TWI744078B - Robotic arm for controlling the spacing of multiple sockets - Google Patents

Abstract

The present invention relates to a robotic arm for controlling the spacing of multiple sockets, and mainly by arranging two grooves on the side of the main body of a robot, the supporting group bodies of the two supporting groups are respectively arranged in each groove, and each supporting group body is against the side of a connecting rod. Therefore, when a servo motor drives one end of the connecting rod to rotate, it will simultaneously drive the body of each bearing group to move upward. In the process of moving, the spacing between the receiving parts on the front side of each receiving group body will gradually expand. Through the rising degree of the body of each receiving group, the spacing can be controlled, and it is not easy to cause the spacing error due to the influence of use time.

Description

Robotic arm for controlling the spacing of multiple sockets

The creation of the present invention relates to a robotic arm, especially a robotic arm that controls the spacing of a plurality of receiving parts.

Please refer to Taiwan Patent Certificate No. M447821 "Vibration Detection Device". The patent system discloses: a vibration detection device is used to detect vibration information generated during the operation of picking and placing a wafer component. The vibration detection device includes A robotic arm, a detection mechanism, and an information collection device. The robotic arm includes a pick-and-place mechanism for picking and placing wafer components. When the wafer component is a test wafer, it has a wafer vibration position. The detection mechanism includes a A detection component that can detect vibration. The detection component is set at a vibration sampling position of the robot arm or a wafer vibration position to detect and sample a vibration sampling information corresponding to the vibration sampling position or the wafer vibration position. Information collection device It is connected to the detection mechanism to receive the vibration sampling information detected by the detection component to collect the vibration information generated during the operation of the robot arm.

Although the patent has the above advantages, when you want to use the patent to accept two wafers at the same time, two sets of robotic arms must be installed at the same time, and the level of the gripping member of each robotic arm must have a level Spacing, this will cause: 1. The overall production cost will increase, and two sets of power mechanisms must be used to control the actions of each mechanical arm separately. 2. The spacing cannot be adjusted as required, or the spacing is prone to errors due to use. For this reason, the creator believes that this kind of problem is really necessary to be improved.

In view of the problems described in the prior art, the author proposes an improved method. The method relates to a robotic arm that controls the spacing of a plurality of receiving parts, including: a robotic arm unit, including:

A robotic arm body: the side of the robotic arm body facing the object to be received is defined as the front side, one of the left and right sides of the robotic arm body is defined as the first side, and the others are defined as the second side. A first groove and a second groove are arranged at intervals in the vertical direction of the side.

A first connecting rod: the first connecting rod is arranged on the first side, and an end of the first connecting rod adjacent to the front side forms a pivotal connection with the first side.

A first receiving set: the first receiving set has a first receiving set body and a first receiving member, the first receiving set body is accommodated in the first groove for moving up and down along the first groove, And the bottom of the first receiving set body is pivotally connected with the first connecting rod, and the first receiving member is arranged on the front side of the first receiving set body.

A second undertaking group: The second receiving set has a second receiving set body and a second receiving member, the second receiving set body is received in the second groove for moving up and down along the second groove, and the second receiving set The bottom of the main body forms a pivot connection with the first connecting rod, and the second receiving member is arranged on the front side of the second receiving set main body;

A servo motor: the output end of the servo motor is directly or indirectly connected with the other end of the first connecting rod to drive the other end of the first connecting rod to rotate upward.

A moving unit: the moving unit is connected to the robotic arm unit for driving the robotic arm unit to move in a three-dimensional rectangular coordinate system.

This creation is mainly based on arranging the first receiving group body and the second receiving group body in the first groove and the second groove. Therefore, when the servo motor drives the other end of the first link to rotate upward When the first connecting rod drives the first receiving set body and the second receiving set body to move upward along the first groove and the second groove, respectively, the first receiving member and the second The distance between the two supporting parts is continuously increasing, so that the size of the distance can be determined by the upward movement of each supporting group body, because the size of the distance is mainly determined by the distance between the grooves and the upward movement of each supporting group body. The degree of movement is determined, and the distance between the grooves is fixed, and the degree of upward movement of each bearing group body is the same. Therefore, the distance is not easy to cause errors with use time. Especially when the number of accepting groups is more than three, the spacing between the accepting pieces can be controlled through this creation.

A: Telecom service provider

1: Robotic arm unit

11: Robot body

111: The first ditch

112: The second ditch

12: The first link

13: The first undertaking group

131: The first undertaking group ontology

132: The first undertaking

133: First round body

14: The second undertaking group

141: The second undertaking group body

142: The second receiving part

143: First round body

16: Servo motor

161: second wheel body

2: mobile unit

3: Steering unit

4: control unit

5: Position detector

6: Level detector

7: Siren

Figure 1 is the appearance of this creation

Figure 2 is the appearance of the main body of the robotic arm created by this book

Figure 3 is a side view of the robotic arm body of this creation

Figure 4 is a schematic diagram of the connection of each component of this creation

Figure 5 is a schematic diagram of the implementation of the servo motor, the first link, and each wheel body of this creation

With the aid of the drawings, the structure, characteristics and embodiments of the invention are described below, so that your examiners can have a better understanding of the invention.

Please refer to Figure 1. This creation is related to a robotic arm for controlling the spacing of a plurality of supporting parts, including: a robotic arm unit 1, the robotic arm unit 1 including:

A robotic arm body 11: Please refer to FIG. 1 in conjunction with FIG. 2. The side of the robotic arm body 11 facing the object to be received is defined as the front side, one of the left and right sides of the robotic arm body 11 is defined as the first side, and the rest It is defined as the second side, and a first groove 111 and a second groove 112 are spaced apart along the vertical direction of the first side of the robot body 11. This creation can control the number of grooves 111 according to the number of items to be accepted at the same time. In addition, the distance between the grooves 111 and 112 can also be controlled according to the distance required when the items are accepted. Figures 2 and 3 of this manual Take five ditches as an example.

A first connecting rod 12: Please refer to FIG. 2, the first connecting rod 12 is disposed on the first side, and an end of the first connecting rod 12 adjacent to the front side forms a pivotal connection with the first side.

A first receiving set 13: Please refer to Figures 2, 3, and 5, the first receiving set 13 has a first receiving set body 131 and a first receiving member 132, and the first receiving set body 131 is housed in The first groove 111 is for moving up and down along the first groove 111, and the bottom of the first receiving assembly body 131 is pivotally connected to the first connecting rod 12, and the first receiving member 132 is disposed on the first connecting rod. One accepts the front side of the main body 131. In this way, when the other end of the first connecting rod 12 rotates upward, the first receiving assembly body 131 will be driven to move upward along the first groove 111. On the contrary, when the other end rotates downward, the A receiving group body 131 moves downward. Also, it is worth mentioning that the first ditch 111 is blocked by the main body 131 of the first receiving group, so the first ditch 111 shown in the schema of this specification is Presented in dashed lines.

A second receiving set 14: Please refer to Figures 2, 3, and 5, the second receiving set 14 has a second receiving set body 141 and a second receiving member 142, and the second receiving set body 141 is housed in The second groove 112 is for moving up and down along the second groove 112, and the bottom of the second receiving set body 141 is pivotally connected to the first connecting rod 12, and the second receiving member 142 is provided on the first connecting rod 12 Second, the front side of the main body 141 is received. The operating principle of the second accepting group 14 is the same as that of the first accepting group 13, so it will not be repeated here. In addition, in order to adapt to the difference of the objects to be received, the above-mentioned implementations of the first and second receiving members 132, 142 can be multiple forks, plates, or forks, and in order to prevent the objects to be received from slipping off during the receiving process, A non-slip unit is preferably laid on the top surface of the first and second receiving members 132, 142. The non-slip unit can be a cushion with a higher friction coefficient or a surface with multiple particles. When used in the semiconductor field, the anti-slip unit can also be a protruding column for inserting on the bottom surface of the wafer box. In addition to the positioning function, the anti-slip unit also has an anti-slip function. In order to explain the advantages, features and action methods of this creation, this manual only takes two undertaking groups as an example. In the actual implementation of this creation, different numbers of undertaking groups are still set based on individual needs. In addition, as shown in the figure Show that the undertaking group The number is preferably 5. Also, it is worth mentioning that the second ditch 112 is blocked by the second receiving group body 141 due to the limitation that the diagram presents an angular relationship. Therefore, the second ditch 112 shown in the diagrams in this specification is Presented in dashed lines.

A servo motor 16: Please refer to FIG. 3. The output end of the servo motor 16 is directly or indirectly connected with the other end of the first connecting rod 12 to drive the other end of the first connecting rod 12 to rotate upward.

A moving unit 2: Please refer to FIG. 1. The moving unit 2 is connected to the robotic arm unit 1 for driving the robotic arm unit 1 to move in a three-dimensional rectangular coordinate system. Moreover, a steering unit 3 is further provided, and the steering unit 3 is connected to the mobile unit 2 for driving the mobile unit 2 to turn. In this way, this creation can have a multi-axial direction to accept the object to be accepted in various situations.

A control unit 4: Please refer to Fig. 4. The control unit 4 is connected to the servo motor 16, the moving unit 2, and the steering unit 3, respectively, for controlling the movement of the moving unit 2 and the steering unit 3, so as to Complete the work process of accepting and placing the object to be accepted.

Please refer to Figure 3, Figure 4, and Figure 5. Next, we will introduce the action flow of this creation. First, the control unit 4 will control the moving unit 2 and the steering unit 3 to act according to the position of the object to be accepted. Drive the robotic arm unit 1 to move to a preset position, and then control the servo motor 16 to start to operate. The servo motor 16 will drive the other end of the first link 12 to rotate upward. The bottom of the receiving body 131, 141 is pivotally connected to the connecting rod 12, so that the first and second receiving body 131, 141 will move upward along the grooves 111, 112, as shown in FIG. 2 And as shown in Figure 3, the spacing of the receiving parts 132, 142 will gradually Pull apart until the distance is sufficient to accept the object to be accepted, and then actuate the moving unit 2 so that the first and third accepting groups 13 and 14 can complete the acceptance of the object to be accepted. Then, the control unit 4 controls the steering unit 3 and the moving unit 2 to act according to the place to be placed, so as to place the object to be accepted at the place to be placed, thus completing the entire accepting process.

The advantages of this creation are:

1. Through the fixed positions of the grooves 111, 112, so that after the receiving body 131, 141 moves upward, the distance between the receiving members 132, 142 is not easy to cause errors with the use time.

2. Only one servo motor 16 can be used to control the distance between the receiving parts 132 and 142, and the manufacturing cost of the overall machine can be reduced.

The following introduces other implementation methods of this creation:

1. Please refer to FIG. 4, a position detector 5 is further provided, and the position detector 5 can detect the vertical height of the bottom of the first receiving set body 131 and the first groove 111 to obtain a height detection Measured value; the control unit 2 determines whether the servo motor 16 is stopped or not according to the height detection value.

Therefore, when the first receiving set body 131 moves to the preset height, the control unit 2 will control the servo motor 16 to stop operating. In this way, it is possible to control the spacing width between the receiving members 132 and 142. Purpose. Since the width of each pitch is affected by the setting position of each groove 111, 112, only monitoring the position of the first receiving set body 131 in the first groove 111 can achieve the purpose of controlling each pitch. In addition, during the actual implementation, you can also choose to monitor the position of the second undertaking group body 141 in the second groove 112 to achieve the above purpose. Not only that, when the creation is actually implemented, you can also monitor each undertaking group at the same time. The main bodies 131 and 141 achieve the purpose of monitoring the width of each pitch.

In addition, this embodiment can be further implemented as follows: after the control unit 2 controls the servo motor 16 to actuate, after a preset time the height detection value cannot meet a preset height value, the control unit 16 controls An alarm 7 is activated. As a result, when the height detection value fails to meet a predetermined height value after a period of time, it means that the main bodies 131, 141 of the receiving group may be stuck in the grooves 111, 112, and the alarm 7 needs to be used to warn the related The staff handles it.

When this creation is used to accept wafers, because the wafers are expensive and very fragile, no accidents are allowed during the acceptance process. In order to reduce the probability of wafer slippage, this creation can be further implemented as:

2. Please refer to Fig. 4, a level detector 6 of the control unit 4 is connected with a piece of information. The level detector 6 can detect the inclination of the receiving parts 132 and 142 to obtain a level detection result. When the level detection result exceeds a level preset value, the control unit 4 controls the servo motor 16, the moving unit 2, and the steering unit 3 to stop operating, and activates the alarm 7 to operate.

In this way, when the inclination angle of one of the receiving parts is too large, in order to prevent the wafer from slipping off, the servo motor 16, the moving unit 2, and the steering unit 3 are stopped, and the alarm 7 is activated at the same time to warn related workers Note that, in addition, the alarm 7 can be a flasher, a buzzer, or a man-machine interface setting to achieve the warning effect in a significant way, such as flashing with the icon of the socket.

To undertake the above-mentioned purpose, this creation can also be implemented as:

3. Please refer to Fig. 4. The control unit 4 can be used to connect a telecommunication service provider A to receive earthquake newsletters. When the control unit 4 receives the earthquake newsletter, if the receiving parts 132 and 142 are to be accepted When the object is in the state, control the servo motor 16, the moving unit 2, and the steering unit 3 to act, In order to place the object to be accepted in the original position, and then control the servo motor 16, the moving unit 2, and the steering unit 3 to stop operating; if the supporting members 132, 142 are not in the state of accepting the object , Control the servo motor 16, the moving unit 2, and the steering unit 3 to stop operating.

When the earthquake comes, this creation can immediately pre-position the object to be undertaken, and then control the servo motor 16, the moving unit 2, and the steering unit 3 to stop. In this way, even when the earthquake comes, it is not easy The occurrence of the drop and damage of the object to be undertaken will improve the overall safety of the creation and minimize the damage caused by the earthquake.

The following introduces three embodiments of how the servo motor 16 and the first connecting rod 12 drive each of the receiving groups 13 and 14:

1. Please refer to FIG. 2, the bottom outer sides of the first receiving set body 131 and the second receiving set body 141 are pivotally connected to the first connecting rod 12 respectively. In this way, when the servo motor 16 drives one end of the first connecting rod 12 to rotate upward or downward, it will be because the outer sides of the bottom of the first receiving set body 131 and the second receiving set body 141 are respectively connected to the first connecting rod. The rod 12 forms a pivotal connection, so the main bodies 131 and 141 of each receiving group will move up or down along the grooves 111 and 112. This kind of driving method belongs to the first link 12 pulling each of the receiving group main bodies 131 and 141 to move downward or pushing each of the receiving group main bodies 131 and 141 to move upward.

2. Please refer to FIG. 5, the first body 131 and the second body 141 are respectively provided with a first wheel body 133, 143 at the bottom outside, and each first wheel body 133, 143 is pressed against the first wheel body respectively. The ring side of a connecting rod 12. In this embodiment, the principle of the method in which the first connecting rod 12 drives the respective bearing group bodies 131 and 141 is similar, and the difference is that: this embodiment mainly uses the respective bearing group bodies The gravity of 131 and 141 causes the servo motor 16 to drive one end of the first link 12 to rotate downward, and each of the receiving assembly bodies 131 and 141 will naturally move downward. As a result, compared to the previous embodiment, The service life between the first connecting rod 12 and the main bodies 131 and 141 of the receiving group is prolonged.

3. Please refer to FIG. 5, the servo motor 16 and the first connecting rod 12 are preferably realized through a wheel body. The implementation is as follows: the servo motor 16 uses a second wheel body 161 to abut against the At the bottom of the other end of the first connecting rod 12, the servo motor 16 can drive the second wheel body 161 to move upward while simultaneously connecting the first connecting rod 12 to rotate. The principle of the servo motor 16 driving the first connecting rod 12 is similar to the second embodiment described above, so it will not be repeated here.

In summary, this case complies with the requirements of the Patent Law, and a patent application was filed in accordance with the law. The above description only lists the preferred embodiments of the invention, and the scope of rights in this case is still mainly listed in the claims.

1: Robotic arm unit

11: Robot body

12: The first link

131: The first undertaking group

132: The first undertaking group ontology

14: The second undertaking group

141: The second undertaking group body

142: The second receiving part

16: Servo motor

Claims (10)

A robotic arm for controlling the spacing of a plurality of supporting parts, comprising: a robotic arm unit, including: a robotic arm body: the side of the robotic arm body facing the object to be received is defined as the front side, and one of the left and right sides of the robotic arm body is defined It is the first side, and the rest is defined as the second side. A first groove and a second groove are spaced apart along the vertical direction of the first side of the robot body; a first connecting rod: arranged on the first side , And an end of the first link adjacent to the front side is pivotally connected to the first side; a first receiving group: having a first receiving group body and a first receiving member, the first receiving group body is accommodated in The first groove is for moving up and down along the first groove, and the bottom of the first receiving set body forms a pivot connection with the first connecting rod, and the first receiving member is arranged in front of the first receiving set body Side; a second receiving group: a second receiving group body and a second receiving member, the second receiving group body is accommodated in the second groove for moving up and down along the second groove, and the first The bottom of the body of the two receiving sets is pivotally connected with the first connecting rod, and the second receiving member is arranged on the front side of the body of the second receiving set; a servo motor: the output terminal of the servo motor is directly or indirectly connected to the first connecting rod The other end of the connecting rod is connected to drive the other end of the first connecting rod to rotate upward; a moving unit is connected to the robotic arm unit for driving the robotic arm unit to move in the three-dimensional rectangular coordinate system. The robotic arm for controlling the spacing of a plurality of sockets as described in claim 1, wherein a position detector is further provided, and the position detector can detect the verticality between the bottom of the body of the first socket and the first groove Height to obtain a height detection value; the control unit determines the servo motor according to the height detection value The state of stopping or not. The robotic arm for controlling the spacing of plural susceptors as described in claim 2, wherein a control unit is further provided, and the control unit is respectively connected to the servo motor and the moving unit for controlling the operation of the servo motor and the moving unit respectively ; Set up a piece of information to connect to the level detector of the control unit, the level detector can detect the inclination of each socket to obtain a level detection result, when the level detection result exceeds a level preset value, Then the control unit controls the servo motor and the moving unit to stop, and activates an alarm. For the robotic arm for controlling the spacing of plural receiving parts as described in claim 3, the control unit can be connected to a telecommunication service provider for receiving earthquake newsletters. When the control unit receives the earthquake newsletter, if the accepting piece is in When accepting an object to be accepted, the servo motor and the moving unit are controlled to act, so that the object to be accepted is placed in the original position, and then the servo motor and the moving unit are controlled to stop working; if the accepting piece is not in When accepting the state of the object to be accepted, the servo motor and the moving unit are controlled to stop operating. According to claim 4, the robotic arm for controlling the spacing of a plurality of receiving parts is provided with a signal connected to the steering unit of the control unit, and the steering unit is connected to the moving unit for driving the moving unit to turn. The robotic arm for controlling the spacing of plural supporting parts as described in claim 5, wherein a non-slip unit is laid on the top surface of the first and second supporting parts, and the first and second supporting parts can be selected from the following groups One of them: plural tooth forks, plate body. The robotic arm for controlling the spacing of plural receiving parts as described in claim 6, wherein the first receiving set body and the second receiving set body are respectively provided with a first wheel body on the outside of the bottom, and each first wheel body is pressed separately Abut the ring side of the first connecting rod. The robotic arm for controlling the spacing of a plurality of receiving parts as described in claim 6, wherein the servo motor uses a second wheel body to abut the bottom of the other end of the first link, and the servo motor can drive the second wheel body upward When moving, the first connecting rod rotates simultaneously. According to claim 6, the robot arm for controlling the spacing of a plurality of receiving parts, wherein the outer bottoms of the first receiving set body and the second receiving set body are respectively pivotally connected with the first link. The robotic arm for controlling the spacing of plural receiving parts as described in claim 7, 8 or 9, wherein after the control unit controls the servo motor to act, the height detection value cannot meet a preset height value after a preset time When the time, the control unit controls the action of the alarm.

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