Nothing Special   »   [go: up one dir, main page]

USRE34489F1 - Atomic force microscope with optimal replacement fluid cell - Google Patents

Atomic force microscope with optimal replacement fluid cell Download PDF

Info

Publication number
USRE34489F1
USRE34489F1 US89598492A USRE34489F1 US RE34489 F1 USRE34489 F1 US RE34489F1 US 89598492 A US89598492 A US 89598492A US RE34489 F1 USRE34489 F1 US RE34489F1
Authority
US
United States
Prior art keywords
probe
atomic force
force microscope
module
replacement fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
Inventor
Paul K Hansma
Barney Drake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of California
Original Assignee
University of California
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of California filed Critical University of California
Priority to US07895984 priority Critical patent/USRE34489F1/en
Publication of USRE34489E publication Critical patent/USRE34489E/en
Assigned to REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE reassignment REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ALEXANDER, BERNICE, EXECUTRIX OF THE ESTATE OF SAMUEL T. ALEXANDER
Application granted granted Critical
Publication of USRE34489F1 publication Critical patent/USRE34489F1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G01Q30/025—Optical microscopes coupled with SPM
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/12—Fluid environment
    • G01Q30/14—Liquid environment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • G01Q70/04—Probe holders with compensation for temperature or vibration induced errors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/863—Atomic force probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/868—Scanning probe structure with optical means
    • Y10S977/87—Optical lever arm for reflecting light

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Optical Measuring Cells (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Micro-Organisms Or Cultivation Processes Thereof (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

An atomic force microscope which is readily useable for researchers for its intended use without extensive lost tome for setup and repair. The probe used therein is a cantilevered optical lever which imparts surface information in a gentle and reliable manner by reflecting an incident laser beam. The probe (20) is carried by a replaceable probe-carrying module (48) which is factory set up and merely inserted and fine tuned by the user. Calibration tools are provided to make initial set up and fine tuning of the microscope a simple and straightforward operation requiring little or no technical talent. The probe module (48) is mechanically coupled to a probe module support (38) so that the probe is substantial alignment with a deflection detection system (26, 66). <IMAGE>
US07895984 1989-03-13 1992-06-04 Atomic force microscope with optimal replacement fluid cell Expired - Lifetime USRE34489F1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US07895984 USRE34489F1 (en) 1989-03-13 1992-06-04 Atomic force microscope with optimal replacement fluid cell

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/322,001 US4935634A (en) 1989-03-13 1989-03-13 Atomic force microscope with optional replaceable fluid cell
US07895984 USRE34489F1 (en) 1989-03-13 1992-06-04 Atomic force microscope with optimal replacement fluid cell

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US07/322,001 Reissue US4935634A (en) 1989-03-13 1989-03-13 Atomic force microscope with optional replaceable fluid cell

Publications (2)

Publication Number Publication Date
USRE34489E USRE34489E (en) 1993-12-28
USRE34489F1 true USRE34489F1 (en) 1999-12-14

Family

ID=23252966

Family Applications (2)

Application Number Title Priority Date Filing Date
US07/322,001 Ceased US4935634A (en) 1989-03-13 1989-03-13 Atomic force microscope with optional replaceable fluid cell
US07895984 Expired - Lifetime USRE34489F1 (en) 1989-03-13 1992-06-04 Atomic force microscope with optimal replacement fluid cell

Family Applications Before (1)

Application Number Title Priority Date Filing Date
US07/322,001 Ceased US4935634A (en) 1989-03-13 1989-03-13 Atomic force microscope with optional replaceable fluid cell

Country Status (5)

Country Link
US (2) US4935634A (en)
EP (3) EP0388023B1 (en)
JP (1) JPH0776696B2 (en)
AT (3) ATE125934T1 (en)
DE (3) DE69021235T2 (en)

Cited By (74)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5440920A (en) 1994-02-03 1995-08-15 Molecular Imaging Systems Scanning force microscope with beam tracking lens
US5466935A (en) * 1995-01-20 1995-11-14 Quesant Instrument Corporation Programmable, scanned-probe microscope system and method
US5467642A (en) * 1992-11-06 1995-11-21 Hitachi, Ltd. Scanning probe microscope and method of control error correction
US5515719A (en) * 1994-05-19 1996-05-14 Molecular Imaging Corporation Controlled force microscope for operation in liquids
WO1996024946A1 (en) * 1995-02-10 1996-08-15 Molecular Imaging Corporation Scanning probe microscope for use in fluids
USRE35317E (en) 1991-07-26 1996-08-27 The Arizona Board Of Regents Potentiostatic preparation of molecular adsorbates for scanning probe microscopy
US5581082A (en) * 1995-03-28 1996-12-03 The Regents Of The University Of California Combined scanning probe and scanning energy microscope
US5612491A (en) * 1994-05-19 1997-03-18 Molecular Imaging Corporation Formation of a magnetic film on an atomic force microscope cantilever
US5621210A (en) * 1995-02-10 1997-04-15 Molecular Imaging Corporation Microscope for force and tunneling microscopy in liquids
US5654546A (en) * 1995-11-07 1997-08-05 Molecular Imaging Corporation Variable temperature scanning probe microscope based on a peltier device
US5675154A (en) * 1995-02-10 1997-10-07 Molecular Imaging Corporation Scanning probe microscope
US5705814A (en) * 1995-08-30 1998-01-06 Digital Instruments, Inc. Scanning probe microscope having automatic probe exchange and alignment
US5753814A (en) 1994-05-19 1998-05-19 Molecular Imaging Corporation Magnetically-oscillated probe microscope for operation in liquids
US5821545A (en) * 1995-11-07 1998-10-13 Molecular Imaging Corporation Heated stage for a scanning probe microscope
US5861550A (en) * 1997-10-14 1999-01-19 Raymax Technology, Incorporated Scanning force microscope
US5866807A (en) * 1997-02-04 1999-02-02 Digital Instruments Method and apparatus for measuring mechanical properties on a small scale
US5866805A (en) * 1994-05-19 1999-02-02 Molecular Imaging Corporation Arizona Board Of Regents Cantilevers for a magnetically driven atomic force microscope
US5874668A (en) * 1995-10-24 1999-02-23 Arch Development Corporation Atomic force microscope for biological specimens
US5874669A (en) * 1997-10-16 1999-02-23 Raymax Technology, Inc. Scanning force microscope with removable probe illuminator assembly
US5958701A (en) * 1999-01-27 1999-09-28 The United States Of America As Represented By The Secretary Of The Navy Method for measuring intramolecular forces by atomic force
US5992226A (en) * 1998-05-08 1999-11-30 The United States Of America As Represented By The Secretary Of The Navy Apparatus and method for measuring intermolecular interactions by atomic force microscopy
USRE36488E (en) 1992-08-07 2000-01-11 Veeco Instruments Inc. Tapping atomic force microscope with phase or frequency detection
WO2001006205A1 (en) * 1999-07-15 2001-01-25 Veeco Instruments, Inc. Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample
US20030015653A1 (en) * 2001-07-18 2003-01-23 Hansma Paul K. Measurement head for atomic force microscopy and other applications
US20030041657A1 (en) * 2001-08-21 2003-03-06 Degertekin F. Levent Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument
WO2003038409A1 (en) * 2001-10-30 2003-05-08 Veeco Instruments, Inc. Cantilever array sensor system
US6694817B2 (en) 2001-08-21 2004-02-24 Georgia Tech Research Corporation Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument
US20040206166A1 (en) * 2002-12-18 2004-10-21 Roger Proksch Fully digital controller for cantilever-based instruments
US20040250608A1 (en) * 1997-10-16 2004-12-16 Ray David J. Removable probe sensor assembly and scanning probe microscope
US20050028583A1 (en) * 2002-07-02 2005-02-10 Chanmin Su Method and apparatus of driving torsional resonance mode of a probe-based instrument
US20050212529A1 (en) * 2002-07-02 2005-09-29 Lin Huang Method and apparatus for measuring electrical properties in torsional resonance mode
US20050241392A1 (en) * 2004-03-09 2005-11-03 Lyubchenko Yuri L Atomic force microscope tip holder for imaging in liquid
US20060000263A1 (en) * 2004-04-14 2006-01-05 Veeco Instruments Inc. Method and apparatus for obtaining quantitative measurements using a probe based instrument
US20060043289A1 (en) * 2004-08-31 2006-03-02 West Paul E Environmental cell for a scanning probe microscope
US20060112760A1 (en) * 2004-11-30 2006-06-01 Hansma Paul K Scanner for probe microscopy
US7076996B2 (en) 2002-10-31 2006-07-18 Veeco Instruments Inc. Environmental scanning probe microscope
US20060186878A1 (en) * 2000-11-30 2006-08-24 Roger Proksch Linear variable differential transformers for high precision position measurements
US20060191329A1 (en) * 1999-03-29 2006-08-31 Adderton Dennis M Dynamic activation for an atomic force microscope and method of use thereof
US7107694B2 (en) 2004-06-29 2006-09-19 Hysitron, Incorporated Method for observation of microstructural surface features in heterogeneous materials
US20060230474A1 (en) * 2005-04-12 2006-10-12 Mininni Paul I Method and apparatus for rapid automatic engagement of a prove
US20070033991A1 (en) * 2005-08-12 2007-02-15 Veeco Instruments Inc. Tracking qualification and self-optimizing probe microscope and method
US20070067140A1 (en) * 2005-09-16 2007-03-22 Veeco Instruments Inc. Method and apparatus for measuring a characteristic of a sample feature
US20070208533A1 (en) * 2002-05-06 2007-09-06 Dahlen Gregory A Image reconstruction method
US20070220958A1 (en) * 2006-03-21 2007-09-27 Veeco Instruments Inc. Optical detection alignment/tracking method and apparatus
US20070227236A1 (en) * 2006-03-13 2007-10-04 Bonilla Flavio A Nanoindenter
US20070251305A1 (en) * 2006-04-26 2007-11-01 Veeco Instruments Lnc. Method and Apparatus for Reducing Lateral Interactive Forces During Operation of a Probe-Based Instrument
US20080006083A1 (en) * 2006-06-26 2008-01-10 Feinstein Adam J Apparatus and method of transporting and loading probe devices of a metrology instrument
US20080011065A1 (en) * 2006-07-12 2008-01-17 Chanmin Su Thermal mechanical drive actuator, thermal probe and method of thermally driving a probe
US20080087077A1 (en) * 2006-10-17 2008-04-17 Mininni Paul L Method and apparatus of scanning a sample using a scanning probe microscope
US20080121813A1 (en) * 2006-11-03 2008-05-29 Young James M Method and apparatus of compensating for position shift
US20080127722A1 (en) * 2006-11-30 2008-06-05 Chanmin Su Method and apparatus for obtaining material property information of a heterogeneous sample using harmonic resonance imaging
US20080154521A1 (en) * 2006-12-22 2008-06-26 Tianming Bao Systems and methods for utilizing scanning probe shape characterization
US20080223119A1 (en) * 2007-03-16 2008-09-18 Veeco Instruments Inc. Fast-Scanning SPM Scanner and Method of Operating Same
US7429732B2 (en) 2005-09-30 2008-09-30 Veeco Instruments Inc. Scanning probe microscopy method and apparatus utilizing sample pitch
US20090031792A1 (en) * 2007-08-02 2009-02-05 Wenjun Fan Probe Device for a Metrology Instrument and Method of Fabricating the Same
US20090184242A1 (en) * 2008-01-22 2009-07-23 Nanosurf Ag Optical detection system for micromechanical cantilevers, especially in scanning probe microscopes
US20090205092A1 (en) * 2007-12-28 2009-08-13 Veeco Instruments Inc. Method of fabricating a probe device for a metrology instrument and a probe device produced thereby
US7770231B2 (en) 2007-08-02 2010-08-03 Veeco Instruments, Inc. Fast-scanning SPM and method of operating same
US20100300942A1 (en) * 2009-06-02 2010-12-02 Georgia Tech Research Corporation Microfluidic device for separation of particles
US20100306887A1 (en) * 2009-05-29 2010-12-02 Georgia Tech Research Corporation Molded microfluidic fluid cell for atomic force microscopy
US8782811B2 (en) 2011-04-29 2014-07-15 Bruker Nano, Inc. Cleaning station for atomic force microscope
WO2014144496A1 (en) 2013-03-15 2014-09-18 Bruker Nano, Inc. Chemical nano-identification of a sample using normalized near-field spectroscopy
US8904560B2 (en) 2007-05-07 2014-12-02 Bruker Nano, Inc. Closed loop controller and method for fast scanning probe microscopy
US9052336B2 (en) 2013-03-08 2015-06-09 Bruker Nano, Inc. Method and apparatus of physical property measurement using a probe-based nano-localized light source
US9097737B2 (en) 2013-11-25 2015-08-04 Oxford Instruments Asylum Research, Inc. Modular atomic force microscope with environmental controls
US9213047B2 (en) 2008-11-13 2015-12-15 Bruker Nano, Inc. Method and apparatus of electrical property measurement using an AFM operating in peak force tapping mode
US9291639B2 (en) 2013-03-15 2016-03-22 Bruker Nano, Inc. Dual-probe scanning probe microscope
US9739799B2 (en) 2014-02-28 2017-08-22 Bruker Nano, Inc. Method and apparatus to compensate for deflection artifacts in an atomic force microscope
US20170343831A1 (en) * 2016-05-26 2017-11-30 Heptagon Micro Optics Pte. Ltd. Optoelectronic modules including an optical system tilted with respect to a focal plane
EP3293527A2 (en) 2012-06-22 2018-03-14 Bruker Nano, Inc. Method and apparatus of electrical property measurement using an afm operating in peak force tapping mode
US9995763B2 (en) 2014-02-24 2018-06-12 Bruker Nano, Inc. Precise probe placement in automated scanning probe microscopy systems
US10345337B2 (en) 2017-04-13 2019-07-09 Bruker Nano, Inc. Scanning probe microscopy utilizing separable components
WO2019191037A1 (en) 2018-03-26 2019-10-03 Bruker Nano, Inc. Large radius probe
WO2020227222A1 (en) 2019-05-03 2020-11-12 Bruker Nano, Inc. Torsion wing probe assembly

Families Citing this family (69)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8910566D0 (en) * 1989-05-08 1989-06-21 Amersham Int Plc Imaging apparatus and method
US5237859A (en) * 1989-12-08 1993-08-24 Digital Instruments, Inc. Atomic force microscope
US5224376A (en) * 1989-12-08 1993-07-06 Digital Instruments, Inc. Atomic force microscope
US5103095A (en) * 1990-05-23 1992-04-07 Digital Instruments, Inc. Scanning probe microscope employing adjustable tilt and unitary head
US5193383A (en) * 1990-07-11 1993-03-16 The United States Of America As Represented By The Secretary Of The Navy Mechanical and surface force nanoprobe
US5394741A (en) * 1990-07-11 1995-03-07 Olympus Optical Co., Ltd. Atomic probe microscope
US5245863A (en) * 1990-07-11 1993-09-21 Olympus Optical Co., Ltd. Atomic probe microscope
JP2501945B2 (en) * 1990-08-28 1996-05-29 三菱電機株式会社 Atomic force microscope cantilever and manufacturing method thereof
US5144833A (en) * 1990-09-27 1992-09-08 International Business Machines Corporation Atomic force microscopy
US5157251A (en) * 1991-03-13 1992-10-20 Park Scientific Instruments Scanning force microscope having aligning and adjusting means
DE69226554T2 (en) * 1991-03-15 1999-03-04 Nikon Corp., Tokio/Tokyo Microscope consisting of a scanning tunnel microscope combined with an optical microscope
US5317153A (en) * 1991-08-08 1994-05-31 Nikon Corporation Scanning probe microscope
CH685518A5 (en) * 1991-10-15 1995-07-31 Suisse Electronique Microtech interferometric sensor atomic resolution, use and implementation processes.
US5254854A (en) * 1991-11-04 1993-10-19 At&T Bell Laboratories Scanning microscope comprising force-sensing means and position-sensitive photodetector
JP2520049Y2 (en) * 1991-12-18 1996-12-11 アルプス電気株式会社 Fiber holding structure for photoelectric sensor
US5291775A (en) * 1992-03-04 1994-03-08 Topometrix Scanning force microscope with integrated optics and cantilever mount
US5319960A (en) * 1992-03-06 1994-06-14 Topometrix Scanning force microscope
US5376790A (en) * 1992-03-13 1994-12-27 Park Scientific Instruments Scanning probe microscope
US5448399A (en) 1992-03-13 1995-09-05 Park Scientific Instruments Optical system for scanning microscope
US5672816A (en) * 1992-03-13 1997-09-30 Park Scientific Instruments Large stage system for scanning probe microscopes and other instruments
US5218262A (en) * 1992-04-06 1993-06-08 The Perkin-Elmer Corporation Apparatus for retaining an electrode by a magnetically shielded magnet
US5476006A (en) * 1992-07-07 1995-12-19 Matsushita Electronics Corporation Crystal evaluation apparatus and crystal evaluation method
US5412980A (en) * 1992-08-07 1995-05-09 Digital Instruments, Inc. Tapping atomic force microscope
US5519212A (en) * 1992-08-07 1996-05-21 Digital Instruments, Incorporated Tapping atomic force microscope with phase or frequency detection
US5347854A (en) * 1992-09-22 1994-09-20 International Business Machines Corporation Two dimensional profiling with a contact force atomic force microscope
US5260577A (en) * 1992-11-09 1993-11-09 International Business Machines Corp. Sample carriage for scanning probe microscope
US5400647A (en) * 1992-11-12 1995-03-28 Digital Instruments, Inc. Methods of operating atomic force microscopes to measure friction
US5463897A (en) * 1993-08-17 1995-11-07 Digital Instruments, Inc. Scanning stylus atomic force microscope with cantilever tracking and optical access
US5357105A (en) * 1993-11-09 1994-10-18 Quesant Instrument Corporation Light modulated detection system for atomic force microscopes
JP3523688B2 (en) * 1994-07-06 2004-04-26 オリンパス株式会社 Probe device for sample measurement
JP2936311B2 (en) * 1994-09-09 1999-08-23 セイコーインスツルメンツ株式会社 Scanning near-field atomic force microscope with in-liquid observation function
US5811802A (en) * 1995-08-18 1998-09-22 Gamble; Ronald C. Scanning probe microscope with hollow pivot assembly
JP2934739B2 (en) * 1996-02-20 1999-08-16 セイコーインスツルメンツ株式会社 Scanning near-field atomic force microscope
US5825020A (en) * 1996-09-06 1998-10-20 The Regents Of The University Of California Atomic force microscope for generating a small incident beam spot
US5847387A (en) * 1996-09-10 1998-12-08 Burleigh Instruments, Inc. Support device and stage assembly for a scanned-probe microscope
US5831153A (en) * 1997-02-14 1998-11-03 International Business Machines Corporation Investigation and/or manipulation device for a sample in fluid
JP3497734B2 (en) * 1997-07-24 2004-02-16 オリンパス株式会社 Scanning probe microscope
WO2000019166A1 (en) * 1998-09-26 2000-04-06 Xidex Corporation Multidimensional sensing system for atomic force miscroscopy
US6455838B2 (en) 1998-10-06 2002-09-24 The Regents Of The University Of California High sensitivity deflection sensing device
US6189374B1 (en) * 1999-03-29 2001-02-20 Nanodevices, Inc. Active probe for an atomic force microscope and method of use thereof
DE19935570C2 (en) * 1999-07-30 2001-07-05 Forschungszentrum Juelich Gmbh Micromanipulator
US6441371B1 (en) 2000-04-03 2002-08-27 Korea Institute Of Science And Technology Scanning probe microscope
RU2210731C2 (en) * 2001-04-12 2003-08-20 Зао "Нт-Мдт" Scanning sounding microscope with liquid cell
JP4076792B2 (en) * 2001-06-19 2008-04-16 独立行政法人科学技術振興機構 Cantilever array, manufacturing method and apparatus
US20030233870A1 (en) * 2001-07-18 2003-12-25 Xidex Corporation Multidimensional sensing system for atomic force microscopy
WO2003028038A2 (en) * 2001-09-24 2003-04-03 Jpk Instruments Ag Method and device for analysing a sample by means of a raster scanning probe microscope
JP4050055B2 (en) * 2002-01-10 2008-02-20 株式会社リコー Handwritten character batch conversion apparatus, handwritten character batch conversion method, and program
US6912892B2 (en) * 2002-04-30 2005-07-05 Hewlett-Packard Development Company, L.P. Atomic force microscope
US7521257B2 (en) * 2003-02-11 2009-04-21 The Board Of Regents Of The Nevada System Of Higher Education On Behalf Of The University Of Nevada, Reno Chemical sensor with oscillating cantilevered probe and mechanical stop
US7260980B2 (en) 2003-03-11 2007-08-28 Adams Jesse D Liquid cell and passivated probe for atomic force microscopy and chemical sensing
EP1644473B1 (en) * 2003-06-03 2014-01-15 Cantimer Incorporated Phase change sensor
US20060257286A1 (en) * 2003-10-17 2006-11-16 Adams Jesse D Self-sensing array of microcantilevers for chemical detection
US7694346B2 (en) * 2004-10-01 2010-04-06 Board Of Regents Of The Nevada System Of Higher Education On Behalf Of The University Of Nevada Cantilevered probe detector with piezoelectric element
JP4660782B2 (en) * 2005-10-31 2011-03-30 セイコーインスツル株式会社 Liquid cell
EP2013609A2 (en) * 2005-12-31 2009-01-14 Carbon Nanoprobes, Inc. Atomic force microscope tip arrays and methods of manufacturing same
DE102006043352A1 (en) * 2006-09-15 2008-03-27 Westfälische Wilhelms-Universität Münster Device for scanning a sample surface covered by a liquid
KR100825985B1 (en) * 2006-12-21 2008-04-28 파크시스템스 주식회사 Scanning probe microscope with auto probe exchange function
EP1950764A1 (en) * 2007-01-23 2008-07-30 Nambition GmbH Fluid cell for raster scanning probe microscopy or force spectroscopy
DE102007034853A1 (en) * 2007-07-24 2009-02-05 Jpk Instruments Ag Method and device for improved microfluidic supply of samples and measuring device
US7958776B2 (en) * 2007-09-06 2011-06-14 Chunhai Wang Atomic force gradient microscope and method of using this microscope
WO2016085989A1 (en) * 2014-11-25 2016-06-02 The Trustees Of The University Of Pennsylvania In situ tribometer and methods of use
CN104501752A (en) * 2014-12-25 2015-04-08 中国工程物理研究院机械制造工艺研究所 Aligning device for circular arc edge diamond cutting tool
CN104793018B (en) * 2015-04-08 2017-07-14 中国科学院长春光学精密机械与物理研究所 A kind of tool edge radius detection edge positioning device under an atomic force microscope
CN106353535A (en) * 2016-10-10 2017-01-25 中国科学院深圳先进技术研究院 In-situ photoelectric multifunctional coupling atomic force microscope testing system
JP6939686B2 (en) * 2018-04-16 2021-09-22 株式会社島津製作所 Scanning probe microscope and cantilever movement method
CN108827772A (en) * 2018-05-03 2018-11-16 四川大学 A kind of optical lever for steel wire Young measuring instrument
CN110967524A (en) * 2018-09-30 2020-04-07 天津大学 Probe holder of atomic force microscope and probe changing device thereof
CN109828124B (en) * 2019-03-27 2023-09-22 西南交通大学 Multi-probe scanning detection device with wide laser head and adjustable focusing height
WO2024086687A2 (en) * 2022-10-21 2024-04-25 Cameca Instruments, Inc. Positioner for analytic instruments within vacuum chamber

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0223918B1 (en) * 1985-11-26 1990-10-24 International Business Machines Corporation Method and atomic force microscope for imaging surfaces with atomic resolution
JPS62212507A (en) * 1986-03-14 1987-09-18 Agency Of Ind Science & Technol Probe type surface shape detector requiring no calibration by laser interferometer
DE3610540A1 (en) * 1986-03-27 1987-10-01 Kernforschungsanlage Juelich MOTION DEVICE FOR MICROMOVING OBJECTS
JPH067042B2 (en) * 1987-03-25 1994-01-26 工業技術院長 Piezoelectric element fine movement mechanism
DE3772563D1 (en) * 1987-06-22 1991-10-02 Ibm METHOD FOR SURFACE EXAMINATION WITH NANOMETER AND PICOSECOND RESOLUTION AND LASER-SCANNED SCANNING TUNNEL MICROSCOPE FOR IMPLEMENTING THE METHOD.
US4823004A (en) * 1987-11-24 1989-04-18 California Institute Of Technology Tunnel and field effect carrier ballistics

Cited By (143)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE35317E (en) 1991-07-26 1996-08-27 The Arizona Board Of Regents Potentiostatic preparation of molecular adsorbates for scanning probe microscopy
USRE36488E (en) 1992-08-07 2000-01-11 Veeco Instruments Inc. Tapping atomic force microscope with phase or frequency detection
US5467642A (en) * 1992-11-06 1995-11-21 Hitachi, Ltd. Scanning probe microscope and method of control error correction
US5587523A (en) * 1994-02-03 1996-12-24 Molecular Imaging Corporation Atomic force microscope employing beam tracking
US5440920A (en) 1994-02-03 1995-08-15 Molecular Imaging Systems Scanning force microscope with beam tracking lens
US5763767A (en) 1994-02-03 1998-06-09 Molecular Imaging Corp. Atomic force microscope employing beam-tracking
US5612491A (en) * 1994-05-19 1997-03-18 Molecular Imaging Corporation Formation of a magnetic film on an atomic force microscope cantilever
US5866805A (en) * 1994-05-19 1999-02-02 Molecular Imaging Corporation Arizona Board Of Regents Cantilevers for a magnetically driven atomic force microscope
US6134955A (en) 1994-05-19 2000-10-24 Molecular Imaging Corporation Magnetic modulation of force sensor for AC detection in an atomic force microscope
US5753814A (en) 1994-05-19 1998-05-19 Molecular Imaging Corporation Magnetically-oscillated probe microscope for operation in liquids
US5515719A (en) * 1994-05-19 1996-05-14 Molecular Imaging Corporation Controlled force microscope for operation in liquids
US5466935A (en) * 1995-01-20 1995-11-14 Quesant Instrument Corporation Programmable, scanned-probe microscope system and method
US5621210A (en) * 1995-02-10 1997-04-15 Molecular Imaging Corporation Microscope for force and tunneling microscopy in liquids
US5675154A (en) * 1995-02-10 1997-10-07 Molecular Imaging Corporation Scanning probe microscope
US5750989A (en) * 1995-02-10 1998-05-12 Molecular Imaging Corporation Scanning probe microscope for use in fluids
US5760396A (en) * 1995-02-10 1998-06-02 Molecular Imaging Corporation Scanning probe microscope
WO1996024946A1 (en) * 1995-02-10 1996-08-15 Molecular Imaging Corporation Scanning probe microscope for use in fluids
US5581082A (en) * 1995-03-28 1996-12-03 The Regents Of The University Of California Combined scanning probe and scanning energy microscope
US5705814A (en) * 1995-08-30 1998-01-06 Digital Instruments, Inc. Scanning probe microscope having automatic probe exchange and alignment
US5874668A (en) * 1995-10-24 1999-02-23 Arch Development Corporation Atomic force microscope for biological specimens
US5821545A (en) * 1995-11-07 1998-10-13 Molecular Imaging Corporation Heated stage for a scanning probe microscope
US5654546A (en) * 1995-11-07 1997-08-05 Molecular Imaging Corporation Variable temperature scanning probe microscope based on a peltier device
US5866807A (en) * 1997-02-04 1999-02-02 Digital Instruments Method and apparatus for measuring mechanical properties on a small scale
US6189373B1 (en) 1997-10-14 2001-02-20 Ray Max Technology, Inc. Scanning force microscope and method for beam detection and alignment
US5861550A (en) * 1997-10-14 1999-01-19 Raymax Technology, Incorporated Scanning force microscope
US5874669A (en) * 1997-10-16 1999-02-23 Raymax Technology, Inc. Scanning force microscope with removable probe illuminator assembly
US20040250608A1 (en) * 1997-10-16 2004-12-16 Ray David J. Removable probe sensor assembly and scanning probe microscope
US6910368B2 (en) 1997-10-16 2005-06-28 Raymax Technology, Inc. Removable probe sensor assembly and scanning probe microscope
US5992226A (en) * 1998-05-08 1999-11-30 The United States Of America As Represented By The Secretary Of The Navy Apparatus and method for measuring intermolecular interactions by atomic force microscopy
US5958701A (en) * 1999-01-27 1999-09-28 The United States Of America As Represented By The Secretary Of The Navy Method for measuring intramolecular forces by atomic force
US7204131B2 (en) 1999-03-29 2007-04-17 Veeco Instruments Inc. Dynamic activation for an atomic force microscope and method of use thereof
US20060191329A1 (en) * 1999-03-29 2006-08-31 Adderton Dennis M Dynamic activation for an atomic force microscope and method of use thereof
WO2001006205A1 (en) * 1999-07-15 2001-01-25 Veeco Instruments, Inc. Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample
US6185992B1 (en) 1999-07-15 2001-02-13 Veeco Instruments Inc. Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample
US6389886B2 (en) 1999-07-15 2002-05-21 Veeco Instruments Inc. Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample
US20060192551A1 (en) * 2000-11-30 2006-08-31 Roger Proksch Linear variable differential transformers for high precision position measurements
US20060186878A1 (en) * 2000-11-30 2006-08-24 Roger Proksch Linear variable differential transformers for high precision position measurements
US7459904B2 (en) 2000-11-30 2008-12-02 Roger Proksch Precision position sensor using a nonmagnetic coil form
US7271582B2 (en) 2000-11-30 2007-09-18 Asylum Research Corporation Linear variable differential transformers for high precision position measurements
US7233140B2 (en) 2000-11-30 2007-06-19 Asylum Research Corporation Position sensing assembly with sychronizing capability
US20070200559A1 (en) * 2000-11-30 2007-08-30 Asylum Research Corporation Position Sensing Assembly with Synchronizing Capability
US7372254B2 (en) 2000-11-30 2008-05-13 Asylum Research Corporation Linear force detecting element formed without ferromagnetic materials which produces a resolution in a range of microns or less
US7262592B2 (en) 2000-11-30 2007-08-28 Asylum Research Corporation Linear variable differential transformers for high precision position measurements
US20030015653A1 (en) * 2001-07-18 2003-01-23 Hansma Paul K. Measurement head for atomic force microscopy and other applications
US6871527B2 (en) 2001-07-18 2005-03-29 The Regents Of The University Of California Measurement head for atomic force microscopy and other applications
US6779387B2 (en) 2001-08-21 2004-08-24 Georgia Tech Research Corporation Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument
US20030041657A1 (en) * 2001-08-21 2003-03-06 Degertekin F. Levent Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument
WO2003019107A1 (en) * 2001-08-21 2003-03-06 Georgia Tech Research Corporation Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument
US6694817B2 (en) 2001-08-21 2004-02-24 Georgia Tech Research Corporation Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument
WO2003038409A1 (en) * 2001-10-30 2003-05-08 Veeco Instruments, Inc. Cantilever array sensor system
US7684956B2 (en) 2002-05-06 2010-03-23 Veeco Instruments, Inc. Image reconstruction method
US20070208533A1 (en) * 2002-05-06 2007-09-06 Dahlen Gregory A Image reconstruction method
US20050212529A1 (en) * 2002-07-02 2005-09-29 Lin Huang Method and apparatus for measuring electrical properties in torsional resonance mode
US7155964B2 (en) 2002-07-02 2007-01-02 Veeco Instruments Inc. Method and apparatus for measuring electrical properties in torsional resonance mode
US7168301B2 (en) 2002-07-02 2007-01-30 Veeco Instruments Inc. Method and apparatus of driving torsional resonance mode of a probe-based instrument
US7574903B2 (en) 2002-07-02 2009-08-18 Veeco Instruments Inc. Method and apparatus of driving torsional resonance mode of a probe-based instrument
US7757544B2 (en) 2002-07-02 2010-07-20 Veeco Instruments Inc. Method and apparatus for measuring electrical properties in torsional resonance mode
US20070119241A1 (en) * 2002-07-02 2007-05-31 Chanmin Su Method and apparatus of driving torsional resonance mode of a probe-based instrument
US20050028583A1 (en) * 2002-07-02 2005-02-10 Chanmin Su Method and apparatus of driving torsional resonance mode of a probe-based instrument
US7076996B2 (en) 2002-10-31 2006-07-18 Veeco Instruments Inc. Environmental scanning probe microscope
US7234342B2 (en) 2002-12-18 2007-06-26 Asylum Research Corporation Fully digital controller for cantilever-based instruments
US10107832B2 (en) 2002-12-18 2018-10-23 Oxford Instruments Plc Fully digitally controller for cantilever-based instruments
US20100333240A1 (en) * 2002-12-18 2010-12-30 Asylum Research Corporation Fully Digitally Controller for Cantilever-Based Instruments
US20040206166A1 (en) * 2002-12-18 2004-10-21 Roger Proksch Fully digital controller for cantilever-based instruments
US7937991B2 (en) 2002-12-18 2011-05-10 Asylum Research Corporation Fully digitally controller for cantilever-based instruments
US8205488B2 (en) 2002-12-18 2012-06-26 Asylum Research Corporation Fully digitally controller for cantilever-based instruments
US8925376B2 (en) 2002-12-18 2015-01-06 Oxford Instruments Plc Fully digitally controller for cantilever-based instruments
US9689890B2 (en) 2002-12-18 2017-06-27 Oxford Instruments Plc Fully digitally controller for cantilever-based instruments
US20080011067A1 (en) * 2002-12-18 2008-01-17 Asylum Research Corporation Fully digitally controller for cantilever-based instruments
US20050241392A1 (en) * 2004-03-09 2005-11-03 Lyubchenko Yuri L Atomic force microscope tip holder for imaging in liquid
US7596990B2 (en) 2004-04-14 2009-10-06 Veeco Instruments, Inc. Method and apparatus for obtaining quantitative measurements using a probe based instrument
EP2040265A2 (en) 2004-04-14 2009-03-25 Veeco Instruments, INC. Method and apparatus for obtaining quantitative measurements using a probe based instrument
US20060000263A1 (en) * 2004-04-14 2006-01-05 Veeco Instruments Inc. Method and apparatus for obtaining quantitative measurements using a probe based instrument
US7107694B2 (en) 2004-06-29 2006-09-19 Hysitron, Incorporated Method for observation of microstructural surface features in heterogeneous materials
US7253408B2 (en) * 2004-08-31 2007-08-07 West Paul E Environmental cell for a scanning probe microscope
US20060043289A1 (en) * 2004-08-31 2006-03-02 West Paul E Environmental cell for a scanning probe microscope
US7278298B2 (en) 2004-11-30 2007-10-09 The Regents Of The University Of California Scanner for probe microscopy
US7555941B2 (en) 2004-11-30 2009-07-07 The Regents Of The University Of California Scanner for probe microscopy
US20080078240A1 (en) * 2004-11-30 2008-04-03 The Regents Of The University Of California Scanner for probe microscopy
US20060112760A1 (en) * 2004-11-30 2006-06-01 Hansma Paul K Scanner for probe microscopy
US7665349B2 (en) 2005-04-12 2010-02-23 Veeco Instruments Inc. Method and apparatus for rapid automatic engagement of a probe
US20060230474A1 (en) * 2005-04-12 2006-10-12 Mininni Paul I Method and apparatus for rapid automatic engagement of a prove
US7513142B2 (en) 2005-08-12 2009-04-07 Veeco Instruments Inc. Tracking qualification and self-optimizing probe microscope and method
US20070033991A1 (en) * 2005-08-12 2007-02-15 Veeco Instruments Inc. Tracking qualification and self-optimizing probe microscope and method
US7421370B2 (en) 2005-09-16 2008-09-02 Veeco Instruments Inc. Method and apparatus for measuring a characteristic of a sample feature
US20070067140A1 (en) * 2005-09-16 2007-03-22 Veeco Instruments Inc. Method and apparatus for measuring a characteristic of a sample feature
US7429732B2 (en) 2005-09-30 2008-09-30 Veeco Instruments Inc. Scanning probe microscopy method and apparatus utilizing sample pitch
US8196458B2 (en) 2006-03-13 2012-06-12 Asylum Research Corporation Nanoindenter
US9063042B2 (en) 2006-03-13 2015-06-23 Oxford Instruments Plc Nanoindenter
US20100180356A1 (en) * 2006-03-13 2010-07-15 Asylum Research Corporation Nanoindenter
US20070227236A1 (en) * 2006-03-13 2007-10-04 Bonilla Flavio A Nanoindenter
US7685869B2 (en) 2006-03-13 2010-03-30 Asylum Research Corporation Nanoindenter
US7478552B2 (en) 2006-03-21 2009-01-20 Veeco Instruments Inc. Optical detection alignment/tracking method and apparatus
US20070220958A1 (en) * 2006-03-21 2007-09-27 Veeco Instruments Inc. Optical detection alignment/tracking method and apparatus
US20070251305A1 (en) * 2006-04-26 2007-11-01 Veeco Instruments Lnc. Method and Apparatus for Reducing Lateral Interactive Forces During Operation of a Probe-Based Instrument
US7607342B2 (en) 2006-04-26 2009-10-27 Vecco Instruments, Inc. Method and apparatus for reducing lateral interactive forces during operation of a probe-based instrument
US20080006083A1 (en) * 2006-06-26 2008-01-10 Feinstein Adam J Apparatus and method of transporting and loading probe devices of a metrology instrument
US7908909B2 (en) 2006-06-26 2011-03-22 Bruker Nano, Inc. Apparatus and method of transporting and loading probe devices of a metrology instrument
US20080179206A1 (en) * 2006-06-26 2008-07-31 Veeco Instruments Inc. Apparatus and method of transporting and loading probe devices of a metrology instrument
US7748260B2 (en) 2006-07-12 2010-07-06 Veeco Instruments Inc. Thermal mechanical drive actuator, thermal probe and method of thermally driving a probe
US20080011065A1 (en) * 2006-07-12 2008-01-17 Chanmin Su Thermal mechanical drive actuator, thermal probe and method of thermally driving a probe
US20080087077A1 (en) * 2006-10-17 2008-04-17 Mininni Paul L Method and apparatus of scanning a sample using a scanning probe microscope
US7770439B2 (en) 2006-10-17 2010-08-10 Veeco Instruments Inc. Method and apparatus of scanning a sample using a scanning probe microscope
US20080121813A1 (en) * 2006-11-03 2008-05-29 Young James M Method and apparatus of compensating for position shift
US8050802B2 (en) 2006-11-03 2011-11-01 Bruker Nano, Inc. Method and apparatus of compensating for position shift
US20080127722A1 (en) * 2006-11-30 2008-06-05 Chanmin Su Method and apparatus for obtaining material property information of a heterogeneous sample using harmonic resonance imaging
US7617719B2 (en) 2006-11-30 2009-11-17 The Dow Chemical Company Method and apparatus for obtaining material property information of a heterogeneous sample using harmonic resonance imaging
US20080154521A1 (en) * 2006-12-22 2008-06-26 Tianming Bao Systems and methods for utilizing scanning probe shape characterization
US7578176B2 (en) 2006-12-22 2009-08-25 Veeco Metrology, Inc. Systems and methods for utilizing scanning probe shape characterization
US8443459B2 (en) 2007-03-16 2013-05-14 Bruker Nano, Inc. Fast-scanning SPM scanner and method of operating same
US20080223119A1 (en) * 2007-03-16 2008-09-18 Veeco Instruments Inc. Fast-Scanning SPM Scanner and Method of Operating Same
US8166567B2 (en) 2007-03-16 2012-04-24 Bruker Nano, Inc. Fast-scanning SPM scanner and method of operating same
US9244096B2 (en) 2007-05-07 2016-01-26 Bruke Nano, Inc. Closed loop controller and method for fast scanning probe microscopy
US8904560B2 (en) 2007-05-07 2014-12-02 Bruker Nano, Inc. Closed loop controller and method for fast scanning probe microscopy
US20090031792A1 (en) * 2007-08-02 2009-02-05 Wenjun Fan Probe Device for a Metrology Instrument and Method of Fabricating the Same
US7823216B2 (en) * 2007-08-02 2010-10-26 Veeco Instruments Inc. Probe device for a metrology instrument and method of fabricating the same
US7770231B2 (en) 2007-08-02 2010-08-03 Veeco Instruments, Inc. Fast-scanning SPM and method of operating same
US8595860B2 (en) 2007-12-28 2013-11-26 Bruker Nano, Inc. Method of fabricating a probe device for a metrology instrument and a probe device produced thereby
US20090205092A1 (en) * 2007-12-28 2009-08-13 Veeco Instruments Inc. Method of fabricating a probe device for a metrology instrument and a probe device produced thereby
US20090184242A1 (en) * 2008-01-22 2009-07-23 Nanosurf Ag Optical detection system for micromechanical cantilevers, especially in scanning probe microscopes
US7759631B2 (en) 2008-01-22 2010-07-20 Nanosurf Ag Raster scanning microscope having transparent optical element with inner curved surface
US9213047B2 (en) 2008-11-13 2015-12-15 Bruker Nano, Inc. Method and apparatus of electrical property measurement using an AFM operating in peak force tapping mode
US8214917B2 (en) 2009-05-29 2012-07-03 Georgia Tech Research Corporation Molded microfluidic fluid cell for atomic force microscopy
US20100306887A1 (en) * 2009-05-29 2010-12-02 Georgia Tech Research Corporation Molded microfluidic fluid cell for atomic force microscopy
US20100300942A1 (en) * 2009-06-02 2010-12-02 Georgia Tech Research Corporation Microfluidic device for separation of particles
US8356714B2 (en) 2009-06-02 2013-01-22 Georgia Tech Research Corporation Microfluidic device for separation of particles
US8782811B2 (en) 2011-04-29 2014-07-15 Bruker Nano, Inc. Cleaning station for atomic force microscope
EP3293527A2 (en) 2012-06-22 2018-03-14 Bruker Nano, Inc. Method and apparatus of electrical property measurement using an afm operating in peak force tapping mode
US9052336B2 (en) 2013-03-08 2015-06-09 Bruker Nano, Inc. Method and apparatus of physical property measurement using a probe-based nano-localized light source
EP3467518A1 (en) 2013-03-15 2019-04-10 Bruker Nano, Inc. Chemical nano-identification of a sample using normalized near-field spectroscopy
WO2014144496A1 (en) 2013-03-15 2014-09-18 Bruker Nano, Inc. Chemical nano-identification of a sample using normalized near-field spectroscopy
EP4345463A2 (en) 2013-03-15 2024-04-03 Bruker Nano, Inc. Chemical nano-identification of a sample using normalized near-field spectroscopy
US9291639B2 (en) 2013-03-15 2016-03-22 Bruker Nano, Inc. Dual-probe scanning probe microscope
US9097737B2 (en) 2013-11-25 2015-08-04 Oxford Instruments Asylum Research, Inc. Modular atomic force microscope with environmental controls
US9581616B2 (en) 2013-11-25 2017-02-28 Oxford Instruments Asylum Research, Inc Modular atomic force microscope with environmental controls
US10416190B2 (en) 2013-11-25 2019-09-17 Oxford Instruments Asylum Research Inc Modular atomic force microscope with environmental controls
US9995763B2 (en) 2014-02-24 2018-06-12 Bruker Nano, Inc. Precise probe placement in automated scanning probe microscopy systems
US9739799B2 (en) 2014-02-28 2017-08-22 Bruker Nano, Inc. Method and apparatus to compensate for deflection artifacts in an atomic force microscope
US20170343831A1 (en) * 2016-05-26 2017-11-30 Heptagon Micro Optics Pte. Ltd. Optoelectronic modules including an optical system tilted with respect to a focal plane
US10466501B2 (en) * 2016-05-26 2019-11-05 Ams Sensors Singapore Pte. Ltd. Optoelectronic modules including an optical system tilted with respect to a focal plane
US10345337B2 (en) 2017-04-13 2019-07-09 Bruker Nano, Inc. Scanning probe microscopy utilizing separable components
WO2019191037A1 (en) 2018-03-26 2019-10-03 Bruker Nano, Inc. Large radius probe
WO2020227222A1 (en) 2019-05-03 2020-11-12 Bruker Nano, Inc. Torsion wing probe assembly

Also Published As

Publication number Publication date
EP0388023B1 (en) 1995-08-02
EP0862045A3 (en) 2000-10-04
JPH0776696B2 (en) 1995-08-16
DE69021235D1 (en) 1995-09-07
USRE34489E (en) 1993-12-28
EP0650029B1 (en) 1998-10-21
ATE384245T1 (en) 2008-02-15
EP0862045B1 (en) 2008-01-16
EP0862045A2 (en) 1998-09-02
DE69032714D1 (en) 1998-11-26
ATE125934T1 (en) 1995-08-15
DE69032714T2 (en) 1999-06-02
JPH02284015A (en) 1990-11-21
EP0650029A3 (en) 1996-08-28
EP0388023A3 (en) 1992-01-02
DE69021235T2 (en) 1996-01-04
EP0388023A2 (en) 1990-09-19
ATE172536T1 (en) 1998-11-15
EP0650029A2 (en) 1995-04-26
DE69034251D1 (en) 2008-03-06
US4935634A (en) 1990-06-19

Similar Documents

Publication Publication Date Title
USRE34489F1 (en) Atomic force microscope with optimal replacement fluid cell
EP0884617B1 (en) Scanning near-field optic/atomic-force microscope, probe for use in same, and method of fabricating said probe
EP0880043A3 (en) Scanning near field optical microscope
EP0674200A1 (en) Scanning near-field optic/atomic force microscope
US6884981B2 (en) Diffractive optical position detector
ATE218904T1 (en) APPARATUS FOR CORNEA SURGERY
DE69218386D1 (en) Optical device and device provided with such an optical device for scanning an information level
EP0429005A3 (en) Microscope with a diagonal observation light path
KR100215526B1 (en) Atomic force microscope and measuring head thereof
WO1987005766A1 (en) High resolution optical scanner
EP0283256A3 (en) Scanning optical microscope
ATE104792T1 (en) OPTICAL SCANNING DEVICE.
US20090059976A1 (en) Laser module and method for adjusting optical axis of the same
EP0321930A3 (en) Optical scanning device
JPS5674219A (en) Three-dimensional display device
Lin et al. Construction of a dual mode scanning near-field optical microscope based on a tapping mode atomic force microscope
WO2001078938B1 (en) Device for focusing a laser beam exiting from a glass fiber
EP0539660A3 (en) Process of micromanipulation and apparatus with utilization for in vitro fertilization
JPS6421408A (en) Adjusting structure for optical fiber lens array
JPS5641530A (en) Photodisk recording device
EP0375340A3 (en) Optical scanner
JPS6425529A (en) Wafer-pattern detecting apparatus
Taylor Tethered Hybrid Afm-Nsom Scanning Probe Microscopy for Photonic Applications
JPS55115163A (en) Bar code reader
Hörsch et al. A Stand-Alone Scanning Near-Field Optical Microscope

Legal Events

Date Code Title Description
FEPP Fee payment procedure

Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY

FPAY Fee payment

Year of fee payment: 4

FPAY Fee payment

Year of fee payment: 8

FPAY Fee payment

Year of fee payment: 12