US10890607B2 - Sense circuit for piezoresistive sensor, circuit including array of piezoresistive sensors, and operation method thereof - Google Patents
Sense circuit for piezoresistive sensor, circuit including array of piezoresistive sensors, and operation method thereof Download PDFInfo
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- US10890607B2 US10890607B2 US16/206,144 US201816206144A US10890607B2 US 10890607 B2 US10890607 B2 US 10890607B2 US 201816206144 A US201816206144 A US 201816206144A US 10890607 B2 US10890607 B2 US 10890607B2
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- 238000004146 energy storage Methods 0.000 claims abstract description 72
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- 239000003990 capacitor Substances 0.000 description 35
- 238000010586 diagram Methods 0.000 description 15
- 238000012546 transfer Methods 0.000 description 8
- 238000003825 pressing Methods 0.000 description 4
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
- G01R27/2605—Measuring capacitance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
- G01R35/02—Testing or calibrating of apparatus covered by the other groups of this subclass of auxiliary devices, e.g. of instrument transformers according to prescribed transformation ratio, phase angle, or wattage rating
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
- H03K17/94—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
- H03K17/96—Touch switches
- H03K17/964—Piezoelectric touch switches
- H03K17/9643—Piezoelectric touch switches using a plurality of detectors, e.g. keyboard
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/225—Measuring circuits therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
- G01R19/0046—Arrangements for measuring currents or voltages or for indicating presence or sign thereof characterised by a specific application or detail not covered by any other subgroup of G01R19/00
- G01R19/0053—Noise discrimination; Analog sampling; Measuring transients
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
- H03K17/94—Electronic switching or gating, i.e. not by contact-making and –breaking characterised by the way in which the control signals are generated
- H03K17/96—Touch switches
- H03K17/962—Capacitive touch switches
- H03K17/9622—Capacitive touch switches using a plurality of detectors, e.g. keyboard
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
- G01R19/0084—Arrangements for measuring currents or voltages or for indicating presence or sign thereof measuring voltage only
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/22—Measuring piezoelectric properties
Definitions
- the present disclosure relates to the field of sensing technologies for piezoresistive sensors, and in particular to a sense circuit for piezoresistive sensor, a circuit including an array of piezoresistive sensors, and an operation method thereof.
- a method for sensing a piezoresistive array sensor is to sense with an active architecture, and another is to sense with a passive architecture.
- the passive architecture is more power-efficient than the active architecture.
- Passive architectures typically comprise a selection transistor which is connected to the piezoresistive sensor and a resistive voltage amplifier. Since the piezoresistor is normally open when being sensed after being coupled to the amplifier, there normally be leakage current, thus the power consumption of the overall architecture is increased.
- the trace on the array substrate is coupled in series with the piezoresistive sensor, and the trace resistance is related to the length of the trace. In such a case, since there is a voltage drop on the trace, the output voltages measured at the near end and the distal end thereof are different, which may result in an erroneous test result.
- a sense circuit for a piezoresistive sensor that comprises: an energy storage circuit coupled to the piezoresistive sensor via a first node; a charge control circuit coupled to the first node and configured to charge the energy storage circuit to a predetermined potential; a discharge control circuit configured to allow the energy storage circuit to discharge through the piezoresistive sensor; and a readout circuit coupled to the first node and configured to output a sensed voltage based on a level of charges stored by the energy storage circuit.
- the piezoresistive sensor has a first end configured to receive a first voltage
- the energy storage circuit has a first end configured to receive a second voltage, and a second end coupled to the first node
- the charge control circuit is configured to charge the energy storage circuit such that the first node is charged to the predetermined potential
- the discharge control circuit is coupled to the first node and a second end of the piezoresistive sensor, respectively, configured to control a discharge path for the energy storage circuit, which includes the piezoresistive sensor, to be turned on or off, so that the energy storage circuit can be discharged through the piezoresistive sensor in the case that the discharge path is turned on
- the readout circuit is coupled to the first node and configured to output a sensed voltage according to the level of the charges stored by the energy storage circuit in response to a sense control signal.
- the readout circuit comprises: a first switch transistor having a first end coupled to the first node, and a control end to receive the sense control signal; a first capacitive device having a first end coupled to a second end of the first switch transistor; and an operational amplifier having a first input coupled to the second end of the first switch transistor, a second input to receive a reference voltage, and an output coupled to a second end of the first capacitive device.
- the charge control circuit comprises: a second switch transistor having a first end coupled to the first node, a control end to receive a charge control signal, and a second end to receive a third voltage.
- the charge control circuit comprises: the first switch transistor; a fourth switch transistor having a first end coupled to the second end of the first switch transistor, and a second end coupled to the output of the operational amplifier, and a control end to receive the charge control signal.
- the energy storage circuit comprises a second capacitive device.
- the discharge control circuit comprises a third switch device having a first end coupled to a second end of the piezoresistive sensor, a second end coupled to the first node, and a control end to receive a discharge control signal.
- the discharge control circuit comprises a third switch device configured to turn on or turn off, under control of a discharge control signal, a discharge path for the energy storage circuit, the discharge path including the piezoresistive sensor.
- the discharge control circuit is further configured to control the discharge path for the energy storage circuit, which includes the piezoresistive sensor, to be turned on such that the energy storage circuit is discharged through the piezoresistive sensor for a predetermined time period.
- a circuit comprising: a plurality of piezoresistive sensors arranged in an array; a plurality of the sense circuits according to claim 1 , wherein each of the sense circuits corresponds to one piezoresistive sensor.
- an operation method for a sense circuit for piezoresistive sensor comprising steps of: S1) charging, by the charge control circuit, the first node to the predetermined potential in response to a charge control signal; S2) discharging, by the discharge control circuit, the energy storage circuit through the piezoresistive sensor, in response to a discharge control signal; S3) outputting, by the readout circuit, the sensed voltage based on a potential of the first node in response to a sense control signal.
- the piezoresistive sensor has a first end to receive a first voltage
- the readout circuit comprises: a first switch transistor having a first end coupled to the first node, and a control end to receive the sense control signal; a first capacitive device having a first end coupled to a second end of the first switch transistor; and an operational amplifier having a first input coupled to the second end of the first switch transistor, a second input to receive a reference voltage, and an output coupled to a second end of the first capacitive device
- the charge control circuit comprises: a second switch transistor having a first end coupled to the first node, a control end to receive the charge control signal, and a second end to receive a third voltage
- the discharge control circuit comprises: a third switch device having a first end coupled to a second end of the piezoresistive sensor, and a second end coupled to the first node, and a control end to receive the discharge control signal
- the step S1 comprises: setting the charge control signal at the control end
- the piezoresistive sensor has a first end configured to receive a first voltage
- the readout circuit comprises: a first switch transistor having a first end coupled to the first node, and a control end to receive the sense control signal; a first capacitive device having a first end coupled to a second end of the first switch transistor; and an operational amplifier having a first input coupled to the second end of the first switch transistor, a second input to receive a reference voltage, and an output coupled to the second end of the first capacitive device
- the charge control circuit comprises: the first switch transistor; and a fourth switch transistor having a first end coupled to the second end of the first switch transistor, and a second end coupled to the output of the operational amplifier, and a control end to receive the charge control signal
- the discharge control circuit comprises: a third switch device having a first end coupled to a second end of the piezoresistive sensor, a second end coupled to the first node, and a control end to receive the discharge control signal, wherein the step S
- step S2 the energy storage circuit is caused by the discharge control circuit to discharge via the piezoresistive sensor for a predetermined time period.
- the technical solutions provided by the embodiments or aspects of the present disclosure are devised with simplified structures, and low-power conversion circuits for piezoresistive sensor are obtained with use of the switching of the switches. These solutions are more power-efficient than the conventional passive architectures. According to the embodiments of the present disclosure, transferring of charges is employed during the sensing process, thus the error caused by the trace resistance in the conventional structures can also be avoided. According to the embodiments of the present disclosure, the detection result can be more accurate.
- FIG. 1 shows a schematic diagram of a conventional passive sense circuit for piezoresistive sensor
- FIG. 2 shows a schematic block diagram of a sense circuit for piezoresistive sensor in accordance with an embodiment of the present disclosure
- FIG. 3 illustrates a schematic diagram of a sense circuit for piezoresistive sensor in accordance with an embodiment of the present disclosure
- FIG. 4 illustrates control timing of a sense circuit for piezoresistive sensor in accordance with an embodiment of the present disclosure
- FIG. 5 is an equivalent circuit diagram of a sense circuit in a potential reset phase in accordance with an embodiment of the present disclosure
- FIG. 6 is an equivalent circuit diagram of a sense circuit in a discharge phase in accordance with an embodiment of the present disclosure
- FIG. 7 is an equivalent circuit diagram of discharge phase in a charge transfer phase in accordance with an embodiment of the present disclosure.
- FIG. 8 is a comparison diagram of power consumptions of an embodiment of the present disclosure and a conventional sense circuit
- FIG. 9 is an equivalent circuit diagram of a sense circuit in consideration of a trace resistance in accordance with an embodiment of the present disclosure.
- FIG. 10 shows a schematic diagram of a sense circuit for piezoresistive sensor in accordance with an alternative embodiment of the present disclosure
- FIG. 11 illustrates control timing of a sense circuit for piezoresistive sensor in accordance with an alternative embodiment of the present disclosure
- FIG. 12 is an equivalent circuit diagram of a sense circuit in a potential reset phase in accordance with an alternate embodiment of the present disclosure
- FIG. 13 is an equivalent circuit diagram of a sense circuit in a discharge phase in accordance with an alternate embodiment of the present disclosure.
- FIG. 14 is an equivalent circuit diagram of a sense circuit in a charge transfer phase in accordance with an alternate embodiment of the present disclosure.
- FIG. 1 shows a schematic diagram of a conventional passive sense circuit for piezoresistive sensor.
- the sense circuit 10 with a passive architecture generally comprises a selection transistor (SEL TFT) that is connected to the piezoresistive sensor P R and a resistive voltage amplifier.
- SEL TFT selection transistor
- the output V OU is (R F /R X ) ⁇ V B .
- the piezoresistor is always-on in the detection after being connected to the amplifier, there is always a leakage current. Taking N columns of the sensors as an example, the overall leakage current will be N ⁇ V B /R X .
- the trace (not shown) on or in the array substrate generally is serially coupled to the P R (e.g., serially coupled between the upper terminal of the P R and node V ⁇ ).
- the trace resistance is related to the length of the trace. Since there is a voltage drop across the trace, the output voltages measured at the near and distal ends thereof may be different, which will result in erroneous detection results.
- FIG. 2 shows a block diagram of a sense circuit for piezoresistive sensor in accordance with an embodiment of the present disclosure.
- the sense circuit for piezoresistive sensor is coupled to the piezoresistive sensor.
- the sense circuit may include an energy storage circuit 100 , a charge control circuit 200 , a discharge control circuit 300 , and a readout circuit 400 .
- the energy storage circuit 100 can be coupled to the piezoresistive sensor P R , for example, via a first node A, as shown in FIG. 3 .
- the charge control circuit 200 can be coupled to the first node and configured to charge the energy storage circuit to a predetermined potential.
- the discharge control circuit 300 can be configured to allow the energy storage circuit to discharge through the piezoresistive sensor.
- the readout circuit 400 can be coupled to the first node and output a sensed voltage according to the level of the charges stored by the energy storage circuit.
- the sense circuit for piezoresistive sensor 20 is coupled to the piezoresistive sensor P R .
- a first end of the piezoresistive sensor P R is used for receiving a first voltage.
- the first end of the P R is grounded, i.e., the first voltage is about 0V.
- the first voltage is not limited thereto, and can be of another value than 0.
- a first end of the energy storage circuit 100 can be used to receive a second voltage.
- the first end of the energy storage circuit 100 is grounded, i.e., the second voltage is about 0V.
- the second voltage is not limited thereto, and can be of another value than 0.
- the energy storage circuit 100 may comprise a capacitive device, specifically a capacitor C S .
- the energy storage circuit can be constructed with any capacitive device having a charge and discharge function or a circuit that exhibits capacitive as a whole, which is within the scope of the present application.
- the charge control circuit 200 is coupled to the second end of the energy storage circuit 100 (e.g., via node A).
- the charge control circuit 200 is configured to receive a third voltage, and control a charging process of the energy storage circuit in response to a charge control signal to charge the second end of the energy storage circuit to a predetermined potential.
- the charge control circuit 200 includes a switch transistor T 2 having a first end coupled to the second end of the capacitor C S and a second end to receive a third voltage (for example, VREF as shown in the figure).
- a third voltage for example, VREF as shown in the figure.
- the third voltage can be other voltages as long as it can make the C S be charged to a predetermined potential.
- the control end of the switch transistor T 2 receives a charge control signal, such as the clock signal CK 2 as shown in the figure.
- the discharge control circuit 300 is electrically coupled to the second end (node A) of the energy storage circuit 100 and the second end of the piezoresistive sensor P R , respectively.
- the discharge control circuit 300 can be configured to control the energy storage circuit and the piezoresistive sensor to be connected or disconnected in response to the discharge control signal, to cause the energy storage circuit to be discharged to the piezoresistive sensor during a preset time period.
- the discharge control circuit 300 may include a switch transistor T 3 having a first end electrically coupled to a second end of the piezoresistive sensor P R , a second end electrically coupled to a second end of the capacitor C S , and a control end to receive a charge control signal such as the clock signal CK 3 as shown in the figure.
- the readout circuit 400 is coupled to the second end (node A) of the energy storage circuit 100 , configured to receive a reference voltage, and output a sensed voltage in response to the sense control signal.
- the readout circuit 400 may include a switch transistor T 1 a first end of which is coupled to the second end of the capacitor C S , and a control end of which receives the sense control signal, such as the clock signal CK 1 as shown in the figure.
- the readout circuit 400 may further include a capacitive device C F (illustrated as a capacitor in the figure), a first end of the first capacitive device being coupled to the second end of the first switch transistor T 1 .
- C F illustrated as a capacitor in the figure
- the readout circuit 400 may further include an operational amplifier.
- a first input of the operational amplifier is coupled to the second end of the switch transistor T 1 , a second input of the operational amplifier receives the reference voltage, and an output of the operational amplifier is coupled to the second end of the first capacitive device.
- the reference voltage is VREF, which can be set to be the same as the third voltage received by the switch transistor T 2 .
- the reference voltage and the third voltage can come from a same voltage source, which can simplify the design and reduce the fabrication process steps, and eliminate the need to separately distribute the voltage source.
- the operation method may include the following steps.
- step S1 the first node is charged to the predetermined potential by the charge control circuit in response to the charge control signal.
- step S2 in response to the discharge control signal, the discharge control circuit makes the energy storage circuit to discharge through the piezoresistive sensor.
- step S3 responsive to the sense control signal, the readout circuit senses the potential of the first node and outputs the sensed voltage.
- the second end of the energy storage circuit 100 is charged to a predetermined potential by the charge control circuit 200 in response to the charge control signal. Therefore, the phase corresponding to this step can also be referred to as potential reset phase.
- the charge control signal CK 2 at the control end of the switch transistor T 2 is at a high level, and the clock signals CK 1 and CK 3 at the control ends of the switch transistors T 1 and T 3 are at a low level, thus the switch transistor T 2 is turned on, and the switch transistors T 1 and T 3 are turned off a simplified equivalent circuit for the sense circuit in this phase is shown in FIG. 5 .
- the second end of capacitor C S is charged to a predetermined potential, such as the voltage VREF. In other words, node A is charged to the predetermined potential.
- step S2 in response to the discharge control signal, the discharge control circuit 300 causes the energy storage circuit 100 to be discharged via the piezoresistive sensor P R for a predetermined period of time. Therefore, the phase corresponding to this step can also be referred to as discharge phase.
- the charge control signal CK 2 at the control end of the switch transistor T 2 is at a low level
- the clock signal CK 1 at the control end of the switch transistor T 1 is at a low level
- the clock signal CK 3 at the control end of the switch transistor T 3 is at a high level, thus the switch transistor T 2 is turned off, T 1 is turned off, and T 3 is turned on.
- FIG. 6 a simplified equivalent circuit of the sense circuit in this phase is shown in FIG. 6 .
- the capacitor C S is discharged through the piezoresistive sensor P R for a time t.
- the minimum value of t can be set to correspond to the minimum accuracy with which presses can be identified.
- the voltage Vt at the second end of the capacitor C S is VREF ⁇ exp( ⁇ t/(R X *C 1 )), where R X is the piezoresistive value of the piezoresistive sensor and C 1 is the capacitance value of the capacitor C S .
- the potential of the capacitor C S is lowered after the end of the discharging, but is not equal to zero.
- step S3 in response to the sense control signal, the readout circuit 400 outputs a sensed voltage based on the potential of the second end of the energy storage circuit 100 .
- the charge control signal CK 2 at the control end of the switch transistor T 2 is at a low level
- the clock signal CK 1 at the control end of the switch transistor T 1 is at a high level
- the clock signal CK 3 at the control end of the switch transistor T 3 is at a low level, thus the switch transistor T 2 is turned off, T 1 is turned on, and T 3 is turned off.
- a simplified equivalent circuit is shown in FIG. 7 .
- the charge Q remaining on the capacitor C S is transferred to the capacitor C F .
- the piezoresistive resistance of the piezoresistive sensor changes, that is, R X changes, thus the voltage at the second end (node A) of the capacitor C S changes, and the sensed voltage Vou changes. Thereby, the magnitude of the pressure can be determined by Vou.
- the switch transistors in the above embodiment are configured to be turned on with a high level, and turned off with a low level; that is, the switch transistors are N-type transistors.
- the present disclosure shall not be limited thereto, and P-type transistors can also be used; in such a case, the polarities of the timing signals shown in FIG. 4 may be inverted.
- the switch transistors in this embodiment may be TFT transistors, and in such a case, the control end is a gate, the first end is a source (or a drain), and the second end is a drain (or a source).
- FIG. 9 illustrates a simplified equivalent circuit of the sense circuit of the above embodiments of the present disclosure in the charge transfer phase in consideration of the trace resistance, wherein the trace resistor is represented by R S and is coupled between the second end of the capacitor C S and the first end of the capacitor C F .
- FIG. 10 shows a schematic diagram of a sense circuit for piezoresistive sensor in accordance with another embodiment of the present disclosure.
- the sense circuit for piezoresistive sensor 30 is configured to be connected to the piezoresistive sensor P R , and a first end of the piezoresistive sensor P R is configured to receive the first voltage.
- the first end of the P R is grounded, that is, the first voltage is 0 V.
- the first voltage is not limited thereto.
- the sense circuit for piezoresistive sensor 30 includes an energy storage circuit 100 , a charge control circuit 200 , a discharge control circuit 300 , and a readout circuit 400 .
- the first end of the energy storage circuit 100 is configured to receive a second voltage.
- the first end of the energy storage circuit 100 is grounded, i.e., the second voltage is 0 V.
- the second voltage is not limited thereto.
- the energy storage circuit 100 includes a capacitor C S .
- the energy storage circuit can be constructed by any capacitive device having a charge and discharge function or a circuit that exhibits capacitive as a whole, which is intended to be embraced within the scope of the present application.
- the charge control circuit 200 is coupled to a second end of the energy storage circuit 100 , configured to receive a third voltage, and control a charging process of the energy storage circuit in response to a charge control signal to charge the second end of the energy storage circuit to a predetermined potential.
- the charge control circuit 200 includes a switch transistor T 1 and a switch transistor T 2 .
- the first end of the switch transistor T 1 is coupled to the second end of the capacitor C S , and the control end of the switch transistor T 1 receives a control signal, such as the clock signal CK 1 as shown in the figure.
- the first end of the switch transistor T 2 is coupled to the second end of the switch transistor T 1 , and the control end of the switch transistor T 2 receives a charge control signal, that is, the clock signal CK 2 as shown in the figure.
- the second end of the switch transistor T 2 is coupled to the output of the operational amplifier.
- the second end of switch transistor T 2 can receive a third voltage, such as VREF. In this case, it is not necessary to separately supply a voltage source to the switch transistor T 2 , which can reduce the number of the processes.
- the discharge control circuit 300 is electrically coupled to the second end of the energy storage circuit 100 and the second end of the piezoresistive sensor P R , respectively, and configured to control, in response to the discharge control signal, the energy storage circuit and the piezoresistive sensor to be connected or disconnected, so that the energy storage circuit can discharges via the piezoresistive sensor for a preset period of time.
- the discharge control circuit 300 includes a switch transistor T 3 having a first end electrically coupled to a second end of the piezoresistive sensor P R , a second end electrically coupled to a second end of the capacitor C S , and a control end to receive the charge control signal, such as, the clock signal CK 3 as shown in the figure.
- the readout circuit 400 is coupled to the second end of the energy storage circuit 100 , configured to receive a reference voltage, and output a sensed voltage in response to the sense control signal.
- the readout circuit 400 includes the switch transistor T 1 , that is, in the example of FIG. 10 , the readout circuit 400 and the charge control circuit 200 share the switch transistor T 1 .
- the readout circuit 400 further includes a first capacitive device C F (illustrated as a capacitor in the figure), the first end of the first capacitive device being coupled to the second end of the switch transistor T 1 .
- a first capacitive device C F illustrated as a capacitor in the figure
- the readout circuit 400 further includes an operational amplifier in which the first input of the operational amplifier is coupled to the second end of the switch transistor T 1 , the second input of the operational amplifier receives a reference voltage, and the output of the operational amplifier is coupled to the second end of the first capacitive device.
- the reference voltage is VREF.
- the method may include some or all of the following steps, according to various implementations.
- step S1 e.g., potential reset phase: the second end of the energy storage circuit 100 is charged to a predetermined potential by the charge control circuit 200 in response to the charge control signal.
- the charge control signal CK 2 at the control end of the switch transistor T 2 is at a high level
- the clock signal CK 1 at the switch transistor T 1 is at a high level
- the clock signal CK 3 at the control end of the switch transistor T 3 is at a low level.
- the switch transistors T 1 and T 2 are turned on, and T 3 is turned off, and a simplified equivalent circuit is as shown in FIG. 12 .
- the second end of the capacitor C S is charged through the virtual short-circuiting by the operational amplifier to a predetermined potential, that is, the potential VREF at the second input terminal of the operational amplifier.
- step S2 in response to the discharge control signal, the discharge control circuit 300 causes the energy storage circuit 100 to discharge via the piezoresistive sensor P R for a predetermined period of time.
- the charge control signal CK 2 at the control end of the switch transistor T 2 can be at a low level (as indicated by a broken line) or a high level (as indicated by a solid line), the clock signal CK 1 at the control end of the switch transistor T 1 is at a low level and the clock signal CK 3 at the control end of the switch transistor T 3 is at a high level, thus the switch transistor T 2 can be turned off (or turned on), T 1 is turned off, and T 3 is turned on, and a simplified equivalent circuit is shown in FIG. 13 .
- the capacitor C S discharges via the piezoresistive sensor P R for the time t.
- the minimum value of t is set to correspond to the minimum accuracy with which presses can be identified.
- the voltage Vt of the second end of the capacitor C S is VREF ⁇ exp( ⁇ t/(R X *C 1 )), where R X is the piezoresistive value of the piezoresistive sensor and C 1 is the capacitance value of the capacitor C S .
- the potential of the capacitor C S is lowered after the end of the discharging, but is not equal to zero.
- step S3 in response to the sense control signal, the readout circuit 400 senses a potential change at the second end of the energy storage circuit 100 and outputs a sensed voltage.
- the charge control signal CK 2 at the control end of the switch transistor T 2 is at a low level
- the clock signal CK 1 at the control end of the switch transistor T 1 is at a high level
- the clock signal CK 3 at the control end of the switch transistor T 3 is at a low level, thus, the switch transistor T 2 is turned off, T 1 is turned on, and T 3 is turned off, and a simplified equivalent circuit is shown in FIG. 14 .
- the charges Q remained on the capacitor C S can be transferred to the capacitor C F .
- the piezoresistive resistance of the piezoresistive sensor changes, that is, Rx changes, and the voltage at the second end of the capacitor Cs changes, and in turn the sensed voltage Vou changes.
- the magnitude of the pressure can be determined by the sensed voltage Vou.
- the switch transistors in the above embodiment are turned on with a high level and turned off with the low level off, that is, the switch transistors can be N-type transistors.
- the disclosure is not limited thereto, and P-type transistors can also be used; in such a case, the polarities of the timing signals shown in FIG. 11 may be inverted.
- the switch transistors in this embodiment may be TFT transistors.
- the control end is a gate
- the first end is a source (or a drain)
- the second end is a drain (or a source).
- the embodiment shown in FIG. 10 also has the effects shown in FIG. 8 .
- the changes in R X are the same, and the VREF in the embodiment of the present disclosure is equal to the voltage V B at the first end of the P R in FIG. 1 , that is, both the initial current values for the embodiment of the present application and the prior art shown in FIG. 1 are the same.
- the circuit architecture as shown in FIG. 10 is more power-saving, thereby the overall power consumption of the circuit can be reduced.
- FIG. 9 An equivalent circuit of the embodiment shown in FIG. 10 in the charge transfer phase in consideration of the trace resistance is shown in FIG. 9 , wherein the trace resistance is represented by R S , and is coupled between the second end of the capacitor C S and the first end of the capacitor C F .
- the third voltage received by the second end of the switch transistor T 2 may be a voltage different from VREF, and in such a case, a separate voltage source is required for the switch transistor T 2 .
- the second end of the switch transistor T 2 is directly coupled to the output of the operational amplifier, and the received voltage is derived from the output of the operational amplifier. In this case, it not needed to separately provide a voltage source for the switch transistor T 2 , thus the process can be simplified.
- the sense circuits for piezoresistive sensor described above for example, as shown in FIGS.
- another aspect of the present disclosure provides a circuit including a plurality of piezoresistive sensors which can be arranged in an array, and a plurality of the sense circuits according to the embodiments above-mentioned.
- each piezoresistive sensor can correspond to one sense circuit.
- the circuit with piezoresistive sensor array according to the present disclosure consumes less power than the existing piezoresistive sensor array circuit, and the error caused by the trace resistance can be avoided due to the charge transfer scheme.
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CN201810301783.5A CN108414959B (en) | 2018-04-04 | 2018-04-04 | Piezoelectric sensor detection circuit, array piezoelectric sensor circuit and control method |
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CN112415292B (en) * | 2019-08-20 | 2022-03-18 | 北京钛方科技有限责任公司 | Piezoelectric device on-line detection device and method |
US11959797B2 (en) | 2019-08-20 | 2024-04-16 | Beijing Taifang Technology Co., Ltd. | Online detection device and method for piezoelectric device |
EP3799310B1 (en) | 2019-09-25 | 2023-09-13 | Infineon Technologies AG | Sensor systems and electronic devices |
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CN108414959B (en) | 2024-02-23 |
CN108414959A (en) | 2018-08-17 |
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