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WO2008143347A1 - Gmr sensor - Google Patents

Gmr sensor Download PDF

Info

Publication number
WO2008143347A1
WO2008143347A1 PCT/JP2008/059548 JP2008059548W WO2008143347A1 WO 2008143347 A1 WO2008143347 A1 WO 2008143347A1 JP 2008059548 W JP2008059548 W JP 2008059548W WO 2008143347 A1 WO2008143347 A1 WO 2008143347A1
Authority
WO
WIPO (PCT)
Prior art keywords
gmr
gmr elements
magnet
sensor
elements
Prior art date
Application number
PCT/JP2008/059548
Other languages
French (fr)
Japanese (ja)
Inventor
Makito Takigawa
Masao Kasashima
Original Assignee
Alps Electric Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alps Electric Co., Ltd. filed Critical Alps Electric Co., Ltd.
Publication of WO2008143347A1 publication Critical patent/WO2008143347A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measuring Magnetic Variables (AREA)

Abstract

To ensure stable sensor output at a plurality of levels. A GMR sensor is provided with a plurality of GMR elements (12, 13) each of which has a free layer whose magnetization direction changes due to an external magnetic field; and a magnet (21) which horizontally moves in the vicinity of the GMR elements (12, 13) in a fixed direction. In the GMR sensor, the GMR elements (12, 13) are arranged in the moving direction of the magnet (21) at a prescribed interval. GMR elements (12a, 12b, 13a, 13b) obtained after dividing the GMR elements (12, 13) are arranged in the moving direction of the magnet (21) at prescribed intervals.
PCT/JP2008/059548 2007-05-24 2008-05-23 Gmr sensor WO2008143347A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-138291 2007-05-24
JP2007138291 2007-05-24

Publications (1)

Publication Number Publication Date
WO2008143347A1 true WO2008143347A1 (en) 2008-11-27

Family

ID=40032029

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/059548 WO2008143347A1 (en) 2007-05-24 2008-05-23 Gmr sensor

Country Status (1)

Country Link
WO (1) WO2008143347A1 (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5118146U (en) * 1974-07-26 1976-02-09
JPS63315910A (en) * 1987-06-19 1988-12-23 Nikon Corp Magnetic head for magnetic encoder
JPH08122095A (en) * 1994-10-25 1996-05-17 Sony Magnescale Inc Position detector
JP2004117367A (en) * 2003-10-10 2004-04-15 Yamaha Corp Magnetic sensor and method of manufacturing the same
JP2006023179A (en) * 2004-07-08 2006-01-26 Tdk Corp Magnetic position detection device
JP2007085980A (en) * 2005-09-26 2007-04-05 Mitsubishi Electric Corp Magnetic field detector and manufacturing method therefor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5118146U (en) * 1974-07-26 1976-02-09
JPS63315910A (en) * 1987-06-19 1988-12-23 Nikon Corp Magnetic head for magnetic encoder
JPH08122095A (en) * 1994-10-25 1996-05-17 Sony Magnescale Inc Position detector
JP2004117367A (en) * 2003-10-10 2004-04-15 Yamaha Corp Magnetic sensor and method of manufacturing the same
JP2006023179A (en) * 2004-07-08 2006-01-26 Tdk Corp Magnetic position detection device
JP2007085980A (en) * 2005-09-26 2007-04-05 Mitsubishi Electric Corp Magnetic field detector and manufacturing method therefor

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