the transmittance with respect to the wavelength of light for recording / reproduction is ideally 100%, but normally it is a value of 99.9% or less.

Here, the present invention provides a light having a plurality of recording layers on a disk-shaped substrate having a center hole, and an intermediate layer having an uneven shape made of a radiation curable resin material between these recording layers. The present invention relates to a method for manufacturing a recording medium, and the step of forming an intermediate layer includes a first step to a fourth step described later. In the embodiment of the present invention, the material and manufacturing method of each layer except the intermediate layer are not particularly limited, and can be appropriately formed by a conventionally known technique.

For example, as shown in FIG. 1A, the first substrate 101 having grooves, lands, and pre-pits formed on the surface thereof is formed by injection molding a polycarbonate resin using a nickel stamper or the like. be able to. In addition, by applying a coating liquid containing an organic dye to the surface of the first substrate 101 having the unevenness by spin coating or the like, and then performing heating or the like to remove the solvent used in the coating liquid, etc. One recording layer 102 can be formed. Further, after the first recording layer 102 is formed, the first reflective layer 103 can be formed on the first recording layer 102 by sputtering or vapor-depositing, for example, an Ag alloy.

In addition, after the step of forming the intermediate layer 104 described later, as shown in FIG. 1D, a coating liquid containing an organic dye is applied to the surface of the intermediate layer 104 by spin coating or the like, and the solvent used in the coating liquid is removed. Therefore, the second recording layer 105 can be formed by heating or the like. In this case, the heating temperature is preferably set to a temperature equal to or higher than the glass transition temperature of the resin constituting the intermediate layer 104. By heating at the above temperature, it is possible to suppress the phenomenon of warping of the first substrate 101 that is considered to be caused by the shrinkage of the intermediate layer 104. In the embodiment of the present invention, the second recording layer 105 is formed directly on the intermediate layer 104, but the second recording layer 105 is formed via another layer (for example, a protective layer or a buffer layer). Needless to say.

Furthermore, as shown in FIG. 1 (e), the second reflective layer 106 can be formed on the second recording layer 105 by sputtering deposition of an Ag alloy or the like. After that, as shown in FIG. 1 (f), a second substrate 108 as a mirror substrate obtained by injection molding of polycarbonate is bonded to the second reflective layer 106 through an adhesive layer 107, etc. The production of the recording medium 100 is completed.

The adhesive layer 107 may be opaque or may have a slightly rough surface, and a delayed-curing type adhesive or the like can also be used. For example, the adhesive layer 107 can be formed by applying an adhesive on the second reflective layer 106 by a method such as screen printing, irradiating ultraviolet rays, placing the second substrate 108 and pressing. It is also possible to form the adhesive layer 107 by sandwiching and pressing a pressure sensitive double-sided tape between the second reflective layer 106 and the second substrate 108.

The layer structure of the optical recording medium in FIG. 1F is an example of an optical recording medium having two recording layers as described above. Accordingly, it goes without saying that other layers not shown in FIG. 1F (for example, an underlayer formed between the first substrate 101 and the first recording layer 102) may be used. .

Hereinafter, as an example, the intermediate layer 104 is formed on the data substrate 111 in which the first recording layer 102 and the first reflective layer 103 are laminated in this order on the first substrate 101 shown in FIG. The formation process (from the first process to the fourth process) will be described. In the embodiment of the present invention, the data substrate 111 is usually transparent.

(1) First Step In this step, a radiation curable resin raw material is applied between a radiation transmissive stamper and a substrate having a recording layer (here, a data substrate) to have the radiation transmissive stamper and the recording layer. Overlay the substrate.
Specifically, as shown in FIG. 2, an ultraviolet curable resin raw material 104a (hereinafter referred to as a radiation curable resin raw material is an ultraviolet ray) on the surface of the data substrate 111 on the first reflective layer side. When it is a curable resin raw material, it is described as an ultraviolet curable resin raw material 104a, and when it is broadly expressed as a radiation curable resin raw material, it is also described as a radiation curable resin raw material 104a.) A substantially annular shape is applied continuously or intermittently, and a radiation transmissive stamper 110 having an uneven shape is superimposed as shown in FIG. The ultraviolet curable resin raw material 104a may be applied to the surface of the radiation transmissive stamper 110, and the data substrate 111 and the radiation transmissive stamper 110 (hereinafter sometimes referred to as “both substrates”) are overlapped (that is, May be applied to these gaps.

Among these, the ultraviolet curable resin raw material 104a is applied by a method in which the data substrate 111 and the radiation transmissive stamper 110 are overlapped (that is, disposed facing each other) and then a nozzle is inserted into the gap. preferable. This method is called a gap dispensing method, and this method will be described below with reference to FIG.

For example, with the radiolucent stamper 110 on the top and the data board 111 on the bottom, these central holes are substantially aligned so that they are in equilibrium, and the gap between the boards is fixed at about 2 to 4 mm. A single or a plurality of nozzles having a diameter of about 1.5 mm are inserted laterally from the outer peripheral side of the substrate into the gap, and the discharge ports are arranged so as to be near the center of the intermediate layer formation region. The tips of these nozzles are preferably arranged concentrically and at equal intervals. When the ultraviolet curable resin raw material 104a is discharged from the nozzle tip in this state, the distance between the two substrates is close, so that the discharged ultraviolet curable resin raw material 104a immediately comes into contact with both the

substrates

110 and 111, and the gap between them. Is stretched by capillary action. At this time, the ultraviolet curable resin material 104a can be applied in a substantially annular shape by rotating the nozzle or the data substrate 111 and the radiation transmissive stamper 110 in the circumferential direction of the data substrate 111. After the discharge of the predetermined amount of the ultraviolet curable resin raw material 104a is completed, the nozzle is retracted, the radiation transmitting stamper 110 disposed on the upper side is lowered, or the data substrate 111 disposed on the lower side is raised, and the ultraviolet ray is raised. The curable resin material 104a is further stretched. By doing so, it is possible to perform coating with less generation of bubbles in the ultraviolet curable resin material 104a.

When the data substrate 111 and the radiation transmissive stamper 110 are overlaid, the respective central holes of both the

substrates

110 and 111 are passed through the same central axis of the optical recording medium manufacturing apparatus so that the eccentric amount of both the substrates is Is preferably adjusted to be within 30 μm.

In addition, it is preferable that annular small protrusions as shown in FIG. 4 are formed in advance on the surface of the data substrate on which the first substrate 101 and the radiation transmissive stamper 110 are overlapped. 4 (a) schematically shows the first substrate 101, and FIG. 4 (b) is a cross-sectional view taken along the line α-α in FIG. 4 (a). For example, the small protrusions can be formed at a desired position by a known method such as devising the position and shape of the mold holder when molding the first substrate 101 or the radiation transmissive stamper 110.

The formation position of the annular small protrusion is a clamp region of the optical recording medium (this clamp region is a region clamped by a recording / reproducing apparatus of the optical recording medium, and usually has a radius of 11.5 mm to the center of the optical recording medium) It is an area of about 16.5 mm.) It is preferable to form it on the center hole side. Therefore, the first substrate 101 in the data substrate is a circle having a radius of 8.5 to 11.5 mm from the center of the first substrate 101, and the radiation transmissive stamper 110 is a circle corresponding to the region. It is preferable to form an annular small protrusion.

Further, regarding the height of the small protrusions, the total height of the small protrusions of both the substrates is preferably in the range of ± 15 μm of the desired intermediate layer film thickness, particularly preferably ± 5 μm. Here, the height of the small protrusion is a height based on the data recording area where the recording track is formed. By setting the height of the small protrusion within this range, when the two substrates are stacked and pressed, the distance between the two substrates can be set within a preferable range, and a desired intermediate layer thickness can be easily obtained. The cross-sectional shape of the small protrusion is not particularly limited, and may be rectangular, triangular, or semicircular.

Further, regarding the positional relationship in the radial direction of both small protrusions when both substrates are opposed to each other, the positional deviation in the radial direction of the apexes of both small protrusions is preferably 0.5 mm or less, particularly preferably 0 mm. is there. Since the radial positions of both small protrusions are close to each other, the extension of the ultraviolet curable resin raw material in the direction of the center hole is blocked by the circular small protrusions, and an intermediate layer can be formed at a desired position. It is.

(2) Second Step In the second step, the two substrates superposed in the first step are pressed in a direction approaching each other, and the two substrates are twisted in a state where the distance between the two substrates is further narrowed.
The pressing width at this time is preferably 10 μm or more, more preferably 30 μm or more, although it depends on the amount of the ultraviolet curable resin raw material and the interval at the time of overlapping. Moreover, 100 micrometers or less are preferable, More preferably, it is 60 micrometers or less. The pressing width referred to in the present invention refers to a relative movement distance between the two substrates when the distance between the two substrates is further narrowed in the second step.

In this step, simultaneously with the pressurization, by rotating the superimposed substrates relatively, for example, by fixing one of the superimposed substrates and rotating the other in the circumferential direction, the applied ultraviolet rays The curable resin material 104a is stretched on both substrate surfaces. In the present process, the relative rotation of the two substrates described above is referred to as “twist” in the present specification, and this process is also referred to as a twist process. Note that the two substrates may be twisted by rotating in opposite directions. Further, the pressurization to both the substrates may be performed before the two substrates are twisted, or may be twisted while pressurizing by narrowing the distance between the two substrates. By performing the twisting process, the applied ultraviolet curable resin raw material 104a can be stretched on both substrate surfaces. The relative number of rotations when twisting both substrates is preferably 0.1 rpm or more, more preferably 10 rpm or more. Moreover, 30 rpm or less is preferable, More preferably, it is 20 rpm or less. The lower the rotation speed, the more the UV curable resin material tends to be stretched uniformly, but the higher the rotation speed is better from the viewpoint of production efficiency. The relative rotation angle when twisting the two substrates is preferably 180 ° to 360 °, although it depends on the mechanical accuracy of the parallelism of the turntable of the optical recording medium manufacturing apparatus and the rotational speed. Within this range, the effect on production efficiency is small, and the ultraviolet curable resin material 104a tends to spread uniformly on both substrates.

(3) Pressurization Step In the embodiment of the present invention, a predetermined load is applied between the radiation transmissive stamper 110 and the data substrate 111 after the second step and before the third step described later. It is preferable to have a step of applying pressure.
Specifically, as shown in FIG. 3A, the radiation transmissive stamper 110 is disposed on the upper side, and a weight 120 is placed on the radiation transmissive stamper 110 to add a gap between the

substrates

110 and 111. It is preferable to press. In FIG. 3A, a weight is disposed in a region having a radius of 7.5 mm to 28 mm from the center of the data substrate 111 in order to further extend the ultraviolet curable resin material 104a to the center hole side of the data substrate 111 in particular. The position where the weight is arranged can be appropriately adjusted according to the viscosity of the ultraviolet curable resin raw material 104a.

In this case, the weight load is preferably 50 g or more, more preferably 70 g or more. Moreover, 100 g or less is preferable, More preferably, it is 90 g or less. If it is this range, the ultraviolet curable resin raw material 104a can be extended to a preferable range. Further, as shown in FIG. 3A, pressurization may be performed with a plurality of weights, or pressurization may be performed with a single weight. In the example shown in FIG. 3A, a quartz ring weight 120 that pressurizes the vicinity of the center hole, a first light shielding weight 121 on the outside thereof, and a second light shielding weight 122 on the outside thereof are arranged. This is an example in which the pressurization is performed. Here, the pressure is applied by placing a weight, but the pressure may be applied by a known mechanical pressure method.

In addition, for the radiation irradiation in the third step described later, it is preferable to use a material that transmits radiation sufficiently for the weight disposed in the vicinity of the center hole. When irradiating ultraviolet rays as radiation in the third step, it is preferable to use a material that sufficiently transmits ultraviolet rays for the weight disposed in the vicinity of the center hole. In the embodiment of the present invention (ultraviolet irradiation mode), the weight placed near the center hole should be a synthetic quartz ring that transmits ultraviolet rays in order to achieve both ultraviolet transparency and a certain load. Is preferred. When a weight made of a material that does not sufficiently transmit ultraviolet light is used as the weight, the center of the disk and the area near the diameter of 20 mm do not become a shadow of the weight when irradiating ultraviolet light in the third step described later. The mounting position of the weight made of a material that does not sufficiently transmit the ultraviolet rays is desirably an area having a diameter of 20 mm or more.

Moreover, before the ultraviolet irradiation of one embodiment in the third step, as shown in FIG. 3A, the suction pores are formed on the side surfaces of the central shaft 123 for fixing the central holes of both the

substrates

110 and 111. It is preferable to increase the speed at which the ultraviolet curable resin raw material is stretched to the center hole side by opening 124 and sucking the ultraviolet curable resin raw material 104a under reduced pressure. This shortens the time until the ultraviolet curable resin material 104a reaches the annular small protrusions formed on the data substrate 111 side and the radiation transmissive stamper 110 as compared with the case where vacuum suction is not performed. , Tact time can be shortened. The optimum suction pressure at this time is preferably in the range of −1 kPa to −20 kPa, although it depends on the viscosity of the ultraviolet curable resin raw material 104a and the surface shape of the data substrate 111.

(4) Third Step Next, a third step is performed in which only the vicinity of the center hole of the substrate is irradiated with radiation to cure the radiation curable resin material.
Specifically, immediately after the ultraviolet curable resin raw material 104a reaches the annular small protrusions of both the

substrates

110 and 111, only the vicinity of the center hole of the substrate is irradiated with ultraviolet rays as shown in FIG. Then, the ultraviolet curable resin material 104a in the region is cured. If the irradiation range at this time is too wide, the UV-curable resin raw material 104a having a non-uniform film thickness that is naturally stretched is cured as it is in a wide range, and both the

substrates

110 and 111 are rotated at a high speed in the fourth step. Even if it is attempted to make the film thickness uniform, the film thickness distribution in the vicinity of the irradiation range may be disturbed. Therefore, it is desirable that the irradiation range at this time is limited to a range as far as possible from the information recording area of the optical recording medium that requires high film thickness accuracy. Further, if the irradiation range is too narrow, the inner peripheral edge is not sufficiently cured, and air may enter the ultraviolet curable resin raw material 104a from the inner peripheral edges of both substrates during the rotational stretching in the fourth step. is there.

The optimum irradiation range is a region having a radius of 8 mm or more from the center of the data substrate 111 (particularly the first substrate) and the radiation transmitting stamper 110, more preferably 10 mm or more, and even more preferably 11 mm or more. Further, it is preferably a region having a radius of 15 mm or less from the center of the data substrate 111 (particularly the first substrate) and the radiation transmissive stamper 110, more preferably 14 mm or less, and further preferably 13 mm or less. If it is this range, when extending | stretching a ultraviolet curable resin raw material in the 4th process mentioned later, air does not enter into the ultraviolet curable resin raw material 104a, and uniform film thickness distribution can be obtained. The amount of ultraviolet light and the irradiation time may be appropriately optimized depending on the material of the ultraviolet curable resin material and the production environment, but are usually about 20 mW / cm ² to 200 mW / cm ² and about 0 to 5 seconds.

In addition, in order to irradiate ultraviolet rays only to the limited area, a light shielding mask having a circular opening with a desired radius may be installed on the center hole, but in order to prevent blurring of the irradiation area boundary due to ultraviolet diffraction, It is desirable to install the light shielding mask in parallel at a position within 1 mm from the upper surface of the radiation transmissive stamper 110. Further, for example, as shown in FIG. 3B, a UV-transmitting synthetic quartz ring is used for the area to be irradiated with ultraviolet rays (the area on the center hole side) as the pressurizing weight, and ultraviolet rays are not irradiated. It is also possible to make the weight serve as a light shielding mask by using

light shielding weights

121 and 122 in the region.

(5) Fourth step Next, in order to stretch the radiation curable resin material over the entire substrate having the recording layer, the substrate having the recording layer and the radiation transmissive stamper are simultaneously rotated. A fourth step of curing the radiation curable resin raw material stretched over the entire substrate and bonding the radiation transmissive stamper and the substrate having the recording layer is performed.

Specifically, the UV-curing is performed by removing the light-shielding mask, weight, etc. used in the third step, fixing both

substrates

110 and 111 on a turntable capable of high-speed rotation, and rotating at high speed (spin coating). The layer 104a made of the UV curable resin material (hereinafter referred to as the UV curable resin material, including the UV curable resin material) is cured by further extending the curable resin material 104a to the outer peripheral portions of both substrates and simultaneously curing the UV curable resin material 104a. A layer made of a conductive resin raw material is also referred to as a resin raw material layer 104a), and the radiation transmissive stamper 110 and the data substrate 111 are bonded to each other.
The rotation speed during spin coating is usually about 500 rpm to 15000 rpm.

In a state where both the substrates are rotated, the ultraviolet curable resin raw material 104a is sufficiently cured by irradiating the entire surfaces of both the

substrates

110 and 111 from the radiation transmissive stamper 110 side through the radiation transmissive stamper 110. The intermediate layer 104 is formed by peeling the radiation transmissive stamper 110 when cured.
The film thickness of the intermediate layer is appropriately set depending on the type of the optical recording medium, but is about 55 μm in the case of a single-sided dual-layer DVD-R.

In the embodiment of the present invention, in order to increase the uniformity of the intermediate layer thickness, the curing process of the ultraviolet curable resin material is performed simultaneously with the stretching of the ultraviolet curable resin material by the rotation of both substrates. Here, in the normal spin coating method, the resin raw material layer tends to have a thin inner periphery and a thick outer periphery due to centrifugal force. By proceeding simultaneously, the uniformity of the film thickness of the inner and outer peripheral intermediate layers can be further enhanced. At this time, it is preferable to perform spin coating while irradiating ultraviolet rays through a film thickness adjusting light-shielding mask having an appropriate opening size. By using a mask designed to irradiate a large amount of ultraviolet rays on the inner peripheral side, the inner periphery tends to harden before the outer periphery, and the film thickness of the intermediate layer is reduced. Uniformity can be improved.

Ultraviolet light quantity and irradiation time in this step may be suitably optimized according to the material and the manufacturing environment of the ultraviolet-curable resin material, but typically ^{^{10mW / cm 2 ~ 120mW / cm}} 2, is about 0.1 to 5.0 seconds .

(6) Other steps In the actual production of the optical recording medium, the first to fourth steps are carried out in this order, and the resin raw material layer 104a (see FIG. 1C) is followed by the fourth step. The radiation transmissive stamper 110 is peeled off from the above. As a result, the intermediate layer 104 in which the uneven shape for transfer of the radiation transmissive stamper 110 is transferred to the resin raw material layer 104a is formed. In the present specification, the resin raw material layer 104a refers to a layer that is hardened after coating and before the radiation transmitting stamper is peeled off. The intermediate layer 104 refers to a layer after the radiation transmissive stamper 110 is peeled off. Therefore, the resin raw material layer 104a and the intermediate layer 104 indicate layers formed in the same position, but the states are different.

There is no limitation on the specific method for peeling off the radiation transmissive stamper 110, but usually, the inner periphery is vacuum-sucked, a knife edge is inserted into the center hole side of the optical recording medium, and air is blown into the resin raw material layer. Peeling is performed by separating the data substrate 111 on which the 104a is formed and the radiation transmissive stamper 110 from each other.

Here, the radiation-transparent stamper 110 may be peeled off without temperature control, such as at room temperature, or may be performed while the data substrate 111 on which the resin material layer 104a is formed is heated. In the heated state, the radiation transmissive stamper 110 is peeled off, so that the peeling becomes good, and the resin raw material layer 104a having a good concavo-convex shape can be obtained. As a result, the intermediate layer 104 having a good concavo-convex shape can be obtained. preferable.

The timing for performing the heating operation is arbitrary, but it is preferable to perform the heating operation after curing the ultraviolet curable resin material 104a, that is, in the stamper peeling step. The temperature at which the radiation transmissive stamper 110 is peeled is arbitrary, but is usually preferably 50 ° C. or higher, and is not higher than the glass transition temperature of the resin raw material layer 104a (that is, the intermediate layer 104). It is preferable to set it below the glass transition temperature.

In the embodiment of the present invention, it is also preferable to subject the intermediate layer 104 to a surface modification treatment after the intermediate layer 104 is formed by peeling the radiation transmissive stamper 110. Thereby, the intermediate layer 104 is further cured and can maintain stable unevenness.

Here, the surface modification treatment is not limited as long as it is a treatment that accelerates the curing of the intermediate layer 104, but is preferably a radiation irradiation treatment and / or a heat treatment. Among radiation, it is preferable to use ultraviolet rays. Therefore, for example, when the resin raw material layer 104a is made of an ultraviolet curable resin raw material, either ultraviolet irradiation or heat treatment may be used as the surface modification treatment, but at least ultraviolet irradiation is preferably used.
In the specific description of each of the first step, the second step, the third step, the fourth step, and other steps described above, when an ultraviolet curable resin raw material is used as the radiation curable resin raw material In the case of using an electron beam curable resin raw material or other radiation curable resin raw material, the process includes the first step, the second step, the third step using the ultraviolet curable resin raw material. This is almost the same as the process, the fourth process, and other processes.

(About radiolucent stampers)
The “radiation transparency” of the radiation transmission stamper 110 used in the embodiment of the present invention refers to the transparency to radiation when the radiation curable resin material is cured. Specifically, it means that the radiation has a transparency of usually 30% or more, preferably 50% or more, more preferably 60% or more. On the other hand, the transmittance with respect to the radiation is ideally 100%, but usually 99.9% or less.
In the present invention, “radiation” is used to include electron beams, ultraviolet rays, visible light, and infrared rays. In the above embodiment, the case where ultraviolet rays are used as radiation has been described as an example. However, the present invention is not limited to this.

As the radiation transmissive stamper, a conventionally known material can be used as appropriate by using a known production method. As a material for the radiation transmissive stamper, for example, a nonpolar material such as a polyolefin resin or a polystyrene resin, or a general-purpose and low-cost resin such as a polycarbonate resin or an acrylic resin can be used. In addition, the material of a radiolucent stamper may be used individually by 1 type, and may use 2 or more types together by arbitrary combinations and ratios.
Among these, a polycarbonate-based resin capable of realizing a highly accurate groove shape at low cost is preferable, and it is particularly preferable to use a conventionally known polycarbonate-based resin as a substrate of an optical recording medium.

The radiation transmissive stamper can be manufactured by injection molding or the like using, for example, a metal stamper (for example, a nickel stamper) having a concavo-convex pattern opposite to the transfer concavo-convex shape of the radiation transmissive stamper. it can.
Furthermore, the radiation transmissive stamper is usually formed in a disc shape in which a central hole penetrating the front and back is formed in the central portion. Also in the embodiment of the present invention, it is preferable to use a radiolucent stamper having a disk-like shape having a concavo-convex shape for transfer on the surface and a central hole formed in the center.

The thickness of the radiolucent stamper used in the embodiment of the present invention is usually 0.3 mm or more from the viewpoint of shape stability and ease of handling. However, it is usually 5 mm or less. If the thickness of the radiation transmissive stamper is within this range, the radiation curable resin material can be efficiently cured even when irradiated with radiation through the radiation transmissive stamper because it has sufficient radiation transparency. , Productivity can be improved.

Also, the outer diameter of the radiation transmissive stamper is preferably larger than the outer diameter of the first substrate (that is, the outer diameter of the optical recording medium). If the outer diameter of the radiation transparent stamper is designed to be larger than the outer diameter of the first substrate in advance, an irregular shape is formed with sufficient margin on the outer periphery outside the outer diameter of the optical recording medium during injection molding. This makes it possible to form a favorable concavo-convex shape over the entire region used for forming the intermediate layer of the radiation transmissive stamper.

Further, by making the outer diameter of the radiation transmissive stamper larger than the outer diameter of the first substrate, the outer diameter of the radiation transmissive stamper is made larger than the outer diameter of the intermediate layer (that is, the layer made of the radiation curable resin raw material). growing. If it does in this way, it will become easy to make the shape of the end face of an intermediate layer good. Specifically, when the radiation transmissive stamper is placed on the radiation curable resin material, the radiation curable resin material layer resin may adhere to the outer peripheral edge of the radiation transmissive stamper or the intermediate layer, This resin may become a burr when peeling off the radiation transmissive stamper. Therefore, by making the outer diameter of the radiation transmissive stamper larger than the outer diameter of the intermediate layer (radiation curable resin raw material layer), the resin that tends to become burrs is outside the outer diameter of the intermediate layer, that is, the radiation transmissive stamper. It exists in the outer periphery edge part. As a result, even if burrs are generated, the burrs can be removed without affecting the end face of the intermediate layer.

Specifically, the outer diameter of the radiolucent stamper is preferably 1 mm or more larger than the outer diameter of the first substrate, more preferably 2 mm or more. However, the difference from the outer diameter of the first substrate is usually 15 mm or less in diameter, and preferably 10 mm or less.

(About radiation curable resin raw materials)
The radiation curable resin material used for forming the intermediate layer is not particularly limited as long as it contains a radiation curable resin that is cured by radiation. A radiation curable resin may be used individually by 1 type, and may use 2 or more types together by arbitrary combinations and a ratio.
Examples of the radiation curable resin include various types such as an ultraviolet curable resin and an electron beam curable resin, and among them, an ultraviolet curable resin is particularly preferable. By adopting the ultraviolet curable resin, it becomes easy to transfer the uneven shape of the radiation transmissive stamper.

Examples of the ultraviolet curable resin include radical (that is, radical polymerization type) ultraviolet curable resin and cationic (that is, cationic polymerization type) ultraviolet curable resin. Conventionally known materials can be appropriately used. it can.

When using radical type ultraviolet curable resin for a radiation curable resin raw material, the composition which contains an ultraviolet curable compound (radical type ultraviolet curable compound) and a photoinitiator as an essential component can be used, for example. . As the radical ultraviolet curable compound, for example, monofunctional (meth) acrylate and polyfunctional (meth) acrylate can be used as the polymerizable monomer component. These may be used individually by 1 type, and may use 2 or more types together by arbitrary combinations and a ratio. Here, acrylate and methacrylate are collectively referred to as (meth) acrylate.

The photopolymerization initiator is not limited, but for example, a molecular cleavage type or a hydrogen abstraction type is preferable. In the present invention, it is preferable to obtain an intermediate layer by curing an uncured ultraviolet curable resin raw material mainly composed of radical polymerization type acrylic ester.

On the other hand, when a cationic ultraviolet curable resin is used as a radiation curable resin material, for example, an epoxy resin containing a cationic polymerization type photoinitiator can be used.
Examples of the epoxy resin include bisphenol A-epichlorohydrin type, alicyclic epoxy, long chain aliphatic type, brominated epoxy resin, glycidyl ester type, glycidyl ether type, and heterocyclic type. As the epoxy resin, it is preferable to use a resin having a low content of free chlorine and chlorine ions. The amount of chlorine is preferably 1% by weight or less, more preferably 0.5% by weight or less.

Also, examples of the cationic polymerization type photoinitiator include sulfonium salts, iodonium salts, diazonium salts, and the like.

Further, it is preferable to use a radiation curable resin material that is liquid at 20 ° C. to 40 ° C. This is because when the radiation curable resin material is applied, it can be applied without using a solvent, so that productivity is improved. Moreover, it is preferable to adjust suitably the viscosity of a radiation curable resin raw material so that it may become 50 cP or more and 1000 cP or less at normal temperature. More preferably, it is 100 cP or more. Moreover, 500 cP or less is still more preferable, Especially preferably, it is 400 cP or less. The viscosity of the radiation curable resin material can be adjusted by appropriately changing the monomer content in the radiation curable resin material.

B. Other Preferred Forms of Manufacturing Method of Optical Recording Medium of the Present Invention In the above, the manufacturing method of the optical recording medium of the present invention has been described taking a single-sided dual-layer DVD-R or a single-sided dual-layer DVD recordable disc as an example. The present invention is not limited to this. That is, a radiation curable resin raw material is applied on the data substrate directly or via another layer, a radiation transmissive stamper having a concavo-convex shape is fixed, and then peeled off. If the optical recording medium or the optical recording medium laminate is manufactured by a manufacturing method including a step of forming an intermediate layer by transferring, the effect of the present invention is exhibited well. That is, the manufacturing method of the embodiment of the present invention can be applied to optical recording media having other configurations.

For example, the present invention can be applied to an optical recording medium having three or more recording layers and two or more intermediate layers. In this case, the manufacturing method according to the embodiment of the present invention can be applied to form each of the two or more intermediate layers. Furthermore, in the above-described embodiment, a method for manufacturing a so-called substrate surface incident type optical recording medium has been described. However, the present invention can naturally be applied to a method for manufacturing a so-called film surface incident type optical recording medium.

As another example of the optical recording medium to which the embodiment of the present invention is applied, there is a Blu-ray disc, for example, a two-layer structure having two recording layers (dual layer) provided on one optical recording medium. BD-R optical recording media may be mentioned. Of course, in the two-layer BD-R optical recording medium, the above-described intermediate layer forming method can be similarly used. In that case, instead of the adhesive layer 107 and the second substrate 108 in the previous section, a cover layer having a thickness of about 75 μm is formed. As a method for forming the cover layer, a conventionally known manufacturing method such as a spin coating method can be applied. At this time, in the two-layer BD-R optical recording medium, the film thickness of the intermediate layer is set to about 25 μm according to the standard. When there are three or more recording layers, the film thickness of the intermediate layer is appropriately set.
Note that in the case of a film surface incidence type optical recording medium such as BD-R which is irradiated with laser light from the cover layer side, the above-described configuration, the order of stacking the first recording layer and the first reflecting layer, and the second recording The stacking order of the layers and the second reflective layer is reversed.

In the above embodiment, the intermediate layer is formed of only one layer. However, in order to improve the peelability of the radiation transmissive stamper from the intermediate layer, two kinds of ultraviolet curable resin raw materials for forming the intermediate layer are used. It is also possible to use a method in which the above resin material is used and the intermediate layer has a laminated structure of different resins. The advantage of this method is that, for example, a resin material A having good releasability from the radiation transmissive stamper is used on the radiation transmissive stamper side, and a resin material B having good adhesion to the data substrate is used on the data substrate side. Thus, the peelability can be improved. In this case, the effect of the present invention can also be obtained by applying the production method of the present invention only to any one of the resin materials having the most part of the thickness of the intermediate layer. Specifically, for example, when the resin material A is previously applied and cured on a radiation transmissive stamper and a resin material layer made of the resin material B is formed, an example in which the manufacturing method of the present invention is used is given. .

Further, the recording layer material is not particularly limited as long as it can be applied to a normal optical recording medium, and the manufacturing method according to the embodiment of the present invention can be applied. For example, not only an organic dye material but also a phase change recording material, a partial nitride film, and a partial oxide film can be used. As a specific example of the phase change recording material, it is preferable to use a composition mainly composed of Sb such as SbTe, GeSbTe, InSbTe, AgSbTe, AgInSbTe, GeSbSn, InGeSbTe, or InGeSbSnTe. . Specific examples of the partial nitride film and partial oxide film include partial nitride films such as BiGeN and SnNbN, and partial oxide films such as TeOx and BiFOx.

C. Preferred Form of Optical Recording Medium Manufacturing Apparatus of the Present Invention The above-described optical recording medium manufacturing method can be performed by using the following manufacturing apparatus.
Specifically, an optical recording medium having a plurality of recording layers on a disc-shaped substrate having a center hole, and an intermediate layer having an uneven shape made of a radiation curable resin material between the plurality of recording layers. This manufacturing apparatus is used in the step of forming the intermediate layer, and has at least the following first means, second means, third means, and fourth means.

(1) First Means The first means of the optical recording medium manufacturing apparatus of the present invention is that the radiation curable resin material is applied between a radiation transmissive stamper and the substrate having the recording layer, and the radiation A means for superimposing a transparent stamper on the substrate having the recording layer.
An example of the first means is shown in FIG. As shown in FIG. 5A, the first means includes a substrate holding table unit 201 for holding, rotating, etc. substantially horizontally with the recording layer side of the data substrate 111 on which the recording layer is formed as an upper surface, and radiation. A stamper holding reversal table 202 for holding and rotating the radiation transmissive stamper 110 so that the concave / convex forming surface side of the transmissive stamper 110 is on the data substrate 111 side, a radiation curable resin raw material 104a, and a disk substrate 111 The nozzle part 203 for apply | coating between the radiation transparent stampers 110 can be provided at least.

The substrate holding table unit 201 includes, for example, a turntable 210 for placing the data substrate 111, a central axis 211 for inserting the central hole of the data substrate 111 and the radiation transmissive stamper 110, and the data substrate 111 being the turntable 210. It may have a suction hole 212 for fixing it so as not to move, a rotation mechanism (not shown) for rotating the turntable 210, and the like.

The stamper holding / reversing table unit 202 has, for example, a reversing turntable 214 having a suction hole 213 for holding the radiation transmissive stamper 110 by suction, and the radiation transmissive stamper 110 held by the reversing turntable 214 in any direction. A conveyance mechanism (not shown) that can be conveyed, a rotation mechanism (not shown) for rotating the reverse turntable 214, and the like can be provided.

The nozzle unit 203 includes a nozzle, a moving mechanism (not shown) for moving the tip of the nozzle to an arbitrary position, and a control mechanism (for discharging a predetermined amount of the radiation curable resin material 104a from the tip of the nozzle). (Not shown) or the like. Note that only one nozzle for discharging the radiation curable resin material 104a may be provided, or two or more nozzles may be provided.

In the first means, for example, as shown in FIG. 5 (a), the substrate holding table unit 201 and the stamper holding reversal table unit 202 convey the data substrate 111 and the radiation transmissive stamper 110, respectively, and have the same central axis. It penetrates 211 and arrange | positions so that these may oppose. Subsequently, the tip of the nozzle in the nozzle part 203 is inserted between both the

substrates

110 and 111, and a predetermined amount of the radiation curable resin material 104 a is discharged from the nozzle part 203. At this time, by rotating the turntable 210 of the substrate holding table unit 201 and / or the reverse turntable 214 of the stamper holding reverse table 202 in the circumferential direction of the data substrate 111, the radiation curable resin raw material 104a is coated in an annular shape. Shall. Subsequently, after the application of the radiation curable resin material 104a, the tip of the nozzle is retracted, and either or both of the turntable 210 and the reverse turntable 214 are moved upward or downward, thereby allowing the data substrate 111 and the radiation transmissive property. The stamper 110 is overlapped.

Note that the manufacturing conditions such as the coating amount of the radiation curable resin raw material 104a in this means and the materials such as the radiation curable resin raw material 104a, the radiation transmissive stamper 110, and the data substrate 111 used in this means are as described above. This can be the same as that described in the recording medium manufacturing method.

(2) Second means The second means is to rotate the substrates relative to each other by twisting the substrates having the radiation transmissive stamper and the recording layer in a state in which they are pressed in directions approaching each other. This is a means for stretching the radiation curable resin raw material.
In the second means, for example, as shown in FIG. 5B, the turntable 210 of the substrate holding table unit 201 and / or the reverse turntable 214 of the stamper holding reverse table unit 202 is moved upward or downward. By pressing the data substrate 111 and the radiation transmissive stamper 110 in the approaching direction and rotating both or one of the turntable 210 and the reverse turntable 214 in the circumferential direction of the data substrate 111, The radiation curable resin raw material 104a applied by one means is stretched on both substrate surfaces.

In the second means, one of the turntable 210 and the reverse turntable 214 may be fixed, and the pressure state may be controlled by moving the other upward or downward. You may control a pressurization state by moving both the inversion turntable 214 up and down.

Further, when twisting the radiation transmissive stamper 110 and the data substrate 111, the rotation of the turntable 210 and the reverse turntable 214 may be controlled so that one is fixed and the other is rotated in the circumferential direction. Alternatively, the turntable 210 and the reverse turntable 214 may be controlled to rotate in the opposite directions such that the sexual stamper 110 and the data substrate 111 are rotated in the opposite directions.
After the rotation, the stamper holding / reversing table unit 202 is removed from the radiation transmitting stamper 110, and the radiation transmitting stamper 110 is held on the substrate holding table unit 201 side in a state of being superimposed on the data substrate 111. And

The manufacturing conditions such as the pressing width at the time of the pressure control, the rotation speed at the time of twisting, and the rotation angle can be the same as those described in the method for manufacturing the optical recording medium.

(3) Third means The third means is a means for irradiating only the vicinity of the center hole of the substrate with radiation to cure the radiation curable resin material.
For example, as shown in FIG. 5C, a means including a radiation source 205 for emitting radiation 220 and a light shielding mechanism 204 capable of shielding a target region can be used.
The third means preferably has a pressurizing mechanism for pressurizing the central hole side of the radiation transmissive stamper 110, and this pressurizing mechanism may also serve as a light shielding mechanism.

The radiation source 205 used for the third means is not particularly limited as long as it can irradiate the radiation 220 capable of curing the radiation curable resin raw material 104a at a predetermined timing, and the radiation curable resin. It is appropriately selected according to the type of raw material 104a, required strength, and the like.

Further, the light shielding mechanism may be composed of, for example, a light shielding mask and a light shielding mask transport mechanism that can transport the light shielding mask to an arbitrary position.
FIG. 5C illustrates a form in which the pressurizing mechanism also serves as the light shielding mechanism 204. As the pressurizing mechanism, one or two or more weights (204a to 204c in FIG. 5C) and the weights 204a to 204c are supported, and these are arranged at an arbitrary position on the radiolucent stamper 110. And a weight transport mechanism 204d that can be transported.
For example, the weight 204a placed in the radiation irradiating region is selected from a material that is transparent to radiation, and the

weights

204b and 204c disposed in the region not irradiated with radiation are selected as light shielding weights. And shading can be performed simultaneously.

The third means further includes a suction mechanism (not shown) that performs vacuum suction of the radiation curable resin raw material 104a from the central axis 211 of the substrate holding table portion 201, as shown in FIG. 5C. It may be. When the suction mechanism is provided, the radiation curable resin raw material 104a can be quickly stretched toward the center hole side of the data substrate 111 before or during radiation irradiation from the radiation source 205, and the tact time Can be shortened.

Note that after the radiation irradiation, the light shielding mechanism 204 and the like are removed from the radiation transmissive stamper.

The manufacturing conditions such as the irradiation amount of the radiation source from the radiation source by this means, the irradiation time, the pressurization amount, the suction pressure by the suction mechanism, and the like can be the same as those described in the above-described optical recording medium manufacturing method.

(4) Fourth means The fourth means is to rotate the substrate having the recording layer and the radiation transmissive stamper in order to extend the radiation curable resin material to the entire substrate having the recording layer. At the same time, the radiation curable resin raw material stretched over the entire substrate is cured, and the radiation transmissive stamper and the substrate having the recording layer are bonded.

For example, as shown in FIG. 5D, the fourth means rotates the turntable 210 and simultaneously rotates the data substrate 111 and the radiation transmissive stamper 110 at a high speed, simultaneously with the rotation. A radiation source 206 for irradiating the radiation 220 for curing the radiation curable resin raw material 104a can be used. In this embodiment, it is preferable to start the irradiation of the radiation 220 from the radiation source 206 almost simultaneously with the start of rotation by the rotation mechanism, and to control the rotation mechanism and the radiation source 206 so that the irradiation is completed almost simultaneously with the completion of the rotation. The start of rotation and the start of radiation irradiation and / or the end of rotation and the end of radiation irradiation may be appropriately shifted.
As the radiation source 206, the same one as the third means may be used, or a different one may be used.

In the present invention, it is preferable that the fourth means further includes a light shielding mechanism (not shown) in addition to the rotation mechanism and the radiation source. Normally, the thickness of the radiation curable resin material 104a is thin at the inner periphery and thicker at the outer periphery simply by rotating and stretching with a rotating mechanism. Therefore, a substantially uniform film is formed over the entire surface by rotating at high speed while irradiating ultraviolet rays through a light-shielding mask having an opening that can change the irradiation amount according to the radius, and sequentially curing from the center hole side during high-speed rotation. It can be made thick. As such a light shielding mechanism, a light shielding mask capable of adjusting an irradiation amount from the radiation source 206, a light shielding mask transport mechanism capable of transporting the light shielding mask to an arbitrary position, and the like can be used.

Note that the number of rotations by the rotation mechanism of this means and the manufacturing conditions such as the irradiation of radiation from a radiation source can be the same as those described in the above-described method for manufacturing an optical recording medium.

(5) Others In the above-described embodiment, the same substrate holding table unit 201 is used in the first to fourth means, but different ones may be used. Further, although the radiation transmissive stamper 110 is on the upper side and the data substrate 111 is on the lower side, each means may be arranged so that these are upside down. Further, the present invention is not limited to the above-described configuration, and may have other configurations as needed in addition to the above-described configurations.

Hereinafter, specific embodiments of the present invention will be described in more detail by way of examples. However, the present invention is not limited to these examples without departing from the gist thereof.

Example 1
An example in which a write-once two-layer Blu-ray disc is manufactured using the method of the present invention will be described.
The surface of a polycarbonate substrate having a thickness of 1.1 mm and a diameter of 120 mm, on which a groove having a track pitch of 0.32 μm and a depth of 20 nm has been transferred, is formed from an inorganic film through a plurality of sputtering film forming steps. A write-once recording film was formed (hereinafter, a substrate on which a recording film is formed on a polycarbonate substrate in this way is referred to as a “data substrate”). Separately, by injection molding, a polycarbonate substrate having a thickness of 0.6 mm and a diameter of 124 mm in which a groove having a pitch of 0.32 μm and a depth of 20 nm was transferred to the surface was produced (hereinafter, the groove was formed in this way. Polycarbonate substrate is described as “radiation transparent stamper”). The groove on the surface of the data substrate and the groove on the surface of the radiation transmissive stamper were made to have a concave and convex orientation opposite to each other by using the concave and convex orientation of the groove of the nickel stamper used for injection molding.

A center hole having a diameter of 15 mm is formed at the center of both the data board and the radiation transmissive stamper, and a circle having a height of about 15 μm as shown in FIG. An annular small protrusion 300 was previously formed by injection molding.

Next, the radiation transmissive stamper is fixed on a turntable that can be rotated at high speed, and a UV curable material having a viscosity at room temperature of about 280 cP using a nozzle having a tip outer diameter of 1.08 mm and an inner diameter of 0.72 mm. Resin raw material A (hereinafter simply referred to as “resin A”) was applied in an annular shape at a radius of 16 mm on the radiation transmissive stamper. The coating amount was about 3 g. A few seconds later, when resin A naturally reaches a small protrusion with a diameter of 20 mm on the radiolucent stamper, high-speed rotation is started. After rotating at 9100 rpm for 4 sec, the atmosphere on the upper surface of the radiolucent stamper is purged with nitrogen. Then, 70 mW / cm ² of ultraviolet rays was irradiated for 1 second to cure the resin A. The thickness of the cured film of resin A at this time was about 10 μm.

Next, the radiolucent stamper on which the cured film of the resin A was formed and the data substrate were fixed on separate turntables, and then faced at an interval of 3 mm. In this gap, the turntables of the two are rotated once in synchronism with the radiation curable transparent stamper and the center of the data substrate at a position of 30 mm in radius, and the ultraviolet curable resin raw material B (hereinafter referred to as the viscosity of about 380 cP at room temperature) About 3 g was applied using a nozzle having an outer diameter of 1.49 mm and an inner diameter of 1.11 mm. At this time, the central hole of the data substrate and the central hole of the radiation transmissive stamper were passed through the same central axis, and the eccentric amount of both substrates was adjusted to be within 30 μm.

Thereafter, the turntable of the data substrate was fixed, and further, the distance between the two substrates was further narrowed by 45 μm, and only the turntable of the radiation transparent stamper was twisted by rotating 180 ° at 15 rpm, and the resin B was stretched. Next, the turntable of the radiation transmissive stamper is removed, and a quartz ring capable of sufficiently transmitting ultraviolet rays with a radius of 7.5 mm to 11 mm is formed with a radius of 11 to 28 mm from the vicinity of the central hole of the radiation transmissive stamper to the middle circumference of the disk. A total load of 80 g was applied by contacting the inner and outer peripheral weights. Here, a light-shielding material was used for the inner and outer peripheral weights. Thereby, the small protrusions on both the substrates are made to face each other, and in this state, the resin B is naturally stretched between both the substrates, and immediately after the inner peripheral side extension end reaches the small protrusion, from above the radiation transmitting stamper. Only the vicinity of the central hole was irradiated with ultraviolet light from a high-pressure mercury lamp. Here, the inner peripheral weight worked as a light shielding mask, and it was possible to irradiate ultraviolet rays only to a circular region having a radius of 11 mm or less. At this time, in addition to natural stretching to the inner peripheral side, the resin is sucked under reduced pressure at a pressure of −12 kPa from the vacuum suction pores provided on the side surfaces of the central axis penetrating the central holes of both substrates, It was possible to shorten the time required for the inner peripheral stretched end of the resin to reach the protrusion.

The amount of ultraviolet light at this time was 70 mW / cm ² and the irradiation time was 1 second. Although an appropriate irradiation amount depends on the curability of the resin B and the light transmittance of the cured film of the resin A and the radiation transmitting stamper, the irradiation amount is such that the resin B in the irradiation range is completely cured.

Next, the weight and the quartz ring were removed, and both substrates were fixed on a turntable and rotated at a high speed to stretch the resin B. At this time, the number of revolutions was set to 7800 rpm so that the thickness of the intermediate layer between the two substrates was required, in this case, about 25 μm.
Normally, simply by rotating and stretching, the thickness of the resin raw material is thin at the inner periphery and thicker at the outer periphery, so it rotates at high speed while irradiating ultraviolet rays through a light-shielding mask with an opening that can change the dose according to the radius. In this case, the inner circumference is first hardened during high-speed rotation, so that the film thickness is substantially uniform over the entire surface. This film thickness adjusting ultraviolet irradiation was performed so that the irradiation was started almost simultaneously with the start of rotation, and the irradiation was completed almost simultaneously with the completion of rotation.
By appropriately adjusting the shape of the light-shielding mask and the ultraviolet irradiation intensity according to the curability of the resin B and the ultraviolet transmittance of the cured film of the resin A, the fluctuation of the film thickness of the intermediate layer over the entire disk recording area can be increased (maximum (Film thickness−minimum film thickness), which could be suppressed to about 2 μm. Until the rotation was completed, air did not enter from the inner peripheral end of the cured film of resin B having a diameter of 20 mm to separate the substrates, and bubbles did not enter from the inner peripheral end of the resin.

After stopping the high-speed rotation, the entire surface of the substrate is further irradiated with ultraviolet rays from the side of the radiation transmissive stamper to completely cure the resin B, and a mechanical force is applied between the radiation transmissive stamper and the cured film of the resin A. It was made to peel. When a resin material having good releasability from polycarbonate is used as Resin A and a resin material having good adhesion to polycarbonate is used as Resin B, radiation is generated when both the substrates are peeled by mechanical force. It became possible to peel between the permeable stamper and the resin A.
A write-once recording film is laminated by a plurality of sputtering processes on the data substrate, the resin B, and the resin A that are sequentially laminated, and then spin-coated with the ultraviolet curable resin C, thereby approximately 75 μm. A cover layer having a thickness of 5 mm was formed. At this time, it is necessary to form the cover layer uniformly from the portion having a diameter of 23 mm corresponding to the inner peripheral end of the disc clamp portion, but the intermediate layer in the region is formed substantially uniformly as described above. When resin C was applied, it could be formed without entraining bubbles.

Table 1 shows the results of evaluating the servo characteristics of the optical recording medium according to Example 1 of the present invention created through the above steps. The servo characteristics were evaluated by evaluating the servo residue when recording / reproducing on the second recording layer formed on the intermediate layer. When recording / reproducing data, it is necessary to automatically move the objective lens of the optical pickup up and down in order to make the focus of the recording / reproducing laser beam follow the recording surface. Servo residue is an index that indicates the distance traveled when the objective lens automatically follows.When recording / reproduction is performed on an optical recording medium, if the servo residue becomes too large, a servo failure will occur and a recording / reproduction error will occur. Will occur. The value of the servo residue in the Blu-ray disc is preferably 45 nm or less for 2 × speed recording, and preferably 80 nm or less for 4 × speed recording.

In the present invention, the servo residue is calculated from the driving voltage necessary to automatically follow the objective lens of the optical pickup during recording / reproduction, and the value of the servo residue at each radius when performing recording / reproduction from the inner circumference to the outer circumference Was evaluated in the case of double speed and quadruple speed.
From Table 1, in the case of Example 1, a value of less than 45 nm was obtained for the double speed and less than 80 nm for the quadruple speed on the entire surface of the optical recording medium, and good servo characteristics were obtained. Yes. This indicates that the objective lens can sufficiently follow because the uniformity of the film thickness of the intermediate layer is excellent.

(Comparative Example 1)
Table 2 shows the results of producing an optical recording medium in the same manner as in Example 1 except that no twisting was performed, and evaluating the servo residue. Although the value less than 45 nm is obtained at the double speed, the value exceeds 80 nm on the inner peripheral side at the quadruple speed. This is presumably because the film thickness uniformity of the intermediate layer on the inner peripheral side is deteriorated by not performing twisting.

(Comparative Example 2)
In Example 1, an attempt was made to produce an optical recording medium in the same manner except that inner circumference curing was not performed. However, without inner circumference curing, air was passed from the inner circumference to the intermediate layer during high-speed stretching in the fourth step. As a result, the upper surface of the radiolucent stamper peeled off, making it difficult to produce an optical recording medium.

From the above results, it is possible to form a more uniform intermediate layer by adopting the method for producing an optical recording medium of the present invention, and it has excellent servo characteristics even in high-speed recording of the second recording layer on the intermediate layer. It can be seen that an optical recording medium can be produced.

The present invention is useful as a method for producing a dual layer type optical recording medium having two recording layers having an intermediate layer having optically uniform characteristics over the entire surface. Furthermore, it is useful for improving the production efficiency of the multilayer multilayer optical recording medium by the 2P method.
The entire contents of the specification, claims, drawings and abstract of Japanese Patent Application No. 2010-090810 filed on April 9, 2010 are incorporated herein by reference. .

DESCRIPTION OF SYMBOLS 100 ... Optical recording medium 101 ... 1st board | substrate 102 ... 1st recording layer 103 ... 1st reflection layer 104a ... UV curable resin raw material, resin raw material layer 104 ... Intermediate | middle layer 105 ... 2nd recording layer 106 ... 2nd reflection layer 107 ... adhesive layer 108 ... second substrate 109 ... laser light 110 ... radiation transmissive stamper 111 ... data substrate 120 ... quartz ring (weight)
121, 122 ... Light-shielding weight 123 ... Center axis 124 ... Fine hole 201 ... Substrate holding table part 202 ... Stamper holding / reversing table part 203 ... Nozzle part 204 ...

Light shielding mechanism

204a, 204b, 204c ... Weight 204d ...

Weight transport mechanism

205, 206 ... Radiation source 210 ... Turntable 211 ...

Central axis

212, 213 ... Suction hole 214 ... Reverse turntable 220 ... Radiation 300 ... Small projection

Claims

A method for producing an optical recording medium, comprising: a plurality of recording layers on a disc-shaped substrate having a central hole; and an intermediate layer having a concavo-convex shape made of a radiation curable resin material between the plurality of recording layers. And
In the step of forming the intermediate layer,
Applying the radiation curable resin raw material between a radiation transmissive stamper and a substrate having the recording layer, and superimposing the radiation transmissive stamper and the substrate having the recording layer;
A second step of stretching the radiation curable resin raw material by twisting the radiation transmissive stamper and the substrate having the recording layer in a state of being pressed in directions approaching each other;
The third step of irradiating only the vicinity of the center hole of the substrate to cure the radiation curable resin material, and the recording for stretching the radiation curable resin material over the entire substrate having the recording layer The substrate having a layer and the radiation transmissive stamper are rotated, and at the same time, the radiation curable resin raw material stretched over the entire substrate is cured, and the radiation transmissive stamper and the substrate having the recording layer are bonded. The fourth step,
A method of manufacturing an optical recording medium, comprising at least this order.
The annular small protrusion is formed in the center hole side from the clamp area | region of the surface side to overlap in the said 1st process with both the said board | substrate and the said radiolucent stamper. Manufacturing method of optical recording medium.
In the second step, there is a twist rotation step by relatively rotating the radiation transmissive stamper and the substrate having the recording layer, and the rotation speed of the twist in the twist rotation step is 0.1 rpm to 30 rpm. 3. The method of manufacturing an optical recording medium according to claim 1, wherein the pressing width during twisting is in the range of 10 μm to 100 μm, and the rotational angle of twisting is in the range of 180 ° to 360 °.
4. The method of manufacturing an optical recording medium according to claim 1, wherein, in the third step, a range in which the radiation is irradiated is set within a radius of 15 mm from the center of the substrate.
The step of applying pressure by applying a load of 50 g to 100 g between the radiation transmissive stamper and the substrate is provided between the second step and the third step. 5. The method for producing an optical recording medium according to any one of 4 above.
Between the second step and the third step, there is a step of sucking the radiation curable resin material under reduced pressure from a central axis for fixing the central hole of the radiation transmissive stamper and the substrate. The method for producing an optical recording medium according to any one of claims 1 to 5.
The method for producing an optical recording medium according to any one of claims 1 to 6, wherein the radiation curable resin material has a viscosity of 50 cP to 1000 cP.
The total height of the small protrusions of the radiation transmissive stamper and the small protrusions of the substrate is within a target film thickness of ± 15 μm of the intermediate layer, and the small protrusions of the radiation transmissive stamper and the substrate The method of manufacturing an optical recording medium according to any one of claims 2 to 7, wherein a positional deviation in a radial direction with respect to the small protrusion is within 0.5 mm.
9. The optical recording medium according to claim 6, wherein a suction pressure in the step of suctioning the radiation curable resin raw material from the central axis is reduced to a range of −1 kPa to −20 kPa. Manufacturing method.
An apparatus for producing an optical recording medium, comprising: a plurality of recording layers on a disk-shaped substrate having a central hole; and an intermediate layer having a concavo-convex shape made of a radiation curable resin material between the plurality of recording layers. The radiation curable resin material is applied between the radiation transmissive stamper and the substrate having the recording layer, and the substrate having the radiation transmissive stamper and the recording layer is used. And a first means of superimposing
A second means for stretching the radiation curable resin raw material by twisting the radiation transmissive stamper and the substrate having the recording layer in a state of being pressed in directions approaching each other;
A third means for irradiating only the vicinity of the center hole of the substrate and curing the radiation curable resin raw material;
In order to stretch the radiation curable resin material on the entire substrate having the recording layer, the radiation curable resin stretched on the entire substrate is simultaneously rotated while rotating the substrate having the recording layer and the radiation transmissive stamper. A fourth means for curing the resin raw material and bonding the radiation transmissive stamper and the substrate having the recording layer;
An apparatus for manufacturing an optical recording medium, comprising: