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TWI354094B - - Google Patents

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Publication number
TWI354094B
TWI354094B TW094115584A TW94115584A TWI354094B TW I354094 B TWI354094 B TW I354094B TW 094115584 A TW094115584 A TW 094115584A TW 94115584 A TW94115584 A TW 94115584A TW I354094 B TWI354094 B TW I354094B
Authority
TW
Taiwan
Prior art keywords
measurement
measured
objects
head
axis
Prior art date
Application number
TW094115584A
Other languages
English (en)
Chinese (zh)
Other versions
TW200612078A (en
Inventor
Kazunori Tanaka
Original Assignee
Sinto S Prec Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sinto S Prec Ltd filed Critical Sinto S Prec Ltd
Publication of TW200612078A publication Critical patent/TW200612078A/zh
Application granted granted Critical
Publication of TWI354094B publication Critical patent/TWI354094B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8861—Determining coordinates of flaws

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Mathematical Physics (AREA)
TW094115584A 2004-10-15 2005-05-13 Two-dimensional coordinate measuring apparatus TW200612078A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004301769A JP4431479B2 (ja) 2004-10-15 2004-10-15 ２次元座標測定機

Publications (2)

Publication Number Publication Date
TW200612078A TW200612078A (en) 2006-04-16
TWI354094B true TWI354094B (ja) 2011-12-11

Family

ID=36381582

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094115584A TW200612078A (en) 2004-10-15 2005-05-13 Two-dimensional coordinate measuring apparatus

Country Status (4)

Country Link
JP (1) JP4431479B2 (ja)
KR (1) KR101234954B1 (ja)
CN (1) CN100498215C (ja)
TW (1) TW200612078A (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101480327B1 (ko) 2013-07-31 2015-01-08 한국해양과학기술원 해양 주상 시추 코어 시료 광학 촬영 자동화 시스템 및 촬영 방법
CN107560832A (zh) * 2017-09-06 2018-01-09 长春国科精密光学技术有限公司 测量系统及测量数字电影放映机光学参数的方法
CN109115129A (zh) * 2018-11-12 2019-01-01 江西丝安本精密制版有限公司 一种网版拉网角度测试装置及其使用方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004044966A1 (ja) 2002-11-13 2004-05-27 Sumitomo Heavy Industries, Ltd. 近接露光における位置合わせ方法と位置合わせ装置
JP4084653B2 (ja) 2002-12-26 2008-04-30 株式会社ブイ・テクノロジー 二次元測定機

Also Published As

Publication number Publication date
JP4431479B2 (ja) 2010-03-17
KR20060047748A (ko) 2006-05-18
CN1760634A (zh) 2006-04-19
CN100498215C (zh) 2009-06-10
TW200612078A (en) 2006-04-16
JP2006112961A (ja) 2006-04-27
KR101234954B1 (ko) 2013-02-19

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees