TWM586644U - Device for removing foreign matters in pipeline - Google Patents

Abstract

A device for removing foreign matter in a pipeline includes an anti-vibration hose element, a processing element, and a control element. The shock-proof hose element is used to communicate with the pipeline. The processing element is movably disposed on the shock-proof hose element, and the suction portion of the processing element passes through the shock-proof hose element so that the suction portion is located in the pipeline, and the diameter of the shock-proof hose element is larger than the diameter of the processing element, thereby Adjust the position of the suction section in the pipeline. The control element is connected to the processing element, and the control element drives the processing element so that the adsorption part sucks the foreign matter in the pipeline.

Description

Foreign body removal device in pipeline

This creation is about a foreign body removal device in a pipeline.

Semiconductor manufacturing In order to manufacture the quality of the finished product, the manufacturing process requires operation in a clean room under a certain environment. A clean room, also known as a clean room, clean room or clean room, refers to an environment with a low level of pollution. The sources of pollution referred to here are dust, airborne microorganisms, suspended particles, and chemically volatile gases. More precisely, a clean room has a controlled pollution level, which can be determined by the number of particles per cubic meter, or by the maximum particle size. Low-level clean rooms are usually not sterilized (for example, there are no controlled microorganisms), and more attention is paid to the dust in the clean room.

Generally speaking, air ducts can be used as a tool for the treatment of air pollutants, but it has been over the years. There will inevitably be foreign materials in the pipeline. These foreign materials may include products produced during the process, metal debris in the pipe, or remaining debris due to accumulation during transportation. If these foreign materials are not cleaned up and excluded, it will hinder the gas flow in the pipeline. .

Therefore, how to improve and provide a "foreign material removal device in the pipeline" to avoid the problems encountered above is an important issue in the industry.

This creation provides a device for removing foreign objects in a pipeline.

A foreign material removal device in the pipeline is suitable for a pipeline. The foreign material removal device in the pipeline includes a shockproof hose element, a processing element, and a control element. The shock-proof hose element is used to communicate with the pipeline. The processing element is movably disposed on the shock-proof hose element, and an adsorption portion of one of the processing elements passes through the shock-proof hose element so that the adsorption portion is located in the pipeline, and the diameter of the shock-proof hose element is larger than the diameter of the processing element To adjust the position of the suction section in the pipeline. The control element is connected to the processing element, and the control element drives the processing element so that the adsorption part sucks a foreign object in the pipeline.

A foreign body removal device in the pipeline is suitable for a pipeline. The foreign body removal device in the pipeline includes an anti-vibration hose element and a processing element. The shock-proof hose element is used to communicate with the pipeline. The processing element is movably disposed on the shock-proof hose element, and a cutter portion of one of the processing elements passes through the shock-proof hose element so that the cutter portion is located in the pipeline, and the diameter of the shock-proof hose element is larger than the diameter of the processing element To adjust the position of the cutter section in the pipeline, the cutter section is used to cut foreign objects in the pipeline.

A foreign material removal device in the pipeline is suitable for a pipeline. The foreign material removal device in the pipeline includes a shockproof hose element, a processing element, and a control element. The shock-proof hose element is used to communicate with the pipeline. The processing element is movably disposed on the shock-proof hose element, and one end of the processing element is provided with a suction part and a cutter part. The position of the suction part is different from the position of the cutter part, and the processing element passes through the shock-proof hose element to make the suction The cutter section and the cutter section are respectively located in the pipeline, wherein the diameter of the shock-proof hose element is larger than the diameter of the processing element, so as to adjust the position of the suction section and the cutter section in the pipeline, and the cutter section is used to cut foreign objects in the pipeline. The control element is connected to the processing element, and the control element drives the processing element so that the adsorption part sucks the foreign matter in the pipeline.

In an embodiment of the present invention, the shock-proof hose element includes a hose body and a flange portion, and the hose body is connected to the flange portion. The flange portion has an opening and a leak-proof ring body. The processing element is used for An opening is set through, and the leak-proof ring body is located between the opening and the processing element.

In an embodiment of the present invention, the shock-proof hose element includes a first fixing member and a second fixing member, the hose body is connected between the first fixing member and the second fixing member, and the flange portion is locked on Outside the second fixture.

Based on the above, the foreign object removal device in the pipeline of this creation can swing the processing element by making the diameter of the shock-proof hose element larger than the diameter of the processing element, so that the adsorption part and / or the cutter part of the processing element can be closer to and closer to The inner wall surface of the pipe is convenient for the suction part to suck foreign matter in the pipe or to facilitate the cutting of the foreign matter in the pipe by the cutter part to achieve the purpose of removing the foreign matter.

In order to make this creation more obvious and easy to understand, the embodiments are exemplified below and described in detail with the accompanying drawings as follows.

The specific implementation of the present invention is further described below with reference to the drawings and embodiments. The following embodiments are only used to more clearly explain the technical solution of the present invention, but cannot limit the protection scope of the present invention.

It should be noted that, for the convenience and clarity of description, the thickness or size of each element in the drawing is shown in an exaggerated, omitted, or sketched manner, and the size of each element is not completely its actual size.

FIG. 1 is a schematic diagram of an embodiment of a device for removing foreign objects in a pipeline. FIG. 2 is a schematic diagram of an embodiment in which a foreign material removing device in a pipeline is connected to the pipeline. Please refer to FIG. 1 and FIG. 2. The foreign body removing device 1 in the pipeline of this embodiment is used to process the foreign body P in the pipeline W. The foreign body P in the pipeline W is, for example, cutting the foreign body P, sucking the foreign body P, and removing the foreign body P. And other processing methods. The pipeline W in this embodiment is a gas pipeline, for example, an exhaust gas pipeline, a transport gas pipeline, or other gas pipelines in a semiconductor process. Foreign matter P will inevitably remain in the pipeline W, and these foreign matter P include, for example, the product of the manufacturing process, the metal debris in the pipe, or the remaining debris accumulated during the transportation process.

In the present embodiment, the foreign material removal device 1 in the pipeline is suitable for a pipeline W. The foreign material removal device 1 in the pipeline includes a shockproof hose element 10, a processing element 20 and a control element 30. The shockproof hose element 10 itself is a pipe body, and the shockproof hose element 10 is used to communicate with the pipeline W. The processing element 20 is movably disposed on the shock-proof hose element 10, and an adsorption portion 22 of one of the processing elements 20 passes through the shock-proof hose element 10, so that the adsorption portion 22 is located in the pipeline W, and the shock-proof hose element 10 The pipe diameter D2 is larger than the pipe diameter D1 of the processing element 20, so as to adjust the position of the adsorption portion 22 in the pipe W. The control element 30 is connected to the processing element 20, and the control element 30 drives the processing element 20 to cause the adsorption part 22 to suck the foreign matter P in the pipeline W. The foreign matter P includes, for example, a product generated during a manufacturing process, a metal chip in the pipe, or a transmission process. The remaining debris is left in the stack.

Under the above-mentioned configuration, the control element 30 drives the suction portion 22 so that a suction force is generated in the processing element 20 for suction by the suction portion 22, and the suction portion 22 is used to suction the foreign matter P in the pipeline W. In one embodiment, the foreign matter P is accumulated in the interior of the pipeline W, and the position of the adsorption part 22 can be adjusted by rotating the processing element 20, or the adsorption part 22 can be moved forward, so that the adsorption part 22 can be positioned toward the foreign matter P. Direction. However, the present invention does not limit this. In other embodiments, the pipe diameter D2 of the shock-proof hose element 10 is larger than the pipe diameter D1 of the processing element 20, so as to move the position of the adsorption portion 22 in the pipeline W. Taking FIG. 2 as an example, the pipe diameter D2 of the shock-proof hose element 10 is larger than the pipe diameter D1 of the processing element 20, so in addition to rotating the processing element 20 or moving the processing element 20 forward, the processing element 20 can also be swung to make the suction portion 22 can further face and approach the inner wall surface of the pipeline W, so that the adsorption part 22 can suck the foreign matter P in the pipeline W.

In detail, as shown in FIG. 3, FIG. 3 is a schematic diagram of an embodiment of the shock-proof hose element of the present invention. The shock-proof hose element 10 includes a hose body 112, a flange portion 114, a first fixing element 116, and a second fixing element 118. The hose body 112 is connected between the first fixing member 116 and the second fixing member 118. The hose body 112 is connected to the flange portion 114, and the flange portion 114 has an opening 114a and a leakage ring body 119 therein. The flange portion 114 is locked outside the second fixing member 118. Taking FIG. 3 as an example, the flange portion 114 and the second fixing member 118 are locked together by a locking element 115. The processing element 20 is used to pass through the opening 114a, and the leak-proof ring body 119 is, for example, an O-ring. The leak-proof ring body 119 is located between the opening 114a and the processing element 20 to prevent gas from being passed between the processing element 20 and the flange portion 114. The opening 114a leaks.

FIG. 4 is a schematic diagram of another embodiment of a device for removing foreign objects in a pipeline. FIG. 5 is a schematic diagram of another embodiment in which the foreign material removing device in the pipeline is connected to the pipeline. Please refer to FIG. 4 and FIG. 5. The foreign body removing device 2 in the pipeline of this embodiment is used to process the foreign body P in the pipeline W. The foreign body P in the pipeline W is, for example, cutting foreign body P, sucking foreign body P, and removing foreign body P. And other processing methods. The pipeline W in this embodiment is a gas pipeline, for example, an exhaust gas pipeline, a transport gas pipeline, or other gas pipelines in a semiconductor process. Foreign matter P will inevitably remain in the pipeline W, and these foreign matter P include, for example, the product of the manufacturing process, the metal debris in the pipe, or the remaining debris accumulated during the transportation process.

In the present embodiment, the foreign material removing device 2 in the pipeline is suitable for a pipeline W, and the foreign material removing device 2 in the pipeline includes a shockproof hose element 10 and a processing element 40. The shockproof hose element 10 itself is a pipe body, and the shockproof hose element 10 is used to communicate with the pipeline W. The processing element 40 is movably disposed on the vibration-proof hose element 10, and a cutter portion 42 of one of the processing elements 40 passes through the vibration-proof hose element 10, so that the cutter portion 42 is located in the pipeline W, and the vibration-proof hose element 10 The pipe diameter D2 is larger than the pipe diameter D1 of the processing element 40, so as to adjust the position of the cutter portion 42 in the pipeline W. The cutter portion 42 is used to cut the foreign matter P in the pipeline W. The foreign matter P includes, for example, a product produced by a process, a pipe, etc. Internal metal debris, or remaining debris due to accumulation during transportation.

Under the above configuration, if the volume of the foreign body P is large, the cutter portion 42 is used to cut the foreign body P in the pipeline W, so that the volume of the foreign body P becomes smaller, so as to facilitate the removal of the foreign body P. In one embodiment, the foreign matter P is accumulated in the pipeline W, and the position of the cutter part 42 can be adjusted by rotating the processing element 20, or the cutter part 42 can be moved forward so that the cutter part 42 can be positioned toward the foreign matter P. Cut in the direction you want. However, the present invention does not limit this. In other embodiments, the pipe diameter D2 of the shockproof hose element 10 is larger than the pipe diameter D1 of the processing element 40, so as to move the position of the cutter portion 42 in the pipeline W. Taking FIG. 5 as an example, the pipe diameter D2 of the shockproof hose element 10 is larger than the pipe diameter D1 of the processing element 40. Therefore, in addition to rotating the processing element 40 or moving the processing element 40 forward, the processing element 40 can also be swung, so that the cutter portion 42 can further face and approach the inner wall surface of the pipeline W, so that the cutter portion 42 can cut the foreign matter P in the pipeline W.

Furthermore, the hardness of the cutter part 42 in this creative design is greater than that of the foreign object P. The foreign object P is, for example, a hard object such as silicon, thereby ensuring that the cutter part 42 can damage the structure of the foreign object P so as to clean the inside of the pipeline W. The purpose is to prevent these foreign bodies P from continuously accumulating in the pipeline W, thereby avoiding affecting the quality of gas circulation in the pipeline W.

In addition, the shock-proof hose element 10 of this embodiment can be applied to the further structure of the shock-proof hose element 10 shown in FIG. 3, that is, the shock-resistant hose element 10 further includes a hose body 112, a flange portion 114, and a first fixing. The component 116 and a second fixing component 118. In addition, a leak-proof ring body 119 such as an O-ring can be provided to prevent gas from leaking out of the processing element and the opening 114 a of the flange portion 114.

FIG. 6 is a schematic diagram of another embodiment in which the foreign material removing device in the pipeline is connected to the pipeline. Please refer to FIG. 6. The foreign body removing device 3 in the pipeline of this embodiment is used to process foreign bodies P in the pipeline W. The foreign bodies P in the pipeline W are processed by cutting foreign bodies P, sucking the foreign bodies P, and removing the foreign bodies P. . The pipeline W in this embodiment is a gas pipeline, for example, an exhaust gas pipeline, a transport gas pipeline, or other gas pipelines in a semiconductor process. Foreign matter P will inevitably remain in the pipeline W, and these foreign matter P include, for example, the product of the manufacturing process, the metal debris in the pipe, or the remaining debris accumulated during the transportation process.

In the present embodiment, the foreign material removing device 3 in the pipeline is suitable for a pipeline W. The foreign material removing device 3 in the pipeline includes an anti-shock hose element 10, a processing element 50 and a control element 30. The shockproof hose element 10 itself is a pipe body, and the shockproof hose element 10 is used to communicate with the pipeline W. The processing element 50 is movably disposed on the shock-proof hose element 10, and one end of the processing element 50 is provided with a suction portion 52 and a cutter portion 54. The position of the suction portion 52 is different from the position of the cutter portion 54, and the processing element 50 passes through the shockproof The hose element 10 is used to place the suction portion 52 and the cutter portion 54 at different positions in the pipeline W, wherein the diameter D2 of the shock-proof hose element 10 is larger than the diameter D1 of the processing element 50, thereby adjusting the suction portion 52 and The position of the cutter portion 54 in the pipeline W is used to cut the foreign matter P in the pipeline W. The control element 30 is connected to the processing element 50, and the control element 30 drives the processing element 50 to cause the suction unit 22 to suck the foreign matter P in the pipeline W.

Under the above-mentioned configuration, the control element 30 drives the suction portion 52 so that a suction force is generated in the processing element 50 for the suction portion 52 to suck, and the suction portion 52 is used to suction the foreign matter P in the pipeline W. If the volume of the foreign body P is large, the cutter portion 54 is used to cut the foreign body P in the pipeline W, so that the volume of the foreign body P becomes smaller, so as to facilitate the removal of the foreign body P. In one embodiment, the foreign matter P is accumulated in the inside of the pipeline W, and the positions of the suction portion 52 and the cutter portion 54 can be adjusted by rotating the processing element 50, or the suction portion 52 and the cutter portion 54 can be moved forward so that The suction portion 52 and the cutter portion 54 can be oriented in a direction in which the foreign matter P is located. However, this creation does not limit this. In other embodiments, the pipe diameter D2 of the shock-proof hose element 10 is larger than the pipe diameter D1 of the processing element 50, thereby moving the positions of the suction portion 52 and the cutter portion 54 within the pipeline W. Taking FIG. 6 as an example, the pipe diameter D2 of the shock-proof hose element 10 is larger than the pipe diameter D1 of the processing element 20, so in addition to rotating the processing element 50 or moving the processing element 50 forward, the processing element 50 can also be swung to make the suction portion 52 and the cutter portion 54 may be further toward and close to the inner wall surface of the pipeline W, so that the suction portion 52 sucks the foreign material P in the pipeline W, or the cutter portion 54 facilitates the cutting of the foreign material P in the pipeline W. In addition, if the volume of the product after the process is large, the foreign body P in the pipeline W can be cut by the cutter portion 54 first, so that the volume of the foreign body P becomes smaller, and then the foreign body P having the smaller volume is adsorbed by the adsorption portion 52. .

Furthermore, the hardness of the cutter part 54 is greater than the hardness of the foreign object P in the original design. The foreign object P is, for example, a hard object such as silicon, thereby ensuring that the cutter part 54 can damage the structure of the foreign object P so as to clean the inside of the pipeline W. The purpose is to prevent these foreign bodies P from continuously accumulating in the pipeline W, thereby avoiding affecting the quality of gas circulation in the pipeline W.

In addition, the shock-proof hose element 10 of this embodiment can be applied to the further structure of the shock-proof hose element 10 shown in FIG. 3, that is, the shock-resistant hose element 10 further includes a hose body 112, a flange portion 114, and a first fixing. The component 116 and a second fixing component 118. In addition, a leak-proof ring body 119 such as an O-ring can be provided to prevent gas from leaking out of the processing element 20 and the opening 114a of the flange portion.

In summary, the foreign material removal device in the pipeline of this creation can swing the processing element by making the diameter of the shock-proof hose element larger than the diameter of the processing element, so that the adsorption part and / or the cutter part of the processing element can be more oriented And close to the inner wall surface of the pipeline, so that the suction part can suck the foreign objects in the pipeline or the cutter part can cut the foreign objects in the pipeline to achieve the purpose of removing the foreign objects.

In addition, if the volume of the product after the process is large, the foreign matter in the pipeline can be first cut with the cutter part to make the foreign matter volume smaller, and then the adsorbed part is used to adsorb the foreign matter after the volume is reduced, thereby enhancing the foreign matter. Elimination efficiency.

In addition, the hardness of the cutter part is greater than the hardness of the foreign object. For example, the foreign object is a hard object such as silicon. This can ensure that the tool part can damage the structure of the foreign object and make the volume of the foreign object smaller for the suction part of the suction part. Adsorption, in other words, this creation can handle hard objects such as silicon inside the pipeline to prevent these foreign objects from continuously accumulating in the flow channel, and thus to avoid affecting the quality of gas flow in the flow channel.

In addition, in the process of moving the processing element, the leak-proof ring body can be used to prevent the gas from leaking through the openings of the adsorption portion and the flange portion.

Although this creation has been disclosed as above with examples, it is not intended to limit this creation. Any person with ordinary knowledge in the technical field can make some changes and decorations without departing from the spirit and scope of this creation. The scope of protection of this creation shall be determined by the scope of the attached patent application.

1,2,3‧‧‧‧Foreign matter removal device in pipeline

10‧‧‧ Shockproof Hose Element

112‧‧‧Hose body

114‧‧‧ Flange

114a‧‧‧ opening

115‧‧‧Locking element

116‧‧‧First fixing element

118‧‧‧Second fixing element

119‧‧‧Leak-proof ring body

20, 40, 50‧‧‧ processing elements

22, 52‧‧‧ Adsorption Department

30‧‧‧Control element

42, 54‧‧‧ Tool Division

D1, D2‧‧‧‧ diameter

P‧‧‧ Foreign body

W‧‧‧pipe

FIG. 1 is a schematic diagram of an embodiment of a device for removing foreign objects in a pipeline.
FIG. 2 is a schematic diagram of an embodiment in which a foreign material removing device in a pipeline is connected to the pipeline.
FIG. 3 is a schematic diagram of an embodiment of the shock-proof hose element of the present invention.
FIG. 4 is a schematic diagram of another embodiment of a device for removing foreign objects in a pipeline.
FIG. 5 is a schematic diagram of another embodiment in which the foreign material removing device in the pipeline is connected to the pipeline.
FIG. 6 is a schematic diagram of another embodiment in which the foreign material removing device in the pipeline is connected to the pipeline.

Claims (9)

A foreign body removal device in a pipeline is suitable for a pipeline. The foreign body removal device in the pipeline includes:
A shock-proof hose element for communicating with the pipeline;
A processing element is movably disposed on the shockproof hose element, and an adsorption portion of the processing element passes through the shockproof hose element, so that the adsorption portion is located in the pipeline, and the shockproof hose element The diameter of the pipe is larger than the diameter of the processing element, so as to adjust the position of the adsorption part in the pipeline; and a control element connected to the processing element, the control element drives the processing element so that the adsorption part sucks into the pipeline One foreign body. The device for removing foreign objects in a pipeline according to claim 1, wherein the shockproof hose element includes a hose body and a flange portion, the hose body is connected to the flange portion, and the flange portion has an opening and a The leak-proof ring body is used for penetrating the opening, and the leak-proof ring body is located between the opening and the processing element. The device for removing foreign objects in a pipeline according to claim 2, wherein the shockproof hose element includes a first fixing piece and a second fixing piece, and the hose body is connected to the first fixing piece and the second fixing piece In between, the flange portion is locked outside the second fixing member. A foreign body removal device in a pipeline is suitable for a pipeline. The foreign body removal device in the pipeline includes:
A shockproof hose element for communicating with the pipeline; and a processing element movably disposed on the shockproof hose element, and a cutter part of the processing element penetrates the shockproof hose element to make the shockproof hose element The cutter portion is located in the pipeline, and the diameter of the shockproof hose element is larger than the diameter of the processing element, so as to adjust the position of the cutter portion in the pipeline, the cutter portion is used to cut one of the pipelines. foreign matter. The device for removing foreign objects in a pipeline according to claim 4, wherein the shock-proof hose element includes a hose body and a flange portion, the hose body is connected to the flange portion, and the flange portion has an opening and a The leak-proof ring body is used for penetrating the opening, and the leak-proof ring body is located between the opening and the processing element. The device for removing foreign objects in a pipeline according to claim 5, wherein the shockproof hose element includes a first fixing piece and a second fixing piece, and the hose body is connected to the first fixing piece and the second fixing piece In between, the flange portion is locked outside the second fixing member. A foreign body removal device in a pipeline is suitable for a pipeline. The foreign body removal device in the pipeline includes:
A shock-proof hose element for communicating with the pipeline;
A processing element is movably disposed on the shock-proof hose element. An end of the processing element is provided with a suction portion and a cutter portion. The position of the suction portion is different from the position of the cutter portion, and the processing element passes through the shock-proof portion. A hose element for positioning the suction part and the cutter part in the pipeline respectively, wherein a diameter of the shock-proof hose element is larger than a diameter of the processing element, thereby adjusting the suction part and the cutter part in the pipe At the position in the road, the cutter part is used to cut a foreign object in the pipeline; and a control element is connected to the processing element, and the control element drives the adsorption part to make the suction part suck the foreign object in the pipeline. The device for removing foreign objects in a pipeline according to claim 7, wherein the shockproof hose element includes a hose body and a flange portion, the hose body is connected to the flange portion, and the flange portion has an opening and a The leak-proof ring body is used for penetrating the opening, and the leak-proof ring body is located between the opening and the processing element. The device for removing foreign objects in a pipeline according to claim 8, wherein the shock-proof hose element includes a first fixing piece and a second fixing piece, and the hose body is connected to the first fixing piece and the second fixing piece In between, the flange portion is locked outside the second fixing member.