Nothing Special   »   [go: up one dir, main page]

US20090239072A1 - Carbon nanotube needle and method for making the same - Google Patents

Carbon nanotube needle and method for making the same Download PDF

Info

Publication number
US20090239072A1
US20090239072A1 US12/313,935 US31393508A US2009239072A1 US 20090239072 A1 US20090239072 A1 US 20090239072A1 US 31393508 A US31393508 A US 31393508A US 2009239072 A1 US2009239072 A1 US 2009239072A1
Authority
US
United States
Prior art keywords
carbon nanotube
electrode
needle
carbon
string
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US12/313,935
Inventor
Yang Wei
Liang Liu
Shou-Shan Fan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tsinghua University
Hon Hai Precision Industry Co Ltd
Original Assignee
Tsinghua University
Hon Hai Precision Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tsinghua University, Hon Hai Precision Industry Co Ltd filed Critical Tsinghua University
Assigned to HON HAI PRECISION INDUSTRY CO., LTD., TSINGHUA UNIVERSITY reassignment HON HAI PRECISION INDUSTRY CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: FAN, SHOU-SHAN, LIU, LIANG, WEI, YANG
Publication of US20090239072A1 publication Critical patent/US20090239072A1/en
Priority to US14/040,582 priority Critical patent/US9771267B2/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/15Nano-sized carbon materials
    • C01B32/158Carbon nanotubes
    • C01B32/168After-treatment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00111Tips, pillars, i.e. raised structures
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/15Nano-sized carbon materials
    • C01B32/158Carbon nanotubes
    • C01B32/16Preparation
    • C01B32/162Preparation characterised by catalysts
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00Specific applications of microelectromechanical systems
    • B81B2201/05Microfluidics
    • B81B2201/055Microneedles
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00Structure or properties of carbon nanotubes
    • C01B2202/02Single-walled nanotubes
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00Structure or properties of carbon nanotubes
    • C01B2202/04Nanotubes with a specific amount of walls
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00Structure or properties of carbon nanotubes
    • C01B2202/06Multi-walled nanotubes
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00Structure or properties of carbon nanotubes
    • C01B2202/08Aligned nanotubes
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00Structure or properties of carbon nanotubes
    • C01B2202/20Nanotubes characterized by their properties
    • C01B2202/34Length
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00Structure or properties of carbon nanotubes
    • C01B2202/20Nanotubes characterized by their properties
    • C01B2202/36Diameter
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/29Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2982Particulate matter [e.g., sphere, flake, etc.]

Definitions

  • the invention relates to a carbon nanotube needle and the method for making the same.
  • CNTs Carbon nanotubes produced by means of arc discharge between graphite rods were first discovered and reported in an article by Sumio Iijima, entitled “Helical Microtubules of Graphitic Carbon” (Nature, Vol. 354, Nov. 7, 1991, pp. 56-58).
  • CNTs also feature extremely high electrical conductivity, very small diameters (much less than 100 nanometers), large aspect ratios (i.e. length/diameter ratios greater than 1000), and a tip-surface area near the theoretical limit (the smaller the tip-surface area, the more concentrated the electric field, and the greater the field enhancement factor). These features tend to make CNTs ideal candidates for use in many materials and devices, such as composite materials, field emission devices, and micro electrical devices.
  • the tip-surface area of a CNT is very small.
  • a single CNT is often used as a needle (i.e., probe, or sharp tip structure) connected to a base.
  • the CNT needle with the base is used as a field emission electron source or a detecting probe.
  • the methods adopted for forming the CNT needle with base mainly include mechanical and in situ synthesis methods.
  • One mechanical method involves coating a base (or a cantilever of an atomic force microscope (AFM)) with an adhesive and touching it to a CNT array, and pulling one CNT away adhered to the base.
  • AFM atomic force microscope
  • the CNT needle may easily separate from the base.
  • the performance of the field emission electron source or detecting probe of AFM will be decreased and have short life.
  • One in-situ synthesis method is performed by coating metal catalysts on a base and synthesizing a CNT directly on the base by means of chemical vapor deposition (CVD).
  • CVD chemical vapor deposition
  • CNTs have a small diameter, the interface of the CNT and the base will be small, and the mechanical connection between the CNT and the base will generally be relatively weak and, thus, unreliable. Further, it is difficult to grow only one CNT on the base.
  • FIG. 1 is a representation a CNT needle in accordance with a present embodiment.
  • FIG. 2 shows a Scanning Electron Microscope (SEM) image of a CNT needle.
  • FIG. 3 shows a Transmission Electron Microscope (TEM) image of a CNT needle.
  • FIG. 4 is a flow chart of a method for manufacturing a CNT needle, in accordance with a present embodiment.
  • FIG. 5 shows an image of a CNT film treated by an organic solvent.
  • FIG. 6 is a schematic view of an apparatus for fusing CNT strings.
  • FIG. 7 is a schematic view before fusing the CNT strings of FIG. 6 .
  • FIG. 8 is a schematic view after fusing the CNT strings of FIG. 6 .
  • FIG. 9 shows an image of CNT strings in an incandescent state.
  • FIG. 10 is a graph showing Raman spectrum of an emission tip of the CNT needle of FIG. 1 .
  • the CNT needle 10 is composed of a CNT string.
  • Each CNT string includes a plurality of continuously oriented and substantially parallel CNTs joined end-to-end by van der Waals attractive force.
  • a diameter of the CNT needle 10 approximately ranges from 1 to 20 microns, and a length thereof ranges from 0.01 to 1 millimeters.
  • the CNT needle 12 includes an end portion 122 and a broken end portion 124 . Referring to FIGS. 2 and 3 , the CNTs at the broken end portion 124 form a similar tapered-shaped structure.
  • One CNT 126 protrudes from the adjacent CNTs to form a tip 128 of the CNT needle 10 .
  • the CNT 126 protrudes from the adjacent CNTs about 5 nanometers to 50 nanometers.
  • the CNTs at the broken end portion 124 have smaller diameters and a fewer number of walls, typically, less than 5 nanometers (nm) in diameter and have less than 2-3 walls.
  • the CNTs 126 in the CNT needle 10 other than the broken end portion 124 includes single-walled CNTs, double-walled CNTs, or multi-walled CNTs. Diameters of the single-walled CNTs, the double-walled CNTs, and the multi-walled CNTs can, respectively, be in an approximate range from 0.5 to 50 nanometers, 1 to 50 nanometers, and 1.5 to 50 nanometers.
  • a method for manufacturing the CNT needle 10 includes the following steps: (a) providing a CNT film having a plurality of CNTs therein, the CNTs being aligned along a same direction, a first electrode 22 and a second electrode 24 (b) fixing the two opposite sides of the CNT film on the first electrode 22 and the second electrode 22 respectively, the CNTs in the CNT film extending from the first electrode 22 to the second electrode 24 ; (c) treating the CNT film with an organic solvent to form a plurality of CNT strings 28 ; and (d) applying a voltage between two opposite ends of the CNT strings via the first electrode and the second electrode, until the CNT strings snap/break at a certain points thereof, to achieve a number of CNT needles 10 .
  • the CNT film is formed by the following substeps: (a 1 ) providing a CNT array; and (a 2 ) pulling out a CNT film from the array of CNTs, by using a tool (e.g., adhesive tape, pliers, tweezers, or another tool allowing multiple CNTs to be gripped and pulled simultaneously).
  • a tool e.g., adhesive tape, pliers, tweezers, or another tool allowing multiple CNTs to be gripped and pulled simultaneously.
  • step (a 1 ) initially, a substrate is provided, and the substrate is a P-type silicon or N-type silicon substrate. Secondly, a catalyst layer is deposited on the substrate.
  • the catalyst layer is made of a material selected from a group consisting of iron (Fe), cobalt (Co), nickel (Ni), and their alloys.
  • the substrate with the catalyst layer is annealed at a temperature approximately ranging from 700 to 900 degrees centigrade (° C.) under a protecting gas for approximately 30 minutes to 90 minutes.
  • the substrate with the catalyst layer is heated to a temperature approximately ranging from 500° C. to 740° C.
  • a mixed gas including a carbon containing gas and a protecting gas is introduced for approximately 5 to 30 minutes to grow a super-aligned CNTs array.
  • the carbon containing gas is a hydrocarbon gas, such as acetylene or ethane.
  • the protecting gas is an inert gas.
  • the grown CNTs are aligned in columns parallel to each other and held together by van der Waals force interactions therebetween.
  • the CNTs array has a high density and each of the CNTs has an essentially uniform diameter.
  • the CNT film can be formed by the substeps of: (a 21 ) selecting one or more CNTs having a predetermined width from the super-aligned array of CNTs; and (a 22 ) pulling the CNTs to from nanotube segments at an even/uniform speed to achieve a uniform CNT film.
  • the CNT segment having a predetermined width includes a plurality of CNTs parallel to each other.
  • the CNT segment is gripped by using an adhesive tape such as the tool to contact the super-aligned array.
  • the pulling direction is substantially perpendicular to the growing direction of the super-aligned array of CNTs.
  • the CNT film includes a plurality of CNTs joined ends to ends.
  • the CNTs in the CNT film are all substantially parallel to the pulling/drawing direction of the CNT film, and the CNT film produced in such manner can be selectively formed to have a predetermined width.
  • the CNT film formed by the pulling/drawing method has superior uniformity of thickness and conductivity over a typical disordered CNT film. Further, the pulling/drawing method is simple, fast, and suitable for industrial applications.
  • the width of the CNT film depends on a size of the CNT array.
  • the length of the CNT film can be arbitrarily set, as desired.
  • the width of the CNT film is in an approximate range from 0.01 centimeter to 10 centimeters, and the thickness of the CNT film is in an approximate range from 0.5 nanometers to 100 microns.
  • the CNTs in the CNT film includes single-walled CNTs, double-walled CNTs, or multi-walled CNTs.
  • Diameters of the single-walled CNTs, the double-walled CNTs, and the multi-walled CNTs can, respectively, be in an approximate range from 0.5 to 50 nanometers, 1 to 50 nanometers, and 1.5 to 50 nanometers.
  • step (b) the first electrode and the second electrode are separated from each other.
  • a distance between the first electrode and the second electrode ranges from 50 micrometers to 1 millimeter.
  • the CNT film is suspended between the first electrode and the second electrode and tensioned thereby.
  • step (c) can be executed by putting the organic solvent onto the CNT film or putting the CNT film with the first electrode and the second electrode in the organic solvent to soak the entire surfaces of the CNT film.
  • the untreated CNT film is composed of a number of the CNTs, the untreated CNT film has a high surface-area-to-volume ratio and, thus, may easily become stuck to other objects.
  • the impending CNT film is shrunk into a plurality of CNT strings after the organic solvent volatilizing, due to factors such as surface tension.
  • the CNT string includes a plurality of CNTs, the CNTs being aligned along a same direction. The surface area to volume ratio is reduced.
  • the organic solvent may be a volatilizable organic solvent, such as ethanol, methanol, acetone, dichloroethane, chloroform, or any appropriate mixture thereof.
  • the step (d) includes the following substeps: (d 1 ) placing the CNT strings, along with the first electrode 22 connected to the second electrode 24 in a chamber 20 ; (d 2 ) applying a voltage between two opposite ends of the CNT strings 28 via the first electrode 22 and the second electrode 24 of such a magnitude and/or time to cause the CNT strings 28 to snap.
  • the strings snap at a middle point along an axis thereof and, thus, acquiring two CNT needles 10 for each string.
  • the chamber 20 is a vacuum or filled with an inert gas.
  • a diameter of the CNT string 28 approximately ranges from 1 to 20 micrometers, and a length thereof approximately ranges from 0.05 millimeters to 1 millimeter.
  • the vacuum chamber 20 can be a vacuum and the pressure thereof is lower than 1 ⁇ 10 ⁇ 1 Pascal (Pa).
  • the voltage can be set according to a diameter and/or a length of the CNT strings 28 .
  • the voltage is 40 volts (V).
  • a vacuum of the chamber 20 is less than 2 ⁇ 10 ⁇ 5 Pascal (Pa). In the present embodiment, vacuum of the chamber 20 is 2 ⁇ 10 ⁇ 5 Pa.
  • a temperature of the CNT string 28 increases due to Joule-heating, and the CNT string 28 can reach a temperature approximately ranging from 2000 to 2400 Kelvin (K).
  • K Kelvin
  • the CNT string 28 is in an incandescent state. Heat in the CNT string 28 is transmitted from the CNT to the electrodes. Since the middle point of the CNT string is furthest from the electrodes, the temperature thereof is highest, and then the CNT string 28 is broken at the middle point. In the present embodiment, after less than 1 hour, the CNT string 28 is snapped at the middle point.
  • the CNT string 28 breaks at the middle point to form two CNT needles 10 .
  • Each CNT needle 10 includes an end portion and an opposite broken end portion. The end portion is fixed on the first electrode or the second electrode.
  • Each CNT needle 10 is composed of well-aligned and firmly compacted CNTs.
  • the CNTs at the broken end portion 124 have a tapered-shaped structure, i.e., one CNT protruding and higher than the adjacent CNTs. That is because during snapping, some carbon atoms vaporize from the CNT string 12 .
  • a micro-fissure (not labeled) is formed between two break-end portions, the arc discharge may occur between the micro-fissure, and then carbon atoms transform into carbon ions due to ionization. These carbon ions bombard/etch the break-end portions, and then the break-end portion 124 forms the taper-shaped structure.
  • the CNTs at the broken end portion have smaller diameters and a fewer number of walls, typically in the present embodiment, less than 5 nanometers in diameter and only about 2-3 walls. However, the CNTs away from the break-end portion are about 15 nm in diameter and have more than 5 walls. The diameter and the number of the walls of the CNTs are decreased in the vacuum breakdown process.
  • a wall-by-wall breakdown of CNTs is due to Joule-heating at a temperature higher than 2000K, with a current decrease process. The high-temperature process can efficiently remove the defects in CNTs and, consequently, improve electric and thermal conductivities and mechanical strength thereof.
  • FIG. 10 shows a Raman spectrum of the break-end portion 124 . After snapping, the intensity of D-band (defect mode) at 1580 cm ⁇ 1 is reduced, which indicates the structure effects at the break-end portion 124 are effectively removed.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Analytical Chemistry (AREA)
  • Composite Materials (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Inorganic Fibers (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Cold Cathode And The Manufacture (AREA)

Abstract

A carbon nanotube needle comprising: an end portion and a broken end portion, the broken end portion comprising a single carbon nanotube tip. A method for manufacturing a carbon nanotube needle, the method comprising the steps of: (a) providing a carbon nanotube film comprising of a plurality of commonly aligned carbon nanotubes, a first electrode, and a second electrode; (b) fixing the carbon nanotube film to the first electrode and the second electrode, the carbon nanotube film extending from the first electrode to the second electrode; (c) treating the carbon nanotube film with an organic solvent to form at least one carbon nanotube string; and (d) applying a voltage to the carbon nanotube string until the carbon nanotube string snaps.

Description

    RELATED APPLICATIONS
  • This application is related to commonly-assigned applications entitled, “METHOD FOR MAKING FIELD EMISSION ELECTRON SOURCE HAVING CARBON NANOTUBES”, filed ______ (Atty. Docket No. US18587); “FIELD EMISSION ELECTRON SOURCE HAVING CARBON NANOTUBES”, filed ______ (Atty. Docket No. US18672); “ELECTRON EMISSION APPARATUS”, filed ______ (Atty. Docket No. US18178); “ELECTRON EMISSION APPARATUS AND METHOD FOR MAKING THE SAME”, filed ______ (Atty. Docket No. US18177). The disclosure of the respective above-identified application is incorporated herein by reference.
  • BACKGROUND
  • 1. Field of the Invention
  • The invention relates to a carbon nanotube needle and the method for making the same.
  • 2. Discussion of Related Art
  • Carbon nanotubes (CNTs) produced by means of arc discharge between graphite rods were first discovered and reported in an article by Sumio Iijima, entitled “Helical Microtubules of Graphitic Carbon” (Nature, Vol. 354, Nov. 7, 1991, pp. 56-58). CNTs also feature extremely high electrical conductivity, very small diameters (much less than 100 nanometers), large aspect ratios (i.e. length/diameter ratios greater than 1000), and a tip-surface area near the theoretical limit (the smaller the tip-surface area, the more concentrated the electric field, and the greater the field enhancement factor). These features tend to make CNTs ideal candidates for use in many materials and devices, such as composite materials, field emission devices, and micro electrical devices.
  • Generally, the tip-surface area of a CNT is very small. A single CNT is often used as a needle (i.e., probe, or sharp tip structure) connected to a base. The CNT needle with the base is used as a field emission electron source or a detecting probe. The methods adopted for forming the CNT needle with base mainly include mechanical and in situ synthesis methods. One mechanical method involves coating a base (or a cantilever of an atomic force microscope (AFM)) with an adhesive and touching it to a CNT array, and pulling one CNT away adhered to the base. However, because CNTs are so small, using this method is hard to control. Further, the CNT needle may easily separate from the base. Thus, the performance of the field emission electron source or detecting probe of AFM will be decreased and have short life.
  • One in-situ synthesis method is performed by coating metal catalysts on a base and synthesizing a CNT directly on the base by means of chemical vapor deposition (CVD). However, because CNTs have a small diameter, the interface of the CNT and the base will be small, and the mechanical connection between the CNT and the base will generally be relatively weak and, thus, unreliable. Further, it is difficult to grow only one CNT on the base.
  • What is needed, therefore, is an improved CNT needle and method for making same.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • Many aspects of the present CNT needle can be better understood with references to the following drawings. The components in the drawings are not necessarily drawn to scale, the emphasis instead being placed upon clearly illustrating the principles of the present CNT needle.
  • FIG. 1 is a representation a CNT needle in accordance with a present embodiment.
  • FIG. 2 shows a Scanning Electron Microscope (SEM) image of a CNT needle.
  • FIG. 3 shows a Transmission Electron Microscope (TEM) image of a CNT needle.
  • FIG. 4 is a flow chart of a method for manufacturing a CNT needle, in accordance with a present embodiment.
  • FIG. 5 shows an image of a CNT film treated by an organic solvent.
  • FIG. 6 is a schematic view of an apparatus for fusing CNT strings.
  • FIG. 7 is a schematic view before fusing the CNT strings of FIG. 6.
  • FIG. 8 is a schematic view after fusing the CNT strings of FIG. 6.
  • FIG. 9 shows an image of CNT strings in an incandescent state.
  • FIG. 10 is a graph showing Raman spectrum of an emission tip of the CNT needle of FIG. 1.
  • Corresponding reference characters indicate corresponding parts throughout the several views. The exemplifications set out herein illustrate at least one embodiment of the present method, in one form, and such exemplifications are not to be construed as limiting the scope of the invention in any manner.
  • DETAILED DESCRIPTION OF EXEMPLARY EMBODIMENTS
  • References will now be made to the drawings to describe the exemplary embodiments of the present CNT needle and the method for manufacturing the CNT needle, in detail.
  • Referring to FIG. 1, the CNT needle 10 is composed of a CNT string. Each CNT string includes a plurality of continuously oriented and substantially parallel CNTs joined end-to-end by van der Waals attractive force. A diameter of the CNT needle 10 approximately ranges from 1 to 20 microns, and a length thereof ranges from 0.01 to 1 millimeters. The CNT needle 12 includes an end portion 122 and a broken end portion 124. Referring to FIGS. 2 and 3, the CNTs at the broken end portion 124 form a similar tapered-shaped structure. One CNT 126 protrudes from the adjacent CNTs to form a tip 128 of the CNT needle 10. The CNT 126 protrudes from the adjacent CNTs about 5 nanometers to 50 nanometers. The CNTs at the broken end portion 124 have smaller diameters and a fewer number of walls, typically, less than 5 nanometers (nm) in diameter and have less than 2-3 walls. However, the CNTs 126 in the CNT needle 10 other than the broken end portion 124 includes single-walled CNTs, double-walled CNTs, or multi-walled CNTs. Diameters of the single-walled CNTs, the double-walled CNTs, and the multi-walled CNTs can, respectively, be in an approximate range from 0.5 to 50 nanometers, 1 to 50 nanometers, and 1.5 to 50 nanometers.
  • Referring to FIG. 4 and FIG. 6, a method for manufacturing the CNT needle 10 includes the following steps: (a) providing a CNT film having a plurality of CNTs therein, the CNTs being aligned along a same direction, a first electrode 22 and a second electrode 24 (b) fixing the two opposite sides of the CNT film on the first electrode 22 and the second electrode 22 respectively, the CNTs in the CNT film extending from the first electrode 22 to the second electrode 24; (c) treating the CNT film with an organic solvent to form a plurality of CNT strings 28; and (d) applying a voltage between two opposite ends of the CNT strings via the first electrode and the second electrode, until the CNT strings snap/break at a certain points thereof, to achieve a number of CNT needles 10.
  • In step (a), the CNT film is formed by the following substeps: (a1) providing a CNT array; and (a2) pulling out a CNT film from the array of CNTs, by using a tool (e.g., adhesive tape, pliers, tweezers, or another tool allowing multiple CNTs to be gripped and pulled simultaneously).
  • In step (a1), initially, a substrate is provided, and the substrate is a P-type silicon or N-type silicon substrate. Secondly, a catalyst layer is deposited on the substrate. The catalyst layer is made of a material selected from a group consisting of iron (Fe), cobalt (Co), nickel (Ni), and their alloys. Thirdly, the substrate with the catalyst layer is annealed at a temperature approximately ranging from 700 to 900 degrees centigrade (° C.) under a protecting gas for approximately 30 minutes to 90 minutes. Fourthly, the substrate with the catalyst layer is heated to a temperature approximately ranging from 500° C. to 740° C. and a mixed gas including a carbon containing gas and a protecting gas is introduced for approximately 5 to 30 minutes to grow a super-aligned CNTs array. The carbon containing gas is a hydrocarbon gas, such as acetylene or ethane. The protecting gas is an inert gas. The grown CNTs are aligned in columns parallel to each other and held together by van der Waals force interactions therebetween. The CNTs array has a high density and each of the CNTs has an essentially uniform diameter.
  • In step (a2), the CNT film can be formed by the substeps of: (a21) selecting one or more CNTs having a predetermined width from the super-aligned array of CNTs; and (a22) pulling the CNTs to from nanotube segments at an even/uniform speed to achieve a uniform CNT film. In step (a21), the CNT segment having a predetermined width includes a plurality of CNTs parallel to each other. The CNT segment is gripped by using an adhesive tape such as the tool to contact the super-aligned array. In step (a22), the pulling direction is substantially perpendicular to the growing direction of the super-aligned array of CNTs.
  • More specifically, during the pulling process, as the initial CNT segments are drawn out, other CNT segments are also drawn out end to end due to van der Waals attractive force between ends of adjacent segments. This process of drawing ensures a substantially continuous and uniform CNT film having a predetermined width can be formed. The CNT film includes a plurality of CNTs joined ends to ends. The CNTs in the CNT film are all substantially parallel to the pulling/drawing direction of the CNT film, and the CNT film produced in such manner can be selectively formed to have a predetermined width. The CNT film formed by the pulling/drawing method has superior uniformity of thickness and conductivity over a typical disordered CNT film. Further, the pulling/drawing method is simple, fast, and suitable for industrial applications.
  • The width of the CNT film depends on a size of the CNT array. The length of the CNT film can be arbitrarily set, as desired. In one useful embodiment, when the substrate is a 4-inch P-type silicon wafer as in the present embodiment, the width of the CNT film is in an approximate range from 0.01 centimeter to 10 centimeters, and the thickness of the CNT film is in an approximate range from 0.5 nanometers to 100 microns. The CNTs in the CNT film includes single-walled CNTs, double-walled CNTs, or multi-walled CNTs. Diameters of the single-walled CNTs, the double-walled CNTs, and the multi-walled CNTs can, respectively, be in an approximate range from 0.5 to 50 nanometers, 1 to 50 nanometers, and 1.5 to 50 nanometers.
  • In step (b), the first electrode and the second electrode are separated from each other. A distance between the first electrode and the second electrode ranges from 50 micrometers to 1 millimeter. The CNT film is suspended between the first electrode and the second electrode and tensioned thereby.
  • Referring to FIG. 5, step (c) can be executed by putting the organic solvent onto the CNT film or putting the CNT film with the first electrode and the second electrode in the organic solvent to soak the entire surfaces of the CNT film. Since the untreated CNT film is composed of a number of the CNTs, the untreated CNT film has a high surface-area-to-volume ratio and, thus, may easily become stuck to other objects. During the surface treatment, the impending CNT film is shrunk into a plurality of CNT strings after the organic solvent volatilizing, due to factors such as surface tension. The CNT string includes a plurality of CNTs, the CNTs being aligned along a same direction. The surface area to volume ratio is reduced. Accordingly, the stickiness of the CNT film is lowered, and strength and toughness of the CNT string is improved. The organic solvent may be a volatilizable organic solvent, such as ethanol, methanol, acetone, dichloroethane, chloroform, or any appropriate mixture thereof.
  • Referring to FIGS. 6, 7 and 8, the step (d) includes the following substeps: (d1) placing the CNT strings, along with the first electrode 22 connected to the second electrode 24 in a chamber 20; (d2) applying a voltage between two opposite ends of the CNT strings 28 via the first electrode 22 and the second electrode 24 of such a magnitude and/or time to cause the CNT strings 28 to snap. The strings snap at a middle point along an axis thereof and, thus, acquiring two CNT needles 10 for each string.
  • In step (d1), the chamber 20 is a vacuum or filled with an inert gas. A diameter of the CNT string 28 approximately ranges from 1 to 20 micrometers, and a length thereof approximately ranges from 0.05 millimeters to 1 millimeter. In the present embodiment, the vacuum chamber 20 can be a vacuum and the pressure thereof is lower than 1×10−1 Pascal (Pa).
  • In step (d2), the voltage can be set according to a diameter and/or a length of the CNT strings 28. In the present embodiment, when a length of the CNT string 28 is 300 μm and a diameter thereof is 2 μm, the voltage is 40 volts (V). A vacuum of the chamber 20 is less than 2×10−5 Pascal (Pa). In the present embodiment, vacuum of the chamber 20 is 2×10−5 Pa.
  • Referring to FIG. 9, in step (d2), a temperature of the CNT string 28 increases due to Joule-heating, and the CNT string 28 can reach a temperature approximately ranging from 2000 to 2400 Kelvin (K). When the temperature of the CNT string 28 is high enough, the CNT string 28 is in an incandescent state. Heat in the CNT string 28 is transmitted from the CNT to the electrodes. Since the middle point of the CNT string is furthest from the electrodes, the temperature thereof is highest, and then the CNT string 28 is broken at the middle point. In the present embodiment, after less than 1 hour, the CNT string 28 is snapped at the middle point.
  • Referring to FIG. 8, the CNT string 28 breaks at the middle point to form two CNT needles 10. Each CNT needle 10 includes an end portion and an opposite broken end portion. The end portion is fixed on the first electrode or the second electrode. Each CNT needle 10 is composed of well-aligned and firmly compacted CNTs. Referring to FIGS. 2 and 3, the CNTs at the broken end portion 124 have a tapered-shaped structure, i.e., one CNT protruding and higher than the adjacent CNTs. That is because during snapping, some carbon atoms vaporize from the CNT string 12. After snapping, a micro-fissure (not labeled) is formed between two break-end portions, the arc discharge may occur between the micro-fissure, and then carbon atoms transform into carbon ions due to ionization. These carbon ions bombard/etch the break-end portions, and then the break-end portion 124 forms the taper-shaped structure.
  • The CNTs at the broken end portion have smaller diameters and a fewer number of walls, typically in the present embodiment, less than 5 nanometers in diameter and only about 2-3 walls. However, the CNTs away from the break-end portion are about 15 nm in diameter and have more than 5 walls. The diameter and the number of the walls of the CNTs are decreased in the vacuum breakdown process. A wall-by-wall breakdown of CNTs is due to Joule-heating at a temperature higher than 2000K, with a current decrease process. The high-temperature process can efficiently remove the defects in CNTs and, consequently, improve electric and thermal conductivities and mechanical strength thereof. FIG. 10 shows a Raman spectrum of the break-end portion 124. After snapping, the intensity of D-band (defect mode) at 1580 cm−1 is reduced, which indicates the structure effects at the break-end portion 124 are effectively removed.
  • It is to be understood that the above-described embodiments are intended to illustrate rather than limit the invention. Variations may be made to the embodiments without departing from the spirit of the invention as claimed. The above-described embodiments illustrate the scope of the invention but do not restrict the scope of the invention.
  • It is also to be understood that above description and the claims drawn to a method may include some indication in reference to certain steps. However, the indication used is only to be viewed for identification purposes and not as a suggestion as to an order for the steps.

Claims (20)

1. A carbon nanotube needle comprising:
an end portion and a broken end portion, the broken end portion comprising a single carbon nanotube tip.
2. The carbon nanotube needle as claimed in claim 1, wherein the broken end portion comprises a tapered-shaped structure formed by a plurality of carbon nanotubes.
3. The carbon nanotube needle as claimed in claim 1, wherein a diameter of the carbon nanotube needle ranges from 1 to 20 microns, and a length thereof ranges from 0.01 to 1 millimeter.
4. The carbon nanotube needle as claimed in claim 1, wherein the carbon nanotube needle is a carbon nanotube string.
5. The carbon nanotube needle as claimed in claim 4, wherein the carbon nanotube needle comprises a plurality of substantially parallel carbon nanotubes.
6. The carbon nanotube needle as claimed in claim 5, wherein the carbon nanotubes are joined end to end via van der Waals attractive force therebetween.
7. The carbon nanotube needle as claimed in claim 5, wherein the carbon nanotubes in the end portion includes single-walled carbon nanotubes, double-walled carbon nanotubes, or multi-walled carbon nanotubes.
8. The carbon nanotube needle as claimed in claim 7, wherein diameters of the single-walled carbon nanotubes, the double-walled carbon nanotubes, and the multi-walled carbon nanotubes is, respectively, in a range from 0.5 to 50 nanometers, 1 to 50 nanometers, and 1.5 to 50 nanometers.
9. The carbon nanotube needle as claimed in claim 1, wherein the broken end portion has a diameter of less than 5 nanometers and approximately 2-3 walls.
10. The carbon nanotube needle as claimed in claim 1, wherein the carbon nanotube that composes the tip extends 5 nanometers to 50 nanometers from adjacent carbon nanotubes.
11. A method for manufacturing a carbon nanotube needle, the method comprising the steps of:
(a) providing a carbon nanotube film comprising of a plurality of commonly aligned carbon nanotubes, a first electrode, and a second electrode;
(b) fixing the carbon nanotube film to the first electrode and the second electrode, the carbon nanotube film extending from the first electrode to the second electrode;
(c) treating the carbon nanotube film with an organic solvent to form at least one carbon nanotube string; and
(d) applying a voltage to the carbon nanotube string until the carbon nanotube string snaps.
12. The method as claimed in claim 11, wherein in step (a), the carbon nanotube film provided is formed by the substeps of:
(a1) providing an array of carbon nanotubes; and
(a2) pulling out a carbon nanotube film from the array of carbon nanotubes, by using a tool.
13. The method as claimed in claim 11, wherein in step (c), the organic solvent is a volatile organic solvent and is selected from a group consisting of ethanol, methanol, acetone, dichloroethane, and chloroform.
14. The method as claimed in claim 11, wherein step (c) further comprises the substeps of: putting the organic solvent onto the carbon nanotube film or putting the carbon nanotube film, the first electrode and the second electrode in the organic solvent.
15. The method as claimed in claim 11, wherein a distance between the first electrode and the second electrode ranges from 50 micrometers to 2 millimeters.
16. The method as claimed in claim 11, wherein step (d) further comprises the substep of:
(d1) placing the first electrode and the second electrode with the carbon nanotube string thereon in a chamber; and
wherein applying the voltage between two opposite ends of the carbon nanotube strings is done via the first electrode and the second electrode for a period of time to snap the carbon nanotube string, thereby acquiring at least one carbon nanotube needle with a break-end.
17. The method as claimed in claim 16, wherein in step (d), wherein carbon nanotube string can reaches a temperature ranging approximately from 2000 to 2400 kelvins before snapping.
18. A method for manufacturing a carbon nanotube needle, the method comprising the steps of:
(a) providing a carbon nanotube string comprising of a plurality of carbon nanotubes, a first electrode, and a second electrode;
(b) fixing the two opposite sides of the carbon nanotube string to the first electrode and the second electrode; and
(c) applying a voltage between two opposite ends of the carbon nanotube string until the carbon nanotube string snaps, thereby obtaining at least one carbon nanotube needle;
wherein the at least one carbon nanotube needle has an end portion and a broken end portion; the broken end portion has a single tip carbon nanotube protruding from the broken end portion; and the carbon nanotubes are aligned along a same direction.
19. The method as claimed in claim 18, wherein a plurality of the carbon nanotubes that comprise the carbon nanotube string are substantially parallel and joined end-to-end.
20. The method as claimed in claim 18, wherein step (c) further comprises the substep of:
(c1) placing the carbon nanotube strings, the first electrode and the second electrode in a chamber; and
wherein applying the voltage between two opposite ends of the carbon nanotube strings is done via the first electrode and the second electrode for a period of time to snap the carbon nanotube string, thereby acquiring at least one carbon nanotube needle.
US12/313,935 2008-03-19 2008-11-26 Carbon nanotube needle and method for making the same Abandoned US20090239072A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US14/040,582 US9771267B2 (en) 2008-03-19 2013-09-27 Method for making carbon nanotube needle

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN2008100661282A CN101538031B (en) 2008-03-19 2008-03-19 Carbon nano tube needlepoint and method for preparing same
CN200810066128.2 2008-03-19

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US14/040,582 Continuation US9771267B2 (en) 2008-03-19 2013-09-27 Method for making carbon nanotube needle

Publications (1)

Publication Number Publication Date
US20090239072A1 true US20090239072A1 (en) 2009-09-24

Family

ID=41089217

Family Applications (2)

Application Number Title Priority Date Filing Date
US12/313,935 Abandoned US20090239072A1 (en) 2008-03-19 2008-11-26 Carbon nanotube needle and method for making the same
US14/040,582 Active 2031-04-08 US9771267B2 (en) 2008-03-19 2013-09-27 Method for making carbon nanotube needle

Family Applications After (1)

Application Number Title Priority Date Filing Date
US14/040,582 Active 2031-04-08 US9771267B2 (en) 2008-03-19 2013-09-27 Method for making carbon nanotube needle

Country Status (3)

Country Link
US (2) US20090239072A1 (en)
JP (1) JP4960397B2 (en)
CN (1) CN101538031B (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080248235A1 (en) * 2007-02-09 2008-10-09 Tsinghua University Carbon nanotube film structure and method for fabricating the same
US20080299460A1 (en) * 2007-06-01 2008-12-04 Tsinghua University Anode of lithium battery and method for fabricating the same
US20090195139A1 (en) * 2008-02-01 2009-08-06 Tsinghua University Electron emission apparatus and method for making the same
US20090195140A1 (en) * 2008-02-01 2009-08-06 Tsinghua University Electron emission apparatus and method for making the same
US20090236961A1 (en) * 2008-03-19 2009-09-24 Tsinghua University Field emission electron source having carbon nanotubes
US20090239439A1 (en) * 2008-03-19 2009-09-24 Tsinghua University Method for manufacturing field emission electron source having carbon nanotubes
US20120169209A1 (en) * 2010-12-31 2012-07-05 Hon Hai Precision Industry Co., Ltd. Field emission device and field emission display
US8323607B2 (en) 2010-06-29 2012-12-04 Tsinghua University Carbon nanotube structure
US20150336798A1 (en) * 2009-12-28 2015-11-26 Korea University Research And Business Foundation Devices for carbon nanotube length control

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101604603B (en) * 2008-06-13 2011-03-23 清华大学 Filed emission body and preparation method thereof
CN102039708B (en) * 2009-10-22 2013-12-11 清华大学 Method for bonding two matrixes
CN103288033B (en) * 2012-02-23 2016-02-17 清华大学 The preparation method of the micro-sharp structure of CNT
CN103193217B (en) * 2013-03-12 2014-12-24 南京理工大学 Method for preparing boron-doped diamond and carbon nanotube composite nanocone
CN103252544B (en) * 2013-05-20 2015-05-20 南京航空航天大学 Method and device for manufacturing of carbon nanometer tube electrode with length controllable and detection of conductivity of carbon nanometer tube electrode
US11069495B2 (en) * 2019-01-25 2021-07-20 Eaton Intelligent Power Limited Vacuum switching apparatus and drive mechanism therefor
CN113023711B (en) * 2019-12-24 2022-10-18 清华大学 Preparation method of carbon nanotube bundle
JP2023529233A (en) * 2021-01-15 2023-07-07 国家納米科学中心 Carbon nanocone functionalized needle tip and manufacturing method thereof

Citations (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6232706B1 (en) * 1998-11-12 2001-05-15 The Board Of Trustees Of The Leland Stanford Junior University Self-oriented bundles of carbon nanotubes and method of making same
US20020060514A1 (en) * 2000-11-17 2002-05-23 Masayuki Nakamoto Field emission cold cathode device of lateral type
US6504292B1 (en) * 1999-07-15 2003-01-07 Agere Systems Inc. Field emitting device comprising metallized nanostructures and method for making the same
US20030143356A1 (en) * 2001-10-19 2003-07-31 Mitsuaki Morikawa Carbon nanotube for electron emission source and manufacturing method therefor
US20030186625A1 (en) * 2002-03-18 2003-10-02 Daiken Chemical Co., Ltd And Yoshikazu Nakayama Sharpening method of nanotubes
US20040051432A1 (en) * 2002-09-16 2004-03-18 Jiang Kaili Light filament formed from carbon nanotubes and method for making same
US20040053432A1 (en) * 2002-09-17 2004-03-18 Liang Liu Method for processing one-dimensional nano-materials
US20040095050A1 (en) * 2002-11-14 2004-05-20 Liang Liu Field emission device
US20050006623A1 (en) * 2003-07-07 2005-01-13 Wong Stanislaus S. Carbon nanotube adducts and methods of making the same
US20060065887A1 (en) * 2004-03-26 2006-03-30 Thomas Tiano Carbon nanotube-based electronic devices made by electrolytic deposition and applications thereof
US20070144780A1 (en) * 2005-11-04 2007-06-28 Tsinghua University Field emission element and method for manufacturing same
US20070166223A1 (en) * 2005-12-16 2007-07-19 Tsinghua University Carbon nanotube yarn and method for making the same
US20070284987A1 (en) * 2006-06-09 2007-12-13 Tsinghua University Field emission element and manufacturing method thereof
US20090115306A1 (en) * 2007-11-02 2009-05-07 Tsinghua University Field emission electron source having carbon nanotubes and method for manufacturing the same
US20090117674A1 (en) * 2007-11-02 2009-05-07 Tsinghua University Method for manufacturing field emission electron source having carbon nanotubes
US20090117808A1 (en) * 2007-11-02 2009-05-07 Tsinghua University Method for manufacturing field emission electron source having carbon nanotubes
US20090236961A1 (en) * 2008-03-19 2009-09-24 Tsinghua University Field emission electron source having carbon nanotubes
US7710008B2 (en) * 2006-03-22 2010-05-04 Tsinghu University Field emission electron source having carbon nanotube and manufacturing method thereof
US7932477B2 (en) * 2007-11-23 2011-04-26 Tsinghua University Electron beam heating system having carbon nanotubes

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3792859B2 (en) * 1997-10-03 2006-07-05 株式会社ノリタケカンパニーリミテド Electron gun
JP3441396B2 (en) * 1998-12-03 2003-09-02 喜萬 中山 Probe for surface signal operation of electronic device and method of manufacturing the same
JP2002334663A (en) * 2001-03-09 2002-11-22 Vacuum Products Kk Charged particle generating device and charged particle generating method
SE0203377L (en) * 2002-11-13 2004-05-14 Kim Bolton Management of derivatized carbon nanotubes
JP4658490B2 (en) * 2004-02-26 2011-03-23 大研化学工業株式会社 Electron source and manufacturing method thereof
JP2005265600A (en) * 2004-03-18 2005-09-29 Pentax Corp Exposure apparatus having function of detecting substrate accuracy
CN1688011A (en) * 2005-05-25 2005-10-26 中山大学 Method for improving nano-carbno tube film cold cathode field transmitting uniformity
KR101242382B1 (en) * 2005-08-10 2013-03-14 가부시키가이샤 퓨아론 쟈판 Carbon film having shape suitable for field emission
JP4320316B2 (en) * 2005-09-27 2009-08-26 シャープ株式会社 Sensor for detecting chemical substances
CN101540253B (en) * 2008-03-19 2011-03-23 清华大学 Method for preparing field-emission electron source

Patent Citations (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6232706B1 (en) * 1998-11-12 2001-05-15 The Board Of Trustees Of The Leland Stanford Junior University Self-oriented bundles of carbon nanotubes and method of making same
US6504292B1 (en) * 1999-07-15 2003-01-07 Agere Systems Inc. Field emitting device comprising metallized nanostructures and method for making the same
US20020060514A1 (en) * 2000-11-17 2002-05-23 Masayuki Nakamoto Field emission cold cathode device of lateral type
US20030143356A1 (en) * 2001-10-19 2003-07-31 Mitsuaki Morikawa Carbon nanotube for electron emission source and manufacturing method therefor
US20030186625A1 (en) * 2002-03-18 2003-10-02 Daiken Chemical Co., Ltd And Yoshikazu Nakayama Sharpening method of nanotubes
US20040051432A1 (en) * 2002-09-16 2004-03-18 Jiang Kaili Light filament formed from carbon nanotubes and method for making same
US20040053432A1 (en) * 2002-09-17 2004-03-18 Liang Liu Method for processing one-dimensional nano-materials
US7064474B2 (en) * 2002-11-14 2006-06-20 Tsinghua University Carbon nanotube array and field emission device using same
US20040095050A1 (en) * 2002-11-14 2004-05-20 Liang Liu Field emission device
US20050006623A1 (en) * 2003-07-07 2005-01-13 Wong Stanislaus S. Carbon nanotube adducts and methods of making the same
US20060065887A1 (en) * 2004-03-26 2006-03-30 Thomas Tiano Carbon nanotube-based electronic devices made by electrolytic deposition and applications thereof
US20070144780A1 (en) * 2005-11-04 2007-06-28 Tsinghua University Field emission element and method for manufacturing same
US20070166223A1 (en) * 2005-12-16 2007-07-19 Tsinghua University Carbon nanotube yarn and method for making the same
US7710008B2 (en) * 2006-03-22 2010-05-04 Tsinghu University Field emission electron source having carbon nanotube and manufacturing method thereof
US20070284987A1 (en) * 2006-06-09 2007-12-13 Tsinghua University Field emission element and manufacturing method thereof
US20090115306A1 (en) * 2007-11-02 2009-05-07 Tsinghua University Field emission electron source having carbon nanotubes and method for manufacturing the same
US20090117674A1 (en) * 2007-11-02 2009-05-07 Tsinghua University Method for manufacturing field emission electron source having carbon nanotubes
US20090117808A1 (en) * 2007-11-02 2009-05-07 Tsinghua University Method for manufacturing field emission electron source having carbon nanotubes
US7932477B2 (en) * 2007-11-23 2011-04-26 Tsinghua University Electron beam heating system having carbon nanotubes
US20090236961A1 (en) * 2008-03-19 2009-09-24 Tsinghua University Field emission electron source having carbon nanotubes

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080248235A1 (en) * 2007-02-09 2008-10-09 Tsinghua University Carbon nanotube film structure and method for fabricating the same
US8048256B2 (en) * 2007-02-09 2011-11-01 Tsinghua University Carbon nanotube film structure and method for fabricating the same
US20080299460A1 (en) * 2007-06-01 2008-12-04 Tsinghua University Anode of lithium battery and method for fabricating the same
US8734996B2 (en) 2007-06-01 2014-05-27 Tsinghua University Anode of lithium battery and method for fabricating the same
US20090195139A1 (en) * 2008-02-01 2009-08-06 Tsinghua University Electron emission apparatus and method for making the same
US20090195140A1 (en) * 2008-02-01 2009-08-06 Tsinghua University Electron emission apparatus and method for making the same
US8237344B2 (en) 2008-02-01 2012-08-07 Tsinghua University Electron emission apparatus and method for making the same
US7967655B2 (en) 2008-02-01 2011-06-28 Tsinghua University Electron emission apparatus and method for making the same
US8013505B2 (en) * 2008-03-19 2011-09-06 Tsinghua University Field emission electron source having a carbon nanotube needle
US7914358B2 (en) * 2008-03-19 2011-03-29 Tsinghua University Method for manufacturing field emission electron source having carbon nanotubes
US20090239439A1 (en) * 2008-03-19 2009-09-24 Tsinghua University Method for manufacturing field emission electron source having carbon nanotubes
US20090236961A1 (en) * 2008-03-19 2009-09-24 Tsinghua University Field emission electron source having carbon nanotubes
US20150336798A1 (en) * 2009-12-28 2015-11-26 Korea University Research And Business Foundation Devices for carbon nanotube length control
US10077191B2 (en) * 2009-12-28 2018-09-18 Korea University Research And Business Foundation Devices for carbon nanotube length control
US8323607B2 (en) 2010-06-29 2012-12-04 Tsinghua University Carbon nanotube structure
US20120169209A1 (en) * 2010-12-31 2012-07-05 Hon Hai Precision Industry Co., Ltd. Field emission device and field emission display
US8581486B2 (en) * 2010-12-31 2013-11-12 Tsinghua University Field emission device and field emission display

Also Published As

Publication number Publication date
CN101538031A (en) 2009-09-23
JP4960397B2 (en) 2012-06-27
US20140027404A1 (en) 2014-01-30
JP2009231287A (en) 2009-10-08
US9771267B2 (en) 2017-09-26
CN101538031B (en) 2012-05-23

Similar Documents

Publication Publication Date Title
US9771267B2 (en) Method for making carbon nanotube needle
US7914358B2 (en) Method for manufacturing field emission electron source having carbon nanotubes
US11312102B2 (en) Carbon nanotube structure
US8339022B2 (en) Field emission electron source having carbon nanotubes
US7988515B2 (en) Method for manufacturing field emission electron source having carbon nanotubes
US8013505B2 (en) Field emission electron source having a carbon nanotube needle
US8029328B2 (en) Method for manufacturing field emission electron source having carbon nanotubes
US9017637B2 (en) Method for making carbon nanotube structure
JP4976367B2 (en) Thermionic emission device
US20090195140A1 (en) Electron emission apparatus and method for making the same
US7872407B2 (en) Field emission cathode having successive and oriented carbon nanotube bundles
JP2002179418A (en) Method for forming carbon nanotube
US20110181171A1 (en) Electron emission apparatus and method for making the same
US20090160306A1 (en) Thermal electron emission source having carbon nanotubes and method for making the same
US7932477B2 (en) Electron beam heating system having carbon nanotubes
Chen et al. Ultrahigh-current field emission from sandwich-grown well-aligned uniform multi-walled carbon nanotube arrays with high adherence strength
US8803410B2 (en) Field emission device having entangled carbon nanotubes between a carbon nanotube layer and carbon nanotube array
TWI362684B (en) Method of making field emission electron source
Kiselev et al. Influence of electric field and emission current on the configuration of nanotubes in carbon nanotube layers
TWI309055B (en) Method for making emission source having carbon nanotube
TWI386972B (en) Method for making field emission electron source
Bokka Carbon nanotube cold cathodes for applications under vacuum to partial pressure in helium and dryair
Uh et al. Selective growth of carbon nanotubes and their application to triode-type field emitter arrays
TWI494266B (en) Carbon nanotube needle and the method for making the same
TWI280228B (en) Method of fabricating carbon nanofiber

Legal Events

Date Code Title Description
AS Assignment

Owner name: HON HAI PRECISION INDUSTRY CO., LTD., TAIWAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:WEI, YANG;LIU, LIANG;FAN, SHOU-SHAN;REEL/FRAME:021954/0298

Effective date: 20081107

Owner name: TSINGHUA UNIVERSITY, CHINA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:WEI, YANG;LIU, LIANG;FAN, SHOU-SHAN;REEL/FRAME:021954/0298

Effective date: 20081107

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION