TWI604286B - Holographic exposure system - Google Patents

Description

Holographic exposure system

The present invention is directed to a holographic exposure system.

The holographic exposure system can form a fixed period grating pattern on the substrate, the area and period of the grating pattern being dependent on the angle of the incident light and the size of the mirror. The system can perform interference pattern exposure on the germanium substrate and generate a two-dimensional periodic structure through dry and wet etching techniques, and this structure has many successful applications in the field of optoelectronics.

Most current photographic exposure systems use Lloyd-mirror for interference exposure. The traditional holographic exposure system usually only forms a nanostructure with a period between 240 nm and 700 nm on a ruthenium wafer within 2 Å due to the size limitation of the mirror, and cannot be achieved at 6 to A large area exposure and a patterned target with a period of 1 micron were performed on a 8 inch germanium wafer.

One aspect of the present invention is to provide a holographic exposure system that allows a holographic exposure system to perform large-area exposure of a sample while freely adjusting the period of the interference fringes.

According to an embodiment of the invention, a holographic exposure system includes a light source module, a fiber optic module, a platform, and a direction control device. The light source module is configured to provide at least one light source. The optical fiber module has a first light exiting port and a second light emitting port for coupling with the light source, and providing the first polarized light and the second polarized light having the same polarization direction respectively by the first light exit port and the second light exit port. The platform is used to place samples. The direction control device includes a first arm, a second arm, and a direction control module. The first light exit port is fixed to the first arm, and the second light exit port is fixed to the second arm. The first arm and the second arm are rotatably connected to the direction control module, and the direction control module is configured to rotate the first arm and the second arm to make the first polarized light and the second polarized light are incident on the sample The angle of incidence is the same.

In one or more embodiments of the present invention, the light source module includes a light source and a beam splitter, the light source light includes a first branch light and a second branch light, the light source is used to provide the starting light, and the beam splitter is used to start the light. Dividing into a first branch light and a second branch light, the optical fiber module includes a first optical fiber and a second optical fiber, the first optical output port is disposed on the first optical fiber, and the second optical output port is disposed on the second optical fiber, where the first optical fiber is used The second fiber is coupled to the second branch ray for coupling with the first branch ray.

In one or more embodiments of the present invention, the optical fiber module further includes a first polarization rotator and a second polarization rotator, and the first polarization rotator and the second polarization rotator are respectively disposed at the first light exit port and the second light output port In front of the light exit port, the first polarization rotator and the second polarization rotator respectively change the polarization directions of the light beams emitted from the first light exit port and the second light exit port, and respectively form the first polarized light having the same polarization direction and the second Polarized light.

In one or more embodiments of the present invention, the first optical fiber and the second optical fiber are polarization maintaining fibers (Polarization Maintaining Fiber), and the optical fiber module further includes a first polarization rotator and a second polarization rotator, and the first polarization rotation The second polarization rotator is disposed between the light source module and the second optical fiber, and the first polarization rotator and the second polarization rotator respectively change the first branch light and The polarization direction of the second branch light is such that the polarization directions of the first polarized light and the second polarized light are the same.

In one or more embodiments of the present invention, the optical fiber module includes a Directional Coupling Fiber, the directional coupling fiber has an optical entrance port, and the first optical outlet and the second optical outlet are disposed on the directional coupling optical fiber. Light is coupled to the directional coupling fiber by the entrance port into the directional coupling fiber.

In one or more embodiments of the present invention, the optical fiber module further includes a first polarization rotator and a second polarization rotator, and the first polarization rotator and the second polarization rotator are respectively disposed at the first light exit port and the second light output port In front of the light exit port, the first polarization rotator and the second polarization rotator respectively change the polarization directions of the light beams emitted from the first light exit port and the second light exit port, and respectively form the first polarized light having the same polarization direction and the second Polarized light.

In one or more embodiments of the present invention, the directional coupling fiber is a polarization maintaining fiber, the fiber module further includes a polarization rotator, the polarization rotator is disposed between the light source module and the directional coupling fiber, and the polarization rotator is used to change the light source. The direction of polarization of the light, which in turn causes the polarization directions of the first polarized light and the second polarized light to be the same.

In one or more embodiments of the present invention, the direction control module includes a center pillar, a center abutment, a first abutment bracket, and a second abutment bracket. The first arm has a first end, a second end and a connection between the first end and the second end. The second arm has a first end, a second end and a connection between the first end and the second end. The central post has a connecting portion, and the first end of the first arm and the first end of the second arm are rotatably coupled to the connecting portion of the central post. The central abutting member is slidably disposed on the central post, and the central abutting member is closer to the second end of the first arm and the second end of the second arm than the connecting portion of the central post. One end of the first abutting bracket and one end of the second abutting bracket are fixed to the central abutting member, and the other end of the first abutting bracket and the other end of the second abutting bracket are respectively pivotally connected to the first arm. a connecting portion of the connecting portion and the second arm. The first light exit port is disposed at the second end of the first arm, and the second light exit port is disposed at the second end of the second arm.

In one or more embodiments of the invention, the source light is a laser.

In one or more embodiments of the present invention, the light source module includes a light source and a shutter. The light source is used to provide the starting light, and the shutter is disposed between the light source and the fiber optic module.

In the above embodiment, the distance between the first light exit port and the second light exit port and the sample is sufficiently large, so that the first polarized light and the second polarized light can be extended into a desired beam, and the first The polarized light interferes with the second polarized light to form an interference exposure area of the desired area on the platform, and the size of the area of the interference exposed area is not limited by the incident angle of the first polarized light and the second polarized light incident on the sample. In this way, the holographic exposure system can perform large-area exposure of the sample while freely adjusting the period of the interference fringe.

The embodiments of the present invention are disclosed in the following drawings, and the details of However, it should be understood that these practical details are not intended to limit the invention. That is, in some embodiments of the invention, these practical details are not necessary. In addition, some of the conventional structures and elements are shown in the drawings in a simplified schematic manner in order to simplify the drawings.

FIG. 1 is a perspective view of a holographic exposure system 100 in accordance with an embodiment of the present invention. Various embodiments of the present invention provide a holographic exposure system 100 that provides incident light at different incident angles but at the same angle of incidence by providing two coherent polarized rays 230, 240. 300, thus forming a fixed period of interference fringes, and exposing the sample 300 to form a fixed period grating pattern on the sample 300. It should be noted that the holographic exposure system 100 does not require the use of a reticle when exposing the sample 300.

The holographic exposure system 100 includes a light source module 110, a fiber optic module 120, a directional control device 140, and a platform 190. The light source module 110 is configured to provide at least one light source 220. The fiber optic module 120 has light exiting ports 121 and 122 for coupling with the light source light 220, and the polarized light beams 230 and 240 having the same polarization direction are respectively provided by the light exit ports 121 and 122. Platform 190 is used to place sample 300. Specifically, the sample 300 is placed in the interference exposure region 400 formed by the polarized light rays 230, 240. The direction control fixture 140 includes arms 141, 145 and a direction control module 150. The light exit port 121 is fixed to the arm 141, and the light exit port 122 is fixed to the arm 145. The arms 141, 145 are rotatably coupled to the direction control module 150. The direction control module 150 is configured to rotate the arms 141, 145 such that the incident angles of the polarized rays 230, 240 incident on the sample 300 are the same.

After the polarized light rays 230 and 240 are emitted from the light exit port 121 and the light exit port 122, the polarized light beams 230 and 240 are diffused to cause a phenomenon in which the light beam is extended. Since the distance between the light exit ports 121, 122 and the sample 300 placed on the platform 190 can be freely adjusted, the distance between the light exit ports 121, 122 and the sample 300 can be adjusted to be large enough to extend the polarized light 230, 240 into a The beam of the desired size, and the polarized light 230, 240 interfere to form an interference exposure region 400 of the desired area on the platform 190, while the size of the area of the interference exposure region 400 is not limited by the incident light 300, 240 being incident on the sample 300. Angle of incidence. As a result, the holographic exposure system 100 can perform large-area exposure of the sample 300 while freely adjusting the period of the interference fringes.

Specifically, the light source module 110 includes a light source 111, a shutter 112, and a beam splitter 113. The light source 111 is used to provide the starting light 210. The shutter 112 is disposed between the light source 111 and the fiber optic module 120. When operating the holographic exposure system 100, the light source 111 is normally always on, so providing the shutter 112 in front of the light source 111 will effectively control the time that light passes through the shutter 112, thus controlling the exposure time. More specifically, the shutter 112 is disposed between the light source 111 and the beam splitter 113.

The beam splitter 113 is used to split the starting ray 210 passing through the shutter 112 into branch rays 221, 222 (the branch rays 221, 222 constitute the source ray 220). The intensity of the branch rays 221, 222 is substantially the same.

In particular, the starting ray 210 is a laser, so the starting ray 210 has good coherence characteristics. Since the starting light 210 passes through the beam splitter 113 to form the source light 220, the source light 220 is also a laser.

Specifically, the fiber optic module 120 includes optical fibers 123, 124. The light exit port 121 is disposed on the optical fiber 123. The light exit port 122 is disposed on the optical fiber 124. The optical fiber 123 is coupled to the branch light 221, and the optical fiber 124 is coupled to the branch light 222.

The optical fiber 123 further has an optical entrance 125, and the optical fiber 124 further has an optical entrance 126. The branch light 221 enters the optical fiber 123 from the light entrance 125 and is coupled to the optical fiber 123. Branched light 222 enters fiber 124 from light entrance 126 and is coupled to fiber 124. The opening size of the light entrances 125, 126 can be set to be large, so that the branch light rays 221, 222 are aligned to enter the light entrance ports 125, 126.

The light source module 110 further includes at least one mirror 114 for adjusting the optical path between the light source 111 and the optical fiber module 120. In the present embodiment, the mirror 114 is configured to reflect the branched light 222 to allow the branched light 222 to enter the light entrance 126.

Specifically, the optical fiber module 120 further includes polarization rotators 127 and 128. The polarization rotators 127 and 128 are respectively disposed in front of the light exit ports 121 and 122, and the polarization rotators 127 and 128 are respectively used to change the light exit ports 121 and 122. The polarization directions of the emitted light rays are respectively formed into polarized light beams 230 and 240 having the same polarization direction, so that the polarized light beams 230 and 240 have good coherence. In particular, polarization rotators 127, 128 change the light into polarized light rays 230, 240 having linear polarization.

The optical fiber module 120 further includes concentrating modules 129a and 129b, and the concentrating modules 129a and 129b are respectively disposed in front of the light exiting openings 121 and 122. The concentrating modules 129a and 129b are used for coherently illuminating the light emitted by the light exiting openings 121 and 122 so that the angles of expansion of the light rays are not too large, and even the light rays become parallel light, so that the light rays have good coherence. More specifically, the concentrating modules 129a and 129b are disposed in front of the polarization rotators 127 and 128, but are not limited thereto. In other embodiments, the concentrating module 129a may be disposed between the light exit port 121 and the polarization rotator 127, and the concentrating module 129b may be disposed between the light exit port 122 and the polarization rotator 128.

The distance between the light exit ports 121 and 122 and the concentrating modules 129a and 129b can be adjusted to adjust the beam size finally formed by the light emitted from the light exit ports 121 and 122. It should be noted that the concentrating modules 129a, 129b are not necessary. Even without the concentrating modules 129a, 129b, the polarized rays 230, 240 still have sufficient coherence to form interference fringes (although the period of the interference fringes may have errors) However, this is usually within the scope of the license).

Specifically, the position of the sample 300 is fixed. Therefore, the rotation angles of the rotation arms 141 and 145 of the direction control module 150 are the same and the rotation directions are opposite, so that the incident angles of the polarized rays 230 and 240 incident on the sample 300 are the same. The invention is not limited thereto, and in other embodiments of the invention, the position of the platform 190 and the sample 300 placed thereon may be moved. Specifically, the position of the platform 190 and the sample 300 is designed to be moved to an appropriate position with the opening angle of the arms 141, 145. When the opening angle of the arms 141, 145 is larger, the position of the platform 190 and the sample 300 is closer to the direction control module 150; otherwise, it is far away.

FIG. 2 is a top plan view of the direction control device 140 of FIG. 1 . As shown in FIG. 2, the direction control module 150 includes a central pillar 151, a central abutment 153, and abutment brackets 154, 157. The arm 141 has a first end 142, a second end 143 and a connecting portion 144 between the first end 142 and the second end 143. The arm 145 has a first end 146, a second end 147 and a connection 148 between the first end 146 and the second end 147. The center pillar 151 has a connecting portion 152. The first end 142 of the arm 141 and the first end 146 of the arm 145 are rotatably coupled to the connecting portion 152 of the center post 151. The central abutting member 153 is slidably disposed on the center post 151, and the central abutting member 153 is closer to the second end 143 of the arm 141 and the second end 147 of the arm 145 than the connecting portion 152 of the center post 151. One end 155 of the abutment bracket 154 and one end 158 of the abutment bracket 157 are fixed to the central abutting member 153, and the other end 156 of the abutting bracket 154 and the other end 159 of the abutting bracket 157 are respectively pivotally connected to the arm 141. The connecting portion 144 is connected to the connecting portion 148 of the arm 145. The light exit port 121 is disposed at the second end 143 of the arm 141, and the light exit port 122 is disposed at the second end 147 of the arm 145.

As shown in FIGS. 1 and 2, with the foregoing structure, when it is desired to increase the incident angle at which the polarized light rays 230, 240 are incident on the sample 300, only the central abutting member 153 is to be along the central pillar. 151 moves toward the connecting portion 152, the central abutting member 153 abuts against the abutting brackets 154, 157, and the abutting brackets 154, 157 abut the arms 141, 145 and the arms 141, 145 and the center The angle between the pillars 151 is increased. When it is desired to reduce the incident angle at which the polarized light rays 230, 240 are incident on the sample 300, only the central abutting member 153 is moved away from the connecting portion 152 along the central post 151, and the central abutting member 153 drives the abutting bracket. One end 155, 158 of 154, 157 is away from the connecting portion 152, and the abutting brackets 154, 157 are caused to move the abutting arms 141, 145 toward the central strut 151, thereby causing the arms 141, 145 and the central strut 151 to be between The angle of the angle is reduced. Since the directional control device 140 has a symmetrical structure, the angle between the arms 141, 145 and the central struts 151 is the same, so that the incident angles of the polarized rays 230, 240 emitted by the light exits 121, 122 incident on the sample 300 will be the same.

It should be noted here that the direction control module 150 does not have to be the structure described herein. The direction control module 150 may have any configuration as long as the incident angles of the polarized light rays 230 and 240 incident on the sample 300 can be the same. Further, in the case where the position of the sample 300 is fixed, as long as the direction control mode can be made The rotation angles of the group 150 rotation arms 141, 145 are the same and the rotation directions are opposite.

As shown in FIG. 1 , the direction control device 140 can further include a control module 149 . The control module 149 is electrically connected to the direction control module 150 and used to control the direction control module 150 to rotate the arm of the direction control module 150. 141, 145.

As depicted in FIG. 1, the platform 190 can be rotated, and the holographic exposure system 100 can re-expose the sample 300 after the platform 190 can be rotated at a particular angle (eg, 90 degrees), such that the holographic exposure system 100 will be formed. A fixed-period two-dimensional grating pattern is placed on the sample 300.

FIG. 3 is a perspective view of a holographic exposure system 100 in accordance with another embodiment of the present invention. The holographic exposure system 100 of the present embodiment is substantially the same as the holographic exposure system 100 described above, and the differences will be mainly described below.

As shown in FIG. 3, the optical fibers 123 and 124 are Polarization Maintaining Fibers, and the optical fiber module 120 further includes polarization rotators 127 and 128. The polarization rotator 127 is disposed between the light source module 110 and the optical fiber 123, and the polarization rotator 128 is disposed between the light source module 110 and the optical fiber 124. The polarization rotators 127, 128 are respectively used to change the polarization directions of the branch rays 221, 222 such that the polarization directions of the branch rays 221, 222 are the same. After the branch rays 221, 222 enter the fibers 123, 124, since the polarization direction will be maintained, the polarization directions of the rays (i.e., the polarized rays 230, 240) emitted by the exit ports 121, 122 will remain the same.

4 is a perspective view of a holographic exposure system 100 in accordance with yet another embodiment of the present invention. The holographic exposure system 100 of the present embodiment is substantially the same as the holographic exposure system 100 of Fig. 1, and the differences will be mainly described below.

The fiber optic module 120 includes a directional coupling fiber 130. The directional coupling fiber 130 has an optical port 131. The illuminating ports 121 and 122 are disposed on the directional coupling fiber 130. The illuminating light 220 enters the directional coupling fiber through the optical port 131. 130 is coupled to the directional coupling fiber 130.

The light source module 110 includes a light source 111 and a shutter 112. The light source 111 is used to provide the light source light 220. The shutter 112 is disposed between the light source 111 and the fiber optic module 120. After the source ray 220 passes through the shutter 112, the source ray 220 is coupled to the directional coupling fiber 130 by the illuminating port 131 into the directional coupling fiber 130. Then, the coupled light source ray 220 is split into two lights in the directional coupling fiber 130 and emitted from the light exit ports 121 and 122.

Specifically, the optical fiber module 120 further includes polarization rotators 127 and 128. The polarization rotators 127 and 128 are respectively disposed in front of the light exit ports 121 and 122, and the polarization rotators 127 and 128 are respectively used to change the light exit ports 121 and 122. The polarization directions of the emitted light rays form polarized light beams 230 and 240 having the same polarization direction, respectively.

FIG. 5 is a perspective view of a holographic exposure system 100 in accordance with still another embodiment of the present invention. The holographic exposure system 100 of the present embodiment is substantially the same as the holographic exposure system 100 of Fig. 4, and the differences will be mainly described below.

The directional coupling fiber 130 is a polarization maintaining fiber. The fiber optic module 120 further includes a polarization rotator 129 disposed between the light source module 110 and the directional coupling fiber 130. The polarization rotator 129 is used to change the polarization direction of the source ray 220 to polarize the source ray 220. The direction is the desired direction (for example, the source ray 220 changes to linear polarization and the polarization direction is horizontal). After the light source ray 220 enters the directional coupling fiber 130, since the polarization direction will be maintained, the polarization directions of the light rays emitted from the light exit ports 121, 122 (i.e., the polarized light rays 230, 240) will remain the same.

In the above embodiment of the present invention, by making the distance between the light exit ports 121, 122 and the sample 300 large enough, the polarized light rays 230, 240 can be extended into a desired light beam, and the polarized light rays 230, 240 are interfered to form a light source. The interference exposure area 400 of the desired area is on the platform 190 while the area of the interference exposure area 400 is not limited by the angle of incidence of the polarized light 230, 240 incident on the sample 300. As a result, the holographic exposure system 100 can perform large-area exposure of the sample 300 while freely adjusting the period of the interference fringes.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and the present invention can be modified and modified without departing from the spirit and scope of the present invention. The scope is subject to the definition of the scope of the patent application attached.

100‧‧‧Full image exposure system
110‧‧‧Light source module
111‧‧‧Light source
112‧‧ ‧Shutter
113‧‧‧beam splitter
114‧‧‧Mirror
120‧‧‧Optical module
121, 122‧‧‧ light exit
123, 124‧‧‧ fiber
125, 126‧‧‧ into the light port
127, 128, 129‧‧‧ Polarization rotator
130‧‧‧Directional coupling fiber
131‧‧‧Into the light port
129a, 129b‧‧‧ concentrating module
140‧‧‧ Directional Control Set
141, 145‧‧ arm
142, 146‧‧‧ first end
143, 147‧‧‧ second end
144, 148‧‧‧ Connections
149‧‧‧Control Module
150‧‧‧ Directional Control Module
151‧‧‧Central pillar
152‧‧‧Connecting Department
153‧‧‧Central abutment
154, 157‧‧‧Abutment bracket
155, 156, 158, 159‧‧‧
190‧‧‧ platform
210‧‧‧Starting light
220‧‧‧Light source
221, 222‧‧‧ branch light
230, 240‧‧‧ polarized light
300‧‧‧ samples
400‧‧‧Interference exposure area

1 is a perspective view of a holographic exposure system in accordance with an embodiment of the present invention. Fig. 2 is a top plan view showing the direction control device of Fig. 1. 3 is a perspective view of a holographic exposure system in accordance with another embodiment of the present invention. 4 is a perspective view of a holographic exposure system according to still another embodiment of the present invention. FIG. 5 is a perspective view of a holographic exposure system according to still another embodiment of the present invention.

100‧‧‧Full image exposure system

110‧‧‧Light source module

111‧‧‧Light source

112‧‧ ‧Shutter

113‧‧‧beam splitter

114‧‧‧Mirror

120‧‧‧Optical module

121, 122‧‧‧ light exit

123, 124‧‧‧ fiber

125, 126‧‧‧ into the light port

127, 128‧‧‧ Polarization rotator

129a, 129b‧‧‧ concentrating module

140‧‧‧ Directional Control Set

141, 145‧‧ arm

149‧‧‧Control Module

150‧‧‧ Directional Control Module

190‧‧‧ platform

210‧‧‧Starting light

220‧‧‧Light source

221, 222‧‧‧ branch light

230, 240‧‧‧ polarized light

300‧‧‧ samples

400‧‧‧Interference exposure area

Claims (10)

A holographic exposure system includes: a light source module for providing at least one light source; a fiber optic module having a first light exit port and a second light exit port for coupling with the light source of the light source The first light exit port and the second light exit port respectively provide one of the first polarized light and the second polarized light having the same polarization direction; a platform for placing a sample; and a directional control device comprising: a first branch An arm, wherein the first light exit is fixed to the first arm; a second arm, wherein the second light exit is fixed to the second arm; and a directional control module, wherein the first arm is The second arm is rotatably coupled to the directional control module, and the directional control module is configured to rotate the first arm and the second arm to cause the first polarized ray and the second polarized ray to be incident on The sample has the same angle of incidence. The holographic exposure system of claim 1, wherein the light source module comprises a light source and a beam splitter, the light source light comprises a first branch light and a second branch light, wherein the light source is used to provide a starting light. The beam splitter is configured to divide the initial light into the first branch light and the second branch light, the fiber module includes a first fiber and a second fiber, and the first light port is disposed on the first fiber The second optical port is disposed on the second optical fiber, the first optical fiber is coupled to the first branch light, and the second optical fiber is coupled to the second branch light. The holographic exposure system of claim 2, wherein the fiber optic module further comprises a first polarization rotator and a second polarization rotator, wherein the first polarization rotator and the second polarization rotator are respectively disposed on the The first light emitting rotator and the second light emitting rotator respectively change a polarization direction of the light emitted from the first light exit port and the second light exit port, respectively, in front of the first light exit port and the second light exit port, respectively The first polarized light and the second polarized light having the same polarization direction are formed. The holographic exposure system of claim 2, wherein the first optical fiber and the second optical fiber are Polarization Maintaining Fibers, the optical fiber module further comprising a first polarization rotator and a second polarization rotation The first polarization rotator is disposed between the light source module and the first optical fiber, and the second polarization rotator is disposed between the light source module and the second optical fiber, the first polarization rotator and the The second polarization rotator is configured to change the polarization directions of the first branch light and the second branch light, respectively, so that the polarization directions of the first polarized light and the second polarized light are the same. The omni-directional exposure system of claim 1, wherein the optical fiber module comprises a Directional Coupling Fiber, the directional coupling fiber has an optical inlet, and the first optical outlet and the second optical outlet are disposed. On the directional coupling fiber, the light source light enters the directional coupling fiber from the light entrance port and is coupled to the directional coupling fiber. The holographic exposure system of claim 5, wherein the fiber optic module further comprises a first polarization rotator and a second polarization rotator, wherein the first polarization rotator and the second polarization rotator are respectively disposed on the The first light emitting rotator and the second light emitting rotator respectively change a polarization direction of the light emitted from the first light exit port and the second light exit port, respectively, in front of the first light exit port and the second light exit port, respectively The first polarized light and the second polarized light having the same polarization direction are formed. The omnidirectional exposure system of claim 5, wherein the directional coupling fiber is a polarization maintaining fiber, the fiber module further comprising a polarization rotator disposed between the light source module and the directional coupling fiber The polarization rotator is configured to change a polarization direction of the light of the light source, so that the polarization directions of the first polarized light and the second polarized light are the same. The holographic exposure system of claim 1, wherein the directional control module comprises a central pillar, a central abutting member, a first abutting bracket and a second abutting bracket, the first arm having a a first end, a second end, and a connecting portion between the first end and the second end, the second arm having a first end, a second end, and the first end and the first end a connecting portion between the two ends, the central leg having a connecting portion, the first end of the first arm and the first end of the second arm being rotatably connected to the connecting portion of the central leg The central abutting member is slidably disposed on the central strut, and the central abutting member is closer to the second end of the first arm and the second arm than the connecting portion of the central strut One end of the first abutting bracket and one end of the second abutting bracket are fixed to the central abutting member, and the other end of the first abutting bracket and the other end of the second abutting bracket are respectively The first light outlet is disposed at the connecting portion of the connecting portion of the first arm and the second arm And at the second end of the first arm, the second light exit port is disposed at the second end of the second arm. The holographic exposure system of claim 1, wherein the source of light is a laser. The holographic exposure system of claim 1, wherein the light source module comprises a light source and a shutter, the light source is configured to provide a starting light, and the shutter is disposed between the light source and the fiber optic module.