WO2008023560A1

WO2008023560A1 - Double arm robot

Info

Publication number: WO2008023560A1
Application number: PCT/JP2007/065244
Authority: WO
Inventors: Satoshi Sueyoshi; Kentaro Tanaka; Shinichi Ishikawa
Original assignee: Kabushiki Kaisha Yaskawa Denki
Priority date: 2006-08-21
Filing date: 2007-08-03
Publication date: 2008-02-28
Also published as: TWI325360B; CN101506963B; TW200829398A; JP4221733B2; CN101506963A; JPWO2008023560A1; KR20090020556A; KR101073275B1

Abstract

A double arm robot having double arms vertically movable independent of each other, having a compact column achieved by controlling the distance between upper and lower support members to an appropriate range, having a reduced installation area and swing radius, and in which adverse effect to a workpiece by operation of the upper and lower members is minimized. The double arm robot (1) has two support members (101, 102) for individually supporting two multi-joint arms arranged in a top- bottom relationship and also has a movement mechanism (11) for connecting the two support members so that they are independently movable in the top-bottom direction along the column (12). When either or both of the two support members (101, 102) move up and down, the distance between the two support members (101, 102) in the top-bottom direction is increased, and when the distance reaches a first predetermined value, the up-down movement of the two support members (101, 102) is stopped.

Description

Specification

Double-arm robot technology

TECHNICAL FIELD [0001] The present invention relates to a robot having an arm for taking in and out a thin plate-like workpiece such as a glass substrate or a semiconductor wafer with a stock force, and more particularly to a double arm type robot having two arms.

Background art

[0002] Conventionally, robots have been widely used for conveying glass substrates and semiconductor wafers! Particularly in recent years, as glass for liquid crystal panels and PDPs (Plasma Display Panels) grows in size, the tendency to increase the size of robots that transport them is also remarkable.

Under these circumstances, a double-arm robot with two arms for mounting and transporting a workpiece that saves the robot space and improves transport efficiency and throughput is used.

In particular, by adopting a double-arm robot with two arms installed at different heights in the vertical direction, one arm carries workpieces into stock force while the other arm carries work from another shelf with stock force. The transfer efficiency can be improved by unloading the robot, and the space required for robot installation can be reduced by arranging the two arms so as to overlap each other in the vertical direction. (For example, Patent Document 1).

[0003] FIG. 7 shows a double-arm robot of Patent Document 1. The double arm type bot of Patent Document 1 has a mechanism in which two arms are connected to one support member to move up and down, so the vertical distance between the two arms is constant and the two arms move up and down. Are performed simultaneously. Therefore, there was a problem that the vertical distance between the two arms could not be changed and the vertical movement could not be performed independently of each other.

That is, if the pitch (up / down spacing) force of a shelf such as a stocker does not match the vertical spacing of one arm, the work stored in the shelf with the stocking force is first unloaded with one arm, Move the two arms up and down and move the other arm to another shelf. The work will be carried out, and the transportation time will be longer even though two arms are provided.

[0004] To solve these problems, there was one that allowed two arms to move individually up and down

(For example, Patent Document 2).

The double arm type robot described in Patent Document 2 is shown in FIG. Since the vertical spacing of the two horizontal articulated arms 45A and 45B can be changed freely, the vertical spacing of the arms can be adjusted to the shelf pitch such as stock force, and the two arms can be operated simultaneously. It is possible to load and unload workpieces. As a result, the transfer efficiency can be improved by taking advantage of the double arm.

In addition, as shown in FIG. 9, the double arm type robot arm described in Patent Document 2 has two arms formed by alternately projecting the side portions of the two support members 44A and 44B that support the respective arms. The vertical distance between the two is not set below a predetermined minimum distance.

Patent Document 1: Japanese Patent Laid-Open No. 2001-274218

Patent Document 2: Japanese Patent Laid-Open No. 2005-150575

Disclosure of the invention

Problems to be solved by the invention

[0005] However, the double arm robot of Patent Document 2 has the following problems.

Since the contact surfaces on the sides of the upper and lower support members 44A and 44B are exposed to the outside, particles may be generated at the time of contact, which may adversely affect workpieces that require high cleanliness. Furthermore, since the supporting members having larger masses contact each other, the workpiece on the hand (48A, 48B) may be displaced due to the impact at that time, and in the worst case, it may fall from the hand.

In addition, the sides of the support members 44A and 44B protrude greatly, increasing the mass, and the drive mechanisms such as motors and power transmission mechanisms for moving the arms 45A and 45B and the support members 44A and 44B up and down are also enlarged. There was a problem.

[0006] Although not described in detail in Patent Document 2, an arm, a support member, a column (41A, 4 Each IB) is provided with the purpose of detecting the work placed on the hand and cables for driving the drive source of each arm and support member and acquiring their positions. Built-in cable for the sensor.

If the two arms move up and down individually, the cables also move up and down in the column as the arms move up and down, so there must be enough space inside the column. As a result, the column becomes larger as the stroke of the vertical movement of the arm increases, leading to an increase in the installation area and turning radius. For example, in the double arm type robot of Patent Document 2, there are two columns (41A and 41B) for holding the support member. As a result, a large installation area is required, and the pivot mechanism of the base 50 is used. There was a problem that the turning radius due to was increased.

[0007] The present invention has been made in view of such problems, each of which is provided with a double arm that can be independently moved up and down, and is controlled by controlling the distance between the upper and lower support members within an appropriate range. An object of the present invention is to provide a double-arm robot that can improve efficiency, reduce the column size, reduce the installation area and turning radius, and suppress adverse effects on the workpiece caused by the operation of the upper and lower support members.

Means for solving the problem

In order to solve the above problem, the present invention is configured as follows.

[0009] The invention according to claim 1 includes a hand unit on which a transported article is placed, and is connected to the hand unit, has at least two rotary joints, and is extended and contracted so as to move the hand unit in one direction. Two moving articulated arms are arranged above and below, two supporting members for supporting the two articulated arms, a column to which the two supporting members are attached, and the two supporting members to the column. A double-arm type robot provided with a moving mechanism coupled to the column so as to be movable in the vertical direction along the vertical direction, and by moving one or both of the two support members up and down. The vertical distance between the two support members increases, and when the distance reaches a first predetermined value, the vertical movement of the support members is stopped.

[0010] In the invention according to claim 2, the vertical distance between the two support members is narrowed by moving one or both of the two support members up and down. When reaching a constant value, the vertical movement of the support member is stopped.

[0011] The invention according to claim 3, wherein the two support members each have a protrusion portion disposed in the column toward the other support member, and the protrusion portion includes a limit switch, The limit switch is actuated by a protrusion of the other support member when the vertical distance between the two support members reaches the first predetermined value or the second predetermined value. It is.

[0012] In the invention according to claim 4, one or both of the two support members each include a distance sensor installed toward the other support member, and the distance sensor includes the two support members. The vertical distance between the members is measured.

[0013] The invention according to claim 5 includes a hand unit for placing a transported object, and is connected to the hand unit, has at least two rotary joints, and expands and contracts to move the hand unit in one direction. Two moving articulated arms are arranged above and below, two supporting members for supporting the two articulated arms, a column to which the two supporting members are attached, and the two supporting members to the column. A double-arm robot provided with a moving mechanism coupled to the column so as to be movable in the vertical direction along each of the first and second multi-joint arms. The cable disposed inside the arm is arranged outside the first support member via the inside of the first support member that supports the first articulated arm of the two support members. The second support member after being installed And the cable disposed inside the second articulated arm is connected to the first supporting member force together with the accommodated cable via the inside of the second supporting member. It is housed inside the column, and the cable inside the column is disposed outside the double arm robot after being disposed at the lower end of the column.

[0014] In the invention described in claim 6, in the cable disposed between the first support member and the second support member, one or both of the two support members move up and down. After moving out of the first support member, which is longer than a preset upper limit value for the vertical interval between the two support members, which varies depending on It is characterized by being housed.

[0015] The invention according to claim 7, wherein the two support members are both in the moving direction of the hand portion. Projecting in a direction orthogonal to the column and supporting the articulated arm, and attached to a surface orthogonal to the movement direction of the hand portion of the column, between the first support member and the second support member The cable to be arranged is provided on the opposite side of the protruding direction of the two support members.

[0016] In the invention according to claim 8, the cable disposed in the column is disposed to the lower end of the column via a cable anchoring portion provided in a substantially central portion in the height direction of the column. It is characterized by being

The invention according to claim 9 is characterized in that the articulated arm is a horizontal articulated arm in which the rotary joint rotates about a vertical axis.

[0018] The invention according to claim 10 is characterized in that the two articulated arms are respectively supported by the support member so as to face each other in the vertical direction.

The invention's effect

According to the first aspect of the present invention, the interval between the two support members can be made to correspond to the pitch of the shelves such as various stocking forces, and the work transfer efficiency is improved.

According to the second aspect of the present invention, even when the distance between the two support members is reduced, the support members are not brought into direct contact with each other, so that the vertical movement is stopped. Occurrence can be suppressed.

According to the inventions described in claims 3 to 4, when the distance between the two support members is controlled within a certain range, it is possible to suppress the generation of particles and vibrations that adversely affect the workpiece. According to the invention described in claim 5, while allowing the two articulated arms to move up and down independently, the cables arranged in the two arms can be integrated into the column, The column can be turned into a contour.

According to the invention described in claim 6, the cable disposed between the two support members can flexibly cope with a change in the vertical distance between the two support members, and tension is applied. There is no.

According to the invention of claim 7, when the cable disposed between the two support members can be disposed as far as possible from the hand portion, and particles are generated from the cable as the support member moves up and down However, the negative effect on the workpiece placed on the hand It is the power to remove power.

According to the invention described in claim 8, the configuration in the column can be simplified while the cable in the column is adapted to the vertical movement of the support member, and the column can be made compact.

According to the invention described in claims 9 to 10, the minimum distance between the two arms in the vertical direction can be reduced, and it can cope with the stocking force of various pitches. The radius can be kept small.

Brief Description of Drawings

FIG. 1 is a perspective view of a double arm type robot according to the present invention.

[Fig. 2] Three views of the double arm robot of the present invention

FIG. 3 is a side view showing an operation example of the present invention.

FIG. 4 is a cross-sectional view for explaining the operation of the strobe mechanism when the distance between the support members is increased. FIG. 5 is a cross-sectional view for explaining the operation of the stocker mechanism when the distance between the support members is reduced. 6] Three-side view showing the state of cable wiring for the double-arm robot of the present invention

FIG. 7 is a perspective view of a double arm type robot disclosed in Patent Document 1.

FIG. 8 is a perspective view of a double arm type robot disclosed in Patent Document 2.

FIG. 9 is a perspective view showing the operation of the support member of the double arm robot of Patent Document 2.

Explanation of symbols

1 Double arm type robot

2 Horizontal articulated arm

3 Shoulder joint

4 Elbow joint

5 Hand joint

6 upper arm

7 冃 IJ arm

8 Hand part

9 Work

10 Support member

1 1 Vertical movement mechanism 12 columns

13 pedestal

14 base

16 Column, rock

17 External cable

18 Internal cable

19 Bracket

21 Upper arm

22 Lower arm

31, 32 Stopper mechanism

33, 34 Stopper mechanism

101 Upper support member

102 Lower support member

41 A Left column

41B Right column

44A Lower arm support member

44B Upper arm support member

45A Lower horizontal articulated arm

45B Upper horizontal articulated arm

48A lower hand

48B upper hand

50 pedestal

51 Lower fastening plate

52 Upper fastening plate

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

Example 1

FIG. 1 is a perspective view showing the overall structure of the double arm type robot of the present invention. The double-arm robot 1 of the present invention includes a horizontal articulated arm 2 that is rotatably connected by a shoulder joint part 3, an elbow joint part 4, and a hand joint part 5 and transmits a rotational force from a rotational drive source to perform a desired operation. 2 sets. In addition, the hand unit 8 mounted on the tip of the arm 2 for placing the workpiece moves linearly in the expansion / contraction direction (X-axis direction of the orthogonal coordinate system) shown in the figure by the arm 2, and loads the workpiece into the stocker or the like. · Perform unloading operation.

101 and 102 are support members of the arm, 101 is suspended from one arm, and 102 is configured to support the other arm. Each arm 2 is connected to the support member 101 or 102 by a shoulder joint 3 so that the two arms are arranged so as to face each other up and down!

Furthermore, the double-arm robot 1 of the present invention is provided with a vertical movement mechanism 11 that individually moves the support members 101 and 102 up and down along the column 12 so that the upper and lower positions of the arm 2 can be adjusted.

By arranging the two arms 2 to face each other as described above, the vertical distance between the two hand portions 8 when the support members 101 and 102 are brought closest to each other can be reduced as much as possible. It is possible to cope with the pitch stock force.

FIG. 2 is a three-sided view showing details of the operation of the double-arm robot of the present invention.

Fig. 2 (a) is a top view, which corresponds to a view looking down from the Z-axis direction to the origin direction in the Cartesian coordinate system in Fig. 1. Fig. 2 (b) is a side view and corresponds to the view from the origin of the Cartesian coordinate system in Fig. 1 in the Y-axis direction. Fig. 2 (c) is a front view, which corresponds to the view from the origin of the Cartesian coordinate system in Fig. 1 in the X-axis direction. In FIG. 2, the hand portion 8 is omitted.

FIG. 2 (a) shows the range of expansion and contraction of arm 2. In the figure, the state in which the arm 2 is folded so that the upper arm 6 and the forearm 7 overlap each other is indicated by a solid line, and the maximum stroke of the expansion / contraction operation is indicated by a dotted line.

The pedestal 13 is provided so as to be rotatable with respect to the base 14, and the arm 12 and the supporting member can be turned together with the column 12 so that the direction thereof can be changed. This turning function makes it possible to perform work transfer work for a plurality of stockers arranged around the double arm robot 1 and improve work efficiency per unit area.

On the other hand, FIG. 2 (b) and FIG. 2 (c) show the raising / lowering operation range of the arm 2. In the figure, arm 2 The state where the arm is positioned at the upper end of the lifting operation is indicated by a solid line, and the state where the arm 2 is positioned at the lower end of the lifting operation is indicated by a dotted line!

As shown in FIG. 2 (a), the vertical movement mechanism 11 is arranged in the same direction as the extension direction of the hand part 8 with respect to the column 12, and the support members 101 and 102 The shoulder joint 3 of the arm 2 is connected to the tip thereof. With such an arrangement, the column 12 does not get in the way when the arm 2 is extended and contracted.

[0026] As can be seen from FIG. 2 (a), the shoulder joint 3 of the lower arm 22 is not aligned with the center axis of rotation of the shoulder joint 3 of the two arms 2. The shoulder joint 3 of the lower arm 22 is the shoulder joint 3 of the upper arm 21. On the other hand, the hand part 8 is offset in the extending direction.

Further, the support member 102 connected to the lower arm 22 is also offset in the extending direction of the hand portion 8 with respect to the support member 101! /, So when the support member 102 is moved downward by the vertical movement mechanism 11, A force to increase the lifting range that does not interfere with 13 is possible. Further, the vertical movement mechanism 11 is covered with a protective cover (not shown) having a shielding function, and suppresses particles generated inside the column 12 from being scattered outside.

[0027] In the double-arm robot of the present invention, the support members 101 and 102 individually move up and down along the column 12, so that the vertical distance between the two arms can be adjusted according to the pitch of the stock force. Improve the transfer efficiency by simultaneously loading and unloading workpieces with the arm.

For example, as shown in Fig. 3, at the height of 1000 [mm] from the installation surface, each arm is not shown in the figure! /, And the workpiece is unloaded from the stock force A at the same time! Rotate the column 12 to raise the support members 101 and 102 while changing the direction of the column 12, and against the stocker B (not shown) at a height of 300 [mm] from the installation surface (the stock force A differs from the shelf pitch) When each arm carries in a workpiece at the same time, the work can be performed.

Here, it is necessary to increase the distance between the support members 101 and 102 by 50 [mm] from the case of the stock force A in order to match the stocker B with the stocker B shelf pitch larger than the stocker A shelf pitch. Then, the vertical movement distance of the support member 101 is 2050 [mm], and the movement distance of the support member 102 is 2000 [mm]. In this case, the moving distance between the supporting member 101 and the supporting member 102 The separation ratio is 2050: 2000 = 1. 025: 1, so the movement speed of the support member 101 is set 2.5 [%] faster than the movement speed of the support member 102, and the two support members are moved simultaneously. If you start and stop at the same time, you can adjust to the stocker B shelf pitch.

That is, even when the vertical movement amounts of the support members 101 and 102 are different, the movement speeds of both are appropriately adjusted according to the difference, and the movement is started and stopped at the same time. And can be moved.

In addition, when the shelf pitches of stocker A and stock force B are the same, the movement speeds of support members 101 and 102 may be the same, and the two support members may start moving simultaneously and stop simultaneously.

On the other hand, the support members 101 and 102 are configured so that the distance between them does not fall outside a certain range. This makes it possible to simplify the movement control of the support members 101 and 102 as described above, while allowing the intervals to correspond to the pitches of various shelves, and applying the cable wiring described later to make the column a single arm type. It can be made compact as in the case of a robot or a double-arm robot that moves two arms up and down.

Hereinafter, a mechanism for limiting the distance between the support members 101 and 102 within a certain range will be described.

FIG. 4 is a diagram schematically showing a cross section of a part of the support members 101 and 102 and the vertical movement mechanism 11 when viewed from the same direction as FIG. 2 (b). A part of the vertical movement mechanism 11 is stored in the column 12.

As described above, the two support members 101 and 102 are configured such that the distance between the two support members 101 and 102 does not exceed a certain level by the force S that moves up and down individually along the column 12 and the stopper mechanisms 31 and 32. The stagger mechanism 31 is L-shaped and moves up and down in the column 12 integrally with the support member 101. The stagger mechanism 32 is T-shaped and moves in the column 12 integrally with the support member 102. Move up and down.

When the distance between the support members 101 and 102 is small, the force in the state as shown in FIG. 4 (a). When either or both of the force of the support members 101 and 102 are moved up and down to increase the distance, As shown in (b), the T-shaped stopper mechanism 32 is hooked on the L-shaped stopper mechanism 31. By this mechanism, the distance between the support members 101 and 102 does not exceed a predetermined size. In addition, when a load exceeding a certain level is applied to the drive mechanism that moves the support members 101 and 102 up and down, a robot controller (not shown) that detects the load stops the operation of the drive mechanism. Overload force S is not applied.

Further, even if the support member 102 falls along the column 12 due to gravity due to a failure of the vertical movement mechanism 11, the support member 102 stops in a state where it is suspended from the support member 101 by this mechanism, so the support member 102 is lowered. It can prevent the arm 22 and the pedestal 13 from falling.

Since the stopper mechanisms 31 and 32 are housed inside the column 12, it is possible to suppress the adverse effect on the workpiece, in which the particles generated when the stopper comes into contact are not directly scattered on the workpiece. In addition, by using an elastic body at the contact portion of the stagger mechanism 31, 32, the impact applied to the support member during the contact of the strobe mechanism 31, 32 can be mitigated. Can be suppressed.

Next, a stagger mechanism that functions when the distance between the support members 101 and 102 is reduced will be described. FIG. 5 is a view schematically showing a cross section of a part of the support members 101 and 102 and the vertical movement mechanism 11 when viewed from the same direction as FIG. In the present embodiment, the stopper mechanisms 33 and 34 in FIG. 4 are arranged in front of the stopper mechanisms 31 and 32 shown in FIG.

When either force or both of the support members 101 and 102 move up and down and the distance between them decreases, the state shown in FIG. 5 (a) changes to the state shown in FIG. The tip is touching. As a result, the distance between the support members 101 and 102 is not further reduced. Similarly to the case of FIG. 4, when a load force S exceeding a certain level is applied to the drive mechanism that moves the support members 101 and 102 up and down, a robot controller (not shown) that detects this will stop the operation of the drive mechanism. Thus, the drive mechanism is not overloaded. Since the stopper mechanisms 33 and 34 are also housed inside the column 12, it is possible to suppress the adverse effect on the workpiece, which prevents particles generated when the stopper comes into contact with the workpiece from scattering directly on the workpiece. In addition, by using an elastic body at the contact portion of the stopper mechanism 33, 34, the impact applied to the support member when the stopper mechanism 33, 34 is in contact can be reduced, and the position of the workpiece placed on the hand portion 8 can be shifted. Etc. can be suppressed. In the above description, a simple mechanical mechanism is used as a mechanism for limiting the distance between the support members 101 and 102 within a certain range. However, this is only an example, and other methods can be used. The For example, a switch may be provided in one or both of the stopper mechanisms in FIGS. 4 and 5, and the switch may be pushed when the other stopper mechanism comes into contact. If the switch ON / OFF is detected by a robot controller (not shown) and the drive mechanism for moving the support members 101 and 102 up and down is stopped, the distance between the support members 101 and 102 is kept within a certain range. Can be limited.

In addition, a distance sensor is provided on one or both of the support members 101 and 102 toward the other support member. Similarly, the robot controller detects the distance between the support members 101 and 102, and if necessary, the support member 101 , 102 may be stopped to move the drive mechanism up and down. When the distance sensor is used, the contact between the support members 101 and 102 can be avoided, which is effective in suppressing the occurrence of displacement of the particle or workpiece. Furthermore, these methods may be used in combination.

Furthermore, by using such a configuration, it is not necessary to project the side of the support member large as in Patent Document 2, so the mass of the support member can be reduced, and the drive mechanism for the support member is made compact accordingly. can do.

Note that the length of the external cable 17 connecting the support members 101 and 102 is determined based on a predetermined maximum distance between the support members. Specifically, when the distance between the support members 101 and 102 is long enough so that no tension is applied, and when the distance between the support members 101 and 102 is minimized, there is a margin. The length is set so that it does not have a large surplus. Furthermore, it is arranged so as to draw a substantially U-shape so that it can respond smoothly to changes in the distance between the support members 101 and 102! External cable 17 will be described later.

[0033] Next, the internal cable wiring of the double arm robot 1 of the present invention will be described. FIG. 6 is a three-sided view showing the internal cable wiring of the double arm robot 1. FIG. Fig. 2 is a top view similar to Fig. 2 (a), showing the cable wiring in arm 2. In FIG. 6 (a), the cable wiring in the pedestal portion 13 is omitted. Fig. 6 (b) is a side view similar to Fig. 2 (b), and shows the cable wiring in the support members 101 and 102 and in the column 12! /.

FIG. 6 (c) is a front view similar to FIG. 2 (c), showing cable wiring in the arm 2, part of the column 12, and in the pedestal 13. In FIG. 5, the hand portion 8 is omitted.

In the support member 101, a drive mechanism for extending and retracting the upper arm 21 and a sensor cable for detecting the position of the workpiece placed on the hand portion 8 are housed. Similarly, in the support member portion 102, a drive mechanism for extending and retracting the lower arm 22 and an internal cable 18 for a sensor for detecting the position of the workpiece placed on the hand portion 8 are housed. The cables in the support member 101 are collectively arranged as the external cable 17 so as to be exposed to the outside of the support member 101, and then stored in the support member 102, and are passed through the support member 102. As shown in FIG. 6, the external cable 17 is arranged so as to be exposed on the back side of the connecting portion between the support members 101 and 102 and the arm 2. ing. By disposing the external cable far from the hand portion 8 in this way, it is possible to eliminate as much as possible the adverse effects on the workpiece caused by particles generated from the external cable 17 when the distance between the support members 101 and 102 changes. .

[0034] As shown in Fig. 6 (b), the internal cable 18 in the column 12 is arranged in a form that is anchored to the center of the column 12 by the bracket 19 and the S-shape is laid sideways. The inner cable 18 is moored at the center, so that the tension is not applied to the inner cable 18 when the support members 101 and 102 are moved up and down. Furthermore, the internal cable 18 can be made to follow the vertical movement of the support members 101 and 102 by a simple configuration, and the column can be made compact.

The internal cable 18 passes from the lower end of the column 12 through the inside of the pedestal 13 and then goes out of the double-arm robot 1. The cable that goes out is connected to a robot controller (not shown).

[0035] Temporarily, cables are individually arranged from the support members 101 and 102 into the column 12! /, So that each cable is properly placed in the column 12 corresponding to the vertical movement of each support member. It is necessary to have facilities and space for handling. That is, column 12 becomes larger, The installation area increases due to the increase in mass, and a large drive device is required to turn the base 13.

On the other hand, the cable in the support member 101 is stored in the support member 102 and the force in the support member 102 is stored in the column 12 so that the cables in the column 12 are combined into one column 12. It can be made compact and lightweight, and has the effect of reducing the installation area of the double-arm robot.

Industrial applicability

In the above-described embodiment, the conveyance application of a thin plate-like workpiece such as a glass substrate or a semiconductor wafer has been described as an example, but it goes without saying that the mechanism of the present invention can be widely used for other conveyance applications.

Claims

The scope of the claims

[1] A hand unit for placing a transported object, and an articulated arm that is connected to the hand unit, has at least two rotary joints, and expands and contracts to move the hand unit in one direction. Place one

Two support members for supporting the two articulated arms,

A column to which the two support members are attached;

A double arm type robot having a moving mechanism for connecting the two support members to the column so as to be movable in the vertical direction along the column;

When one or both of the two support members move up and down, the distance between the two support members increases in the vertical direction, and when the distance reaches the first predetermined value, the vertical movement of the support member is stopped. This is a double-arm robot.

[2] When one or both of the two support members move up and down, the vertical distance between the two support members becomes narrow, and when the distance reaches a second predetermined value, the vertical movement of the support member 2. The double-arm robot according to claim 1, wherein

[3] The two support members each have a protrusion disposed in the column toward the other support member, the protrusion includes a limit switch, and the limit switch includes the two support members. 3. The double arm according to claim 1, wherein the double arm is actuated by a protrusion of the other support member when a vertical interval of the member reaches the first predetermined value or the second predetermined value. Type robot.

[4] One or both of the two support members each include a distance sensor installed toward the other support member, and the distance sensor measures an interval in the vertical direction of the two support members. The double arm type robot according to claim 1 or 2, wherein the double arm type robot is provided.

[5] A hand unit for placing a transported object, and an articulated arm that is connected to the hand unit, has at least two rotary joints, and expands and contracts to move the hand unit in one direction. Place one

Two support members for supporting the two articulated arms, A column to which the two support members are attached;

The cable disposed inside the first multi-joint arm disposed above the two multi-joint arms is a first one that supports the first multi-joint arm of the two support members. After being disposed outside the first support member via the inside of the support member and then housed in the second support member;

The cable disposed inside the second articulated arm is housed inside the column via the inside of the second support member together with the cable housed from the first support member, The double-arm robot is characterized in that a cable inside the column is disposed outside the double-arm robot after being disposed at the lower end of the column.

[6] The cable disposed between the first support member and the second support member is a cable of the two support members that changes when one or both of the two support members move up and down. After going out of the first support member that is longer than a preset upper limit for the vertical interval, it is stored in the second support member in a substantially U shape. The double arm type robot according to claim 5.

[7] The two support members protrude in a direction perpendicular to the moving direction of the hand part to support the articulated arm, and are attached to a surface of the column perpendicular to the moving direction of the hand part, 6. The double arm according to claim 5, wherein a cable disposed between the first support member and the second support member is provided on a side opposite to a protruding direction of the two support members. Type robot.

[8] The cable disposed in the column is disposed to the lower end of the column via a cable mooring portion provided at a substantially central portion in the height direction of the column. The double arm type robot according to claim 5.

9. The double-arm robot according to claim 1, wherein the articulated arm is a horizontal articulated arm in which the rotary joint rotates about a vertical axis.

[10] The two articulated arms are respectively supported so as to face each other in the vertical direction. 6. The double arm robot according to claim 1, wherein the double arm robot is supported by a member.