WO2010084618A1

WO2010084618A1 - Valve device

Info

Publication number: WO2010084618A1
Application number: PCT/JP2009/051198
Authority: WO
Inventors: 健博西場
Original assignee: 日本バルカー工業株式会社
Priority date: 2009-01-26
Filing date: 2009-01-26
Publication date: 2010-07-29

Abstract

Provided is a valve device which can maintain sealing performance over a long term by protecting a first seal member constituting a seal member against plasma or corrosive gas when a first port and a second port are in interconnected state. A valve device (10) comprises a housing (18) provided with a channel (16) connecting a first port (12) and a second port (14), a valve element (22) seated at the edge of an opening (M1) in the housing (18) or separated from the opening (M1) and opens/closes the first port (12), and a seal member (28) provided in the valve element (22), wherein the seal member (28) has a first seal member (30) consisting of an elastic member and sealing the opening (M1) airtightly, and a second seal member (32) composed of a material harder than that of the first seal member (30) and provided on the outside of the first seal member (30), and sections the first seal member (30) from the channel (16) when the valve element (22) is seated on the inner wall face (18A) where the opening (M1) of the housing (18) is not formed.

Description

Valve device

The present invention relates to a valve device applied to a flow path inside a housing connecting a first port and a second port.

Conventionally, for example, a housing provided with a first port for connecting to a vacuum chamber used in a plasma atmosphere and a second port for connecting to a vacuum pump, and a first port and a second port formed inside the housing are provided. A flow path connecting the ports, a valve body portion that is provided in the flow path and that sits on the edge of the opening of the housing that communicates with the first port or that is spaced apart from the opening to open and close the first port; 2. Description of the Related Art A valve device including a seal member provided on a body part is known (see Patent Document 1 below).

Here, the seal member is made of synthetic rubber, is formed in a ring shape having a substantially O-shaped cross section, and is a single seal member (see Patent Document 1 below).
JP-A-2005-30459

Incidentally, when the first port and the second port of such a valve device are in communication with each other, the seal member is exposed in the housing. For this reason, when the reaction gas in the vacuum chamber is exhausted, the sealing member is exposed to plasma, radicals, and corrosive gas, and is likely to deteriorate, resulting in a decrease in the original sealing performance.

Therefore, in consideration of the above circumstances, the present invention maintains the sealing performance by reliably protecting the sealing member from plasma, radicals, or corrosive gas even when the first port and the second port are in communication. It is an object of the present invention to provide a valve device that can prevent a decrease in sealing performance.

According to a first aspect of the present invention, there is provided a housing provided with a first port, a second port, and a flow path connecting the first port and the second port, and provided in the flow path and communicated with the first port. A valve body seated on the edge of the opening of the housing or spaced apart from the opening to open and close the first port; and the valve body is rotated about an axis of a rotation shaft The valve body is moved to a position opposed to the opening by 90 degrees, or the valve body is moved in a direction orthogonal to the axial direction of the rotating shaft to seat the valve body on the edge of the opening. A valve device comprising: a valve body drive unit; and a seal member that is provided in the valve body unit and hermetically seals the opening when the valve body is seated on an edge of the opening, The seal member is formed of an elastic member, and a first seal that hermetically seals the opening. A member and an outer surface of the first seal member, made of a material harder than the first seal member, and the valve body is seated on an inner wall surface where the opening of the housing is not formed. A second seal member that divides the first seal member from the flow path when the first port and the second port communicate with each other; A support member provided rotatably about an axis, an arm member connected to the valve body portion and moving in a direction orthogonal to an axial direction of the rotation shaft, and connected to the arm member, the support member Together with the arm member, the valve body portion can be rotated about the axis of the rotation axis, and the rotation axis of the rotation axis independently of the support member. By rotating around the axis, the valve body portion is moved to the arc. An eccentric shaft that is movable together with a member in a direction orthogonal to the axial direction of the rotation shaft, a drive source that rotates the eccentric shaft by applying a drive force, and a drive force of the drive source, A driving force transmission member that switches between an aspect that transmits to the support member via an eccentric shaft and a mode that does not transmit to the support member via the eccentric shaft, and the driving force transmission member includes the eccentricity A first gear that is attached to a shaft and rotates together with the eccentric shaft and has gear teeth formed over a predetermined arc, and gear teeth that mesh with the gear teeth of the first gear are formed and meshed with the first gear. In this state, the driving force applied from the driving source to the eccentric shaft by rotating together with the first gear is transmitted to the supporting member and the second gear. The gear teeth that are attached to and rotate with the support member and mesh with the gear teeth of the second gear are formed over a predetermined arc, and rotate with the second gear while meshing with the second gear. And a third gear to which a driving force applied to the eccentric shaft from the driving source is transmitted through the first gear and the second gear.

According to a second invention, in the valve device of the first invention, a cam member is provided on the second gear, and the cam member is pressed against the first gear as the first gear rotates. A position adjusting member for adjusting the position of the valve body portion with respect to the opening by rotating the third gear via the second gear is provided.

According to a third invention, in the valve device of the first invention, a cam member is provided in the second gear, and the gear teeth of the first gear and the gear teeth of the second gear are provided on the first gear. A restriction member is provided that prevents the second gear and the third gear from rotating by contacting the cam portion when the gears are not engaged with each other.

According to the first invention, when the first port and the second port are in communication with each other, the valve body portion has an inner wall surface in which the opening of the housing is not formed (hereinafter simply referred to as “inner wall surface”). Sit in a state. Here, when the valve body is seated on the inner wall surface of the housing, the first seal member is partitioned from the flow path inside the housing by the relatively hard second seal member located on the outside. In other words, the first seal member is not exposed to the atmosphere of the flow path. Thereby, the first seal member is not affected by the fluid flowing in the flow path (or drifting in the flow path), specifically, plasma, radicals, corrosive gas, or the like. As a result, the property of the first seal member as an elastic member can be maintained, and the deterioration of the sealing performance required for the first seal member can be prevented.

On the other hand, the second seal member is exposed to the fluid flowing through the flow path in order to protect the first seal member. However, since the second seal member is harder than the first seal member, durability to corrosive gas, plasma, etc. is improved even when exposed to severe environments such as corrosive gas and plasma. Deterioration of the second seal member can be prevented. At the same time, by preventing the second seal member from deteriorating, the first seal member can be reliably protected by the second seal member, and the sealing performance of the first seal member can be maintained over a long period of time.

Also, the driving force of the driving source is applied to the eccentric shaft, and the eccentric shaft and the first gear rotate together. In a state where the gear teeth of the first gear and the gear teeth of the second gear mesh with each other, the second gear also rotates as the first gear rotates. As a result, the driving force applied to the eccentric shaft from the driving source is transmitted to the second gear via the first gear. In the state where the gear teeth of the first gear and the gear teeth of the second gear are not meshed, even if the first gear rotates, the second gear does not rotate. For this reason, the driving force applied to the eccentric shaft from the driving source is not transmitted to the second gear via the first gear.

When the second gear rotates, the third gear rotates in a state where the gear teeth of the second gear and the gear teeth of the third gear are engaged. As the third gear rotates, the support member also rotates. As a result, the driving force applied to the eccentric shaft from the driving source is transmitted to the third gear via the first gear and the second gear. In the state where the gear teeth of the first gear and the gear teeth of the second gear are not engaged with each other, even if the first gear rotates, the second gear does not rotate. For this reason, the driving force applied to the eccentric shaft from the driving source is not transmitted to the third gear via the first gear and the second gear. As the support member rotates, the valve body also rotates and can move to a position facing the opening of the housing by 90 degrees.

On the other hand, when the driving force applied to the eccentric shaft from the driving source is not transmitted to the third gear via the first gear and the second gear, the support member does not rotate, and only the eccentric shaft is Rotate. In this case, when the eccentric shaft rotates, the arm member moves in a direction orthogonal to the axial direction of the rotation shaft. As a result, the valve body is seated on the edge of the opening of the housing or separated from the opening to open and close the first port.

As described above, by using the driving force transmission member, it is possible to freely switch between a mode in which the driving force applied to the eccentric shaft from the driving source is transmitted to the support member and a mode in which the driving force is not transmitted to the support member. . As a result, with a relatively simple and compact configuration, the moving operation with respect to the opening of the valve body and the opening / closing operation of the first port of the valve body can be realized as a series of operations.

According to the second invention, the position adjusting member presses the cam member as the first gear rotates, thereby rotating the third gear via the second gear to the opening of the valve body. The position is adjusted. In particular, by adopting a configuration in which the position adjustment member presses the cam member, the valve body is compared with a configuration in which the rotation stop position of the third gear is controlled by meshing between the gear teeth of the first gear and the second gear. The position adjustment accuracy with respect to the opening of the part can be increased (fine adjustment is possible).

According to the third invention, when the gear teeth of the first gear and the gear teeth of the second gear are not engaged with each other, if the movement of the center of gravity of the valve body portion occurs, the inertial force acts, and the eccentric shaft and The support member tries to rotate. When the eccentric shaft and the support member try to rotate, the gear teeth of the third gear and the gear teeth of the second gear mesh with each other, so the second gear also tries to rotate.

Therefore, the regulating member attached to the first gear and the cam member on the second gear side are brought into contact with each other to regulate the rotation of the cam member (the regulating member blocks the movement track of the cam member). Thereby, the rotation of the second gear is prevented, and at the same time, the rotation (interlocking) of the third gear and the support member engaged with the second gear is prevented. As a result, even when the center of gravity of the valve body portion is moved, the valve body portion can be prevented from rotating due to the contact between the regulating member and the cam member.

1 is a perspective view of a valve device according to a first embodiment of the present invention. It is explanatory drawing which showed the internal structure of the valve apparatus which concerns on 1st Embodiment of this invention. It is explanatory drawing which showed the internal structure from the direction orthogonal to FIG. 2 which is an internal structure of the valve apparatus which concerns on 1st Embodiment of this invention. It is a block diagram of the sealing member provided in the valve body part of the valve apparatus which concerns on 1st Embodiment of this invention. It is a perspective view of the valve body drive part of the valve apparatus which concerns on 1st Embodiment of this invention. It is a side view of the valve body drive part of the valve apparatus which concerns on 1st Embodiment of this invention. FIG. 3 is a configuration diagram between AA in FIG. 2. FIG. 3 is a configuration diagram between BB in FIG. 2. FIG. 3 is a configuration diagram between CC in FIG. 2. FIG. 3 is a configuration diagram between DD in FIG. 2. It is a block diagram when the valve body part of the valve apparatus which concerns on 1st Embodiment of this invention exists in the position seated on the inner wall face near the hole part of a housing. The position of the first gear (intermittent gear) and the second gear (intermediate gear) when the valve body of the valve device according to the first embodiment of the present invention is in a position seated on the inner wall surface near the hole of the housing. It is explanatory drawing which showed the relationship. It is a block diagram when the valve body part of the valve apparatus which concerns on 1st Embodiment of this invention exists in the position which opposes the inner wall face near the hole part of a housing. A to J are first gears from the position where the valve body portion of the valve device according to the first embodiment of the present invention faces the inner wall surface in the vicinity of the hole portion to the position just before moving to the position facing the opening of the housing ( It is explanatory drawing which showed the change of the positional relationship of an intermittent gear) and a 2nd gear (intermediate gear). The positional relationship of a 1st gear (intermittent gear) and a 2nd gear (intermediate gear) when the valve body part of the valve apparatus which concerns on 1st Embodiment of this invention moves to the position which opposes the opening part of a housing is shown. FIG. It is a block diagram when the valve body part of the valve apparatus which concerns on 1st Embodiment of this invention exists in the position which opposes the opening part of a housing. The positional relationship between the first gear (intermittent gear) and the second gear (intermediate gear) when the valve body of the valve device according to the first embodiment of the present invention is seated on the inner wall surface of the edge of the opening of the housing. It is explanatory drawing which showed. It is a block diagram when the valve body part of the valve apparatus which concerns on 1st Embodiment of this invention exists in the position seated on the inner wall surface of the edge part of the opening part of a housing.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Valve apparatus 12 1st port 14 2nd port 16 Flow path 18 Housing 22 Valve body part 24 Eccentric shaft (valve body drive part)
28 Seal Member 30 First Seal Member 32 Second Seal Member 34 Arm Member (Valve Drive Unit)
40 Intermittent gear (first gear, drive force transmission member)
41 Valve body drive part 42 Gear tooth 46 Drive motor (drive source, valve body drive part)
52 Support member (valve drive unit)
62 Restricting member 64 Driving force transmitting member (valve element driving portion)
66 Pressure portion 72 Position adjustment member 74 Intermediate gear (second gear, driving force transmission member)
76 Gear teeth 80 Cam member 82 Pressure acting portion 84 Output gear (third gear, driving force transmission member)
86 Gear teeth M1 Opening L Rotating shaft

Next, the valve device according to the first embodiment of the present invention will be described with reference to the drawings.

As shown in FIGS. 1 to 3, the valve device 10 includes a first port 12 for connection to a vacuum chamber used in a plasma atmosphere, a second port 14 for connection to a vacuum pump, and a first port 12. And a box-shaped housing 18 provided with a flow path 16 connecting the second port 14. The axis of the first port 12 and the axis of the second port 14 intersect at an opening angle of about 90 degrees (orthogonal), and the flow path 16 is formed inside the housing 18 to form the first port. 12 and the second port 14 are connected. Further, a concave hole 20 is formed in the inner wall surface 18A of the housing facing the second port 14. Although the hole 20 does not penetrate the housing 18 in the thickness direction, the hole 20 is formed in the inner wall surface 18A of the housing 18 so that the valve body 22 rotates when the valve body 22 rotates. It can prevent that the edge part of the part 22 and the inner wall face of the housing 18 interfere. Thus, when the valve body portion 22 rotates, it is defined as a rotation axis L of the valve body portion 22 (an axis that is coincident with or parallel to a central axis of an eccentric shaft (valve body drive portion) 24 described later). ) In the direction perpendicular to the axial direction (radial direction). As a result, the size (volume) of the housing 18 can be made as small as possible, and the valve device 10 can be downsized.

The valve body 22 is disposed in the flow path 16 formed inside the housing 18. An annular seal groove 26 is continuously formed on the surface of the valve body portion 22 in the circumferential direction. The width on the bottom side of the seal groove 26 is formed to be wider than the width on the opening side of the seal groove 26. A seal member 28 is fitted into the seal groove 26 (press-fitted or bonded).

Here, the configuration of the seal member 28 will be described in detail. That is, as shown in FIG. 4, the seal member 28 is a composite seal member in which the first seal member 30 and the second seal member 32 are combined. That is, the first seal member 30 is fitted in the seal groove 26 and is a seal member having a vacuum sealing performance. The first seal member 30 is made of rubber that is an elastic member (for example, synthetic rubber, natural rubber, fluororubber, etc.). Specifically, as the fluororubber, a vinylidene fluoride / hexafluoropropylene copolymer, fluoropolymer, Binary vinylidene fluoride rubbers such as vinylidene fluoride / trifluorochloroethylene copolymer, vinylidene fluoride / pentafluoropropylene copolymer, vinylidene fluoride / tetrafluoroethylene / hexafluoropropylene copolymer , Ternary vinylidene fluoride rubber such as vinylidene fluoride / tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer, vinylidene fluoride / tetrafluoroethylene / propylene copolymer, and tetrafluoroethylene / propylene copolymer Combined, thermoplastic fluoro rubber, etc. can be used That.

The second seal member 32 is assembled on the outside of the first seal member 30 and is a seal member having corrosion resistance gas resistance and plasma resistance.

The second seal member 32 is preferably made of a synthetic resin that is a harder material than the first seal member 30. Thereby, the durability of the second seal member 32 to corrosive gas, plasma, and the like is improved, and the entire first seal member 30 is protected by the second seal member 32. It is possible to prevent the sealing performance from deteriorating.

As the synthetic resin constituting the second seal member 32, one or more kinds of synthetic resins selected from fluororesin, polyimide resin, polyamideimide resin, polyetherimide resin, polyphenylene sulfide resin, polybenzimidazole resin, and polyetherketone resin are used. Preferably, it is configured.

The valve body portion 22 is seated on the inner wall surface 18B which is an edge portion of the opening portion M1 of the housing 18 communicating with the first port 12 by a method described later, and hermetically seals the opening portion M1. At this time, the protruding portion 30C of the first seal member 30 of the valve body portion 22 is pressed against the inner wall surface 18B, which is the edge portion of the opening M1, with a predetermined pressure and elastically deforms. Therefore, the opening M1 is hermetically sealed by the first seal member 30.

Here, the second seal member 32 is located outside the protruding portion 30C of the first seal member 30, and is pressed against the inner wall surface 18B, which is the edge of the opening M1, with a predetermined pressure. ing. Then, the second seal member 32 brings the first seal member 30 into a state of being partitioned from the flow path 16 of the housing 18. That is, the first seal member 30 is not exposed to the atmosphere in the flow path 16 but is strictly sealed from the fluid such as corrosive gas and plasma remaining in the flow path 16 by the second seal member 32. It is in a state.

Similarly to the above, in a state where the valve body portion 22 is seated on the inner wall surface 18A of the housing, which is the outer edge portion of the hole portion 20 of the housing 18, the protruding portion 30C of the first seal member 30 of the valve body portion 22 is It is elastically deformed by being pressed against the inner wall surface 18A of the housing 18 corresponding to the outer edge of the hole 20 of the housing 18 with a predetermined pressure. At the same time, the second seal member 32 is positioned outside the protruding portion 30C of the first seal member 30, and a predetermined pressure is applied to the inner wall surface 18A of the housing 18 corresponding to the outer edge portion of the hole portion 20 of the housing 18. Is pressed. The second seal member 32 divides the first seal member 28 from the flow path 16 of the housing 18, so that the first seal member 30 is free from the atmosphere (corrosive gas, plasma, etc.) in the flow path 16. It is not in a state exposed to the fluid), but is strictly sealed from the atmosphere in the flow path 16 by the second seal member 32. As described above, the second seal member 32 prevents the first seal member 30 from being deteriorated.

As shown in FIGS. 2, 3, 5, and 6, an arm member (valve body drive unit) 34 is connected to the valve body unit 22 by a fastener or the like. The arm member 34 extends in a direction orthogonal to the seal surface 22 A of the valve body portion 22. A through hole 36 is formed in the arm member 34, and the eccentric shaft portion 24 B of the eccentric shaft 24 is attached to the through hole 36. For this reason, when the eccentric shaft 24 rotates independently with respect to the support member 52 described later, the eccentric shaft portion 24B rotates while maintaining a predetermined diameter, and the arm member 34 is separated from the eccentric shaft portion 24B. It moves in the direction (radial direction) orthogonal to the axial direction of the central axis (rotation axis L) of the eccentric shaft 24 together with the valve body 22 in a pushed form.

The eccentric shaft 24 is provided on a shaft main body 24A that is coaxial with the rotation axis L of the rotation center, and one axial direction side of the shaft main body 24A, and is a predetermined distance from the center (axial center) of the shaft main body 24A. An eccentric shaft portion 24B whose center (axial center) is located at a distant portion and a concentric shaft portion 24C whose center (axial center) is located on the center (axial center) of the shaft main body portion 24A. A roller 38 is disposed on the outer periphery of the eccentric shaft portion 24B via a sliding bearing (not shown). And this eccentric shaft part 24A is mounted | worn with the through-hole 36 of the above-mentioned arm member 34 in the state which interposed the roller 38 on the outer periphery. For this reason, the eccentric shaft 24 is in a state of being mechanically connected to the valve body portion 22 via the arm member 34.

An intermittent gear (first gear, driving force transmission member) 40 that rotates together with the eccentric shaft 24 is attached to the concentric shaft portion 24C of the eccentric shaft 24. The intermittent gear 40 is formed in a disk shape having a relatively large diameter, and gear teeth 42 are formed on the outer peripheral surface over a predetermined arc. Specifically, the gear teeth 42 of the intermittent gear 40 are formed so as to be continuous along the outer peripheral surface over an arc in which the central angle of the intermittent gear 40 is 0 degree to less than 90 degrees. The gear teeth 42 of the intermittent gear 40 are configured to mesh with gear teeth 76 of an intermediate gear (second gear, driving force transmission member) 74 described later in a predetermined case.

A regulating member 62 is attached to the intermittent gear 40. The restricting member 62 includes a pressure portion 66 located in a region corresponding to another arc portion where the gear teeth 42 of the intermittent gear 40 are not formed. For this reason, the pressure part 66 is located in the site | part used as the same phase as the circular arc in which the gear tooth 42 is not formed among the outer peripheral surfaces of the intermittent gear 40. FIG.

Further, two position adjusting members 72 are attached to the intermittent gear 40. The position adjusting member 72 presses the pressure acting portion 82 of the cam member 80 to slightly rotate the cam member 80. As a result, the intermittent gear 40 and the intermediate gear 74 are engaged with each other, the intermediate gear 74 is rotated, and an output gear 84 described later that is engaged with the intermediate gear 74 is also rotated. As a result, the support member 52 rotates about the axis, the valve body 22 rotates, and the positioning of the valve body 22 with respect to the opening M1 or the hole 20 is completed. In this way, by pressing the pressure acting portion 82 of the cam member 80, the valve body portion 22 can be adjusted to the position when it is accurately rotated 90 degrees. For this reason, the position adjustment member 72 acts as a position adjustment function of the valve body 22. The position adjusting member 72 is provided in the vicinity of both ends of the arc of the gear teeth 42 of the intermittent gear 40.

Further, an intermediate gear (second gear) 74 is provided in the vicinity of the intermittent gear 40. The intermediate gear 74 is configured to be rotatable around the rotation shaft 78. Gear teeth 76 are continuously formed on the outer peripheral surface of the intermediate gear 74. The gear teeth 76 on the outer peripheral surface of the intermediate gear 74 mesh with the gear teeth 42 of the intermittent gear 40. Then, when one of the intermittent gear 40 or the intermediate gear 74 is rotated in a state where the

gear teeth

76 and 42 are engaged with each other, the other of the intermittent gear 40 or the intermediate gear 74 is rotated. For this reason, when the eccentric shaft 24 rotates, the intermittent gear 50 also rotates together with the eccentric shaft 24, and the intermediate gear 74 also rotates. Thus, the driving force applied from the drive motor 46 to the eccentric shaft 24 is transmitted to the intermediate gear 74 via the intermittent gear 40.

A cam member 80 is attached to the intermediate gear 74. The cam member 80 rotates with the rotation of the intermediate gear 74. The cam member 80 includes a pressure acting portion 82 that receives a predetermined pressure from the regulating member 62 and the position adjusting member 72. As shown in FIG. 9, the pressure acting portion 82 is configured at a position in contact with the position adjusting member 72 and the regulating member 62.

Further, as shown in FIG. 10, a driven gear portion 44 is attached to an end portion of the concentric shaft portion 24C. The driven gear portion 44 meshes with a drive gear portion 48 attached to a drive shaft 46A of a drive motor (drive source, valve body drive portion) 46 serving as a drive source, and the drive force of the drive motor 46 is driven by the drive gear. It is configured to be transmitted (applied) to the eccentric shaft 24 via the portion 48 and the driven gear portion 44. Thereby, when the driving force of the drive motor 46 is applied to the eccentric shaft 24, the eccentric shaft 24 rotates about the axis. The drive motor 46 is attached to the attachment plate 50.

Further, the drive motor 46 is appropriately positioned at a position where the valve body portion 22 faces the first port 12 or the hole portion 20 by a computer (not shown), or the inner wall surface 18B or the hole which is the edge portion of the opening portion M1. It is precisely controlled to properly seat on the inner wall surface 18A of the housing at the outer edge of the section 20.

The arm member 34 and the eccentric shaft 24 are accommodated in a support member (valve drive unit) 52. Inside the support member 52, a first accommodation space portion 54 extending in a direction orthogonal to the axial direction (the same direction as the axial direction of the central axis of the eccentric shaft 24) is formed at one end portion in the axial direction. The first accommodating space 54 accommodates the arm member 34 so as to be movable in a direction orthogonal to the axial direction (the same direction as the axial direction of the central axis of the eccentric shaft 24). Further, a bellows portion 56 is provided to extend and contract from the support member 52 to the valve body portion 22. The bellows portion 56 prevents the arm member 34 from being exposed to the outside air. Further, when the arm member 34 moves in a direction (for example, a radial direction) orthogonal to the axial direction of the central axis of the eccentric shaft 24, the bellows portion 56 expands and contracts.

A second accommodation space 58 extending in the axial direction is formed inside the support member 52. The eccentric housing 24 is housed in the second housing space 58 so as to be rotatable about the central axis. That is, the eccentric shaft 24 accommodated in the second accommodation space 58 can be rotated independently of the support member 52. Further, a bearing member 60 is disposed on the outer periphery of the support member 52 so that the support member 52 can be rotated about its axis.

Further, an output gear (third gear, driving force transmission member) 84 that rotates together with the support member 52 is attached to the outer periphery of the support member 52. The output gear 84 has gear teeth 86 formed on the outer peripheral surface over a predetermined arc. Specifically, the gear teeth 86 of the output gear 84 are formed along the outer peripheral surface over an arc whose central angle of the output gear 84 is in the range of 0 degrees to 180 degrees. As shown in FIGS. 7 and 8, the gear teeth 86 of the output gear 84 are configured to mesh with the gear teeth 76 of the intermediate gear 74. Therefore, when the intermediate gear 74 is rotated, the output gear 84 and the support member 52 are rotated, and the valve body portion 22 is also rotated. As a result, the driving force applied from the drive motor 46 to the eccentric shaft 24 can be reliably transmitted to the output gear 84 via the intermittent gear 40 and the intermediate gear 74.

As described above, the intermittent gear 40, the intermediate gear 74, and the output gear 84 transmit the driving force of the drive motor 46 to the support member 52 via the eccentric shaft 24, and the support member 52 via the eccentric shaft 24. It functions as a driving force transmission member 64 (see FIG. 5 and FIG. 6 (valve body drive unit)) that switches to a mode that does not transmit to the valve. Specifically, when the gear teeth 42 of the intermittent gear 40 and the gear teeth 76 of the intermediate gear 74 are engaged, and the gear teeth 76 of the intermediate gear 74 and the gear teeth 86 of the output gear 84 are engaged, the drive is performed. The driving force applied to the eccentric shaft 24 from the motor 46 is transmitted to the intermediate gear 74 via the intermittent gear 40. Then, the driving force transmitted to the intermediate gear 74 is transmitted to the output gear 84. In this state, the eccentric shaft 24 and the support member 52 rotate simultaneously, and the valve body 22 can be rotated. As a result, the valve body 22 can be moved between a position facing the opening M1 and a position facing the hole 20. On the other hand, when the gear teeth 42 of the intermittent gear 40 and the gear teeth 76 of the intermediate gear 74 are not engaged with each other, the driving force applied from the drive motor 46 to the eccentric shaft 24 is transmitted to the intermediate gear 74 and the output gear 84. Not. In this state, since only the eccentric shaft 24 rotates and the support member 52 does not rotate, the valve body portion 22 moves only in the direction orthogonal to the rotation axis L of the support member 52. As a result, the separation distance of the valve body portion 22 from the opening portion M1 or the hole portion 20 can be changed, and the opening portion M1 or the hole portion 20 can be closed or opened.

As shown in FIG. 1, a cover member 96 is provided from the flange portion 68 to the mounting plate 50.

Next, the operation of the valve device 10 according to the first embodiment of the present invention will be described.
In the following description, the valve body 22 is seated on the inner wall surface 18A of the housing at the outer edge of the hole 20 of the housing 18 (OPEN (open) state of the opening M1, see FIG. 11) as a reference (departure). Point).

11 and 12, the valve body 22 is seated on the inner wall surface 18A of the housing at the outer edge of the hole 20 of the housing 18, and the gear teeth 42 of the intermittent gear 40 and the intermediate gear 74 are The gear teeth 76 are not engaged with each other. For this reason, the driving force applied from the drive motor 46 to the eccentric shaft 24 is not transmitted to the support member 52 via the intermittent gear 40, the intermediate gear 74, and the output gear 84. As a result, only the eccentric shaft 24 rotates independently with respect to the support member 52.

Then, only the eccentric shaft 24 rotates about 180 degrees in the positive direction around the axis independently of the support member 52, so that the arm member 34 is rotated by the eccentric shaft portion 24 B of the eccentric shaft 24. The arm member 34 is moved (retracted) in the radial direction together with the valve body portion 22 because the arm member 34 is pushed toward the center side (radially inner side) of the housing 18. At this time, the arm member 34 and the valve body portion 22 have an eccentric amount of the eccentric shaft portion 24B (defined as a distance between the center of the rotation shaft L and the center of the eccentric shaft portion 24B) × 2 times the distance of the housing 18. Move to the center side. As a result, as shown in FIG. 13, the valve body portion 22 moves inward in the radial direction together with the arm member 34 by a distance that is twice the eccentric amount of the eccentric shaft portion 24 B, and opens the hole portion 20 of the housing 18. At the same time, it moves to a position facing the hole 20.

When only the eccentric shaft 24 rotates independently from the support member 52, the pressure portion 66 of the regulating member 62 attached to the intermittent gear 40 rotates while contacting the pressure acting portion 82 of the cam member 80. Move. Thereby, the rotation of the cam member 80 is restricted by the restriction member 62. Therefore, when an inertial force or the like is generated due to an external force acting on the valve body portion 22 (defined as an external force other than the external force acting from the arm member 34), the valve body portion 22 tries to rotate, Since the rotation of the intermediate gear 74 to which the member 80 is attached is restricted, and the output gear meshing with the intermediate gear 74 is also restricted from rotating, the rotation of the valve body portion 22 is prevented. As a result, the posture of the valve body 22 can be stabilized (accurate positioning can be performed) in a state where the gear teeth 42 of the intermittent gear 40 and the gear teeth 76 of the intermediate gear 74 are not engaged with each other.

When the valve body 22 is moved to a position facing the hole 20, the gear teeth 86 of the output gear 84 mesh with the gear teeth 76 of the intermediate gear 74 and the gear teeth 76 of the intermediate gear 74. The gear teeth 42 of the intermittent gear 40 are not engaged with each other.

Next, as shown in FIG. 13 and FIG. 14A to FIG. 14J, the eccentric shaft 24 and the support member 52 are moved forward by about 90 degrees with the support member 52 in a state where the valve body portion 22 is moved to a position facing the hole portion 20. By rotating in the direction, the arm member 34 moves in a direction orthogonal to the axial direction of the rotation axis L in response to the rotation operation of the eccentric shaft 24. At the same time, the support member 52 rotates about the rotation axis L in the positive direction by about 90 degrees. For this reason, the valve body 22 rotates with the rotation of the eccentric shaft 24 and the support member 52, and moves to a position facing the opening M 1 of the first port 12. As described above, the arm member 34 moves in a direction orthogonal to the axial direction of the rotation axis L as the eccentric shaft 24 rotates, but the support member 52 also rotates around the axis at the same time. Therefore, no change in position with respect to the support member 52 occurs. In other words, the valve body portion 22 does not protrude from the support member 52 and is not drawn into the support member 52. As a result, the valve body portion 22 can be rotated about the rotation axis L in the positive direction by 90 degrees and moved to a position facing the opening M 1 of the first port 12.

Here, the gear teeth 76 of the intermediate gear 74 and the gear teeth 42 of the intermittent gear 40 are not engaged with each other immediately before the eccentric shaft 24 rotates together with the support member 52 about 90 degrees in the positive direction. (State of FIG. 14J). Then, as shown in FIG. 15, when the eccentric shaft 24 rotates together with the support member 52 in the positive direction from the state, the position adjusting member 72 presses the pressure acting portion 82 of the cam member 80. To do. As a result, the intermediate gear 74 rotates in response to the pressure from the position adjusting member 72, and the output gear 84 that meshes with the gear teeth 76 of the intermediate gear 74 also rotates accordingly. And the support member 52 rotates and the valve body part 22 also rotates. As a result, as shown in FIG. 16, the valve body portion 22 accurately rotates by about 90 degrees. In this way, the valve body portion 22 rotates under the pressure from the position adjusting member 72 from immediately before it rotates 90 degrees to until it rotates 90 degrees. For this reason, the rotation of the valve body 22 can be finely adjusted, and the valve body 22 can be accurately rotated 90 degrees. Thus, the valve body 22 moves to a position that is parallel to the opening M1 of the first port 12.

In a state where the valve body portion 22 is moved to a position facing the opening M1, the gear teeth 42 of the intermittent gear 40 and the gear teeth 76 of the intermediate gear 74 are not engaged with each other. For this reason, the driving force applied from the drive motor 46 to the eccentric shaft 24 is not transmitted to the support member 52 via the intermittent gear 40, the intermediate gear 74, and the output gear 84. As a result, only the eccentric shaft 24 rotates independently with respect to the support member 52.

Then, as shown in FIG. 17, only the eccentric shaft 24 rotates in the positive direction by about 180 degrees around the axis independently of the support member 52, so that the arm member 34 becomes an eccentric shaft of the eccentric shaft 24. Since the portion 24B is pushed to the opening M1 side (radially outward) in a direction orthogonal to the axial direction of the rotation axis L, the arm member 34 moves radially outward together with the valve body portion 22. (Projects). At this time, the arm member 34 and the valve body portion 22 have an opening M1 corresponding to an eccentric amount of the eccentric shaft portion 24B (defined as a distance between the center of the shaft main body portion 24A and the center of the eccentric shaft portion 24B) × 2 times. Move to the side. As a result, as shown in FIG. 18, the valve body portion 22 moves radially outward together with the arm member 34 by a distance twice the eccentric amount of the eccentric shaft portion 24B, and the edge of the opening M1 of the housing 18 Seated on the inner wall surface 18B, which is a portion (a closed state of the opening M1).

Here, in a state where the valve body portion 22 is seated on the inner wall surface 18B which is the edge portion of the opening portion M1, the first seal member 20 and the second seal member 32 provided on the valve body portion 22 are the edges of the opening portion M1. It is in a state of being elastically deformed by being pressed by the inner wall surface 18B which is a portion. The opening M 1 is hermetically sealed by the first seal member 30.

Further, the gear teeth 42 of the intermittent gear 40 and the gear teeth 76 of the intermediate gear 74 are not engaged with each other in a state where the valve body portion 22 is seated on the inner wall surface 18B that is the edge of the opening M1. For this reason, the driving force applied from the drive motor 46 to the eccentric shaft 24 is not transmitted to the support member 52 via the intermittent gear 40, the intermediate gear 74, and the output gear 84. As a result, only the eccentric shaft 24 rotates independently with respect to the support member 52.

Next, when the eccentric shaft 24 rotates in the forward direction from the state where the valve body portion 22 is seated on the inner wall surface 18B that is the edge portion of the opening M1, the arm member 34 is rotated by the eccentric shaft portion 24B of the eccentric shaft 24. It is a direction orthogonal to the axial direction of the dynamic axis L and is pushed toward the center side (inner radial direction) of the housing 18. For this reason, the arm member 34 moves (retracts) in the radial direction together with the valve body portion 22. At this time, the arm member 34 and the valve body portion 22 have an eccentric amount of the eccentric shaft portion 24B (defined as a distance between the center of the shaft main body portion 24A and the center of the eccentric shaft portion 24B) × 2 times the distance of the housing 18. Move to the center side. As a result, as shown in FIG. 16, the valve body portion 22 moves radially inward along with the arm member 34 by a distance twice the eccentric amount of the eccentric shaft portion 24B, and the valve body portion 22 opens the opening M1. Move to a position opposite to.

Here, the gear teeth 42 of the intermittent gear 40 and the gear teeth 76 of the intermediate gear 74 are engaged with each other and the gear teeth of the intermediate gear 74 are moved in a state where the valve body 22 is moved to a position facing the opening M1. 76 and the gear teeth 86 of the output gear 84 mesh with each other. Therefore, the driving force applied from the drive motor 46 to the eccentric shaft 24 is transmitted to the support member 52 via the intermittent gear 40, the intermediate gear 74, and the output gear 84. As a result, the eccentric shaft 24 rotates together with the support member 52.

Then, when the eccentric shaft 24 rotates in the reverse direction by about 90 degrees from the state where the valve body portion 22 moves to the position facing the opening M1, the arm member 34 rotates the eccentric shaft 24. In response to this, it moves in a direction orthogonal to the axial direction of the rotation axis L. At the same time, the support member 52 rotates about the rotation axis L in the reverse direction by about 90 degrees. For this reason, as shown in FIG. 13, the valve body portion 22 rotates as the eccentric shaft 24 and the support member 52 rotate, and moves to a position facing the hole portion 20 of the housing 18. As described above, the arm member 34 moves in a direction orthogonal to the axial direction of the rotation axis L as the eccentric shaft 24 rotates, but the support member 52 also rotates around the axis at the same time. Therefore, no change in position with respect to the support member 52 occurs. In other words, the valve body portion 22 does not protrude from the support member 52 and is not drawn into the support member 52. As a result, the valve body 22 can be rotated in the opposite direction about the rotation axis L by about 90 degrees and moved to a position facing the hole 20 of the housing 18.

Here, the gear teeth 76 of the intermediate gear 74 and the gear teeth 42 of the intermittent gear 40 are not engaged with each other immediately before the eccentric shaft 24 rotates together with the support member 52 in the opposite direction by about 90 degrees. Become. From this state, when the eccentric shaft 24 rotates together with the support member 52 around the axis in the opposite direction, the position adjusting member 72 presses the pressure acting portion 82 of the cam member 80. As a result, the intermediate gear 74 rotates, and the output gear 84 meshing with the gear teeth 76 of the intermediate gear 74 also rotates accordingly. And the support member 52 rotates and the valve body part 22 also rotates. As a result, the valve body portion 22 accurately rotates by about 90 degrees. In this manner, the valve body portion 22 moves to a position parallel to the hole portion 20 of the housing 18.

The gear teeth 42 of the intermittent gear 40 and the gear teeth 76 of the intermediate gear 74 are not engaged with each other in a state where the valve body portion 22 faces the hole portion 20 of the housing 18. For this reason, the driving force applied from the drive motor 46 to the eccentric shaft 24 is not transmitted to the support member 52 via the intermittent gear 40, the intermediate gear 74, and the output gear 84. As a result, only the eccentric shaft 24 rotates independently with respect to the support member 52.

When the eccentric shaft 24 rotates in the reverse direction by about 180 degrees, the arm member 34 is in a direction orthogonal to the axial direction of the rotating shaft by the eccentric shaft portion 24B of the eccentric shaft 24 and is within the housing 18. Since it is pushed to the wall surface side (radially outward), the arm member 34 and the valve body 22 move radially outward. At this time, the arm member 34 and the valve body portion 22 move toward the inner wall surface side of the housing 18 by a distance twice the eccentric amount of the eccentric shaft portion 24B. As a result, as shown in FIG. 11, the valve body portion 22 moves radially outward together with the arm member 34 by a distance twice the eccentric amount of the eccentric shaft portion 24 B, and the outer edge portion of the hole portion 20 of the housing 18. Is seated on the inner wall surface 18A of the housing (opened state of the opening M1).

Here, as shown in FIGS. 4 and 11, when the valve body portion 22 is seated on the inner wall surface 18 A of the housing of the hole portion 20 of the housing 18, the seal member 28 provided on the valve body portion 22 is disposed in the housing 18. The inner wall surface 18A of the housing at the outer edge of the hole 20 is pressed and elastically deformed. Specifically, as described above, the first seal member 30 is located inside the seal member 28 and the second seal member 32 is located outside, and the first seal member 30 is located by the second seal member 32. Is fully protected. The first seal member 30 is completely isolated from the atmosphere of the flow path 16 of the housing 18 by the second seal member 32. Thus, since the corrosive gas or plasma that drifts in the flow path 16 does not contact the first seal member 30, the first seal member 30 is deteriorated by being adversely affected by the corrosive gas or plasma. Can be prevented. As a result, it is possible to prevent deterioration of the sealing performance of the first seal member 30 for hermetically sealing the opening M1 over a long period of time.

In addition, based on the above-described process, the opening / closing operation of the opening M1 is repeated as necessary.

As described above, according to the valve device 10 of the above embodiment, in the state where the first port 12 and the second port 14 are in communication, the valve body portion 22 is seated on the inner wall surface 18A of the housing, One seal member 30 is in a state of being isolated from the atmosphere (fluid) of the flow path 16 by the second seal member 32. For this reason, the first seal member 30 can be protected from corrosive gas, plasma, radicals, and the like that degrade the first seal member 30 with the fluid flowing through the flow path 16, and deterioration of the first seal member 30 can be prevented. . In this way, by preventing the first seal member 30 from deteriorating, the opening M1 is hermetically sealed even when the valve body 22 is seated on the inner wall surface 18B, which is the edge of the opening M1 of the housing 18. can do.

Here, the valve body portion 22 is driven by the arm member 34, the eccentric shaft 24, and the support member 52, and is seated on the inner wall surface 18 B that is an edge portion of the opening M 1 of the housing 18, or the hole portion 20 of the housing 18. Will be seated on the inner wall surface 18A of the housing at the outer edge. However, if the position of the valve body portion 22 with respect to the opening portion M1 of the housing 18 (the inner wall surface 18B of the housing 18) is shifted, the opening portion M1 of the housing 18 cannot be hermetically sealed. Can no longer function. Further, if the position of the valve body portion 22 with respect to the inner wall surface 18A of the housing at the outer edge portion of the hole portion 20 of the housing 18 is shifted, the first seal member 30 is moved by the second seal member 32 to the atmosphere (fluid). ), The first seal member 30 is deteriorated by corrosive gas, plasma, radicals, or the like.

When these causes are examined, the position of the valve element 22 is shifted from the opening M1 (inner wall surface 18B of the housing 18) (including the inclination of the valve element 22), or the valve element 22 There is an error that occurs in the valve body drive part 41 as a reason that the position shifts with respect to the inner wall surface 18A of the housing which is the outer edge part of the hole part 20 of the housing 18 (including the inclination of the valve body part 22). As an error of the valve body drive unit 41, an error due to backlash of each gear tooth can be considered. Further, if an error due to backlash of each

gear tooth

42, 76, 86 occurs, the driving force of the drive motor 46 is not reliably transmitted to the support member 52, and the support member 52 cannot be controlled to rotate with high accuracy. When the accuracy of the rotation control is lowered, the valve body portion 22 is inclined with respect to the opening portion M1 (inner wall surface 18B) of the housing 18 or the inner wall surface 18A of the housing which is the outer edge portion of the hole portion 20 of the housing 18. Thus, a problem similar to that in the case where an assembly error occurs with respect to the support member 52 of the eccentric shaft 24 occurs.

Therefore, the driving force applied to the eccentric shaft 24 from the driving motor 46 is transmitted to the support member 52 by using the driving force transmitting member 64 having a simple configuration including the intermittent gear 40, the intermediate gear 74, and the output gear 84. It is possible to accurately switch between the mode that is performed and the mode that is not transmitted to the support member 52. Thereby, the mode in which only the eccentric shaft 24 rotates and the mode in which the eccentric shaft 24 and the support member 52 rotate simultaneously can be accurately divided and controlled, and the mechanical error described above can be controlled. Correction can be made by accurate and easy control of the body drive unit 41.

In particular, when the valve body 22 is seated on the inner wall surface 18B that is the edge of the opening M1 (when the opening M1 is closed), the gear teeth 42 of the intermittent gear 40 and the gear teeth 76 of the intermediate gear 74 are used. And the pressure portion 66 of the regulating member 62 and the pressure acting portion 82 of the cam member 80 are in contact with each other. Due to this contact state, the cam member 80 is restricted from rotating by the restriction member 62. Therefore, when an inertial force or the like is generated due to an external force acting on the valve body portion 22 (defined as an external force other than the external force acting from the arm member 34), the valve body portion 22 tries to rotate, Since the rotation of the intermediate gear 74 to which the member 80 is attached is restricted, and the output gear meshing with the intermediate gear 74 is also restricted from rotating, the rotation of the valve body portion 22 is prevented. As a result, the posture of the valve body portion 22 can be stabilized (because accurate positioning can be performed), so that the drive control of the valve body portion 22 can be executed accurately.

Further, when the valve body 22 moves from a position facing the hole 20 to a position facing the opening M1, or from a position facing the opening M1 to a position facing the hole 20 from the position facing the opening M1. When moving, the valve body portion 22 rotates about 90 degrees around the axis together with the support member 52 and the eccentric shaft 24, but until just before turning 90 degrees, the position adjusting member 72 is rotated. Presses the pressure acting portion 82 of the cam member 80 to rotate the intermediate gear 74. As the intermediate gear 74 rotates, the output gear 84 meshing with the gear teeth 76 of the intermediate gear 74 also rotates. And the support member 52 rotates and the valve body part 22 also rotates. As a result, the valve body portion 22 accurately rotates by about 90 degrees. In this way, the valve body portion 22 can be moved to a position that is reliably parallel to the hole portion 20 of the housing 18 or the opening portion M1 of the first port 12.

With respect to this point, in the configuration in which the 90 degree rotation of the valve body 22 is realized only by meshing the gear teeth 42 of the intermittent gear 40 and the gear teeth 76 of the intermediate gear 74, the dimensional errors of the

gear teeth

42 and 76 are obtained. It is difficult to rotate the valve body 22 by exactly 90 degrees due to backlash. For this reason, the posture of the valve body portion 22 is deteriorated, and the valve body portion 22 is not parallel to the

inner wall surfaces

18A and 18B, and the first seal member 30 is exposed to the atmosphere of the flow path 16. Therefore, most of the rotation of the valve body portion 22 is realized only by meshing the gear teeth 42 of the intermittent gear 40 and the gear teeth 76 of the intermediate gear 74, and immediately before the valve body portion 22 rotates 90 degrees. By pressing the pressure acting portion 82 of the cam member 80 by the position adjusting member 72, the valve body portion 22 can be accurately rotated by 90 degrees. As a result, the position adjustment accuracy with respect to the hole 20 or the opening M1 of the valve body portion 22 can be increased, and as a result, when the valve body portion 22 is seated on the

inner wall surfaces

18A and 18B, the first seal member 30 can be reliably secured. Can be protected.

Claims

A housing provided with a first port, a second port, and a flow path connecting the first port and the second port;
A valve body portion that is provided in the flow path and that is seated on an edge of the opening of the housing that communicates with the first port or is spaced apart from the opening to open and close the first port;
The valve body is rotated around the axis of the rotation shaft and moved to a position facing the opening 90 degrees, or the valve body is moved in a direction perpendicular to the axial direction of the rotation shaft. A valve body drive unit for seating the valve body unit on an edge of the opening;
A seal member that is provided in the valve body portion and hermetically seals the opening when the valve body is seated on an edge of the opening;
A valve device comprising:
The sealing member is
A first seal member that is made of an elastic member and hermetically seals the opening;
The first seal member is provided outside and is made of a material harder than the first seal member, and the valve body is seated on an inner wall surface of the housing where the opening is not formed. A second seal member that divides the first seal member from the flow path when the port communicates with the second port;
Have
The valve body drive unit is
A support member provided to be rotatable about the axis of the rotation shaft;
An arm member connected to the valve body portion and moving in a direction orthogonal to the axial direction of the rotation shaft;
The valve member is connected to the arm member and rotated about the axis of the rotation shaft together with the support member, thereby enabling the valve body portion to rotate about the axis of the rotation axis together with the arm member. An eccentric shaft that enables the valve body portion to move in a direction orthogonal to the axial direction of the rotation shaft together with the arm member by rotating about the rotation shaft independently.
A drive source for applying a driving force to the eccentric shaft and rotating the eccentric shaft;
A driving force transmission member that switches between a mode in which the driving force of the driving source is transmitted to the support member via the eccentric shaft and a mode in which the driving force is not transmitted to the support member via the eccentric shaft;
Have
The driving force transmission member is
A first gear attached to the eccentric shaft and pivoting together with the eccentric shaft, and gear teeth formed over a predetermined arc;
A gear tooth meshing with the gear tooth of the first gear is formed, and the driving force applied to the eccentric shaft from the driving source by rotating together with the first gear while meshing with the first gear is A second gear transmitted via the first gear;
A gear tooth that is attached to the support member and rotates together with the support member and meshes with the gear teeth of the second gear is formed over a predetermined arc, and rotates with the second gear in a state of meshing with the second gear. A third gear that transmits a driving force applied to the eccentric shaft from the driving source via the first gear and the second gear by moving;
A valve device characterized by comprising:
A cam member is provided on the second gear,
The position of the valve body portion with respect to the opening portion is caused by rotating the third gear via the second gear by pressing the cam member with the rotation of the first gear to the first gear. The valve device according to claim 1, further comprising a position adjusting member for adjusting the position.
A cam member is provided on the second gear,
When the gear teeth of the first gear and the gear teeth of the second gear are not engaged with the first gear, the second gear and the third gear rotate by contacting the cam portion. 2. The valve device according to claim 1, further comprising a restricting member for blocking.