WO1998050916A1

WO1998050916A1 - Device and method for manufacturing an optical recording medium

Info

Publication number: WO1998050916A1
Application number: PCT/JP1998/002020
Authority: WO
Inventors: Toshifumi Kamiyama; Toshiaki Kunieda; Sadayuki Okazaki
Original assignee: Matsushita Electric Industrial Co., Ltd.
Priority date: 1997-05-08
Filing date: 1998-05-07
Publication date: 1998-11-12
Also published as: CN1269046A; US6340501B1; DE69825893T2; TW411458B; CN1144198C; EP0987700A1; KR100353774B1; KR20010012369A; EP0987700A4; DE69825893D1; EP0987700B1

Abstract

A device for manufacturing an optical recording medium having a plurality of recording layers on a substrate, comprising a vacuum preprocessing chamber (52), a plurality of recording layer forming chambers (54, 56) for forming recording layers by vapor deposition of an organic coloring material, a reflection layer forming chamber (58), and a vacuum postprocessing chamber (60), wherein each recording layer forming chamber has at least one recording layer forming unit (84, 86), and the reflection layer forming chamber has at least one reflection layer forming unit (88).

Description

Description: Apparatus and method for manufacturing optical recording medium

The present invention relates to a method and an apparatus for manufacturing an optical recording medium capable of recording and reproducing information at a high density by a laser beam or the like, and particularly to a write-once type (CD-R and DVD-R). write-once type) relates to a method and apparatus for manufacturing an optical recording medium, which is called an optical recording medium or an optical recording medium, which can be recorded only once.

[Background Art]

Optical recording media have been used in recent years because of their high information density and easy data retrieval. In particular, CDR has a large capacity (650 MB) and a relatively low cost, and has recently become particularly popular. A manufacturing method and a product of the optical recording medium will be described.

FIG. 1 is a schematic diagram of a cross section perpendicular to a circular surface of a disk of a conventional manufacturing apparatus for forming a recording layer of a write-once optical recording medium. This device is called a spin coater.

In the figure, 10 is a spin coater main body, 12 is a substrate for an optical recording medium, 1

4 is a spindle shaft, 16 is a spindle table, 18 is a nozzle for applying a recording layer solution, 20 is a solution of a recording layer material of an organic dye, and 22 is a spindle motor. The organic dye recording layer material solution 20 is supplied onto the optical recording medium substrate 12 from the nozzle 18. Thereafter, when the spindle motor 22 rotates in the direction of the arrow 24, the optical recording medium substrate 12 on the spindle table 16 is simultaneously rotated. By rotating, the recording layer material solution 20 spreads in the direction of the arrow 26, and the recording layer material solution is applied to the optical recording medium substrate 12 with a constant thickness. Recording layer material solution

The organic dye contained in 20 is made of, for example, a cyanine-based or phthalocyanine-based material.

FIG. 2 schematically shows a cross-sectional structure perpendicular to a circular surface of a disk of a part of an optical recording medium produced by the above-described manufacturing method. In the figure, 28 is a groove of a minute group formed on the surface of the optical recording medium substrate 12, 30 is a recording layer,

32 is a reflective layer, and 34 is a protective film. When the recording layer material solution is applied as described above, the recording layer material solution enters into the grooves 28 of the minute dull of the optical recording medium substrate made of polycarbonate or the like. The applied solution is dried to form a recording layer. The grooves 28 of the minute group are formed in a spiral shape on the optical disk substrate 12 from the inner circumference to the outer circumference.

When recording information using such an optical recording medium, a recording device irradiates a groove 28 with a laser beam spot 36 to decompose and degrade or deteriorate the dye material of the recording layer. As a result, the substrate 12 is deformed by the heat generated at that time, whereby pits 38 are formed.

The pits 38 are reflected by the reflective layer 32 formed by sputtering gold, silver or the like when irradiated with a reproducing laser beam having a lower output than during recording. The reflectance of the light is lower than that of the place not irradiated with the laser light, and the contrast based on the difference in the reflectance indicates the location of the signal. By this mechanism, the same signal output as the CD disc specified in the Red Book is obtained and recognized as a CD. This content is described in the CD-R licensed optical recording medium standardized in the Orange Book. DISCLOSURE OF THE INVENTION

The manufacture of an optical recording medium by the above-described spin coater is relatively simple, but has various problems.

First, the properties (eg, viscosity, etc.) of the organic dye recording layer material solution 20 are extremely susceptible to external factors (eg, temperature, humidity, etc.). Depending on the control state, the coating state of the solution is not equal between the inner circumference and the outer circumference. As a result, a difference in the film thickness is likely to occur between the inner circumference and the outer circumference of the optical recording medium. It is not easy to form a recording layer having the same.

Further, the recording material film material solution 20 of the organic dye is applied using various solvents, but generally, it is necessary to sufficiently dry the applied material after application, and this takes time. . Therefore, it is difficult to form a recording layer with a high yield in a short time, and this has been an issue for reducing the manufacturing cost of an optical recording medium. Furthermore, as the demand for higher density optical recording media has increased, there has been a demand for shorter wavelength lasers (eg, 650 nm), and longer wavelengths (eg, 780 nm for CDs). Various requirements have emerged, such as the ability to play recorded information on DVD players (ie, compatibility with DVD players) and the use of organic dyes for short wavelengths in response to shorter wavelength lasers. Lamination of various organic dye layers has been proposed.

However, in the above-mentioned conventional spin coating method, there was a problem that the previously applied layer was attacked by the solution of the recording layer material applied later when rotated at high speed. In addition, miniaturization of the pitch between groove grooves has been proposed as a demand for higher density.

To address these problems, the conventional methods described above have limitations. The present invention provides an optical recording medium manufacturing apparatus that solves the above problems. That is, the present invention relates to a vacuum pretreatment chamber, a method for forming a recording layer by vapor deposition.

An apparatus for manufacturing an optical recording medium having a plurality of recording layers on a substrate, comprising: (at least two) recording layer forming chambers, a reflective layer forming chamber, and a vacuum post-processing chamber, wherein each recording layer is The formation chamber has at least one recording layer formation unit, and the reflection layer formation chamber has at least one reflection layer formation unit.

The optical recording medium manufacturing apparatus of the present invention further includes a substrate transport mechanism, whereby the substrate is transferred between the chambers in the apparatus. Therefore, the substrate for an optical recording medium carried into the vacuum pre-processing chamber of the apparatus by this substrate transfer mechanism is transferred from the vacuum pre-processing chamber to the vacuum post-processing chamber through the recording layer forming chamber and the reflective layer forming chamber. And can be taken out of the vacuum post-treatment chamber.

As described later, for example, in a mode in which the respective chambers are adjacent to each other, the substrate can be transferred from a certain room in the apparatus to a room adjacent thereto. In another mode in which each chamber is arranged around the opening and closing room, the substrate can be transferred from a certain room in the apparatus to an arbitrary room in the apparatus via the opening and closing room. In any of the embodiments, such transfer of the substrate is performed by the substrate transfer mechanism.

Further, the substrate transport mechanism can transfer the optical recording medium substrate from outside the optical recording medium manufacturing apparatus to the vacuum pre-processing chamber, and can transfer the substrate from the vacuum post-processing chamber to the outside of the optical recording medium manufacturing apparatus. Is more preferred.

Further, the present invention provides a method for manufacturing an optical recording medium using the above-described apparatus for manufacturing an optical recording medium according to the present invention. That is, the present invention includes a vacuum pre-processing chamber (or a vacuum pre-chamber), a plurality (at least two) of recording layer forming chambers, a reflective layer forming chamber, and a vacuum post-processing chamber (or a vacuum post-chamber). An optical recording medium comprising In such a device, a plurality of recording layers are formed on a substrate by vapor deposition by putting a substrate into the device from outside the device, passing the substrate through these chambers, and removing the substrate from the device. Provided is a method for manufacturing an optical recording medium on which a reflective layer is formed. The transfer of the substrate in the apparatus is performed using a substrate transfer mechanism. In a preferred embodiment, loading of the substrate into the apparatus and removal of the substrate from the apparatus are also performed using the substrate transport mechanism.

In the above-described apparatus and method, the “substrate” may be the optical recording medium substrate itself or a substrate holder that supports a plurality of such substrates.

It should be noted that various features of the present invention will be described with reference to various elements constituting the device of the present invention, but these descriptions also apply to the method of the present invention itself and the device used in the method. You.

According to the present invention, an optical recording medium in which a plurality of recording layers are laminated on a substrate can be obtained by vapor deposition only by using a single device. These recording layers use the above-described spin-copper. It has a thickness with improved uniformity as compared with the case where the recording layer is formed by using the method. Since the optical recording medium obtained by the present invention has a plurality of recording layers, different or new optical characteristics that cannot be achieved by an optical recording medium having a single recording layer (for example, the spectral reflectance of the entire substrate) Characteristic).

For example, an optical recording medium obtained according to the present invention can be used not only for light having a wavelength (for example, 78 8ηπ! ~ 830 nm) used for CD but also for a shorter wavelength (for example, used for DVD). The optical recording medium obtained by the present invention has two types of wavelengths (for example, a wavelength for CD). And DVD wavelengths). The optical recording medium obtained by the apparatus or method of the present invention has a plurality of recording layers as described above, whereby the unrecorded portion (that is, the portion not irradiated with the recording laser beam) is as described above. In the recording portion (that is, the portion irradiated with the recording laser beam), at least one of a plurality of recording layers is mainly used as an original recording layer in an optical recording medium. Function, the laser material irradiates or degrades the dye material that composes the recording layer to change the optical properties of the recording layer, and other recording layers promote such changes in optical properties. (That is, it can be called a recording auxiliary layer). Of course, all the recording layers may be decomposed and deteriorated or deteriorated by the recording laser, and all the layers may have both functions of the recording layer and the recording auxiliary layer. The functions of the recording layer and the recording auxiliary layer cannot be clearly distinguished from each other, and a plurality of recording layers are integrated to exhibit new or different optical characteristics due to a synergistic effect. is there. In this sense, in this specification, all of the layers formed in the recording layer forming chamber are referred to as “recording layers” for convenience, and among them, so-called recording layers (used in ordinary optical recording media). In addition to the recording layer, various recording auxiliary layers for promoting the function of the recording layer, for example, a layer functioning as a filter layer, an enhancement layer, and the like are also included in the recording layer.

In the apparatus of the present invention, the reflection layer can be formed after the formation of the recording layer, so that the time required for manufacturing the optical recording medium can be reduced. Further, as described later, a film thickness measuring device, a shutter mechanism provided between the substrate and the recording layer forming unit (preferably in combination with the film thickness measuring mechanism), a substrate rotation-revolution mechanism, and a substrate and recording device Optical recording media can be manufactured more efficiently with a mechanism for changing the positional relationship with the layer forming unit (preferably combined with a film thickness measuring mechanism), and a substrate transport mechanism using a single hand robot. so Monkey

The optical recording medium manufactured in this manner is schematically shown in FIG. 3 in a cross section similar to FIG. The optical recording medium 40 includes an optical recording medium substrate 41 made of a material such as polycarbonate, a plurality of recording layers 43 and 44 each containing an organic dye material laminated on the substrate 41, and It has a reflective layer 45 formed thereon and a protective layer 46 formed thereon. The substrate 41 has a spiral group groove 42 provided on one surface thereof. The organic dye material forming the recording layer can be arbitrarily selected from, for example, phthalocyanine-based materials. In the apparatus of the present invention, the recording layers 43 and 44 and the reflection layer 45 are formed on the substrate 41 (that is, the portion 49 is formed).

The substrate 41 is not particularly limited as long as it is a material that is used for a general optical recording medium and is transparent to a laser beam used for the optical recording medium. For example, a plastic material such as polycarbonate and acrylic resin may be used.

The reflective layer 45 can be arbitrarily selected as long as it has a predetermined reflectance, such as gold, silver, or aluminum. A material generally used for a reflective layer of an optical recording medium is used. It can also be used in the invention.

Similarly to the reflective layer, the protective layer 46 may be made of a commonly used UV-curable resin for an optical recording medium, and is formed by applying the resin on the recording layer and curing the resin. . According to the present invention, the protective layer is formed by forming a recording layer and a reflective layer on a substrate and then applying and curing a resin. Of course, the apparatus of the present invention may be combined with a conventional protective layer forming apparatus. FIG. 4 shows the result of measuring the thickness of the recording layer of the optical recording medium manufactured by depositing the recording layer in this manner. The recording layer is a dye material using a phthalocyanine compound, 1 X 1 0 _ ³ torr following conditions The dye material was heated at 150 to 250 ° C. to evaporate it, and was formed by vapor deposition on a substrate. After forming the recording layer on the substrate, the thickness of the recording layer at a predetermined location was measured with a film thickness meter.

In FIG. 4, the horizontal axis represents the radius of the optical recording medium having a diameter of 12 O mm, and the vertical axis represents the formed film thickness (thickness of the recording layer). The solid line indicates the film thickness of the recording layer formed by vapor deposition based on the present invention as described above from a radius of 25 mm to a radius of 57 mm, but according to the vapor deposition method, the thickness is extremely uniform. It can be seen that the recording layer of No. was formed. The broken line in FIG. 4 is the radial distribution of the thickness of the recording layer formed by using a spin coater.

[Brief description of the drawings]

FIG. 1 schematically shows a spin coater used for manufacturing a conventional optical recording medium.

FIG. 2 schematically shows a cross section of a part of a conventional optical recording medium.

FIG. 3 schematically shows a cross section of a part of an optical recording medium manufactured according to the present invention.

FIG. 4 is a graph showing a change in the thickness of the recording layer of the optical recording medium manufactured according to the present invention along the radial direction of the disk.

FIG. 5 is a schematic side view showing one embodiment of the optical recording medium manufacturing apparatus of the present invention.

FIG. 6 is a schematic top view showing another embodiment of the optical recording medium manufacturing apparatus of the present invention.

FIG. 7 is a schematic top view showing still another embodiment of the optical recording medium manufacturing apparatus of the present invention.

FIG. 8 shows a continuous supply of dye material for use in the apparatus of the present invention. FIG. 3 is a perspective view showing a mechanism for heating the radiator.

FIG. 9 is a perspective view showing one embodiment of a mechanism for intermittently supplying and heating a dye material used in the apparatus of the present invention.

FIG. 10 is a perspective view showing another embodiment of a mechanism for intermittently supplying and heating a dye material used in the apparatus of the present invention.

FIG. 11 is a perspective view showing still another embodiment of a mechanism for intermittently supplying and heating a dye material used in the apparatus of the present invention.

FIG. 12 is a perspective view showing an embodiment having a preheating means, which is a mechanism for intermittently supplying and heating a dye material used in the apparatus of the present invention. FIG. 13 is a perspective view illustrating a mechanism for intermittently supplying and heating a dye material used in the apparatus of the present invention and having a cooling means. FIG. 14 is a schematic side view showing one embodiment of the optical recording medium manufacturing apparatus of the present invention in which a plurality of recording layer forming units are arranged in a recording layer forming chamber. FIG. 15 schematically shows a cross section of a part of another optical recording medium manufactured according to the present invention.

FIG. 16 shows a curve of light absorption vs. light wavelength of an optical recording medium manufactured according to the present invention.

FIG. 17 is a side view schematically showing a shutter mechanism arranged in a recording film forming chamber of the apparatus of the present invention.

FIG. 18 is a side view schematically showing a substrate revolving mechanism arranged in a recording film forming chamber of the apparatus of the present invention.

FIG. 19 is a side view schematically showing a moving mechanism of a recording layer forming unit disposed in a recording film forming chamber of the apparatus of the present invention. BEST MODE FOR CARRYING OUT THE INVENTION In the apparatus of the present invention, the vacuum pretreatment chamber is a chamber in which a substrate for an optical recording medium is placed before processing the substrate for an optical recording medium under a high vacuum (in this sense, referred to as a “vacuum prechamber”). Can also)

Loading the substrate into the vacuum pretreatment chamber from outside the apparatus when the vacuum pretreatment chamber has the same pressure as the pressure outside the apparatus;

Then, the vacuum processing chamber is isolated (or cut off) from the outside with respect to the pressure, and the pressure in the vacuum preprocessing chamber is reduced so that the pressure becomes the same as the pressure in the recording layer forming chamber in which the substrate is to be transferred;

When both chambers are at the same pressure, the vacuum pretreatment chamber and the recording layer forming chamber are brought into communication with respect to the pressure and the transfer of the substrate;

Thereafter, it means a chamber for transferring the substrate from the vacuum pretreatment chamber to the recording layer forming chamber under an equal pressure state.

Further, in the apparatus of the present invention, the vacuum post-processing chamber is a chamber for processing a substrate for an optical recording medium under a high vacuum, and thereafter taking out the substrate on which the recording layer and the reflective layer are formed to the outside of the apparatus. (In this sense, it can also be called "vacuum back chamber"),

The pressure in the vacuum post-processing chamber is set to the same pressure as the pressure in the reflective layer forming chamber while the substrate having the reflective layer formed therein is separated (or bordered) with respect to the pressure from the reflective layer forming chamber inside.

Thereafter, the reflective layer forming chamber and the vacuum post-processing chamber are brought into communication with respect to the pressure and the transfer of the substrate so that both chambers have the same pressure;

Thereafter, the substrate is transferred from the recording layer forming chamber to the vacuum post-processing chamber;

Thereafter, the vacuum post-processing chamber is isolated from the recording layer forming chamber with respect to the pressure; thereafter, outside air is introduced into the vacuum post-processing chamber, and the outside of the apparatus and the vacuum post-processing chamber are brought into an equal pressure state; Thereafter, it means a chamber for allowing the substrate having the recording layer and the reflective layer to be taken out of the apparatus from the vacuum post-processing chamber.

In the present invention, the recording layer forming chamber at a pressure of high vacuum state (for example, 1 0- ³ torr or less), means a chamber formed by depositing a recording layer of the optical recording medium. The material forming the recording layer is a dye material, particularly an organic color material, and may be a material used for a recording layer of a conventional optical recording medium as long as desired optical characteristics can be obtained. Alternatively, it may be another coloring material. Such a dye material is heated in a recording layer forming chamber and melted / evaporated or directly sublimated.

For example, specific examples of the organic dye material forming the recording layer include pentamethine cyanine dye, heptamethine cyanine dye, squarylium dye, azo dye, anthraquinone dye, indophenol dye, and phthalocyanine dye. , Naphthalocyanine dyes, pyrylium dyes, thiopyrylium dyes, azurenium dyes, trifenylmethane dyes, xanthene dyes, indanthrene dyes, indigo dyes, thioindigo dyes, merocyanine dyes, thiazines Dyes, acridine dyes, oxazine dyes, dithiol metal complex dyes, and the like. In many cases, the wavelength-spectral absorptivity characteristics of these dyes change depending on the substituents of the dyes, and the light absorption characteristics of dyes of the same series may change significantly if the substituents are changed. Preferably, a material selected from phthalocyanine dyes, naphthalocyanine dyes, azo dyes, and cyanine dyes is used in the recording layer, or a mixture of a plurality of dyes may be used. If necessary, the recording layer may contain a known quencher or an additive such as an ultraviolet absorber. The choice of the dye material and the necessary additives can be selected according to the properties of the recording layer to be formed. Such a dye material is heated and evaporated (or sublimated) in the recording layer forming chamber, and the layer of the dye material is vapor-deposited on the substrate or on the recording layer already formed on the substrate. The number of recording layer forming chambers is at least two, and may be more depending on the number of recording layers required.

At least one recording film forming unit is disposed in such a recording layer forming chamber, and a dye material for forming the recording layer is supplied to the unit, and the unit is heated to evaporate (or sublimate). The dye material thus evaporated is deposited on the substrate. Therefore, in the apparatus of the present invention, the recording layer forming chamber is provided with a recording film forming unit having a coloring material supply mechanism and a coloring material heating (evaporation or sublimation) mechanism. The dye material supply mechanism is for measuring and supplying a predetermined amount of the dye material and sending it to the heating mechanism, and the measurement and supply of the dye may be continuous or batchwise. The heating mechanism also performs continuous heating or intermittent heating corresponding to the dye material supply mechanism. The heating means included in the heating mechanism preferably heats electrically, and more preferably uses electric resistance or electromagnetic induction heating.

In the present invention, the reflective layer forming chamber, at a pressure of high vacuum state (for example, 1 0- ³ torr or less), the material forming the reflective layer, such as gold, silver, a thin layer of material such as aluminum and This means a chamber for forming a recording layer on an already formed recording layer by an appropriate method (eg, sputtering, metal vapor deposition, etc.). Therefore, the reflective layer forming chamber has at least one reflective layer forming unit, and its unit is formed by any known mode as long as it can form a reflective layer film on the recording layer. Is also good.

For example, when the reflective layer is formed by applying sputtering, the reflective layer forming unit may be a sputtering unit and includes a target (sputter source) of a metal material on which the reflective layer is to be formed and an ion irradiation device. Made up Good.

In the apparatus of the present invention, it is preferable that each chamber be capable of independently controlling its pressure, whereby a substrate (or a substrate holder) is transferred from one chamber to another. At this time, these two chambers can be kept at an equal pressure to transfer the substrate from one chamber to the other chamber. This transfer may be performed in substantially the same manner as the transfer of the substrate from the vacuum pre-processing chamber to the recording layer forming chamber or the transfer of the substrate from the reflective layer forming chamber to the vacuum post-processing chamber.

In the present invention, the substrate transfer mechanism

The substrate is transferred from the outside of the device to the vacuum pretreatment chamber,

Thereafter, the substrate is transferred from the vacuum pretreatment chamber to the first recording layer forming chamber, and the substrate is transferred between the recording layer forming chambers as necessary.

Thereafter, the substrate is transferred from the last recording layer formation chamber to the reflection layer formation chamber, and then, the substrate is transferred from the reflection layer formation chamber to the vacuum post-processing material,

Finally, it is a mechanism for transferring from the vacuum post-processing chamber to the outside of the device. In this mechanism, the transfer of the substrate from the outside of the apparatus to the vacuum pretreatment chamber and / or the transfer of the substrate from the reflection layer formation chamber to the vacuum post-treatment material can be omitted.

As long as it has the above-described functions, the substrate transport mechanism may be a mechanism of any possible mode. Specifically, in the field of semiconductor devices, it may be often used to transfer an object from one chamber to another chamber having a different pressure. For example, as will be described later, a mode in which the chambers are arranged adjacent to each other and substrates are sequentially sent, and a mode in which a rotary chamber is provided and each chamber is arranged around the rotary chamber can be adopted.

When transferring the substrate as described above, the chamber holding the substrate and the Since the pressure with the chamber to which the substrate is to be transferred may be different, each chamber can usually be closed (or trimmed) with respect to pressure by closing the opening through which the substrate passes during the transfer. Thus, it has a movable partition (partition plate).

In one preferred embodiment, the optical recording medium manufacturing apparatus of the present invention comprises: a vacuum pretreatment chamber; a plurality (at least two) of a series of recording layer forming chambers for forming a recording layer by vapor deposition; a reflective layer forming chamber; Comprising a vacuum post-processing chamber, wherein the recording layer forming chambers are adjacent to each other,

The recording layer forming chamber at one end is adjacent to the vacuum pretreatment chamber, the recording layer forming chamber at the other end is adjacent to the reflective layer forming chamber, and preferably, the reflective layer forming chamber is vacuum post-processed. Next to the room,

These chambers can maintain a predetermined pressure independently of each other. The substrate is transferred from the vacuum pre-processing chamber to the recording layer forming chamber at one end by the substrate transfer mechanism, and a series of recording layer forming chambers are sequentially moved. Pass, enter the reflective layer forming chamber from the recording layer forming chamber at the other end, and then enter the vacuum post-processing chamber from the reflecting layer forming chamber,

The recording layer laminated in the continuous recording layer forming chamber is formed on the substrate by vapor deposition, and the reflective layer is preferably formed on the laminated recording layer by sputtering in the reflective layer forming chamber.

In a more preferred embodiment, the substrate is transferred from the outside of the apparatus to the vacuum pre-processing chamber by the substrate transfer mechanism, and finally, is unloaded from the vacuum post-processing chamber to the outside of the apparatus.

FIG. 5 shows an optical recording medium manufacturing apparatus according to this preferred embodiment. FIG. 5 schematically shows the inside of each chamber so that the configuration of the manufacturing apparatus 50 having two recording layer forming chambers can be understood. The apparatus 50 includes a vacuum pretreatment chamber 52, recording layer formation chambers 54 and 56, a reflection layer formation chamber 58, and a vacuum post-treatment chamber 60. The vacuum pretreatment chamber 52 has a substrate inlet 62, through which The substrate is carried into the vacuum pretreatment chamber 52 from outside the apparatus. Further, the vacuum post-processing chamber 60 has a substrate outlet 64, through which the substrate on which the recording layer and the reflective layer are formed is carried out of the vacuum post-processing chamber 60 to the outside of the apparatus. I do. Partition plates 66, 68, 70 and 72 and vacuum pumps to control the pressure in each chamber independently and to enable transfer of substrates between adjacent chambers 74, 76, 78, 80 and 82 are provided. The recording layer forming units 54 and 56 are provided with recording layer forming units (integrating a recording layer material supply mechanism and a heating mechanism) 84 and 86, respectively. In the reflection layer forming chamber 58, a reflection layer forming unit (for example, a sputtering device) 88 is disposed.

Substrates are placed in substrate holders 90, 92, 94, 96, 98, 100 and 101, each of which holds a plurality of substrates, and are transported through the apparatus. May be transported as it is). In order to transfer the holder, substrate transfer mechanisms 102, 104, 106, 108 and 110 having a transfer roller and a belt are provided.

The optical recording medium substrate is sent to the vacuum pretreatment chamber 52 directly or placed on the substrate holder 90. Note that the partition plate 66 has already closed the space between the recording layer formation chamber 54 and the vacuum pretreatment chamber 52 with respect to the pressure. The vacuum pretreatment chamber 52 is evacuated by the exhaust device 74 when the substrate holder 90 enters. When the degree of vacuum in the vacuum pretreatment chamber 52 reaches the level of the vacuum processing chamber 54, which has already reached the predetermined degree of vacuum by the evacuation device 76, the partition plate 66 opens, and the vacuum pretreatment chamber 5 is opened. 2 and the recording layer formation chamber 54 are brought into communication with each other with respect to the pressure and the transfer of the substrate, and are transferred from the position of the substrate holder 92 to the position of the substrate holder 94 by the substrate transfer mechanisms 102 and 104. Thereafter, the partition plate 6 6 is closed. In the recording layer forming chamber 54, a recording layer forming unit 84 is disposed below the substrate holder 94, where the first recording layer material (A) evaporates and is deposited on the substrate. Evaporate. At this time, the partition plates 66 and 68 are closed.

After the processing in the recording layer forming chamber 54 is completed, the processing in the recording layer forming chamber 56 is next performed. In this case, if the pressures of the recording layer forming chambers 54 and 56 are different, the pressure of the recording layer forming chamber 54 is adjusted to be equal to the pressure of the recording layer forming chamber 56 by adjusting the pressure of the exhaust device 76. Then, the partition plate 68 is opened and transferred from the position of the substrate holder 94 to the position of 96.

The transfer of the substrate from one chamber to another chamber having a different pressure should be performed so that the pressure is the same as the pressure of the chamber to which the substrate is to be transferred while both chambers are isolated (or independent) with respect to the pressure. The method of controlling the pressure in the chamber where the substrate currently exists, and then, when the pressure becomes the same, releasing the isolation state of both chambers and transferring the substrate may be adopted.

Similarly, in the recording layer forming chamber 56, another dye material (B) is evaporated from the unit 86 and deposited on the recording layer of the dye material (A) already formed, and the recording layer of the dye material (B) is formed. Is formed.

Thereafter, the substrate holder is transferred from the state of 96 to the state of 98 from the recording layer forming chamber 56 to the reflective layer forming chamber 58. Then, a reflecting layer of, for example, gold, silver or aluminum is formed on the recording layer of the dye material (B) by sputtering by the reflecting layer forming unit 88.

Next, the substrate holder 98 is sent to a vacuum post-processing chamber 60 which is previously held at the same pressure as that of the reflective layer forming chamber 58 by an exhaust device 82, and then is externally provided by a leak valve 112. After the pressure is leaked, the take-out port 64 is opened and the substrate holder 100 is taken out of the apparatus (state of 101). In another preferred embodiment, the optical recording medium manufacturing apparatus of the present invention,

It has a vacuum pretreatment chamber, a plurality of (at least two) recording layer formation chambers for forming a recording layer by vapor deposition, a reflection layer formation chamber, and a vacuum post-treatment chamber, and these chambers have a turntable. Are arranged, preferably at equal angles, around a rotary chamber comprising

These chambers and the rotary chamber can maintain a predetermined pressure independently of each other, and the rotary chamber and each chamber communicate with each other with respect to the pressure and transfer of the substrate (or substrate holder). Can be independent of each other (ie, cut off),

With the substrate transfer mechanism, the substrate can be transferred from any chamber to another chamber via the rotary chamber,

The recording layer laminated in the recording layer forming chamber is formed on the substrate by vapor deposition, and the reflective layer is formed on the laminated recording layer in the reflective layer forming chamber.

This preferred embodiment is specifically shown in FIG. This is a schematic view when the optical recording medium manufacturing apparatus 120 having two recording layer forming chambers is viewed from above.

The device 120 has a rotary chamber 124 with a turntable 122 in the center. Around the rotary chamber 124, there are a vacuum pretreatment chamber 126, a recording layer forming chamber 128 and 130, a reflective layer forming chamber 132, and a vacuum post-processing chamber 134. As shown, these chambers are equally spaced around the axis of rotation 1336 of the turntable. The order of arranging these chambers is not particularly limited, but is preferably arranged in the order of processing as shown in the figure. The substrate to be processed may be transferred between the chambers as it is, but it is preferable that a plurality of substrates be placed on the substrate holder 138 and transferred between the chambers as shown in the figure. Each chamber can be in communication with the rotary chamber 124 for pressure and substrate holder (or substrate) transfer (ie, pressure transfer and substrate holder transfer). 0 enables the transfer of the substrate holder between each chamber and the turntable in the direction indicated by the arrow 14 2. A partition plate 144 is arranged between each chamber and the rotary chamber so that the ON / OFF state of the communication between the chambers and the rotary chamber regarding the pressure and the transfer of the substrate can be performed. Each chamber (including the rotary chamber) is provided with an exhaust device (not shown), as in Fig. 5, so that the pressure of each can be controlled independently. Note that units for forming the recording layer and the reflection layer are arranged in the recording layer formation chamber and the reflection layer formation chamber, as in the case described above with reference to FIG.

The substrate holder 138 is put into the preparatory vacuum chamber 126, and further, is chucked at the tip of the arm 140, which is extendable and contractible in the direction of the arrow 142, and is moved to the mouth-tarry chamber 124. The substrate holder (indicated by a two-dot chain line) transferred to the rotary chamber 124 can be moved to the front of any chamber because the turntable 122 can freely rotate in the direction of the arrow 148. Thus, the optical recording medium substrate can be moved to an arbitrary chamber, so that, for example, the recording layers can be formed on the substrate in an arbitrary order.

When processing is completed in a certain chamber (for example, the recording layer forming chamber 130), the substrate holder 146 is transferred from the chamber onto the turntable 122 by the arm 140 (shown by a two-dot chain line). ). After that, the turntable 1 2 2 is rotated by a predetermined angle (for example, clockwise) (see arrow 1 4 8), and is moved to the front of the reflective layer forming chamber 1 32. Grasps the substrate holder, and then transfers the substrate holder to the reflection layer forming chamber 132. Thereafter, a reflective layer is formed on the substrate. FIG. 7 shows another preferred embodiment of the optical recording medium manufacturing apparatus of the present invention. This figure, like FIG. 6, schematically shows the apparatus viewed from above. The optical recording medium manufacturing apparatus 150 of the embodiment shown in FIG. 7 is different from the optical communication medium manufacturing apparatus 150 shown in FIG. They differ in that they have 154, 156, 158 and 160.

The substrate holder 162 can be changed to the state shown by the arrow 164, and is taken into the vacuum pretreatment chamber 174 by a single hand robot 152 having a chuck function at the end. Such a single-hand robot generates very little dust when used in a clean room in the manufacturing process of semiconductor devices and the like.

The single handed robot 152 moves further to the state shown by the arrow 166, and can move the substrate holder 162 onto the turntable 170 in the rotary chamber 168. After that, the turntable 170 is rotated clockwise in the direction of arrow 172, the substrate holder is placed in front of the recording layer forming chamber 176, and the next chamber is moved by the robot arm 154 on the front. It is taken in 1 76 and the following processing is performed. Finally, the holder 178 that has been rotating around each chamber is taken out of the vacuum post-processing chamber 180 by the single hand robot 160.

The device shown in Fig. 7 uses a single-handed robot that generates very little dust, so it can not only produce optical recording media with extremely low error rates, but also emit very little dust during long-term continuous production. Can provide manufacturing. As described above, in the recording layer forming chamber of the apparatus of the present invention, the recording layer is formed by vapor-depositing the material constituting the recording layer. Therefore, the recording layer forming chamber is provided with a dye material supply mechanism and a dye material heating mechanism. FIG. 8 is a perspective view schematically showing one preferred embodiment of a recording layer forming unit 190 having a color material supply mechanism and a dye material heating mechanism, which can be used in the optical recording medium manufacturing apparatus of the present invention. Is indicated by.

From a storage tank (eg, hopper) 1904 holding the dye material 192, the color material is discharged onto the dye material feed belt 196 in a predetermined amount per unit time. The belt 196 is driven by rollers 198 and 200, and the material moves at a predetermined speed in a direction indicated by an arrow 202. Below the belt 196, a dye material preheating heater 204 and a dye material heating / evaporating heater 206 are provided, and the dye material 208 on the belt is heated and evaporated. . The evaporated dye is deposited on the substrate 211 held by the substrate holder 210 arranged on the recording layer forming unit 190. Incidentally, the recording layer type unit 190 has a mechanism (for example, a scraper) 214 for removing the remaining dye material without evaporating, and is provided with a dust receiver 216 thereafter. The remaining dye material is stored therein.

In the recording layer forming unit shown in FIG. 8, the dye material is supplied continuously, but in another embodiment of the present invention, the dye material is supplied batchwise.

FIG. 9 is a perspective view schematically showing another preferred embodiment of a recording layer forming unit 220 having a dye material supply mechanism and a dye material heating mechanism.

The recording layer forming unit 222 includes a coloring material intermittent supply mechanism 222 and a coloring material heating mechanism (accordingly, a coloring material evaporation source) 222. The coloring material heating mechanism 222 has a rotating arm 222 for transferring the coloring material, a measuring force 222, and a heating means 230. The number of measuring cups 228 and rotating arms 226 is not limited to the illustrated embodiment, but may be usually 2 or more, preferably 4 to 10, for example, 8. Dye material intermittent feeder The structure 222 has a fixed amount of pigment material 236 by a toothed wheel (also impeller) 232 provided therein and capable of sending out a fixed amount of material and a circuit 234 controlling its rotation. , Can be supplied to the measuring cup 228.

The dye material may be specifically an organic dye material, and the rotating arm 2 26 rotates a predetermined angle around the center 2 39 in the direction of the arrow 2 38 under the command of the control circuit 2 34 As a result, the coloring material supplied on the measuring cup 228 is sent to the heating means 230. The dye material 228 sent is heated by the heating means 230 and evaporates as shown by the dashed line 241, and the substrate 242 on the substrate holder 240 arranged above the unit. Is deposited. As the heating means 230, a resistance heating method or the like is used, but an induction heating method can also be used.

It is preferable that the optical recording medium substrate 242 mounted on the substrate holder 240 revolves in the direction of arrow 244 by using a mechanism described later.

FIG. 10 schematically shows the recording layer forming unit 250 of another embodiment viewed from the side. In this embodiment, the weight of the dye material supplied on the measuring cup 228 is measured by the weighing device 252 so that the supply amount of the dye material can be measured with higher accuracy using the dye material intermittent supply device. Can be measured. The rotary arm 2 26 is rotated by the rotary arm drive unit 25 4.

The dye material 2 36 is supplied from the intermittent supply device 2 22 to the measuring cup 2 28 by the material measuring gear 2 32, and at this time, the rotating shaft 2 5 6 of the rotating arm 2 2 6 Is displaced downward as shown by the arrow 260 (indicated by a broken line). Then, a hole 262 is provided at the tip of the rotating arm 226 to support the edge of the measuring cup 228, and the measuring cup is supported by the periphery of the hole. The bottom of 2 8 is supported by the pan 2 6 4 of the weighing unit 2 3 5 2, independent of the rotating arm 2 2 6 You can leave. The bottom of the measuring cup 228 will be independently supported by the pan 264 of the weighing device, so that the weight of the dye material supplied to the measuring force can be measured.

This weighing is performed using a principle such as an electronic balance. Before weighing, the tare of the measuring cup 228 is subtracted, and only the weight of the vacuum processing material 236 is measured. When the predetermined metering is completed, the material metering gear 2 32 stops supplying. After that, the rotating shaft 2 5 4 is displaced in the direction of the arrow 2 6 6, again holding the measuring cup 2 2 8, and then the rotating shaft 2 2 6 is rotated in the horizontal direction, and the respective measuring force The tip is moved to the next position. The dye material 236 already measured is placed on the measuring force bar 2 28, but is heated by the heater 230 to evaporate the dye material.

When the evaporation of the material is completed, the empty measuring cup 228 is sent under the dye material intermittent supply device 222, and the weighing of the dye material starts again. Although only two measuring force cups are shown in FIG. 10, actually more measuring cups may be provided so as to be sequentially fed. The metering and heating of such a dye material are controlled by the control unit 268. When the dye material is intermittently supplied as described above, only the dye necessary for forming the recording layer can be measured and supplied, so that the amount of the dye material can be reduced as compared with the continuous supply. .

FIG. 11 shows a preferred embodiment of the dye material intermittent supply device. In this embodiment, the portion supporting the measuring cup 228 at the end portion of the rotating arm 226 shown in FIG. 9 or FIG. 10, that is, the measuring cup receiving portion 270 is made of a heat insulating material (for example, machinable material). It is composed of ceramics (ceramics like Mitsui Mining Materials Co., Ltd.). Therefore, the heat generated by the heating means 230 does not escape to the rotating arm 222, so that the measuring cup 222 can be stably formed. The upper dye material 236 can be heated.

FIG. 12 shows a more preferable embodiment of the dye material heating mechanism shown in FIG. In this embodiment, in addition to the heating source means 230, a plurality of independently heating preheating means 282 and 284 are provided. In the case where the coloring material heating mechanism is configured in this way, the coloring material 2 36 is first brought into contact with the first preheating means 2 82 and is heated to a predetermined temperature, and further, the second preheating is performed. Means 284 are contacted and preheated to a higher predetermined temperature. Finally, the heating means 230 reaches a predetermined heating temperature and evaporates. As described above, in the coloring material heating mechanism configured by using a plurality of independent heating means, the coloring material 236 is not heated at once, but is gradually and gently heated, so that the efficiency is extremely high. Evaporation is performed well and stably. For example, the problem of splash of the dye material can be avoided to the utmost, so that an optical recording medium having stable performance can be obtained.

FIG. 13 shows another preferred embodiment of the dye material heating mechanism shown in FIG. In this embodiment, a cooling means 290 is further provided in the embodiment shown in FIG. The cooling means 290 may be in any possible mode, and for example, a cooling means using an element utilizing the Peltier effect can be used. After the measuring material 228 is heated by the heating means 230 and the coloring material 236 evaporates, the temperature of the measuring cup 228 is not lowered so much, and the evaporation is performed through heating from the next measurement. When a series of processes are performed, resulting in an increase in process tact (ie, a reduction in process time), the measuring cup is not sufficiently cooled, and it is difficult to stably evaporate the dye material. . In such a case, if the cooling means 290 is present, it is possible to lower the temperature of the measuring weighing unit 228 to an appropriate temperature, and as a result, to increase the speed of the recording layer forming process. It will be possible to respond and stable product performance will be obtained. this A single cooling means 290 or a plurality of cooling means may be provided, and in that case, more efficient temperature control becomes possible.

FIG. 14 shows another embodiment of the optical recording medium manufacturing apparatus of the present invention. This embodiment is similar to that of FIG. 5 except that a single recording layer forming chamber is provided with a plurality of recording layer forming units (integrating a recording layer dye material supply mechanism and a heating mechanism). This is substantially the same as the embodiment shown. For example, as shown in the figure, the recording layer forming units 54 and 84 b are arranged in the recording layer forming room 54, and the recording layer forming units 86 a and 86 are arranged in the recording layer forming room 56. b is located. Of course, it is not always necessary to arrange a plurality of recording layer forming units in every recording layer forming chamber. These plural recording layer forming units may evaporate the same dye material or different dye materials as necessary.

When the same dye material is evaporated, the evaporated dye material is more uniformly distributed in the recording layer forming chamber, so that a more uniform recording layer can be formed. When different dye materials are evaporated, the recording layer can be formed by a mixture of these different dye materials. Furthermore, even when different dye materials are evaporated, one dye material is heated and evaporated, and the other dye material is not heated and evaporated, or the evaporated dye material is heated and evaporated. By providing a means for shielding the evaporated dye material that cannot reach the substrate (for example, a shutter mechanism to be described later), it is possible to form a plurality of recording layers on the substrate by using only one recording layer forming chamber. Is also possible. A cross-sectional view of a part of a completed optical recording medium 300 manufactured by such an apparatus is schematically shown in FIG. In this optical recording medium, a plurality of recording layer forming units (for example, 84a and 84b) evaporate on a substrate 304 having a group groove 302 formed of a material such as polycarbonate. Was done The recording layer 306 formed of a mixture of different organic dye materials, the recording layers 308 and 310 formed of different dye materials (as described above, in one recording layer forming chamber having 308 was formed first, and then the layer 3 10 was formed), the reflective layer 3 12 and the protective layer 3 14 were provided. Except for the protective layer 314, it can be formed by the manufacturing apparatus of the present invention.

The recording layer 306 formed of a mixture of different organic dye materials vaporized (or sublimated) from a plurality of, for example, two recording layer forming units, has optical properties (light absorption, transmittance constant, (Refractive index, extinction coefficient, etc.), especially when spectral reflectance and spectral absorptivity can be combined at least qualitatively, or when new optical properties can be developed by the synergistic action of these dye materials. There is. Therefore, a recording layer having desired optical characteristics can be formed by a try-and-error method of measuring optical characteristics by examining combinations of various organic dye materials.

Such development of new optical properties can occur not only when a recording layer is formed from a mixture of dye materials as described above, but also when a plurality of different dye material recording layers are stacked. For example, when one or more recording layers exhibit the effect of an optical filter, the shape of the wavelength-spectral characteristic curve of the entire recording layer is changed (for example, by changing the peak shape or shifting the peak position). It is also possible. As described above, the combination of the dye materials constituting the laminated recording layer is determined by the trial and error method of examining various combinations and selecting a preferable combination from the combinations, thereby obtaining desired optical characteristics. The laminated recording layer having the property can be selected.

Furthermore, such new or different optical properties can be manifested by changing the thermal decomposition (or alteration) properties of the recording layer by changing the type of metal used for the reflective layer. There is. The measurement results (shown by solid lines) of the optical absorptivity of the optical recording medium (CD-R, shown in Fig. 15) obtained by forming the following three different recording layers on the substrate are shown. This is shown in FIG. In the graph shown, the vertical axis represents the absorptivity characteristics of the recording layer, and the horizontal axis represents the light wavelength.

Recording layer 300: phthalocyanine compound (FOM—509, manufactured by Wako Pure Chemical Industries), thickness 3 Onm

Recording layer 308: Merocyanine compound (NK2097, manufactured by Nippon Photographic Dye Laboratory), thickness 5 nm

Recording layer 310: merocyanine compound (NK204, Nippon Kogaku Dye Laboratory), thickness 40 nm

Reflective layer 3 1 2: gold (depending on spa ring), thickness 70 nm

For comparison, the broken line shows the spectral absorption characteristics of a conventional write-once optical recording medium having a recording layer such as cyanine used for a single wavelength CD, for example, 780 nm CD. .

As is clear from the graph, the optical recording medium having a plurality of recording layers manufactured by the method of the present invention has a relatively high optical density even at a newly proposed high-density short wavelength, for example, at a laser wavelength of 65 nm. It has a small spectral absorption rate (so it can be used as DVD-R). As a result, recording and / or reproduction can be performed not only at a longer wavelength such as a CD but also at such a shorter wavelength (that is, the spectral characteristics of a write-once optical disc supporting multiple wavelengths). ). The write-once optical recording medium configured as described above can record and / or reproduce data corresponding to a plurality of laser wavelengths. According to this basic configuration, the light used by laser advance is further increased. Even if the wavelength of is shortened, we can continue to respond.

In a preferred embodiment of the apparatus of the present invention, at least one of the recording layer forming chambers is provided with steam. A shutter mechanism is provided to allow the on-off operation to be performed, thereby controlling the thickness of the recording layer formed on the substrate. Further, by providing a shutter mechanism in the reflection layer forming chamber, for example, the deposition of the sputtered metal on the recording layer can be performed.

FIG. 17 shows the recording layer forming chamber of FIG. 2 provided with such a shutter mechanism.

The cross section of 54 is shown schematically. A film thickness control shutter mechanism 320 is provided between the optical recording medium substrate holder 94 and the recording layer forming unit 84. The shutter mechanism 320 includes a fixed portion 324 that defines an opening 322 through which the evaporated dye material passes, and a slide plate 326 that can open and close the opening. When the slide plate 3226 slides in the direction of the arrow 3228 and closes the opening 3222, the evaporated dye cannot reach the substrate (OFF state), and conversely, the opening 3222 opens. When opened, the evaporated dye can reach the substrate (ON state). By opening and closing such a slide plate 326, the thickness of the recording layer can be adjusted. The evaporation rate of the organic dye material from the recording layer forming unit 84 is controlled by the degree of heating of the heating means (for example, 204 and 206 in FIG. 8). High-precision control becomes possible, and particularly when a recording layer is formed at high speed, high-precision control becomes possible by opening and closing the slide plate 326. It is also possible to provide a film thickness measuring device in the recording layer forming chamber to measure the thickness of the recording layer formed on the substrate online or intermittently, and to feedback-control the shutter mechanism based on the result. .

In a preferred embodiment of the apparatus of the present invention, a mechanism for rotating and revolving the substrate when forming the recording layer, that is, a rotation / revolution mechanism is provided in the recording layer forming chamber. FIG. 18 schematically shows a cross section of the recording layer forming chamber 54 in FIG. 2 provided with this mechanism. In the figure, reference numeral 330 denotes a substrate holder, reference numeral 33 denotes a holder shaft, reference numeral 33 denotes a rotating gear to which the substrate 33 is attached, reference numeral 33 denotes a gear to which the rotating gear 33 engages, and reference numeral 34 denotes a gear. A non-rotating gear attached to the gear 338, 324 is a holder rotating motor, 344 is a rotating shaft, 346 is a hook, 348 is a plunger, and 350 is a lever.

The rotation mechanism may be provided in at least one of the recording layer forming chamber and the reflective layer forming chamber, and a plurality of optical recording medium substrates 336 can be mounted on the substrate holder 330. When the substrate holder 330 is sent into the recording layer forming chamber 54, the holder shaft 332 is chucked by the hook 346, and is rotated by the rotation motor 344 by the rotation shaft 344. Accordingly, the substrate 336 held by the substrate holder 330 rotates around the holder shaft 332, that is, revolves. The gear 338 is structured so that it can rotate around the rotation axis 334. By the action of the plunger 348, the leper 350 moves down and engages with the rotation stop 340 (two-dot chain line). When the gear 3 3 8 stops rotating, the rotating gear 3 3 4 meshing with the gear 3 3 8 rotates due to the rotation of the holder shaft 3 3 2. Then, the substrate 3 36 attached thereto is rotated. As a result, the optical recording medium substrate 336 rotates around the recording layer forming unit 84 as a whole.

When the lever 350 is at the position indicated by the two-dot chain line, the gear 3380 is attached to the holder shaft 3

The rotating gear 3 3 4 does not rotate because it rotates together with 3 2. In this case, the optical recording medium substrate 336 only revolves around the holder axis 332, and this mode can be used. Conversely, it is also possible for the substrate to rotate only. As compared with the case where the substrate is stopped, the dye material is deposited while the optical disk substrate rotates (revolves and rotates or rotates) in this way. Therefore, a more uniform recording layer is formed on the substrate. These revolving mechanisms can be implemented using a chain mechanism or a mechanism such as a planetary gear.

In a preferred embodiment of the apparatus of the present invention, a mechanism capable of changing the positional relationship between the recording layer forming unit (particularly the evaporation source of the dye material) and the substrate holder or the substrate in the recording layer forming chamber is provided. A cross section of the recording layer forming chamber 54 in FIG. 2 provided with this mechanism is schematically shown in FIG. In the recording layer forming chamber 54 similar to the above, 84 is a recording layer forming unit or an evaporation source, 360 is a vertical drive rack, 362 is a gear, 364 is a horizontal drive rack, 3 66 is a gear. Since the vertical drive rack 360 is moved by the driving of the gear 365, the recording layer forming unit 84 can move in the direction of the arrow 365 with respect to the optical recording medium substrate or the substrate holder 94. is there. Further, the drive of the gear 3666 moves the horizontal drive rack 364, so that the unit 84 can move in the direction of the arrow 371. A film thickness measuring device 368 is arranged in the vicinity of the optical recording medium substrate 28, and by preferably installing a plurality of these devices, information on the measured film pressure is fed back from these devices to obtain an optimum film forming rate. The position of the evaporation source 84 with respect to the substrate holder 94 can be controlled so as to achieve a uniform film thickness (a control circuit and the like are not particularly shown).

In the optical recording medium manufacturing apparatus of the present invention, when the dye material is intermittently supplied, an electric heater is used for heating the dye material, but an induction heating method may be used. . In this case, an eddy current is generated in the metal measuring force and the dye material is heated by this heat. However, unlike a heater, there is no fear of disconnection and the reliability and efficiency of evaporation and evaporation are improved. It becomes possible. [Industrial applicability] An optical recording medium having a plurality of recording layers on a substrate, comprising a vacuum pretreatment chamber, a plurality of recording layer formation chambers for forming a recording layer by vapor deposition, a reflection layer formation chamber, and a vacuum post-treatment chamber. An apparatus for manufacturing, wherein each recording layer forming chamber has at least one recording layer forming unit, and the reflecting layer forming chamber has at least one reflecting layer forming unit. According to this, a write-once optical recording medium having a uniform thickness and non-uniformity can be manufactured, and a plurality of organic dye materials can be simultaneously deposited. In addition, it is possible to realize product specifications corresponding to the optical design of the recording layer formed of an organic color material corresponding to the short wavelength of the laser.

Furthermore, a uniform recording layer can be obtained with high accuracy and high speed by a shutter mechanism provided between the optical recording medium substrate and the recording layer forming unit. It is equipped with a film thickness measuring device provided between the unit and the unit for freely changing the distance between the optical recording medium substrate and the unit for forming the recording layer. Control becomes possible.

In addition, since the optical recording medium substrate can be rotated and / or revolved at the time of film formation by the holder for mounting the optical recording medium substrate, more accurate control of the recording layer thickness is realized, and a plurality of substrate holders are provided. Since a plurality of optical recording medium substrates can be attached, a large amount of inexpensive optical disks can be supplied.

In addition, if the manufacturing apparatus has a turntable, the order of layer formation on the optical recording medium can be changed arbitrarily, so that the recording layer with different specifications can be changed by changing the layer formation program setting of the same apparatus. It is possible to freely manufacture an optical recording medium having recording layers with different specifications only by using this method. The use of a low-dusting single-hand robot not only can provide an optical recording medium with an extremely low error rate, but also can significantly reduce equipment costs.

Thus, according to the present invention, it is possible to provide a write-once optical recording medium (for example, CD-R and DVDR) that solves the conventional problems.

In particular, since the recording layer forming unit can be provided with a measuring device capable of accurately measuring the dye material, it is possible to achieve a constant film thickness depending on the amount of the dye material supplied. Control becomes easier. In addition, by providing a plurality of independent measuring cups, the dye material can be preheated, preferably in a stepwise manner, so that the temperature control of the heating and evaporation of the dye material is facilitated, and efficient and stable. Evaporation can be performed. In particular, when the member supporting the measuring cup is heat-insulating, heat from the heating means is efficiently transmitted to the measuring cup, and stable evaporation is possible. Furthermore, if multiple independent heating means are provided, it is possible to raise the temperature of the measuring cup in a stepwise manner, and it is possible to control the temperature very delicately, achieve a sharp rise, and achieve a stable evaporation rate (speed). It becomes possible.

In the recording layer forming unit, if a cooling means is provided after the heating means, the measuring cup after heating can be lowered to an appropriate temperature.Furthermore, if a plurality of cooling means are installed, more accurate and highly efficient evaporation is possible. Become. If an induction heating method is used to heat the dye material, more reliable and stable heating can be realized.

Claims

The scope of the claims

1. A plurality of recording layers on a substrate, comprising a vacuum pretreatment chamber, a plurality of recording layer formation chambers for forming a recording layer by vapor deposition of an organic dye material, a reflection layer formation chamber, and a vacuum post-treatment chamber. An apparatus for manufacturing an optical recording medium according to claim 1, wherein each recording layer forming chamber has at least one recording layer forming unit, and the reflecting layer forming chamber has at least one reflecting layer forming unit. apparatus.

2. The apparatus according to claim 1, further comprising a substrate transfer mechanism for transferring a substrate between chambers.

3. It has a vacuum pretreatment chamber, a series of recording layer formation chambers for forming a recording layer by vapor deposition, a reflection layer formation chamber, and a vacuum post-treatment chamber, and the recording layer formation chambers are mutually connected. Adjacent,

The recording layer forming chamber at one end is adjacent to the vacuum pretreatment chamber, and the recording layer forming chamber at the other end is adjacent to the reflective layer forming chamber,

These chambers can maintain a predetermined pressure independently of each other. The substrate is transferred from the vacuum pre-processing chamber to the recording layer forming chamber at one end by the substrate transfer mechanism, and a series of recording layer forming chambers are sequentially moved. Pass, enter the reflective layer forming chamber from the recording layer forming chamber at the other end, and then enter the vacuum post-processing chamber from the reflecting layer forming chamber

3. The apparatus according to claim 1, wherein a recording layer laminated in a series of recording layer formation chambers is formed on a substrate by vapor deposition, and a reflection layer is formed on the laminated recording layer by sputtering in the reflection layer formation chamber. .

4. It has a vacuum pretreatment chamber, a plurality of recording layer formation chambers for forming a recording layer by vapor deposition, a reflection layer formation chamber, and a vacuum post-treatment chamber, and these chambers have a turntable. Around a rotary chamber, preferably at equal angles, These chambers and the rotary chamber can maintain a predetermined pressure independently of each other, and the rotary chamber and each chamber must be in communication with each other with regard to pressure and substrate transfer. Can be independent of each other,

3. The apparatus according to claim 1, wherein the recording layer laminated in the recording layer forming chamber is formed on the substrate by vapor deposition, and the reflective layer is formed on the laminated recording layer in the reflective layer forming chamber.

5. The apparatus according to any one of claims 1 to 4, wherein the recording layer forming unit includes a dye material supply mechanism for continuously supplying the dye material to a heating and evaporation mechanism of the dye material.

6. The apparatus according to any one of claims 1 to 4, wherein the recording layer forming unit includes a dye material supply mechanism for intermittently supplying the dye material to the dye material heating / evaporation mechanism.

7. The apparatus according to claim 1, wherein a shutter mechanism is provided between the recording layer forming unit and the substrate in the recording layer forming chamber.

8. The apparatus according to claim 1, wherein the recording layer forming chamber is provided with a mechanism for rotating or revolving the substrate.

9. The apparatus according to any one of claims 1 to 8, wherein the recording layer forming chamber is provided with a mechanism for changing a positional relationship between the recording film forming unit and the substrate.

10. The apparatus according to any one of claims 1 to 9, wherein the recording layer forming chamber is provided with an apparatus for continuously or intermittently measuring the thickness of the recording layer.

11. The apparatus according to claim 4, wherein the substrate transfer mechanism is constituted by a single hand robot.

12. The apparatus according to any one of claims 6 to 11, wherein the dye material supply mechanism comprises a plurality of individual and independent measuring taps to which the dye material is supplied.

13. The apparatus according to claim 12, wherein the coloring material supply mechanism includes a weighing device for measuring the weight of the coloring material supplied to the measuring cup.

14. The apparatus according to any one of claims 6 to 13, wherein the recording layer forming unit has a plurality of heating means, and heats and evaporates the dye material stepwise.

15. An apparatus according to any of claims 6 to 14, wherein the recording layer forming unit comprises at least one cooling means after the heating means.

16. The apparatus according to any one of claims 6 to 15, wherein the heating of the coloring material is performed by induction heating.

1. In an apparatus for manufacturing an optical recording medium having a vacuum pre-processing chamber, a plurality of recording layer forming chambers, a reflective layer forming chamber, and a vacuum post-processing chamber, a substrate is inserted into the apparatus from outside the apparatus. An optical recording medium in which a plurality of recording layers are formed on a substrate by vapor deposition by passing through the chamber and taken out of the apparatus, and a reflective layer is formed on these recording layers Manufacturing method for optical recording media.

18. A method for manufacturing an optical recording medium using the apparatus according to any one of claims 1 to 16.