US10797184B2 - Aperture in a semiconductor - Google Patents
Aperture in a semiconductor Download PDFInfo
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- US10797184B2 US10797184B2 US16/091,595 US201716091595A US10797184B2 US 10797184 B2 US10797184 B2 US 10797184B2 US 201716091595 A US201716091595 A US 201716091595A US 10797184 B2 US10797184 B2 US 10797184B2
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 182
- 239000000463 material Substances 0.000 claims abstract description 220
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- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 2
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- 229910000431 copper oxide Inorganic materials 0.000 description 2
- WILFBXOGIULNAF-UHFFFAOYSA-N copper sulfanylidenetin zinc Chemical compound [Sn]=S.[Zn].[Cu] WILFBXOGIULNAF-UHFFFAOYSA-N 0.000 description 2
- ZZEMEJKDTZOXOI-UHFFFAOYSA-N digallium;selenium(2-) Chemical compound [Ga+3].[Ga+3].[Se-2].[Se-2].[Se-2] ZZEMEJKDTZOXOI-UHFFFAOYSA-N 0.000 description 2
- GNTDGMZSJNCJKK-UHFFFAOYSA-N divanadium pentaoxide Chemical compound O=[V](=O)O[V](=O)=O GNTDGMZSJNCJKK-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
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- JKQOBWVOAYFWKG-UHFFFAOYSA-N molybdenum trioxide Chemical compound O=[Mo](=O)=O JKQOBWVOAYFWKG-UHFFFAOYSA-N 0.000 description 2
- 239000000615 nonconductor Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000011112 polyethylene naphthalate Substances 0.000 description 2
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- AFNRRBXCCXDRPS-UHFFFAOYSA-N tin(ii) sulfide Chemical compound [Sn]=S AFNRRBXCCXDRPS-UHFFFAOYSA-N 0.000 description 2
- SKJCKYVIQGBWTN-UHFFFAOYSA-N (4-hydroxyphenyl) methanesulfonate Chemical compound CS(=O)(=O)OC1=CC=C(O)C=C1 SKJCKYVIQGBWTN-UHFFFAOYSA-N 0.000 description 1
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 description 1
- 239000005952 Aluminium phosphide Substances 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
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- 229910002601 GaN Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 229910052689 Holmium Inorganic materials 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 239000006011 Zinc phosphide Substances 0.000 description 1
- 239000005083 Zinc sulfide Substances 0.000 description 1
- DBKNIEBLJMAJHX-UHFFFAOYSA-N [As]#B Chemical compound [As]#B DBKNIEBLJMAJHX-UHFFFAOYSA-N 0.000 description 1
- ITPWLSAUZWZPAQ-UHFFFAOYSA-N [Sb]=S.[Zn].[Cu] Chemical compound [Sb]=S.[Zn].[Cu] ITPWLSAUZWZPAQ-UHFFFAOYSA-N 0.000 description 1
- MDPILPRLPQYEEN-UHFFFAOYSA-N aluminium arsenide Chemical compound [As]#[Al] MDPILPRLPQYEEN-UHFFFAOYSA-N 0.000 description 1
- PPNXXZIBFHTHDM-UHFFFAOYSA-N aluminium phosphide Chemical compound P#[Al] PPNXXZIBFHTHDM-UHFFFAOYSA-N 0.000 description 1
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- NFMAZVUSKIJEIH-UHFFFAOYSA-N bis(sulfanylidene)iron Chemical compound S=[Fe]=S NFMAZVUSKIJEIH-UHFFFAOYSA-N 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- FFBGYFUYJVKRNV-UHFFFAOYSA-N boranylidynephosphane Chemical compound P#B FFBGYFUYJVKRNV-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- WEUCVIBPSSMHJG-UHFFFAOYSA-N calcium titanate Chemical compound [O-2].[O-2].[O-2].[Ca+2].[Ti+4] WEUCVIBPSSMHJG-UHFFFAOYSA-N 0.000 description 1
- AOWKSNWVBZGMTJ-UHFFFAOYSA-N calcium titanate Chemical compound [Ca+2].[O-][Ti]([O-])=O AOWKSNWVBZGMTJ-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- HVMJUDPAXRRVQO-UHFFFAOYSA-N copper indium Chemical compound [Cu].[In] HVMJUDPAXRRVQO-UHFFFAOYSA-N 0.000 description 1
- BWFPGXWASODCHM-UHFFFAOYSA-N copper monosulfide Chemical compound [Cu]=S BWFPGXWASODCHM-UHFFFAOYSA-N 0.000 description 1
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 1
- GBRBMTNGQBKBQE-UHFFFAOYSA-L copper;diiodide Chemical compound I[Cu]I GBRBMTNGQBKBQE-UHFFFAOYSA-L 0.000 description 1
- YNLHHZNOLUDEKQ-UHFFFAOYSA-N copper;selanylidenegallium Chemical compound [Cu].[Se]=[Ga] YNLHHZNOLUDEKQ-UHFFFAOYSA-N 0.000 description 1
- 230000002939 deleterious effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- KJZYNXUDTRRSPN-UHFFFAOYSA-N holmium atom Chemical compound [Ho] KJZYNXUDTRRSPN-UHFFFAOYSA-N 0.000 description 1
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical compound I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
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- 238000002955 isolation Methods 0.000 description 1
- 239000011133 lead Substances 0.000 description 1
- OVJOMRKANUZJBM-UHFFFAOYSA-L lead(2+);sulfite Chemical compound [Pb+2].[O-]S([O-])=O OVJOMRKANUZJBM-UHFFFAOYSA-L 0.000 description 1
- XCAUINMIESBTBL-UHFFFAOYSA-N lead(ii) sulfide Chemical compound [Pb]=S XCAUINMIESBTBL-UHFFFAOYSA-N 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910000480 nickel oxide Inorganic materials 0.000 description 1
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 230000037361 pathway Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- HOKBIQDJCNTWST-UHFFFAOYSA-N phosphanylidenezinc;zinc Chemical compound [Zn].[Zn]=P.[Zn]=P HOKBIQDJCNTWST-UHFFFAOYSA-N 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- WYUZTTNXJUJWQQ-UHFFFAOYSA-N tin telluride Chemical compound [Te]=[Sn] WYUZTTNXJUJWQQ-UHFFFAOYSA-N 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- 229940048462 zinc phosphide Drugs 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035272—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
- H01L31/035281—Shape of the body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Definitions
- the present invention relates to an optoelectronic device and more specifically a solar photovoltaic cell.
- photovoltaic refers to the production of electricity, normally direct electrical current, from light at the junction between two materials that are exposed to the light.
- the light is normally sunlight and therefore photovoltaic is often referred to as solar photovoltaic.
- semiconductors for the two materials.
- the semiconductor materials used exhibit a photovoltaic effect.
- the two semiconductors are usually a p-type and an n-type semiconductor material. When joined together the boundary or interface between the two types of semiconductor material is referred to as a p-n junction.
- This type of p-n junction is usually created by doping one material with the other material. The doping may be by diffusion, ion implantation or epitaxy.
- a p-n junction can be found in most optoelectronic devices that use semiconductors. These optoelectronic devices include photovoltaic or solar photovoltaic cells, diodes, light-emitting diodes (LEDs) and transistors.
- the p-n junction can be thought of as the active site where the generation or consumption of electrical energy occurs.
- the present invention aims to mitigate one or more of the disadvantages of existing solar photovoltaic cells.
- an optoelectronic device comprising:
- the aperture makes the optoelectronic device less susceptible to shorting and/or shunting across the groove.
- the aperture in the another semiconductor material typically increases the length of a charge transfer path/route across the top of the groove and this makes the optoelectronic device less susceptible to shunting.
- Shunting is a parasitic parallel resistance across the optoelectronic device. Maximising shunt resistance makes the optoelectronic device more efficient. A higher shunting resistance reduces the occurrence of shunting. The aperture in the another semiconductor material typically minimises the structural shunting effects and this reduces the deleterious effect of shunting on the optoelectronic device.
- Shunting also typically includes counter-electromotive forces EMF or CEMF.
- EMF counter-electromotive forces
- CEMF counter-electromotive forces
- This electrical pathway or connection will typically produce two diodes in opposite directions.
- One diode will typically have a greater, normally much greater, area and this diode will normally dominate the function of the device. This may be due in part to its relative size and in part to the possible path through the conductor material.
- the another semiconductor material typically has a first surface substantially parallel to the first face of the groove and a second surface substantially parallel to the second face of the groove, the first and second surfaces defining the aperture in the another semiconductor material.
- the first face of the groove and a first surface of the substrate adjacent the groove typically make up a first side of the groove.
- the second face of the groove and a second surface of the substrate adjacent the groove typically make up a second side of the groove.
- the first and second surfaces adjacent the groove are typically at least substantially parallel with and/or in the same plane as the substrate.
- the first and second side of the groove are typically on the same surface of the substrate.
- the first and second sides of the groove may each be coated with the conductor material and the semiconductor material.
- the first face, second face, the conductor material and the semiconductor material are typically all in contact with the another semiconductor material in the groove.
- the first surface of the another semiconductor may be parallel at least in part to the first face of the groove and the second surface of the another semiconductor may be parallel at least in part to the second face of the groove.
- the aperture may be referred to as a gap and/or crack.
- the shape of the aperture is typically substantially conformal with the shape of the groove.
- the shape of the aperture may match the shape of the groove.
- the first and second surfaces of the another semiconductor may be referred to as sides of the aperture.
- the sides of the aperture may be substantially parallel to the first and second faces of the groove respectively.
- the sides of the aperture may be steeper or shallower than the first and/or second faces of the groove but are still be considered substantially parallel.
- the first and the second face of the groove typically define a cavity of the groove therebetween.
- the aperture normally extends down into the cavity.
- the aperture typically extends down into the cavity between the first and second face of the groove.
- the another semiconductor material may occupy from 15 to 75%, optionally from 20 to 50% of the volume of the cavity of the groove.
- a remaining 70 to 40% corresponds to the aperture in the another semiconductor material.
- the conductor material and semiconductor material account for the remaining volume.
- the volume of the cavity occupied by the another semiconductor material may be related to the shape of the groove.
- the aperture in the another semiconductor material may extend up to 90%, optionally from 20 to 80% and typically from 50 to 80% of the distance into the cavity of the groove. It may be an advantage of the present invention that a crack in the semiconductor material that extends about 50% of the distance into the cavity from the top of the cavity may increase the electrical current generated by the optoelectronic device. The distance the crack in the semiconductor material extends into the cavity from the top of the cavity may be related to the shape of the groove.
- the conductor material may coat and/or cover from 20 to 80%, normally from 40 to 60% and typically about 50% of the first face of the groove.
- the conductor material may coat and/or cover about 75% of the first face of the groove.
- the semiconductor material may coat and/or cover from 20 to 80%, normally from 40 to 60% and typically about 50% of the second face of the groove.
- the semiconductor material may coat and/or cover about 75% of the second face of the groove.
- the another semiconductor in the groove may be, and/or may be referred to as, coated on the first and second face of the groove.
- the coat of the another semiconductor material may be from 50 nm to 1000 nm thick, normally from 100 nm to 500 nm thick and typically from 100 to 200 nm thick.
- the coat of the another semiconductor material may therefore be referred to as a relatively thin coating.
- the another semiconductor thickness is about 200 nm
- one or more of the efficiency, electrical current generated, power output and photoelectric conversion efficiency of the optoelectronic device is increased.
- the width of the groove may be about 1 ⁇ m, although this may vary for different groove shapes.
- One or more of the efficiency, electrical current generated, power output and photoelectric conversion efficiency of the optoelectronic device may be increased further if the thickness of the another semiconductor is about 200 nm thick and the conductor material and/or semiconductor material coats and/or covers about 50% of the first face and/or second face of the groove respectively, when the groove is v-shaped, 1 ⁇ m deep and 1 ⁇ m wide.
- One or more of the efficiency, electrical current generated, power output and photoelectric conversion efficiency of the optoelectronic device may be yet further increased if the another semiconductor material occupies about 40% of the volume of the cavity of the groove and the conductor material and/or semiconductor material coats and/or covers about 50% of the first face and/or second face of the groove respectively.
- Increasing one or more of the efficiency, electrical current generated, power output and photoelectric conversion efficiency may reduce the overall cost of the optoelectronic device.
- the thinner coating corresponds with an increase in the effective current in the groove and thereby increases the photoelectric conversion efficiency of the optoelectronic device.
- the first and second faces of the groove may each have a first and a second end.
- the first ends are typically in contact at a bottom of the cavity, the second ends detached at a top of the cavity.
- the another semiconductor is typically discontinuous, normally substantially discontinuous between the second end of the first face of the groove and the second end of the second face of the groove.
- the first face of the groove will typically be coated with the another semiconductor where the conductor does not coat the first face of the groove.
- the second face of the groove will typically be coated with the another semiconductor where the semiconductor does not coat the second face of the groove.
- the coat of the another semiconductor is typically substantially the same thickness across the first face of the groove, second face of the groove, conductor material and semiconductor material.
- the coat of the another semiconductor typically has a uniform thickness.
- the groove may be any shape.
- the groove may be v-shaped, rounded or square.
- the cavity may have a flat bottom.
- the substrate may comprise a first and a second series of grooves and a channel therebetween.
- the groove referred to above may be any one of the grooves of the first and/or second series of grooves.
- the channel typically transects the grooves of the first and second series of grooves.
- the channel separates the first and second series of grooves such that an electrical current can be taken from or supplied to the first series of grooves in isolation from the second series of grooves.
- the first and second series of grooves are typically elongate grooves.
- the channel between the first and second series of grooves is typically an elongate channel.
- the channel typically transects the grooves of the first and second series of grooves at or towards an end of each groove.
- the channel typically transects or crosses the grooves of the first series of grooves towards an end of each groove and then passes between the first and second series of grooves before transecting or crossing the grooves of the second series of grooves towards an opposite and/or opposing end of each groove.
- the first face of the groove is normally at a first angle relative to a normal from the substrate and the second face of the groove is normally at a second angle relative to the normal from the substrate.
- the first angle is normally from 45 to less than or equal to 90°.
- the second angle is normally from 45 to less than or equal to 90°.
- the normal from the substrate is typically a line substantially parallel with the longitudinal axis or plane of the substrate.
- the semiconductor material on the first surface of the substrate adjacent the groove and therefore on the first side of the groove may be coated with an insulator material.
- the insulator material is typically on top of the semiconductor material.
- the insulator material makes the optoelectronic device less susceptible to shorting and/or shunting across the groove.
- the insulator material normally insulates, typically electrically insulates, the semiconductor material on the first surface of the substrate adjacent the groove from the another semiconductor in the groove.
- the insulator material may increase the length of and/or mitigate a charge transfer path/route across the top of the groove and this typically makes the optoelectronic device less susceptible to shunting.
- the insulator material is typically an electrical insulator material.
- the semiconductor material is typically an n-type semiconductor material.
- the another semiconductor material is typically a p-type semiconductor material.
- the semiconductor material is a p-type semiconductor material and the another semiconductor material is an n-type semiconductor material.
- the n-type and p-type semiconductors may comprise one or more of silicon, amorphous silicon, hydrogenated amorphous silicon, aluminium, germanium, gallium nitride, gallium arsenide, aluminium phosphide, aluminium arsenide, copper iodide, zinc oxide, lead sulphide, selenium, boron phosphide, boron arsenide, gallium, indium nitride, indium phosphide, cadmium selenide, cadmium sulphide, cadmium telluride, zinc sulphide, zinc selenide, zinc telluride, copper chloride, copper sulphide, copper oxide, tin sulphide, tin telluride, zinc phosphide, titanium oxide, tin oxide, lithium niobate, lead iodide, gallium selenide, tin sulphide, iron oxide, nickel oxide, copper indium selenide, copper zinc
- the n-type semiconductor typically comprises one or more of silicon, germanium, phosphorus, selenium, tellurium, cadmium sulphide, zinc, indium, tin, oxides of the above and doped semiconducting oxides.
- the p-type semiconductor typically comprises one or more of silicon, germanium, cadmium telluride, copper indium gallium selenide (‘CIGS’), copper indium gallium diselenide, copper indium selenide (CIS), copper gallium selenide, copper oxide, boron, beryllium, zinc, cadmium, copper zinc tin sulphide (CZTS), perovskite, calcium titanium oxide, calcium titanate and lead sulphite.
- CGS copper indium gallium selenide
- CIS copper indium gallium diselenide
- CIS copper indium selenide
- CZTS copper zinc tin sulphide
- perovskite calcium titanium oxide, calcium titanate and lead sulphite.
- the semiconductor and another semiconductor materials may meet at an interface and/or boundary.
- the interface is typically referred to as a p-n junction.
- the semiconductor and another semiconductor materials may together be referred to as an active material.
- the semiconductor and the another semiconductor are typically different materials.
- the conductor material is typically ohmic and/or an ohmic contact to the another semiconductor material.
- the semiconductor material is typically rectifying and/or a rectifying contact to the another semiconductor material.
- the active material may be deposited in the cavity and on the first and second face of the cavity and may provide ohmic and rectifying contacts for insertion or extraction of charge from the active material.
- the active material may be one or more of photovoltaic, light emitting and ion conducting.
- the second face of the groove may be coated with a conductor material and the semiconductor material.
- the conductor material coated on the first face of the groove may be the same as the conductor material coated on the second face of the groove but it may be different.
- the conductor material coated on the first and/or second face may be an electrical conductor.
- the conductor material coated on the first and/or second face of the groove may comprise one or more of aluminium, bismuth, cadmium, chromium, copper, gallium, gold, indium, lead, magnesium, manganese, samarium, scandium, silver, tin, zinc, terbium, selenium, molybdenum, yttrium, holmium, calcium, nickel, tungsten, platinum, palladium and vanadium.
- the another semiconductor material may be an electron blocking material such as molybdenum trioxide.
- the electron blocking material may be a hole transporting, electron blocking material, such as vanadium pentoxide, tantalum pentoxide, spiro-polymers, and p-dot polymers.
- the semiconductor material may be a heterojunction, that is a mixture of one or more of a p-type semiconductor, n-type semiconductor and donor acceptor material.
- first and second series of grooves and channel therebetween are substantially parallel, typically parallel to one another.
- the channel may extend across the first and second series of grooves and typically across the end of the first and second series of grooves.
- the channel may extend across the first and second series of grooves and typically across opposing ends of the first and second series of grooves.
- the channel may extend both perpendicular to and parallel to the first and second series of grooves. Normally the channel is perpendicular to the first and second series of grooves when it extends across the ends of the first and second series of grooves. Normally the channel is parallel to the first and second series of grooves when it extends between the first and second series of grooves.
- the angle at which the channel may extend across the ends of the first and second series of grooves can be variable and optionally be from 0 to 90°, normally from 35 to 55° and typically be 45°.
- the channel When the channel extends both perpendicular to and parallel to the first and second series of grooves, the channel may be referred to as running in at least two directions to connect said first and second series of grooves.
- the channel When the channel extends substantially perpendicular and across the ends of the first and second series of grooves, it may also extend in at least two directions relative to the first and second series of grooves. When the channel extends in at least two directions relative to the first and second series of grooves it typically forms a zigzag shape.
- a surface of the substrate comprising the first and second series of grooves and a channel therebetween may be referred to as a structured surface.
- the structured surface is typically not flat.
- the substrate may have another surface that is flat.
- the channel may be referred to as a delineation feature.
- the channel typically separates the first and second series of grooves.
- the channel typically has a first and a second face and a channel cavity therebetween. At least the first face of the channel may be coated with the conductor material and the second face of the channel may be coated with the semiconductor material. The second face of the channel may also be coated with the conductor material. The first and second faces of the channel are normally at least partially in contact with the another semiconductor material.
- the term ‘in contact with’ may include ‘coated with’.
- the first face of the channel is typically at a first angle relative to a normal from the substrate and the second face of the channel is typically at a second angle relative to a normal from the substrate.
- the first face of the channel and the second face of the channel may be perpendicular to the plane of the substrate.
- the first angle is normally from 45 to less than or equal to 90°.
- the second angle is normally from 45 to less than or equal to 90°.
- a first side and a second side of the channel may provide the positive and negative poles of an electrical circuit.
- the first and second sides may be in electrical communication with the conductor material on the first and second faces of the channel respectively.
- the first side of the channel may be in electrical communication, typically attached to, the positive pole of the electrical circuit.
- the second side of the channel may be in electrical communication, typically attached to, the negative pole of the electrical circuit.
- the first and second sides of the channel may be adjacent to the channel.
- the first and second sides of the channel may be at least substantially parallel to the plane of the substrate.
- the channel is typically non-conductive.
- the channel typically separates and/or insulates the first and second sides of the channel from one another.
- the optoelectronic device may be referred to as a two terminal device.
- the first and second series of grooves may be referred to as cascaded groove structures.
- the device In use the device may be fabricated in a series arrangement and operated in a parallel or a combined series and parallel arrangement.
- the channel cavity between the first and second faces of the channel may be any shape and is normally U-shaped, V-shaped or semi-spherical.
- the channel cavity between the first and second faces of the channel may have a flat bottom.
- the shape of the cavity between the first and second faces of the first and second series of grooves may be the same or different to the shape of the channel cavity between the first and second faces of the channel.
- the bottom of the channel cavity may be flat or may be rutted.
- the rutted bottom of the channel cavity may be referred to as uneven or rough.
- the rutted bottom of the channel cavity typically increases the surface area of the bottom of the channel cavity. Increasing the surface area of the bottom of the channel cavity may help to ensure the channel separates and/or insulates the first and second sides of the channel from one another.
- the channel and grooves of the first and second series of grooves typically have a depth measured from an upper surface of the substrate to a point in the channel or groove furthest from the upper surface.
- the depth of the channel is typically greater than the depth of the grooves of the first and second series of grooves.
- the depth of the channel may be at least twice the depth of the grooves of the first and second series of grooves.
- the channel has a depth and a width.
- the depth of the channel is typically twice the width of the channel.
- the aspect ratio for the depth to the width of the channel is therefore typically about 2:1.
- the first and second series of grooves typically form a series of ridges and cavities.
- the first and second series of grooves may comprise at least 2 cavities, typically from 2 to 500 cavities.
- Each of the grooves of the first and second series of grooves is typically from 5 to 200 mm long, normally from 5 to 1000 mm long and preferably 330 mm long.
- Each of the grooves of the first and second series of grooves is typically from 0.3 to 100 ⁇ m wide, normally from 0.3 to 5 ⁇ m wide.
- the substrate may comprise a curable resin and in particular a UV curable resin.
- the substrate may comprise one or more of an acrylic resin coated onto polyvinyl chloride (PVC), acrylic resin coated onto polyethylene terephthalate (PET), acrylic resin coated onto polyethylene naphthalate (PEN), a biopolymer coated onto polyvinyl chloride (PVC), a biopolymer coated onto polyethylene terephthalate (PET) and a biopolymer coated onto polyethylene naphthalate (PEN).
- PVC polyvinyl chloride
- PET polyethylene terephthalate
- PEN polyethylene naphthalate
- the first and second series of cascaded groove structures may comprise the substrate.
- the optoelectronic device is typically a solar photovoltaic cell.
- the optoelectronic device may be one or more of attached, secured and applied to a vehicle, for example a car or lorry, a house, for example a roof, and any other surface of a permanent structure.
- the permanent structure may be man-made or natural.
- a surface that the optoelectronic device is one or more of attached, secured and applied to may be flat or uneven, that is one or more of rough, bumpy, irregular and/or rutted.
- FIG. 1 a is a cross-sectional view of a groove of an optoelectronic device according to a first embodiment of the present invention
- FIG. 1 b is a cross-sectional view of a groove of an optoelectronic device according to a second embodiment of the present invention
- FIG. 1 c is a cross-sectional view of a groove of an optoelectronic device according to a third embodiment of the present invention.
- FIG. 1 d is a cross-sectional view of a groove of an optoelectronic device according to a fourth embodiment of the present invention.
- FIG. 1 e is a cross-sectional view of a groove of an optoelectronic device according to a fifth embodiment of the present invention.
- FIG. 1 f is a cross-sectional view of a groove of an optoelectronic device according to a sixth embodiment of the present invention.
- FIG. 1 g is a cross-sectional view of a groove of an optoelectronic device according to an seventh embodiment of the present invention.
- FIG. 1 h is a cross-sectional view of a groove of an optoelectronic device according to an eighth embodiment of the present invention.
- FIG. 2 is a plan view of the optoelectronic device
- FIG. 3 is a cross-sectional view of the grooves and channel of the optoelectronic device.
- FIG. 1 a shows an optoelectronic device 10 comprising a substrate 12 comprising a groove 14 having a first 16 a and a second 16 b face.
- the first face 16 a of the groove is coated with a conductor material 18 and the second face 16 b of the groove is coated with a semiconductor material 20 .
- the conductor material 18 and semiconductor material 20 are in contact with another semiconductor material 22 in the groove.
- the first face 16 a , second face 16 b , conductor material 18 and semiconductor material 20 are in contact with the another semiconductor material 22 .
- the another semiconductor 22 material has a first surface 24 a substantially parallel to the first face 16 a of the groove 14 and a second surface 24 b substantially parallel to the second face 16 b of the groove 14 , the first and second surfaces 24 a & 24 b defining the aperture 26 in the another semiconductor material 22 .
- the aperture 26 in the another semiconductor material 22 increases the length of a charge transfer path across the top of the groove 14 and this makes the optoelectronic device 10 less susceptible to shunting.
- the shape of the aperture 26 is conformal with the shape of the groove 14 .
- the shape of the aperture 26 matches the shape of the groove 14 .
- the first 24 a and second 24 b surfaces of the another semiconductor are often referred to as sides of the aperture.
- the slope of the sides 24 a & 24 b of the aperture match the slope of the first and second faces 16 a & 16 b of the groove 14 respectively.
- FIG. 1 shows the aperture 26 extending down into the cavity between the first 16 a and second 16 b face of the groove 14 .
- the another semiconductor material 22 occupies 75% of the volume of the cavity of the groove 14 . A remaining 15% corresponds to the aperture 26 in the another semiconductor material 22 . It is appreciated that the conductor material 18 and semiconductor material 20 occupy some of the cavity space and therefore account for some of the volume of the cavity not occupied by the another semiconductor material 22 , although this volume is relatively small.
- the aperture 26 in the another semiconductor material extends 50% of the distance into the cavity; the conductor material 18 coats 50% of the first face 16 a of the groove 14 ; and the semiconductor material 20 coats 50% of the second face 16 b of the groove 14 .
- the efficiency of the optoelectronic device 10 is thereby increased compared to other % coatings.
- the first face 16 a of the groove 14 is in contact with the another semiconductor 22 where the conductor 18 does not coat the first face of the groove.
- the second face 16 b of the groove 14 is in contact with the another semiconductor 22 where the semiconductor 20 does not coat the second face of the groove.
- the another semiconductor 22 is substantially the same thickness across the first face 16 a of the groove 14 , second face 16 b of the groove 14 , conductor material 18 and semiconductor material 20 .
- the first 16 a and second 16 b faces of the groove 14 each have a first 16 aa & 16 ba and a second 16 ab & 16 bb end.
- the first ends 16 aa & 16 ba are in contact at a bottom of the cavity, the second ends 16 ab & 16 bb are detached at a top of the cavity.
- the another semiconductor 22 is discontinuous between the second end 16 ab of the first face 16 a of the groove 14 and the second end 16 bb of the second face 16 b of the groove 14 .
- the groove 14 is v-shaped.
- FIG. 1 b shows a second embodiment of an optoelectronic device 210 .
- the optoelectronic device 210 comprises a substrate 212 comprising a groove 214 .
- the groove 214 comprises a first 216 a and second 216 b face defining a cavity 226 of the groove 214 therebetween.
- the groove 214 further comprises a conductor material 218 , a semiconductor material 220 , and another semiconductor material 222 .
- the first 216 a and second 216 b faces of the groove 214 each have a first 216 aa & 216 ba and a second 216 ab & 216 bb end.
- the conductor material 218 and the semiconductor material 220 overlap on a portion of the substrate 212 , such as between two individual grooves in a series of grooves.
- the cavity has a flat bottom 217 with which the first end 216 aa & 216 ba of the first 216 a and second 216 b faces respectively contact with.
- the another semiconductor material 222 has a first surface 224 a substantially parallel to the first face 216 a of the groove 214 , a second surface 224 b substantially parallel to the second face 216 b of the groove 214 , and a third surface 224 c substantially parallel to the flat bottom 217 of the groove 214 .
- the first, second and third surfaces 224 a , 224 b and 224 c define an aperture 226 .
- the shape of the aperture 226 matches the shape of the groove 214 .
- FIG. 1 c shows a third embodiment of an optoelectronic device 310 .
- the optoelectronic device 310 comprises a substrate 312 comprising a groove 314 .
- the groove 314 is rounded, and comprises a first face 316 a , a second face 316 b , a conductor material 318 and a semiconductor material 320 , all in contact with another semiconductor material 322 .
- the conductor material 318 and the semiconductor material 320 overlap on a portion of the substrate 312 , such as between two individual grooves in a series of grooves.
- the first 316 a and second 316 b faces of the groove 314 define a cavity.
- the another semiconductor material 322 comprises a first 324 a and a second 324 b surface which defines an aperture 326 .
- the aperture 326 in the another semiconductor material 322 extends 75% of the distance into the cavity.
- the first 316 a and second 316 b faces of the groove 314 each have a first 316 aa & 316 ba and a second 316 ab & 316 bb end.
- the slope of the surfaces 324 a & 324 b of the aperture 326 at the first ends 316 aa & 316 ba of the groove are steeper, that is they have a smaller angle relative to the longitudinal axis of the substrate 312 , than the slope of the first 316 a and second 316 b faces of the groove 314 , but the first 324 a and second 324 b surfaces of the aperture 326 are still overall substantially parallel to the first 316 a and second 316 b faces of the groove 314 .
- FIG. 1 d shows a fourth embodiment of an optoelectronic device 410 .
- the optoelectronic device 410 comprises a substrate 412 comprising a groove 414 .
- the groove 414 is square shaped, and as such the cavity has a flat bottom 417 .
- the groove 414 comprises a first face 416 a , a second face 416 b , a conductor material 418 and a semiconductor material 420 , all in contact with another semiconductor material 422 .
- the conductor material 418 and the semiconductor material 420 overlap in a portion of the substrate 412 , such as between two individual grooves in a series of grooves.
- the optoelectronic device 410 further comprises an adhesion layer 430 comprising aluminium and/or chromium.
- the adhesion layer 430 may also be a conducting layer. The adhesion layer improves overall charge extraction from the device.
- the another semiconductor material 422 comprises a first 424 a and a second 424 b surface which define an aperture 426 .
- the aperture 426 is located slightly off-centre, that is the aperture 426 is located closer to the second face 416 b of the groove 414 and farther from the first face 416 a of the groove 414 .
- the thickness of the another semiconductor 422 is thicker at the first face 416 a of the groove 414 and thinner at the second face 416 b of the groove 414 .
- the first 416 a and second 416 b faces of the groove 414 are substantially vertical.
- the first 424 a and second 424 b surfaces of the aperture 426 are substantially parallel to the first 416 a and second 416 b faces of the groove 414 .
- the aperture 426 is tapered in shape.
- the first 416 a and second 416 b faces of the groove 414 each have a first 416 aa & 416 ba and a second 416 ab & 416
- FIG. 1 e shows a fifth embodiment of an optoelectronic device 510 .
- the optoelectronic device 510 comprises a substrate 512 comprising a groove 514 .
- the groove 514 is v-shaped, and comprises a first face 516 a , a second face 516 b , a conductor material 518 and a semiconductor material 520 , all in contact with another semiconductor material 522 .
- the conductor material 518 and the semiconductor material 520 overlap on a portion of the substrate 512 , such as between two individual grooves in a series of grooves.
- the optoelectronic device 510 further comprises an adhesion layer 530 comprising aluminium and/or chromium, or other suitable material.
- the adhesion layer 530 may also be a conducting layer.
- the first 516 a and second 516 b faces of the groove 514 define a cavity.
- the another semiconductor material 522 comprises a first 524 a and a second 524 b surface which defines an aperture 526 .
- the aperture 526 in the another semiconductor material 522 extends 40% of the distance into the cavity.
- the groove 514 is symmetrical, but the aperture 526 in the another semiconductor material 522 is asymmetrical.
- the first surface 524 a of the another semiconductor material 522 has a shallower slope, that is a lesser angle relative to the longitudinal axis of the substrate 512 , than the second surface 524 b of the another semiconductor material 522 .
- the aperture 526 is located off-centre, that is the aperture 526 is located closer to the second face 516 b of the groove 514 and farther from the first face 516 a of the groove 514 , such that the thickness of the another semiconductor 522 is thicker at the first face 516 a of the groove 514 and thinner at the second face 516 b of the groove 514 .
- the first 524 a and second 524 b surfaces of the aperture 526 are substantially parallel to the first 516 a and second 516 b faces respectively of the groove 514 .
- the first 516 a and second 516 b faces of the groove 514 each have a first 516 aa & 516 ba and a second 516 ab & 516 bb end.
- FIG. 1 f shows a sixth embodiment of an optoelectronic device 810 .
- the reference numbers are the same except preceded by an “8”.
- the FIG. 1 f embodiment is similar to the FIG. 1 a embodiment, such that the optoelectronic device 810 comprises a symmetrical v-shaped groove 814 .
- the groove 814 comprises a first face 816 a , a second face 816 b , a conductor material 818 and a semiconductor material 820 , all in contact with another semiconductor material 822 .
- the first 816 a and second 816 b faces of the groove 814 each have a first 816 aa & 816 ba and a second 816 ab & 816 bb end.
- the conductor material 818 and the semiconductor material 820 overlap on a portion of the substrate 812 , such as between two individual grooves in a series of grooves.
- the optoelectronic device 810 further comprises an adhesion layer 830 comprising aluminium and/or chromium, or other suitable material, such as SiO x which is an insulating layer shown to improve adhesion.
- the adhesion layer 830 may also be a conducting layer.
- the another semiconductor 822 material has a first surface 824 a substantially parallel to the first face 816 a of the groove 814 and a second surface 824 b substantially parallel to the second face 816 b of the groove 814 .
- the aperture 826 is located off-centre, that is the aperture 826 is located closer to the second face 816 b of the groove 814 and farther from the first face 816 a of the groove 814 , such that the thickness of the another semiconductor 822 is thicker at the first face 816 a of the groove 814 and thinner at the second face 816 b of the groove 814 .
- FIG. 1 g shows a seventh embodiment of an optoelectronic device 910 .
- the reference numbers are the same except preceded by a “9”.
- the FIG. 1 g embodiment is similar to the FIG. 1 f embodiment, such that the optoelectronic device 910 comprises a symmetrical v-shaped groove 914 .
- the groove 914 comprises a first face 916 a , a second face 916 b , a conductor material 918 and a semiconductor material 920 , all in contact with another semiconductor material 922 .
- the first 916 a and second 916 b faces of the groove 914 each have a first 916 aa & 916 ba and a second 916 ab & 916 bb end.
- the conductor material 918 and the semiconductor material 920 overlap on a portion of the substrate 912 , such as between two individual grooves in a series of grooves.
- the optoelectronic device 910 further comprises an adhesion layer 930 comprising aluminium and/or chromium.
- the adhesion layer 930 may also be a conducting layer.
- the first 916 a and second 916 b faces of the groove 914 define a cavity.
- the another semiconductor 922 material has a first surface 924 a substantially parallel to the first face 916 a of the groove 914 and a second surface 924 b substantially parallel to the second face 916 b of the groove 914 .
- the aperture 926 is located off-centre, that is the aperture 926 is located closer to the first face 916 a of the groove 914 and farther from the second face 916 b of the groove 914 , such that the thickness of the another semiconductor 922 is thicker at the second face 916 b of the groove 914 and thinner at the first face 916 a of the groove 914 .
- the aperture 926 in the another semiconductor material 922 extends 80% of the distance into the cavity.
- FIG. 1 h shows an eighth embodiment of an optoelectronic device 1010 .
- the optoelectronic device 1010 comprises a substrate 1012 comprising a groove 1014 .
- the groove 1014 is v-shaped, and comprises a first face 1016 a , a second face 1016 b , a conductor material 1018 and a semiconductor material 1020 , all in contact with another semiconductor material 1022 .
- the first 1016 a and second 1016 b faces of the groove 1014 each have a first 1016 aa & 1016 ba and a second 1016 ab & 1016 bb end.
- the first 1016 a and second 1016 b faces of the groove 1014 define a cavity.
- the another semiconductor 1022 material has a first surface 1024 a substantially parallel to the first face 1016 a of the groove 1014 and a second surface 1024 b substantially parallel to the second face 1016 b of the groove 1014 , the first surface 1024 a and the second surface 1024 b defining an aperture 1026 .
- the semiconductor material 1020 on the first surface of the substrate adjacent the groove 1014 and therefore on the first side of the groove is coated with an insulator material 1040 .
- the insulator material 1040 is on top of the semiconductor material 1020 on the first surface of the substrate.
- the optoelectronic device 1010 further comprises an adhesion layer 1030 .
- the first face of the groove 1016 a and a first surface of the substrate adjacent the groove 1014 make up the first side of the groove.
- the insulator material is an electrical insulator material.
- the insulator material electrically insulates the semiconductor material 1020 on the first surface of the substrate adjacent the groove from the another semiconductor 1022 in the groove 2014 .
- FIG. 2 shows a plan view of the optoelectronic device 10 comprising a substrate 11 having a surface comprising a first 14 a and a second 14 b series of grooves and a channel 15 therebetween.
- the optoelectronic device 10 is a solar photovoltaic cell.
- the optoelectronic device 10 includes a mixture of interdigitated (parallel connected) and cascaded (series connected) grooves 14 .
- the channel 15 is a means to separate but also connect the cascaded (series connected) grooves 14 a & 14 b in parallel, in order to make it possible to extract the desired electric charge generated at the voltage designed by the number of cascaded groove structures 14 a & 14 b.
- a first area 32 a carries a positive charge and a second area 32 b carries a negative charge.
- FIG. 3 shows a cross-sectional view of the optoelectronic device 10 .
- the optoelectronic device 10 has a structured surface 10 a and a flat surface 10 b .
- the first 14 a and second 14 b series of cascaded groove structures lie either side of the delineation feature 15 .
- the delineation feature 15 represents an inactive area of the optoelectronic device 10 .
- Charge extraction conductors 34 a & 34 b of the delineation feature 15 form input and output connections to the semiconductor material (not shown) in the cavities of the cascaded groove structures 14 a & 14 b.
- the optoelectronic device 10 may be made in various different ways using different techniques and process steps.
- One way to make the optoelectronic device 10 is to use an off-axis directional coating process to apply the coat of conductor material 18 , semiconductor material 20 , and another semiconductor material 22 to the substrate 12 comprising the groove 14 .
- the off-axis directional coating process may include spraying the conductor material 18 , semiconductor material 20 , and another semiconductor material 22 at an angle relative to the plane of the substrate, and therefore also the groove, such that only the first 16 a or second 16 b face of the groove 14 is coated. This is typically because the coating is substantially restricted by viewing angle to only one of the first or second face.
- the off-axis directional coating process may include using a shield to restrict the coating of the conductor material 18 , semiconductor material 20 or another semiconductor material 22 onto the at least first 16 a and/or second 16 b face of the groove 14 .
- the off-axis directional coating process may be repeated using more than one conductor material 20 , semiconductor material 22 and/or another semiconductor material 22 .
- the another semiconductor 22 material having a first surface 24 a substantially parallel to the first face 16 a of the groove 14 and a second surface 24 b substantially parallel to the second face 16 b of the groove 14 is applied to the substrate 12 using a ultrasonic spray coating process such that the first and second surfaces 24 a & 24 b define an aperture 26 in the another semiconductor 22 .
- the another semiconductor 22 material is applied in multiple conformal thin coatings. Thin is understood to mean less than or equal to about 20% of the final coating thickness.
- the substrate 12 is a structured surface and is produced by patterning a surface of the substrate.
- the off-axis directional coating requires that the coating occurs from an angle relative to the groove 14 .
- the coating is sprayed into the groove 14 and deposited from either side of a vertical axis.
- the off-axis directional coating is performed in a partial vacuum.
- the partial vacuum ensures the coating material from the source has a sufficient mean free path, that is a direct and un-diverted path, and that the substrate is substantially free from interactions with gas or atmospheric molecules.
- Spray may refer to any type of directional coating of individual elements and/or droplets, the dimensions of which are smaller than or at least comparable to the dimensions of the groove.
- the off-axis directional coating means that the coating of the various materials is substantially restricted by viewing angle to only one side of the groove 14 .
- the acceptable limits of off-axis directional coating are defined by the type of structure and/or substrate onto which the coating is deposited.
- the coatings are discontinuous over a surface of the structure and/or substrate because of the fine structure or type of structure or substrate used.
- the process of off-axis directional coating is further described in WO 2012/175902A1.
- the process of off-axis directional coating may be referred to as Glancing Angle Deposition (GLAD).
- GLAD Glancing Angle Deposition
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Abstract
Description
-
- a substrate comprising a groove having a first and a second face;
- the first face of the groove coated with a conductor material and the second face of the groove coated with a semiconductor material;
- the conductor material and the semiconductor material in contact with another semiconductor material in the groove; and
- wherein there is an aperture in the another semiconductor material.
Claims (16)
Applications Claiming Priority (3)
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GB1605916.4A GB2549132A (en) | 2016-04-07 | 2016-04-07 | Aperture in a semiconductor |
PCT/GB2017/050968 WO2017174993A1 (en) | 2016-04-07 | 2017-04-06 | Aperture in a semiconductor |
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EP (1) | EP3440708A1 (en) |
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GB201301683D0 (en) | 2013-01-30 | 2013-03-13 | Big Solar Ltd | Method of creating non-conductive delineations with a selective coating technology on a structured surface |
GB2549134B (en) | 2016-04-07 | 2020-02-12 | Power Roll Ltd | Asymmetric groove |
GB2549133B (en) | 2016-04-07 | 2020-02-19 | Power Roll Ltd | Gap between semiconductors |
GB201617276D0 (en) | 2016-10-11 | 2016-11-23 | Big Solar Limited | Energy storage |
GB202004534D0 (en) * | 2020-03-27 | 2020-05-13 | Power Roll Ltd | Substrate for a two-terminal device |
GB202004533D0 (en) * | 2020-03-27 | 2020-05-13 | Power Roll Ltd | A two-terminal device |
GB202101831D0 (en) * | 2021-02-10 | 2021-03-24 | Power Roll Ltd | An electronic device and method of production thereof |
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