TWI776343B - Ceramic composition, ceramic sintered body, capacitor and capacitor manufacturing method - Google Patents

Abstract

The present invention provides a ceramic composition comprising a main mixture and a sub-mix, wherein the main mixture includes a first main component powder, a second main component powder and a third main component powder, and the first main component powder includes BaTiO ₃ , the The second main component powder includes any one or a combination of SrTiO ₃ , Ba _0.95 Ca _0.05 TiO ₃ , BaZr _0.1 Ti _0.9 O ₃ , the third main component powder is CaZrO ₃ , and the auxiliary mixture includes rare earth oxide, silicon oxide and alkaline earth metal oxides. The present invention further provides a ceramic sintered body obtained by sintering the above-mentioned ceramic composition, and a capacitor including the ceramic sintered body and a capacitor manufacturing method; wherein, the capacitor conforms to the EIA-X8R standard and has a high dielectric constant.

Description

Ceramic composition, ceramic sintered body, capacitor and capacitor manufacturing method

The present invention relates to ceramic compositions, especially ceramic compositions for capacitors. The present invention further relates to a capacitor comprising a ceramic sintered body and a method for producing the capacitor, especially a multilayer ceramic capacitor and a method for producing the same.

There are many types of capacitors, among which Multi-layer Ceramic Capacitor (MLCC) uses barium titanate (BaTiO ₃ ) as the dielectric material; MLCC is widely used in consumer electronic products due to its small size and easy chip formation. For example: mobile phone. In addition, MLCC also has the advantage of a wide operating temperature range, so vehicles that need to withstand severe temperature changes also rely heavily on MLCC. At present, the specification of MLCC widely used in the market is EIA-X7R; among them, EIA refers to Electronic Industries Alliance (EIA), X indicates that the lower limit of MLCC operating temperature is -55℃, and 7 indicates the upper limit of MLCC operating temperature The value is +125℃, and R indicates that the capacitance value change rate within the operating temperature range of MLCC should fall within the range of ±15%.

However, with the advancement of technology, the market requirements for MLCC specifications will also increase, and there is a need to upgrade the MLCC specifications to X8R, that is, the MLCC operating temperature range is -55°C to +150°C, and the capacitance value change rate needs to be lower than within ±15%. At present, although some literatures propose to use bismuth (Pb) and lead (Pb) to replace barium titanate to move the Curie temperature to a high temperature to increase the upper limit of the operating temperature of MLCC, but it is necessary to combine gold (Au) and silver (Ag) and other noble metals are used as internal electrodes to prevent bismuth and lead from being reduced to conductors after being sintered together with base metal electrodes in a reducing atmosphere, which in turn leads to a decrease in the insulation resistance of MLCCs. Because multilayer ceramic capacitors need to be equipped with multi-layer internal electrodes, if using precious metals such as gold and silver, the production cost will be greatly increased, so the MLCC manufacturing technology that reduces the production cost and meets the EIA-X8R specification still needs to be developed.

In order to solve the above problems, the present invention provides a ceramic composition comprising a main mixture and a sub-mix, wherein the main mixture includes a first main component powder, a second main component powder and a third main component powder, and the first main component powder comprising BaTiO ₃ , the second main component powder comprising any one or a combination of SrTiO ₃ , Ba _x Ca _(1-x) TiO ₃ and BaZry Ti _{( 1-y) O 3} , wherein x is 0.91 to 0.99, and y is 0.05 to 0.2, the third main component powder is CaZrO ₃ ; and the sub-mixture contains rare earth oxides, silicon oxides, and alkaline earth metal oxides.

Preferably, x is 0.92, 0.93, 0.94, 0.95, 0.96, 0.97, 0.98 or 0.99.

Preferably, y is 0.05, 0.07, 0.09, 0.1, 0.11, 0.13, 0.15, 0.17 or 0.2.

More preferably, the second main component powder comprises any one of SrTiO ₃ , Ba _0.95 Ca _0.05 TiO ₃ , _{BaZr 0.1} Ti _0.9 O ₃ or a combination thereof.

The above-mentioned ceramic composition is used as the material of Multi-layer Ceramic Capacitor (MLCC), even with base metal electrodes, MLCCs that meet the EIA-X8R standard can still be produced; among them, the ceramic composition does not contain bismuth and lead. As a necessary material, the ceramic composition will not reduce the dielectric layer to a conductor during the sintering process, so there is no need to use gold, silver, palladium and other precious metals as internal electrodes to prevent the insulation resistance of MLCC from decreasing, so it can reduce production. cost.

In one embodiment, the rare earth oxides comprise europium (Eu) oxide, gadolinium (Gd) oxide, yttrium (Y) oxide, abium (Tb) oxide, dysprosium (Dy) oxide, γ (Ho) ) oxide, erbium (Er) oxide, tin (Tm) oxide, and ytterbium (Tb) oxide, or any combination thereof, but not limited thereto. Preferably, the rare earth oxide comprises any one or a combination of Y ₂ O ₃ , Yb ₂ O ₃ and Dy ₂ O ₃ .

According to the present invention, adding rare earth oxide helps to increase the dielectric constant of the capacitor and improve the dissipation factor of the capacitor.

In one embodiment, the silicon oxide comprises silicon oxide, silicate glass or silicon gel, but not limited thereto: preferably, the silicon oxide comprises SiO ₂ .

In one embodiment, the alkaline earth metal oxide includes any one or a combination of MgO, CaO, SrO, and BaO, but is not limited thereto.

The present invention adjusts the sintering characteristics of the ceramic sintered body by adding silicon oxide and alkaline earth metal oxide.

In one embodiment, the content of the auxiliary mixture is 1.1 mol% to 13.5 mol% based on 100 mol% of the main mixture.

In one embodiment, the rare earth oxide, the silicon oxide and the alkaline earth metal oxide are contained in a range of 0.3 mol% to 8 mol% based on 100 mol% of the main mixture: 0.01 mol% Percent to 1.5 mole percent: 0.1 mole percent to 5.5 mole percent.

Preferably, the content of the rare earth oxide, the silicon oxide and the alkaline earth metal oxide is 0.3 mol% to 6.5 mol% based on 100 mol% of the main mixture: 0.3 mol% to 1.5 Molar percent: 0.5 molar percent to 5.5 molar percent.

According to the present invention, adding CaZrO ₃ helps to improve the dissipation factor of the capacitor and reduce the change rate of the capacitance value.

In one embodiment, based on the total weight of the main mixture, the content of the first main component powder is 45 to 75 percent by weight, and the content of the second main component powder is 15 to 25 percent by weight , and the content of the third main component powder is 5 to 35 weight percent.

Preferably, the second main component powder is SrTiO ₃ , and based on the total weight of the main mixture, the content of the first main component powder is 45 to 75 weight percent, and the content of the second main component powder is It is 15 to 25 weight percent, and the content of the third main component powder is 5 to 35 weight percent.

Preferably, the second main component powder is Ba _0.95 Ca _0.05 TiO ₃ , and based on the total weight of the main mixture, the content of the first main component powder is 45 to 75 percent by weight, and the second main component powder is 45 to 75 percent by weight. The content of the component powder is 15 to 25 percent by weight, and the content of the third main component powder is 5 to 35 percent by weight.

Preferably, the second main component powder is BaZr _0.1 Ti _0.9 O ₃ , and based on the total weight of the main mixture, the content of the first main component powder is 45 to 75 percent by weight, and the second main component powder is 45 to 75 percent by weight. The content of the component powder is 15 to 25 percent by weight, and the content of the third main component powder is 5 to 35 percent by weight.

Preferably, the second main component powder is SrTiO ₃ , and the content of the auxiliary mixture is 1.6 mol% to 8.3 mol% based on 100 mol% of the main mixture.

Preferably, the second main component powder is Ba _0.95 Ca _0.05 TiO ₃ , and the content of the auxiliary mixture is 3 to 4 mol % based on 100 mol % of the main mixture.

Preferably, the second main component powder is BaZr _0.1 Ti _0.9 O ₃ , and the content of the auxiliary mixture is 3.9 mol% to 5.1 mol% based on 100 mol% of the main mixture.

Preferably, the second main component powder is SrTiO ₃ , and the content of the rare earth oxide, the silicon oxide and the alkaline earth metal oxide is 0.4 to 6.5 mole percent based on 100 mole percent of the main mixture. Molar percent: 0.4 molar percent to 0.6 molar percent: 0.8 molar percent to 1.2 molar percent.

Preferably, the second main component powder is Ba _0.95 Ca _0.05 TiO ₃ , and the content of the rare earth oxide, the silicon oxide and the alkaline earth metal oxide is 1.8 mol based on 100 mole percent of the main mixture. Ear % to 2.2 mol %: 0.4 mol % to 0.6 mol %: 0.8 mol % to 1.2 mol %.

Preferably, the second main component powder is BaZr _0.1 Ti _0.9 O ₃ , and the content of the rare earth oxide, the silicon oxide and the alkaline earth metal oxide is 2.7 moles based on 100 mole percent of the main mixture. Ear % to 3.3 mol %: 0.4 mol % to 0.6 mol %: 0.8 mol % to 1.2 mol %.

Preferably, the average particle size of the main mixture is 150 nm to 600 nm, for example: 150 nm, 200 nm, 250 nm, 300 nm, 350 nm, 400 nm, 450 nm, 500nm, 550nm or 600nm. More preferably, the average particle size of the main mixture is 250 nm to 400 nm. In a specific embodiment of the present invention, the average particle size of the main mixture refers to the average particle size of the first main component powder and the second main component powder. In a specific embodiment of the present invention, the average particle size of the main mixture refers to the average particle size of the first main component powder, the second main component powder and the third main component powder.

Preferably, the average particle size of the first main component powder is 150 nm to 600 nm, for example: 150 nm, 200 nm, 250 nm, 300 nm, 350 nm, 400 nm, 450 nm nanometer, 500 nanometer, 550 nanometer or 600 nanometer. More preferably, the average particle size of the first main component powder is 250 nm to 400 nm.

The above-mentioned first main component powder can be prepared by solid state method, oxalic acid method or hydrothermal method. The present invention can adopt a variety of different preparation methods for the first main component powder to obtain the first main component powder with different average particle size.

The present invention further provides a ceramic sintered body, which is obtained by sintering the above-mentioned ceramic composition, and has a plurality of particles connected to each other; wherein, the particles have a core and a shell respectively, and the shell is located on the outer surface of the core ; wherein, the core comprises the powder of the first main component powder, the powder of the second main component powder or the powder of the third main component powder, and the shell comprises the rare earth oxide, the silicon oxide and the the alkaline earth metal oxide.

In one embodiment, the cores of the particles each independently comprise any one of the particles of the first main ingredient powder, the particles of the second main ingredient powder, or the particles of the third main ingredient powder.

In one embodiment, the shell includes part of the outer surface of the core, so the core is the powder of the first main component powder, the powder of the second main component powder, or the powder of the third main component powder. may have part The surfaces are in direct contact with each other; in another embodiment, the shell completely covers the outer surface of the core, so the core is the powder of the first main component powder, the powder of the second main component powder or the first main component powder. The powder particles of the three main component powders are separated by the shell respectively, so they are not in direct contact with each other.

The above-mentioned shell is that during the sintering process of the ceramic sintered body, after the auxiliary mixture powder is at least partially melted to form a liquid phase, since the liquid phase migration rate is higher than the diffusion of the solid phase, it can fill the particles of the first main component powder, The pores between the particles of the second main ingredient powder or the particles of the third main ingredient powder respectively cover the cores, namely the particles of the first main ingredient powder, the particles of the second main ingredient powder or the The powder particles of the third main component powder are formed on part or all of the outer surface of the core, so that the ceramic sintered body is more densified.

The present invention further provides a capacitor, which includes: a dielectric ceramic body, which includes a plurality of the above-mentioned ceramic sintered bodies and a plurality of internal electrodes, and the ceramic sintered bodies and the internal electrodes overlap each other to form the dielectric ceramic body ; and two external electrodes, which are respectively disposed on opposite sides of the dielectric ceramic body and electrically connected with the internal electrodes.

Preferably, each of the plurality of inner electrodes is approximately perpendicular (90° included angle) to the outer electrodes.

Preferably, both the top surface and the bottom surface of the dielectric ceramic body are ceramic sintered bodies.

Preferably, the dielectric constant of the capacitor is above 1200, for example: above 1200, above 1500, above 2000, above 2500, above 3000, above 3500 or above 4000.

In one embodiment, the dielectric constant of the capacitor is 1200-3500.

Preferably, the capacitor conforms to the EIA-X8R standard or the EIA-X9R standard.

Preferably, the inner electrode contains any one or a combination of nickel and copper.

Preferably, the external electrode contains any one or a combination of copper, nickel and tin.

The electrode of the present invention can use base metal, so the production cost can be reduced.

Preferably, the capacitor of the present invention is a multilayer ceramic capacitor.

More preferably, the capacitor of the present invention can be applied to the electronicization of traditional fuel vehicles, new energy vehicles, automatic driving or Internet of Vehicles.

The present invention further provides a method for preparing a capacitor, which includes: mixing the above-mentioned ceramic composition to obtain a ceramic slurry; making the ceramic slurry into a ceramic thin strip; disposing an inner electrode on the surface of the ceramic thin strip, to obtain a ceramic thin strip with internal electrodes; lamination of the ceramic thin strips with internal electrodes to obtain a laminated ceramic green; sintering the laminated ceramic green to obtain a dielectric ceramic body, wherein the dielectric ceramic body contains the ceramic A laminated structure formed by a plurality of ceramic sintered bodies formed by sintering the thin strip and a plurality of the inner electrodes overlapped with each other; and an outer electrode is respectively provided on the opposite two sides of the dielectric ceramic body to obtain the capacitor .

Preferably, in the step of laminating the ceramic strips with internal electrodes to obtain a laminated ceramic green sheet, the top layer of the laminated ceramic green sheet is a ceramic thin strip without internal electrodes.

In one embodiment, the sintering temperature is 1200°C to 1320°C, the sintering time is 18 minutes to 32 minutes, and is performed in a reducing atmosphere.

In one embodiment, the reducing atmosphere includes hydrogen and nitrogen.

In one embodiment, the inner electrode comprises any one or a combination of a nickel electrode and a copper electrode.

In one embodiment, the external electrode includes any one of a copper layer, a nickel layer and a tin layer or a combination thereof; preferably, the external electrode includes three layers, which are a copper layer, a nickel layer and a tin layer in sequence.

In one embodiment, in the step of mixing the ceramic composition to obtain a ceramic slurry, the step includes: first adding the powder of the main mixture to a solvent to obtain a main mixing slurry; drying the main mixture The slurry is mixed and calcined, pulverized and ground at a temperature of 900°C to 1200°C to obtain a treated master mix powder, which can improve the uniformity of the treated master mix powder.

To sum up, under the condition that the present invention meets the EIA-X8R standard, in addition to improving the dielectric constant of the capacitor, since base metals can be used for the inner electrode, the production cost can be reduced and the market competitiveness is extremely high.

1: Capacitor

10: Dielectric ceramic body

100: Ceramic sintered body

110: Internal electrode

120: side

11: External electrode

1000: Granules

1001: Nuclear

1002: Shell

1003: BaTiO ₃

1004: Ba _0.95 Ca _0.05 TiO ₃

1005:CaZrO ₃

FIG. 1 is a cross-sectional view of the capacitor of the present invention.

Fig. 2 is a cross-sectional view of the core and the shell of the ceramic sintered body of the present invention.

Fig. 3 is a cross-sectional electron microscope photograph of the ceramic sintered body of the present invention.

Several examples are listed below to illustrate the implementation of the present invention. Those skilled in the art can easily understand the advantages and effects that the present invention can achieve through the content of this specification, and make various modifications and effects without departing from the spirit of the present invention. modifications to implement or apply the teachings of the present invention.

Preparation Example 1: Capacitor

Each embodiment of the present invention is the same as its preparation method, and the process description is as follows: using a mixed solution of ethanol and toluene as a solvent, add 100 moles of main mixture powder into the solvent, and add a commercially available dispersant, and use a bead mill to uniformize Mix to obtain the main mixed slurry; add the secondary mixed powder to the same solvent, and mix uniformly with a bead mill to obtain the secondary mixed slurry; mix the main mixed slurry and the auxiliary mixed slurry, and add commercially available organic binders PVB is uniformly mixed with a bead mill to obtain ceramic slurry; the ceramic slurry is formed into a ceramic thin strip with a thickness of 10 microns by a coating machine; nickel electrodes are printed on the surface of the ceramic thin strip by screen printing. After the inner electrode is laminated, a layered ceramic embryo with ceramic thin strips on both sides is obtained; after cutting the layered ceramic embryo, it is heated at 250°C to 350°C for 12 hours to 36 hours in the general atmosphere to burn off the organic matter, and then the layer containing the Under the reducing atmosphere of hydrogen and nitrogen, sinter for 18 minutes to 32 minutes, and the sintering temperature is 1200°C to 1320°C to obtain a laminated ceramic sintered body; Add copper solution and heat it in nitrogen at 750°C to 900°C to form a copper electrode layer, and then sequentially electroplate a nickel layer and a tin layer on the copper electrode layer to form an external electrode and obtain the capacitor.

As shown in FIG. 1 , the capacitor 1 includes: a dielectric ceramic body 10 including a plurality of the above-mentioned ceramic sintered bodies 100 and a plurality of inner electrodes 110 , and the ceramic sintered bodies 100 and the inner electrodes 110 are overlapped with each other to form The dielectric ceramic body 10 ; and two outer electrodes 11 , which are respectively disposed on opposite sides 120 of the dielectric ceramic body 10 and electrically connected to the inner electrodes 110 .

As shown in FIG. 2 , the ceramic sintered body 100 is obtained by sintering a ceramic composition, and has a plurality of particles 1000 connected to each other; wherein the particles 1000 have a core 1001 and a shell 1002 respectively, and the shell 1002 is located in the core 1001 outer surface; wherein, the core 1001 contains the first main component powder, the second main component powder or the third main component powder, and the shell 1002 contains the rare earth oxide, the silicon oxide and the alkaline earth metal oxide. Furthermore, the cores 1001 are not in direct contact with each other.

3 is a partial photograph of the ceramic sintered body 100, wherein 1003 is BaTiO ₃ ; 1004 is Ba _0.95 Ca _0.05 TiO ₃ ; and 1005 is CaZrO ₃ .

Capacitance Detection: Dielectric Constant, Dissipation Factor, and Capacitance Temperature Coefficient

Use a capacitance meter (type AGILENT4868A) to measure the capacitance value and the Dispassion Factor (DF) of the capacitor under a 1KHz AC signal and an external bias voltage of 1Vrms. Capacitance temperature coefficient (Temperature-Capacitance Coefficient, TCC), namely △C/C, also under the AC signal of 1KHz and the bias voltage of 1Vrms, based on the capacitance value (ie C) measured at room temperature 25℃, the amount Measure the capacitance value change (ie ΔC) in the temperature range from -55°C to 150°C, and then obtain the respective ΔC/C, that is, the capacitance value change rate at -55°C and 150°C (TCC _-55°C and TCC _150°C ). ).

The dielectric constant is converted from the capacitance formula: C=ε *ε ₀ * A/d; among them, C is the capacitance value (unit: F); ε is the dielectric constant of the dielectric layer, namely K value; ε ₀ is the vacuum dielectric constant (8.86×10 ⁻¹² ) (unit: F/m); A is the staggered area (unit: m ² ); and d is the thickness of the dielectric layer (unit: m). The capacitor of the present invention adopts the specification of inch number 0805, and the actual size is 2.00mm×1.25mm.

Example 1-1, Example 1-2, Example 2-1 to Example 2-13

The preparation methods of Example 1-1, Example 1-2, and Example 2-1 to Example 2-13 are the same as those described in Preparation Example 1; The test results of the value change rate (TCC) are shown in Table 1. When the multilayer ceramic capacitor prepared by the formulation of this example meets the EIA-X8R standard, it is represented by O in the table.

From the comparison between Example 1-1 and Example 2-1 in Table 1, and the comparison between Example 1-2 and Example 2-8, it can be seen that when the third main component powder is further added to the ceramic composition, the loss of capacitor The factors are all halved, it can be seen that the addition of the third main component powder can help to improve the dissipation factor of the capacitor.

Second, from the comparison between Example 2-4 and Example 2-7, it can be seen that increasing the addition amount of rare earth oxide can improve the loss factor of the capacitor without affecting the change rate of the capacitance value.

Finally, from the comparison of Example 2-8 to Example 2-10, and the comparison of Example 2-11 to Example 2-13, it can be seen that when the second main component powder is Ba _0.95 Ca _0.05 TiO ₃ , or When the second main component powder is BaZr _0.1 Ti _0.9 O ₃ , increasing the addition amount of the third main component powder can also reduce the capacitance value change rate.

Example 1-2, Example 3-1 to Example 3-3

The preparation methods of Example 1-2, Example 3-1 to Example 3-3 are the same as those described in Preparation Example 1; wherein, the formulations of Example 3-1 to Example 3-3 are the same as those of Example 1-2, only The average particle size of the first main component powder is different. The test results of the average particle size of the first main component powder and the capacitance dielectric constant, dissipation factor (DF) and capacitance change rate (TCC) of each group are shown in Table 2. .

It can be seen from Table 2 that when the average particle size of the first main component powder is 200 nm to 500 nm, the capacitor can meet the EIA-X8R standard.

It can be seen from Example 1-2 that when the average particle size of the first main component powder is 400 nm, the capacitance value change rate is the lowest, that is, the capacitance value change rate falls within the range of ±10%.

To sum up, it can be seen that SrTiO ₃ , Ba _0.95 Ca _0.05 TiO ₃ or BaZr _0.1 Ti _0.9 O ₃ are selected as the second main component powder, and the capacitor can still meet the EIA-X8R standard. In addition, the addition of CaZrO ₃ to the ceramic composition can improve the dissipation factor of the capacitor and reduce the rate of change of the capacitance value. Finally, controlling the average particle size of the first main component powder also helps to reduce the capacitance value change rate.

1: Capacitor

10: Dielectric ceramic body

100: Ceramic sintered body

110: Internal electrode

120: side

11: External electrode

Claims (12)

A ceramic composition comprising a main mix and a sub mix, wherein the main mix comprises a first main constituent powder, a second main constituent powder and a third main constituent powder, and the first main constituent powder comprises BaTiO ₃ , the second main constituent powder The ingredient powder comprises any one or a combination of SrTiO3, BaxCa(1- _{x ) TiO3} , and BaZryTi( ₁ - _{y ) O3} , wherein x is 0.91 to 0.99, and y is 0.05 to 0.2, the The third main component powder is CaZrO ₃ ; and the sub-mixture contains rare earth oxides, silicon oxides, and alkaline earth metal oxides. The ceramic composition of claim 1, wherein the content of the auxiliary mixture is 1.1 mol% to 13.5 mol% based on 100 mol% of the main mixture. The ceramic composition of claim 1, wherein the rare earth oxide, the silicon oxide and the alkaline earth metal oxide are contained in a content of 0.3 mol% to 8 mol% based on the main mixture being 100 mol% Percentage: 0.01 mole percent to 1.5 mole percent: 0.1 mole percent to 5.5 mole percent. The ceramic composition according to claim 1, wherein the average particle size of the first main component powder is 150 nm to 600 nm. The ceramic composition according to claim 1, wherein the first main component powder is prepared by a solid state method, an oxalic acid method or a hydrothermal method. The ceramic composition according to claim 1, wherein the second main component powder comprises any one of SrTiO ₃ , Ba _0.95 Ca _0.05 TiO ₃ , BaZr _0.1 Ti _0.9 O ₃ or a combination thereof. The ceramic composition of claim 1, wherein based on the total weight of the main mixture, the content of the first main component powder is 45 to 75 weight percent, and the second main component powder The content of the powder is 15 to 25 percent by weight, and the content of the third main component powder is 5 to 35 percent by weight. A ceramic sintered body obtained by sintering the ceramic composition described in any one of claims 1 to 7, and having a plurality of particles connected to each other; wherein the particles have a core and a shell, respectively, and the shell located on the outer surface of the core; wherein the core contains the powder of the first main component powder, the powder of the second main component powder or the powder of the third main component powder, and the shell contains the rare earth oxide , the silicon oxide and the alkaline earth metal oxide. A capacitor, comprising: a dielectric ceramic body comprising a plurality of ceramic sintered bodies as described in claim 8 and a plurality of inner electrodes, and the ceramic sintered bodies and the inner electrodes overlap each other to form the dielectric ceramic a body; and two outer electrodes, which are respectively disposed on two opposite sides of the dielectric ceramic body and are electrically connected with the inner electrodes. The capacitor as claimed in claim 9 has a dielectric constant of 1200 or more. A capacitor as claimed in claim 9 or 10, which complies with the EIA-X8R standard or the EIA-X9R standard. A method for preparing a capacitor, comprising: mixing the ceramic composition according to any one of claims 1 to 7 to obtain a ceramic slurry; making the ceramic slurry into a ceramic thin strip; An inner electrode is arranged on the surface of the belt to obtain a ceramic thin belt with the inner electrode; the ceramic thin belt with the inner electrode is laminated to obtain a laminated ceramic green sheet; the laminated ceramic green sheet is sintered to obtain a dielectric ceramic body, wherein The dielectric ceramic body comprises a plurality of ceramic sintered bodies formed by the sintering of the ceramic thin strip and a laminated structure formed by overlapping a plurality of the inner electrodes; and two opposite sides of the dielectric ceramic body are respectively provided with an outer electrode to obtain the capacitance.

Images