TWI822761B - Bracket unit and marking device - Google Patents

Abstract

[Problem] The object is to provide a bracket unit in which a scribing wheel can stably rotate on the surface of a substrate to form a good scribing device, and a scribing device provided with the bracket unit. [Solution] The bracket unit 30 that holds the scribing wheel 50 for forming scribing lines on the surface H of the substrate 15 includes: a pair of holding parts 33a, 33b; and a holding groove 34 attached to the pair of holding parts 33a, 33b. 33b, and the scribing wheel 50 is inserted; the pin holes 36a, 36b span the holding groove 34, and are formed coaxially on a pair of holding parts 33a, 33b; the pin 32 is inserted into the holding The through hole 51 and the pin holes 36a, 36b of the scribing wheel 50 into which the groove 34 is inserted; and the stoppers 60a, 60b are inserted into the end portions 39a, 39a and 36b of the pin holes 36a, 36b on the opposite side to the scribing wheel 50. 39b.

Description

Bracket unit and marking device

The present invention relates to a bracket unit and a scribing device provided with the bracket unit. The bracket unit is provided with a scribing wheel for forming scribing lines on the surface of a substrate.

In the past, brittle material substrates such as glass substrates were divided by a scribing step and a breaking step. The scribing step formed a scribing line on the surface of the substrate, and the breaking step applied a predetermined force along the formed scribing line. on the surface of the substrate. In the scribing step, the cutting edge of the scribing wheel is pressed against the surface of the substrate and moves along the predetermined line. The marking device is used under a bracket unit that holds the marking wheel.

The following Patent Document 1 discloses a bracket unit that moves a scribing wheel while rotating on the surface of the substrate to form scribing lines on the surface of the substrate. In this bracket unit, the bracket is provided with a pair of holding parts forming a holding groove, and the holding groove is used to configure the marking wheel. Pin holes are formed in the pair of holding parts, and the pins are arranged in the pin holes so as to provide a gap with the bracket. Thereby, the pin system can rotate together with the rotation of the marking wheel. [Prior patent documents] [Patent Document]

[Patent Document 1] Patent No. 6076770

[Problem to be solved by the invention]

In Patent Document 1, a pin hole formed in each of a pair of holding parts is formed by riveting the inner wall near the opening on the opposite side of the scribing wheel train to form a claw part, so that the pin does not pass through the pin hole. fall off. However, in this configuration, the periphery of the opening of the pin hole on the opposite side to the scribing wheel or the inner wall of the pin hole is greatly deformed. Therefore, the posture of the pin will not be stable, and the rotation of the marking wheel during the marking operation may become unstable.

In view of this problem, an object of the present invention is to provide a bracket unit in which a scribing wheel can stably rotate on the surface of a substrate to form a good scribing device, and a scribing device provided with the bracket unit. [Means to solve the problem]

The main aspect of the present invention relates to a bracket unit that holds a scribing wheel for forming scribing lines on the surface of a substrate. The bracket unit of this form includes: a pair of holding parts; a holding groove formed between the pair of holding parts and inserted into the marking wheel; a pin hole spanning the holding groove and in the pair of holding parts. The holding portion is formed coaxially; the pin is inserted into the through hole of the scribing wheel and the pin hole into which the holding groove is inserted; and the stopper is embedded in the pin hole and the scribing wheel. Tie the end on the opposite side.

According to the bracket unit of this form, there is no need to perform processing such as riveting the end of the pin hole on the opposite side to the scribing wheel train or deforming the pin hole, for example. Therefore, the influence on the pin due to the shape of the pin hole is small, and the pin can maintain a stable posture. Therefore, the scribing wheel train stably rotates on the surface of the substrate, and good scribing can be formed. In the bracket unit of this form, the stopper can be configured to be press-fitted into the pin hole.

According to this structure, the stopper is firmly fixed to the pin hole. Therefore, the stopper does not come off from the pin hole, but the pin shaft can be reliably prevented from coming off from the pin hole. In addition, the stopper can be easily installed in the pin hole by pressing it in.

In the bracket unit of this form, the pin hole has: a first area, which is provided at the end and has a diameter that allows the stopper to be inserted; and a second area, which is connected to the first area and has a diameter. The embedding of the stopper is limited; the bracket unit can be configured to accommodate the stopper in the first area and the pin in the second area.

According to this structure, when the stopper is inserted from the end opposite to the scribing wheel, the stopper will not enter the second area. Therefore, the positional relationship between the pin accommodated in the second region and the stopper accommodated in the first region can be appropriately maintained. Therefore, the pin system is not subject to unwanted restrictions due to the stopper and can be maintained in an appropriate state. As a result, the scribing wheel train rotates stably, and the scribing operation can be performed smoothly. Furthermore, according to this structure, the stopper can be installed at an appropriate position by simply fitting the stopper to the extreme position.

The bracket unit of this form may be configured such that a step is provided between the first region and the second region.

According to this structure, the stopper cannot enter the inside of the pin hole due to the segment. Therefore, the positional relationship between the stopper and the pin can be appropriately maintained. Therefore, the pin system is not subject to unwanted restrictions due to the stopper and can be maintained in an appropriate state. As a result, the scribing wheel train rotates stably, and the scribing operation can be performed smoothly.

In the holder unit of this form, the first region may be formed in a tapered shape that approaches the diameter of the second region as it approaches the second region from the end opposite to the scribing wheel.

According to this structure, the first area of the pin hole is formed so as to become narrower from the end opposite to the scribing wheel train toward the scribing wheel. Therefore, the stopper stops in the middle of the first area, and the stopper cannot enter the second area. Therefore, the positional relationship between the stopper and the pin can be properly maintained. Therefore, the pin system is not subject to unwanted restrictions due to the stopper and can be maintained in an appropriate state. As a result, the scribing wheel train rotates stably, and the scribing operation can be performed smoothly.

In the bracket unit of this form, the stopper may be configured so that each of the pin holes formed in each of the pair of holding parts is fitted into the end on the opposite side to the scribing wheel train.

In this way, by arranging stoppers at both ends of the pin, the two ends of the pin can be set to the same state, and the pin can be maintained in a more stable state. Therefore, the scribing wheel train rotates more stably, and scribing lines can be appropriately formed on the surface of the substrate.

In the bracket unit of this form, the stopper may be composed of a sphere.

If the stopper is a sphere, by inserting the stopper into the circular pin hole, the pin hole can be reliably blocked by the stopper. Therefore, the intrusion of a glass piece or the like from the end of the pin hole can be prevented.

In the bracket unit of this form, the stopper can be formed into a cylindrical shape.

If the stopper is cylindrical, by inserting the stopper into the circular pin hole, the pin hole can be reliably blocked by the stopper. Therefore, the intrusion of a glass piece or the like from the end of the pin hole can be prevented.

A second aspect of the present invention relates to a scribing device that forms scribing lines on the surface of a substrate. The scribing device of this form includes: a bracket unit; and a scribing head, which rotatably holds the bracket unit around an axis perpendicular to the surface of the substrate; the bracket unit includes: a pair of holding parts; a holding groove , is formed between the pair of holding parts and is inserted into the marking wheel; the pin hole spans the holding groove and is formed coaxially on the pair of holding parts; the pin shaft is inserted into The through hole and the pin hole of the marking wheel are inserted into the holding groove; and the stopper is embedded in the end of the pin hole on the opposite side to the marking wheel train.

With this configuration, the same effect as the first form can be achieved. Furthermore, since the state of the pin is stable, the scribing device can form a scribing line favorably on the surface of the substrate. [Effects of the invention]

As shown above, according to the present invention, it is possible to provide a bracket unit in which a scribing wheel can stably rotate on the surface of a substrate to form a good scribing device, and a scribing device provided with the bracket unit.

The effects and significance of the present invention will become clearer from the description of the embodiments shown below. However, the embodiments shown below are merely examples for implementing the present invention, and the present invention is not limited to the embodiments described below.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, in each figure, for convenience, the X-axis, the Y-axis, and the Z-axis are orthogonal to each other. The Z axis is perpendicular to the central axis of the marking wheel and is expressed above and below the vertical direction. From now on, upper and lower respectively mean the Z-axis positive side and the Z-axis negative side. >Line marking device>

FIG. 1 is a diagram schematically showing the structure of the scribing device 1 according to the embodiment. The marking device 1 is equipped with a mobile station 10 . The moving stage 10 is screwed with the ball screw 11 . The moving stage 10 is supported by a pair of guide rails 12 so as to be movable in the Y-axis direction. The ball screw 11 is driven by the motor to rotate, thereby causing the moving stage 10 to move in the Y-axis direction along the pair of guide rails 12 .

On the upper surface of the mobile platform 10, a motor 13 is provided. The motor 13 rotates the upper workpiece table 14 in the XY plane and positions it at a predetermined angle. The workpiece table 14 that can be rotated horizontally by the motor 13 is equipped with a vacuum adsorption means not shown in the figure. The substrate 15 placed on the workpiece table 14 is held on the workpiece table 14 by the vacuum adsorption means.

The substrate 15 is a glass substrate, a ceramic substrate made of low-temperature fired ceramics or high-temperature fired ceramics, a silicon substrate, a compound semiconductor substrate, a sapphire substrate, a quartz substrate, etc. Alternatively, the substrate 15 may have a thin film or semiconductor material that is not a brittle material attached to the surface or inside of the substrate.

The scribing device 1 is provided above the substrate 15 placed on the workpiece table 14, and is provided with two cameras 16 for photographing alignment marks formed on the surface H of the substrate 15. Moreover, the bridge 17 is set up on the support|pillar 18a, 18b so that it may span the moving stage 10 and the workpiece stage 14 above it.

On bridge 17, guides 19 are installed. The scribing head 20 is guided by the guide 19 so as to move in the X-axis direction. The scribing head 20 is equipped with a bracket joint 21 at the lower end. The bracket unit 30 that holds the scribing wheel 50 on the bracket 31 is installed on the scribing head 20 via the bracket joint 21 .

When the scribing device 1 is used to form scribing lines on the surface H of the substrate 15 , first, the bracket unit 30 for mounting the scribing wheel 50 is installed on the scribing head 20 . Next, the scribing device 1 uses a pair of cameras 16 to position the substrate 15 . Then, the scribing device 1 moves the scribing head 20 to a predetermined position, and then applies a predetermined load to the scribing wheel 50 so that it contacts the substrate 15 . Then, the scribing device 1 forms a predetermined scribing line on the surface of the substrate 15 by moving the scribing head 20 in the X-axis direction. In addition, the scribing device 1 rotates or moves the workpiece table 14 in the Y-axis direction as necessary to form scribing in the same manner as in the above case.

In the above embodiment, the scribing device is shown as a scribing device in which the scribing head 20 moves in the X-axis direction and the workpiece table 14 moves and rotates in the Y-axis direction. However, as long as the scribing device moves the scribing head and the workpiece table relatively, Can. For example, it can also be a scribing device in which the scribing head is fixed and the workpiece table moves and rotates in the X-axis and Y-axis directions. In this case, the camera 16 may be fixed to the scribing head 20 . >Bracket unit>

Next, the bracket unit 30 will be described. FIG. 2(a) is a side view of the bracket unit 30 and the bracket joint 21 for mounting the bracket unit 30 . FIG. 2( b ) is a perspective view of the bracket unit 30 , and FIG. 2( c ) is an exploded perspective view of the bracket unit 30 . In addition, FIG. 2(a) illustrates the rotation shaft portion 211 of the bracket joint 21, the two bearings 213a, 213b, and the spacer 214 in a cross-sectional view for convenience of explanation.

The bracket unit 30 is held by the bracket joint 21 and mounted on the scribing head 20 . In addition, the bracket unit 30 is composed of the scribing wheel 50, the bracket 31, and the pin 32 in one piece. The bracket 31 is made of magnetic material (such as magnetic metal).

The bracket joint 21 includes a cylindrical rotating shaft part 211, a cylindrical joint part 212, two bearings 213a, 213b and a cylindrical spacer 214. The rotation shaft part 211 is supported by two bearings 213a and 213b and a spacer 214. Thereby, the rotation shaft part 211 and the joint part 212 are rotatably supported. In the joint part 212, a hole 216 having a circular opening 215 is formed on the lower end side. In the upper part of the hole 216, a magnet 217 is provided. The magnet 217 is used to cause magnetic force to act on the bracket unit 30 .

A mounting portion 22 for positioning is provided on the upper portion of the bracket 31 . The mounting part 22 is formed by cutting off the upper part of the bracket 31 and includes an inclined part 22a and a flat part 22b.

With the mounting portion 22 side facing upward, insert the bracket unit 30 from the opening 215 into the hole 216 . At that time, the upper surface of the bracket 31 is brought closer by the magnet 217 on the upper part of the hole 216 . Midway therein, the inclined portion 22 a of the mounting portion 22 comes into contact with the parallel pin 218 passing through the hole 216 . Thereby, the bracket unit 30 of the bracket joint 21 is positioned and fixed. Furthermore, when the holder unit 30 is detached from the holder joint 21, the holder unit 30 can be easily pulled out by pulling the holder 31 downward against the magnetic force.

In addition, the bracket 31 may not necessarily be entirely made of magnetic metal. The lower part where the holding parts 33a and 33b are located may be made of non-magnetic material, and the other parts may be made of magnetic material.

The scribing wheel 50 is a disc-shaped member made of, for example, sintered diamond, cemented carbide, or the like. The scribing wheel 50 is formed with a through hole 51 into which the pin 32 is inserted. The through hole 51 is formed through the center of both side surfaces of the scribing wheel 50 . In addition, a V-shaped blade is formed on the outer peripheral portion of the scribing wheel 50, and the blade forms a ridge. For example, the thickness of the scribing wheel 50 series is about 0.4~1.1mm, and the outer diameter is about 1.0~5.0mm. In addition, the diameter of the through hole 51 is, for example, about 0.4 to 1.5 mm, and the edge angle of the blade is about 90 to 150°.

The pin 32 is a member made of, for example, sintered diamond or cemented carbide. In this embodiment, the pin 32 is a cylindrical member, and the end portions 32a and 32b are formed in a flat shape. The diameter of the pin 32 is slightly smaller than the diameter of the through hole 51 of the marking wheel 50 . Therefore, when the pin 32 is inserted into the through hole 51 , a gap occurs between the pin 32 and the through hole 51 .

As shown in FIG. 2(a) , the lower part of the bracket 31 has a trapezoidal shape whose width narrows toward the lower end when viewed from the side, that is, the positive side of the Y-axis. Furthermore, as shown in FIGS. 2(b) and (c) , holding portions 33a and 33b are respectively formed in the trapezoidal portion of the bracket 31, and a holding groove 34 is formed between the holding portions 33a and 33b. When the holding groove 34 is viewed from the side on the positive side of the X-axis, the upper part is formed into an arc shape and the lower part is formed into a rectangular shape. In the lower part of the holding groove 34, the scribing wheel 50 is inserted. The inner side surfaces 34a and 34b of the lower part of the holding groove 34 are perpendicular to the horizontal plane (XY plane).

On the outer surfaces of the bracket 31 on the positive side and the negative side of the X-axis, recessed portions 35a and 35b that are concave inward are formed. The recessed portions 35a and 35b serve as gripping portions (finger portions) for the operator's hand when the bracket unit 30 is attached and detached from the bracket joint 21 .

Pin holes 36a and 36b for accommodating the pin shaft 32 and the stoppers 60a and 60b are coaxially formed in the holding portions 33a and 33b so as to straddle the holding groove 34. In this embodiment, the pin holes 36a and 36b are provided such that the central axis is parallel to the Y-axis. Parts of the lower portions 37a and 37b on the positive and negative sides of the Y-axis of the holding portions 33a and 33b are cut off. The end portions 39a and 39b of the pin holes 36a and 36b on the opposite side to the scribing wheel 50 are included in the cut surfaces 38a and 38b. The bottom surfaces 40a and 40b of the holding portions 33a and 33b are formed parallel to the XY plane. The bottom surfaces 40a and 40b are substantially orthogonal to the surfaces 38a and 38b. The outer surfaces of the holding portions 33a and 33b on the positive side and the negative side of the X-axis are curved into arc shapes to the bottom surfaces 40a and 40b.

The bracket 31 is formed of stainless steel or carbon tool steel. In addition, in the structure of FIGS. 2(b) and (c) , the bracket 31 is composed of one base material, but the bracket can also be formed by fixing two base materials having holding portions 33a and 33b respectively to the main body. 31.

The stoppers 60a and 60b are spheres in this embodiment. The stoppers 60a and 60b are formed of, for example, metal such as stainless steel, or synthetic resin such as ABS resin. The stoppers 60a and 60b are not limited to the above-mentioned materials as long as they are made of highly rigid metal or synthetic resin.

FIG. 3 is an enlarged cross-sectional view of the bracket unit 30 viewed from the X-axis direction. In the pin holes 36a and 36b, segment portions 41a and 41b are provided around the entire inner peripheral surface of the pin holes 36a and 36b. The pin holes 36a and 36b are divided into first regions 361a and 361b and second regions 362a and 362b via the step portions 41a and 41b. The first regions 361a and 361b are regions including the end portions 39a and 39b on the opposite side to the scribing wheel 50. The second areas 362a and 362b are areas connected to the first areas 361a and 361b, and hold the pin 32.

The diameters of the first regions 361a and 361b, that is, the diameters of the end portions 39a and 39b, are slightly smaller than the diameters of the stoppers 60a and 60b. The diameter of the second areas 362a and 362b is slightly smaller than the diameter of the end portions 39a and 39b, that is, the diameter of the first areas 361a and 361b, and is slightly larger than the diameter of the pin 32. In addition, the diameter of the second areas 362a and 362b is approximately the same as or slightly smaller than the diameter of the through hole 51 of the scribing wheel 50 .

With the scribing wheel 50 inserted into the holding groove 34, the pin 32 is inserted into the through hole 51 and the pin holes 36a and 36b of the scribing wheel 50, that is, the second area 362a and 362b. As described above, the pin holes 36a and 36b are formed in the holding portions 33a and 33b so that the central axis is parallel to the Y-axis. Therefore, the pin shaft 32 inserted into the second areas 362a and 362b and the through hole 51 is They are arranged in a direction parallel to the surface H of the substrate 15 (a direction parallel to the XY plane). In addition, the diameter of the pin 32 is slightly smaller than that of the through hole 51 . Therefore, when the pin 32 is inserted into the through hole 51 and the second areas 362a and 362b, the pin 32 is allowed to rotate.

When the stoppers 60a and 60b are accommodated in the first regions 361a and 361b, the stoppers 60a and 60b are inserted from the end portions 39a and 39b by press-fitting. At this time, the stoppers 60a and 60b enter the first areas 361a and 361b toward the scribing wheel 50, but are stopped due to contact with the segments 41a and 41b. This prevents the stoppers 60a and 60b from entering the second areas 362a and 362b. In this way, when the stoppers 60a and 60b are accommodated in the first regions 361a and 361b, the positional relationship between the pin 32 accommodated in the second region 362a and 362b and the stoppers 60a and 60b is appropriately maintained. The actuators 60a and 60b will not affect the posture of the pin 32.

In addition, in FIG. 3 , the state in which part of the stoppers 60a and 60b protrudes from the end portions 39a and 39b is shown. However, for example, when the distance between the first regions 361a and 361b in the X-axis direction is sufficiently ensured, it may be used. The segments 41a and 41b are provided so that the stoppers 60a and 60b are completely accommodated in the first regions 361a and 361b.

<Effects of this embodiment>

For example, when the end portions 39a and 39b of the pin holes 36a and 36b are struck with a tool or the like to rivet the end portions 39a and 39b, the impact acts on the pin holes 36a and 36b and the end portions are greatly deformed. In contrast, in this embodiment, as shown in Figures 2(a) to (c) and Figure 3, after the pin 32 is inserted into the pin holes 36a, 36b and the through hole 51 of the scribing wheel 50, in order to prevent the pin from being 32 is removed and the stoppers 60a and 60b are provided in the first areas 361a and 361b. Therefore, the shapes of the second regions 362a and 362b, which are regions holding the pin 32, do not change. Thereby, the influence on the posture of the pin 32 in the bracket 31 is small, and the pin 32 can maintain a more stable posture. Therefore, the scribing wheel 50 rotates stably, and a good scribing line can be formed on the surface H of the substrate 15 .

As shown in Figures 2(a) to (c) and Figure 3, the stoppers 60a and 60b are embedded in the first regions 361a and 361b by press-fitting. Therefore, the stoppers 60a and 60b are in close contact with the inner surfaces of the first regions 361a and 361b without gaps and are firmly fixed. Therefore, the stoppers 60a and 60b do not come off from the first areas 361a and 361b, but reliably prevent the pin shaft 32 from falling off from the pin holes 36a and 36b. In addition, the stoppers 60a and 60b can be easily accommodated in the first regions 361a and 361b by pressing them in.

As shown in FIG. 3 , step portions 41 a and 41 b are provided at the boundaries between the first regions 361 a and 361 b and the second regions 362 a and 362 b of the pin holes 36 a and 36 b. Therefore, the stoppers 60a and 60b are stopped due to contact with the segments 41a and 41b. Therefore, the stoppers 60a and 60b cannot enter further into the pin holes 36a and 36b, and the stoppers 60a and 60b do not enter the second areas 362a and 362b. Therefore, the positional relationship between the stoppers 60a, 60b and the pin 32 can be appropriately maintained. Therefore, the pin 32 is not subject to undesirable restrictions due to the stoppers 60a and 60b, and is maintained in an appropriate state. Therefore, the stoppers 60a and 60b do not affect the posture of the pin 32, and the pin 32 can rotate freely. As a result, the scribing wheel 50 rotates stably, and a scribing line can be formed smoothly on the surface H of the substrate 15 .

As described above, the stoppers 60a and 60b are accommodated in the first regions 361a and 361b so as to appropriately maintain the positional relationship between the stoppers 60a and 60b and the pin 32. However, during the scribing operation, the pin 32 is slightly moved in the Y-axis direction in the second areas 362a and 362b due to rotation, and the pin 32 may come into contact with the stoppers 60a and 60b. In this regard, as shown in FIGS. 2(a), (b), and 3, the pin 32 is a cylindrical member, and the end portions 32a and 32b are formed in a flat shape. Therefore, when the pin shaft 32 comes into contact with the stoppers 60a and 60b, the contact is a point contact, that is, the pin shaft 32 and the stoppers 60a and 60b are in a point contact state. Therefore, the influence of the stoppers 60a, 60b on the rotation of the pin 32 is suppressed to the minimum. Therefore, the pin shaft 32 can continue to rotate stably.

As shown in Fig. 2(a), (b) and Fig. 3, the stoppers 60a and 60b are spheres. Therefore, when the stoppers 60a and 60b are accommodated in the first regions 361a and 361b by press-fitting, the stoppers 60a and 60b are in close contact with the inner surfaces of the first regions 361a and 361b without gaps. Therefore, during the scribing operation, the glass piece does not invade from the end portions 39a and 39b. Therefore, the pin 32 can continue to rotate stably. As a result, the scribing wheel 50 rotates stably, and a scribing line can be formed smoothly on the surface H of the substrate 15 .

As shown in FIGS. 2(b) and (c) , the recessed portions 35a and 35b of the bracket unit 30 that are gripped by the operator's hand are attached to the holding portions 33a and 33b and are arranged at right angles to the pin 32 . outer side. Since the recessed portions 35a and 35b are arranged in this position, the operator can easily hook his or her fingers onto the holder unit 30 . Therefore, the operator can easily disassemble and assemble the bracket unit 30 by attaching the bracket joint 21 . >Example of changes in implementation form>

Next, Modification Examples 1 to 4 of this embodiment will be described based on FIGS. 4(a) to 5(b). 4(a) and (b) are enlarged cross-sectional views of the bracket unit 30 viewed from the X-axis direction. FIG. 5(a) is an enlarged cross-sectional view of the bracket unit 30 viewed from the X-axis direction. FIG. 5( b ) is a bottom view of the bracket unit 30 . [Modification example 1]

As shown in FIG. 4(a) , the holder unit 30 of Modification 1 is not provided with the step portions 41a and 41b provided in this embodiment.

In the holder unit 30 of Modification 1, the first areas 361a and 361b are formed so as to approach the second areas 362a and 362b from the end portions 39a and 39b on the opposite side to the scribing wheel 50, respectively. diameter of the cone. Other configurations are the same as in this embodiment.

In the structure of Modification 1, the first regions 361a and 361b are formed to become narrower from the end portions 39a and 39b on the opposite side to the scribing wheel 50 toward the scribing wheel 50 . When the stoppers 60a and 60b are installed in the first areas 361a and 361b by press-fitting, the stoppers 60a and 60b enter the first areas 361a and 361b, but stop in the middle of the first areas 361a and 361b. However, the second area 362a and 362b cannot be entered. Therefore, the positional relationship between the stoppers 60a, 60b and the pin 32 can be appropriately maintained. Therefore, the pin 32 is not subject to undesirable restrictions due to the stoppers 60a and 60b, and is maintained in an appropriate state. As a result, the scribing wheel 50 rotates stably, and a scribing line can be formed smoothly on the surface H of the substrate 15 .

In addition, since the first regions 361a and 361b have a tapered shape when viewed from the side and the bottom, for example, if excessive pressure is applied to the stoppers 60a and 60b, the stoppers 60a and 60b may enter the second regions 362a and 362b, respectively. Therefore, in the structure of Modification 1, in order to reliably prevent entry into the second areas 362a and 362b, appropriate pressure is applied to the stoppers 60a and 60b. Thereby, the stoppers 60a and 60b stop in the middle of the first regions 361a and 361b without penetrating deeply into the second regions 362a and 362b.

[Modification example 2]

The bracket unit 30 of Modification 2 is as shown in Fig. 4(b). The stoppers 70a and 70b are composed of cylindrical members, and the end portions 42a and 42b of the pin 42 have a pointed shape. Other configurations are the same as in this embodiment.

The stoppers 70a and 70b are cylindrical members, and the end portions 71a and 71b of the stoppers 70a and 70b are formed into planar shapes. Therefore, when the pin 42 moves in a direction perpendicular to the direction of the rotation axis of the pin 42 during the scribing operation, and the pin 42 contacts the stoppers 70a and 70b, the contact is a point contact, that is, the pin 42 and the stopper 70a, 70b. The stoppers 70a and 70b are in a one-point contact state. Therefore, the influence of the stoppers 70a, 70b on the rotation of the pin 42 is suppressed to the minimum. Therefore, the pin 42 can continue to rotate in a stable posture, and the scribing wheel 50 can form scribing lines on the surface H of the base plate 15 .

In addition, the structure of Modification Example 2 can also be applied to the structure of Modification Example 1 mentioned above. That is, the cylindrical stoppers 70a and 70b can be accommodated in the tapered first regions 361a and 361b.

Moreover, in the structure of Embodiment and Modification 1, the end parts 42a and 42b of the pin shaft 32 may have a pointed shape.

[Modification example 3]

In the bracket unit 30 of Modification 3, as shown in FIG. 5(a) , one end 43a of the pin 43 has a pointed shape, and the other end 43b is formed in a flat shape. Furthermore, the side of the pointed end portion 43a is accommodated in the second region 362a of the pin hole 36b, and the side of the flat end portion 43b is accommodated in the second region 362b of the pin hole 36a. In this case, the spherical stopper 60a is accommodated in the first region 361a connected to the second region 362a, and the cylindrical stopper 70b is accommodated in the first region 361b connected to the second region 362b. The end portion 71b of the cylindrical stopper 70b is formed in a flat shape.

As shown in the description of this embodiment, the end portion 43a is in point contact with the stopper 60a which is a sphere. On the other hand, as shown in the description of Modification 2, the end portion 43b and the cylindrical stopper 70b are also in point contact. Therefore, when the pin shaft 43 is in contact with the stoppers 60a and 70b, the influence of the stoppers 60a and 70b on the rotation of the pin shaft 43 is suppressed to the minimum. Therefore, the pin 43 can continue to rotate in a stable posture, and the scribing wheel 50 can form scribing lines on the surface H of the base plate 15 .

In addition, the structure of Modification Example 3 can also be applied to the structure of Modification Example 1 mentioned above.

[Modification example 4]

As shown in FIG. 5(b) , the bracket unit 30 of Modification 4 has pin holes 36 a and 36 b arranged in a direction perpendicular to the inner side of the holding groove 34 , at least in a direction parallel to the surface H of the base plate 15 (towards the XY plane). parallel direction) formed in an inclined manner. Other configurations are the same as in this embodiment.

In a state where the marking wheel 50 is inserted into the holding groove 34 , the pin 32 is inserted into the through hole 51 and the pin holes 36 a and 36 b of the marking wheel 50 . As described above, since the pin holes 36a and 36b are formed to be inclined in the direction perpendicular to the inner side surfaces 34a and 34b of the holding groove 34, the pin holes 36a and 36b and the through hole 51 The inserted pin 32 is inclined in a direction perpendicular to the inner side surfaces 34a, 34b of the holding groove 34, and at least in a direction parallel to the surface H of the base plate 15 (a direction parallel to the XY plane).

When the pin holes 36a and 36b are formed in this manner, when the scribing wheel 50 is pressed against the surface H of the base plate 15 during the scribing operation, the reaction force generates a rotational force in the scribing wheel 50 and turns the scribing wheel 50 into a The position becomes perpendicular to the pin 32 . Thereby, the two side surfaces of the scribing wheel 50 are respectively pressed against the inner side surfaces 34a and 34b of the holding groove 34 that face each other. Therefore, during the scribing operation, the scribing wheel 50 is restrained from moving along the pin 32, so that the position at which the scribing line is formed can be stabilized.

Furthermore, although not shown in the figure, the pin holes 36 a and 36 b may be formed in a direction perpendicular to the inner surface of the holding groove 34 and inclined in a direction perpendicular to the surface H of the substrate 15 . In this case, also during the scribing operation, when the scribing wheel 50 is pressed against the surface H of the base plate 15 , the reaction force generates a rotational force on the scribing wheel 50 so that the scribing wheel 50 assumes a position perpendicular to the pin shaft 32 . Thereby, the two side surfaces of the scribing wheel 50 are respectively pressed against the inner side surfaces 34a and 34b of the holding groove 34 that face each other. Therefore, during the scribing operation, the scribing wheel 50 is restrained from moving along the pin 32, thereby stabilizing the formation position of the scribing line.

(Other examples of changes)

The shapes of the pin holes described in the above-mentioned embodiment and Modification 1 may also be combined. That is, in one pin hole 36a, the step portion 41a is provided between the first area 361a and the second area 362a. The other pin hole 36b is a first region 361b formed in a tapered shape toward the scribing wheel 50 from the end 39b on the opposite side to the scribing wheel 50 .

When the pin holes 36a and 36b are formed in this manner, the pin shaft 32 is not prevented from rotating by the stoppers 60a and 60b and can rotate stably. As a result, the scribing wheel 50 rotates smoothly, and a scribing line can be formed on the surface H of the substrate 15 .

In the above-described embodiments and modifications 1 to 4, the stoppers 60a, 60b and the stoppers 70a, 70b are pressed into the pin holes 36a, 36b. However, the stoppers may also be fixed by adhesion or spot welding, for example. The devices 60a, 60b and the stoppers 70a, 70b are fixed to the pin holes 36a, 36b. These techniques can suppress the deformation of the pin holes 36a and 36b as in the case of press-fitting. Therefore, the deformation of the pin hole has little impact on the pin 32, and the pin 32 can maintain a stable posture. Therefore, the scribing wheel train rotates in a stable posture, and the scribing action can be performed.

In addition, the stopper system may not necessarily be spherical or cylindrical, for example, it may also be elliptical. However, when the stopper is elliptical, a gap is generated between the stopper and the first region, and a glass piece may penetrate into the interior through the gap. Therefore, in order to prevent the glass sheet from invading, as shown in the above-mentioned embodiment or modification 2, it is preferable to configure the stopper with a spherical or cylindrical member, and the first area is completely blocked by the stopper.

In addition, there may not necessarily be a gap between the end of the pin and the stopper, or both ends of the pin may be in approximately contact with the stopper, and further, the pins 32 and 42 may not necessarily have a gap. Rotate against the pin holes 36a, 36b.

The embodiments of the present invention can be appropriately modified in various ways within the scope of the technical ideas shown in the claims.

1‧‧‧Line marking device 15‧‧‧Substrate 20‧‧‧Scribe head 30‧‧‧Bracket unit 32, 42, 43 pin 33a, 33b‧‧‧Holding part 34‧‧‧Retaining slot 36a, 36b‧‧‧Pin hole 361a, 361b‧‧‧Region 1 362a, 362b‧‧‧Region 2 39a, 39b‧‧‧End of pin hole 41a, 41b‧‧‧section 50‧‧‧Scribe wheel 51‧‧‧Through hole 60a, 60b‧‧‧Sphere (stop) 70a, 70b‧‧‧cylindrical member (stop) H‧‧‧Surface of substrate

[Fig. 1] Fig. 1 is a diagram schematically showing the structure of a scribing device equipped with a bracket unit according to the embodiment. [Fig. 2] Fig. 2(a) is a side view showing the bracket unit and the bracket joint for mounting the bracket unit according to the embodiment. Figure 2(b) is a perspective view of the bracket unit, and Figure 2(c) is an exploded perspective view of the bracket unit. [Fig. 3] Fig. 3 is an enlarged cross-sectional view of the side of the bracket unit according to the embodiment. [Fig. 4] (a) and (b) are enlarged cross-sectional views of the side of the bracket unit according to the modified example of the embodiment. [Fig. 5] Fig. 5(a) is an enlarged cross-sectional view of the side of the bracket unit according to a modified example of the embodiment. FIG. 5(b) is a bottom view of a bracket unit according to a modified example of the embodiment.

30‧‧‧Bracket unit

32‧‧‧pin

32a, 32b‧‧‧End

33a, 33b‧‧‧Holding part

34‧‧‧Retaining slot

34a, 34b‧‧‧Inside surface

36a, 36b‧‧‧Pin hole

361a, 361b‧‧‧Region 1

362a, 362b‧‧‧Region 2

37a, 37b‧‧‧lower part

39a, 39b‧‧‧End of pin hole

41a, 41b‧‧‧section

50‧‧‧Scribe wheel

60a, 60b‧‧‧Sphere (stop)

Claims (8)

A bracket unit that holds a scribing wheel used to form scribing lines on the surface of a substrate, which is characterized by including: a pair of holding parts; a holding groove formed between the pair of holding parts and inserted The marking wheel; the pin hole spans the holding groove and is formed coaxially on the pair of holding parts; the pin shaft is inserted between the through hole of the marking wheel inserted into the holding groove and the The pin hole; and the stopper is embedded in the end of the pin hole on the opposite side to the scribing wheel train; wherein the stopper is formed in each of the pin holes of the pair of holding parts. Insert the end on the opposite side to the scribed wheel train. For example, in the bracket unit of Item 1 of the patent application, the stopper is inserted into the pin hole by pressing. For example, the bracket unit of item 1 of the patent application scope, wherein the pin hole has: a first area, which is provided at the end and has a diameter that allows the insertion of the stopper; and a second area, which is connected to the first area. The areas are connected, and the diameter limits the insertion of the stopper; in the first area, the stopper is accommodated; in the second area, the pin is accommodated. For example, the bracket unit of item 2 of the patent application scope, wherein the pin hole has: a first area, which is provided at the end and has a diameter that allows the insertion of the stopper; and a second area, which is connected to the first area. The areas are connected, and the diameter limits the insertion of the stopper; in the first area, the stopper is accommodated; in the second area, the pin is accommodated. For example, in the bracket unit of Item 3 of the patent application, a segment is provided between the first area and the second area. For example, the bracket unit of claim 3, wherein the pin hole is formed as the first area approaches the diameter of the second area as it approaches the second area from the end opposite to the scribing wheel. of cone. For example, if the bracket unit of any one of items 1 to 6 of the patent scope is applied for, the stopper is a sphere. A scribing device, which is a scribing device that forms scribing lines on the surface of a substrate, is characterized by including: a bracket unit; and a scribing head, which is rotatably held around an axis perpendicular to the surface of the substrate to hold the bracket unit ; The bracket unit includes: a pair of holding parts; a holding groove formed between the pair of holding parts and inserted into the marking wheel; a pin hole spanning the holding groove and in the pair of holding parts; The pin is inserted into the through hole of the marking wheel inserted into the holding groove and the pin hole; and the stopper is embedded in the pin hole and the marking wheel train. The end portion on the opposite side; wherein the stopper is inserted into the end portion on the opposite side of the scribing wheel train through each of the pin holes formed in each of the pair of holding parts.