TWI498547B - Optical inspection device - Google Patents
Optical inspection device Download PDFInfo
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- TWI498547B TWI498547B TW101137140A TW101137140A TWI498547B TW I498547 B TWI498547 B TW I498547B TW 101137140 A TW101137140 A TW 101137140A TW 101137140 A TW101137140 A TW 101137140A TW I498547 B TWI498547 B TW I498547B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
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- Computer Vision & Pattern Recognition (AREA)
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measuring Arrangements Characterized By The Use Of Fluids (AREA)
Description
本發明係有關於一種，此尤指一種在擷取柔性材質所製檢測基片之影像過程中，將壓縮空氣噴灑於檢測基片之上部，藉此使其變形最小化且維持平滑度，以利進行更精確的檢測者。The invention relates to a kind, in particular, in the process of capturing an image of a detecting substrate made of a flexible material, spraying compressed air on the upper part of the detecting substrate, thereby minimizing deformation and maintaining smoothness, For more accurate detection.
按，目前市售之各種顯示裝置逐漸走向大型化趨勢，反觀，產品之厚度卻呈現逐漸變薄之狀況。如上所述之顯示裝置，其係透過利用一般光學相機之視覺檢測進而檢出不良與否。According to the current market, various display devices are gradually moving toward a large-scale trend. On the other hand, the thickness of the products has gradually become thinner. The display device as described above detects poorness or not by visual inspection using a general optical camera.
為執行如上所述之視覺檢測，必須設置輸送檢測對象之輸送裝置，以及用以固定檢測對象之固定裝置，以便進行檢測。In order to perform the visual inspection as described above, it is necessary to provide a conveying device that conveys the detection object, and a fixing device for fixing the detection object for detection.
尤其，對於由薄膜素材而成且具有柔性之軟片，以及設有孔之基板等進行表面檢測及量測時，一向被視為極為重要之事。為此，在重疊之透明玻璃基板之間配置檢測基片，或在外緣穿孔且於該孔施加真空吸附力，藉此吸附、固定檢測基片之方法，均為在進行檢測過程中，用以確保檢測基片平滑度之習知固定裝置。惟上述情形，具有檢測基片之歪曲或局部扭曲現象，以致產生不可檢測領域之缺失。In particular, surface inspection and measurement of a flexible film made of a film material and a substrate provided with a hole have been regarded as extremely important. For this reason, a detection substrate is disposed between the overlapping transparent glass substrates, or a vacuum adsorption force is applied to the outer edge and a vacuum adsorption force is applied to the holes, thereby adsorbing and fixing the detection substrate, which are used in the detection process. A known fixture that ensures the smoothness of the substrate. However, in the above case, there is a distortion or local distortion of the detecting substrate, so that a defect in the undetectable field is generated.
又，對於具有10至80微米厚度之軟片、設有孔之基板、紙、布、薄板等進行表面檢測時，因產品之表面歪曲，致使於法確保均一的平面度；尤其，對形成有多數孔之板材之表面，利用真空吸附或接觸式按壓方式進行檢測時，因無法取得瞬間擷取之光學檢測畫面之實物尺寸與準確值，以致產生基片之歪 曲或局部扭曲現象所引起之不可檢測領域。Moreover, when a surface film having a thickness of 10 to 80 μm, a substrate provided with a hole, paper, cloth, or a sheet is subjected to surface inspection, the surface of the product is distorted, so that a uniform flatness is ensured by the method; in particular, a majority is formed. When the surface of the plate of the hole is detected by vacuum suction or contact pressing, the physical size and accurate value of the optical detection screen for instantaneous capture cannot be obtained, so that the substrate is produced. Undetectable areas caused by curved or local distortions.
本發明係為解決上述問題而創設者，其目的在於提供一種光學檢測裝置，其係藉由使易變形材質所製之檢測基片加以精密固定，並將壓縮空氣分別噴灑於受測基片之個別領域，使其以平面擠壓狀態完成視覺檢測，進而提升檢測速度及達成更加穩定、更精確之檢測者。The present invention has been made to solve the above problems, and an object of the invention is to provide an optical detecting device which is capable of precisely fixing a detecting substrate made of a deformable material and spraying compressed air on the substrate to be tested. In some areas, it enables visual inspection in a flat extrusion state, thereby improving detection speed and achieving more stable and accurate detectors.
為達上述本發明之目的，本發明一較佳實施例之光學檢測裝置，係包含：一檢測台，由光穿透性材質而成，供裝載檢測基片；一固定裝置，形成於該檢測台，供固定該檢測基片；一固定架，供支撐該檢測台之側面或上面；一背光元件，由該檢測台之下方將光照射於檢測台上之檢測基片；一成像裝置，設置於該檢測台之上方，供擷取裝載於該檢測台之檢測基片之影像；一噴氣部，與該成像裝置共同設置於該成像裝置下方之同軸上，藉由將壓縮空氣噴灑於該檢測基片，使檢測基片附著於檢測台，其中：該噴氣部，係包含有：一壓縮空氣生成裝置，供產生壓縮空氣；一噴嘴，供噴灑在該壓縮空氣生成裝置所生成之壓縮空 氣，惟該噴嘴係整列於該成像裝置之兩側，藉此集中噴灑於該檢測基片。For the purpose of the present invention, an optical detecting device according to a preferred embodiment of the present invention comprises: a detecting station made of a light transmissive material for loading a detecting substrate; and a fixing device formed in the detecting a fixing frame for fixing the detecting substrate; a fixing frame for supporting the side or the top of the detecting table; a backlight element for illuminating the detecting substrate on the detecting table by the lower side of the detecting table; an imaging device, setting An image of the detection substrate loaded on the inspection station is captured above the inspection station; a jet portion is disposed coaxially with the imaging device on the underside of the imaging device, by spraying compressed air on the detection a substrate for attaching the detecting substrate to the detecting station, wherein: the air jet portion comprises: a compressed air generating device for generating compressed air; and a nozzle for spraying the compressed air generated by the compressed air generating device The gas is only disposed on both sides of the image forming apparatus, thereby being concentratedly sprayed on the detecting substrate.
該噴氣部，係包含有：一寬度調節部，供調節該噴嘴之間距；一噴灑角調節部，供調節該噴嘴之噴灑角度；一高度調節部，供調節該噴嘴之高度。The air jet portion includes: a width adjusting portion for adjusting the distance between the nozzles; a spray angle adjusting portion for adjusting a spray angle of the nozzle; and a height adjusting portion for adjusting the height of the nozzle.
該噴氣部，係進一步包含有一調節閥，供調節由該噴嘴輸出之壓縮空氣量。The air jet portion further includes a regulating valve for adjusting the amount of compressed air output by the nozzle.
該噴氣部，係進一步加設有一感應器，供感知由該噴氣部噴灑之壓縮空氣是否正確噴灑於該檢測基片受測之領域。The air jet portion is further provided with a sensor for sensing whether the compressed air sprayed by the air jet portion is properly sprayed on the field to be tested by the detecting substrate.
此外，本發明一較佳實施例之光學檢測裝置，係進一步包含有一輔助光源，其由該檢測台之上方將光照射於該檢測台上之檢測基片。Furthermore, an optical detecting device according to a preferred embodiment of the present invention further includes an auxiliary light source that illuminates the detecting substrate on the detecting station from above the detecting station.
本發明之光學檢測裝置，其具有以下效果：The optical detecting device of the present invention has the following effects:
1.藉由使易變形材質所製之檢測基片加以精密固定，並將壓縮空氣分別噴灑於受測基片之個別領域，使其以平面擠壓狀態完成視覺檢測，進而提升檢測速度及達成更加穩定、更精確之檢測。1. By precisely fixing the detection substrate made of the easily deformable material and spraying the compressed air on the individual areas of the substrate to be tested, the visual inspection is completed in a plane extrusion state, thereby improving the detection speed and achieving More stable and accurate detection.
2.可使施加於檢測基片之物理衝擊最小化，同時可有效提升吸附固定力，藉以有效防止檢測基片之損傷及變形，並能夠進行穩定之檢測。2. The physical impact applied to the detecting substrate can be minimized, and the adsorption fixing force can be effectively improved, thereby effectively preventing damage and deformation of the detecting substrate, and enabling stable detection.
本說明書，其中對於相同結構便使用相同符號，而對於重 複之說明，以及可能模本發明要旨之習知功能及結構，則省略其詳細說明。本發明之實施型態，其提供目的乃在對具有該領域通常知識者進行更完整的說明。為此，圖示所示要素之形狀及尺寸等可誇大呈現，以利進一步明確說明。This specification, in which the same symbol is used for the same structure, but for heavy Detailed descriptions, as well as conventional functions and structures that may dictate the gist of the present invention, are omitted. The embodiments of the present invention are provided for a more complete description of those of ordinary skill in the art. For this reason, the shapes and sizes of the elements shown in the drawings may be exaggerated for further clarification.
茲依附圖實施例將本發明之特徵及優點詳細說明如下：第1圖，係本發明一較佳實施例光學檢測裝置斷面圖；第2圖，係第1圖之噴氣部示意圖。The features and advantages of the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a cross-sectional view of an optical detecting device according to a preferred embodiment of the present invention; and FIG. 2 is a schematic view of the air jet portion of FIG.
本發明一較佳實施例之光學檢測裝置，係包含有：一檢測台100，由光穿透性材質而成，供裝載檢測基片10；一固定裝置200，形成於該檢測台100，供固定該檢測基片10；一固定架300，供支撐該檢測台100之側面或上面；一背光元件400，由該檢測台100之下方將光照射於檢測台100上之檢測基片10；一成像裝置500，設置於該檢測台100之上方，供擷取裝載於該檢測台100之檢測基片10之影像；一噴氣部，與該成像裝置500共同設置於該成像裝置500下方之同軸上，藉由將壓縮空氣噴灑於該檢測基片10，使檢測基片10附著於檢測台100。An optical detecting device according to a preferred embodiment of the present invention comprises: a detecting station 100 made of a light transmissive material for loading the detecting substrate 10; and a fixing device 200 formed on the detecting station 100 for The detecting substrate 10 is fixed; a fixing frame 300 for supporting the side or the upper surface of the detecting table 100; a backlight element 400, the detecting substrate 10 is irradiated with light from the detecting table 100; An imaging device 500 is disposed above the inspection station 100 for capturing an image of the detection substrate 10 mounted on the inspection station 100. A jet portion is disposed coaxially with the imaging device 500 under the imaging device 500. The detecting substrate 10 is attached to the detecting stage 100 by spraying compressed air on the detecting substrate 10.
本發明所稱檢測基片10，係可由軟片、設有孔之基板、紙、布、薄板、薄膜等習用各類板型素材所構成。The detecting substrate 10 of the present invention may be composed of a film, a substrate provided with a hole, a paper, a cloth, a thin plate, a film, and the like, and various types of plate-shaped materials.
該檢測台100，係應由光穿透性素材所構成，如玻璃、壓克力等，以能夠使配置於該檢測台100下方之背光元件400之光穿透。又，該檢測台100之形狀，係可包含正方形、長方形、 圓形等，以對應待受測檢測基片10之形狀為較佳。茲舉一例說明，該檢測基片10呈正方形，該檢測台100亦呈正方形。The inspection station 100 is composed of a light-transmitting material such as glass, acryl, or the like to enable light of the backlight element 400 disposed under the inspection table 100 to penetrate. Moreover, the shape of the detection table 100 may include a square, a rectangle, A circle or the like is preferable in accordance with the shape of the substrate 10 to be tested. As an example, the detecting substrate 10 has a square shape, and the detecting station 100 also has a square shape.
該固定裝置200，係形成於該檢測台100，扮演固定該檢測基片100之角色。該固定裝置200，其係在可固定該檢測台100上之該檢測基片100之範圍內，可適用習知各類固定方法。茲舉一例說明，該固定裝置200可為真空吸附方式。The fixing device 200 is formed on the detecting station 100 and plays the role of fixing the detecting substrate 100. The fixing device 200 is within the range of the detecting substrate 100 that can be fixed to the detecting station 100, and various conventional fixing methods can be applied. As an example, the fixture 200 can be vacuum adsorbed.
此時，該固定裝置200，係可包含吸板與真空模組。其中，吸板由多孔質陶瓷素材所構成，空氣便藉由形成於陶瓷之微細空隙吸入，進而向吸板上面產生吸附力，並透過該吸附力可使該檢測基片10加以固定。另一方面，真空模組則具有藉由施加真空壓使該吸板上之檢測基片10作吸附之功能。At this time, the fixing device 200 may include a suction plate and a vacuum module. Among them, the suction plate is made of a porous ceramic material, and the air is sucked by the fine void formed in the ceramic to generate an adsorption force to the suction plate, and the detection substrate 10 can be fixed by the adsorption force. On the other hand, the vacuum module has a function of adsorbing the detecting substrate 10 on the suction plate by applying a vacuum pressure.
該固定架300，係藉由支撐該檢測台100之側面或下面，進而扮演支撐該檢測台100之角色。The fixing frame 300 plays the role of supporting the detecting station 100 by supporting the side or the bottom of the detecting table 100.
該固定架300，係應成桌型結構，惟可形成一個中空的空間於供插入該檢測台100之中心部。The holder 300 should be in a table structure, but a hollow space can be formed for insertion into the center of the inspection table 100.
該背光元件400，係配置於該檢測台100之下方，供作為將光照射於該檢測台100上之檢測基片10之光源。The backlight element 400 is disposed below the detection stage 100 and serves as a light source for detecting the substrate 10 on which the light is irradiated onto the detection stage 100.
因此，藉由該背光元件400所照射之光通過該檢測台100，並穿透裝載於其上面之該檢測基片10，輸往該成像裝置500，致使能夠檢測該檢測基片10之不良與否。茲舉一例說明，當該檢測基片10設有複數個孔時，藉此可檢測該孔是否位於正確位置。Therefore, the light irradiated by the backlight element 400 passes through the detecting stage 100 and penetrates the detecting substrate 10 mounted thereon, and is sent to the image forming apparatus 500, so that the defect of the detecting substrate 10 can be detected. no. As an example, when the detecting substrate 10 is provided with a plurality of holes, it is thereby possible to detect whether the hole is in the correct position.
該成像裝置500，係包含相機，為配置於該檢測台100之上方，供擷取裝載於該檢測台100之檢測基片10之影像者。 透過該成像裝置500所擷取之影像，可執行影像分析及辨別不良與否。The imaging device 500 includes a camera disposed above the detection platform 100 for capturing images of the detection substrate 10 mounted on the inspection station 100. Through the image captured by the imaging device 500, image analysis and discrimination can be performed.
該噴氣部600，係與該成像裝置500共同配置於該成像裝置500下方之同軸上，將壓縮空氣噴向該檢測基片10，使該檢測基片10附著於檢測台100。該噴氣部600之複數個噴嘴，呈以圓形或線形配置之結構，藉此將空壓均勻施加於檢測台100上之檢測基片10，進而將檢測基片10附著於檢測台100。特此一提，由該噴氣部600噴出之壓縮空氣，係經由淨化過程使粉塵等分離之清淨空氣(clean air)。The air ejecting unit 600 is disposed coaxially with the imaging device 500 on the lower side of the imaging device 500, and ejects compressed air toward the detecting substrate 10 to attach the detecting substrate 10 to the detecting station 100. The plurality of nozzles of the air ejecting portion 600 are arranged in a circular or linear configuration, whereby the air pressure is uniformly applied to the detecting substrate 10 on the detecting stage 100, and the detecting substrate 10 is attached to the detecting stage 100. It is to be noted that the compressed air discharged from the air jet portion 600 is a clean air that separates dust or the like through a purification process.
如上所述，將藉由噴氣部600之作用形成多數微細孔之呈薄板狀之檢測基片10安裝於檢測台100，並對擬進行檢查或量測部位之表面局部扭曲現象，利用噴氣部600均勻噴灑清淨空氣，藉此將檢測基片10附著於檢測台100之上面，進而具有均勻的平滑度。As described above, the detection substrate 10 having a thin plate shape in which a plurality of fine holes are formed by the action of the air ejecting portion 600 is attached to the inspection table 100, and the surface of the portion to be inspected or measured is locally twisted, and the air jet portion 600 is utilized. The clean air is uniformly sprayed, whereby the detecting substrate 10 is attached to the upper surface of the detecting table 100, thereby having uniform smoothness.
本發明一較佳實施例之光學檢測裝置，其中，該噴氣部600係包含有：一壓縮空氣生成裝置(未附圖示)，供產生壓縮空氣；一噴嘴620，供噴灑在該壓縮空氣生成裝置(未附圖示)所生成之壓縮空氣，惟該噴嘴620係整列於該成像裝置500之兩側，藉此集中噴灑於該檢測基片10。An optical detecting device according to a preferred embodiment of the present invention, wherein the air ejecting portion 600 includes: a compressed air generating device (not shown) for generating compressed air; and a nozzle 620 for spraying the compressed air to generate The compressed air generated by the device (not shown) is disposed on both sides of the image forming apparatus 500, thereby being concentratedly sprayed on the detecting substrate 10.
壓縮空氣生成裝置，係將透過過濾器等經由淨化過程進而去除粉塵等之清淨空氣，利用泵浦與相同壓縮裝置加以壓縮，進而供應至該噴嘴620。該壓縮空氣生成裝置與噴嘴620，可藉由軟管等相連，以接受壓縮空氣。The compressed air generating device supplies a clean air such as dust through a purification process through a filter or the like, and is compressed by a pump and the same compression device, and then supplied to the nozzle 620. The compressed air generating device and the nozzle 620 may be connected by a hose or the like to receive compressed air.
該噴嘴620，係以線型態配置，並以空氣窗簾(air curtain)方式將壓縮空氣噴灑於檢測基片10。此時，若其方向傾向其中一方，檢測片10可能因為發生局部扭曲而無法附著於檢測台100。因此，在彼此對望之方向進行檢測時，將壓縮空氣往檢測基片之一地點噴灑，藉此防止如上所述之局部扭曲現象，並且將檢測基片10固定於檢測台100。The nozzle 620 is disposed in a line shape and sprays compressed air on the detecting substrate 10 in an air curtain manner. At this time, if the direction is inclined to one of them, the detecting piece 10 may not be attached to the detecting table 100 due to local distortion. Therefore, when detecting in the direction opposite to each other, the compressed air is sprayed to a position of the detecting substrate, thereby preventing the local distortion phenomenon as described above, and fixing the detecting substrate 10 to the detecting stage 100.
本發明可藉由在僅使檢測基片10之邊緣作固定之狀態下，對未噴灑壓縮空氣之檢測基片10之X軸與Y軸之歪曲及高度偏差進行量測。The present invention can measure the distortion and height deviation of the X-axis and the Y-axis of the detecting substrate 10 which is not sprayed with compressed air in a state where only the edge of the detecting substrate 10 is fixed.
本發明亦可藉由在僅使檢測基片10之邊緣作固定之狀態下，利用一個噴嘴620將壓縮空氣噴灑於檢測基片10後，再對檢測基片10之X軸與Y軸之歪曲及高度偏差進行量測。The present invention can also distort the X-axis and the Y-axis of the detecting substrate 10 by spraying a compressed air onto the detecting substrate 10 by a nozzle 620 in a state where only the edge of the detecting substrate 10 is fixed. And the height deviation is measured.
本發明另可藉由在僅使檢測基片10之邊緣作固定之狀態下，利用兩側之噴嘴620將壓縮空氣噴灑於檢測基片10後，再對檢測基片10之X軸與Y軸之歪曲及高度偏差進行量測。In the present invention, the compressed air is sprayed on the detecting substrate 10 by the nozzles 620 on both sides in a state where only the edge of the detecting substrate 10 is fixed, and then the X-axis and the Y-axis of the detecting substrate 10 are detected. The distortion and height deviation are measured.
經量測後可知，高度偏差係在未噴灑壓縮空氣時，其值為324um，呈現最大，而由兩側一起噴灑壓縮空氣時，其值為96um，呈現最小；但以結果來論，當噴灑壓縮空氣時，其中尤其由兩側一起噴灑壓縮空氣時，可確認檢測基片10之平滑度量測結果非常優異。又，X軸與Y軸之歪曲現象，在未噴灑壓縮空氣時，X軸為650um，Y軸為659um，亦同樣呈現最大，而由兩側一起噴灑壓縮空氣時，X軸為119um，Y軸為123um，呈現最小。由此可確認，當由兩側一起噴灑壓縮空氣時，所測得檢測基片10之歪曲最小。After measurement, the height deviation is 324um when the compressed air is not sprayed, which is the largest, and when the compressed air is sprayed on both sides, the value is 96um, which is the smallest; but in the result, when spraying When compressed air is used, in particular, when compressed air is sprayed together from both sides, it can be confirmed that the smoothness measurement result of the detecting substrate 10 is excellent. Moreover, the distortion of the X-axis and the Y-axis, when the compressed air is not sprayed, the X-axis is 650 um, the Y-axis is 659 um, and the same is also the largest, and when the compressed air is sprayed from both sides, the X-axis is 119 um, the Y-axis. For 123um, it is minimal. From this, it was confirmed that when the compressed air was sprayed together from both sides, the distortion of the detected substrate 10 was measured to be the smallest.
本發明一較佳實施例之光學檢測裝置，其中，該噴氣部600，係包含有：一寬度調節部630，供調節該噴嘴620之間距；一噴灑角調節部640，供調節該噴嘴620之噴灑角度；一高度調節部650，供調節該噴嘴620之高度。An optical detecting device according to a preferred embodiment of the present invention, wherein the air ejecting portion 600 includes: a width adjusting portion 630 for adjusting the distance between the nozzles 620; and a spray angle adjusting portion 640 for adjusting the nozzle 620 Spray angle; a height adjustment portion 650 for adjusting the height of the nozzle 620.
首先，該框度調節部630係供調節依受檢測檢測基片10之領域大小呈並行排列之噴嘴620之角度。高度調節部650係供調節噴嘴620之高度者，供調節噴嘴620與檢測台100之間距較佳。然而，無論操作該寬度調節部630、噴灑角度調節部640或高度調節部650其中任何一種，皆可調節噴灑角度。First, the frame adjustment unit 630 is configured to adjust the angle of the nozzles 620 arranged in parallel according to the size of the area of the detection detecting substrate 10. The height adjusting portion 650 is for adjusting the height of the nozzle 620, and the distance between the adjusting nozzle 620 and the detecting table 100 is preferable. However, the spray angle can be adjusted regardless of any of the width adjustment portion 630, the spray angle adjustment portion 640, or the height adjustment portion 650.
本發明依較佳實施例之光學檢測裝置，該噴氣部600，係進一步包含有一調節閥(未附圖示)，供調節由該噴嘴620輸出之壓縮空氣量。According to the optical detecting device of the preferred embodiment of the present invention, the air jet portion 600 further includes a regulating valve (not shown) for adjusting the amount of compressed air outputted by the nozzle 620.
該調節閥，係藉由對壓縮空氣之噴灑量進行調節，進而調節施加於檢測基片10之壓力者。因此，倘若檢測基片10屬於細薄且易變形之素材，應減少壓縮空氣之噴灑量；反之，則應增加壓縮空氣之噴灑量，以使檢測基片10得以附著於檢測台100。The regulating valve adjusts the amount of pressure applied to the detecting substrate 10 by adjusting the amount of compressed air sprayed. Therefore, if the detecting substrate 10 is a thin and easily deformable material, the amount of compressed air sprayed should be reduced; otherwise, the amount of compressed air sprayed should be increased to allow the detecting substrate 10 to adhere to the detecting station 100.
第3圖，係本發明另一較佳實施例之光學檢測裝置結構圖。Figure 3 is a structural view of an optical detecting device according to another preferred embodiment of the present invention.
本發明一較佳實施例之光學檢測裝置，其進一步加設一感應器700，供感知由該噴氣部600噴灑之壓縮空氣是否正確噴灑於該檢測基片10受測之領域。The optical detecting device of the preferred embodiment of the present invention further includes an inductor 700 for sensing whether the compressed air sprayed by the air jet portion 600 is properly sprayed on the field to be tested of the detecting substrate 10.
該感應器700，係可由利用雷射之變位感應器所構成。因 此，感應器700藉由對其與受測檢測基片10之間距進行量測，進而掌握檢測基片10是否以平滑狀態附著於檢測台100，並檢出該噴氣部600所噴灑之壓縮空氣是否噴灑於正確位置。The inductor 700 can be constructed by a displacement sensor that utilizes a laser. because Therefore, the sensor 700 measures the distance between the substrate and the substrate 10 to be tested, and then detects whether the substrate 10 is attached to the detecting station 100 in a smooth state, and detects the compressed air sprayed by the air jet portion 600. Is it sprayed in the correct position?
本發明一較佳實施例之光學檢測裝置，係進一步包含一輔助光源800，其由該檢測台100之上方將光照射於該檢測台100上之檢測基片10。The optical detecting device according to a preferred embodiment of the present invention further includes an auxiliary light source 800 for illuminating the detecting substrate 10 on the detecting station 100 from above the detecting station 100.
該輔助光源800，係由該檢測台100之上部朝向檢測基片10照射光之照明裝置，加設於檢測基片10之上部，而其加設目的在於以備由該檢測台100下方所照射之背光單元400之光，受到該噴氣部600之阻隔，進而無法在該成像裝置500拍攝檢測基片10清晰影像之情形。The auxiliary light source 800 is an illuminating device that emits light from the upper portion of the detecting table 100 toward the detecting substrate 10, and is applied to the upper portion of the detecting substrate 10, and is added to be irradiated by the lower side of the detecting table 100. The light of the backlight unit 400 is blocked by the air ejecting portion 600, so that it is impossible to capture a clear image of the substrate 10 at the imaging device 500.
如上所述，本發明之光學檢測裝置，本發明之光學檢測裝置，其具有以下優點：As described above, the optical detecting device of the present invention, the optical detecting device of the present invention has the following advantages:
1.藉由使易變形材質所製之檢測基片加以精密固定，並將壓縮空氣分別噴灑於受測基片之個別領域，使其以平面擠壓狀態完成視覺檢測，進而提升檢測速度及達成更加穩定、更精確之檢測。1. By precisely fixing the detection substrate made of the easily deformable material and spraying the compressed air on the individual areas of the substrate to be tested, the visual inspection is completed in a plane extrusion state, thereby improving the detection speed and achieving More stable and accurate detection.
2.可使施加於檢測基片之物理衝擊最小化，同時可有效提升吸附固定力，藉以有效防止檢測基片之損傷及變形，並能夠進行穩定之檢測。2. The physical impact applied to the detecting substrate can be minimized, and the adsorption fixing force can be effectively improved, thereby effectively preventing damage and deformation of the detecting substrate, and enabling stable detection.
以上所述，僅為本發明之可行實施例，並非用以限定本發明之專利範圍，舉凡依據下列申請專利範圍所述之內容、特徵以及其精神而為之其他變化的等效實施，皆應包含於本發明之專利範圍內。The above is only a possible embodiment of the present invention, and is not intended to limit the scope of the patents of the present invention, and the equivalent implementations of other changes described in the following claims are intended to be It is included in the patent of the present invention.
以上，透過具體實施例詳細說明本發明，惟此乃為具體說明本發明所為，本發明真空吸盤並不受限於此；並且，由此可知，在本發明之技術思想內，凡具有本領域所屬通常知識者，便能夠變形或改良。The present invention has been described above in detail by way of specific embodiments. However, the present invention is not limited thereto, and it is understood that within the technical idea of the present invention, Those who belong to the usual knowledge can be transformed or improved.
本發明之單純變形乃至變更，均為屬本發明之所屬領悟者，本發明之具體報護範圍，藉由所附之申請專利範圍便更加明確。It is to be understood that the scope of the present invention is to be understood by the appended claims.
100‧‧‧檢測台100‧‧‧Testing station
200‧‧‧固定裝置200‧‧‧Fixed devices
300‧‧‧固定架300‧‧‧ fixed frame
400‧‧‧背光元件400‧‧‧Backlight components
500‧‧‧成像裝置500‧‧‧ imaging device
600‧‧‧噴氣部600‧‧·The Jet Department
620‧‧‧噴嘴620‧‧‧ nozzle
630‧‧‧寬度調節部630‧‧‧Width adjustment department
640‧‧‧噴灑角調節部640‧‧‧Spray angle adjustment
650‧‧‧高度調節部650‧‧‧ Height adjustment department
700‧‧‧感應器700‧‧‧ sensor
800‧‧‧輔助光源800‧‧‧Auxiliary light source
第1圖係本發明一較佳實施例光學檢測裝置斷面圖。BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a cross-sectional view showing an optical detecting apparatus according to a preferred embodiment of the present invention.
第2圖係第一圖之噴氣部示意圖。Figure 2 is a schematic view of the first part of the jet.
第3圖係本發明另一較佳實施例之光學檢測裝置結構圖。Figure 3 is a structural view of an optical detecting device according to another preferred embodiment of the present invention.
10‧‧‧檢測基片10‧‧‧Testing substrate
100‧‧‧檢測台100‧‧‧Testing station
200‧‧‧固定裝置200‧‧‧Fixed devices
300‧‧‧固定架300‧‧‧ fixed frame
400‧‧‧背光元件400‧‧‧Backlight components
500‧‧‧成像裝置500‧‧‧ imaging device
600‧‧‧噴氣部600‧‧·The Jet Department
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