TWI567832B - A pressure vessel and a method of forming an airtight pressure environment - Google Patents

Description

Pressure vessel and method for forming an airtight pressure environment

SUMMARY OF THE INVENTION The present invention is directed to a technique for creating a hermetic, airtight pressure environment, and is directed to providing a pressure vessel that achieves a better sealing effect, and a method of using the pressure vessel to form a hermetic pressure environment.

In the field of conventional processing technology, the expected processing effect is often achieved by changing the pressure difference of the processing environment; for example, in a conventional semiconductor chip packaging process, a wafer of an appropriate size must be cut from the wafer. Then attach it to a carrier (the carrier can be a substrate or can be a lead frame and other carriers that can carry the chip for contacting external electronic signals). During the process of adhesion, many bubbles are generated in the adhesive material, which causes a cavity in the adhesive material after aging, which affects the reliability and quality of the product.

Therefore, in the process of adhesion, the high pressure and high temperature are further applied to the adhesive material, the high temperature is used to lower the viscosity of the adhesive material, and the high pressure is used to exclude the existing bubbles in the adhesive material from being stuck due to the pressure difference. The bubbles in the adhesive material are reduced outside the material or due to the pressure difference, thereby effectively improving the quality and reliability of the product. Further, in the ULSI semiconductor process for processing a germanium wafer or the like, an insulating oxide film having a contact hole is formed on a semiconductor substrate, and an aluminum alloy film is formed on the film surface, and then an inert gas such as argon gas is used. A so-called high-pressure reflow process in which a high-temperature, air-tight pressure environment is formed and the aluminum alloy film is buried in the deepest portion of the contact hole.

A similar airtight pressure environment is mainly limited to a pressure vessel when The pressure vessel is basically composed of a container body and a cover body. The container system is provided with at least one opening for facilitating the entry and exit of the workpiece, and then the corresponding cover of the cover body is placed at the opening of the container body; In order to avoid pressure leakage at the joint between the cover body and the container body, the integral pressure container and as shown in FIG. 1 further provide a plurality of sealing elements 13 (such as O) at the joint between the cover body 12 and the container body 11. ring).

In principle, the pressure vessel can increase the sealing effect by the sealing member 13 disposed between the lid body 12 and the container body 11. In theory, the sealing effect can be further improved as the number of the sealing members 13 increases. Furthermore, after the cover 12 of the conventional pressure vessel is covered with the container body 11, the force is pressed by the clamp 14 distributed around the cover 12, so that the sealing member 13 is closely attached to the cover 12 and the container body 11. The seal is produced.

However, in the actual use state, if the operation mode of fastening the clamps 14 one by one is adopted, the cover body 12 and the container body 11 cannot be completely adhered because the force distribution of the clamps 14 around the cover body 12 is often uneven; If the whole clamp 14 is tightened at the same time by rotating the cover 12, and only the force of the clamp 14 causes the cover 12 to closely fit the container body 11, the operation of rotating the cover 12 relative to the container body 11 is performed. During the process, the upper and lower portions of the entire sealing member 13 respectively receive the forces from the lid body 12 and the container body 11 in different directions, which often causes the sealing member 13 to be twisted and deformed to fail to achieve the desired sealing effect.

In view of the above, the present invention provides a pressure vessel which can achieve a better sealing effect, and a method of using the pressure vessel to form an airtight pressure environment, which is the main object thereof.

In order to achieve the above, the pressure vessel of the present invention basically comprises: a first body, a second body, at least one active sealing element, at least one passive density a sealing member, and a plurality of connecting members; wherein the first body has a first pressure control passage for receiving the workpiece, at least one first space control passage communicating with the first volume space, and an opening communicating with the first volume space The opening edge ring is provided with a bonding surface for contacting the second body, and at least one limiting groove surrounding the periphery of the opening for receiving the active sealing component is disposed on the bonding surface, and is disposed between the limiting groove and the opening Having at least one positioning groove surrounding the periphery of the opening for fixing the passive sealing member, and at least one second pressure control channel at the limiting groove; the second system is for covering the opening of the first body, And the at least one active sealing component is mounted in the limiting groove of the first body, and can be displaced relative to the first body by the pressure change in the restricted groove; the at least one passive sealing The component is fixed in the positioning groove of the first body, and the surface thereof is opposite to the protruding convex surface by a predetermined height; each connecting component is oppositely disposed around the opening of the first body to form the second body and the first this Connected.

According to the above technical feature, the second body is provided with a second volume space corresponding to the first volume space.

According to the above technical feature, the at least one active sealing member is provided with a wing portion on the inner and outer edges thereof for fitting against the wall surface of the limiting groove.

According to the above technical feature, the first system is provided at its opening edge with a shoulder projecting a predetermined width around the periphery, the abutment surface extending to the shoulder.

The notch width of the at least one positioning groove is relatively less than or equal to or greater than the groove bottom width.

The pressure vessel is configured to fix all of the connecting members at the shoulder of the first body, and the plurality of connecting members are formed by a button body that can be correspondingly embedded in the second body.

The pressure vessel is configured to fix all of the connecting members to the second body, and the plurality of connecting members are formed by a button body that can be correspondingly embedded in the shoulder of the first body.

The pressure vessel is fixed to a shoulder of the first body by a predetermined number of connecting members, and the connecting member fixed at the shoulder of the first body is formed by a button body corresponding to the second body. And, the remaining connecting members are fixed on the second body, and the connecting members fixed to the second body are all formed by a button body corresponding to the shoulder of the first body.

Each of the connecting members is composed of a bolt that is disposed between the second body and the shoulder of the first body, and a nut that is screwed to the bolt.

The second system is provided with a transparent window.

As for the pressure vessel of the present invention, the first and second pressure control passages of the pressure vessel of any one of the structural forms are respectively connected to a predetermined pressure control device, and the workpiece is placed in the first step. After a body and the second body are indeed covered, the method for forming a normal positive pressure environment through the pressure vessel produces a desired effect on the workpiece; the method for forming the airtight pressure environment by the pressure vessel substantially comprises the following steps: (a) pressurizing the interior of the limiting groove through the second pressure control passage to cause the active sealing member to float to be in close contact with the second body; (b) the first volume space of the first body through the first pressure control passage Pressurizing to a preset pressure value allows the first volume of the first body to form a predetermined positive pressure environment.

According to the above technical feature, the pressure vessel constitutes a hermetic pressure environment, and in step (a), the inside of the limiting groove is pressurized through the second pressure control passage, so that the active sealing element floats to be in close contact with the second body. Then, the step (b) is performed to pressurize the first volume space of the first body to a preset positive pressure value through the first pressure control channel, and after the pressure state is maintained to a predetermined time, the step (c) is further performed. The first pressure control channel evacuates the first volume space of the first body, displaces the second body relative to the first body to be in close contact with the passive sealing element, and continuously evacuates the first volume space of the first body to Scheduled settings.

Further, the above pressure vessel constitutes a square of a gas tight pressure environment The method is: after injecting the first volume space of the first body into the preset pressure value through the first pressure control channel, and maintaining the pressure state to a predetermined time, performing step (b) through the first pressure control The channel evacuates the first volume space of the first body, and extracts and recovers the gas inside the first volume space of the first body.

Another method for forming a pressure-tight environment of a pressure vessel according to the present invention is to connect a predetermined pressure control device to a first pressure control device of a pressure vessel of a structural form, and the workpiece is placed in the first body. And after the second body is indeed covered, the method for forming a normal negative pressure environment through the pressure vessel produces a desired effect on the workpiece; the method for forming the airtight pressure environment by the pressure vessel substantially comprises the following steps: Pressing the interior of the limiting groove through the second pressure control passage to cause the active sealing member to float to be in close contact with the second body; (b) evacuating the first volume of the first body through the first pressure control passage Disposing the second body relative to the first body to be in close contact with the passive sealing member, and continuously evacuating the first volume space of the first body to a predetermined set value, so that the first volume space of the first body is configured a predetermined negative pressure environment; and, in step (b), evacuating the first volume space of the first body through the first pressure control channel such that the second body faces the first body And passive process moves close contact with the sealing element, the system while controlling the internal pressure release channel stopper trench through the second pressure.

According to the above technical feature, the pressure vessel constitutes a gas-tight pressure environment, and in the step (a), the inside of the limiting groove is pressurized through the second pressure control passage, so that the active sealing element is raised to be close to the second body. After the step (b), the first volume space of the first body is evacuated through the first pressure control channel, so that the second body is displaced relative to the first body to be closely adhered to the passive sealing member, and continues to be The first volume space of the first body is evacuated to a predetermined negative pressure value until the pressure state is maintained to a predetermined time; and the first volume space of the first body is further pressurized to a preset pressure value through the first pressure control channel And, through the first pressure control The channel is configured to evacuate the first volume of the first body such that the second body is displaced toward the first body to be in close contact with the passive sealing member, and simultaneously releases the inside of the limiting groove through the second pressure control channel pressure.

Further, the pressure vessel constitutes an airtight pressure environment, and the first volume space of the first body is evacuated through the first pressure control passage, so that the second body is displaced relative to the first body to closely fit the passive sealing member. And continuously pumping the first volume space of the first body to a predetermined set value, and after maintaining the pressure state to a predetermined time, first returning the internal pressure of the first volume space of the first body to the first pressure control channel In a normal pressure state, the first volume space of the first body is then pressurized to a preset pressure value through the first pressure control passage. .

In particular, the pressure vessel and its method of forming an airtight pressure environment disclosed in the present invention can produce the following effects:

1. A relatively reliable sealing effect can be obtained, which greatly improves the applicability and practicability of the pressure vessel.

2. It can effectively avoid distortion of the active sealing element and the passive sealing element.

3. It can effectively reduce the wear of active sealing components and passive sealing components, thereby improving the service life of active sealing components and passive sealing components.

4. During the process of the second body and the first body cover, the active sealing component and the passive sealing component are less distorted, which facilitates the rapid closing of the second body and the first body, thereby improving the processing capacity of the object to be used.

[Prior technology]

11‧‧‧ container body

12‧‧‧ Cover

13‧‧‧Sealing components

14‧‧‧Clamp

[this invention]

20‧‧‧First Ontology

21‧‧‧First volume space

22‧‧‧First pressure control channel

23‧‧‧ openings

24‧‧‧Fitting surface

25‧‧‧ Limit groove

26‧‧‧ Positioning groove

27‧‧‧Second pressure control channel

28‧‧‧ shoulder

30‧‧‧Second ontology

31‧‧‧Transparent window

32‧‧‧Second volume

41‧‧‧Active sealing element

411‧‧‧ wing

42‧‧‧ Passive sealing element

50‧‧‧Connecting parts

51‧‧‧ Button body

52‧‧‧Bolts

53‧‧‧ nuts

Figure 1 is a partial cross-sectional view of a conventional pressure vessel.

Fig. 2 is a cross-sectional view showing the structure of a pressure vessel according to a first embodiment of the present invention.

Figure 3 is a cross-sectional view showing the structure of a pressure vessel according to a second embodiment of the present invention.

Figure 4 is a cross-sectional view showing the structure of a pressure vessel according to a third embodiment of the present invention.

Figure 5 is a cross-sectional view showing the structure of a pressure vessel according to a fourth embodiment of the present invention.

Figure 6 is a cross-sectional view showing the structure of a pressure vessel according to a fifth embodiment of the present invention.

Figure 7 is a flow chart showing the operation steps of a hermetic pressure environment of the present invention.

Figure 8 is a schematic view showing the action state of the active sealing element before the positive pressure is brought into contact with the second body in the present invention.

Figure 9 is a flow chart showing another operational procedure of the present invention which can constitute an airtight pressure environment.

Figure 10 is a schematic view showing the action state of the active sealing element before the negative pressure is raised to contact with the second body in the present invention.

Figure 11 is a schematic view showing the action state of the second body and the passive sealing member in close contact before the negative pressure in the present invention.

The present invention mainly provides a pressure vessel which can obtain a better sealing effect, and a method for forming a gas-tight pressure environment using the pressure vessel, as shown in the sectional view of the pressure vessel structure of the first embodiment of the present invention in FIG. 2, the pressure of the present invention The container basically comprises: a first body 20, a second body 30, at least one active sealing element 41, at least one passive sealing element 42, and a plurality of connecting members 50; wherein: the first body 20 has a housing for receiving a first volume control space 21 of the workpiece, at least one first pressure control channel 22 communicating with the first volume space, an opening 23 communicating with the first volume space 21, and a second body 30 disposed at the edge of the opening 23 The contact surface 24 of the contact surface is provided with at least one limiting groove 25 surrounding the periphery of the opening 23 for receiving the active sealing element 41, and at least one of the limiting groove 25 and the opening 23 is provided. Surrounding the periphery of the opening 23 for fixing the positioning groove 26 of the passive sealing member 42, and at least a second pressure at the limiting groove 25 Force control channel 27.

The second body 30 is covered by the opening of the first body 20 and can be re-opened. In the implementation, the second body 30 can further be provided with a transparent window 31 for viewing through the transparent window 31. The processing condition or state inside the first volume space 21 of the first body 20; in the embodiment shown in FIG. 2 to FIG. 4, the second body 30 is further provided with a first body and a first body 20 The second volume space 32 corresponding to the volume space 21 increases the use space of the overall pressure vessel and provides a more diverse placement of the workpiece.

The at least one active sealing element 41 is mounted in the limiting groove 25 of the first body 20, and can be displaced relative to the first body 20 by the pressure change in the restricted groove 25; in practice, the at least one active The sealing member 41 is provided with a wing portion 411 for abutting against the wall surface of the limiting groove 25 at the inner and outer edges thereof, so that when the limiting groove 25 is pressed via the second pressure control passage 27, the sealing member is actively sealed. The wing portion 411 of the member 41 can be relatively outwardly stretched to increase the adhesion between the retaining groove 25 and the retaining groove 25.

The at least one passive sealing element 42 is fixed in the positioning groove 26 of the first body 20, and the surface thereof is opposite to the protruding bonding surface 24 by a predetermined height; in practice, the positioning groove 26 of the first body 20 is grooved. The width of the mouth is relatively smaller than the width of the bottom of the groove (in the shape of a dovetail), so that the passive sealing member 42 can be better positioned and the torsional deformation of the passive sealing member 42 can be prevented. In addition, the positioning groove of the first body 20 The slot width of the slot 26 can also be relatively equal to or greater than the width of the slot bottom.

Each of the connecting members 50 is disposed opposite the opening 23 of the first body 20 for connecting the second body 30 to the first body 20; in practice, the first body 20 can be disposed at the edge of the opening 23 thereof. a shoulder portion 28 that protrudes relative to a predetermined width, and the abutting surface 24 extends to the shoulder portion 28; as for the integral pressure vessel, the full number of connecting members 50 can be fixed to the shoulder portion 28 of the first body 20, And all the connecting members 50 are formed by a button body 51 corresponding to the second body 30; The body pressure vessel can also be fixed to the second body 30, and all the connectors 50 are formed by a button body 51 corresponding to the shoulder 28 of the first body 20.

Of course, as shown in FIG. 3, a predetermined number of the connecting members 50 are fixed to the shoulders 28 of the first body 20, and the connecting members 50 fixed at the shoulders 28 of the first body 20 are respectively The second body 30 is configured to be correspondingly embedded with the button body 51; and the remaining connector member 50 is fixed on the second body 30, and the connector member 50 fixed to the second body 30 is provided by one The shoulder portion 28 of the first body 20 is formed corresponding to the embedded button body 51. Furthermore, the connecting members 50 can also be screwed between the second body 30 and the shoulder portion 28 of the first body 20 and the bolt 52 as shown in FIG. The nut 53 is composed of.

Furthermore, the first body and the second body may be combined in different types, and the pressure processing is performed to achieve airtightness according to different workpieces. As shown in the embodiment of FIG. 2, the first body is a container, and the second body is a cover body. The container is matched with the cover body to accommodate the workpiece, and the pressure processing environment of the dense effect can be achieved. Alternatively, as shown in the embodiment of Fig. 4, the first body is a container, and the second body is a container, and the container is placed in the container to accommodate the processed object, and the pressure processing environment of the airtight effect can be achieved. Or, as shown in the embodiment of FIG. 5, the first body is a cover body having a groove, and the second body is a cover body, and the cover body and the cover body accommodate the workpiece, and the airtight effect can be achieved. Pressure processing environment.

In the above embodiments, the at least one active sealing element and the at least one passive sealing element may also be disposed at the second body. As shown in the third embodiment of FIG. 6, the second body 30 is at the edge of the opening 23. There is a contact surface 24 for contacting the first body 20, and at least one limiting groove 25 surrounding the periphery of the opening 23 for receiving the active sealing element 41 is disposed on the bonding surface 24, and the limiting groove 25 is At least one periphery of the opening 23 is provided between the openings 23 for fixing the passive sealing member 42 The positioning groove 26 is further provided with at least one second pressure control channel 27 at the limiting groove 25; the at least one active sealing element 41 is mounted in the limiting groove 25 of the second body 30, which is limited The pressure in the groove 25 changes to be opposite to the second body 30; the at least one passive sealing member 42 is fixed in the positioning groove 26 of the second body 30, and the surface thereof is opposite to the convex bonding surface 24 The height is predetermined to constitute a pressure vessel of another embodiment.

In principle, the pressure vessel of any structural form can be directly applied to the defoaming treatment of the workpiece in a positive pressure environment, or the defoaming treatment under a negative pressure environment, or even defoaming or defoaming. In the process, by further heating the first volume space inside the pressure vessel, the defoaming or defoaming reaction of the processed product is accelerated, and the defoaming or defoaming quality is improved.

As shown in FIG. 2 and FIG. 7, a pressure vessel of the present invention constitutes a gas-tight pressure environment, that is, a pressure vessel of any configuration is used, and the first and second pressures of the pressure vessel are used. The control channel is respectively connected to a predetermined pressure control device, and after the workpiece is placed in the first body and the second body is indeed covered, the method for forming a normal positive pressure environment through the pressure vessel produces a desired effect on the workpiece; The method of forming the pressure vessel to form an airtight pressure environment includes the following steps:

(a) pressurizing the inside of the limiting groove 25 through the second pressure control passage 27 to cause the active sealing member 41 to float to be in close contact with the second body 30 (as shown in FIG. 8) so that the first body 20 The airtight effect is achieved between the second body 30 and the second body 30; this step mainly forms a sealing coating on the outer periphery of the active sealing member 41, and can directly pressurize the first volume 21 of the first body 20, or Helping to perform the subsequent vacuuming operation smoothly, and during the process of the second body 30 and the first body 20 being covered, the active sealing element 41 can be relatively hidden inside the limiting groove 25, contributing to the second body 30. Quickly closing the first body 20 and avoiding the active sealing element 41 from being subjected to Wear or twist deformation.

(b) pressurizing the first volume space 21 of the first body 20 to a predetermined positive pressure value through the first pressure control passage 22, so that the first volume space 21 of the first body 20 constitutes a predetermined positive pressure environment. Through the structural design of the integral pressure vessel, the first volume space 21 of the first body 20 can be normally maintained in a preset positive pressure environment to produce a desired processing effect on the workpiece. The airtight pressure environment pressure set in this step depends on the working pressure of the object to be used, and the first volume space 21 of the first body 20 is maintained in the airtight pressure environment for a predetermined time according to the actual processing demand, and then transmitted through the first The second body 30 can be opened after a pressure control passage 22 bleeds the pressure of the first volume space 21.

Of course, according to the characteristics of different processed materials and processing requirements, the method of forming a gas-tight pressure environment by the pressure vessel may be pressurized to a positive pressure environment, and then vacuumed to reach a negative pressure environment. The operation first presses the inside of the limiting groove through the second pressure control channel in step (a), so that the active sealing element floats up to be in close contact with the second body (as shown in FIG. 8), and then the steps are performed ( b) pressurizing the first volume space of the first body to a preset positive pressure value through the first pressure control passage, and maintaining the pressure state to a predetermined time, so that the workpiece is formed in the normal positive pressure environment of the pressure vessel The expected effect is to vent the pressure of the first volume space 21 through the first pressure control passage 22; and further performing the step (c): evacuating the first volume space of the first body through the first pressure control passage to make the second The body is displaced relative to the first body to be in close contact with the passive sealing member, and the internal pressure of the limiting groove is released through the second pressure control channel (as shown in FIG. 11) to prevent the active sealing member from being subjected to wear or torsional deformation. And continuously pumping the first volume space of the first body to a predetermined negative pressure value and a predetermined time, and the method of forming the normal negative pressure environment by the pressure vessel produces a desired effect on the workpiece.

When the processed object achieves the desired effect, the second body and the first body The body is opened, firstly, the internal negative pressure of the first volume space of the first body is returned to the normal pressure state through the first pressure control channel, and the atmospheric pressure enters the first volume space to reach the vacuum returning to the normal pressure, and then the second pressure is transmitted. The control channel evacuates the inside of the limiting groove to reset the passive sealing element of the limiting groove, which helps to facilitate opening of the second body and the first body.

The method of applying a positive pressure environment to the defoaming treatment of the processed material firstly utilizes the method of forming the airtight pressure environment of the pressure vessel can be applied to the semiconductor process or the panel bonding process, and the second pressure control channel 27 firstly defines the limiting groove. The inner portion of the first body 30 is pressurized to a predetermined positive pressure value through the first pressure control channel. And maintaining the pressure state to a predetermined time, which helps prevent the gas leakage effect, thereby achieving the energy saving effect, and the processing object forms a normal positive pressure environment in the pressure vessel, not only achieves the defoaming effect, but also makes the panel glue processing more closely. . In addition, the semiconductor process surface can be in a positive pressure environment with temperature to achieve a softening point of the material to accelerate the defoaming effect. The pressure value of the positive pressure environment is 8 kg as the preferred pressure environment, and the temperature environment is 180 degrees Celsius. The best defoaming effect can be achieved.

Further, the panel bonding process may further perform a defoaming treatment on the processed material by a negative pressure environment, wherein the pressure of the first volume space 21 is released by the first pressure control passage 22, and the first pressure may be transmitted again. The control channel evacuates the first volume space of the first body such that the second body is displaced relative to the first body to be in close contact with the passive sealing member, and the internal pressure of the limiting groove is released through the second pressure control channel, so that The active sealing element 41 is loosely reset, and continuously evacuates the first volume space of the first body to a predetermined negative pressure value and a predetermined time, and the degassing effect is achieved by forming a normal negative pressure environment through the pressure container, so that the panel is glued. The resulting bubble removal is more complete. Of course, the panel glue can be in a positive pressure environment with temperature or a temperature negative pressure environment, so that the material can reach the softening point to accelerate the defoaming or defoaming effect, such as a panel. The temperature environment glued to the optical film is 60 degrees Celsius to achieve the best defoaming or defoaming effect.

In addition, the implementation of the negative pressure environment for the metal processing object to achieve the purpose of preventing oxidation, before the normal negative pressure environment is formed, the predetermined volume of gas is input to the first volume space of the first body through the first pressure control channel (if used high) a special gas of economy, pressurizing the first volume space of the first body to a preset pressure value, and maintaining the pressure state to a predetermined time to achieve the desired processing effect; and then transmitting through the first pressure control channel The internal pressure of the first volume space of a body returns to a normal pressure state, and then the first volume space of the first body is evacuated through the first pressure control channel, so that the second body is displaced relative to the first body to a passive seal The components are closely attached, and the first volume space of the first body is continuously evacuated to a predetermined set value, and the negative pressure environment is preferably a negative pressure of 1 kg, and the normal pressure environment is formed by the pressure vessel. The object produces the desired effect.

According to the above, after the first volume space of the first body is pressurized to a preset pressure value through the first pressure control channel, and the pressure state is maintained for a predetermined time, the first pressure control channel is further passed through the first pressure control channel. The internal volume of the first volume space of the body is recovered by vacuuming the first volume space of the first body through the first pressure control channel, so that the second body is displaced relative to the first body to be in close contact with the passive sealing element, and The first volume space of the first body is continuously evacuated to a predetermined set value, and the high economic special gas previously input into the first volume space is recovered, thereby achieving the purpose of saving gas supply reuse.

Furthermore, the method of forming a gas-tight pressure environment by using a pressure vessel of any one of the structural forms can directly constitute a normal negative pressure environment according to the processing demand of the object; as shown in FIGS. 2 and 9, in this embodiment In the example, the pressure vessel constitutes a gas tight pressure environment, and the pressure vessel of any structural form is used, and the first and second pressure control passages are respectively connected to predetermined pressure control devices. After the workpiece is placed in the first body and the second body is indeed covered, the method of forming a normal negative pressure environment through the pressure vessel produces a desired effect on the workpiece; the pressure vessel constitutes a gas tight pressure environment, Basically includes the following steps.

(a) pressurizing the inside of the limiting groove 25 through the second pressure control passage 27 to cause the active sealing member 41 to float to be in close contact with the second body 30 (as shown in Fig. 8); similarly, this step is mainly Forming a sealing coating on the periphery of the passive sealing member 42 to facilitate the smooth execution of the subsequent vacuuming operation, or directly pressurizing the first volume space 21 of the first body 20, and in the second body 30 During the process of covering the first body 20, the active sealing element 41 can be relatively hidden inside the limiting groove 25, facilitating the quick closing of the second body 30 and the first body 20, and avoiding the active sealing element 41. Subject to wear or torsion deformation.

(b) evacuating the first volume 221 of the first body 20 through the first pressure control passage 22 to displace the second body 30 relative to the first body 20 to closely conform to the passive sealing member 42 and continue to The first volume space 21 of a body 20 is evacuated to a predetermined negative pressure value, so that the first volume space 21 of the first body 20 constitutes a predetermined negative pressure environment.

Similarly, the pressure vessel of the embodiment constitutes a gas-tight pressure environment, and the pressure vessel can be formed into a gas-tight pressure environment according to the characteristics of different processed materials and processing requirements, or the vacuum can be vacuumed to reach a negative pressure environment. Then pressurize to reach a positive pressure environment. The operation (as shown in FIG. 10) first presses the inside of the limiting groove through the second pressure control channel in step (a), so that the active sealing element is lifted to be in close contact with the second body, and then the step is performed ( b) vacuuming the first volume space of the first body through the first pressure control channel, so that the second body is displaced relative to the first body to be closely adhered to the passive sealing member, and then releasing the limit through the second pressure control channel The internal pressure of the groove prevents the active sealing element from being subjected to wear or torsional deformation (as shown in Fig. 11) and allows the second body to be displaced toward the first body to be tightly coupled to the passive sealing element. Forming a close fit; continuing to evacuate the first volume of the first body to a predetermined negative pressure value until the pressure state is maintained for a predetermined time, and the method of forming the normal negative pressure environment through the pressure vessel Produce the desired effect. Further, the first volume space of the first body is pressurized (or atmospheric pressure) through the first pressure control channel to break the vacuum, thereby pressurizing the first volume space, but before forming the positive pressure environment, the first body is The airtight control between the second body first presses the inside of the limiting groove through the second pressure control channel, so that the active sealing element floats up to be in close contact with the second body (as shown in FIG. 8), and then through The first pressure control passage pressurizes the first volume of the first body to a predetermined positive pressure value and maintains the pressure state for a predetermined time to cause the workpiece to form a normal positive pressure environment in the pressure vessel to produce a desired effect.

When the processed object completes the expected effect, and the second body and the first body are opened, the internal negative pressure of the first volume space of the first body is returned to the normal pressure state through the first pressure control channel, and the atmospheric pressure enters the first state. The volume space reaches the vacuum returning to the normal pressure, and then the internal pressure of the limiting groove is released through the second pressure control channel, or the inside of the limiting groove is evacuated through the second pressure control channel, so that the limiting groove is passively sealed. The component is reset to help facilitate the opening of the second body and the first body.

Firstly, the degassing treatment is applied to the processed material by using the negative pressure environment, and the method for forming the airtight pressure environment of the pressure vessel can be applied to the glass process, and the inside of the limiting groove 25 is first pressurized by the second pressure control passage 27. The active sealing element 41 is floated to a state of being in close contact with the second body 30, and the first volume space of the first body is evacuated through the first pressure control passage, so that the second body is displaced relative to the first body to After the passive sealing component is in close contact, continuously pumping the first volume space of the first body to a predetermined negative pressure value, so as to achieve the purpose of applying a negative pressure treatment to the workpiece, and maintaining the negative pressure state until a predetermined time, Helps the benefits of the defoaming process.

Furthermore, the glass process can also apply the processed material by a positive pressure environment. The defoaming process presses the inside of the limiting groove through the second pressure control channel to cause the active sealing element to float to be in close contact with the second body. At this time, the first body is controlled by the first pressure control channel. The first volume space is pressurized to a preset positive pressure value, so that the processing object forms a normal positive pressure environment in the pressure vessel to achieve a defoaming effect, and is more beneficial for removing the bubbles more completely. Of course, the processed material can be in a positive pressure environment with temperature or a negative pressure environment with temperature to achieve a softening point of the processed material, which is more helpful for accelerating the defoaming or defoaming effect.

Compared with the conventional conventional technology, the pressure vessel and the method for forming the airtight pressure environment disclosed in the present invention can produce the following effects:

1. A relatively reliable sealing effect can be obtained, which greatly improves the applicability and practicability of the pressure vessel.

2. It can effectively avoid distortion of the active sealing element and the passive sealing element.

3. It can effectively reduce the wear of active sealing components and passive sealing components, thereby improving the service life of active sealing components and passive sealing components.

4. During the process of the second body and the first body cover, the active sealing component and the passive sealing component are less distorted, which facilitates the rapid closing of the second body and the first body, thereby improving the processing capacity of the object to be used.

In summary, the present invention provides a preferably viable pressure vessel and a method thereof for forming an airtight pressure environment, and an application for an invention patent is provided according to the law; the technical contents and technical features of the present invention have been disclosed above, but are familiar with The person skilled in the art may still make various substitutions and modifications without departing from the spirit of the invention. Therefore, the scope of the present invention should be construed as being limited by the scope of the appended claims

20‧‧‧First Ontology

21‧‧‧First volume space

22‧‧‧First pressure control channel

23‧‧‧ openings

24‧‧‧Fitting surface

25‧‧‧ Limit groove

26‧‧‧ Positioning groove

27‧‧‧Second pressure control channel

28‧‧‧ shoulder

30‧‧‧Second ontology

31‧‧‧Transparent window

41‧‧‧Active sealing element

411‧‧‧ wing

42‧‧‧ Passive sealing element

50‧‧‧Connecting parts

51‧‧‧ Button body

Claims (16)

A pressure vessel includes: a first body having a first volume space for receiving a workpiece, at least one first pressure control passage communicating with the first volume space, and an opening communicating with the first volume space at the opening The edge ring is provided with a bonding surface for contacting the second body, and at least one limiting groove surrounding the periphery of the opening for receiving the active sealing component is disposed on the bonding surface, and is disposed between the limiting groove and the opening. At least one positioning groove surrounding the periphery of the opening for fixing the passive sealing member, and at least one second pressure control channel at the limiting groove; a second body covering the opening of the first body, and Relating to the opening; at least one active sealing element is mounted in the limiting groove of the first body, and can be displaced relative to the first body by a pressure change in the restricted groove; at least one passive sealing element is Fixing in the positioning groove of the first body, and the surface thereof is opposite to the convex contact surface by a predetermined height; each connecting member is oppositely disposed around the opening of the first body to form the second body and the first body Access. The pressure vessel of claim 1, wherein the second body is provided with a second volume corresponding to the first volume. The pressure vessel of claim 1, wherein the at least one active sealing member has a wing portion on the inner and outer edges thereof for engaging the wall surface of the limiting groove. The pressure vessel of claim 1, wherein the first system is provided at its opening edge with a shoulder that protrudes relative to a predetermined width, the abutment surface extending to the shoulder. According to the active sealing element, a fin for engaging the wall surface of the limiting groove is protruded from the inner and outer edges thereof. The pressure vessel of any one of claims 1 to 4, wherein the at least one locating groove has a notch width that is relatively less than or equal to or greater than the groove bottom width. The pressure vessel of claim 4, wherein the pressure vessel is fully connected The piece is fixed at the shoulder of the first body, and all the connecting pieces are formed by a button body which can be correspondingly embedded in the second body. The pressure vessel of claim 4, wherein the pressure vessel is configured to fix all of the connecting members to the second body, and the plurality of connecting members are formed by a button body corresponding to the shoulder of the first body. . The pressure vessel of claim 4, wherein the pressure vessel fixes a predetermined number of connecting members at a shoulder of the first body, and the plurality of connecting members fixed at the shoulder of the first body are The second body is configured to be correspondingly embedded with the button body; and the remaining connecting members are fixed on the second body, and the plurality of connecting members fixed on the second body are corresponding to the shoulder portion of the first body Constructed by an embedded button body. The pressure vessel of claim 4, wherein each of the connecting members is composed of a bolt that is disposed between the second body and the shoulder of the first body, and a nut that is screwed to the bolt. The pressure vessel of any one of claims 1 to 4, wherein the second system is provided with a transparent window. A method for forming a pressure-tight environment of a pressure vessel, wherein the first and second pressure control passages of the pressure vessel of any one of claims 1 to 10 are respectively connected to a predetermined pressure control device, and the workpiece is placed in the first After the body and the second body are indeed covered, the method for forming a normal positive pressure environment through the pressure vessel produces a desired effect on the workpiece; the method for forming the airtight pressure environment by the pressure vessel substantially comprises the following steps: a) pressurizing the inside of the limiting groove through the second pressure control channel to cause the active sealing element to float to be in close contact with the second body; (b) adding the first volume space of the first body through the first pressure control channel Pressing to a preset positive pressure value allows the first volume of the first body to form a predetermined positive pressure environment. The method of claim 11, wherein the pressure vessel constitutes an airtight pressure environment, wherein The pressure vessel constitutes a gas-tight pressure environment, and after the step (a) is performed to pressurize the inside of the limiting groove through the second pressure control passage, so that the active sealing member is lifted to be in close contact with the second body, and then the steps are performed. (b) pressurizing the first volume of the first body to a predetermined positive pressure value through the first pressure control channel, and after maintaining the pressure state for a predetermined time, further performing step (c) through the first pressure control channel The first volume space of the first body is evacuated such that the second body is displaced relative to the first body to be in close contact with the passive sealing member, and the first volume space of the first body is continuously evacuated to a predetermined set value. The method of claim 11, wherein the pressure vessel constitutes an airtight pressure environment, wherein the pressure vessel constitutes a gas tight pressure environment, and the first volume space of the first body is pressurized and injected through the first pressure control passage. After the preset pressure value is maintained, and the pressure state is maintained to a predetermined time, the step (b) is performed to evacuate the first volume space of the first body through the first pressure control channel, and the first volume space of the first body is The internal gas is extracted and recovered. A method for forming a pressure-tight environment of a pressure vessel, wherein the first and second pressure control passages of the pressure vessel of any one of claims 1 to 10 are respectively connected to a predetermined pressure control device, and the workpiece is placed in the first After the body and the second body are indeed covered, the method for forming a normal negative pressure environment through the pressure vessel produces a desired effect on the workpiece; the method for forming the airtight pressure environment by the pressure vessel substantially comprises the following steps: a) pressurizing the inside of the limiting groove through the second pressure control channel to cause the active sealing element to float to be in close contact with the second body; (b) pumping the first volume space of the first body through the first pressure control channel Vacuuming, the second body is displaced relative to the first body to be in close contact with the passive sealing member, and the first volume space of the first body is continuously evacuated to a predetermined set value, so that the first volume space of the first body is obtained Forming a predetermined negative pressure environment; and, And (b) vacuuming the first volume space of the first body through the first pressure control channel to displace the second body relative to the first body to be in close contact with the passive sealing component, simultaneously transmitting through the second The pressure control channel releases the internal pressure of the limit groove. The method of claim 14, wherein the pressure vessel constitutes a hermetic pressure environment, wherein the pressure vessel forms a gas-tight pressure environment, and in step (a), the interior of the limiting groove is pressurized through the second pressure control passage. After the active sealing element is brought up to be in close contact with the second body, step (b) is performed to evacuate the first volume space of the first body through the first pressure control channel to displace the second body relative to the first body. Up to be in close contact with the passive sealing member, and continuously pumping the first volume space of the first body to a predetermined negative pressure value until the pressure state is maintained to a predetermined time; further re-transmitting the first pressure control channel to the first body Pressurizing the first volume to a predetermined pressure value; and, by transmitting a vacuum to the first volume of the first body through the first pressure control passage, displace the second body relative to the first body to be close to the passive sealing member During the fitting process, the internal pressure of the limiting groove is simultaneously released through the second pressure control channel. The method of claim 15, wherein the pressure vessel constitutes a hermetic pressure environment, wherein the pressure vessel constitutes a hermetic pressure environment, and the first volume space of the first body is evacuated through the first pressure control passage. Disposing the second body to the first body to be in close contact with the passive sealing member, and continuously evacuating the first volume of the first body to a predetermined set value, and maintaining the pressure state for a predetermined time A pressure control channel returns the internal pressure of the first volume of the first body to a normal pressure state, and then pressurizes the first volume space of the first body to a preset pressure value through the first pressure control channel.