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WO2009065545A1 - The use of a binary coating comprising first and second different metallic elements - Google Patents

The use of a binary coating comprising first and second different metallic elements Download PDF

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Publication number
WO2009065545A1
WO2009065545A1 PCT/EP2008/009719 EP2008009719W WO2009065545A1 WO 2009065545 A1 WO2009065545 A1 WO 2009065545A1 EP 2008009719 W EP2008009719 W EP 2008009719W WO 2009065545 A1 WO2009065545 A1 WO 2009065545A1
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Prior art keywords
layer
accordance
coating
processes
graded
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PCT/EP2008/009719
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French (fr)
Inventor
Paul Peeters
Christian Strondl
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Hauzer Techno Coating Bv
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Publication of WO2009065545A1 publication Critical patent/WO2009065545A1/en

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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/02Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
    • C23C28/023Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material only coatings of metal elements only
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/16Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/02Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
    • C23C28/021Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material including at least one metal alloy layer
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/02Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
    • C23C28/028Including graded layers in composition or in physical properties, e.g. density, porosity, grain size
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/322Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/341Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one carbide layer
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/343Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one DLC or an amorphous carbon based layer, the layer being doped or not
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/347Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/36Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including layers graded in composition or physical properties

Definitions

  • the present invention relates to use of a binary coating including a layer of at least first and second different metallic elements in the form of Ti and Cr.
  • TiCr coatings are known per se. Thus DE 44 46 985 Al discloses the use of TiCr coating as a hard material layer on a steel substrate forming projections of a chuck for a dental cutting tool. It is not stated how the TiCr alloy is deposited.
  • WO 03/049086 describes the use of a 30nm thick TiCr layer as a non-magnetic interlayer in a recording medium having a substrate, a soft magnetic interlayer, the TiCr non-magnetic interlayer and a hard magnetic recording layer.
  • the purpose of the TiCr layer is to prevent magnetic interaction between the soft magnetic layer and the hard magnetic recording layer.
  • the substrate can be a suitable glass, ceramic, glass-ceramic polymeric material or a composite or laminate of these materials.
  • the soft magnetic layer can comprise a 50 to 400nm thick layer of Co, CoZr, CoZrCr, CoZrNb, CoFe, Fe, FeN, FeSiAl, FeSiAlN FeCoC etc.
  • the hard magnetic layer is typically a IOnm to 25nm thick layer of a Co based alloy including one or more of the elements selected from the group consisting of Cr, Fe, Ta, Ni, Mo, Pt, V, Nb, Ge, B and Pd, iron oxides or a (CoX/ Pd or Pt) n multilayer structure where n is an integer from about 10 to 25 each of the alternating thin layers of Co-based magnetic alloy is about 0.2 to
  • X is an element from the group consisting of Cr, Ta, B, Mo, Pt, W and Fe and each of the alternating Pd or Pt layers is about 0. lnm thick.
  • a DLC layer diamond like carbon
  • the object of the present invention is to propose a new use of such a binary coating.
  • a binary coating including a layer of at least first and second metallic elements in the form of Ti and Cr as a top layer or an underlayer for corrosion protection on a metallic substrate consisting of any one of iron, steel, aluminium or an aluminium alloy, magnesium or a magnesium alloy or brass or copper or Zamak or any die-cast material.
  • a TiCr underlayer when used with a preferred top layer system of a wear resistant material having a columnar structure can improve the mechanical properties since it breaks the columnar structure of the top layer system and gives a desirable smoother top surface (less cauliflower like) which in turn yields better wear resistance against mechanical wear, especially against abrasive wear. Furthermore it has been found that the TiCr binary coating, with or without a top layer or top layer system, has excellent properties as a corrosion protective layer. The reason seems to be that there are no voids where water or other liquids can leak through to initiate corrosion in the layer or layer system or corrosion of the substrate material.
  • the coating used preferably comprises either a layer of TiCr with a sub- stantially constant composition or a graded TiCR layer, e.g. a base layer (adhesion layer) of Cr and a layer of graded composition consisting of Cr and Ti with the proportion of Ti in the layer increasing from the interface with the base layer to a proportion of Ti greater than that of Cr at the boundary of the graded layer remote from the base layer.
  • a layer of TiCr with a sub- stantially constant composition or a graded TiCR layer e.g. a base layer (adhesion layer) of Cr and a layer of graded composition consisting of Cr and Ti with the proportion of Ti in the layer increasing from the interface with the base layer to a proportion of Ti greater than that of Cr at the boundary of the graded layer remote from the base layer.
  • graded TiCr layer Although the use of a graded TiCr layer is possible it is by no means essential. A binary layer with between typically 45 and 70% Cr, especially between 52 and 62% Cr, has been found to be satisfactory, i.e. a layer having a homogenous composition of TiCr rather than a graded composi- tion.
  • the boundary of the graded layer forms an interface to one or more further layers forming a top coating or top coating system respectively.
  • the one or more further layers can for example com- prise at least one layer of one or more of the following materials: carbon, DLC, nitrides, carbonitrides and carbides of Zr, Ti, Cr, Al or mixtures thereof as well as any known decorative or colored coatings.
  • the coating serves to protect the substrate from at least one of oxidation, sulfidation, acid corrosion and alkali corrosion, including saline corrosion.
  • Ti can be used as the first metallic component and Cr as the second metallic component but rather the first metallic component can be selected from the group comprising Al, Ti, Cr, Si and W whereas the sec- ond component can be selected from the group comprising Cr, Ni; Mo, Nb and B. All the pairs of metallic binary coatings recited above are electrically conductive.
  • the binary coating used for corrosion protection is present in at least one of amorphous, nanocrystalline or mixed nanocrystalline form. When used for corrosion protection it can have a thickness in the range from 50nm to lO ⁇ m.
  • nanocrystalline signifies crystals which are randomly orientated and have a size under IOnm, preferably in the size range between 2nm and IOnm, especially between 3nm and IOnm.
  • the thickness of the Cr base layer lies in the range from IOnm to 100 nm and the thickness of the graded layer lies in the range from 40nm to about lO ⁇ m.
  • the binary coating of the invention is preferably deposited by a PVD process, for example a PVD process such as a magnetron sputtering process, a HIPIMS process, another ion assisted sputtering process and a plasma assisted vapor deposition process, such as a plasma assisted CVD process (PACVD) or by a combined PVD and PACVD process.
  • a PVD process such as a magnetron sputtering process, a HIPIMS process, another ion assisted sputtering process and a plasma assisted vapor deposition process, such as a plasma assisted CVD process (PACVD) or by a combined PVD and PACVD process.
  • a PVD process such as a magnetron sputtering process, a HIPIMS process, another ion assisted sputtering process and a plasma assisted vapor deposition process, such as a plasma assisted CVD process (PACVD) or by a combined PVD and PACVD process
  • the deposition process for the top layer or some or all of the layers of a top layer system are selected from the group comprising PVD processes, CVD processes, plasma assisted PVD processes, plasma assisted CVD processes, electron beam vapor deposition processes, galvanic processes, powder coating processes, dying processes, chemical processes and painting processes.
  • the use of the binary coating of the invention as an underlayer is not restricted to PVD or CVD processes where similar processes are used to deposit the top layer or top layer system but instead the underlayer can basically be used with all kinds of top layers or top layer systems.
  • a metal substrate coated with the underlayer of the present invention can also be provided with a powder coating or plastic coating, e.g. as a decorative coating to color the sheet metal part.
  • a powder coating or plastic coating e.g. as a decorative coating to color the sheet metal part.
  • it can be dyed to color the part, for example to give it a particular sheen or can be painted using any of the known painting processes to provide a decorative finish.
  • Chemical processes can also be used, for example etching processes in order to improve the bond of the top layer or to chemically modify the top surface of the binary layer to obtain a specific color or desired function.
  • the coating and optionally any top layer or top layer system can also be subjected to a thermal treatment such as an annealing operation or to a chemical treatment such as an oxidation treatment.
  • the invention can be used for corrosion protection of a material used in a corrosive industrial environment such as in a chemical reaction apparatus or in a galvanic apparatus or on an electrically conductive element in a battery or fuel cell. It can also be used in corrosive environments such as underwater, especially when exposed to salt water, or with food processing machinery for acidic or alkaline food components or environments.
  • Fig. 1 a schematic cross-section through a substrate provided with a binary coating in accordance with the present teaching
  • Fig. 2 a schematic cross-section similar to that of Fig. 1 but used as an underlayer provided with a top layer
  • Fig. 3 a schematic cross-section similar to that of Fig. 1 but provided with a top layer system and
  • Fig. 4 a metastable phase diagram for the equilibrium between the liquid, bcc and amorphous phase of a graded TiCr layer.
  • a substrate 10 for example in the form of a sheet metal part of steel, which is coated on one surface with a binary coating 12 of TiCr in accordance with the present invention. It is possible to provide such coating on both sides of the sheet metal part and indeed on all sides of the sheet metal part if corrosion protection is re- quired on all sides. Moreover, the part need not be a sheet metal part but could be any metallic component which needs to be protected against corrosion.
  • the binary coating 12 more specifically comprises a base layer 14 of chromium which is used to provide good adhesion between the layer 16 of TiCr forming the upper part of the layer 12 and the steel substrate.
  • the proportion of Cr in the TiCr layer 16, which could be a graded TiCr layer but in this case is a homogenous TiCr layer is between 45 and 75% and preferably between 52 and 62%.
  • Fig. 2 shows a diagram similar to Fig. 1 but in this case a further layer 18 of, in this example, TiN is applied on top of the corrosion protection layer 12 in order to give the article a gold- coloured appearance, TiN being frequently used for this purpose in addi- tion to providing a hard surface which improves the abrasion resistance of the article concerned.
  • a thin layer of real gold (not shown) can be deposited on top of the layer 18.
  • Such a gold-plated article can be beneficial because if the relatively soft real gold layer wears away locally, the colour-matched TiN layer beneath it disguises the fact that the gold top layer has partly worn away.
  • Fig. 3 basically shows the same article as Fig. 2 provided with the binary coating 12 in accordance with the present invention, but in this case it has a top layer system 20, 22 provided for decorative purposes. More spe- cifically, the layer 20 could, for example, be a TiN layer and the layer 22 could be a gold layer.
  • the substrate would be cleaned prior to depositing the Cr layer. This can take place by a usual etching process in a magnetron sputtering plant or, if the coating apparatus used is a so-called HIPIMS apparatus, then cleaning of the substrate can also be carried out in a HIPIMS cleaning mode which is again well known per se.
  • the initial Cr base or adhesion layer 14 is crystalline, having a bcc A2 crystallographic structure.
  • the initial Cr base or adhesion layer 14 When intro-ucked as an alloying element into a Ti alloy it acts as a ⁇ -stabilizer and this allows the metastable formation of the ⁇ -Ti bcc phase, which is retained at room temperature providing the Cr concentration is higher than 7.4 at%.
  • a bcc A2 substitutional solid solution ( ⁇ -phase) a metastable B2 phase and a C 15 Laves phase within the compositional range.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

This application describes and claims the use of a binary coating including a layer of at least first and second metallic elements in the form of Ti and Cr as a top layer or an underlayer for corrosion protection on a metallic substrate consisting of any one of iron, steel, aluminium or an aluminium alloy, magnesium or a magnesium alloy or brass or copper or Zamak or any die-cast material.

Description

The use of a binary coating comprising first and second different metallic elements
The present invention relates to use of a binary coating including a layer of at least first and second different metallic elements in the form of Ti and Cr.
TiCr coatings are known per se. Thus DE 44 46 985 Al discloses the use of TiCr coating as a hard material layer on a steel substrate forming projections of a chuck for a dental cutting tool. It is not stated how the TiCr alloy is deposited.
In addition the use of a TiCr coating on a sintered aluminium alloy (Al- 12%Si-2%Fe-l%Zr-0.5%Mg-3%AlN by weight), more specifically on inner diameter surfaces of an inner rotor of a gear rotor set mounted on an oval drive shaft is disclosed in EP-A-0907023. The method of applying the coating which is intended to avoid wear and damage occurring is not dis- closed.
Finally WO 03/049086 describes the use of a 30nm thick TiCr layer as a non-magnetic interlayer in a recording medium having a substrate, a soft magnetic interlayer, the TiCr non-magnetic interlayer and a hard magnetic recording layer. The purpose of the TiCr layer is to prevent magnetic interaction between the soft magnetic layer and the hard magnetic recording layer. The substrate can be a suitable glass, ceramic, glass-ceramic polymeric material or a composite or laminate of these materials. The soft magnetic layer can comprise a 50 to 400nm thick layer of Co, CoZr, CoZrCr, CoZrNb, CoFe, Fe, FeN, FeSiAl, FeSiAlN FeCoC etc. The hard magnetic layer is typically a IOnm to 25nm thick layer of a Co based alloy including one or more of the elements selected from the group consisting of Cr, Fe, Ta, Ni, Mo, Pt, V, Nb, Ge, B and Pd, iron oxides or a (CoX/ Pd or Pt)n multilayer structure where n is an integer from about 10 to 25 each of the alternating thin layers of Co-based magnetic alloy is about 0.2 to
0.35nm thick, X is an element from the group consisting of Cr, Ta, B, Mo, Pt, W and Fe and each of the alternating Pd or Pt layers is about 0. lnm thick. A DLC layer (diamond like carbon) can also be provided as a protective overcoat layer, i.e. providing wear resistance.
The object of the present invention is to propose a new use of such a binary coating.
In accordance with the present invention there is provided a novel use of a binary coating including a layer of at least first and second metallic elements in the form of Ti and Cr as a top layer or an underlayer for corrosion protection on a metallic substrate consisting of any one of iron, steel, aluminium or an aluminium alloy, magnesium or a magnesium alloy or brass or copper or Zamak or any die-cast material.
It has surprisingly been found that a TiCr underlayer, when used with a preferred top layer system of a wear resistant material having a columnar structure can improve the mechanical properties since it breaks the columnar structure of the top layer system and gives a desirable smoother top surface (less cauliflower like) which in turn yields better wear resistance against mechanical wear, especially against abrasive wear. Furthermore it has been found that the TiCr binary coating, with or without a top layer or top layer system, has excellent properties as a corrosion protective layer. The reason seems to be that there are no voids where water or other liquids can leak through to initiate corrosion in the layer or layer system or corrosion of the substrate material.
The coating used preferably comprises either a layer of TiCr with a sub- stantially constant composition or a graded TiCR layer, e.g. a base layer (adhesion layer) of Cr and a layer of graded composition consisting of Cr and Ti with the proportion of Ti in the layer increasing from the interface with the base layer to a proportion of Ti greater than that of Cr at the boundary of the graded layer remote from the base layer.
Although the use of a graded TiCr layer is possible it is by no means essential. A binary layer with between typically 45 and 70% Cr, especially between 52 and 62% Cr, has been found to be satisfactory, i.e. a layer having a homogenous composition of TiCr rather than a graded composi- tion.
When used as an underlayer the boundary of the graded layer forms an interface to one or more further layers forming a top coating or top coating system respectively. The one or more further layers can for example com- prise at least one layer of one or more of the following materials: carbon, DLC, nitrides, carbonitrides and carbides of Zr, Ti, Cr, Al or mixtures thereof as well as any known decorative or colored coatings.
The coating serves to protect the substrate from at least one of oxidation, sulfidation, acid corrosion and alkali corrosion, including saline corrosion.
Not only Ti can be used as the first metallic component and Cr as the second metallic component but rather the first metallic component can be selected from the group comprising Al, Ti, Cr, Si and W whereas the sec- ond component can be selected from the group comprising Cr, Ni; Mo, Nb and B. All the pairs of metallic binary coatings recited above are electrically conductive.
The binary coating used for corrosion protection is present in at least one of amorphous, nanocrystalline or mixed nanocrystalline form. When used for corrosion protection it can have a thickness in the range from 50nm to lOμm. As used herein the term "nanocrystalline" signifies crystals which are randomly orientated and have a size under IOnm, preferably in the size range between 2nm and IOnm, especially between 3nm and IOnm.
More specifically, when used with a base layer of Cr the thickness of the Cr base layer lies in the range from IOnm to 100 nm and the thickness of the graded layer lies in the range from 40nm to about lOμm.
The binary coating of the invention is preferably deposited by a PVD process, for example a PVD process such as a magnetron sputtering process, a HIPIMS process, another ion assisted sputtering process and a plasma assisted vapor deposition process, such as a plasma assisted CVD process (PACVD) or by a combined PVD and PACVD process.
In addition the deposition process for the top layer or some or all of the layers of a top layer system are selected from the group comprising PVD processes, CVD processes, plasma assisted PVD processes, plasma assisted CVD processes, electron beam vapor deposition processes, galvanic processes, powder coating processes, dying processes, chemical processes and painting processes.
Thus the use of the binary coating of the invention as an underlayer is not restricted to PVD or CVD processes where similar processes are used to deposit the top layer or top layer system but instead the underlayer can basically be used with all kinds of top layers or top layer systems. Thus a metal substrate coated with the underlayer of the present invention can also be provided with a powder coating or plastic coating, e.g. as a decorative coating to color the sheet metal part. Alternatively it can be dyed to color the part, for example to give it a particular sheen or can be painted using any of the known painting processes to provide a decorative finish. Chemical processes can also be used, for example etching processes in order to improve the bond of the top layer or to chemically modify the top surface of the binary layer to obtain a specific color or desired function.
The coating and optionally any top layer or top layer system can also be subjected to a thermal treatment such as an annealing operation or to a chemical treatment such as an oxidation treatment.
The invention can be used for corrosion protection of a material used in a corrosive industrial environment such as in a chemical reaction apparatus or in a galvanic apparatus or on an electrically conductive element in a battery or fuel cell. It can also be used in corrosive environments such as underwater, especially when exposed to salt water, or with food processing machinery for acidic or alkaline food components or environments.
The invention and a possible method of applying a binary coating in accordance with the invention will now be explained in further detail by way of example and with reference to specific embodiments as illustrated in the accompanying drawings in which are shown:
Fig. 1 a schematic cross-section through a substrate provided with a binary coating in accordance with the present teaching, Fig. 2 a schematic cross-section similar to that of Fig. 1 but used as an underlayer provided with a top layer,
Fig. 3 a schematic cross-section similar to that of Fig. 1 but provided with a top layer system and
Fig. 4 a metastable phase diagram for the equilibrium between the liquid, bcc and amorphous phase of a graded TiCr layer.
Turning now to Fig. 1 there can be seen a substrate 10, for example in the form of a sheet metal part of steel, which is coated on one surface with a binary coating 12 of TiCr in accordance with the present invention. It is possible to provide such coating on both sides of the sheet metal part and indeed on all sides of the sheet metal part if corrosion protection is re- quired on all sides. Moreover, the part need not be a sheet metal part but could be any metallic component which needs to be protected against corrosion. In this example the binary coating 12 more specifically comprises a base layer 14 of chromium which is used to provide good adhesion between the layer 16 of TiCr forming the upper part of the layer 12 and the steel substrate. The proportion of Cr in the TiCr layer 16, which could be a graded TiCr layer but in this case is a homogenous TiCr layer is between 45 and 75% and preferably between 52 and 62%.
If it is a graded layer then the percentage of Cr preferably reduces from About 100% at the interface between layers 14 and 16 to about 52 to 62% at the free surface of the layer 16. Fig. 2 shows a diagram similar to Fig. 1 but in this case a further layer 18 of, in this example, TiN is applied on top of the corrosion protection layer 12 in order to give the article a gold- coloured appearance, TiN being frequently used for this purpose in addi- tion to providing a hard surface which improves the abrasion resistance of the article concerned. If desired a thin layer of real gold (not shown) can be deposited on top of the layer 18. Such a gold-plated article can be beneficial because if the relatively soft real gold layer wears away locally, the colour-matched TiN layer beneath it disguises the fact that the gold top layer has partly worn away.
Fig. 3 basically shows the same article as Fig. 2 provided with the binary coating 12 in accordance with the present invention, but in this case it has a top layer system 20, 22 provided for decorative purposes. More spe- cifically, the layer 20 could, for example, be a TiN layer and the layer 22 could be a gold layer.
As is usual, when manufacturing the layer system 12 of Fig. 1 by a PVD process, the substrate would be cleaned prior to depositing the Cr layer. This can take place by a usual etching process in a magnetron sputtering plant or, if the coating apparatus used is a so-called HIPIMS apparatus, then cleaning of the substrate can also be carried out in a HIPIMS cleaning mode which is again well known per se.
Analysis of the deposited coatings 14 and 16 have shown the following when the coating 16 is realized as a coating of TiCr of graded composition:
It appears from HR-TEM analysis that the initial Cr base or adhesion layer 14 is crystalline, having a bcc A2 crystallographic structure. When intro- duced as an alloying element into a Ti alloy it acts as a β-stabilizer and this allows the metastable formation of the β-Ti bcc phase, which is retained at room temperature providing the Cr concentration is higher than 7.4 at%. In the compositional range of a Cr-Ti solid solution one expects a bcc A2 substitutional solid solution (β-phase), a metastable B2 phase and a C 15 Laves phase within the compositional range. Nevertheless, it has been observed that Ti-Cr solid solutions can undergo inverse melting (solid state amorphization, SSA) after high temperature annealing of mechanically alloyed samples and sputtered films. For the Ti-Cr system used here it appears that the metastable phase diagram shown in Fig. 4 ap- plies. This indicates that, when varying the composition from a Cr-rich to a Ti-rich Ti-Cr solid solution, phase transitions are expected to occur as follows:
Cr-rich β— * amorphous + β → amorphous — * amorphous + β -→ Ti-rich β,
where the pure amorphous phase is expected at around 48 at.% Ti concentration. A progressive variation of the lattice constant seems to occur within the A2 crystal in areas which are progressively rich in Ti and finally the interlayer loses its crystallinity at a Ti concentration at around 60 at.%. It may be that these changes in composition are also in some way responsible for the dense Ti-Cr structure having no voids which ensures that, for example, water or other liquids and gases cannot readily reach the substrate and lead to corrosion there.

Claims

What we claim is:
1. Use of a binary coating including a layer of at least first and second different metallic elements in the form of Ti and Cr as a top layer or an underlayer for corrosion protection on a metallic substrate consisting of any one of iron, steel, aluminium or an aluminium alloy, magnesium or a magnesium alloy or brass or copper or Zamak or any die-cast material.
2. Use in accordance with claim 1 wherein the coating comprises either a layer of TiCr with a substantially constant composition or a graded TiCR layer, e.g. a base layer (adhesion layer) of Cr and a layer of graded composition consisting of Cr and Ti with the proportion of Ti in the layer increasing from the interface with the base layer to a proportion of Ti greater than that of Cr at the boundary of the graded layer remote from the base layer.
3. Use in accordance with claim 2 wherein the proportion of Ti at the said boundary comprises essentially 90 to 100% excluding impurities.
4. Use in accordance with claim 2 or claim 3 wherein the boundary of the graded layer comprises a free surface of the coated substrate.
5. Use in accordance with claim 1 or claim 2 wherein the boundary of the graded layer forms an interface to one or more further layers forming a top coating or top coating system respectively.
6. Use in accordance with claim 5 wherein said one or more further layers comprises at least one layer of one or more of the following materials: carbon, DLC, nitrides, carbonitrides and carbides of Zr, Ti, Cr, Al or mixtures thereof as well as any known decorative or colored coatings.
7. Use in accordance with any one of the preceding claims wherein the binary coating serves to protect the substrate from at least one of oxidation, sulfidation, acid corrosion and alkali corrosion, including saline corrosion.
8. Use in accordance with any one of the preceding claims wherein the binary coating is present in at least one of amorphous, nanocrystal- line or mixed amorphous and nanocrystalline form.
9. Use in accordance with any one of the preceding claims wherein the binary coating has a thickness in the range from 50 nm to 10 μm.
10. Use in accordance with claim 2 wherein the thickness of the Cr base layer lies in the range from 10 nm to 100 nm and the thickness of the graded layer lies in the range from 40 nm to about 10 μm.
11. Use in accordance with any one of the preceding claims of a coating deposited by a PVD process, or by a plasma assisted CVD process (PACVD) or by a combined PVD and PACVD process.
12. Use in accordance with claim 11, wherein the PVD process is one of magnetron sputtering, a HIPIMS process, another ion assisted sputtering process and a plasma assisted vapor deposition process.
13. Use in accordance with claim 5, wherein the deposition process for the top layer or some or all of the layers of a top layer system are selected from the group comprising PVD processes, CVD processes, plasma assisted PVD processes, plasma assisted CVD processes, electron beam vapor deposition processes, galvanic processes, powder coating processes, dying processes, chemical processes and painting processes.
14. Use in accordance with any one of the preceding claims wherein the coating and optionally any top layer or top layer system has been subjected to a thermal treatment such as an annealing operation or to a chemical treatment such as an oxidation treatment.
15. Use in accordance with any one of the preceding claims for corro- sion protection of a material used in a corrosive industrial environment such as in a chemical reaction apparatus or in a galvanic apparatus or on an electrically conductive element in a battery or fuel cell.
16. Use substantially as herein described with reference to and as illustrated in the accompanying drawings.
PCT/EP2008/009719 2007-11-19 2008-11-17 The use of a binary coating comprising first and second different metallic elements WO2009065545A1 (en)

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