WO2011072315A1

WO2011072315A1 - Vacuum valve

Info

Publication number: WO2011072315A1
Application number: PCT/AT2010/000466
Authority: WO
Inventors: Rico Rohner; Anton Neumeier; Eugen Broger
Original assignee: Vat Holding Ag
Priority date: 2009-12-14
Filing date: 2010-12-06
Publication date: 2011-06-23

Abstract

The invention relates to a vacuum valve, comprising a valve body (1) having first and second walls (2, 3), which comprise an intermediate space (4) therebetween and of which the first wall (2) has a first opening (5) and the second wall (3) has a second opening (6), wherein a passage (7) through the vacuum valve is formed by the first and second openings (5, 6), said passage having a longitudinal axis (8), and a closing device (9) located in the intermediate space (4) between the first and the second wall (2, 3), by means of which closing device the passage (7) through the valve body (1) can be closed in a closed position and can be released at least for the most part in an open position. The closing device (9) comprises first and second closing sections (10, 11), which each can be slid while sealed with respect to the first and second wall (2, 3) and which release the passage (7) at least for the most part in the open state of the vacuum valve and, in order to close the vacuum valve, are moved into positions in which the closing sections protrude into the passage (7) from opposite sides of the passage (7) and cover the passage at least partially, wherein the closing sections are pressed against each other and/or against a band (18) fed through the passage (7) between the closing sections in a sealed manner. The first and second closing sections (10, 11) are connected to each other by first and second side sections (19, 20), wherein the closing device (9) is circumferentially closed overall.

Description

vacuum valve

The invention relates to a vacuum valve comprising a valve body having first and second walls having a space therebetween and of which the first wall has a first opening and the second wall has a second opening, wherein through the first and second openings a longitudinal axis The passage through the valve body is closable in a closed position of the closure device and at least largely releasable in an open position of the closure device, and the first one is provided with a passage between the first and second walls and second closure portions, which are each sealed relative to the first and second wall and which in the open state of the vacuum valve, the passage at least largely release and are moved to close the vacuum valve in positions in which they protrude from opposite sides of the passage into the passage and partially cover this jeweVis, wherein the first and second closure portions are sealed against each other and / or pressed against a performed between them by the passage band

Are known vacuum valves, which have a valve plate as a closure device, which is equipped with an annular seal, which, in the closed state of the vacuum valve is pressed against a sealing surface surrounding the valve opening. To adjust the valve plate, this is attached to a vacuum-tight led out of the valve body valve rod. The seal arranged on the valve plate, which serves to close the valve opening in the closed state of the vacuum valve, is also referred to as a "dynamic seal", while the seal for sealing out the valve stem from the vacuum region of the vacuum valve is also referred to as "static seal". Static seals that seal the vacuum area of the vacuum valve to the outside are further provided between the valve body and removable parts from the valve body, which close an opening in the valve body. When closing and opening the vacuum valve in such vacuum valves of the valve plate depending on training different types of ways to go through. For example, the path traveled may be approximately L-shaped. An example of such a vacuum valve is known from US 6,431, 518 B1. From WO 2009/070824 A1 further goes, for example, a vacuum valve, in which a closure member starts when closing the vacuum valve on guide elements, which are arranged on both sides of the opening and having angled to the plane of the seat guide surfaces. Through these guide surfaces, the closure member is displaced over an end portion of the adjustment path before reaching its closed position at an angle to the plane of the seat. In the vacuum valve described in US Pat. No. 6,367,770 B1, the closure member, as seen in cross-section, has wedge-shaped side surfaces running on to which elastomeric circumferentially closed seals are arranged, which bear against sealing surfaces of the valve seat in the closed state of the valve. The closing and opening of the closure member is rectilinear here, wherein the necessary sealing force for pressing the closure member is applied to one of the sealing surfaces by acting on the closure member differential pressure. Vacuum valves of a different shape with rectilinearly adjustable closure members can be found, for example, in US Pat. No. 4,809,950 and US Pat. No. 4,921,213. In vacuum systems in which belts, in particular of a film material, are processed, which are unrolled from a roll and rolled up on a roll after processing, there is the problem that the rolls must be replaced after their complete unwinding or winding. For this purpose, they are arranged in their own vacuum chambers, which can be separated from the vacuum chambers, in which the machining operations are carried out, by means of valves. In this case, a closing of the valve against the material of the continuous belt can be carried out. This can avoid that the entire vacuum system must be flooded when replacing the respective role. As a vacuum valve for this purpose usually a Schrägsitzventil is used, in which for closing the vacuum valve, a plate-shaped closure member is rectilinearly guided in the direction perpendicular to its plane against a seat obliquely to the axis of the valve opening. A disadvantage here is, inter alia, that the material of the tape is bent when closing the valve.

A vacuum valve of the type mentioned is apparent from JP 04000072 A. An embodiment is described in which first and second closure portions fixed to rods are sealed against the first and second walls of the first and second closure portions Valve body, which have the openings of the valve, are displaceable. The first and second walls of the valve body are interconnected by third and fourth walls. The first and second closure portions are sealed on the front side of these third and fourth walls. A pressing of the first and second closure sections to a band performed between them is provided. This vacuum valve has disadvantages in terms of the reliability and durability of the sealing of the closure portions relative to the valve body.

Another vacuum valve with first and second closure portions, which abut each on four sides of walls of the valve body, it is apparent from JP 36-019567 U. Again, a pressing of the first and second closure portions is provided against a performed between these band.

A further vacuum valve with first and second closure parts, which are intended to be pressed against a band between them, is disclosed in JP 2009-030 754 A.

The object of the invention is to provide a vacuum valve which has a simplified design and / or advantages for applications in vacuum systems for processing tapes. According to the invention, this is achieved by a vacuum valve having the features of claim 1.

In the vacuum valve of the invention, the first and second closure portions of the closure means are sealed against the first and second walls of the valve body. This seal can be made by applying an elastic material from which the respective closure portion is formed or which has the respective closure portion, on the respective wall. Furthermore, this seal can be effected by abutment of the respective closure section on a sealing ring arranged on the respective wall, which surrounds the respective opening in the wall.

To close the vacuum valve, the first and second closure sections are sealed relative to the first and second walls and in this case retracted from opposite sides of the passage of the vacuum valve into a position partially overlapping the passage until they are pressed against each other in a sealed manner. By sealing the first and second closure portions with respect to the first and second walls at least portions of seals of the vacuum valve are formed, through which a sealing of the vacuum region of the vacuum valve against a contrast higher pressure, in particular atmospheric pressure. By the sealed pressing together of the first and second closure portions in the closed state of the vacuum valve at least a portion of the dynamic seal of the vacuum valve is formed, from which the passage of the vacuum valve is sealed in the closed state of the vacuum valve. Advantageously, it is also possible in the vacuum valve according to the invention to press the first and second closure sections in the closed state of the vacuum valve at least over a part of their respective longitudinal extent to the opposite surfaces of a performed through the passage of the vacuum valve band. The sealed pressing of the closure portions against the band forms at least a portion of the dynamic seal of the vacuum valve from which the passage of the vacuum valve is sealed in the passageway through the passage. When the closure portions extend beyond the width of the band, they are sealed against each other in the parts of their longitudinal extent lying laterally of the band, whereby a further portion of the dynamic seal of the vacuum valve is formed. A closure of the vacuum valve can thereby also take place against such a passage passing through the band.

According to the invention, the first and second closure sections are connected to one another by first and second side sections, wherein the closure device is designed so as to be completely circumferentially closed. It is thereby achieved a reliable and durable construction.

In one possible embodiment of the invention, the first and second closure portions are formed entirely of an elastic material. The closure device is formed circumferentially circumferentially closed by the first and second closure portions by first and second. Side sections are connected to each other, which bear respectively sealed against the first and second walls and also made of an elastic material. In the closed state of the vacuum valve, the side sections are sealed together sealed. This circumferentially closed closure means made of the elastic material is thus sealed circumferentially with respect to the first and second walls. It therefore forms a seal of Vacuum range of the vacuum valve. Furthermore, the closure device forms the dynamic seal for sealing the passage of the vacuum valve in its closed state. In order to adjust the respective closure section when the vacuum valve is opened and closed, the first and second closure sections in this embodiment are preferably each fastened on the front side to a holding part which is linearly displaceable by at least one actuator. In other possible embodiments of the invention, the first and the second closure portion each have an inelastic support body, for example of metal, on which an elastic material is arranged, which is sealed in the closed position of the vacuum valve to the elastic material of the other closure portion and / or a tape carried out between the closure sections can be applied. For sealing against the first and second wall can also serve the elastic material of the first and second closure portion, wherein the serving to seal the passage in the closed state of the vacuum valve and to seal against the respective wall portions of the elastic material may each be integrally formed or made may consist of separate parts. In a further embodiment of the invention can be used to seal against the respective wall disposed on the respective wall elastic sealing ring, on which the respective closure portion is pressed. The closure device is in turn formed as a whole circumferentially closed by the first and second closure portions are interconnected by first and second side portions, which are also each sealed to the first and second wall. This sealing can be effected in that the first and second side portions have an elastic material at least in the areas in which they rest against the first and second walls. Furthermore, this sealing can take place in that an elastic sealing ring surrounding the respective opening in the wall is attached to the respective wall, which rests against sealing surfaces of the first and second side sections. The closure device is thus sealed over its entire circumference with respect to the first and second walls. In order to enable the opening and closing of the vacuum valve, the method of the first and second closure portions, the first and second side portions are flexible, preferably at least over a part of their extension made of an elastic material. To open and close the vacuum valve, the support body of the closure sections are each of at least one actuator linearly displaceable. In the closed state of the vacuum valve, the side sections are sealed together sealed.

In these embodiments, the peripherally closed closure device forms on the one hand a seal of the vacuum region of the vacuum valve on the other hand a dynamic seal for sealing the passage of the vacuum valve in its closed state.

Further advantages and details of the invention are explained below with reference to the attached drawing. In this show:

Fig. 1 is a view of a vacuum valve according to the invention;

Fig. 2 is a plan view;

3 and 4 sections along the lines AA and BB of Figure 1 in the open state of the vacuum valve ..;

Figures 5 and 6 are sections corresponding to Figures 3 and 4 in the closed state of the vacuum valve.

7 shows a section along the line AA of Figure 1 in the open state of the vacuum valve with a guided through the passage of the vacuum valve belt ..;

8 shows a section corresponding to FIG. 7 in the closed state of the vacuum valve; 9 and 10 are sections along the line CC in Figure 2 in the open and closed state of the vacuum valve ..;

Fig. 1 1 is an oblique view of the vacuum valve;

12 shows an oblique view from a view direction slightly changed with respect to FIG. 11 with the front wall of the valve body removed and without the closure device made of the elastic material;

13 shows a section through a part of a vacuum valve in a second embodiment in a sectional plane according to FIG. 3, in the opened state of the vacuum valve;

Fig. 14 is a section along the line DD of Fig. 13;

Fig. 15 is an oblique view of a part of a vacuum valve in a third embodiment of the invention, in the open state of the vacuum valve;

Fig. 16 and Fig. 17 are a view and a plan view of the part of the vacuum valve shown in Fig. 15;

18 shows a section along the line EE of Figure 17, wherein in addition sections of the locking units displacing piston rods are shown. Fig. 19 is a section along the line FF of Fig. 18 (the piston rods omitted);

Fig. 20 is an enlarged detail G of Fig. 19;

Fig. 21 is a section along the line HH of Fig. 18;

Fig. 22 is a section along the line II of Fig. 18;

Fig. 23 is a section along the line JJ of Fig. 18;

Fig. 24 is an enlarged detail K of Fig. 23;

FIG. 25 shows an oblique view from a view angle slightly different from FIG. 15, omitting the front wall of the valve body; FIG.

Fig. 26 is an enlarged detail L of Fig. 25;

27 shows a view of one of the walls of the valve body on the side facing the closure members;

28 shows a schematic representation of a vacuum system for processing a strip with valves according to the invention inserted therein.

A first embodiment of a vacuum valve according to the invention is shown in FIGS. 1 to 12.

The vacuum valve comprises a valve body 1 having first and second walls 2, 3 enclosing a gap 4 therebetween. The first wall 2 has a first opening 5 and the second wall 3 has a second opening 6. The openings 5 and 6 have the same shape and size and are in alignment with each other, wherein they have a longitudinal axis 8 having a passage 7 through the valve body Train 1. The first and second openings 5, 6 are slit-shaped, their longitudinal extent being substantially greater than their height, in particular more than 10 times larger.

In the intermediate space 4 a closure device 9 is arranged, which is formed in this embodiment of an annular seal of an elastic, in particular rubber-elastic material 33. As a rubber-elastic material known for sealing purposes in vacuum valves known material may be used, for example Viton.

The closure device 9 has first and second closure sections 10, 11, which each extend at least substantially parallel to the longitudinal extent of the slot-shaped opening 5, 6 or which are each parallel to the median plane 15 of the openings 5, 6, which are perpendicular to the straight line 12 lies, extend. The first and second closure sections 10, 11 are sealed against the mutually facing surfaces 13, 14 of the first and second walls 2, 3. In the area between the walls 2, 3 and the locations of the sealed installation of the closure sections 10, 11 on the walls 2, 3, the vacuum area of the vacuum valve is located.

In order to open and close the vacuum valve, the first and second closure sections 10, 11 are respectively displaced in opposite directions of a straight line 12, transversely, in particular at right angles, to the longitudinal extension of the first and second closure sections 10, 11 or to the longitudinal extent of the openings 5, 6 and parallel to the facing surfaces 13, 14 of the first and second wall, against which the closure portions 10, 1 1. Here, the closure portions 10, 1 1 sealed against the surfaces 13, 14 of the walls 2, 3 are moved. In the opened state of the vacuum valve, the two closure portions 10, 11 are on opposite sides of the passage 7 and give the closure portions 10, 1 1 the passage 7 preferably completely free, so do not cover in the direction of the longitudinal axis 8, the first and second opening. In the closed state of the vacuum valve, the first and second closure sections 10, 11 protrude from opposite sides into the passageway 7, sealing against each other over their entire longitudinal extent (see Figures 5, 6 and 10) or over part of their Longitudinally sealed against each other and sealed over part of its longitudinal extent on opposite side surfaces 16, 17 of a carried through the passage 7 band 18 abut (see Fig .. 8). The plane of the strip lies parallel to the longitudinal axis 8 and at right angles to the straight line 12. The extent of the strip 18 in the direction of the longitudinal extent of the slot-shaped openings 5, 6 can be different in size, for example more than half of this extent.

To form an overall circumferentially closed or annular closure device 9, the first and second closure sections 10, 11 are connected to one another by first and second side sections 19, 20. The side sections 19, 20 are formed integrally with the closure sections 10, 11 in this exemplary embodiment and consist of the same rubber-elastic material. The side portions 19, 20 are sealed to the mutually facing surfaces 13, 14 of the walls 2, 3 at. When closing the vacuum valve, the side portions 19, 20 are folded together, wherein they are sealed against each other in the closed state of the vacuum valve on both sides of the refolding.

The side portions 19, 20 are the portions of the closure device 9, which lie in the open and closed state of the vacuum valve with respect to the direction of the straight line 12 on both sides next to the openings 5, 6, so do not cover these openings 5, 6 even in the closed state of the vacuum valve ,

In the closed state of the vacuum valve without a performed through the passage 7 band 18 thus the closure portions 10, 1 1 are compressed and the side portions 19, 20 folded, as shown in FIGS. 5, 6 and 10 can be seen. But the closing of the vacuum valve can also be done in a previously performed through the passage 7 band 18, see. 7 and 8, wherein the closure portions 10, 1 1 over the region of the width of the passage 7 (= the region of the longitudinal extent of the openings 5, 6), over which the band 18 extends, to the opposite side surfaces 16, 17th of the tape are pressed. In areas next to the band 18, the closure portions 10, 11 are in turn pressed against each other. The closure sections 10, 11 extend transversely, in particular at right angles, to the longitudinal extent of the band 18.

For opening and closing the vacuum valve, the first and second closure sections 10, 11 are attached to plate-shaped first and second holding parts 21, 22, for example glued on. The arranged in the space 4 or projecting into this holding parts 21, 22 cooperate with the respective side facing away from the passage 7 of the respective closure portion 10, 11 together. The first and second holding parts 21, 22 are thus located outside the vacuum region of the vacuum valve. The holding parts 21, 22 are linearly displaceable by means of actuators 23-26 in the direction of the straight line 12. The actuators 23-26 may be formed, for example, as shown in the form of piston-cylinder units whose piston rods with the holding parts 21, 22nd are connected. Instead of the illustrated two actuators 23, 24; 25, 26 per holding part 21, 22 could be per holding part 21, 22, only one actuator or it could be more than two actuators per holding part 21, 22 may be provided. If, starting from the opened state of the vacuum valve, cf. Fig. 3, 4, 7 and 9, the vacuum valve is to be closed, the holding parts 21, 22 are approached to each other, wherein the closure sections 10, 1 1 together. When closing the closure sections 10, 1 1 and the side portions 19, 20, which were previously spaced from the end faces of the holding parts 21, 22, frontally to the holding parts 21, 22 in abutment and are folded by the holding parts 21, 22, in particular from the comparison of Figs. 9 and 10 can be seen. To open the vacuum valve, the holding parts 21, 22 are moved apart, they pull apart the attached to them closure portions 10, 1 1. The side sections 19, 20 can thereby unfold - in their preformed shape - also by their elastic restoring forces. The preformed shape of the side portions is continuously arcuate in the embodiment shown.

The one holding part 21 has stop elements 27, 28 which cooperate with stops of the wall 2. When, when closing the vacuum valve, the first holding part 21 and thus the first closing portion 10 has reached its intended end position, then the stop elements 27, 28 abut against the stops 29, 30. Preferably, the force of the holding member 21 moving actuators 23, 24 is greater than the force of the holding member 22 moving actuators 25, 26. The stop members 27, 28 are thereby also under the back pressure of the holding member 22 in abutment against the stops 29, 30 held , The desired force with which the closure device 9 is pressed in order to seal the passage 7 in the closed state of the vacuum valve is thus determined by the force with which the holding part 22 is acted upon by the actuators 25, 26 in the closed state of the vacuum valve.

In the embodiment shown, the stop elements 27, 28 are knob-shaped or pin-shaped and the stops 29, 30 are formed by edges of window recesses in the first and second walls 2, 3. Formations of stop elements and attacks in other forms are possible.

The closure device 9 thus simultaneously forms the dynamic seal for sealing the passage of the vacuum valve and a seal of the vacuum valve for sealing the vacuum region of the vacuum valve (further static seals for sealing the vacuum region of the vacuum valve may be present). A second embodiment of the invention is shown in FIGS. 13 and 14. The first and second closure portions 10, 1 1 of the closure device 9 are not continuously formed here from an elastic material in contrast to the embodiment previously shown but each have a rigid support body 31, 32, on which an elastic, in particular rubber-elastic material 33 is fixed. Again, a rubber elastic material can be used, as is known for sealing purposes in vacuum valves, for example Viton.

The elastic material 33 is sealed against the mutually facing surfaces 13, 14 of the first and second walls 2, 3. To close the vacuum valve, the two support bodies 31, 32 are displaced toward one another until the elastic materials 33 of the support bodies 31, 32 are pressed against one another or, if a band 18 passes through the passage 7, in the area of the band 18 against the opposite side surfaces 16 , 17 of the band 18 and in areas adjacent to the band 18 are pressed against each other.

Since the carrier bodies 31, 32 are rigid, actuators can act on them, without additional holding parts 21, 22 being required, as in the previously described embodiment. In the exemplary embodiment shown, the piston rods 34 of piston-cylinder units (not shown in FIGS. 13 and 14) engage the carrier bodies 31, 32.

Through the use of rigid carrier bodies 31, 32 with the elastic materials 33 arranged on them, the passage 7 can have a greater height, that is its dimension in the direction of the straight line 12.

The first and second closure sections 10, 11 of the closure device 9 are in turn connected by first and second side sections 19, 20 in order to form a closure device which is peripherally peripherally closed. For this purpose, the elastic materials 33 fixedly attached to the carrier bodies 31, 32 in the region of the closure sections 10, 11 are detached from the closure device 9 in the region of the side sections 19, 20, at least in a partial region following the respective side edge. The carrier bodies 31, 32 also extend over the region of the side sections or at least a part thereof, for example rectilinearly, and form pressing sections 48, 49 for the respective side section 19, 20. The elastic materials 33 form where they are directed toward the side edge detach from the carrier bodies 31, 32, first and second legs 37, 38 of the side sections 19, 20, which are connected to each other at the edge. These legs 37, 38 are each pressed by the Andrückabschnitten 48, 49 of the support body 31, 32 to each other when the vacuum valve is closed. For example, the legs 37, 38 each have a recess 35, 36 into which the pressing portions 48, 49 of the carrier body 31, 32 retract when closing the vacuum valve.

When closing the vacuum valve, the side portions 19, 20 of the closure device 9 are folded together, wherein the pressing portions 48, 49 of the support body 31, 32 compress the legs 37, 38 consisting of the elastic material 33. The parts of the vacuum valve not shown in the partial views of FIGS. 13 and 14 may be formed in an analogous manner as in the first embodiment of the vacuum valve.

Although this is not shown in Figs. 13 and 14, again with stops 29, 30 cooperating stop elements 27, 28 may be present to unambiguously fix the end position of one of the closure sections 10, 1 1 in the closed state of the vacuum valve. The stop elements 27, 28 can be arranged here, for example, on one of the carrier body 31, 32. The closing force in the closed state of the vacuum valve is then determined in an analogous manner as in the first embodiment by the force with which the other carrier body is pressed against the pressed against the stop elements carrier body.

A further embodiment of the invention is shown in FIGS. 15 to 27. In particular, the differences from the previously described embodiment will be explained below. Unwritten parts may be the same or analogous as in the embodiment described above.

The sealing of the closure device 9 with respect to the first and second walls 2, 3 takes place in this embodiment by elastic sealing rings 50, 51 which surround the first and second openings 5, 6 and on the respective wall 2, 3 on the side facing the closure device 9 are held. Preferably, the sealing rings 50, 51 are formed in the form of O-rings, which are arranged in grooves in the respective wall 2, 3. The sealing rings 50, 51 abut circumferentially on sealing surfaces of the closure device 9, which face the first and second walls 2, 3. In FIGS. 25 and 26, the sealing ring 50 is shown, so that this system can be seen. The first and second closure sections 10, 11 each have a rigid carrier body 31, 32, which has a base body and attachment pieces 52, 53 bolted thereto, which serve for connection to the respective side section 19, 20. The side portions 19, 20 have V-shaped support pieces 54,55 of an elastic material, which are vulcanized for connection to the closure portions 10, 11 to the mounting pieces 52, 53.

By way of the mutually facing end faces of the carrier bodies 31, 32, portions of first and second sealing rings 56, 57 run. For example, the sealing rings 56, 57 are in the form of O-rings and held in grooves on the end faces of the carrier bodies 31, 32. These sections of the sealing rings 56, 57 thus form an elastic material 33 of the respective closure section 10, 11.

The sealing rings 56, 57 further extend over the support pieces 54, 55, which may also have grooves for this purpose, in which the sealing rings 56, 57 extend.

The support pieces 54, 55 together with the extending over them portions of the sealing rings 56, 57 form in this embodiment, the side portions 19, 20. The two sealing rings 56, 57 lie in parallel, in the direction of the longitudinal axis 8 of the passage 7 spaced-apart planes.

When the vacuum valve is closed by pushing the carrier bodies 31, 32 together, the sections of the sealing rings 56, 57 that run over the carrier bodies 31, 32 are compressed or pressed against a band passed through the passage 7. The support pieces 54, 55 are folded and with them over their inner sides extending portions of the sealing rings 56, 57. For compressing the support pieces 54, 55 are Andrückabschnitte 48, 49, which are formed by lateral extensions of the main body of the support body 31, 32.

The support pieces 54, 55 may for example consist of Viton (FKM) or FFKM.

At least over a part of the width of the passage 7 (= longitudinal extent of the openings 5, 6) extend over the end faces of the support body 31, 32 between the sealing rings 56, 57 elongated elastic support members 58, 59. These can for example Sections of O-rings are formed, which are held in grooves in the support bodies 31, 32.

If in the closed state of the vacuum valve, a band 18 is performed through the passage 7, this is clamped by the support members 58, 59. The support members 58, 59 further limit the compression of the sealing rings 56, 57. Here, the free space that lies between the respective support member 58, 59 and the groove receiving it, smaller than the free space between the respective sealing ring 56, 57 and him receiving groove lies.

To improve the sealing function of the vacuum valve in its closed state, an intermediate suction between the two sealing rings 56, 57 may further be provided. In this case, at least one channel 60 extends through at least one of the carrier body 31, 32, which opens between the sealing rings 56, 57. Through this at least one channel 60, the space between the sealing rings 56, 57 can be pumped out.

The closure device 9 could also be provided with only one sealing ring 56, 57, wherein a Zwischenabsaugung deleted. Also, more than two sealing rings with one or more than one Zwischenabsaugung can be provided.

Support elements 58, 59 can also be omitted. The sealing rings 50, 51, 56, 57 may for example consist of Viton.

The support elements 58, 59 may for example consist of Viton.

The closure device 9 forms in all the described embodiments, the dynamic seal of the vacuum valve for sealing the passage of the vacuum valve in its closed state and at least one seal for sealing the vacuum region of the vacuum valve (further static seals for sealing the vacuum range of the vacuum valve can be provided).

In all the described embodiments, the closure device 9 comprises at least one circumferentially closed element made of an elastic material which, when the vacuum valve is open, extends around the passage 7 and from which opposite sections are compressed when the vacuum valve is closed. This compression takes place by rigid parts, which at least over extend the entire longitudinal extent of these opposite portions, in each case on the side facing away from the passage of the portion of the elastic member, are moved together against these opposite portions. All elastic materials provided for sealing and / or the supporting elements 58, 59 and / or the carrier pieces 54, 55 may also consist of another material suitable for this purpose as Viton (FKM), for example FFKM, EPDM or silicone.

When the vacuum valve is closed, the carrier bodies 31, 32 of the first and second closure sections 10, 11 and the carrier pieces 54, 55 of the side sections 19, 20 move relative to the sealing rings 50, 51 held on the first and second walls 2, 3 along sealing surfaces of the carrier body 31, 32 and support pieces 54, 55 are moved. In the open position of the closure device, the first and second closure sections 10, 11 are preferably retracted to such an extent that the passage 7 is not only completely released when viewed in the direction of its longitudinal axis 8 but the first and second closure sections 10, 11 are pulled back a little further are, for example 1 mm to 3 mm, so that the elastic materials of the closure device are protected, for example against the passing band 18, which can move in the passage perpendicular to its plane.

FIG. 28 schematically shows a vacuum system which is used for processing a belt 18 under vacuum conditions, for example for carrying out coatings. Such vacuum systems are used, for example, in the production of coated solar cells or LEDs. The belt 18 is unrolled from a first roller 39 and rolled up after processing on a second roller 40. It may in particular be a sheet in band form. The belt 18 is guided between the first and second rollers 39, 40 through at least one vacuum chamber 41, 42, 43, in which a processing step is performed. The rollers 39, 40 are arranged in separate vacuum chambers 44, 45, which are connected by the other vacuum chambers 41-43 each via a vacuum valve 46 according to the invention.

When the supply of the belt 18 in the roller 39 has been used up, the vacuum valve 46 is closed against the belt 18 and a new roller 39 is inserted, the beginning of the belt of that roller being at the end of the belt of the previous roller is connected. The vacuum chamber 44 is pumped off and the vacuum valve 46 is opened. The procedure is analogous if the roll 40 with the rolled-up processed strip is to be replaced by an empty roll. A flooding of the vacuum chambers 41-43 when changing the rollers 39, 40 can thus be avoided.

Between the vacuum chambers 41-43, in which processing steps are carried out, only connecting pieces 47 may be arranged or it may also, at least partially, according to the invention vacuum valves 46 may be arranged so that a service to one of these chambers 41-43 is made possible without the entire Flood system.

The thickness of the band 18, against which a vacuum valve according to the invention can be closed, is limited to the extent that the possible deformation of the closure sections 10, 11 or of the elastic material 33 of the closure sections 10, 11 is limited in the closed state of the vacuum valve and in FIG the areas laterally next to the belt sufficient compression of the closure portions 10, 1 1 must still be given. For example, the thickness of the band 18 can be up to 1 mm. Depending on the measured in the direction perpendicular to the plane of the tape thickness of the closure portions 10, 1 1 and arranged in the region of their end faces elastic material 33, a greater thickness of the band 18 can be made possible.

Legend

to the reference numbers:

1 valve body 31 carrier body

2 first wall 32 carrier body

3 second wall 33 elastic materia

4 gap 34 piston rod

5 first opening 35 recess

6 second opening 36 recess

7 passage 37 thighs

8 longitudinal axis 38 legs

9 Locking device 39 Roller

10 first closure portion 40 roll

11 second closure section 41 vacuum chamber

12 Just 42 vacuum chamber

13 Surface 43 Vacuum chamber

14 Surface 44 Vacuum chamber

15 median plane 45 vacuum chamber

16 side surface 46 vacuum valve

17 side surface 47 connector

18 Volume 48 Pressing section

19 first side section 49 pressing section

20 second side section 50 sealing ring

21 holding part 51 sealing ring

22 holding part 52 fixing piece

23 Actuator 53 Attachment piece

24 actuator 54 carrier piece

25 Actuator 55 Carrier piece

26 Actuator 56 Sealing ring

27 stop member 57 sealing ring

28 stop element 58 support element

29 stop 59 support element

30 stop 60 channel

Claims

Expectations

Comprehensive vacuum valve

a valve body (1) with first and second walls (2, 3), which have a space (4) between them and of which the first wall

(2) has a first opening (5) and the second wall (3) has a second opening (6), with a passage (7) having a longitudinal axis (8) through the first and second openings (5, 6) through the vacuum valve is trained, and

a closure device (9) located in the space (4) between the first and second walls (2, 3), of which the passage (7) through the valve body (1) can be closed in a closed position of the closure device and in an open position of the closure device at least is largely releasable and has the first and second closure sections (10, 11), which can each be moved in a sealed manner relative to the first and second walls (2, 3) and which at least largely release the passage (7) in the open state of the vacuum valve and for Closing the vacuum valve can be adjusted into positions in which they protrude from opposite sides of the passage (7) into the passage (7) and each partially cover it, the first and second closure sections (10, 11) being sealed against one another and/or are pressed against a band (18) passed through the passage (7) between them,

characterized in that the first closure section (10) and the second closure section (1 1) are connected to one another by first and second side sections (19, 20), the closure device (9) being designed to be closed overall.

Vacuum valve according to claim 1, characterized in that the first and second closure sections (10, 1 1) at least in the areas in which they are attached to each other and/or to the band passed through the passage (7) between them in the closed state of the vacuum valve (7). 18) are pressed, have an elastic material (33).

3. Vacuum valve according to claim 1 or 2, characterized in that to seal the first and second closure sections (10, 1 1) against the first and second walls (2, 3), the first and second closure sections (10, 11) at least in areas , in which they rest on the first and second walls (2, 3), have an elastic material (33) or on the respective wall (2, 3) an opening (5, 6) of the respective wall (2, 3) surrounding elastic sealing ring (50, 51) is arranged, which rests on sealing surfaces of the first and second closure sections (10, 1 1).

4. Vacuum valve according to claim 2 or 3, characterized in that the first and second closure sections (10, 1 1) consist overall of an elastic material (33).

5. Vacuum valve according to claim 4, characterized in that the first closure section (10) is attached to a first holding part (21) and the second closure section (11) to a second holding part (22), the first and second holding parts ( 21, 22) for adjusting the respective closure section (10, 11) can each be linearly displaced by at least one actuator (23-26) when opening and closing the vacuum valve.

6. Vacuum valve according to claim 5, characterized in that the respective holding part (21, 22) is plate-shaped and the respective closure section (10, 1 1) is fastened to the end face of it.

7. Vacuum valve according to one of claims 1 to 3, characterized in that the first and second closure sections (10, 1 1) each have a rigid support body (31, 32) on which elastic material (33) is arranged, which is in the Closed position of the vacuum valve is sealed against the elastic material (33) of the other closure section (10, 1 1) and / or pressed against a band (18) passed through the passage (7) between the closure sections (10, 1 1), the carrier - Body (31, 32) for opening and closing the vacuum valve can each be linearly displaced by at least one actuator (23-26).

8. Vacuum valve according to one of claims 1 to 7, characterized in that the side sections (19, 20) of the closure device (9) are each sealed against the first and second walls (2, 3), the closure device (9) being above their The entire circumference is sealed against the first and second walls (2, 3).

9. Vacuum valve according to claim 8, characterized in that a respective side section (19, 20) is folded together in the closed state of the vacuum valve, with two legs (37, 38) of the respective side section (19, 20) abutting against one another in a sealed manner, and that the side sections (19, 20) have an elastic material at least in the areas in which they are compressed by folding when the vacuum valve is closed.

10. Vacuum valve according to one of claims 1 to 9, characterized in that for sealing the first and second side sections (19, 20) of the closure device (9) against the first and second walls (2, 3), the first and second side sections ( 19, 20) have an elastic material at least in the areas in which they rest on the first and second walls (2, 3) or an elastic sealing ring (on the respective wall (2, 3) surrounding the respective opening in the wall ( 50, 51) is arranged, which rests on sealing surfaces of the first and second side sections (19, 20).

1 1. Vacuum valve according to one of claims 1 to 10, characterized in that the first and second side sections (19, 20) consist overall of an elastic material.

12. Vacuum valve according to one of claims 1 to 1 1, characterized in that over the mutually facing end faces of the support body (31, 32) and over elastic support pieces (54, 55) of the first and second side sections (19, 20), which with the carrier bodies (31, 32) are connected, at least one elastic sealing ring (56, 57) runs.

13. Vacuum valve according to claim 12, characterized in that two sealing rings (56, 57) spaced apart from one another in the direction of the longitudinal axis of the passage (7) over the mutually facing end faces of the carrier bodies (31, 32) and over which the carrier bodies (31, 32 ) connecting support pieces (54, 55) and that between these sealing rings (56, 57) there is at least one channel (60) running through at least one of the support bodies (31, 32) for suction between the sealing rings (56, 57) in the closed state of the vacuum valve.

14. Vacuum valve according to claim 13, characterized in that support elements (58, 59) made of elastic material extend at least over sections of the mutually facing end faces of the carrier bodies (31, 32), which in the closed state of the vacuum valve are attached to each other or to a through the The belt (18) carried out through the passage (7) is pressed.

15. Vacuum valve according to one of claims 1 to 14, characterized in that the position of one of the two closure sections (10, 1 1) in the closed state of the vacuum valve is determined by at least one stop (29, 30), on which at least one stop element ( 27, 28), the closing force being determined by the strength of the pressing of the other closure section (10, 11) against the closure section (10, 11) fixed in its position.