TWI721343B - Handler for electronic component test - Google Patents
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- TWI721343B TWI721343B TW107144513A TW107144513A TWI721343B TW I721343 B TWI721343 B TW I721343B TW 107144513 A TW107144513 A TW 107144513A TW 107144513 A TW107144513 A TW 107144513A TW I721343 B TWI721343 B TW I721343B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/01—Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
- G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
- G01R31/2875—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature related to heating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
- G01R31/2877—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature related to cooling
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
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- General Physics & Mathematics (AREA)
- Environmental & Geological Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
本發明涉及一種電子部件測試用分選機,根據本發明的電子部件測試用分選機包括:加壓器,用於對電子部件進行加壓;接觸板,夾設於電子部件與構成加壓器的推動件之間,其中在接觸板的接觸帽配備有溫度測量器,通過由溫度測量器獲取的溫度資訊控制溫度調節部調節電子部件的溫度。根據本發明,確保溫度測量器的穩定性並能夠精確測量關於電子部件的溫度,能夠掌握推動件與接觸帽之間的不良接觸等,從而防止不良測試,進而提供測試及設備的可靠性。The present invention relates to a sorting machine for testing electronic components. The sorting machine for testing electronic components according to the present invention includes: a pressurizer for pressurizing electronic components; Between the pushing parts of the sensor, the contact cap of the contact plate is equipped with a temperature measuring device, and the temperature adjustment part is controlled to adjust the temperature of the electronic component through the temperature information obtained by the temperature measuring device. According to the present invention, the stability of the temperature measuring device can be ensured and the temperature of the electronic components can be accurately measured, and the bad contact between the pusher and the contact cap can be grasped, so as to prevent bad tests and further improve the reliability of the test and equipment.
Description
本發明涉及一種用於測試生產的電子部件的分選機,尤其涉及對電子部件加壓的加壓部及電子部件的溫度調節。The present invention relates to a sorting machine for testing and producing electronic components, and in particular to a pressurizing part that pressurizes electronic components and temperature adjustment of electronic components.
分選機是支援製造的電子部件能夠被測試機測試並根據測試結果按等級對電子部件進行分類的設備。The sorting machine is a device that supports manufacturing of electronic components that can be tested by a testing machine and classifies the electronic components according to the test results.
分選機已通過韓國公開專利10-2002-0053406號(以下稱為「現有技術1」)及日本公開專利2011-247908號(以下稱為「現有技術2」)等多篇專利文件公開。The sorting machine has been disclosed in multiple patent documents such as Korean Patent Publication No. 10-2002-0053406 (hereinafter referred to as "Prior
圖1是關於現有的分選機TH的示意圖。Fig. 1 is a schematic diagram of a conventional sorting machine TH.
現有的分選機TH包括供應部SP、加壓部PP及回收部WP。The existing sorting machine TH includes a supply part SP, a pressurizing part PP, and a recovery part WP.
供應部SP將裝載於客戶托盤(customer tray)的電子部件供應至加壓部PP。The supply part SP supplies the electronic components loaded on a customer tray to the pressurizing part PP.
加壓部PP對由供應部SP供應的電子部件朝向與測試機的主體連接的插座板(Socket board)SB側進行加壓,從而使電子部件電連接於測試機(Tester)。在此,在插座板SB配備有與電子部件電連接的多個測試插槽(Test Socket)TS。The pressurizing part PP pressurizes the electronic components supplied from the supply part SP toward the socket board (Socket board) SB side connected to the main body of a tester, and electrically connects the electronic components to a tester (Tester). Here, the socket board SB is equipped with a plurality of test sockets (Test Socket) TS electrically connected to the electronic components.
回收部WP在從加壓部PP回收完成測試的電子部件之後根據測試結果進行分類並將其裝載於空的客戶托盤。The recycling part WP collects the electronic components that have been tested from the pressurizing part PP, and then sorts them based on the test results and loads them on an empty customer tray.
如前述的供應部SP、加壓部PP及回收部WP可以根據分選機TH的使用目的具有多種形態及構成。As mentioned above, the supply part SP, the pressurization part PP, and the recovery part WP can have various forms and structures according to the purpose of use of the sorting machine TH.
本發明涉及如前述的構成中的加壓部PP及溫度調節功能。The present invention relates to the pressurizing part PP and the temperature adjustment function in the aforementioned configuration.
如圖2的示意圖中所示,加壓部PP包括加壓器210'(在現有技術1中稱為「分度頭(Index head)」,在現有技術1中稱為「壓迫裝置」)、豎直移動器220'及水平移動器230'。As shown in the schematic diagram of FIG. 2, the pressurizing part PP includes a pressurizer 210' (referred to as "Index head" in
加壓器210'具有推動件(pusher)212',用於對各個電子元件朝向對應的測試插槽TS(在現有技術2中稱為「檢查用插座」)進行加壓。The
如圖3所示,推動件212'通過加壓部位PR的下表面對電子部件D進行加壓。並且,推動件212'通過加壓部位PR的下表面利用真空壓吸附和抓持電子部件D。為此,在推動件212'形成有能夠施加真空壓的真空路VW。這種推動件212'配備有用於感測推動件212'自身溫度的溫度感測器212'c。通過該溫度感測器212'c能夠間接感測被推動件212'加壓的電子部件的溫度。As shown in FIG. 3, the pushing member 212' presses the electronic component D through the lower surface of the pressing part PR. In addition, the pushing
加壓器210'在抓持電子部件的狀態下下降,從而使電子部件電連接於位於插座板SB的測試插槽TS。為此,加壓器210'構成為能夠前後水平移動以及上下豎直移動。The presser 210' is lowered while gripping the electronic component, so that the electronic component is electrically connected to the test slot TS on the socket board SB. For this reason, the pressurizer 210' is configured to be capable of horizontal movement back and forth and vertical movement up and down.
豎直移動器220'通過使加壓器210'升降,使壓器210'向插座板SB側前進或後退。當通過加壓器210'從電子部件移動梭(在現有技術2中稱為「滑動台」)抓持電子部件或者解除抓持時以及當將電子部件D電連接至測試插槽TS或者解除連接時進行如前述的豎直移動器220'的操作。The vertical mover 220' moves the presser 210' up and down to move the presser 210' forward or backward to the socket board SB side. When the electronic component is gripped or released from the electronic component moving shuttle (referred to as the "sliding table" in the prior art 2) by the presser 210' and when the electronic component D is electrically connected to or disconnected from the test slot TS At this time, the operation of the vertical mover 220' as described above is performed.
水平移動器230'使加壓器210'沿前後方向水平移動。在此,加壓器210'的水平移動在移動梭的上方支點和插座板SB的上方支點時進行。The horizontal mover 230' moves the presser 210' horizontally in the front-rear direction. Here, the horizontal movement of the presser 210' is performed when moving the upper fulcrum of the shuttle and the upper fulcrum of the socket board SB.
另外,電子部件在測試程序中會發生自熱(self heating)。尤其,諸如CPU等需要運算的電子部件的自熱非常大。並且,自熱會提高電子部件的溫度,這妨礙電子部件在保持符合測試條件的合適的溫度的狀態下進行測試。In addition, electronic components may self-heat during the test procedure. In particular, the self-heating of electronic components that require calculations, such as CPUs, is very large. In addition, self-heating increases the temperature of the electronic component, which prevents the electronic component from being tested while maintaining an appropriate temperature that meets the test conditions.
在韓國授權專利10-0706216號(以下稱為「現有技術3」)中,為了調節電子部件的溫度而配備有散熱器(Heatsink)。但是,根據現有技術3,推動件的結構複雜,從而生產性不佳,耐久性降低。In Korean Patent No. 10-0706216 (hereinafter referred to as "Prior Art 3"), a heat sink (Heatsink) is provided in order to adjust the temperature of electronic components. However, according to the prior art 3, the structure of the pushing member is complicated, so that the productivity is poor and the durability is reduced.
在韓國公開專利10-2008-0086320號(以下稱為「現有技術4」)中,為了調節電子部件的溫度而在推動件形成有空氣貫通孔,在管道中向空氣貫通孔供應溫度調節用空氣。但是,現有技術4難以應用於使用推動器212'作為通過真空壓抓持電子部件的結構的情形。這是因為在推動件必須配備的真空吸附功能及噴射溫度調節用空氣的彼此相反的兩種功能。In Korean Patent Publication No. 10-2008-0086320 (hereinafter referred to as "Prior Art 4"), in order to adjust the temperature of electronic components, an air through hole is formed in the pusher, and the air through hole is supplied with air for temperature adjustment in the duct. . However, the prior art 4 is difficult to apply to the case where the pusher 212' is used as a structure for grasping electronic components by vacuum pressure. This is because the pusher must be equipped with the vacuum suction function and the ejection temperature adjustment air function, which are opposite to each other.
並且,上述的方法通過溫度調節功能的操作調節電子部件的溫度的反應較慢,因此相應地導致測試的可靠性降低。In addition, the above-mentioned method has a slow response to adjusting the temperature of the electronic component through the operation of the temperature adjustment function, which accordingly leads to a decrease in the reliability of the test.
因此,本發明的發明人通過韓國公開專利10-2016-0064964號(以下稱為「對比技術1」)提出了一種技術,通過冷卻袋或加熱器調節推動件的溫度,從而能夠即時回應電子部件的溫度變化。Therefore, the inventor of the present invention has proposed a technology through Korean Laid-open Patent No. 10-2016-0064964 (hereinafter referred to as "
並且,在對對比技術1進一步改進的韓國公開專利10-2017-0116875號(以下稱為「對比技術2」)中追加提出了一種技術,在推動件形成有冷卻流體通過的流體通路。根據這種對比技術2,在推動件與電子部件之間配備有接觸板。並且,接觸板具有與推動件一對一對應的接觸帽。根據這種構成,在對比技術2中,推動件與接觸帽接觸,接觸帽接觸於電子部件。即,在對比技術2中採取了推動件與電子部件間接接觸的方式。In addition, Korean Laid-open Patent No. 10-2017-0116875 (hereinafter referred to as "Comparative Technology 2") that further improved the
對比技術1及對比技術2均在推動件設置有用於測量電子部件溫度的溫度感測器,溫度感測器配備於推動件與電子部件接觸的面一側。因此,雖然根據對比技術1,溫度感測器能夠直接接觸於電子部件,但是根據對比技術2,溫度感測器無法直接接觸於電子部件。Both Comparative Technology 1 and Comparative Technology 2 are provided with a temperature sensor for measuring the temperature of the electronic component in the pusher, and the temperature sensor is equipped on the side of the contact surface of the pusher with the electronic component. Therefore, although according to the
即,對於對比技術2的情況而言,具有溫度感測器置於接觸帽之間而測量電子部件的溫度的結構,從而具有如下問題。That is, in the case of the
第一,由於溫度感測器與電子部件隔開相當於接觸帽的厚度,因此在半導體元件的溫度與溫度感測器測量的溫度之間發生延遲和偏差。並且,接觸帽的厚度越厚,這種延遲和偏差越大。First, since the temperature sensor is separated from the electronic component by the thickness of the contact cap, a delay and deviation occur between the temperature of the semiconductor element and the temperature measured by the temperature sensor. And, the thicker the thickness of the contact cap, the greater the delay and deviation.
第二,若由於生產或機械設置不良導致與推動件相接的接觸帽的面不均勻或傾斜,則溫度感測器測量的溫度的準確性非常低。Second, if the surface of the contact cap contacting the pushing member is uneven or inclined due to poor production or mechanical settings, the accuracy of the temperature measured by the temperature sensor is very low.
另外,當進行加壓操作時,在對比技術1中,溫度感測器直接接觸於電子部件,在對比技術2中,溫度感測器直接接觸於接觸帽,因此兩者均存在溫度感測器發生破損的危險,這可能導致由於溫度調節失敗造成測試的可靠性及設備的可靠性下降。In addition, when performing a pressurization operation, in Comparative Technology 1, the temperature sensor is directly in contact with the electronic component, and in Comparative Technology 2, the temperature sensor is directly in contact with the contact cap, so there is a temperature sensor in both There is a risk of damage, which may lead to a decrease in the reliability of the test and the reliability of the equipment due to the failure of temperature regulation.
[發明所欲解決的問題] 本發明的目的如下:[Problems to be Solved by the Invention] The objectives of the present invention are as follows:
第一,提供一種能夠確保測量電子部件的溫度的溫度測量器的穩定性並且實現相對更精確的溫度測量的技術。First, to provide a technology capable of ensuring the stability of a temperature measuring device that measures the temperature of an electronic component and realizing relatively more accurate temperature measurement.
第二,提供一種能夠掌握推動件與接觸帽之間的不良接觸等的技術。Second, to provide a technology capable of grasping the bad contact between the pusher and the contact cap.
第三,提供一種在前一個電子部件的測試與下一個電子部件的測試之間保持合適的推動件溫度而能夠縮短測試時間的技術。Third, to provide a technology that can shorten the test time by maintaining a proper temperature of the pusher between the test of the previous electronic component and the test of the next electronic component.
[用以解決問題的技術手段] 同上所述的根據本發明的電子部件測試用分選機包括:供應部,供應電子部件;加壓部,為了使由所述供應部供應的電子部件電連接於測試機的測試插槽而對電子部件進行加壓;溫度調節部,用於調節通過所述加壓部電連接於所述測試插槽的電子部件的溫度;回收部,回收通過測試機完成測試的電子部件;及控制部,控制所述供應部、加壓部、溫度調節部和回收部,其中所述加壓部包括:加壓器,用於對電子部件朝向所述測試插槽側加壓;及接觸板,夾設於所述加壓器與電子部件之間,並且具有與電子部件直接接觸而對電子部件加壓的多個接觸帽,所述加壓器包括:多個推動件,與所述接觸帽一一對應,當進行加壓操作時推動所述接觸帽,從而能夠使所述接觸帽接觸於電子部件並對電子部件進行加壓;設置板,設置有所述多個推動件;及移動器,使所述設置板向所述測試插槽側前進或後退,從而使得推動件對所述接觸帽加壓或者解除加壓,所述接觸板還包括配備於每個所述接觸帽以測量電子部件的溫度的多個溫度測量器,所述控制部根據由所述溫度測量器測量的電子部件的溫度資訊控制所述溫度調節部調節進行測試的電子部件的溫度。[Technical Means to Solve the Problem] The sorting machine for testing electronic components according to the present invention as described above includes: a supplying section for supplying electronic components; and a pressing section for electrically connecting the electronic components supplied by the supplying section The electronic component is pressurized in the test slot of the testing machine; the temperature adjusting part is used to adjust the temperature of the electronic component electrically connected to the test slot through the pressurizing part; the recycling part is completed by the testing machine The electronic component to be tested; and a control unit that controls the supply unit, the pressurizing unit, the temperature adjustment unit, and the recovery unit, wherein the pressurizing unit includes: a pressurizer for directing the electronic component toward the test slot side Pressurizing; and a contact plate, which is sandwiched between the pressurizer and the electronic component, and has a plurality of contact caps that directly contact the electronic component to pressurize the electronic component, the pressurizer includes: a plurality of pushers One-to-one correspondence with the contact caps. When the pressure operation is performed, the contact caps are pushed, so that the contact caps can contact the electronic components and press the electronic components; the setting board is provided with the multiple A pusher; and a mover for advancing or retreating the setting plate to the test slot side, so that the pushing element pressurizes or releases the pressure on the contact cap, the contact plate also includes a The contact cap is a plurality of temperature measuring devices that measure the temperature of the electronic component, and the control unit controls the temperature adjustment unit to adjust the temperature of the electronic component to be tested based on the temperature information of the electronic component measured by the temperature measuring device.
當通過所述加壓器對電子部件進行加壓時,所述溫度測量器能夠與所述推動件及電子部件隔開。When the electronic component is pressurized by the pressurizer, the temperature measuring device can be separated from the pushing member and the electronic component.
所述溫度測量器配備為嵌入所述接觸帽。The temperature measuring device is equipped to be embedded in the contact cap.
所述加壓器還包括用於感測所述推動件的溫度的溫度感測器,所述控制部將由所述溫度測量器感測的溫度資訊與所述溫度感測器感測的溫度資訊進行比較,從而在兩溫度之差超過預設的基準值的情況下警報發生不良。The pressurizer further includes a temperature sensor for sensing the temperature of the pushing member, and the control unit compares the temperature information sensed by the temperature measuring device with the temperature information sensed by the temperature sensor The comparison is performed so that when the difference between the two temperatures exceeds the preset reference value, the alarm occurs.
所述溫度調節部包括:冷卻流體供應器,向所述加壓器供應冷卻流體;及加熱器,設置於所述推動件而對所述推動件進行加熱。The temperature adjusting part includes: a cooling fluid supplier, which supplies the cooling fluid to the pressurizer; and a heater, which is disposed on the pushing member to heat the pushing member.
所述加壓器還包括用於感測所述推動件的溫度的溫度感測器,所述控制部當對前一個電子部件進行測試時儲存所述推動件的溫度,當前一個電子部件的測試結束後為了針對下一個電子部件進行測試而解除加壓操作時,控制所述溫度調節部,使所述推動件的溫度保持在針對前一個電子部件進行測試時的溫度。The pressurizer further includes a temperature sensor for sensing the temperature of the pushing member, and the control part stores the temperature of the pushing member when the previous electronic component is tested. The current test of the electronic component When the pressurization operation is released in order to test the next electronic component after the end, the temperature adjustment unit is controlled to maintain the temperature of the pusher at the temperature when the test was performed for the previous electronic component.
[發明的功效] 根據本發明,具有如下效果:[Effects of the invention] According to the present invention, there are the following effects:
第一,溫度測量器設置於接觸帽,且溫度感測元件與推動件及電子部件隔開,因此接觸衝擊造成損傷的危險性降低,並且能夠實現相對更精準的電子部件的溫度測量,從而提高了測試的可靠性。First, the temperature measuring device is arranged on the contact cap, and the temperature sensing element is separated from the pusher and the electronic components. Therefore, the risk of damage caused by contact impact is reduced, and relatively more accurate temperature measurement of electronic components can be achieved, thereby improving The reliability of the test is improved.
第二,通過由溫度測量器感測的溫度與由溫度感測器測量的溫度之間的偏差能夠掌握推動件與接觸帽之間的不良接觸或者溫度測量器或溫度感測器是否故障,因此能夠防止不良測試,從而提高了設備的可靠性。Second, the difference between the temperature sensed by the temperature measurer and the temperature measured by the temperature sensor can grasp the bad contact between the pusher and the contact cap or whether the temperature measurer or the temperature sensor is malfunctioning, so Can prevent bad tests, thereby improving the reliability of the equipment.
第三,在解除加壓操作而溫度測量器與電子部件隔開的情況下,靈活應用測試前一個電子部件的溫度資訊來保持合適的推動件溫度,因此縮短了測試時間,從而提高了處理容量。Third, when the pressure is released and the temperature measuring device is separated from the electronic component, the temperature information of the electronic component before the test is used flexibly to maintain the proper temperature of the pusher, thus shortening the test time and increasing the processing capacity. .
以下,參照附圖,對如前述的根據本發明的優選實施例進行說明,為了說明的簡潔性,盡可能地省略或壓縮重複的說明。Hereinafter, with reference to the accompanying drawings, the above-mentioned preferred embodiments according to the present invention will be described. For the sake of brevity of the description, repeated descriptions are omitted or compressed as much as possible.
如圖4所示,根據本發明的電子部件測試用分選機TH(以下簡稱為「分選機」)包括一對裝載盤111、112、第一移動器120、一對移動梭MS1、MS2、加壓部200、溫度調節部300、第二移動器420及控制部500。As shown in FIG. 4, the sorting machine TH for testing electronic components according to the present invention (hereinafter referred to as "sorting machine") includes a pair of
在裝載盤111、112可以裝載電子部件。這種裝載盤111、112可以具有加熱器以將裝載的電子部件加熱至測試所需的溫度。當然,當常溫測試時停止加熱器的操作。Electronic components can be loaded on the
第一移動器120將客戶托盤CT1
的電子部件移動至裝載盤111、112,或者將裝載盤111、112的電子部件移動至位於當前左側方向的移動梭MS1/MS2。為此,第一移動器120配備為能夠沿左右方向及前後方向移動(參照箭頭a、b)。The
在移動梭MS1、MS2可以裝置電子部件,並且配備為能夠經過測試位置TP沿左右方向移動(參照箭頭a、b)。Electronic components can be installed in the moving shuttles MS1 and MS2, and they can be moved in the left-right direction through the test position TP (see arrows a, b).
加壓部200使裝載於位於測試位置TP的移動梭MS1/MS2的電子部件電連接於位於其下方的插座板SB的測試插槽TS。為此,參照在圖5的示意圖中實線部分所示,加壓部200包括加壓器210、豎直移動器220及水平移動器230。The
加壓器210對電子部件加壓而使電子部件能夠直接連接於測試機。針對這種加壓器210的一示例,後文將分別進行說明。The
豎直移動器220使加壓器210升降(參照箭頭d)。因此,加壓器210可以向測試插槽TS側前進或後退,並且可以向移動梭MS1、MS2側前進或後退。The
水平移動器230使加壓器210沿前後方向移動(參照箭頭e)。因此,加壓器210能夠交替地在附圖符號MS1的移動梭和與附圖符號MS2的移動梭之間抓持電子部件之後使其電連接於測試插槽TS。The
作為參考,在定義為測試位置TP的區域可以配備有測試腔室。並且,在配備有測試腔室的情況下,加壓部200或者至少加壓器210位於測試腔室內部。當然,測試腔室的內部調節為測試電子部件所需要的溫度。For reference, the area defined as the test position TP may be equipped with a test chamber. Also, in the case of being equipped with a test chamber, the pressurizing
參照圖5的虛線部分所示,溫度調節部300包括冷卻流體供應器310、流量控制閥門320以及設置於上述的加壓器210的推動件212(參照圖6)的加熱器330(參照圖6)。5, the
冷卻流體供應器310將用於調節電子部件溫度的冷卻流體供應至加壓器210。這種冷卻流體供應器310可以包括:泵311,用於泵送預定量的冷卻流體;冷卻模組312,用於將冷卻流體冷卻至預定溫度。The cooling
流量控制閥門320控制通過冷卻流體供應器310供應的冷卻流體的供應量。The
加熱器330(參照圖6)在每個推動件212上分別設置有兩個而對推動件212加熱。當然,加熱器330為了最終通過推動件212對電子部件進行加熱而配備。Two heaters 330 (refer to FIG. 6) are respectively provided on each pushing
所述的溫度調節部300的泵311、冷卻模組312、流量控制閥門320及加熱器330被控制部500所控制。因此,可以根據電子部件的測試溫度條件調節供應的冷卻流體的溫度、供應流速及供應流量。因此,若根據測試溫度條件決定了冷卻流體的溫度、供應流速及供應流量,則冷卻流體供應器310持續供應調節為決定的溫度、供應流速及供應流量的冷卻流體。The
第二移動器420根據測試結果對位於當前右側的移動梭MS1、MS2的完成測試的電子部件進行分類,並將其移動至客戶托盤CT2
。為此,第二移動器420可以沿左右方向移動(參照圖4的箭頭f)或者沿前後方向移動(參照圖4的箭頭g)。The
控制部500控制如前述的各個構成,後文將對根據如前述的控制部500的特定控制進行說明。The
作為參考,將上述的構成中的用於將客戶托盤CT1
的電子部件供應至加壓部200的裝載盤111、112及第一移動器120側可以定義為供應電子部件的供應部SP,將通過測試機完成測試的電子部件移動至客戶托盤CT2
的第二移動器420側可以定義為回收部WP。在此,一對移動梭MS1、MS2根據其位置可以作為供應部SP,也可以作為回收部WP。For reference, the
<關於加壓機的一例><An example of press machine>
加壓部200具有用於對電子部件加壓的多個推動件212。The
首先,參照圖6,對推動件212部位進行說明。First, referring to FIG. 6, the position of the
圖6的推動件212包括推動部件212a、第一溫度感測器212c及第二溫度感測器212d。The pushing
推動部件212a的剖面為「T」字形狀,分為上側的結合部分212a-1及下側的接觸部分212a-2。The pushing
結合部分212a-1結合設置於後述的設置板。The
接觸部分212a-2是寬度小於結合部分212a-1的部分,作為其下端面的接觸端CE插入並接觸於後述的接觸帽。在這種接觸部分212a-2形成有用於設置加熱器330的設置槽。The
並且,在推動部件212a形成有使由冷卻流體供應器310供應並回收的冷卻流體通過的流體通路FT。In addition, the pushing
第一溫度感測器212c及第二溫度感測器212d為了分別測量推動部件212a的上側及下側的溫度而佈置。在此,第二溫度感測器212d優選地配備於接觸部分212a-2的接觸端CE側,以靠近電子部件。The
圖7是關於實際應用上述的推動件212的加壓器210的一例,圖8是關於加壓器210的主要部分的分解圖。FIG. 7 is an example of the
如圖7及圖8所示,加壓器210包括設置板211、推動件212、設置結構體213、支撐彈簧214、流體分配器215及接觸板216。As shown in FIGS. 7 and 8, the
參照圖9所示,在設置板211以設置結構體213為媒介設置有推動件212。在這種設置板211形成有設置孔10,在所述設置孔10能夠使推動件212的接觸部分212a-2通過而向前方凸出地設置。Referring to FIG. 9, a pushing
在上文已經對推動件212進行了說明,因此省略其說明。The pushing
設置結構體213為了將推動件212設置於設置板211而配備。這種設置結構體213包括結合板213a及支撐台213b。The
結合板213a結合於設置板211,並且形成有能夠使推動件212的接觸部分212a-2通過的通過孔TH。並且,在這種結合板213a形成有整列孔AH,所述整列孔AH使配備於如圖6所示的推動件212的引導部件212f的引導銷212f-1插入。因此,圖中推動件212的上端可以通過整列孔AH而整齊排列。The
支撐台213b隔開預定間隔地設置於結合板213a,支撐支撐彈簧214的上端,以使支撐彈簧214能夠彈性支撐推動件212。The
支撐彈簧214彈性支撐推動件212的上端,從而推動件212可以實現為能夠進退預定距離。The
流體分配器215為了將冷卻流體供應至通過設置結構體213設置的推動件212的流體通路FT而佈置。The
接觸板216夾設於推動件212與電子部件D之間,並且具有多個接觸帽216a及溫度測量器216b。The
接觸帽216a向上方開口,並且利用導熱性優異的銅等金屬材料構成,以能夠將推動部件212a的冷氣或熱量迅速地傳遞至電子部件。The
溫度測量器216b為了感測電子部件的溫度而配備。即,在本實施例中,為了感測電子部件的溫度而配備有第二溫度感測器212d及溫度測量器216b。在本實施例中,將與第二溫度感測器212d獨立地用於感測電子部件的溫度的溫度測量器216b設置於接觸帽216a,這是為了需要感測更精確的電子部件的溫度以及判斷是否發生不良操作。The
上述的接觸板216的應用是為了部件交換的便利性及資源的有效使用而配備。通常,若要測試的電子部件的尺寸不同,則只能替換全部推動件212。此時,由於推動件212與冷卻流體的連接關係,替換推動件212的作業非常繁瑣且消耗大量時間,若考慮到冷媒或其他替換的部件的規模,還會造成資源浪費。然而,若同本實施例一樣應用接觸板216,則在僅拆卸接觸板216之後替換接觸帽216a,或者安裝預先準備的接觸板216即可,因此其替換作業非常容易,並且還能夠防止資源浪費。The above-mentioned application of the
當然,設置於接觸板216的接觸帽216a的數量與推動件212的數量相同。即,若是用於一次對八個電子部件進行測試的分選機,則需要配備八個推動件212及接觸帽216a,並且推動件212與接觸帽216a一一對應。Of course, the number of
另外,若如前述的對比技術2一樣,僅利用第二溫度感測器212d感測電子部件的溫度,則即使接觸帽216a的導熱性良好,也可能發生由於感測溫度所需時間而造成的延遲(delay),根據推動件212與接觸帽216a之間的接觸程度而造成導熱不均勻性等,最終發生溫度控制不良。然而,若如本實施例一樣,通過設置於接觸帽216a的溫度測量器216b測量電子部件的溫度,則最小化關於測量電子部件溫度的時間延遲,並且無需考慮推動件212與接觸帽216a之間的接觸程度。In addition, if only the
利用第一溫度感測器212c或第二溫度感測器212d與溫度測量器216b之間的溫度差判斷是否發生不良操作,對此將在後文的相關部分進行說明。The temperature difference between the
圖10圖示了在處於通過加壓器210將電子部件電連接於測試機的狀態的狀況下推動件212與接觸帽216a之間的關係。FIG. 10 illustrates the relationship between the
如圖10所示,推動件212以接觸部分212a-2的下端部位被接觸帽216a罩住的狀態推動接觸帽216a,從而接觸帽216a能夠對電子部件D加壓。此時,接觸部分212a-2的接觸端CE面接觸於接觸帽216a的接觸端216a-1,從而實現熱氣或冷氣的快速傳導以及壓力的合適傳遞。在此,接觸帽216a的接觸端216a-1是與電子部件面接觸的接觸帽216a的下端。另外,如圖所示,溫度測量器216b配備為嵌入到接觸帽216a的接觸端216a-1。從而,溫度測量器216b與推動件212隔開,與電子部件D也隔開。但是,溫度測量器216b相比於第二溫度感測器212d更靠近電子部件而佈置,因此能夠相應地更快速且精確地感測電子部件的溫度,並且由於當對電子部件進行加壓操作時溫度測量器216b不受到直接衝擊,因此降低了破損的危險性。優選地,為了精確且快速地感測溫度,可以考慮實現為當推動件212對電子部件D進行加壓時溫度測量器216b與電子部件D之間的間隔為2mm以內。As shown in FIG. 10, the pushing
並且,接觸帽216a或者至少接觸端216a-1利用導熱率高的銅等金屬材料構成,從而能夠確保幾乎直接感測電子部件溫度的精確性。In addition, the
作為參考,圖11圖示當要測試的電子部件的尺寸變小時替換為與其相應的接觸帽216a的狀態。這樣,在如本實施例一樣應用接觸板216的情況下,提高了用於測試多種規格的電子部件的分選機TH的相容性。For reference, FIG. 11 illustrates a state where the electronic component to be tested is replaced with the
對於根據本發明的分選機TH而言,溫度測量器216b、第一溫度感測器212c及第二溫度感測器212d能夠被控制部500多樣地控制並進行靈活應用,因此繼續對其進行說明。For the sorting machine TH according to the present invention, the
1.不良報警1. Bad alarm
當對電子部件進行測試時,控制部500通過從溫度測量器216b感測的溫度資訊適當地控制溫度調節部300,從而可以在所要求的測試溫度條件下對電子部件進行測試。When testing an electronic component, the
另外,控制部500將從溫度測量器216b感測的溫度資訊與通過第一溫度感測器212c或第二溫度感測器212d感測的溫度資訊進行比較。並且,在根據其比較的溫度差超過預設的基準值(例如30度)的情況下,控制部500能夠得知推動件212與接觸帽216a未正常接觸,或者第一溫度感測器212c、第二溫度感測器212d或溫度測量器216b故障,在這種情況下,向管理者警報發生不良。即,根據本發明,通過溫度測量器216b感測電子部件D的溫度,因此第一溫度感測器212c或第二溫度感測器212d不是必要構成,可以全部省略。然而,如前述,通過將從溫度測量器216b感測的溫度資訊與通過第一溫度感測器212c或第二溫度感測器212d感測的溫度資訊進行比較,能夠掌握各種不良狀況,因此非常優選地應該考慮配備第一溫度感測器212c或第二溫度感測器212d。相同地,也可以選擇性地只配備第一溫度感測器212c和第二溫度感測器212d中的一個。並且,對於第二溫度感測器212d而言,設置於推動部件212a的側面側,從而可以配備為防止與接觸帽216a進行直接接觸。In addition, the
2.選擇性地開啟(ON)與關閉(OFF)2. Selectively turn on (ON) and turn off (OFF)
當對電子部件D進行測試時,需要對電子部件D進行精確的溫度測量,因此溫度測量器216b應該處於開啟(ON)狀態。此時,根據實施情況也可能不需要來自第一溫度感測器212c或第二溫度感測器212d的關於推動件212的溫度資訊,因此第一溫度感測器212c及第二溫度感測器212d處於關閉(OFF)狀態。When testing the electronic component D, accurate temperature measurement of the electronic component D is required, so the
另外,在之前測試完成的電子部件D與接下來要測試的電子部件D的測試之間的空白時間內不需要由溫度測量器216b測量的溫度資訊,因此溫度測量器216b需要處於關閉狀態。但是,為了接下來的測試,推動件212不能過冷或過熱,因此應該使第一溫度感測器212c及第二溫度感測器212d處於開啟(ON)狀態之後,基於由第一溫度感測器212c或第二溫度感測器212d測量的溫度資訊調節推動件212的溫度。In addition, the temperature information measured by the
3.保持推動件的適當的溫度3. Maintain the proper temperature of the pusher
如前述,在之前測試後的電子部件D與接下來要測試的電子部件D的測試之間的空白時間內不需要由溫度測量器216b測量的溫度資訊。然而,為了保持電子部件D的適當的溫度,需要保持推動件212的適當的溫度。因此,當前一個電子部件D進行測試時,通過第一溫度感測器212c及第二溫度感測器212d感測推動件212的測試溫度並進行儲存,且當前一個電子部件D的測試結束後為了針對下一個電子部件D進行測試而解除加壓器210的加壓操作時,需要使推動件212的溫度保持在針對前一個電子部件D進行測試時的溫度。在這種情況下,控制部500需要使第一溫度感測器212c及第二溫度感測器212d在針對前一個電子部件D進行測試時也處於開啟(ON)狀態而感測推動件212的溫度並進行儲存,基於該儲存的溫度資訊以及來自第一溫度感測器212c及第二溫度感測器212d的溫度資訊控制溫度調節部300,以保持推動件212的適當的溫度。As mentioned above, the temperature information measured by the
以上,參照圖7等說明的加壓器210的設置板211與推動件212的組合體例如是適合應用於為處理諸如記憶體半導體等少品種大量生產的電子部件而製造的分選機的形態。但是,本發明也可以實現為適合應用於為處理諸如記憶體半導體等少品種大量生產的電子部件而製造的分選機的如圖12所示的形態的組合體。The combination of the
作為參考,圖12中的組合體也具有與上述的實施例幾乎類似的設置板1211與推動件1212。在應用這樣的組合體的情況下,也配備有具有接觸帽的接觸板,當然,在接觸帽也設置有溫度測量器。如前述,本發明可以優選地應用於用於利用推動件調節電子部件的溫度的所有種類的分選機。For reference, the assembly in FIG. 12 also has a
因此,對於本發明的具體說明通過參照附圖的實施例而進行,但是上述的實施例僅僅為本發明的優選實施例,因此不應理解為本發明局限於上述實施例,並且本發明的權利範圍應理解為申請專利範圍及其等同範圍。Therefore, the specific description of the present invention is carried out by referring to the embodiments of the accompanying drawings, but the above-mentioned embodiments are only preferred embodiments of the present invention, so it should not be understood that the present invention is limited to the above-mentioned embodiments, and the rights of the present invention The scope should be understood as the scope of the patent application and its equivalent scope.
TH‧‧‧電子部件測試用分選機SP‧‧‧供應部200‧‧‧加壓部210‧‧‧加壓器212‧‧‧推動件212a‧‧‧推動部件212c‧‧‧第一溫度感測器212d‧‧‧第二溫度感測器FT‧‧‧流體通路216‧‧‧接觸板216a‧‧‧接觸帽216b‧‧‧溫度測量器220‧‧‧豎直移動器300‧‧‧溫度調節部WP‧‧‧回收部500‧‧‧控制部TH‧‧‧Electronic component testing sorting machine SP‧‧‧
圖1至圖3是用於說明現有的電子部件測試用分選機的參照圖。 圖4是關於根據本發明的實施例的電子部件測試用分選機的平面圖。 圖5是關於應用於圖4的分選機的加壓部的示意性立體圖。 圖6是關於能夠應用於圖5的加壓部的推動件的示意性簡要剖面圖。 圖7是關於根據應用圖6的推動件的一例的加壓器的側視圖。 圖8是關於圖7的加壓器的主要部分的分解圖。 圖9及圖10是用於說明圖8的加壓器的主要特徵的參照圖。 圖11是用於與圖10進行比較來說明根據要測試的電子元件的尺寸變化而替換接觸帽的狀態的參考圖。 圖12是關於本發明能夠應用的其他形態的加壓器的示意圖。1 to 3 are reference diagrams for explaining a conventional sorting machine for testing electronic components. Fig. 4 is a plan view of a sorting machine for testing electronic components according to an embodiment of the present invention. Fig. 5 is a schematic perspective view of a pressing part applied to the sorting machine of Fig. 4. Fig. 6 is a schematic cross-sectional view of a pusher that can be applied to the pressing part of Fig. 5. Fig. 7 is a side view of a presser according to an example of applying the pusher of Fig. 6. Fig. 8 is an exploded view of the main part of the pressurizer of Fig. 7. 9 and 10 are reference diagrams for explaining the main features of the pressurizer of FIG. 8. FIG. 11 is a reference diagram for comparing with FIG. 10 to explain a state in which the contact cap is replaced according to the dimensional change of the electronic component to be tested. Fig. 12 is a schematic diagram of another form of pressurizer to which the present invention can be applied.
國內寄存資訊 (請依寄存機構、日期、號碼順序註記) 無Domestic hosting information (please note in the order of hosting organization, date, and number) None
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212‧‧‧推動件 212‧‧‧Pushing piece
212a-2‧‧‧接觸部分 212a-2‧‧‧Contact part
212d‧‧‧第二溫度感測器 212d‧‧‧Second temperature sensor
216a‧‧‧接觸帽 216a‧‧‧Contact cap
216a-1‧‧‧接觸端 216a-1‧‧‧Contact terminal
216b‧‧‧溫度測量器 216b‧‧‧Temperature Measuring Device
CE‧‧‧接觸端 CE‧‧‧Contact
D‧‧‧電子部件 D‧‧‧Electronic parts
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KR1020180058269A KR102514009B1 (en) | 2018-03-09 | 2018-05-23 | Handler for electronic component test |
KR10-2018-0058269 | 2018-05-23 |
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KR102329619B1 (en) * | 2020-01-20 | 2021-11-22 | 주식회사 제너릭스 | Pusher device for semiconductor test equipment |
CN111921911B (en) * | 2020-08-06 | 2022-04-12 | 帕恩检测技术(中山)有限公司 | Fluorescent lamp production detection equipment and detection method |
US11899042B2 (en) | 2020-10-22 | 2024-02-13 | Teradyne, Inc. | Automated test system |
US11754596B2 (en) | 2020-10-22 | 2023-09-12 | Teradyne, Inc. | Test site configuration in an automated test system |
US11754622B2 (en) | 2020-10-22 | 2023-09-12 | Teradyne, Inc. | Thermal control system for an automated test system |
US11953519B2 (en) | 2020-10-22 | 2024-04-09 | Teradyne, Inc. | Modular automated test system |
US11867749B2 (en) | 2020-10-22 | 2024-01-09 | Teradyne, Inc. | Vision system for an automated test system |
KR102475532B1 (en) * | 2021-02-01 | 2022-12-08 | 아신유니텍 (주) | An apparatus for Investigating a Supporter of a Vehicle Automatically |
US12007411B2 (en) | 2021-06-22 | 2024-06-11 | Teradyne, Inc. | Test socket having an automated lid |
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KR20170095655A (en) * | 2016-02-15 | 2017-08-23 | (주)제이티 | Semiconductor device inspection apparatus, and device pressing tool |
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CN106249446A (en) * | 2016-07-20 | 2016-12-21 | 武汉华星光电技术有限公司 | Test platform and there is the gauging machine of described test platform |
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